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PRACTICE
(High)Vacuum
Clean surface
HOW DO WE CREATE A
VACUUM?
Entrapment
Vacuum Pump
Kinetic
Vacuum Pump
Positive Displacement
Vacuum Pump
Rotary
Pump
Reciprocating
Displacement Pump
Drag
Pump
Diaphragm
Pump
Liquid Ring
Pump
Gaseous
Ring Pump
Piston
Pump
Rotary
Piston Pump
Turbine
Pump
Multiple Vane
Rotary Pump
Dry
Pump
Fluid Entrainment
Pump
Ion Transfer
Pump
Ejector
Pump
Liquid Jet
Pump
Diffusion
Pump
Diffusion
Ejector Pump
Sliding Vane
Rotary Pump
Axial Flow
Pump
Gas Jet
Pump
Rotary
Plunger Pump
Radial Flow
Pump
Vapor Jet
Pump
Roots
Pump
Adsorption
Pump
Cold Trap
Bulk Getter
Pump
Getter
Pump
Getter Ion
Pump
Sublimation
Pump
Self Purifying
Diffusion Pump
Evaporation
Ion Pump
Fractionating
Diffusion Pump
Sputter Ion
Pump
Molecular
Drag Pump
Cryopump
Turbomolecular
Pump
Condenser
BAROMETER
10.321
mm
WATER
760
mm
29,9
in
MERCURY
(Page 12 manual)
PRESSURE OF 1 STANDARD
ATMOSPHERE:
760 TORR, 1013 mbar
AT SEA LEVEL, 0O C AND 45O LATITUDE
Pressure Equivalents
Atmospheric Pressure (Standard) =
0
14.7
29.9
760
760
760,000
101,325
1.013
1013
GAS
Nitrogen
Oxygen
Argon
Carbon Dioxide
Neon
Helium
Krypton
Hydrogen
Xenon
Water
SYMBOL
N2
O2
A
CO2
Ne
He
Kr
H2
X
H2 O
PERCENT BY
VOLUME
78
21
0.93
0.03
0.0018
0.0005
0.0001
0.00005
0.0000087
Variable
(Page 13 manual)
PARTIAL PRESSURE
PASCAL
TORR
593
158
7.1
0.25
1.4 x 10-2
4.0 x 10-3
8.7 x 10-4
4.0 x 10-4
6.6 x 10-5
5 to 50
79,000
21,000
940
33
1.8
5.3 x 10-1
1.1 x 10-1
5.1 x 10-2
8.7 x 10-3
665 to 6650
T (O C)
100
(BOILING)
32
25
0
1013
(FREEZING)
6.4
0.13
-40
-78.5
(DRY ICE)
6.6 x 10 -4
-196
(LIQUID NITROGEN)
10 -24
(Page 14 manual)
(Page 15 manual)
(Page 15 manual)
PRESSURE RANGES
RANGE
PRESSURE
759 TO 1 x 10 -3 (mbar)
HIGH VACUUM
1 x 10 -3 TO 1 x 10 -8 (mbar)
(Page 17 manual)
GAS FLOW
CONDUCTANCE
(Page 24 manual)
Viscous Flow
(momentum transfer
between molecules)
Molecular Flow
(molecules move
independently)
FLOW REGIMES
Viscous Flow:
Distance between molecules is small; collisions between
molecules dominate; flow through momentum transfer;
generally P greater than 0.1 mbar
Transition Flow:
Region between viscous and molecular flow
Molecular Flow:
Distance between molecules is large; collisions between
molecules and wall dominate; flow through random motion;
generally P smaller than 10-3 mbar
(Page 25 manual)
1 x 10-3 mbar
1 x 10-9 mbar
#
mol/cm3
3 x 10 19
(30 million trillion)
4 x 10 13
(40 trillion)
4 x 10 7
(40 million)
MFP
2.5 x 10-6 in
6.4 x 10-5 mm
2 inches
5.1 cm
31 miles
50 km
FLOW REGIMES
Viscous Flow:
Transition Flow:
Molecular Flow:
Conductance in Viscous
Flow
Conductance in Molecular
Flow
Series Conductance
RT = R 1 + R 2
SYSTEM
1 = 1 + 1
CT
C1
C2
1 = C 1 + C2
CT
C1 x C2
C1
C2
CT = C1 x C2
C 1 + C2
PUMP
(Page 29 manual)
GAS LOAD
Outgassing
Permeation
Real
Leaks
Diffusion
Virtual
Backstreaming
Pumpdown Curve
10+1
Pressure (mbar)
10-1
Volume
10-3
10-5
Surface Desorption
10-7
Diffusion
10-9
10-11 1
10
Permeation
10 3
10 5
10 7 10 9 10 11 10 13 10 15 10 17
Time (sec)
Roughing Pumps
2
(Page 39 manual)
Entrapment
Vacuum Pump
Kinetic
Vacuum Pump
Positive Displacement
Vacuum Pump
Rotary
Pump
Reciprocating
Displacement Pump
Drag
Pump
Diaphragm
Pump
Liquid Ring
Pump
Gaseous
Ring Pump
Piston
Pump
Rotary
Piston Pump
Turbine
Pump
Multiple Vane
Rotary Pump
Dry
Pump
Fluid Entrainment
Pump
Ion Transfer
Pump
Ejector
Pump
Liquid Jet
Pump
Diffusion
Pump
Diffusion
Ejector Pump
Sliding Vane
Rotary Pump
Axial Flow
Pump
Gas Jet
Pump
Rotary
Plunger Pump
Radial Flow
Pump
Vapor Jet
Pump
Roots
Pump
Adsorption
Pump
Cold Trap
Bulk Getter
Pump
Getter
Pump
Getter Ion
Pump
Sublimation
Pump
Self Purifying
Diffusion Pump
Evaporation
Ion Pump
Fractionating
Diffusion Pump
Sputter Ion
Pump
Molecular
Drag Pump
Cryopump
Turbomolecular
Pump
Condenser
Rough Vacuum
High Vacuum
10-10
10-8
10-6
10-4
P (mbar)
10-2
10+2
1
2
3
3a
4
5
6
7
8
9
8
1
4
7
2
6
3a
3
(Page 44 manual)
Chamber
High Vac. Pump
Roughing Pump
Foreline Pump
Hi-Vac. Valve
Roughing Valve
Foreline Valve
Vent Valve
Roughing Gauge
High Vac. Gauge
(Page 45 manual)
Pump Mechanism
(Page 46 manual)
OIL BACKSTREAMING
(Page 48 manual)
Blower/Booster Pump
(Page 61 manual)
1
2
3
4
5
6
7
8
9
10
11
12
11
1
3
2
9
10
8
Chamber
Foreline
Roughing Valve
Roughing Gauge
Roughing Pump
Foreline
Foreline Valve
Foreline Gauge
High Vacuum Valve
Booster/Blower
Vent Valve
High Vacuum Gauge
6
5
(Page 62 manual)
(Page 54 manual)
Vapor Pressure
(Page 56 manual)
Cryo-condensation
Cryo-sorption
(Page 55 manual)
3
(Page 63 manual)
Entrapment
Vacuum Pump
Kinetic
Vacuum Pump
Positive Displacement
Vacuum Pump
Rotary
Pump
Reciprocating
Displacement Pump
Diaphragm
Pump
Liquid Ring
Pump
Piston
Pump
Rotary
Piston Pump
Multiple Vane
Rotary Pump
Dry
Pump
Drag
Pump
Fluid Entrainment
Pump
Liquid Jet
Pump
Diffusion
Pump
Diffusion
Ejector Pump
Sliding Vane
Rotary Pump
Axial Flow
Pump
Gas Jet
Pump
Rotary
Plunger Pump
Radial Flow
Pump
Vapor Jet
Pump
Roots
Pump
Ion Transfer
Pump
Ejector
Pump
Gaseous
Ring Pump
Turbine
Pump
Adsorption
Pump
Cold Trap
Bulk Getter
Pump
Getter
Pump
Getter Ion
Pump
Sublimation
Pump
Self Purifying
Diffusion Pump
Evaporation
Ion Pump
Fractionating
