Ieee Nems 2010 Accepted Papers

IEEE-NEMS 2010 Accepted Papers
Paper IDs 4
Title Trace Gas Sensor Based on MEMS Resonant Cantilever Investigation of Dielectric Charging and Discharging for Capacitive Micro-Actuators Investigation Based On MEMS Double Si3N4 Resonant Beams Pressure Sensor Comb Micro Resonator as Vacuum Gauge for Insitu Pressure Measurement in Microcavity Thermo-Oxidative Stability of Nano-SiO2 /Bismaleimide Composite Particles focusing using negative insulator-based dielectrophoresis MEMS Atomization based on Surface Acoustic Wave Power Device Deposition of Pd Nanoparticles on Ultrathin Al2O3 Films
Authors
Affiliation
Paper Status (Oral/ Poster/Invited) Oral
Ying Dong, Wei Gao, Zheng You Haisheng San, Xiaoshan Zheng, HaiSheng San, Haisheng San
Tsinghua University, China
Xiamen University, China
Poster
Xian JiaoTong University, China Long Wang, Wei Jiang, Weiguo Su, Xiaozhu Chi, Xin Wang, Jinwen Zhang Dongbing Geng, Liming Zeng, Yi Li
Poster
Peking University, China
Oral
Wuhan University of Technology, China
Poster
12
Cheng-Hsin Weng, Ching-Te Huang, ChunNational Chung Cheng University, Taiwan Poster Ping Jen Yang Gao, Yigui Li, Zhang Junfeng, Zhang Shanghai JiaoTong University, China Guan Qihui Wu, Tobias Petram, Conrad Becker, Klaus Wandelt La Trobe University, Australia Poster
13
14
Oral
17
Synthesis and Electroluminescence Properties of Sukon Phanichphant, Philaiwan Aiamsen, Polyfluorene Derivatives for Light-Emitting Diodes David Carroll Reconfigurable Logic Gate Implemented by Suspended-Gate Single-electron Transistors Bingcai Sui, Liang Fang, Yaqing Chi
Chiang Mai University, Thailand National University of Defense Technology, China Xi'an JiaoTong University, China
Poster
20
Poster
21
Structure Design On NEMS TiN Resonant Pressure Chuan Yang Sensors GaN-based LEDs with ITO Electrode Patterned by Imprint Lithography ZnSe/ZnCdSe Heterostructure Nanowire Photodetectors Shoou-Jinn Chang, K. T. Lam
Poster
22
National Cheng Kung University, Taiwan
Oral
23
Oral
24
Hydrogen Sensors Based on ZnO Nanoparticles Pd-doped SnO2 Nanoparticles Synthesized by Precipitation/Thermal Decomposition Methods Synthesis and Characterization of Fe-doped CeO2 Nanoparticles and Their Photocatalytic Activity Effect of Cu and Ni Doping on the Structure and Magnetic Properties of FePt Nanoparticles Fabrication of Dome-Shaped Flexible Electrode Arrays for Retinal Prostheses Critical Dimensions of Directional Couplers
Thanittha Samerjai, Rapiphun Janmenee, Chaikarn Liewhiran, Anurat Wisitsoraat, Sukon Phanichphant Rapiphun Janmenee, Thanittha Samerjai, Chaikarn Liewhiran, Sukon Phanichphant Duangdao Channei, Natda Wetchakun, Chawarat Siriwong, Sukon Phanichphant Shih-Wen Yung, J. S. Lin, S. P. Ju Xiaona Sun, Gang Li, Zhuanghui Zhu, Hongbo Zhou, Janlong Zhao Shuming Yang
Chiang Mai University, Thailand
Oral
25
Poster
26
Oral
27
National United University, Taiwan Shanghai Institute of Microsystem and Information Technology, CAS, China University of Huddersfield, United Kingdom
Poster
29
Oral
30
Poster
31
Design of an Integrated Optical Isolator
Shuming Yang
Oral
32
Miroslav Belov, Csaba Guthy, Nathaniel Nanomechanical Resonator Arrays for the Specific Quitoriano, Theodore Kamins, Stephane Detection of Proteins Evoy Flame-made Nb-doped Zinc Oxide Nanoparticles for Application in Polymer Solar Cells Viruntachar Kruefu, Sukon Phanichphant
University of Alberta, Canada
Oral
33
Oral
34
Design and Simulation of Two Z-axis Microgyroscopes with Different Types of Decoupled Xin Yan, Lingjuan Che, Xuyuan Chen Structures Torsion of an Eccentrically Two-Phase Circular Nanobar Ladan Pahlevani, Hossein Shodja
Poster
35
Sharif university of technology, Iran
Poster
36
Analysis of Coupled Electro-Thermal-Mechanical of Mingliang Shao, Mingliang Shao, Zhen\'An Micro Gas Pressure Sensor Based on MicroDalian university of technology, China Tang, Jiaqi Wang hotplate Simulation and Design of Grooved Fibers for FiberChing-Te Huang, Chun-Ping Jen Optic Localized Plasmon Resonance Biosensors Design and Simulation of a Capacitive Vibration Energy Converter based onRadioisotope 63Ni Yanfei Li, Zaijun Cheng, Haisheng San, Yingxian Duo, Xuyuan Chen
Poster
37
National Chung Cheng University, Taiwan Poster
39
Poster
40
Layer-by-Layer Deposition of Polyelectrolyte Ultrathin Films System Error Analysis and Modeling of MEMS Close-loop Capacitive Accelerometer
Paralee Waenkaew
Poster
41
Gang Dai, Mei Li, Wei Su, Beibei Shao
Institute of Electric Engineering, China
Poster
43
Synthesis and Characterization of Novel ZnS/CeO2 Natda Wetchakun, Khatcharin Wetchakun, Chiang Mai University, Thailand Nanocomposites Sukon Phanichphant Fabrication of Flexible Micro Flow Sensor for use in Chi-Yuan Lee, Chi-Chung Chang, ChenMicro Reformer Hen Lin Micro Voltage Sensor based on Parylene Thin Film Chi-Yuan Lee, Pin-Cheng Chan, Ren-De Substrate for Monitoring PEMFCs Huang Flexible Micro Sensors based on Stainless Steel Foil for Monitoring PEMFCs Fabrication of Micro Humidity Sensor with Polypyrrole Using the CMOS Process Rapid Purification of Anti-SARS-CoV Protein N Antibody by Magnetic Microspheres Modeling and Thermal Analysis of Silicon Infrared Emitter Based on SOI wafer Fluorescence Imaging with Biocompatible Quantum Dot Bio-probes Signal Extraction of Micro-mechanical Gyro Preparation of Ni Current Collector and MoS2 Cathode in Three-Dimensional Li Ion Microbattery Based Robust Control of Nonlinear MEMS Optical Switch Based on Quantitative Feedback Theory Investigations of Bio Markers for Human Lymphoblastoid Cells Using Atomic Force Microscopy Chi-Yuan Lee, Wei-Jung Hsieh, Wei-Yuan Fan Ching-Liang Dai, De-Hao Lu Yuxi Yu, Wei Hong, Hong-Jian Xu, XianQiao Liu Kun Qian, Fangqiang Li, Xuyuan Chen, Haisheng San Jin Soo Kim, Jun Ki Kim, Dong Kwan Lee, Kang Moo Huh, Yong-Kyu Lee Yang Jinxian Yuan Ze University, Taiwan
Oral
45
Poster
46
Yuan Ze University, Taiwan
Oral
47
Oral
48
National Chung Hsing University, Taiwan Oral
49
xiamen university, China
Oral
52
Poster
53
Chungju National University, Korea
Oral
54
Henan Plpytechnic University, China
Poster
55
Liu Tao, Li Sun, Jia Lai, Lianwei Wang, East China Normal University, China Zhouguang Lu, Jonathan Chung, Paul Chu Keivan Torabi, Mehdi Vali, Behrouz Ebrahimi, Mohsen Bahrami Uniersity of Kashan, Iran
Oral
56
Oral
57
Ruiguo Yang, Carmen Kar Man Fung, King Wai Chiu Lai, Ning Xi, Kristina SeiffertMichigan State University, USA Sinha, Weijing Zhang
Oral
58
