"Towards Safety Excellence": Improvement Area: Failure Analysis Laboratory

SYSTEMS ON SILICON MANUFACTURING CO.
PTE
LTD
A quick glance……..
 8 inch wafer foundry

 Producing deep sub-micron processes for complex logic chips &
Systems-on-chip
 Joint venture between NXP Semiconductor & TSMC
29 July 2008
By
Improvement Area :
Reactive Ion Etcher (RIE)
Failure Analysis Laboratory
“TOWARDS SAFETY EXCELLENCE”
seek discover observe interact experience learn develop acquire evolve pioneer achieve communicate share enlighten inspire navigate progress advance
Internal 1
Analysis Techniques
“JSA/PSO”
“HIRA” to identify hazards
for risk assessment
D1 : Define Team D3 : Implement D4 : Define D5 : Choose and D6 : Implement

Containment and Verify Verify Permanent Corrective
D2 : Describe Action Root Causes Corrective Action
Problem Action
Techniques to be used : D7 : Prevent

• 8D (Problem solving) “Fishbone “Brainstorming” Recurrence
Diagram” & “SCAMPER”

• HIRA (Risk assessment)
root cause technique
• Fishbone (Root cause analysis) analysis Idea generation
• Brainstorming & SCAMPER D8 : Congratulate
Team (Benefits)
technique (Generate ideas)
• JSA/PSO (Hazard identification)
Internal 2
8D Problem Solving Approach
D1 : Define Team
D2 : Describe the Problem
Internal 3
D1 : Define Team
•Facilitator
– Tan Seng Hin (FA Manager)
•Leader
– Oh Siew Khim (FA Assistant Engineer)
•Member
– Teresa Jee Meng Goak (FA Technician)
– Lee Sui Lan (FA Technician)
– CK Wong (Vendor)
Internal 4
D2 : Describe The Problem
•Annual review of FA lab activities

– Through JSA & PSO
• Identify new potential hazards
•New potential hazards identified on one activity

– “Clearance of condensed corrosive oil on RIE machine”
– Identified during PSO
– Hazard identification & risk assessment (HIRA) found the
risk to be high
Internal 5
Connected
•Background to acid
exhaust
Up to acid exhaust
Oil mist from
Corrosive oil mist RIE machine
(ph2 level) pump
condensed from
Transparent pipe to check
exhaust every few
accumulation ofweeks
oil
Oil accumulated
valve Reactive Ion
Etch (RIE)
Extension pipe machine
Valve to discharge oil
Installed a valve and

extension pipe for
clearing accumulated oil
Internal 6
•Background Procedure to clear accumulated corrosive oil
• Place chemical bag over pipe
• Open valve to discharge oil
• Wait for oil to fully discharge and stop dripping
• Close valve & clean pipe
Job Safety Analysis (JSA)

Steps Activities Potential hazard Control measure
1 Draw chemical resistance No potential hazard Nil

plastic bag
2 Place chemical plastic bag No potential hazard Nil
over pipe
3 Turn on valve to discharge oil Potential contact with Wear faceshield,
substance into plastic bag corrosive oil substance chemical apron,
resulting in burnt chemical glove and
safety shoe
4 Wait for oil to clear and stop No potential hazard Nil
dripping
5 Turn off valve No potential hazard Nil
6 Clean off oil residue on pipe Potential contact with Wear faceshield,
opening corrosive oil substance chemical apron,
safety shoe
7 Tie up chemical bag and Potential contact with Wear faceshield,
disposed into waste bin corrosive oil substance chemical apron,
safety shoe
Internal 7
Peer Safety Observation (PSO)
Steps Activities Potential hazard Control measure Compliance
1 Draw chemical resistance No potential hazard Nil Full
plastic bag
2 Place chemical plastic bag No potential hazard Nil Full
over pipe
3 Turn on valve to discharge oil Potential contact with Wear faceshield, Full
substance into plastic bag corrosive oil substance chemical apron,
safety shoe
4 Wait for oil to clear and stop No potential hazard Nil Potential backache
dripping (ergonomic) from prolong
bending
5 Turn off valve No potential hazard Nil Potential oil drip on floor due
to improper closure of valve
or faulty valve resulting in
slip & fall hazard. If corrosive
oil contact cable, possibility
of electrocution.
6 Clean off oil residue on pipe Potential contact with Wear faceshield,
opening corrosive oil substance chemical apron,
safety shoe
7 Tie up chemical bag and Potential contact with Wear faceshield, Potential oil drip on floor
disposed into waste bin corrosive oil substance chemical apron, causing slip & fall hazard if
resulting in burnt chemical glove and chemical bag is torn by
safety shoe sharp object.
3 potential hazards identified Internal 8

