3 Vacuum Basic Concepts

Vacuum Techniques
Basic vacuum concepts
Dr. G. Mirjalili, Physics Dept. Yazd University

Vapor Pressure
• Terminology:
– Evaporation: when a liquid becomes a gas
– Sublimation: when a solid becomes a gas
– Vapor: the gas produced when a liquid or solid is
evaporated
– Condensation: when the vapor becomes a liquid
or solid again (condensed phases)
– Equilibrium: the state of any system in which
opposing forces balance each other
– Volatile: liquids that are easily vaporized - have
high vapor pressure
Vapor Pressure
• Evaporation occurs when:
– the temperature of the material is increased, OR
– the pressure at the surface of the material is decreased
• Vapor Pressure: the pressure at which a liquid or
solid becomes a vapor at a given temperature
– what happens to the vapor pressure as the temperature is
decreased?
• Outgassing: when a material in its condensed phase
becomes a vapor in a vacuum system at low
pressure.
– Extremely small quantities of water, solvents, or fingerprints
left in a chamber can outgas and increase the time it takes
to pump a system down.
Vapor Pressure
• Liquids in a closed
container will
evaporate until:
– partial pressure in
the air above the
liquid = vapor
pressure of the
liquid

Vapor Pressure

Vapor pressure of water at
various temperatures
T (O C) P (mbar)
100 (BOILING) 1013
25 32
0 (FREEZING) 6.4
-40 0.13
-78.5 (DRY ICE) 6.6 x 10 -4
-196 (LIQUID NITROGEN) 10 -24
Vapor Pressure
• Phase Diagrams:
– determine what
state a substance
will exist in at a
given temperature
and pressure
– example: water

Vapor Pressure
• Phase Diagrams:
– water metals
http://www.lsbu.ac.uk/water/phase.html

Vapor Pressure
• Examples:
– At what temperature does water boil when the pressure is
reduced to 1 torr?
– Are the condensed phases to the left or right of the lines?
– If a CVD system runs at 500C and 1 mT, which metals
would be a poor choice to build the chamber out of?
• The Moral of the Story:
– Vapor pressure must be considered when selecting
EVERYTHING that goes into a vacuum system.
– This includes seals, oil, chamber materials, valves, the
wafer, etc.

Gas Density (n)
Ideal Gas Law
PV = NkT
Gas density at 1 Pascal at room temp.
N/V = n = P/kT
= (1 N/m2)/(1.3807x10-23J/K)(300 K)
= [1 (kg-m/s2)/m2]/[4.1x10-21 kg-m2/s2]
= 2.4x1020 atoms per m3
= 2.4x1014 cm-3 …at 1 Pa
Rule of Thumb
n(T) = 3.2x1013 cm-3 x (300/T) …at a pressure of 1 mTorr

Mean free path(1)
average distance between molecular collisions in the gas
1 kT 5 × 10 3
λ= = = cm Or, =.0066/P (P mbar)
2σn 2 pσ p(Torr )
σ = molecular cross section ~ projected area of the molecule
(the last form of the equation is for air at 20oC)
p (Torr) ϕ (molec./cm2-s) λ
760 2.9x1023 67 nm
1 3.8x1020 51 µm
1x10-3 3.8x1017 51 mm
1x10-6 3.8x1014 51 m
1x10-9 3.8x1011 51 km
When λ > the smallest dimension of the flow path, the flow is free molecule,
If λ < apparatus dimension, the flow is viscous
Mean free path(2)
• Mean Free Path:
• MFP increases as the pressure decreases:

∀ λ (cm) ~= .005 / P (torr)
– at 1 atm, MFP = 0.02 microns
– at 1mT, MFP = 5.08 cm
– at 10-9 torr (UHV), MFP = 50 km
Mean Free Path vs. Pressure
1.00E+08
1.00E+06
MFP (cm)
1.00E+04
1.00E+02
MFP
1.00E+00
1.00E-02
1.00E-04
1.00E-06
1.00E- 1.00E- 1.00E- 1.00E- 1.00E- 1.00E+0 1.00E+0 1.00E+0
10 08 06 04 02 0 2 4
Pressure (Torr)

