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SCALING LAWS
Lecture #2 October 3, 2006
Northwestern University
OUTLINE:
Introduction Scaling in Mechanics Scaling in Adhesive Forces Scaling in Electromagnetic Forces Scaling in Piezoelectric Effects Scaling in Fluid Mechanics Scaling in Heat Transfer The Trimmer Force Scaling Vector Scaling Examples
Manipulation in the Micro-world Actuation Scaling in Machine Tools and Factory
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Size of Things
Micro-world Scale
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Why Miniaturization?
Minimizing energy and materials used for the manufacture of devices Integration with electronics; simplifying systems Cost/performance advantages Faster devices Increased selectivity and sensitivity Exploitation of new effects, e.g., the breakdown of continuum theory
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The three parameters that can be changed when the size of a structure is increased/decreased are: Dimensions (e.g., thicker walls) Materials (e.g., from brick to steel) Design (e.g., from compression to tension elements) Linear extrapolation of length comes easy to us, but we are quickly at a loss when considering the implications that shrinking of length has on surface area to volume ratios (S/V) and on the relative strength of external forces (actuation mechanisms), e.g., capillary tubes: weight scales as L3 and surface tension as L.
A 1 m diameter capillary will raise water 30 m.
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BASIC PREMISE Isomorphic scaling (i.e., all dimensions scale uniformly CONSEQUENCE: Scaling will lead to various physical effects that influence overall system/device operation in unexpected ways
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Better understand the physical consequence of downscaling mechanical, electrostatic, electromagnetic, fluidic, and thermal devices. Based on the better understanding, explain the unexpected behaviors of micro machines and better understand why, in some cases, it makes sense to miniaturize a device for reasons beyond economics, volume and weight.
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S/V Relations
(I) Surface ~ (length)2 or S ~ L2 (II) Volume ~ (length)3 or V ~ L3 (III) Surface ~ (volume)2/3 or S ~ V2/3 In the last equation we learn that as the volume of a body is increased, its surface does not increase in the same proportion, but only in proportion to the two-thirds power of the volume (IV) S = k V0.67 or S/V = k V-0.33 The latter expression repeats another well-known fact: smaller bodies have, relative to their volumes, larger surface areas than larger bodies of the same shape
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Animal Size
Metabolic rate (watts) 1000 100 10 1
Small mammals must keep on eating to stay warm ((heat loss ~ l2 and heat generation (through eating) is ~ l3))---insects avoid this problem by being cold blooded A lower limit for lives in dry environment even for cold blooded animals, limiting them to 25~30 m, because they can NOT retain their vital fluids long enough to survive.
DArcy Thompson: On Growth and Form and Knut Schmidt-Nielsen: Why is Animal Size so Important?
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Animal Size
Number of life species
1,000,000
1-2 mm
100,000 5-6 cm 10,000 S/V effect, surface tension, viscosity and Brownain motion limit small size tension 1,000
100
103-104 m
105-106 m
Size
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OUTLINE:
Introduction Scaling in Mechanics Scaling in Adhesive Forces Scaling in Electromagnetic Forces Scaling in Piezoelectric effects Scaling in Fluid Mechanics Scaling in Heat Transfer The Trimmer Force Scaling Vector Scaling Examples Manipulation in the Micro-world Actuation Scaling in Machine Tools and Factory
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At the microscopic level, adhesion forces dominate, because the details of the forces at the molecular level are much larger than the gravitational ones
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Scaling of Energy
Kinetic energy: Ek = mv2/2; Thus, Ek ~ L3 Ek ~ L5
- for constant v - for v ~ L
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Scaling in Springs
Spring Force Fspring = K (L) ~ L Oscillating Frequency = 1 k ~ L3 / 2 2 m Oscillation Period Tsping ~ L3 / 2 Potential Energy E pot = K (L) 2 ~ L2
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I ml 2 l 5
Rotational Kinetic Energy 1 K = I 2 l 5 2
This implies that, at constant , the rotational energy of a small systems decreases rapidly. A small motor will reach top speed in a fraction of a second; large motors may require seconds to reach full speed.