SWCNTs Modified Glassy Carbon Electrode for Electroanalytical Determination of Dopamine Residual Stress Characterization of GaN Microstructures Using Bent-beam Strain Sensors Fabrication of Spinneret for Spinning Non-circular Microfiber Design and simulation of MEMS-based CPW-fed unidirectional A Quadruple-anchored RF-MEMS Switch for Switched-line Phase Shifters Nanofabrication and characterization of ZnO branched nanorods by two-step chemical bath method Fabrication Method of Multiple Microchannel Reactor Using Multi-cutter Milling Mechanical Characterization of a Bistable MEMS Mechanism with Torsion/Cantilever Beams Structure Optimization of Polymeric Out-of-plane Eletrothermal Actuator Frequency Response Enhancement Using Mechanically-coupled Synchronized Resonators High-speed Non-cryogenic Cooled Infrared Sensors Using Carbon Nanotubes Micro Fixture Enabled In-Situ Imaging and Manipulation of Cell Membrane Protein
Sopis Chuekachang, Sukon Phanichphant, Chiang Mai University, Thailand Viruntachar Kruefu Jianan Lv, Zhenchuan Yang, Guizhen Yan, Yong Cai, Baoshun Zhang, Kevin J. Chen Jifeng Cheng Peking University, China
Poster
61
Oral
62
Shanghai Jiaotong University, China
Oral
63
Jifeng Cheng, Zhijuan Su
Shanghai JiaoTong University, China
Poster
64
Faheng Zang, Guifu Ding, Zhijuan Su, Jun Shanghai JiaoTong University, China Tang, Min Deng Yi-Mu Lee, Chun-Hung Lai Li Xuemei, Zeng Dehuai, Pan Minqiang, Tang Yong Yibo Wu, Juan Wang, Xiaobo Zhang, Congchun Zhang, Guifu Ding Juan Wang, Yibo Wu, Congchun Zhang, Guifu Ding Ding Dong F. Wang King Wai Chiu Lai, Ning Xi, Carmen Kar Man Fung, Hongzhi Chen National United University, Taiwan South China University of Technology, China Shanghai Jiaotong University, China
Poster
65
Oral
68
Oral
69
Oral
70
Poster
73
Ibaraki University, Japan
Oral
74
Michigan State University, USA
Oral
76
Carmen Kar Man Fung, Ruiguo Yang, Kristina Seiffert-Sinha, King Wai Chiu Lai, Michigan State University, USA Ning Xi, Animesh A. Sinha
Oral
79
Nonideal Fabrication Effect on Dilution Shiying Wang, Ning Ji, Wei Wang, Zhihong Performance of Microfluidic Concentration Gradient Peking University, China Li Generator Flexible Hot Film Sensor Array for Underwater Applications Jinzhong Ren, Ma Bing-He, Yanguang Xu, Jinjun Deng, Yuan Wei-Zheng Northwestern Polytechnical University, China
Oral
80
Oral
82
Boiling Simulation of Micro-channel/micro-jet Model with Dimensional Change A CMOS-MEMS Nano-Newton Force Sensor for Biomedical Applications
Li Zongshuo, Wang Xiaojing, Liu Hongjun, Zhang Wen Mohd Haris Md Khir, Hongwei Qu Oakland University, USA
Poster
83
Oral
84
85
86
PDMS Microlens Fabricated for Compact Disk Enzyme-Linked Immunosorbent Assay (CD-ELISA) Wen-Wai Lee, Kuan-Ju Tseng, Ju-Nan Kuo Applications Yick Chuen Chan, Chun Cheong Wong, Design and Fabrication of a MEMS Scanning Mirror Congshun Wang, Wei Ma, Ho-Yin Chan, with and without Comb Offset Shoulung Chen, Hon Lung Cheung, Francis Chee Shuen Lee, Chen-Jung Tsai A novel triode-type CNT field emission microMin Deng, Guifu Ding, Yan Wang, Faheng cathode fabricated by electrochemical Zang micromachining Integrated Single-Beam Optical Tweezer and Planar Curved Grating for Multiple Optical Traps A Large Uniform Monolayer Area Obtained by Droplet Evaporation in Microwells Nano-mechanical Behavior of Low Temperature Electroplated Nano-crystalline Ni Films Beam Combination Using Near-Zero Index Metamaterials IP Library-Based General And Visualized MEMS Device Simulation And Verification Tool Ultra-thick SU-8 Process for Microfabrication of Terahertz Folded Waveguide Circuit Fabrication and Performance of Microplasma Reactor for Maskless Scanning Plasma Etching Ju-Nan Kuo, Kuan-Yu Chen
National Formosa University, Taiwan Hong Kong Applied Science and Technology Research Institute Company Limited, Hong Kong
Oral
Oral
Oral
87
National Formosa University, Taiwan
Oral
89
Yu-Ying Lin, Da-Jen Yao, Fangang Tseng
Oral
90
W.T. Chang, Chen-Kuei Chung Wang Xingping, Zeyu Zhao, Ren Hao, Chongxi Zhou Li Xin, Xin Zhao, Guizhang Lu
Poster
92
Institute of Optics and Electronics, China Poster
93
Poster
94
Ruilin Zheng, Wei Sun, Xuyuan Chen Qiuping Zhang, Wen Li, Weiwei Xiang, Jiaru Chu
Poster
98
99
The Experimental Model of Micro-Cantilever Switch Y. C. Xiao, Z. Y. Sun, F.M. Guo and its Optimization Model Carbon Nanotubes Deposited on the Surface of Fe- Baomin Sun, Yuanchao Liu, Zhaoyong Ni Alloy by Pyrolysis Flame Ding, Huifu Zhao, Wei Li
East China Normal University, China North China Electric Power University, China
Poster
100
Poster
101
Synthesis of Bamboo-like Carbon Nanotubes Using Yuanchao Liu, Baomin Sun, Zhaoyong the Pyrolysis Flame Ding, Wei Li Dried Nanoparticle Label Reagents for Microfluidic Immunoassays Development of Piezoelectric PZT Thin Film Actuators for MEMS Variable Optical Attenuator Computational Study of Biochemical Sensing based on Photonic Crystals Nano-ring Resonators Research of Thermal Reliability on Multi-chip Module Packaging for Novel Photoelectric Sensor Joose Kreutzer, Pekka Lehtinen, Lasse Vlimaa, Pasi Kallio Chengkuo Lee, Takeshi Kobayashi, Fu-Li Hsiao, Kah How Koh, Wenfeng Xiang Fu-Li Hsiao, Chengkuo Lee
North China Electric Power University, China Tampere University of Technology, Finland National University of Singapore, Singapore National University of Singapore, Singapore East China Normal University, China National university of Defense Technology, China Mahidol University, Thailand
Poster
102
Oral
104
Oral
105
Oral
106
Y. P. Wang, Y. C. Ye, F.M. Guo
Poster
107
TbDyFe Deposition Experiments by Evaporation on Dong Peitao, Wang Haoxu, Zhang Qi, Wu Fiber Optic Xuezhong, Pan Mengchun Fabrication of Micropattern Grating Platform for Sensing Bio-molecule Interaction DNA-Grafted-Polymer Mediated Self-Assembly of Micro Components Sidewall Arris Flatting Process in Quartz Wet Etching Experiment Parylene-coated NMOSFET-Embedded Cantilevers for Surface Stress Sensing in Liquid Environment Fabrication of Microlens Array based on Multiple Plane Waves Interference The Effects of Acetone for Photosensitive Carbon Nanotube Film Design, Modeling and Fabrication of Selftestable/Self-calibratable High-g Capacitive Microaccelerom An Experimental Study on Imaging Burkitts Lymphoma Cells by Atomic Force Microscopy Naphat Chathirat, Nithi Atthi, Charndet Hruanun, Amporn Poyai, Tanakorn Osotchan, Somsak Dangtip Guillermo Lopez, Tomoki Tanemura, Ryo Sato, Takahiro Saeki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Masahiro Fujita, Mizuo Maeda Haoxu Wang, Liqiang Xie, Xuezhong Wu, Shengyi Li Wang Jian, Huang Ying, Wengang Wu, Yilong Hao Li Gaoming, Liu Shou, Liu Guohua, Qiu Yishen, Chen Xiaoyun Yu June-Wan, Woo-Sung Cho, Yang Doo Lee, Byeong-Kwon Ju Kai Li, Wenyuan Chen, Weiping Zhang, Fen Cui, Gaoying Ma Li Mi, Lianqing Liu, Ning Xi, Yuechao Wang, Zaili Dong, Guangyong Li, Xiao Xiubin, Yuan Shunzong, Weijing Zhang
Poster
108
Oral
109