Mean free path(3)
Molecular density and mean free path
1013 mbar (atm) 1 x 10-3 mbar 1 x 10-9 mbar
# 3 x 10 19 4 x 10 13 4 x 10 7
mol/cm3 (30 million trillion) (40 trillion) (40 million)
MFP 2.5 x 10-6 in 2 inches 31 miles

6.4 x 10-5 mm 5.1 cm 50 km

Collisions and Mean Free Path
Gas Density
n = P/ kT
Cross-section
σ ~ πd2
λ = 1/σn
d
Rigorous Hard Sphere Collisions: λ = kT / √2 πd2P
  2.6 1015 cm 2 → λAr(cm) ∼ 8 / P (mTorr)

Ar Dr. G. Mirjalili, Physics Dept. Yazd University
Atom & molecule dimensions
• Atom dimension=3 A0
• Average molecule separation in at atm
perrsure :
In 1 cm3 nitrogen gas is 2.5 X1019
molecules so:
1/2.5X10 19= 4X10 -20 cm=34 A0

Average molecular separation
• At atmospheric Pressure:
• 2.5X10 19 molecules occupy 1 cm3;
• the volume of one molecules =1/2.5x10 19 =4x10 -20 cm3

• the length of each molecules =(4x10 -20 )1/3=3.4x10 -7 cm=34 A0
3 A0
34 A0

Impingement rate/flux, J per unit area,
surface incidence rate
nV
J=
4
8kT 8RT T
V= = = 145
πm πM M 1cm2
P
J=
(2πmKT )1 2
M = mN av
kN av = R
PN av
J=
(2πMRT )1 2
Maxwellian Distribution
The speed of molecules whose speed is
between v, v+dv
3 mv 2
m −
N (v) = 4πN ( ) v e
2 2 2 kT
2πkT
∞ ∞ 3 mv 2
m 2 2 − 2 kT
∫0 N ( v ) vdv ∫0 4πN (
2πkT
) v e vdv 3∞
4πN m 2 3 −λv 2 m
v= = = ( ) ∫ v e dv ⇒ λ =
N N N 2πkT 0 2kT
∞
1
∫v e
3 − λv 2
dv = 2
0 2λ
3
m 2 1 2kT 2 8kT
v = 4π ( ) × ( ) =
2πkT 2 m πm

vrms
∞ 3 − mv 2
m
∫ N (v)v dv
2
∫ 4πN ( 2πkT
) v 2e
2 kT
v 2 dv 3∞
4πN m 2 4 −λv 2 m
v =
2 0
= = ( ) ∫ v e dv ⇒ λ =
N N N 2πkT 0 2kT
3
m 2 3 π
v = 4π (
2
) ×
2πkT 8 λ5
3kT
v rms = v 2 =
m

dN (v)
=0
dv
3 − mv 2
dN (v) m d 2
= 4πN ( ) (v e 2 2 kT
)=0
dv 2πkT dv
3 − mv 2 − mv 2
m 2mv mv 2 2
4πN ( ) (2ve
2 kT
−v ×
2
e 2 kT
) = 0 ⇒ v(2 − v )=0
2πkT 2kT kT
2kT
vp =
m

Surface incidence rate
3/ 2
P (v )  m   − mv 2 
f (v ) = =  exp 
4πv  2πkT 
2
 2kT 
Average speed of an atom:

∞
_
8kT
< v > = c = ∫ v f (v)4πv dv = 2
0
πm
Flux of atoms to the x-y plane surface:
1
Γz = n < v z >= n ∫∫∫ v z f (v)dv = n < v >
3
vZ > 0
4
Very important!
(Campbell)
Surface incidence rate
rate at which molecules of gas strike a unit area of
surface
(also exit a vessel with a small orifice into a vacuum)
22
 p  8 kT p 3 . 5 × 10 p(Torr ) molecules striking surface
J = 14 nv = 14   = =
 kT  π m 2π mkT MT cm2 s
• n = molecular density in gas, molecules/cm3