MICRO STRUCTURE BULLETIN NO.2 MAY 1997
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max =
12 FLb 6 F = 2 l 2 2 2b l
If the same maximal stress is desired in the beam, then the applied load F must be reduced as the square of the linear dimension, by assuming simple beam theory holds at all structural scales and that the material properties are also constant
Oscillating Frequency
1 = 2
EI l 1 4 AL
A beam a thousand times smaller bends a million times less under its own weight. Resonant frequencies are large in small systems.
Wautelet, Michel. Scaling laws in the macro-, micro- and nano-world, European Journal of Physics 22 (2001): 602-611.
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Young and small trees appear slender and old and tall ones appear squat or stunted
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Compressed materials may withstand a maximal stress of max If they are submitted to their own weight, mg, max ~ mg/A (A cross section, e.g., ~ d2) it follows that max ~ L3/L2 ~ L For a given material max is constant, hence when the dimensions increase, the diameter, d, of the supporting material is such that d2 ~ L3, or
d ~ L3/2
CONSIDER: Animal bones!
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Scaling in Swimming
Skin friction R l2
R skin friction V - swimming speed E Energy ~ mass of creatures muscles l3
E RV 2
V E l3 = 2 = l R l
The larger the creature grows, the greater its swimming speed
Madou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. Boca Raton: CRC Press, 2002.
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Flying
Flying (birds fly from 10.8 to 20.7 m/sec): Wing length ~ l ~ M 1/3 and wing area ~ l2 ~ M 2/3 The characteristic speed for flying varies as l 1/2 or M 0.17 Drag/lift forces are given by FL = 1/2 CL Av2. This expression has an order of 2 + 2v Of key importance is the lift-to weight ratio (divide by l3) which is of the order 2v-1 Since the lift-to-weight ratio should be invariant with scale to achieve flight a zero order scaling law is needed thus v must be 1/2 to achieve sufficient lift (same result as above)
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Adhesive Forces
Adhesive forces dominate in the micro-world Adhesive forces are due to the forces between atoms and molecules Three forces:
Van der Waals force Surface tension Electrostatic force
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Scaling in Friction
In the macro-world, friction is independent of the contact area. Ffr = Fgr = mg ~ L3 In the micro-world, due to surface roughness and large adhesive forces, striction (i.e., the combination of adhesion and friction) forces, Fstr, has to be taken into account: Fstr ~ L2
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OUTLINE:
Introduction Scaling in Mechanics Scaling in Adhesive Forces Scaling in Electromagnetic Forces Scaling in Piezoelectric effects Scaling in Fluid Mechanics Scaling in Heat Transfer The Trimmer Force Scaling Vector Scaling Examples Manipulation in the Micro-world Actuation Scaling in Machine Tools and Factory
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Ei =
r6
H = 2n2
Feddema, Xavier and Brown, 1999, Micro-Assembly Planning with van der Waals Force
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Total Energy
Fvdw~L2
http://www.control.hut.fi/Kurssit/AS74.3136/materials/scaling_s.pdf#search=%22Qu an%20Zhou%2C%20scaling_s.pdf%22
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http://www.control.hut.fi/Kurssit/AS-74.3136/materials/scaling_s.pdf#search=%22Quan%20Zhou%2C%20scaling_s.pdf%22
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http://www.me.jhu.edu/~thwang/notes/Scaling-I.pdf#search=%22Jeff%20Wang%20Johns%20Hopkins%20University%2C%20scaling%22
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Assume R2 << d,
-the surface tension force d-the object diameter
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The mass of a liquid in a capillary tube, and hence the weight, scales as L3 and decreases more rapidly than the surface tension, which scales as L as the system becomes smaller. That is why it is more difficult to empty liquids from a capillary compared to spilling coffee from a cup.