Prolong bending during

clearance resulting in
backache (ergonomic)
Oil drip on floor if

chemical bag torn by
sharp object resulting in
slip & fall
Internal 9
Improper closure or faulty

valve resulting in
corrosive oil substance
dripping on floor
(environmental pollution)
Power
cable
Corrosive oil Slip & fall hazard
substance contact resulting in physical
with live wires injury
resulting in
electrocution
Internal 10
SSMC Standard Risk Assessment Matrix

LIKELIHOOD
SEVERITY Consequences A B C D E
Frequent Likely Possible Rare Unlikely
1 One or More
Critical Critical High Medium Low
Catastrophic Fatalities
2 Disabling
Critical High Medium Low Low
Severe Injury/Illness
Medical
3 Treatment/Restricted High Medium Low Low Slight
Moderate Work Activity
4 First Aid Only Medium Low Low Slight Slight
Minor
5
No Injury Low Low Slight Slight Slight
Negligible
Need immediate attention !!

Internal 11
•Team Goals
– Reduce the risk of electrocution from critical to low.
– Reduce the risk of slip & fall from medium to low.
– Reduce the risk of backache from high to low.
– Timeline : 12 June 2008
Internal 12
Internal 13
D3: Implement and Verify Containment

Action
Internal 14
D3 : Containment Action
•Cover pipe opening with chemical bag to contain

unforeseen corrosive oil leak
– Slip & Fall
– Contact with live wires
•Procedure to check chemical bag before use & use

double bags
•Awareness briefing
– Straighten back when performing task (ergonomic)
– Personnel with backache problem not allowed to perform task
Internal 15
D3 : Containment Action
Containment actions Internal 16
D4: Define and Verify the Root Causes
Internal 17
D4 : Verify Root Causes
Material Method
Wrong material
Procedure not Potential hazards
updated on condensed oil
Environment Wrong PPE No safety
communication mist clearance
PPE, pipe, bag Incorrect safe
work activity
Dim Inferior Unreliable procedure
lighting No safe work
quality procedure
Space PPE, pipe, bag clearance bag
constraint Confuse safe Procedure too
work procedure manual
No PPE
No warning Did not follow

signs safe work
procedure
Do not know safe
Low working Reliability work procedure
height Did not use
PPE
Parts wear-out Capability Did not attend

(old injury, physical safety training
built)
Machine/ tool Man

Internal 18
Possible Root Cause Discussion Root Cause?
Man
Capabilty of staff to perform task (old injury, built) Personnel with back injury identified during safety N
briefing. Task perform do not depend on built.
Do not know safe work procedure Awareness training, OJT provided N
Did not follow safe work procedure New hire safety briefing, penalty system N
No safety training Safety training provided in orientation and OJT N
Machine/Tool
Low working height Not root cause if method of clearance can be changed N
Parts wear-out No incident of part wear-out causing incident N