• v = mean velocity of Maxwell Boltzmann distribution
• k = Boltzmann’s constant
• m = mass of molecule
• T = absolute temperature in Kelvins (K)
The numerical form is obtained by multiplying numerator

and denominator by Avogadro’s number, NAv, and noting
that NAvk = R, the gas constant and NAvm = M, the
molecular weight of the species in the gas
Example
A vacuum chamber has a base pressure of 10-6 Torr.
Assuming that this is dominated by water vapor, what is
the flux of H2O to a substrate placed in this chamber?
n = 3.2x1013 cm-3/mTorr * 10-3 mTorr = 3.2x1010 cm-3
<v> = (8kT/πM)1/2 = 59200 cm/s
Γz = (¼)n<v> = 4.74x1014 molecules per cm2 per sec!
This is approximately one monolayer of H2O every second

at 10-6 Torr base Dr.
pressure.
G. Mirjalili, Physics Dept. Yazd University
Equilibrium between a liquid and it vapor
P0
Jc = = J E
(2πmkT )12
P0= saturation vapor pressure

Collision frequency
• V=xt
• The average distance traveled in one second :
V=x(1)
• Collision frequency=V/l l= mean free path
• For N2 (at room temperature and atm pressure

• C.F=470/6.6x10 -6 =7.1x10 9 per second
• at low pressure C.F increase or decrease?

• At which pressure the C.F is 1 second?

n, J, l at various P for N2 at 295K
• P(mbar) n(m-3) I(M.F.P) J(cm-2 m-1)
103 -1 atm 2.5X10 25 6.6X10-6 2.9X10 23
1 2.5X10 22 6.6X10-3 2.9X10 20
10-3 2.5X10 19 6.6 cm 2.9X10 17
10-6 2.5X10 16 6.6 m 2.9X10 14
10-10 2.5X10 12 660 km 2.9X10 10

Outgassing
• The release of gas from internal surface
into the vacuum, occurs by desorption of
molecules from bound states on the solid
surface.
Outgassing
vacuum
Chamber wall
molecules
Absorbed
molecules
adsorption & absorpbtion
Adsorption Absorption
Adsorption > Absorption
Desorbtion = removing the molecules
q adsorption=15-32 kcal/mol q absorption =2-10 kcal/mol

Meam adsorption stay time
• Adsorb molecules have limited lifetimes on the
surface
• kT at room temperature is 1/40 eV
• Meam adsorption stay time is the avarege

lifetimes of an adsorbed molecules (τ)
• τ =10 -13 exp(q/kT)=10 -13 exp(40q)
• “De Boer equation”

Meam adsorption stay time
• Values of τ for various q at 295 K
q(eV) τ
0.2 3x10 -10
0.4 1µs
0.6 20 ms
0.9 400 s
1.1 1.2x 10 6 s (= 2 weeks)

Gasses and pumping
Adsorb molecules
Drifting molecules
Outgassing
pump

Gas flow and throughput
• Gas flow down a pipe
P1>P2
P1 A A` P2
Flow
Pressure is constant across any cross section

We define throughput as:
dV
Q=P = PV 0 mbar l s-1
dt
Q is constant down the pipe

Q is constant down the pipe
Usually, throughput is conserved. (Steady state
V2 V3
V1 Q Q Q
P1
P2 P3
Q = P1V`1=P2 V`2=P3V`3

Throughput (example)
Throughput: quantity of gas removed by pump per unit time:
Q = p(dV/dt) = pS (Torr-liter/s)
Q = P1S1 = P2S2
P2 = 100 P1 P1
P2
pump 1 pump 2
500 ℓ/s 5 ℓ/s

Mass flow rate and throughput
PV = NkT
dN PV P dV PV 0
= (d dt )( ) = ( )( ) =
dt kT kT dt kT
dN Q
=
dt kT
dN Q
m =m Mass flow rate
dt kT
Example: A fan moves atmospheric air through a room at rate
of 0.9 m3 per minute. What is the through in (mbar litter s -1)
Answer: 0.9 m3=900 l and V`=900/60=15 l s-1

Q = PV`=1000x15=15000

Speed
Where gas enters a pipe from a vessel and where it
emerges from the pipe to enter a pump . The
volumertic flow rates V` is defined as the speed
Pump speed: volume of gas taken in by the pump per
unit time
dV
P=
dt
dV
Q=P = PV 0 = P
dt
Q −1
S = ls
P

S and S*
S*
S Q
pump
vessel
S/S*=1 Perfect system

S*>S

Conductance
Conductance – gives the capacity of a tube to

allow a volume of gas pass from one end to
another in unit time
C=Q/(P1-P2)
P1 Q P2
P1>P2
P1-P2
Speed of pump at the vessel
C
S, P Q S*, P*
pump
Vessel
Q=SP
Q=C(P-P*)=SP=S*P*
S=S*[C/(S*+C)]
The relation between S, S*, C
Pumping Speed
• Pumping Speed and Conductance are related as
follows:
1 1 1
= + SEFF CT
Sp
S EFF S P CT
Seff is the effective pumping speed at the
chamber
Sp is the pumping speed (capability) of the pump
Ctotal is the total conductance of the system
between the chamber and the pump.