Kyoto University, Japan National University of Defense Technology, China Peking University, China
Oral
110
Oral
111
Oral
113
Poster
114
Korea University, KOREA
Oral
115
Shanghai JiaoTong University, China Shenyang Institute of Automation, CAS, China
Poster
116
Oral
117
Gas Sensor Array Based on Surface Acoustic Wave Mei-Ching Chen, Hsu-Chao Hao, Je-Shin Devices for Vapors Detection and Ananlysis Chao, Da-Jen Yao Effect of ss/ds-DNA Immobilization on Pentacene Thin Film Transistor Jung-Min Kim, Gi-Sung Joo, Sandeep Kumar Jha, Hyun Ho Lee, Yong-Sang Kim
National Tsing Hua University, Taiwan
Poster
118
Myongji University, Korea
Oral
119
120
Optimum Control Mode Analysis and Numerical Backtracking of Microfluidic Secreted Analyte Shiying Wang, Wei Wang Detection Determination Of DNA Fragments Using Microchip Gi-Sung Joo, Sandeep Kumar Jha, Hyun Based On Capillary Electrophoresis And Ho Lee, Yong-Sang Kim Amperometric Air-Stable Inverted Polymer Solar Cells Using Titanium Oxide and P3HT:PCBM Axial Buckling Behavior of Single-walled Carbon Nanotubes with Finite Element Modeling Micromachined Spatial Light Modulator (SLM) Based on Lever Type Amplification Framework of MEMS High Accelerated Stress Test
Poster
Myongji University, Korea
Oral
121
Woon-Hyuk Baek, Tae-Sik Yoon, Hyun-Ho Myongji University, Korea Lee, Yong-Sang Kim Lijie Chen, Qi Zhao, Hongtao Zhang Ren Hao, Fenggang Tao, Lixin Huang, Wang Xingping, Jun Yao Lou Wen-Zhong, Zhen Wang, Rongchang Song Xiamen University, China
Oral
122
Poster
123
Institute of Optics and Electronics, China Poster
124
Beijing Institute of Technology, China
Poster
125
Experiment and Simulation of Nanofiber Gaofeng Zheng, Wenwang Li, Xiang Wang, xiamen university, China Deposition Behavior for Near-Field Electrospinning Daoheng Sun Gate Structure Optimization of Carbon Nanotube Transistor based Infrared Detector Application of the Micro Integrated Magnetic Fluxgate System for Projectile Velocity Measurement Sys Aluminum-photoresist Dual-layer Lift-off Process for Gold Micropattern Preparation in Cell Reseaches Rapid synthesis of MEMS Devices Based on Element model library and Metamodel Optical Surface Sensing by Bent Slot Waveguides Hongzhi Chen, Ning Xi, King Wai Chiu Lai, Carmen Kar Man Fung, Ruiguo Yang Lou Wen-Zhong, Rongchang Song, Chao Gao Yaoping Liu, Wei Wang, Chun Yang, Zhihong Li Beijing Institute of Technology, China
Oral
126
Oral
128
Poster
132
Oral
135
Yang He, Chengyu Jiang, Yuan Wei-Zheng, Northwestern Polytechnical University, Kai-Leung Yung, Yan Xu China Alireza Kargar Shiraz University, Iran
Poster
137
Poster
138
A CMOS-MEMS Piezoresistive Accelerometer With Large Proof Mass System & Finite Element Modeling of PolyMUMPs Based Monolithic 3D MEMS Capacitive Accelerometer
Mohd Haris Md Khir, Hongwei Qu Muhammad Khan, Shafaat A. Bazaz, Muhammad Abid
Oakland University, USA Ghulam Ishaq Khan Institute of Engineering Sciences and Technology, Pakistan California Institute of Technology, USA
Oral
139
Poster
140
Stiction of Parylene C to Silicon Surface Measured Feiqiao Yu, Jeffrey Chun-Hui Lin, YuUsing Blister Tests Chong Tai Flexible Parylene-Based 3-D Coiled Cable Ex Vivo Implantation Study Of Minimally Invasive Glaucoma Drainage Device Real Time Contact Angle Measurement by Quartz Crystal Microbalance for EWOD Studies Flexible Photodetectors with ZnO Nanorods Ray Huang, Yu-Chong Tai Jeffrey Chun-Hui Lin, Feiqiao Yu, Saloomeh Saati, Rohit Varma, Mark Humayun, Yu-Chong Tai Jing-Wei Lin, Shih-Kang Fan
Oral
141
California Institute of Technology, USA
Oral
142
California Institute of Technology, USA
Oral
144
National Chiao Tung University, Taiwan
Oral
145
Liang-Wen Ji
Oral
147
Jetting Frequency vs Voltage Frequency in the Low-Lei Xu, Xiang Wang, Yongfang Huang, Frequency Pulsation Mode of Electrohydrodynamic Daoheng Sun Simulation and Fabrication of Pyrex Glass Drilling Using CO2 Laser S.L. Lin, Chen-Kuei Chung
Poster
148
National CHeng Kung University, Taiwan
Poster
149
Microfluidic Immunosensor Based on Insulator Yu-Shan Huang, Yu-Hao Peng, Shih-Kang Dielectrophoresis and Electrowetting-on-Dielectric Fan Application of Pulse Voltage for Enhancing Uniform Chen-Kuei Chung, T.Y. Liu, W.T. Chang Nano-structured Anodic Aluminum Oxide Evolution of Mechanical Property of Nanocomposite TiSiN Films Using Reactive Magnetron Cosputtering The LQG Controller Design for Micromachined Tunneling Gyroscope Gas Permeation in PDMS Monitored by On-site Pressure Sensors Chen-Kuei Chung, J.J. Jhu, S.C. Chang
Oral
150
Oral
151
National CHeng Kung University, Taiwan
Poster
155
Yifang Liu, Lingyun Wang, Daoheng Sun
Poster
157
Lung-Jieh Yang, A-Fu Kao
Tamkang University, Taiwan
Oral
159
The Coupling Error Analysis of the Decoupled Silicon Micro-Gyroscope
Yang Bo
Southeast University, China
Poster
160
An Electro-thermal SU-8 Cantilever Micro Actuator Xiaobo Zhang, Yibo Wu, Xiaodan Miao, based on Bimorph Effect Congchun Zhang, Guifu Ding Electrorheological Characterization of Ultrathin Titanium Dioxide Nanorod Solutions Using Microfluid Effect of Flexible Beam on the Free-Molecule Squeeze-film Air Damping for Micro resonators Connection of Single-Wall Carbon Nanotube to Au Layer as a Matrix for Biosensors Xuesong Jiang, Yun-Yang Ling, Chenmin Liu, Shihe Yang, Yi-Kuen Lee Gang Hong, Wenjing Ye
Oral
161
The Hong Kong University of Science and Oral Technology, Hong Kong Hong Kong University of Science and Technology, Hong Kong Poster
162
166
Afshin Farahbakhsh, Iman Farahbakhsh, Hassan Ali Zamani, Sussan Kamel Rahimi, Islamic Azad University, Iran Azam Niazmand Beijing Institute of Technology, China
Oral
167
Simulation Research on a Novel Micro-fluidic SelfXin-Wei Gu, Lou Wen-Zhong, Xiuli Yu destroy Device for Microchips A New Portable Micro Weather Station A Microelectroplated Magnetic Vibrtation Energy Scavenger For Wireless Sensor Microsystems Study on the Air Filtration Performance of Nanofibrous Membranes Compared with Conventional Fibrous Zhen Fang, Zhan Zhao
Poster
168
Institute of Electronics, CAS, China
Oral
170
Peihong Wang, Xiaolin Zhao, Xiaolin Zhao, Shanghai Jiaotong University, China Jingquan Liu Wang Han, Gaofeng Zheng, Wang Xiang, Daoheng Sun Xiamen university, China
Oral
173
Oral
174
Study of Traffic Police's Hand Gesture Recognition Zhu Yong, Yao Xiaoyu, Jiang Wei Based on MEMS Sensor Cantilever-Resonators Integrated with a DualFunctional Heater for Ultra-Sensitive and Rapid Bio/Che Application of SU-8 as the Insulator toward a Novel Planar Microelectrode Array for Extracellular Ne A LTCC Microsystem Vacuum Package Substrate with Embedded Cooling Microchannel and Pirani Gauge Optimum Electrostatic-Force Control for Fabricating a Hybrid UV-Curable Aspheric Lens Yongliang Yang, Haitao Yu, Xiaohua Gan, Yongjing Liu, Min Liu, Xinxin Li