http://www.me.jhu.edu/~thwang/notes/Scaling-I.pdf#search=%22Jeff%20Wang%20Johns%20Hopkins%20University%2C%20scaling%22
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Small object, a metal ball of 0.8mm in diameter, 2.4 mg in weight is successfully picked up
Ref: http://www.aolab.mce.uec.ac.jp/AOLAB/Eng/IWMF/IWMF.html
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Xiaorong Xiong, Yael Hanein, Controlled Multibatch Self-Assembly of Microdevices, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 12, NO. 2, APRIL 2003
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Electrostatic Forces
q q
Definition:
The electrical force of repulsion or attraction induced by an electric field E r
Coulombs law
F= 1 qq ' 4 r 2
-permittivity of the material separating two particles
Madou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. Boca Raton: CRC Press, 2002
Northwestern University
WLV 2 1 E = CV 2 = 0 r 2 2d
0 and r are the permittivity and relative permittivity of the dielectric medium
L
0, r l0
E (l 0 )(l 0 )(l1 )(l1 )(l1 ) 2 = l3 1 l
http://www.control.hut.fi/Kurssit/AS-74.3136/materials/scaling_s.pdf#search=%22Quan%20Zhou%2C%20scaling_s.pdf%22
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Fd
A 10x size reduction of the parallel plates will lead to a 100x decrease in the electrostatic forces
Hsu, Tai-Ran MEMS & MICROSYSTEMS: Design and Manufacture. Boston: McGraw Hill, 2002.
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Micro-intuition The Paschen effects suggest yet another advantage in the nonlinear region - the field scales like l -1/2 and the force like l1 Understanding scaling allows one to choose an actuator principle with more confidence There are many factors though beyond scaling that play a role in the decision which actuator mechanism to use e.g. absolute energy density
Breakdown Voltage V 1400 V 1200 1000 800 600 400 200 0 0 2 2.6 m 10 13. 16 m At 1 atmosphere = 760 mm Hg New Physics and Chemistry 20 30 40 Pressure x distance P X d ( mm Hg-mm)
Madou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. Boca Raton: CRC Press, 2002
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Madou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. Boca Raton: CRC Press, 2002
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Electrical fields can exert great forces but generally across very short distance only
Left: Vertically driven polysilicon bridge Resonant microstructures/devices used for accelerometers Right: Laterally driven electrostatic actuator large displacement devices
Madou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. Boca Raton: CRC Press, 2002
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Electrostatic Applications
Actuators
Optical switches Micro motors (wobble) Micro valves Grippers X-Y stages for AFM
Sensors
Gyroscopes Accelerometers
Linear Electrostatic Motor (comb driver) Micro-gripper Ref: Enikov 2003
Madou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. Boca Raton: CRC Press, 2002
Northwestern University
OUTLINE:
Introduction Scaling in Mechanics Scaling in Adhesive Forces Scaling in Electromagnetic Forces Scaling in Piezoelectric effects Scaling in Fluid Mechanics Scaling in Heat Transfer The Trimmer Force Scaling Vector Scaling Examples Manipulation in the Micro-world Actuation Scaling in Machine Tools and Factory
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Electromagnetic Forces
Amperes law:
B dl = 0 J dA = 0 I
A
Madou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. Boca Raton: CRC Press, 2002
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F (l 2 )(l 2 ) = l 4
So a 10x reduction of size leads to a 10,000x reduction of electromagnetic force Scaling results of the interaction between a coil and a permanent magnet is somewhat better
F l3
Hsu, Tai-Ran MEMS & MICROSYSTEMS: Design and Manufacture. Boston: McGraw Hill, 2002.
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F l3
Assume constant heat flow per unit area of winding
F l3
The assumption of a constant temperature difference between windings and the environment yields l2, yet the power dissipation per unit volume scales as l-1. Superconductors could eliminate this problem.
Hsu, Tai-Ran MEMS & MICROSYSTEMS: Design and Manufacture. Boston: McGraw Hill, 2002.
Northwestern University
OUTLINE:
Introduction Scaling in Mechanics Scaling in Adhesive Forces Scaling in Electromagnetic Forces Scaling in Piezoelectric effects Scaling in Fluid Mechanics Scaling in Heat Transfer The Trimmer Force Scaling Vector Scaling Examples Manipulation in Micro-world Actuation Scaling in Machine Tools and Factory
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Piezoelectricity
Piezoelectricity is the ability of crystals to generate a voltage in response to applied mechanical stress The piezoelectric effect is reversible in that piezoelectric crystals, when subjected to an externally applied voltage, can change shape by a small amount Piezoelectric material: crystals
A 1 cm cube of quartz with 500 lbf (2 kN) of correctly applied force upon it, can produce a voltage of 12,500 V.
