Capacitive Humidity Sensor Presentation

Brett Nibbelink MECH 207: Mechatronics I Assignment #4 10/23/09

General Introduction
A capacitive humidity sensor changes its capacitance based on the relative humidity (RH) of the surrounding air. As the relative humidity increases the capacitance also increases.
Relative humidity is the percentage of actual vapor pressure (P) compared to saturated vapor pressure (Ps).
RH := P Ps 100%

Sensitivity: typically 0.2 - 0.5 pF / %RH [2] Capacitance: typically in the 100 500 pF range [2] Size: typically < .5 in wide [9]

Physical Principles
The capacitance is dependent on the dielectric constant () which is in turn dependent on the relative humidity and temperature (T) of the dielectric. (1) For moist air the dielectric is calculated by the equation shown on the right (2). In this equation has a linear relation to relative RH (shown as H). This shows that the capacitance then has a near linear relation to RH (3). Actual capacitive humidity sensors use different materials for the dielectric that changes significantly with the change in humidity and keep the linear quality.
Capacitance (pF)

C :=

o A d

(For a flat plate)

(1) (2) [1] (3) [1]

The material easily absorbs and releases moisture based on the surrounding RH. Common dielectric materials used are glass, ceramic, or silicon.

The graph to the right shows the relationship between the sensors capacitance and the RH for a typical sensor.

[9]
% RH

Implementation Details
In order to change the variable capacitance of the sensor into a usable voltage, a conditioning signal circuit will have to be used. The block diagram below shows a typical configuration for a capacitance sensor. The oscillator to relate the change in capacitance to a voltage. A low pass filter remove the oscillation frequency leaving the voltage response and gain amplifies the signal to the desired Vout range.

[9]

Implementation Details
An example of a capacitance humidity sensor circuitry is shown below.
The four switches oscillate simultaneously, charging and discharging the capacitors. Capacitor C1 adjusts the zero intercept for Vout. Potentiometers P1 and P2 give two points of adjustment by varying the voltage to C1 and the sensor. The two currents are summed before the amplifier. Capacitor C3 acts like an integrator for the signal

The input capacitance of the sensor and the output voltage can be seen on the graph

[1]

[1]

Common Applications
Green houses Used to monitor plant growing environment Industrial Printers Used to monitor the humidity level inside machine to reduce paper curl Museums Used to control strict environmental conditions for artwork

Challenges
Measuring RH <5% and >95%
Capacitance humidity sensor are approximately linear between 5% and 95% RH. Beyond these points special materials or signal conditioning are needed to below 5% or above 95%.

Fast Response Time

Most sensor do not have a very fast response time. Times range from about 5 sec. to 60 sec. depending on the sensor. This can result in a error in quickly changing humidity.

Limited range between senor and signal conditioning circuitry

Since the capacitance of the sensor is so small the signal conditioning circuitry should be located within 10 ft of the sensor to prevent noise problems [2].

Incorporating new technologies for creating better sensors

This includes using multi-walled carbon nanotubes as a dielectric in capacitive humidity sensor for better sensor performance and lower power consumption [5].

Additional Information

TECHNICAL 1 DATA
RELATIVE HUMIDITY SENSOR HS 1100 / HS 1101
1 2
Based on a unique capacitive cell, these relative humidity sensors are designed for high volume, cost sensitive applications such as office automation, automotive cabin air control, home appliances, and industrial process control systems. They are also useful in all applications where humidity compensation is needed.

FEATURES
Full interchangeability with no calibration required in standard conditions Instantaneous desaturation after long periods in saturation phase Compatible with automatized assembly processes, including wave soldering, reflow and water immersion (1) High reliability and long term stability Patented solid polymer structure Suitable for linear voltage or frequency output circuitry Fast response time Individual marking for compliance to stringent traceability requirements
(1) soldering temperature profiles available on request

HS 1100 Top opening

MAXIMUM RATINGS (Ta= 25C unless otherwise noted)

Ratings Symbol Value Unit
OPERATING RANGE
100 RELATIVE HUMIDITY IN %
ST

HS 1101 Side opening

PE AK CO

Operating Temperature Storage Temperature Supply Voltage Humidity Operating Range Soldering @ T = 260C

Ta Tstg Vs RH t

-40 to 100 -40 to 125 10 0 to 100 10

C C Vac % RH s

ND ITI ON

75

EA DY E AT ST

50

25

CHARACTERISTICS
(Ta = 25C, measurement frequency @ 10kHz unless otherwise noted)

0 -40

-20

20

40

60

80

100

TEMPERATURE IN C

Characteristics

Symbol

Min.

Typ.

Max.

Unit.

