MICRO ELECTRO

MECHANICAL
SYSTEMS
Topics

•Introduction
•Brief History
•Electromechanical Systems
•MEMS
•Current Applications
Introduction
MST - Microsystems Technology (European)
MEMS – Micro electromechanical Systems
(U.S.)
Manmade devices created using compatible micro
fabrication techniques that are capable of
Converting physical stimuli, events and
parameters to electrical, mechanical & optical
signals
Performing actuation, sensing and other
functions
Logical Extension of microelectronics
and IC technology
integrating various sensing, computing
and actuating elements into a single chip
Consists of sensors, actuators, a power
supply, a central processing unit (CPU)
or microprocessor, and/or a
communication interface
 Manufactured onto semiconductor material
(Si, silicon carbide, metals, plastics)
 Used in automobiles, aerospace
technology, biomedical applications, ink
jet printers, wireless and optical
communications
 Range in size from a millionth of a meter
(micrometer) to a thousandth of a meter
(millimeter.)
Spider mite with legs on a mirror drive
assembly.
Electromechanical Systems

Conventional Electromechanical
Systems
Micro Electromechanical Systems
Nano Electromechanical Systems
MEMS Microstructure Fabrication

Deposition
Patterning
Etching
Microstructure Fabrication, Continued

Deposition -Structural layer

Oxidation, chemical- -Sacrificial layer

vapor deposition, ion

implantation
Pattern definition deposit

Photolithography

Removal pattern

Etching, evaporation

etch
MEMS manufacturing
technologies
 Bulk Micromachining
Surface Micromachining
High aspect ratio (HAR) silicon
micromachining
Deep reactive ion etching(DRIE)
MEMS Advantages

The advantages of MEMS devices include

Size
High sensitivity
Low noise
Reduced cost
Batch Processing
Key industry applications include
transportation, telecommunications and
healthcare.
Current Applications
Accelerometers
Micro Optical Electro Mechanical Systems (MOEMS)
Digital Mirror Devices (DMD) used in projection devices
Deformable mirrors
Optical Switches
Inkjet Print heads (Micro fluidics)
Pressure Sensors
Gyrometers
Magnetic RW heads for hard drives
 
Biomedical

Micro-arrayed biosensors
Virus detection
DNA Chip PCR (Polymerase Chain Reaction)
Neuron probes (nerve damage/repair)
Retina/Cochlear Implants
Micro Needles
ChemLab
Micro Fluidic Pumps
- Insulin Pump (drug delivery)
Detection systems

Hand held detectors – biological & chemical

microsensors
Chem’s Lab on a Chip (security applications)
Micro and Radio Frequency (RF) Switches
RFID Technologies
Modern “bar-coding” system increasingly used on
toll roads and materials handling applications
Data Storage Systems
IBM Millipede storage system – AFM tip writes
data bit by melting a depression into polymer
mediaum and reads data by sensing depressions.
References

Micro electronics by STPHAN A

CAMBELL
WIKIPEDIA