Vacuum system & electrical system
P1 P2
V1 V2
∆P
∆V
∆P ∆V
Battery =Pump
Q I ∆P=Q/C
C=1/Z
∆P=ZQ
C=Q/(p1-P2)
∆V=RI

Conductance
• Conductance: the ease with which a gas is drawn
through a vacuum component (pipe, valve, etc.)
– conductance is dependent on the diameter, length, and shape
of a pipe or orifice
• Conductance Units: volume/time

– liters/second
• Conductance can be the LIMITING
factor in a pumping system:
– Example: A pump that has a pumping
speed of 400 l/sec, that is pumping
through a conductance of 100 l/sec, is
reduced to an effective pumping speed
at the chamber of less than 100 l/sec.
Answer:
S*=400 l/sec, C=100 l/sec S=?
S=S*[C/(S*+C)]
S=400[100/(400+100)]= 80 l/sec
Viscous and Molecular Flow
Viscous Flow Molecular Flow

(momentum transfer (molecules move
between molecules) independently)
Flow regims
• Viscous Flow: “mob mentality”
– the type of gas flow that occurs when
gas molecules are so close together
that there are constant collisions
– mean free path is relatively short
– gas flows like a liquid from high
pressure to lower pressure
– predominantly in the rough vacuum
regime

Flow regims
• Molecular Flow: “loner mentality”
– the type of gas flow that occurs
when gas molecules’ direction of
movement is completely random
(not necessarily towards lower
pressure)
– there are few collisions between
molecules in the chamber
– mean free path is long
– predominantly in the high and ultra-
high vacuum regimes
• Knudsen Flow (or Transition Range)
– transition region between viscous and molecular flows
(some behaviors from both)
– medium vacuum regime
M
Flow Regimes
T
C V
(λ)
P
Mean Free Path
Viscous Flow: is less than 0.01
Characteristic Dimension
(d)
Mean Free Path

Transition Flow: is between 0.01 and 1
Mean Free Path

Molecular Flow: is greater than 1

Knuden`s Number
Viscous flow λ/d=1 Molecular flow

0.01
T.F
Flow Regims
• Which flow regime you are in determines the type of
vacuum hardware you will be using:
• Viscous Flow:
– displacement pumps: rotary vane, roots, diaphragm
– direct pressure gauges: manometers, bourdon tubes
– elastomer seals
– less limited by the conductance of the system
• Molecular Flow:
– momentum transfer or entrapment pumps: turbo, ion, cryo
– indirect pressure gauges: ion gauges
– metal seals
– VERY limited by the conductance of the system
• More on these later ...
Conductance in Viscous Flow(Long
Round Tube; air)
d p1 + p2 4
C = 1.38 × 10 × 2
l 2
C=lit/sec
d = diameter of tube in cm
l = length of tube in cm
P1 = inlet pressure in torr
P2 = exit pressure in torr
Conductance in Viscous Flow
Under viscous flow conditions doubling the

pipe diameter increases the conductance
Sixteen(16) times.
The conductance is INVERSELY related to
the pipe length