Humidity measuring range Supply voltage Nominal capacitance @ 55% RH* Temperature coefficient Averaged Sensitivity from 33% to 75% RH Leakage current (Vcc = 5 Volts) Recovery time after 150 hours of condensation Humidity Hysteresis Long term stability Response time (33 to 76 % RH, still air @ 63%) Deviation to typical response curve (10% to 90% RH)

RH Vs C Tcc

1 5 177 180 0.04 0.34 1 10 +/-1.5 0.5

99 10 183

% V pF pF/C pF/%RH nA s % %RH/yr s % RH

C/%RH
Ix tr

ta

5 +/-2

* Tighter specification available on request

HPC001 Rev. 7 June 2002

TECHNICAL 2 DATA
CHARACTERISTICS (CONTD)
Typical response curve of HS 1100/HS 1101 in humidity
205 200

195

190

capacitance (in pF)

185

Calibration data are traceable to NIST standards through CETIAT laboratory. Measurement frequency : 10kHz Ta = 25C

180

175

170

165

160 0 10 20 30 40 50 60 70 80 90 100

% RH

Polynomial response : C(pf)=C@55% * (1.2510 -7 RH 3 -1.3610 -5 RH 2 +2.1910 -3 RH+9.010 -1 )

Measurement frequency influence

RH in % RH

In this data sheet, all capacitance measurements are @ 10kHz. However, the sensor can operate without restriction from 5kHz to 100kHz. To calculate the influence of frequency on capacitance measurements :

C@fkHz=C@10kHz(1.027-0.01185Ln(fkHz)) Polarization
In order to get a better reproducibility during measurements, always connect the case of the header (pin 2) to the ground of the circuit. The case of the header is located on the opposite side of the tab.

Soldering instructions :

see the Application Note HPC007

PROPORTIONAL VOLTAGE OUTPUT CIRCUIT

Internal Block Diagram V out =V cc * (0.00474 * %RH+0.2354)
Reference Oscillator L.P. Filter Sensor Oscillator Gain Vout for 5 - 99% RH Typical temperature coefficient : +0.1% RH/C - From 10 to 60C
DEMO BOARD AVAILABLE ON REQUEST (REF HM1510)

Typical Characteristics for Voltage Output Circuit

At Vcc 5V - 25C RH Voltage (V)
HPC001 Rev. 7 June 2002

10 1.41

20 1.65

30 1.89

40 2.12

50 2.36

60 2.60

70 2.83

80 3.07

90 3.31

100 3.55

TECHNICAL 3 DATA
FREQUENCY OUTPUT CIRCUITS
COMMENTS
3.5 TO 12V

R2 576K

R4 49.9K R3 1K
FOUT

3 7

IC1
DC 2 TR TLC555 5 CV TH

This circuit is the typical astable design for 555. The HS1100/HS1101, used as variable capacitor, is connected to the TRIG and THRES pin. Pin 7 is used as a short circuit pin for resistor R4. The HS1100/HS1101 equivalent capacitor is charged through R2 and R4 to the threshold voltage (approximately 0.67Vcc) and discharged through R2 only to the trigger level (approximately 0.33Vcc) since R4 is shorten to ground by pin 7. Since the charge and discharge of the sensor run through different resistors, R2 and R4, the duty cycle is determined by :

t high = C@%RH * (R2+R4) * ln2 t low = C@%RH * R2 * ln2 F = 1/(t high +t low ) = 1/(C@%RH * (R4+2 * R2) * ln2) Output duty cycle = t high * F = R2/(R4+2 * R2)
To provide an output duty cycle close to 50%, R4 should be very low compared to R2 but never under a minimum value. Resistor R3 is a short circuit protection. 555 must be a CMOS version.

R1
909K

HS11XX
180p@55%RH

GND

BILL OF MATERIAL AVAILABLE ON REQUEST

REMARK
R1 unbalances the internal temperature compensation scheme of the 555 in order to introduce a temperature coefficient that matches the HS1100/HS1101 temperature coefficient. In all cases, R1 should be a 1% resistor with a maximum of 100ppm coefficient temperature like all other R-C timer resistors. Since 555 internal temperature compensation changes from one trademark to one other, R1 value should be adapted to the specific chip. To keep the nominal frequency of 6660Hz at 55%RH, R2 also needs slight adjustment as shown in the table.

555 Type
TLC555 (Texas) TS555 (STM) 7555 (Harris) LMC555 (National)

R1
909k 100nF capacitor 1732k 1238k

R2
576k 523k 549k 562k

For a frequency of 6660Hz at 55%RH

Typical Characteristics for Frequency Output Circuits

REFERENCE POINT AT 6660Hz FOR 55%RH / 25C RH Frequency 0 7351 10 7224 20 7100 30 6976 40 6853 50 6728 60 6600 70 6468 80 6330 90 6186 100 6033

Typical for a 555 Cmos type. TLC555 (RH : Relative Humidity in %, F : Frequency in Hz) Polynomial response :

F mes(Hz) = F55 (Hz) (1.1038-1.936810 -3 * RH+3.011410 -6 * RH 2 -3.440310 -8 * RH 3 )

Measurement Error vs Stray Capacitance

A special attention is required in order to minimize stray capacitance in the layout. The added capacitance will act as a parallel capacitance with the sensor and create a measurement error.