No warning sign Warning sign presence N
Method
Procedure not updated Procedure review regularly at least once a year N
No safe work procedure Procedure include safe work procedure for all activities N
Incorrect safe work procedure Procedure are reviewed by generator, manager, dept N
manager
Confuse safe work procedure Procedure are reviewed by generator, manager, dept N
manager
Procedure depends too much on administrative Constant holding onto bag, need to ensure no oil Y
control, need constant staff involvement leak, etc
No safety communication Include in OJT N
Material
Wrong PPE Verification with vendor before purchasing N
Unreliable material (chemical bag) Chemical plastic bag possible to be torn when Y
contacted with sharp object
Inferior quality (pipe, PPE, chemical bag) Verification with vendor before purchasing N
Wrong material used (pipe, PPE, chemical bag) Verification with vendor before purchasing N
Did not check PPE Procedure include check PPE before use N
No PPE provided PPE provided for all hazardous activities N
PPE wear-out No incident of wear-out. PPE check before every use. N
Environment
Dim lighting Laboratory brightness is control, bright enough N
Space constraint Sufficient space to move around and perform task Internal
N 19
•Depend much on administrative control

Design engineering
– Personnel constant monitoring of procedure
• Constantly holding on to chemical bag during clearance
– Ergonomic (Low working height)
control solution
– Constant exposure to corrosive oil
• Constantly ensuring oil do not drip or leak onto floor during clearance
• Need to ensure valve is properly closed
• Need to monitor functionality of valve
•Unreliable material used
Review material used
– Chemical bag possibly torn by sharp object
in new solution
Internal 20
D5: Choose and Verify Corrective Action
Internal 21
Engineering solution criteria :
• Protection against electrocution
• Protection against slip & fall
• Protection against contact with corrosive oil
• Solve ergonomic issue
• No other hazard introduced
• Ease of use
• Ease of maintenance
Internal 22
.
Idea 1 Idea 2
Facility pipe Facility pipe
Clamp
funnel
Waste
container fit
Waste bottle direct to pipe
Internal 23
.
Idea 3
Facility pipe Facility pipe
Waste bottle
direct to pipe
Remove waste
bottle
Sitting block
Internal 24
Idea 4
Safety cabinet
Door
Collection Tray
Internal 25
SCAMPER TECHNIQUE
Substitute
Combine Adapt
Combine good
good ideas
Adapt Generated 1 ideas
Modify/Minify
GREAT
Put good
idea to
idea!!
Put to other use
Eliminate other use
Rearrange
Internal 26
Idea 2 Idea 1
Fit into facility pipe. Movable funnel
Waste
bottle
Combining idea 1 and 2 :

Movable pipe that fit into facility Movable pipe fit into
pipe and ability to slide in and out of facility pipe and to waste
waste bottle. bottle
• Corrosive oil flow direct into
waste bottle Waste
• Personnel has no direct bottle
exposure to oil
• Any leak is contained within the
piping into the bottle. Flooring
Internal 27
Idea 4 Prevent direct contact
with corrosive oil
At the same time, cover over facility

pipe
Safety cabinet
Adapt idea 4 safety design Movable pipe insert through hole with
cabinet design : shoulder resting on surface of cabinet
to prevent sliding down
• Concealed on all sides for
double protection
• Contain any unforeseen
spill within cabinet.
Flooring
Internal 28
Idea 4
Put to other use idea 4 collection

tray concept into containment tray
• Contain oil leak or spill e.g. if bottle is

Collection tray crack
Containment
tray
Flooring
Internal 29
Facility pipe
Movable pipe design with shoulder
Safety cabinet
Door
Waste
Containment bottle
tray
Flooring
Internal 30
How it works :
Corrosive oil substance
accumulation
Flooring
Internal 31
How it works :
Open valve
Oil flows through facility pipe

direct down to waste bottle via
movable pipe.
Waste
bottle
Flooring
Internal 32
How it works :
Close valve
Flooring
Internal 33
How it works :
Slide movable pipe up to

disconnect from waste bottle
Flooring
Internal 34
How it works :
Open door
Flooring
Internal 35
How it works :
Remove waste bottle, cap

it and dispose as Toxic
Industrial Waste
Flooring
Internal 36
How it works :
Replace
new
bottle
Flooring
Internal 37
How it works :
Slide movable pipe down to

connect to new waste bottle
Flooring
Internal 38
Advantages :
RIE Safety Cabinet Ease of use
• Ease of removing waste bottle
• User do not need to constantly perform and
monitor task
Engineering control
• Oil leak due to improper valve closure or faulty
valve is contained within cabinet and waste
bottle.
• Protect personnel (double protection besides
PPE)
• Overcome ergonomic problem
Easy to clean (detachable parts)
No new hazard introduced
RIE safety cabinet