Viscous Flow
(Long Round Tube; nitrogen)
EXAMPLE:
d = 4 cm P1 = 2 torr
l = 100 cm P2 = 1 torr
d 4
p1 + p2
C = 1.38 × 10 2
×
l 2
256 3
C = 138 × ×
100 2
C=530 lit/sec
Conductance in Molecular Flow
(round long tubes)
Under molecular flow conditions doubling

the pipe diameter increases the conductance
eight times(×8).
The conductance is INVERSELY related to
the pipe length.
(Long Round Tube)
3
d T
C = 3.81 × × lit / sec
l M
d = diameter of tube in cm
l = length of tube in cm
T = temperature (K)
M = A.M.U.
(Long Round Tube)
EXAMPLE:
T = 295 K (22 OC)
M = 28 (nitrogen)
d3 T
C = 3.81 × × lit / sec
l M
d 3 295 d3
For Nitrogen C = 3.81 × = 12.36 × lit / sec
l 28 l
Example (Molecular flow):
T=295 K (22 C) d=4 cm
M=28 (Nitrogen) l=100 cm
3
d T
C = 3.81 × × lit / sec
l M
d 3 295 d3
C = 3.81 × = 12.36 × lit / sec
l 28 l
C=12.36x 0.64
C= 7.9 lit/sec

Calculation the usal pipes
conductance
Conductance in usual
pipes
(molecular flow)
C0
CL
C0 × C L
C pipe =
C0 + C L
Molecular flow conductance of an
aperture(1)
P2 ,
P1 , J1 J2 J2,
J1, n2
n1
dN
=( J 1 −J 2 ) A
dt
dN
Q =kT ( )
dt
P0
J =
( 2πmkT )1 2
kT RT
Q= A( P1 −P2 ) = A( P1 −P2 )
2πm 2πm
Molecular flow conductance of an
aperture(2)
Q = C ( P1 − P2 )
RT
Q= A( P1 − P2 )
2πm
RT
⇒ C0 = A Conductance of an aperture
2πm
C0=9.3 D2 l/s -1 for a circular aperture
Maximums speed of a pump:

S*=C inlet=C0= 9.3D2
Transmission probability
J1
J2
WJ1 A
WJ2 A
W ( J1 − J 2 ) A
× kT
Q = kT ( J1 − J 2 ) AW
kT RT
Q= AW ( P1 − P2 ) = AW ( P1 − P2 )
2πm 2πM
RT
C0 = A
2πM
⇒ Q = WC0 ( P1 − P2 ) ⇒ C pipe = WC0
Calculation of the C for Long and usual
pipes
Conductance in viscous flow (long pipes)
d 4
p1 + p2
C L = 1.38 × 10 2
× lit / sec
l 2
Conductance in molecular flow (long
pipes)
d3 T
C L = 3.81× × lit / sec
l M
Conductance in usual pipes (molecular flow)
C0 × C L
C pipe =
C0 + C L
Calculation the transmission probability
d 3 2πRT RT
CL = C0 = A
6L M 2πM
C0 × C L
C pipe =
C0 + C L
CL C0 CL
C pipe = = =
1 + C L C0 1 + 3L 4d 1 + 4d 3L
C pipe = WC0 ⇒ W=
1
1 + 3L 4d

Conductance

Series Conductance
RT = R1 + R2
SYSTEM
1 = 1 + 1
CT C1 C2
C1
1 = C 1 + C2
CT C1 x C2 C2
CT = C1 x C 2
C 1 + C2 PUMP

Pumping Speed
• Pumping Speed and Conductance are related as
follows:
1 1 1
= + SEFF CT
Sp
S EFF S P CT
Seff is the effective pumping speed at the
chamber
Sp is the pumping speed (capability) of the pump
Ctotal is the total conductance of the system
between the chamber and the pump.

1 1 1
= +
S1 C S2
D = diameter, in cm
L = length, in cm
P1, S1 C = conductance, in ℓ/s
D3
C connecting tube, conductance C ≅ 12 @ molecular
flow
P2 S2 L
example 1 example 2
pump D = 15 cm D = 10 cm
500 ℓ/s L = 20 cm L = 20 cm
C = 2025 ℓ/s C = 600 ℓ/s
S1= 401 ℓ/s S1= 273 ℓ/s
Pump is expensive. Tube is cheap.