Error in %RH

10 8 6 4 33% RH 2 0 -2 -4 -6 -8 -10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 Stray capacitance (pF) Nominal Capacitance : 180pF Nominal Humidity : 55%RH Frequency Range : 0kHz to 25kHz 75.5% RH 97.5% RH 55% RH

12% RH

HPC001 Rev. 7 June 2002

TECHNICAL 4 DATA
QUALIFICATION PROCESS - HS1100/HS1101 sensors have been qualified through a complete qualification process taking in account many of the requirements of the MIL STD750 including : Solder heat and solderability Wave soldering at 260C + DI water clean at 45C Mechanical shock - 1500 g, 5 blows, 3 directions Vibration - Variable (F = 100 - 2000Hz), fixed (F = 35Hz) Constant acceleration Marking permanency ESD - Electrostatic Discharge - Human boby & Machine model Salt Atmosphere MIL STD750/Method 1041/96 hours Temperature Cycling - 40C / +85C High Temperature / Humidity Operating Life - 93%RH / 60C for 1000 hours Low humidity storage life - RH < 10%/23C - 1000 hours Resistance to immersion in water at ambient temperature and 80C - 160 hours Resistance to acid vapors at 75000 ppm for nitric, sulfuric and chlorhydric acids Resistance to many chemicals linked with home appliances/ automotive or consumer applications.

All these tests are regularly performed on different lots from production. More information are available on request Environmental and recycling information - HS1100/HS1101 sensors are lead free components - HS1100/HS1101 sensors are free of Cr (VI), Cd and Hg.

PACKAGE OUTLINE HS1100

Dim Min (mm) Max (mm)

Dim
B

Min (mm)

Max (mm)

E D

A B C D E G H J K

9.00 9.30 8.00 8.50 3.50 3.90 12.00 14.00 0.40 0.50 45 BCS 0.70 1.10 0.70 0.90 4.83 5.33

G H J

A B

E D

A B C D E G H J K
PACKAGE OUTLINE HS1101

9.70 10.20 5.70 6.20 0.40 0.60 12.00 14.00 0.40 0.50 45 BCS 0.70 1.10 0.70 0.90 4.83 5.33

G H J

ORDERING INFORMATION : HS 1100 : HPP 800 A 001 (MULTIPLE PACKAGE QUANTITY OF 50 PIECES) HS 1101 : HPP 801 A 001 (MULTIPLE PACKAGE QUANTITY OF 48 PIECES) CAPACITIVE RELATIVE HUMIDITY SENSOR.
SAMPLE KIT OF HS1100-HS1101 IS AVAILABLE THROUGH HUMIREL WEB SITE

www.humirel.com
email : sales@humirel.com
The information in this sheet has been carefully reviewed and is believed to be accurate; however, no responsability is assumed for inaccuracies. Furthermore, this information does not convey to the purchaser of such devices any license under the patent rights to the manufacturer. Humirel reserves the right to make changes without further notice to any product herein. Humirel makes no warranty, representation or guarantee regarding the suitability of its product for any particular purpose, nor does Humirel assume any liability arising out of the application or use of any product or circuit and specifically disclaims any and all liability, including without limitation consequential or incidental damages. Typical parameters can and do vary in different applications. All operating parameters, including Typical must be validated for each customer applications by customers technical experts. Humirel does not convey any license under its patent rights nor the rights of others. Humirel products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other application intended to support or sustain life, or for any application in which the failure of the Humirel product could create a situation where personal injury or death may occur. Should buyer purchase or use Humirel products for any such unintended or unauthorized application, Buyer shall indemnify and hold Humirel and its officers, employees, subsidaries, affiliates and distributors harmless against all claims, costs, damages and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of presonal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Humirel was negligent regarding the design or manufacture of the part.Humirel is a registred trade mark of Humirel.

HPC001 Rev. 7 June 2002

Pricing and Packaging

Pricing
Prices range between about $5.00 and $100.00 depending on what humidity range, operational temperature, response time, and accuracy. You can also pay more for a sensor that includes the interfacing circuitry within the package. [7] [8] HS1101 is $6.95

Packaging
On the right are the package layouts for both the HS1101 and the HCH-1000 humidity sensors. [9] [10]

References for more information:

[1] Fraden, J., Handbook of Modern Sensors: Physics, Designs, and Applications, 2004, Advanced Monitors Corporation, San Diego, CA, 92121 [2] Roveti, D., Choosing a Humidity Sensor: A Review of Three Technologies, Jul. 1, 2001, www.sensorsmag.com [3] Adrian, P., A Novel Conductive Humidity Sensor, Mar. 8 2007, www.sensorsmag.com [4] Relative Humidity Sensors, www.conservationphysics.org [5] Chen, W., Liu, X., Suo, C., Zhang, Z., Zhao, Z., A Capacitive Humidity Sensor Based on Multi-Wall Carbon Nanotubes (MWCNTs), Sensors 2009, 9, 7431-7444 [6] Hygrometer, www.wikipedia.com [7] www.Jameco.com [8] www.DigiKey.com [9] HS1100/HS1101 Technical Data Sheet, Mumirel, Rev June 7 2002 [10] HCH-1000 Technical Data Sheet, Honeywell, July 2007