Flooring
Internal 39
D6: Implement Permanent Corrective

Action
Internal 40
D6: Permanent Corrective Action
Facility pipe
Movable pipe
Safety cabinet
Door
Waste bottle
Containment tray
RIE Safety Cabinet User in operation during

installed to piping discharging oil
(Engineering Control)
Internal 41
Slide down
movable
Slide up pipe into
movable waste bottle
pipe
Replace new waste

bottle and slide pipe
into bottle
After discharging, slide Remove waste
up pipe bottle
Internal 42
Before Administrative
Before Potential oil
control
leak causing
hazards
After
After
Cabinet provide round the

clock protection to contain Engineering control
potential leak implemented
Internal 43
Protective cable cover for double

protection against potential contact
with corrosive oil
Internal 44
Steps Activities Potential hazard Control measure Ownership

1 Open valve to discharge No potential hazard Nil FA personnel
accumulated oil into waste
bottle
2 Wait for oil to clear and Potential contact with corrosive oil 1. Wear faceshield, chemical apron, FA personnel
stop dripping. Turn off substance resulting in burnt chemical glove and safety shoe.
valve. 2. Oil contained within piping and link
direct to waste bottle.
Oil drip on floor due to improper closure or Oil contained within piping and link FA personnel
faulty valve. Slip & fall hazard. direct to waste bottle. Secondary
container available.
Corrosive oil drip on floor due to improper Oil contained within piping and link FA personnel
closure or faulty valve. Contact with live direct to waste bottle. Secondary
wires resulting in electrocution container available. Cable cover
available.
3 Slide up pipe No potential hazard Nil FA personnel
4 Open door, remove and Potential contact with corrosive oil Wear faceshield, chemical apron, FA personnel
cap waste bottle, clean substance resulting in burnt chemical glove and safety shoe
pipe
5 Replace with a new waste No potential hazard Nil FA personnel
bottle and slide down pipe
Steps Activities Potential hazard Control measure Complianc

e
1 Open valve to discharge No potential hazard Nil Full
accumulated oil into waste
bottle
2 Wait for oil to clear and Potential contact with corrosive oil 1. Wear faceshield, chemical apron, Full
stop dripping. Turn off substance resulting in burnt chemical glove and safety shoe.
valve. 2. Oil contained within piping and link
direct to waste bottle.
Oil drip on floor due to improper closure or Oil contained within piping and link Full
faulty valve. Slip & fall hazard. direct to waste bottle. Secondary
container available.
Corrosive oil drip on floor due to improper Oil contained within piping and link Full
closure or faulty valve. Contact with live direct to waste bottle. Secondary
wires resulting in electrocution container available. Cable cover
available.
3 Slide up pipe No potential hazard Nil Full
4 Open door, remove and Potential contact with corrosive oil Wear faceshield, chemical apron, Full
cap waste bottle, clean substance resulting in burnt chemical glove and safety shoe
seek discover observe interact experience learn develop acquire
pipeevolve pioneer achieve communicate share enlighten inspire navigate progress advance
5 Replace with a new waste No potential hazard Nil Full
bottle and slide down pipe Internal 45
Eliminated
Nil
E Slight
E Slight
E Low
Effective measures reduced

Containment actions risks further Internal 46
D7: Preventive Actions
Internal 47
D7: Preventive Actions
• HIRA and safe work procedure updated and

Standardization communicated (502-225-0001)
• Yearly review of documents
Education & • Train current staff on use of RIE Safety Cabinet

Awareness • Train new staff in OJT program
• Weekly check on condition of RIE Safety Cabinet,