Sample vacuum situations and calculations
S1
1/S1=1/C+1/S2
C S2
500 l/sec pump500 l/sec pump + 500 l/sec conductance two 500 l/sec pumps
“infinite” conductance connected in parallel
1/EPS = 1/500 + 1/500 = 2/500 l/sec
or EPS = 250 l/sec EPS = 500 + 500
EPS = 500 l/sec Dr. G. Mirjalili, Physics Dept. Yazd University
= 1000 l/sec
gas flow
3 torr-liter/sec throughput = pressure × pumping speed
Q=P×S
Problem:
If the effective pumping speed from a
maximum pressure
chamber is 100 l/sec and the chamber
0.03 torr
pressure must not exceed 0.03 torr,
what must the gas flow into (or the
EPS = 100 l/sec throughput out of) the chamber be ?
Solution:
maximum throughput = (100 l/sec)×
(0.03 torr),
or 3 torr-liter/second
throughput 3 torr-liter/second
as flow
1 torr-liter/sec
Problem:
Suppose the effective pumping speed
from a chamber is 250 l/sec and we wish
steady-state pressure to inject a gas flow of 0.1 torr-
4×10-4 torr liter/second flow of gas into the chamber.
What will the steady-state pressure be?
EPS = 250 l/sec
Solution:P=Q/S
0.1 torr-
= 4×10-4 torr
liter/second
250
throughput 0.1 torr-liter/second
liter/second
N2 flow standard cm3 per minute
Problem:
8×10-3 sccm A calibrated N2 leak of 8×10-3 sccm is
attached to a chamber and the
measured pressure is 1.5 ×10-6 torr.
What is the effective pumping speed of
the chamber in liters/sec?
“standard” = “atmospheric pressu
Solution:
chamber pressure
8×10-3 sccm = (8/60)×10-3 standard cc/sec
1.5×10-6 torr
= (8/60)×10-6 standard liter/sec
= 760×(8/60)×10-6 torr-liter/sec
EPS = 67 l/sec = 1.01 ×10-4 torr-liter/sec
We divide by the indicated pressure S=Q/pto get:
1.01 ×10-4 torr-liter/sec
1.5 ×10-6 torr -4
1.01x10 /1.5x10= 67 liters/se
-6
throughput 8×10-3 sccm

exercise
gas inlet, N2 gas inlet, O2

1x10-3 torr ℓ/s 1x10-4 torr ℓ/s
Chamber Chamber 2
1
pump 1 pump 2
100 ℓ/s Estimate:
500 ℓ/s
P(N2) in chamber 1
P(N2) in chamber 2
connecting tube
1 cm inner diameter P(O2) in chamber 1
10 cm length

Conductance Maximum or Minimum?
• Obviously, in most cases, we want to maximize
conductance.
• But sometimes, we DO want to limit conductance:
– Slow pumping to minimize pressure “shock” to the system.
– Throttling to maintain desired pressure in system.

Pumping Speed
• Pump speed: volume of gas taken in by the pump per unit time
• at the pressure of the pump inlet:
• S = dV/dt (in lit/sec), S ≠ f(p)
• Pumping Speed: the rate at which a vacuum pump removes

gasses from a system.
– Also known as volumetric flow rate
• Pumping Speed Units: volume/time

– liters/second or ft3/minute (CFM)
• Pumping Speed and Conductance are NOT synonymous

– Conductance is a property of
a component in a vacuum
system.
– Pumping Speed refers to the
flow of gas across a plane in
a system.
Basic equation of flow and pump speed
− VdP = SPdt − QT dt
dP QT
Steady state
+ V ( ) = − SP + QT ⇒
Pu =
dt S
dP S
= −( )dt
If QT= 0 p V
P = P0 exp{− t (V S )}
Re-expressed t = (V S ) ln( P0 P)
The time necessary for the pressure to fall from P0 to P

Pump down time
d PV
= −SP equation for the throughput
dt
dP S
P =− P
dt V
example
P = P0 e - t/τ
V = 1000 ℓ
t
V S = 500 ℓ /s
τ= τ=2s
S every 2.3 τ, 10 x pressure drop
Why in the real world, it takes much longer from 10-6 torr to 10-7 torr?
Surface outgas
Examples
1:
In a vacuum chamber, V=40 lit, and S=0.5 lit/s. what is the
time taken for the pressure to fall from P0=1000 mbar to
1 mbar?.
t= (40/0.5)ln 10 3=552 s= 9 min
2:
If a volume of 1m3 has to be pumped down from 1000
mbar to 10 mbar in 5 min what is the pump speed?
S=(V/t)ln(P0/P)
S=(1000/300)ln(10 2)=900 lit min -1 =5.4 m3 h-1
Gas Sources
• Outgassing: the natural
evolution of species
inside the chamber, at
low pressure,
contributing to the gas
load
– Sublimation of solid
chamber surfaces
– Desorption from the walls
of physically adsorbed
molecules
– Out-Diffusion of gas that
has been absorbed into
the grain boundaries of
the metal
– Vaporization
Dr. G.of liquids
Mirjalili, Physicsor
Dept. Yazd University
solids in the chamber with
Backstreaming(1)
•Movement of gases (including pump oil vapor) from pumps into the
vacuum chamber. It can be an important issue with diffusion pumps.
•Design of diffusion pumps can make some difference. Placement of a
continuous operation cold plate over the diffusion would be the best
solution, but it is rarely included in microprobe design.
•Oil diffusion pumps have a long history and are considered by many
to be less costly and easier to use in a multiple user facility.

