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Depletion regime
Apply V > 0, hole depleted.
Apply V >> 0,
surface inversion occurs
Electrostatic analysis of an MOS structure. Shown are (a) the charge
density, (b) the electric field, (c) the potential and (d) the energy band
diagram for an n-MOS structure biased in depletion
Capacitance-Voltage relation for an n-channel (p
substrate) MOS capacitor. The dashed curve for V>V
T
is
observed at high measurement frequencies. When the
semiconductor is in depletion, the semiconductor
capacitance C
s
is denoted as C
d
MOS, voltage-independent gate oxide
capacitance (C
i
) and voltage-dependent
semiconductor capacitance (C
s
)
For negative voltages, when holes are
accumulated, it is like a parallel plate capacitor,
dominated by insulator properties
In depletion C
d
is added in series with C
i
s
s
s i i
d
dQ
dV
dQ
C /d C
,
/d C C
i i
d i
d i
i d
C C
C C
C /W C
Effects of Real Surfaces
1. Work function difference
Typical structure Al/Si, or n
+
-poly/Si not
as ideal.
m
(poly)
s
(Si), also
s
is
doping dependent
2. Interface charges at Si/SiO
2
interface
and within SiO
2
Figure 617
Variation of the metalsemiconductor work function potential difference
ms
with substrate doping concentration, for n
+
poly-Si.
Figure 618
Effect of a negative work function difference (
ms
< 0): (a) band bending
and formation of negative charge at the semiconductor surface; (b)
achievement of the flat band condition by application of a negative voltage.
Figure 619 Effects of charges in the oxide and at the interface: (a)
definitions of charge densities (C/cm
2
) due to various sources; (b)
representing these charges as an equivalent sheet of positive charge Q
i
at
the oxide-semiconductor interface. This positive charge induces an
equivalent negative charge in the semiconductor, which requires a negative
gate voltage to achieve the flat band condition.
Include both effects, flat band voltage V
FB
:
Since both effects tend to bend the energy
bands down at the semiconductor
surface, a negative voltage must be
applied to the metal relative to
semiconductor to achieve the flat band
condition.
Threshold Voltage
Now the threshold voltage is:
Where first two terms are for V
FB
, the
third for depletion layer charge, and the
last term is the voltage needed to induce
the strong inversion.
i
i
ms FB
F
i
d
T
C
Q
V
C
Q
V
2
'
FB T T
V V V
'
The expression can be used for both n
and p type substrate, though the signs
need to be adjusted.
Note: for p-channel: all -, V
T
< 0,
for n-channel: V
T
may go - or +.
6.5 MOSFET
In MOSFET control of current is through a thin Channel
Current flows from drain to source through this channel
I
D
-V
D
characteristics as a function of gate voltage, V
G
is
found.
Like JFET, I
D
remains constant above saturation
Cross-section and circuit symbol of an n-type Metal-Oxide-
Semiconductor-Field-Effect-Transistor (MOSFET)