Monitoring
piping, valve and joints
Prevention is better than cure

Internal 48
D8: Benefits & Future Improvement
Internal 49
• Contribute to 0 EHS incident
• Engineering control over administrative control

– Risk of electrocution reduced from critical to low
– Risk of slip and fall reduced from medium to slight
– Risk of sustaining backache eliminated
• Innovative solution
– Simple & creative customized solution (not available commercially)
– Recognized as Best Known Method in SSMC innovation circle
• Easily replicated for solving problems similar in nature
• Environment & cost effectiveness

– Cabinet fabricate in-house from waste material
– Waste bottle recycle from disposed chemical container
seek discover observe interact – Eliminate
experience useacquire
learn develop of chemical bags
evolve pioneer which
achieve are disposed
communicate share enlightenafter
inspire used
navigate progress advance
Internal 50
Staffs acquired Learning : Important of
proper hazard regular review of
identification skill and activities to identify new
put into practise hazards
Cultivated safety Develop teamwork

mindset in workplace and bonding
(proactive behavior)
Cultivated innovative mindset

–Innovative solution can be simple and equally effective
Internal 51
Review for future improvement
Waste bottle holder to

prevent potential bottle
toppling
Waste
bottle
Flooring
Internal 52
Next Project and Plan
•Next project
– Prevent beaker toppling during chemical etching using hotplate
– Medium risk
Internal 53
That’s our journey towards
“Safety Excellence”
Internal 54
E – engineering control (no incidence)
D – PPE (once in 9 yrs). Partial eng.
C – Admin control (did not follow procedure)
Internal 57

"Towards Safety Excellence": Improvement Area: Failure Analysis Laboratory

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SYSTEMS ON SILICON MANUFACTURING CO.

 8 inch wafer foundry

D1 : Define Team D3 : Implement D4 : Define D5 : Choose and D6 : Implement

Techniques to be used : D7 : Prevent

Diagram” & “SCAMPER”

D2 : Describe the Problem

•Annual review of FA lab activities

•New potential hazards identified on one activity

Installed a valve and

Job Safety Analysis (JSA)

1 Draw chemical resistance No potential hazard Nil

3 potential hazards identified Internal 8

Prolong bending during

Oil drip on floor if

Improper closure or faulty

SSMC Standard Risk Assessment Matrix

Need immediate attention !!

– Reduce the risk of electrocution from critical to low.

– Reduce the risk of slip & fall from medium to low.

– Reduce the risk of backache from high to low.

– Timeline : 12 June 2008

D3: Implement and Verify Containment

•Cover pipe opening with chemical bag to contain

•Procedure to check chemical bag before use & use

D4: Define and Verify the Root Causes

No warning Did not follow

Parts wear-out Capability Did not attend

Machine/ tool Man

Parts wear-out No incident of part wear-out causing incident N

•Depend much on administrative control

D5: Choose and Verify Corrective Action

Facility pipe Facility pipe

Facility pipe Facility pipe

Fit into facility pipe. Movable funnel

Combining idea 1 and 2 :

At the same time, cover over facility

Put to other use idea 4 collection

• Contain oil leak or spill e.g. if bottle is

Movable pipe design with shoulder

Oil flows through facility pipe

Slide movable pipe up to

Remove waste bottle, cap

Slide movable pipe down to

RIE safety cabinet

D6: Implement Permanent Corrective

RIE Safety Cabinet User in operation during

Replace new waste

Cabinet provide round the

Protective cable cover for double

Steps Activities Potential hazard Control measure Ownership

Steps Activities Potential hazard Control measure Complianc

Effective measures reduced

D7: Preventive Actions

• HIRA and safe work procedure updated and

Education & • Train current staff on use of RIE Safety Cabinet

• Weekly check on condition of RIE Safety Cabinet,

Prevention is better than cure

D8: Benefits & Future Improvement

• Engineering control over administrative control

• Environment & cost effectiveness

Cultivated safety Develop teamwork

Cultivated innovative mindset