Professional Documents
Culture Documents
Vinodh 09B21A0422
Lithography is basically a photographic process that allows more and more features to be crammed onto a computer chip.
.
The current process used to pack more and more transistors onto a chip is called deep-ultraviolet lithography
Boosting EUV Lithography Microchip production: technology of the future comes ever closer How EUVL chip making works Making Chips Moore's Law The EUVL Process Applying Uniform Thin Films The Mask-Making Challenge Outlook for EUV Lithography: Past, Present, and Future Conclusion
Use of transistors
The current process used to pack more and more transistors onto a chip is called deepultraviolet lithography
Using this lithography we can increase the memory chip storage also
Making Chips
1. 2. 3. 4.
Process
6. Moores Law
1965: Gordon Moore plotted the number of transistors on each chip Fit straight line on semi log scale Transistor counts have doubled every 18 months
1,000,000,000
Integration Levels SSI: MSI: LSI: VLSI: 10 gates 1000 gates 10,000 gates > 10k gates
10,000,000
Transistors
1,000,000 Intel386 100,000 8086 10,000 8008 4004 1,000 8080 80286
Intel486
1970
1975
1980
1985
1990
1995
2000
Year
The pattern on the mask is reflected onto a series of four to six curved mirrors, reducing the size of the image and focusing the image onto the silicon wafer. Each mirror bends the light slightly to form the image that will be transferred onto the wafer. This is just like how the lenses in your camera bend light to form an image on film.
One key requirement is to produce a mask with essentially no defects. Any small defect ends up being replicated, or printed, in the lithography process onto the computer chips being manufactured, thus damaging the chips complex circuitry. A key breakthrough in this area was the development of an Ultra Clean Ion Beam Sputter Deposition System about two years ago