Diffusion Pump
Sputter Ion
Pump
Molecular
Drag Pump
Cryopump
Turbomolecular
Pump
Condenser
High Vacuum
Rough Vacuum
Roughing Pumps
Liquid Nitrogen Trap
Diffusion Pump
Turbo Pump
Cryo Pump
Ion Pump
Tit. Subl. Pump
10-12
10-10
10-8
10-6
10-4
P (Torr)
10-2
10+2
8
1
1 Chamber
2 High Vac. Pump
3 Roughing Pump
3a Fore Pump
4 Hi-Vac. Valve
5 Roughing Valve
6 Foreline Valve
7 Vent Valve
8 Roughing Gauge
9 High Vac. Gauge
4
8
22
6
3a
Pump Construction
(Page 66 manual)
Pumping Speed
Pumping Speed (Air)
Critical Point
1. Compression Ratio Limit
2. Constant Speed
3. Constant Q (Overload)
4. Mechanical Pump Effect
10-10
10--3
Inlet Pressure (Torr)
10--1
(Page 73 manual)
(Page 78 manual)
Gas
Water (H2O)
Argon (A)
Carbon Dioxide (CO2)
Carbon Monoxide (CO)
Helium (He)
Hydrogen (H2)
Oxygen (O2)
Neon (Ne)
Nitrogen (N2)
Solvents
(Page 79 manual)
10-22
500
10 -7
>760
>760
>760
350
>760
760
<10 -10
Turbomolecular Pump
INLET FLANGE
ROTOR BODY
STATOR BLADES
HIGH PUMPING SPEED
HIGH COMPRESSION
BEARING
EXHAUST
HIGH FREQ. MOTOR
BEARING
(Page 81 manual)
(Page 82 manual)
Pump Operation
Molecule
7
1
4
5
22
3
(Page 91 manual)
1
2
3
4
5
6
Chamber
Turbo Pump
Roughing Pump
Vent Valve
Roughing Gauge
High Vac. Gauge
Pumping by Cryocondensation
Cryosorption in charcoal
(Page 98 manual)
Charcoal placement
Gauges
5
(Page 123 manual)
Rough Vacuum
High Vacuum
Bourdon Gauge
Capacitance Manometer
Thermocouple Gauge
Pirani Gauge
Hot Fil. Ion Gauge
Cold Cathode Gauge
Residual Gas Analyzer
McLeod Gauge
Spinning Rotor Gauge
10-12
10-10
10-8
10-6
10-4
P (mbar)
10-2
10+2
Bourdon Gauge
Thermocouple Gauge
Ionization gauges
QUADRUPOLE
HEAD
CONTROL UNIT
(A)
RELATIVE INTENSITY
RGA SPECTRUM
H2 O
H2
NORMAL (UNBAKED)
SYSTEM
N2,, CO
CO2
MASS NUMBER (A.M.U.)
(B)
RELATIVE INTENSITY
RGA SPECTRUM
N2
SYSTEM WITH
AIR LEAK
H2 O
O2
H2
CO2
MASS NUMBER (A.M.U.)
LEAK DETECTION
9
(Page 249 manual)
Introduction
Permeation
Real
Leaks
Outgassing
Virtual
Backstreaming
Trapped Volumes
Vented Screw
Vacuum
Differential Pumping
Atmosphere
(1013 mbar)
Vacuum
To Pump
1 mbar
PERMEATION LEAKS
Permeation leaks are different
than real leaks because the only way
to stop them is to change to a less
permeable material
HELIUM
1
12
10
2
11
8
3
6
4
1
2
3
4
5
6
7
8
9
10
11
12
Test Piece
Test Port
High Vac. Pump
Roughing Pump
Fore Pump
RoughingValve
Test Valve
Pump Valve
Spectrometer Tube
Cold Trap
Roughing Gauge
Vent Valve
Ion Source
To Pre-Amplifier
Magnetic Field
Deflects He Ions
90O, other ions
more or less than
90O.
Lighter ions:
more
Collector
Heavier ions:
less
He ions pass
through slit and
are collected