Oil back streaming
PRESSURE LEVELS: LESS THAN 0.2 mbar

Backstreaming(2)
– an ideal pump only removes molecules and does not

give any back
– real pumps “regurgitate” some gasses back into the
system
• oil from diffusion pumps and rotary vane pumps
(draw)
– oil-based pumping systems are designed with
ballast, anti-suckback valves, and cold traps to
minimize backstreaming
– this is the primary reason for the gradual
replacement of oil-based pumps with “dry”
pumps

Pumpdown Curve
10+1
10-1
Volume
Pressure (mbar)
10-3
10-5 Surface Desorption
10-7
Diffusion
10-9
Permeation
10-11 1
10 10 3 10 5 10 7 10 9 10 11 10 13 10 15 10 17
Time (sec)

3 Vacuum Basic Concepts

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3 Vacuum Basic Concepts

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Vacuum Techniques

Basic vacuum concepts

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Gas density at 1 Pascal at room temp.

n(T) = 3.2x1013 cm-3 x (300/T) …at a pressure of 1 mTorr

Dr. G. Mirjalili, Physics Dept. Yazd University

• MFP increases as the pressure decreases:

Mean Free Path vs. Pressure

Dr. G. Mirjalili, Physics Dept. Yazd University

Molecular density and mean free path

1013 mbar (atm) 1 x 10-3 mbar 1 x 10-9 mbar

MFP 2.5 x 10-6 in 2 inches 31 miles

Dr. G. Mirjalili, Physics Dept. Yazd University

Rigorous Hard Sphere Collisions: λ = kT / √2 πd2P

  2.6 1015 cm 2 → λAr(cm) ∼ 8 / P (mTorr)

Dr. G. Mirjalili, Physics Dept. Yazd University

• the volume of one molecules =1/2.5x10 19 =4x10 -20 cm3

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Average speed of an atom:

• n = molecular density in gas, molecules/cm3

The numerical form is obtained by multiplying numerator

n = 3.2x1013 cm-3/mTorr * 10-3 mTorr = 3.2x1010 cm-3

<v> = (8kT/πM)1/2 = 59200 cm/s

Γz = (¼)n<v> = 4.74x1014 molecules per cm2 per sec!

This is approximately one monolayer of H2O every second

P0= saturation vapor pressure

Dr. G. Mirjalili, Physics Dept. Yazd University

• For N2 (at room temperature and atm pressure

• at low pressure C.F increase or decrease?

Dr. G. Mirjalili, Physics Dept. Yazd University

1 2.5X10 22 6.6X10-3 2.9X10 20

10-3 2.5X10 19 6.6 cm 2.9X10 17

10-6 2.5X10 16 6.6 m 2.9X10 14

10-10 2.5X10 12 660 km 2.9X10 10

Dr. G. Mirjalili, Physics Dept. Yazd University

q adsorption=15-32 kcal/mol q absorption =2-10 kcal/mol

Dr. G. Mirjalili, Physics Dept. Yazd University

• Meam adsorption stay time is the avarege

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Pressure is constant across any cross section

Dr. G. Mirjalili, Physics Dept. Yazd University

Usually, throughput is conserved. (Steady state

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Answer: 0.9 m3=900 l and V`=900/60=15 l s-1

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

S/S*=1 Perfect system

Dr. G. Mirjalili, Physics Dept. Yazd University

Conductance – gives the capacity of a tube to

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

• Conductance Units: volume/time