Heilongjiang University, China Shanghai Institute of Microsystem and Information Technology, CAS, China
Poster
175
Oral
176
Yulong Zhang, Zuhui Chen, Shusen Jiang, Xiamen University, China Yan Zhang, Dandan Gu, Xin Zhang Min Miao, Jing Zhang, Yunsong Qiu, Yangfei Zhang, Yufeng Jin, Hua Gan Kuo-Yung Hung, Liang-Wei Chang, Fangang Tseng, Nguyen Thi Minh Hang Peking University, China Ming-Chi University of Technology, Hong KONG
Poster
178
Oral
179
Oral
181
Radiation Cooling using Plasmon Resonant Nanostrips Rapid and Nondestructive Evaluations of Conductivity by Spectroscopic Measurements at the Plasma Edg The Characteristic Research of a Novel Sensor Based On GaAs/AlAs/InGaAs PHEMT Residual Stress Measurement of fixed-fixed Nanobeam Using Bending Test An Immunomagnetic-bead-based Microfluidic System for Rapid Diagnosis of Influenza Infection Hybrid Etching Process and Its Application in Thermopile Infrared Sensor A Digital Prototype Miniature Silicon Microgyroscope Biased Reptation Model with Electroosmosis for DNA Electrophoresis in Microchannels with SubMicron Large-scale Patterned Nanofibers Via Tip-less Electrospinning Rapid Prototyping of PMMA Microfluidic Chips Utilizing a CO2 Laser Design, Simulation and Fabrication of a TimeDelay Device Based on Micro-Channel Tunable Magnetic Alginate Microspheres by Using a Microfluidic Device Film Bulk Acoustic-wave Resonator (FBAR) Based Humidity Sensor Effect of Additives on Mechanical Properties of Electroplating Nickel
Teppei Onuki, Hiroki Kuwano
Tohoku University, Japan
Oral
182
Teppei Onuki, Hiroki Kuwano
Tohoku University, Japan
Oral
183
Jia Xiaojuan, Binzhen Zhang, Liu Jun, Xue North University of China, China Chenyang, Hou Tingting Linyan Xu, Long Ma, Dachao Li, Xing Fu, Xiaotang Hu Yu- Fang Lee, Kang-Yi Lien, Huan-Yao Lei Lei, Gwo-Bin Lee Dehui Xu, Bin Xiong, Yuelin Wang, Yinglei Ma Dunzhu Xia, Xia Sheng Sheng, Shourong Wang Wentao Wang, Yick Chuen Chan, Yi-Kuen Lee Dezhi Wu, Gaofeng Zheng, Lingyun Wang, Xiting Lai, Daoheng Sun Lung-Ming Fu, Chien-Hsiung Tsai, Chang- National Pingtung University of Science Hsien Tai, Chin-Lung Chang, Chiu-Feng Lin and Technology, Taiwan Sui Li Chen-Yi Lee, Song-Bin Huang, Kang-Yi Lien, Gwo-Bin Lee Xiaotun Qiu, Jie Zhu, Jon Oiler, Cunjiang Yu, Ziyu Wang, Hongyu Yu Tianjin University, China
Oral
184
Poster
185
National Cheng Kung University, Taiwan Shanghai Institute of Microsysem and Information Technology.China Southeast University, China
Oral
186
Oral
187
Oral
188
The Hong Kong University of Science and Oral Technology, China Oral
191
192
Oral
193
Oral
194
Oral
195
Arizona State University, AZ
Oral
196
Jun Tang, Mao Shengping, Hong Wang, Liu Shanghai JiaoTong University, China Rui, Guifu Ding
Poster
197
A New Electroplating Mask for Deep Wet Etching on Pyrex Glass A MEMS Gyroscope Readout Circuit with Temperature Compensation Microchannel Cooling for Vacuum Integrated Power Amplifiers (VIPA) Adaptive Pressure Ultrasonic Precise Bonding Method for Polymer Micro Joint
Miao Xiaodan, Xuhan Dai, Xiao-Lin Zhao, Guifu Ding Chong Zhang, Qisong Wu, Tao Yin, Haigang Yang Yanbao Ma
Poster
198
Institute of Electronics, China
Poster
200
University of CaliforniaAmerica
Poster
203
Yibo Sun, Yi Luo, Xiaodong Wang
Dalian University of Technology, China
Oral
205
Thermal Design and Analysis of Uncooled Infrared Rong Chen, Ting Yu, Yuchun Feng, Dasong Shenzhen Institute of Advanced Senor in Standard CMOS Peng, Fengqi Yu Technology, China Application of Parallel Capacitor for Force Transferring in Resonant Micro Accelerometer Buckling Nanofiber on Patterned Substrate An Integrated System of RBCs Sorting and Brownian Motion Bio-sensing Technique Wu Zhou, Wei Su, Xiao-Ping He, Bai-Lin Li, Feng-Tian Zhang Wenwang Li, Gaofeng Zheng, Daoheng Sun Southeast Jiaotong University, China
Poster
207
Poster
209
Poster
210
Fan Yujui, Ching-Jiun Lee, Hsu Jen-Hao, Liu Yi-Hsing, Szu-I Yeh, Sheen Horn-Junn, National Taiwan University, Taiwan Lin Shiming, Tsai Jing-Fa
Oral
212
Kinematic Analysis of 3-DoF Perpendicular Parallel Zhu Dachang, Zhang Xianmin Manipulator with Flexure Hinge Method Comparison and Measurement Accuracy of Wei Qu, Jianchao Feng Thermal Conductivity for Several Nanofluids Electro-thermally Actuated RF MEMS Switch For Wireless Communication Energy and Signal Processing Circuit for Micro Embedded Medical System Development of Micro Pump with Micro Fins Li Xiuhan Institute of Engineering Thermophysics, China Beijing Jiaotong University, China
Poster
215
Poster
216
Oral
217
Li Xiuhan
Beijing Jiaotong University, China
Poster
218
Li Xiuhan
Oral
219
High Efficiency Coupling with 3D MEMS Coils
Li Xiuhan
Beijing Jiaotong University, China
Oral
220
Fabrication and Characterization of Ultra-Thin PIN Detector AFM Based Virtual Clamp for Robotic Caging at Nanoscale
Li Ying, Ma Shenglin, Jin Yufeng, Yu Min, Zhang Lu, Wang Jinyan Jing Hou, Zhidong Wang, Lianqing Liu, Zaili Dong, Yongliang Yang, Chengdong Wu
Oral
221
Northeastern University, China
Poster
223
Stress in Si-Glass Anodic Bonding and Its Effect on Xiaoshan Zheng, Wenshan Chen, Xuyuan Silicon Piezoresistive Pressure Sensor Chen The Influence of Growth Condition on ZnO Nanowires in Zinc Thermal Evaporation Process Step Height Evaluation in the Vibrating Condition Based on Microscopic Interferometry The Fabrication of MEMS Fuze Safety Device Wan Hong, Binbin Li, Hurry Ruda
Xiamen University, China National university of Defense Technology, China
Poster
224
Poster
225
Yan Bian, Tong Guo
Poster
229
Du Liqun, Jia Shengfang Wenlong Lv, Yang Liu, Donghang Chen, Lingyun Wang, Daoheng Sun Yongfang Huang, Lei Xu, Gaofeng Zheng, Daoheng Sun
Dalian University of Technology, China
Oral
231
Design and Simulation of Electrostatic Inkjet Head Bead-on-String Structure Formed by Electrohydrodynamic Printing FeBNbNd Metallic Glass Thin Film Formation for MEMS and NEMS Emission of a Metallic Infrared Emitter with Hexagonal Holes Lattice Structure A MEMS-based Electrostatic Resonator Used for the Application of Fast-Scanning RFSTM
Poster
232
Oral
233
Tuan Phan, Sangmin Lee, Akihiro Makino, Tohoku University, Japan Hiroshi Okamoto, Hiroki Kuwano Fangqiang Li, Kun Qian, Haisheng San, Xuyuan Chen Xiamen University, China
Oral
234
Oral
235
Hsin-Hung Liao, Hsin-Hong Shen, Bo-Ting Liao, Yu-Chun Chen, Woei-Wu Pai, Yao-Joe National Taiwan University, Taiwan Yang National Taiwan University, Taiwan
Oral
236
A Microelectromechanical Digital-to-Analog Converter for Generating Step-Motion of Reference Hsin-Hung Liao, Yao-Joe Yang Mirror Polycrystalline Diamond MEMS Using SingleMaterial Technology Optimized Design of Piezoresistive Pressure Sensor for Improved Linearity and Sensitivity Zongliang Cao, Dean Aslam Wenshan Chen, Xiaoshan Zheng, Xuyuan Chen
Oral
237
Oral
238
Poster
239
All-Diamond Field Emission Device with a Micro-tip Zongliang Cao, Sean Hatch, Dean Aslam Array Cathode Investigation of the Effect of Adsorption Induced Surface Stress on the Resonant Frequency of PZT Me Ting Xu, Jianmin Miao, Yingshuai Liu, Chang Ming Li
Michigan State University, USA Nanyang Technological University, Singapore Institute of Electronics, China
Oral
240
Oral
241
Integrated Micro Potentiometric Immunosensor for Qiannan Xue, Chao Bian, Hong Zhang, Percent Hemoglobin-A1c Based on Nano-gold Shanhong Xia A Microfabricated Temperature Sensor for Hyperthermia The Design Optimization for GaN-based Betavoltaic Microbattery Liwei Lin, Qiang Pei, Hang Guo Zaijun Cheng, Haisheng San, Yanfei Li, Xuyuan Chen
Oral
242
Poster
243
Poster
244
A Micro Flow Cytometry System for Study of Marine Phytoplankton from Costal Waters of Hong Yun-Yang Ling, Hongbin Liu, Yi-Kuen Lee Kong EMD-Based Denoising Methods in the MEMS Gyroscope De-drift Theoretical and Experimental Study of Electroporation of Red Blood Cells Using MEMS Technology
HKUST, Hong Kong
Oral
245
Yinqiang Zhang, Shourong Wang, Dunzhu Southeast University, China Xia Peigang Deng, Guangyao Yin, Tong-Yi Zhang, Donald C. Chang, Yi-Kuen Lee Hong Kong University of Science and Technology, Hong Kong
Poster
246
Oral
247
Performance Evaluation of Structural Design for Wen Yongpeng Microgyroscope Based on System Vibration Modes Wireless Power Recharging for Implantable Bladder Pressure Chronic Monitoring Darrin Young, Peng Cong, Michael Suster, Nattapon Chaimanonart, Wen Ko
College of Urban Railway Transportation, Poster China The University of Utah, USA Oral
248
249
250
251
Experimentation and Simulation of a Planr Ni Junhui, Huang Fengliang, Bin Wang, Li Micropump using in-Contact, Zero-Leakage Check Columbia University, USA Oral Beizhi, Qiao Lin Valves Jong-Hyeon Chang, Dae Young Choi, Low Voltage Electrowetting on Atomic-layerXueqiu You, Seungoh Han, James Jungho Korea University, Korea Oral deposited Aluminum Oxide Pak Zhikun Zhan, Balaji Srinivasan, Steve Investigation of a PDMS based micromixer for Tung, Yanli Qu, Shuai Wang, Wen Jung Li, Shenyang Institute of Automation, China Oral Heterogeneous Immunoassays of Insulin Zaili Dong A Surface Micromachining Process Utilizing Dual Metal Sacrificial Layer for Fabrication of RF MEMS Liu Bo, Zhihong Li, Zhiqiu Lv, Xunjun He, Yilong Hao Peking University, China Oral
252
254
Structure-decoupled Dual-Mass MEMS Gyroscope with Self-adaptive Closed-loop Detection Molecular Effusion-Boltzmann Moel for Parylene C Deposition in Deep Trench
Yong Yin, Shourong Wang, Cunchao Wang Southeast University, China Yinhua Lei, Yingcun Luo, Wei Wang, Zhihong Li
Poster
255
Peking University, China University of Science and Technology of China, China
Oral
256
A Fabrication Method of Cantilever with High Yield Yong Liu, Wen Kong, Tian-Lei Zhang, for Magnetic Resonance Force Microscopy Gang Zhao, Jiaru Chu Nanochannels on Silicon Oxide Surface Fabricated Wang Zhi-Qian, Steve Tung, Jiao Nianby Atomic Force Microscopy Dong, Zaili Dong Research in a Novel Gyroscope based on DoubleBarrier Resonant Tunneling Diodes Fe-PDMS Fabricated Microchannels for Peristaltic Pump Application Fabrication and Simulation of PDMS Assisted CO2 Laser Ablation Electrospinning Under Sub Critical voltage Fabrication of Ultra-deep High-aspect-ratio Isolation Trench without Void and its Application System-level Simulation of a Micromachined Electrostatically Suspended Gyroscope Development of an Active Micromixer by Dielectrophrosis Particle Manipulating Annealing Nano-to-Micro Contacts for Improved Contact Resistance Low temperature synthesis and field emission of carbon nanotubes using RFCVD Fabrication of Taper Hollow Metallic Microneedle Array for Portable Drug Delivery System Mengwei Li, Du Kang, Ruirong Wang, Yunbo Shi, Jun Liu Tzong-Shyng Leu, Pin-Chin Jiang Chen-Kuei Chung, S.L. Lin, K.C. Chang, H.Y. Wang Xiting Lai, Dezhi Wu, Daoheng Sun Liang Qian, Jia Wang, Zhenchuan Yang, Guizhen Yan Zhenni Qin, Chen Wenyuan, Cui Feng, Xiao Qijun, Weiping Zhang Yeh Szu-I, Ching-Jiun Lee, Tzu-Heng Wu, Cheng-Pang Liu, Yu-Jui Fan, Horn-Jiunn Sheen Heather Chiamori, Xiaoming Wu, Xishan Guo, Bao Quoc Ta, Lin Liwei Liu Yong Xiang, Liu Jun Hua, Changchun Zhu
Oral
257
Shenyang Institute of Automation, China Oral
258
North University of China, China
Oral
259
National Chen Kung University, Taiwan
Oral
260
Oral
261
Oral
262
Oral
263
Poster
264
National Taiwan University, Taiwan
Oral
265
University of California at Berkeley, USA
Oral
266
XI an Jiaotong University, China
Oral
267
Hao Yu, Yingnan Wang, Yuhua Guo, Si Di, The Chinese University of Hong Kong, Ruxu Du China
Oral
268
MEMS Power Generation Using Activation of Cardiomyocytes on a PMN-PT Diaphragm
Eunpyo Choi, Sung Q Lee, Tae Yun Kim, Kyoung J Lee, Jungyul Park
Sogang University, Korea
Oral
269
Formation and observation of thermal bubble from Chen-Kuei Chung, E.C. Chang, B.H. Zou multilayer heating material Micro-Fabricating Three-dimensional MEMS Supercapacitor The Crucial Effects of the Micro-Structure on the Properties of Nc-Si:H Films for Solar Cells The Microstructure and Optical Properties of Mndoped ZnO Thin Film Fabricated by Sol-gel Technique In vivo Imaging with Micromachined based Dualaxes Confocal Microscope Fabrication and Performance Analysis of an Amorphous Silicon-based Thermal IR Detector On-Chip Formation and Size Control of Polydiacetylene Sensor Liposomes Wei Sun, Ruilin Zheng, Xuyuan Chen
Oral
270
Poster
271
Xiao-Ni Gao, Ding Jiannning, Yuan Ningyi, Jiangsu Polytechnic University, China Cheng Guanggui, Li-Qiang Guo Xiu-Qin Wang, Yuan Ningyi, Gu-Qiao Ding, Jiangsu Polytechnic University, China Jian-Ning Ding, Jian-Lin Ni, Kan Biao Wibool Piyawattanametha, Michael Mandella Hyun Oh Hokang, Zhao Zhiguo, Seong Ki Jeon, Ho Jung, Hak-Rin Kim, Dae-Hyuk Kwon, Jung-Hee Lee, Shin-Won Kang, Seong Ho Kong Gang-June Kim, Kwang-Jae Won, Simon Song Stanford University, USA
Oral
272
Oral
273
Oral
274
Oral
275
Hanyang University, Korea
Oral
276
Characteristics of Controlled Nafion Coating inside Nano Structured Anode for Three-phase Zone Yi-Shiuan Wu, Fangang Tseng Arran High Efficient Nanocatalyst Synthesis by A SemiReflux Chemical Reduction System Immobilizing Pt-based Binary Alloy Nanoparticles on N-doped Carbon Nanotubes for Methanol Oxidation Evaluation of Anticancer Effect Using Quartz Crystal Microbalance and Micro CCD Camera Shin-Mei Gong, Yi-Shiuan Wu, Fangang Tseng Shujuan Jiang, Lei Zhu, Hua Xue, Haisheng Tao, Yanwen Ma, Zheng Hu Hyen-Wook Kang, Dong-Yun Lee, YoungSoo Kwon, Hiroshi Muramatsu
Oral
277
Oral
278
Nanjing University, China
Oral
279
Tokyo University of Technology, Japan The National Electronics and Computer Technology Center, Thailand Tohoku University, Japan
Oral
280
Thitima Maturos, Tawee Pogfay, Suriya Portable and Low Cost Polymerase Chain Reaction Mongpraneet, Anurat Wisitsoraat, Tanom (PCR) Chip with Thermoelectric Cooling Lomas, Adisorn Tuantranont Piezoelectric Microcantilever without Substrate Ziping Cao, Jinya Zhang, Hiroki Kuwano
Oral
281
Poster
282
The Packaging Effect On High g Accelerometer Test
Yunbo Shi, Zhengqiang Zhu, Ping Li, Jun Liu
North University of China, China University of Science and Technology of China, China Technical University of Denmark, Denmark
Poster
283
Mechanism and Analysis of Structural Color in Two Jiawen Li, Xi Li, Fei Yu, Yuhang Chen, Typical Butterfly Scales Wenhao Huang Noise Depression of Parasitic Capacitance for Meng Tang, Alberto Cagliani, Marie Frequency Detection of Micromechanical Bulk Disk Escouflaire, Severine Mouisel, Zachary Reson Davis A Latching Bistable Microswitch Using Dual-Beam Electrothermal Actuation Dielectric Charging In Composite Double Layers Used for Capacitive RF MEMS Switches
Oral
284
Oral
285
Mao Shengping, Hong Wang, Yibo Wu, Jun Shanghai Jiaotong University, China Tang, Guifu Ding Gang Li, Xuyuan Chen, Haisheng San Vestfold University College, Norway
Oral
286
Poster
287
Photoluminescence Properties and Raman Spectra Huixin Chen, Yanpeng Fu, Yong Yang of Silicon Nanowires Obtained By CVD Roughness Improvement Experiments of (100) Silicon Surface in Anisotropic Wet Etching A Microfluidic Biosensor for the Detection of Amyloid (1-42) Based on Cylic Voltammetry. High Efficiency Micro-Bubble Generator Using Carbon Nanocoils as Heater An FPGA Implementation of the LMS Adaptive Filter for MEMS Gyroscope A Continuous-Time Voltage Readout for SiC Micromechanical Capacitive Pressure Sensor A Potentiometric Oxygen Sensor Based on the PbF2/LaF3/ Pt Structure
Oral
289
Dong Peitao, Hou Zhanqiang, Niu Zhengyi, National University of Defense Song Bing, Wu Xuezhong, Li Shengyi Technology, China Kamrul Islam, Gi-Sung Joo, Sandeep K. Jha, Yong-Sang Kim Wenli Zhou, Sanping Wan Lu Niannian, Liu Dachuan, Jian Cui, Lin Longtao, Xiaozhu Chi, Zhenchuan Yang, Guizhen Yan Baixiang Zheng, Tang Wei, Zhe Chen, Zhang Haixia Guoliang Sun, Hairong Wang, Zhuangde Jiang, Tianshuo Yin Peking University, China Myongji University, Korea Huazhong University of Science and Technology, China
Poster
290
Oral
292
Oral
294
Poster
295
Poster
296
Xi'an Jiaotong University, China
Oral
297
Pressure and Flow rate Monitoring within PEM Fuel Chi-Yuan Lee, Tachung Yang, Tzu-Hao Cells using Embedded Flexible Sensors Chien A Novel Micro-Pellsitor With Nanoporous Aalumina Q.Y Chen, H.P Dong, Shanhong Xia Catalyst Carrier
Poster
298
Oral
300
301
Gi-Chan Sung, Ji-Yoon Lee, Gyong-Chol Morphology Observation of Silsesquioxane LB Film Kim, Dae-Sik Shin, Chungkyun Kim, Containing Dendric Core Young-Soo Kwon Efficiency Property of OLED Based on Zn(PQ)2 as Jun-Woo Park, Gyu-Chae Choi, Dong-Eun Electron Transporting Layer and Hole Blocking Kim, Byoung-Sang Kim, Burm-Jong Lee, Layer Young-Soo Kwon Fabrication Of Micro-/Nano-Filter Unit by Building Sacrificial Structure With Colloid Crystal Package Improvements and Testing of A Novel MEMS Bionic Vector Hydrophone Design of A Three-axis High-g Piezoresistive Accelerometer The Effects of Different Defects on The Elastic Constants of Single-walled Carbon Nanotubes A Novel Disk-arc Arrayed Electrochemical Sensor A Micromachined Piezoelectric PZT-based Cantilever in d33 Mode Pico-watts Thermal Convective Accelerometer Based on CNT Sensing Element Optimization Design of an Electrostatically Suspended Microgyroscope Rui-Lin Ma, Wei Wang, Wengang Wu Zhang Guojun, Zhang Kairu, Chenyang Xue, Jijun Xiong Xiong, Wendong Zhang Liwei Lin, Feng Pan, Hang Guo Lijie Chen, Qi Zhao, Zunqun Gong, Hongtao Zhang Xiaosen Chai, Xu Chun, Jia Zhou
Dong-A University, Korea
Oral
Dong-A University, Korea
Oral
302
Oral
303
North University, China
Oral
305
Poster
306
Poster
307
Fudan University, China
Oral
308
Lingjuan Che
Vestfold University College, Norway
Poster
309
Yu Zhang, Wen Jung Li
Chinese University of Hong Kong, China
Oral
312
Cui Feng, Wenyuan Chen, Weiping Zhang, Zhenni Qin, Gaoyin Ma, Xiao Qijun, Shanghai JiaoTong University, China Xiaosheng Wu
Poster
313
Temperature-dependence Electrical Performance of Chenyang Xue, Zhenxin Tan, Tingting North University, China GaAs-based HEMT-embedded Accelerometer Hou, Guowen Liu, Liu Jun, Binzhen Zhang Integrating Single-Stranded DNA with SingleWalled Carbon Nanotubes Real-time Hardened Red Blood Cell Separating Chip using Dielectrophoresis Force Thin Film Packaging Process for MEMS Device Using Polycrystalline Diamond Steve Tung University of Arkansas, USA
Oral
314
Oral
315
Ching-Jiun Lee, Fan Yujui, Yeh Szu-I, ChihNational Taiwan University, Taiwan Yu Huang, Horn-Jiunn Sheen Zongliang Cao, Dean Aslam Michigan State University, USA
Invited
316
Oral
317
0.5 nT Resolution GMI Sensor Channel Quantum Response Modeling for Bioinspired Molecular Nanonetworks A Compact Force Sensor with Low Temperature Drift Design Using a Standard CMOS Process Performance Evaluation of a Pneumatic-based Micromixer for Bioconjugation Reaction 3D Microfabricated Artificial Blood Capillaries
Meiyun Yang, Zhihui Sun, Hong Chang, Jing Liu Mohammad Mahfuz, Dimitrios Makrakis, Hussein Mouftah Benxian Peng, Ting Yu Balaji Srinivasan, Ju Seok Lee, Jacob Hohnbaum, Steve Tung, Jin-Woo Kim Chunguang Xia, Nicholas Fang
Guohao Sensor Technology Research, China School of Information Technology and Engineering, Canada Shenzhen Institute of Advanced Technology, China Univ. of Arkansas, AR USA University of Illinois at UrbanaChampaign, USA University of California, USA
Oral
318
Poster
320
Poster
321
Oral
322
Oral
323
Neuron-Inspired Microfluidic Tactile Sensors Using Micro-mixer Chip and Micro-imprinting Technology for Optimizing Glucose Concentration Film Bulk Acoustic-wave Resonator (FBAR) Based Infrared Sensor
Chaoqi Zhang, Tingrui Pan
Oral
324
Yu-Cheng Lin, Chia-Hsien Yeh Ziyu Wang, Xiaotun Qiu, Jon Oiler, Jie Zhu, Hongyu Yu
Oral
327
Arizona State University, USA
Oral
328
329
330
Probe Optimization for Nano-manipulation in Metal Liu Binghui, Yang Lijun, Wang Yang, Tang Probe-based Near-field Optical Tweezers Based on Jing, Yuan Julong F Byoung-Ho Kang, Do-Eok Kim, Jae-Hyun Fabrication of Organic/Inorganic LED Device using Kim, Jun-Seon Seo, Dae-Hyuk Kwon, Nanocrystal Quantum Dots as Active Layer Seong Ho Kong, Jung-Hee Lee, Shin-Won Kang Formation of the Nano-Scale Archipelago Shape Jiangang Zhang, Xiaoyang Zhu, Zhen Upper Electrode of Capacitive Humidity Sensor Fang, Zhan Zhao A Novel Method to Cover Microfluidic Systems with Jie Zhu, Ziyu Wang, Xiaotun Qiu, Jon Parylene-C Oiler, Cunjiang Yu, Hongyu Yu 3D Measurement of Micro-parts for assembly using Multi-focused Images Bo Dong, Ryu Dongseok, Tim Davidson, Ammanda Burton, Dugan Um
Harbin Institute of Technology, China
Poster
Kyungpook National University, Korea
Oral
Oral
331
Arizona State University, USA
Oral
332
College of William and Mary, USA
Oral
333
A Dielectrophoretic Chip with Multilayer Electrodes Cheng-Hsin Chuang, Yao-Tung Wu, Youand Microcavity Arrays for Trapping and Programm Ming Hsu, Ching-Hua Wei
Southern Taiwan University, Taiwan
Oral
335
Micro Scale Silicon Dioxide Gear Fabrication by Bulk Micromachining process
Dugan Um, Bahram Asiabanpour, David Foor, Mary Teller, Mathew Kurtz, Todd Mcgregor
Texas AandM University-Corpus Christi, USA The University of Akron, USA
Poster
337
A Non-Traditional Drug Particles Modeling for an Y.J. Lin, Bharat Nagireddy Efficient Delivery Verified by Molecular Dynamics S Optimal Design and Manufacturing of Infrared Surveillance Camera Mirror Ultrasound Assisted Laser Machining and Surface Cleaning Electrodeposition of CoNiMnP-based Permanent Magnetic Film Fabrication of Seamless Patterns onto Metal Rollers by Photolithography Fabrication of Flexible Nano-Wired Polarizer by CMEL and Polyurethane Acrylate Mold Single-Cell-Based Measurement of Supraphysiological Thermal Injury in Carcinoma Cells on a Microchip Novel Multiplex and Quantitative Genetic Analysis Method by CE-based SSCP Design of a Blood-Plasma Separation Microfluidic Chip Utilizing Backward Facing Step Geometry Nano-Patterned Algainp Light-Emitting Diode Based on UV-Kiss Metal Transfer Technology Micro-Knife Driven and Its Weak Piezoelectric Signal Detection Comparing ODEP and DEP Forces for Micro/Nano Scale Manipulation: a Theoretical Analysis Complete Machining of Micro/Meso Scale Structures Based on the Integration of Micro Turning and Mill
Oral
339
Joon Hwang, Kun-Hee Kim, Jong-Ho Won, ChungJu National University, Korea Eui-Sik Chung Chi-Cheng Chiu, Chih-Hao Chang, YungChun Lee Quan Yuan, Dong-Ming Fang, Xiuhan Li, Zhang Haixia Chen Hong-Wei National Cheng Kung University, Taiwan
Oral
340
Oral
346
Oral
349
Oral
352
Chin-Ching Hsu, Yung-Chun Lee
Oral
354
Yun-Hung Lu, Ching-Te Huang, Cheng-Han National Cheng Kung University, Taiwan Tsai, Chun-Ping Jen Gyoo Yeol Jung, Gi Won Shin, Hee Sung Hwang, Boram Chung Ho-Hsien Chang, Ching-Te Huang, Po-Ni Li, Chun-Ping Jen Hsieh Yi-Ta, Shih-Jay Liaw, Yung-Chun Lee, Zeng Xu-Feng, Shei Shih-Chang, Hung-Yi Lin Jiashan Xu, Hang Guo Shu-E Wang, Minglin Li, Zaili Dong, Wen Jung Li Liu Zhibing, Wang Xibin Beijing Institute of Technology, China Pohang University of Science and Technology, Korea
Oral
358
Invited
359
National Chung Cheng University, Taiwan Poster
360
National University of Tainan, Taiwan
Oral
361
Poster
362
Oral
363
Poster
364
A Method of Dynamic Analysis for Accelerometer Base on Separated Time and Space Effect of Various Functional Groups on the Dynamic Response of CNT Sensors
Peng Zhang, Xin Zhao, Guizhang Lu, Ningxia Liu Mengxing Ouyang, Wen Jung Li
Nankai University, China
Poster
365
Oral
368
Dielectrophoretic Assembly of 2 nm Gold Particles Minglin Li, Siuling Leung, Yanli Qu, Zaili for nanosensing applications Dong, Wen Jung Li Infrared-Assisted and Roller-Based Direct Metal Contact Transfer Technology for Flexible Polarizer Chun-Hung Chen, Te-Hui Yu, Yung-Chun Lee, Fei-Bin Hsiao National Cheng Kung University, Taiwan
Oral
369
Oral
371
Design and Fabrication of a Novel Silicon Probe for Senlin Jiang, Zhang Dacheng, Zhenchuan Peking University, China Micromachined Surface Profilers Yang, Guizhen Yan RF MEMS Filter Based on One Step of Copper Electroplating Synthesize Uniform Carbon Nanocoils by Anodic Aluminum Oxide Pumping Performance Analysis of Traveling-Wave Electroosmotic Micro-Pumps with Double-Sided Electro Investigation of Miniaturized Radiators for Microwave Hyperthermia Functional Molecular Assembly on Solid Surface Investigated by Scanning Tunneling Microscopy Nanometer-Scale Flatness and Reliability Investigation of Stress-Compensated Symmetrically-Metallize Yu Liu, Xiuhan Li, Dong-Ming Fang, Zhang Peking University, China Haixia Chi-Chung Su, Shuo Hung Chang National Taiwan University, Taiwan
Oral
373
Oral
374
Oral
375
Win Jet Luo
National Chin-Yi University of Technology, Oral Taiwan Xiamen University, China Poster
377
Lu Lu
379
Li-Jun Wan Mikael Sterner, Gran Stemme, Joachim Oberhammer
Institute of Chemistry, China KTH-Royal Institute of Technology, Sweden
Invited
380
Oral (late-news)
381
IR characterization of carbon-black for thermopile Chenyang Xue, Kaiqun Wang, Ting Liang, infrared detectors Wendong Zhang, Jijun Xiong Xiong Film Bulk Acoustic-Wave Resonator (FBAR) Based Radiation Sensor Fabrication of Sub-100-nm Silicon Nanowire Devices on SOI Wafer by CMOS Compatible Fabrication Proce Jonathon Oiler, Xiaotun Qui, Jie Zhu, Cunjiang Yu, Ziyu Wang, Hugh Barnaby, Keith Holbert, Hongyu Yu Sun Lina, Zhenchuan Yang, Lee MingHung, Guizhen Yan Arizona State University, USA
Oral (late-news)
382
Oral(late-news)
383
Oral (late-news)
384
A Microfluidic Device for Single-cell and Small Population Cell Trapping and Lysis of Pseudonitzsch
Chunsheng Wu, Peter Lillehoj, Leyla Sabet, Ping Wang, Chih-Ming Ho
Zhejiang University, China
Oral (late-news)
385
Rapid Concentration of Particle Suspensions Based Ye Lijun, Fei Jingchen, Zhang Anliang on Dual Track Surface Acoustic Waves A Microfluidic Device for Pulsatile Transdermal Delivery for Neurobiological Drugs Near-kT Switching-Energy Lateral NEMS Switch Bin Wang Kwame Amponsah, Norimasa Yoshimizu, Serhan Ardanuc, Amit Lal
Ningbo University, China
Oral (late-news)
386
Columbia University, USA
Oral (late-news)
387
Cornell University, USA Nanyang Technological University, Singapore Shenyang Institute of Automation, CAS, China
Oral (late-news)
388
GPTS Functionalized Carbon Nanotubes Integrated Ting Xu with PZT Sensors for Detection of Anti-goat IgG A Study on the Influence of Different Anionic Surfactants on the AFM Scanning and Imaging of SWCNTs Fabrication of nanofiber-based SERS-active substrates by oxygen plasma removal of SU-8 photoresist Simple sticking models and adhesion criterion to predict sticking effects of fixed-fixed beams in RF Research on the Figure of Merit for PVA Nanofibrous Membrane Filters Continuous Separation of Non-Magnetic Particles through Negative Magnetophoresis inside Ferrofluids Robust Design of a MEMS gyroscope Considering the Worst-case Tolerance High density atomic vapor cell chip for MEMS atomic spin-polarized gyroscope A Research about Micro-acceleration Switch Injection Molded Plastic Microfluidic Biochips with Integrated Pumping Electrode Xu Ke
Oral (late-news)
389
Poster(late-news)
390
Haiyang Mao, Yulong Zhang, Wengang Wu Peking University, China Yu Hui, Kai Yang, Binbin Jiao, Yupeng Jing, Dapeng Chen Wang Han, Xu Lei, Gaofeng Zheng, Sun Dao-Heng Taotao Zhu, Francisco Marrero, Leidong Mao Hao Zhou, Hailin Tang, Wei Su, Xianxue Liu Dong Haifeng Xiamen University, China
Oral (late-news)
391
Poster(late-news)
392
Oral (late-news)
393
Department of Chemistry, the University Invited of Georgia, Athens, GA, USA Institute of Electronic Engineering, China Oral (late-news) School of Instrumentation Science and Opto-electronics Engineering, China North University of China ShanXi, China
394
395
Oral (late-news)
396
Zhang Wei
Poster(late-news)
397
Huang Longbiao, Kai-Leung Yung, Yan Xu, The Hong Kong Polytechnic University, Xie Yunchuan China
Oral (late-news)
398
Study of Process of HSQ in Electron Beam Lithography Polygonal microstructures self-assembled from evaporating picoliter droplets in micro cavities Internal Profile Reconstruction for MEMS Microstructures Based on Infrared Transmission Technology High Performance MEMS Spiral Inductors Design and Fabrication of a Mems Capacitive Accelerometer Based on Double-Device-Layers SOI Wafer A Micro-machined Vibrating Ring Gyroscope with Highly Symmetric Structure for Harsh Environment Fabrication of Analysis on Surface Acoustic Wave Device of ZnO Thin Film A Single Mask Dry Releasing Process For Making High Aspect Ratio Soi Mems Devices Analysis of Magnet Latching Mechanism in The Application of Bi-Stable MEMS Switches Design and Simulation of Electromagnetic Twodimensional MOEMS Scanning Mirror
Min Zhao Chin-Tai Chen, Chu-Yi Hsu, Ching-Long Chiu, Chun-Te Chuang Yi Liu, Chenyang Xue, Xiujian Chou, Kangkan Niu, Jun Liu Dm Fang Qifang Hu, Chengchen Gao, Yilong Hao, Zhang Dacheng, Guizhen Yan, Yangxi Zhang Junbo Wang Shen Yung-Kang, Jeou-Long Lee, Yi Lin, Chern Ming-Jyh, Hung Jia-Hsiang Wei Yumin, Mao Xu, Zhenchuan Yang, Guizhen Yan Fu Shi
Zhanjiang Normal University, China Industrial Technology Research Institute, Taiwan North university of China, China
Oral (late-news)
399
Oral (late-news)
400
Oral (late-news)
401
Poster(late-news)
402
Oral(late-news)
403
Institute of ElectronicsChina Lunghwa University of Science and Technology, Taiwan
Oral (late-news)
404
Oral(late-news)
405
Oral (late-news)
406
Oral(late-news)
407
Chi Zhang
Tsinghua University, China. Shang hai Institue of Microsystem and Information Technology, China National Tsing Hua University, Taiwan
Poster(late-news)
408
Design and Fabrication of a High Fill-Factor MicroSihua Li, Jing Xu, Yaming Wu Mirror Array A Novel Method for Measuring Thick Film Thermal Conductivity Ramification Amplification-based Microfluidic System for MicroRNA Detection Studies of the Equilibrium of the Adsorption of Cu(II) onto As-produced and Purified Carbon Nanotube Sun Wei-Che, Chien Heng-Chieh, Huang Mei-Jiau, Chang Tien-Yao, Da-Jen Yao Juan Li, Wentao Li, Yanyi Huang, Xiang Wang, Jianzhong Xi Yao Yunjin
Oral(late-news)
409
Oral(late-news)
410
Beihang University, China Hefei University of Technology, China
Oral(late-news)
411
Poster(late-news)
412
Highly Integrated Microdevice for Ultrasensitive Pathogen Detection Analytical modeling of a PDMS Planar Micropump Using In-contact, Zero-Leakage Check Valves Micro Device Mould Fabrication Based on TwoPhoton Polymerization and Electroforming
Tae Seok Seo
Oral(late-news)
413
Fengliang Huang, Ni Junhui Junjun Ding, Zhongping Zhai, Wenhao Huang
Columbia University, USA
Oral(late-news)
414
Oral(late-news)
415
A Conceptual Prototype of the Light Switchable Xinyi Zhang, Pei-Yu Chiou, Zhihong Li Microelectrode Array (LSMA) for Retinal Prosthesis Adsorption of Cationic Methyl Violet and Methylene Yao Yunjin Blue Dyes onto Carbon Nanotubes Fully Coupled Electro-Thermal Simulation of a Micro Pirani Gauge A Chemical Surface Acoustic Wave (SAW) Sensor Array for Sensing Different Concentration of NH3 Application of Active Control Technology for Mass Resolution Improvement of FBAR Study on Quartz Tuning Fork Resonator as Micro Temperature Sensor A PDMS Interstitial Fluid Transdermal Extraction Tool A RF Micro Inductor with NiZn Ferrite Film Influence of Growth Conditions on Morphology of ZnO Nanostructures in CVD Process All-Diamond Micro-Electrode Arrays for Neural Recordings and Diamond Electrochemistry Wei Jiang, Jilong Zhou, Jinwen Zhang Da-Jen Yao, Hsu-Chao Hao, Mei-Ching Chen, Tai-Hsuan Lin Xuefeng He
Peking University, China Hefei University of Technology, China Institute of Microelectronics, China
Oral(late-news)
416
Oral(late-news)
417
Oral(late-news)
418
Oral(late-news)
419
Chongqing University, China Harbin University of Science and Technology, China
Poster(late-news)
420
Xu Jun Haixia Yu, Robert Roberts, Dachao Li, Kexin Xu, Norman Tien Liu Feng, Ye Shuangli, Tianling Ren, Yang Chen Wan Hong Michael Varney, Zongliang Cao, Dean Aslam
Oral(late-news)
421
Tianjin University, China
Oral(late-news)
422
Wuhan University, China National University of Defense Technology, China
Oral(late-news)
423
Oral(late-news)
424
Oral(late-news)
425
High aspect ratio three-dimensional electroplating Jungwoo Park, Hanseup Kim by localized laser irradiation
University of Utah, USA
Oral(late-news)
426
Focused-ion-beam introduced stress as a driving force for micro/nano-fabrication MEMS-based Micro Direct Methanol Fuel Cells Elimination of Initial Filling and Newton Ring in Micro Capillary Pumped Loop by Micro-matrix Posts Thermal Bubble Motion in Microchannel A Wireless Accelerometer Network for Medical Rehabilitation Bending Loss Analysis of Curved Multiple-Slot Waveguides The Growth Of Sic Micro-Pillar Array by VaporLiquid-Solid Mechanism
Wengang Wu
Invited
428
Xiaohong Wang
Tsinghua University, China
Invited
429
Chin-Tsan Wang
Oral(late-news)
430
Chin-Tsan Wang
Oral(late-news)
431
Ren Wang, Hang Guo, Jiashan Xu, Wen Ko Xiamen University, China
Oral(late-news)
432
Alireza Kargar, Hang Guo
Shiraz University, Iran University of Electronic Science and Technology of ChinaChina
Poster(late-news)
433
Yi F. Chen, Xing Z. Liu
Poster(late-news)

Ieee Nems 2010 Accepted Papers

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Ieee Nems 2010 Accepted Papers

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IEEE-NEMS 2010 Accepted Papers

Paper Status (Oral/ Poster/Invited) Oral

Tsinghua University, China

Xiamen University, China

Peking University, China

Wuhan University of Technology, China

National Cheng Kung University, Taiwan

National Cheng Kung University, Taiwan