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Actuator Types
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Coupled Equations
The matrix d contains the piezoelectric coefficients for the material
Piezoelectric effect scales down with the bulk of the material, miniaturization opportunities are limited hybrid-type micro actuator are more reasonable
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Piezoelectric Materials
Applications:
Mechanical to Electrical
Force, Pressure, and acceleration sensors Smart Sensors for Side Impact Diagnostics High Voltage - Low Current Generators: Spark Igniters for Gas grills, small engines, etc. Yaw Rate Sensors Platform Stabilization Sensors
Electrical to Mechanical:
Ultrasonic motors, Small Vibration Shakers Microactuators (High Precision Macro actuators) Sonar array arrays for collision avoidance Pumps for Inkjet Printers
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Scaling in Electricity
Electric resistance:
- electric resistivity of the conductor L Length A cross section area
R=
L
A
P=
v2 l R
Punit =
P l 2 = l 1 Area l
Reduction in size leads to more dissipated power. One way to diminish this effect is to reduce the applied voltage
Hsu, Tai-Ran MEMS & MICROSYSTEMS: Design and Manufacture. Boston: McGraw Hill, 2002.
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Scaling in Electricity
Capacitance:
C = 0A/d
Charge:
C~L
Q = CVel
Q~L
Ecap = Q2/2C
Ecap = ~ L
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Scaling in Electricity
Magnetic field in a solenoid:
n number of turns L wire length Iel - current
B = Ieln/L
B~L
(It is assumeb that n remains constant and that a constant current density is maintained)
Emag = B2Vvol/2
Emag ~ L5 Fmag ~ L4
(Technological problems must also be considered: Number of turns not independent of L since very this wires cannot be yet manufactured; Solenoids smaller than 1 mm3 seem impractical; Maximum current density is limited by energy dissipation (i.e., maximal allowable temperature; Etc.)
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Scaling in Electricity
Previous laws apply for miniaturizing devices it is more important to look at the scaling of electric power supplies
For a system that carries its own power supply, the available power is related to the volume, i.e., Eav (l)3 Therefore, P/Eav (l)-2
This means that a 10x reduction in the size of the power supply system would lead to a 100x greater power loss due to the increase in resistivity
Hsu, Tai-Ran MEMS & MICROSYSTEMS: Design and Manufacture. Boston: McGraw Hill, 2002.
Northwestern University
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Northwestern University
OUTLINE:
Introduction Scaling in Mechanics Scaling in Adhesive Forces Scaling in Electromagnetic Forces Scaling in Piezoelectric effects Scaling in Fluid Mechanics Scaling in Heat Transfer The Trimmer Force Scaling Vector Scaling Examples Manipulation in the Micro-world Actuation Scaling in Machine Tools and Factory
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Newtonian flow
Shear stress and velocity is linearly related Only a function of the nature of the fluid Water, air
Non-Newtonian flow
Viscosity is also a function of velocity gradient; decreases as gradient increases Milk, blood
F = = A s u h
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8 xu p = r2
r 4 p Q= 8 x
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Scaling in pressure
Assume constant u, x 8 xU p = 2 ~ [l 2 ] r Large pressures are needed to drive micro-flows
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Assume U~l =>Re [l]2 Always laminar flow! Dominant laminar flow in micro systems makes it difficult to mix liquids in micro-channels
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~ [l 2 ]
Viscous forces rapidly damp any motion for objects with small dimensions Small "swimming" objects are very rapidly brought to a halt due to viscosity. A very small body remains immobile in air, as experienced by us by looking at dust in sunrays
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OUTLINE:
Introduction Scaling in Mechanics Scaling in Adhesive Forces Scaling in Electromagnetic Forces Scaling in Piezoelectric effects Scaling in Fluid Mechanics Scaling in Heat Transfer The Trimmer Force Scaling Vector Scaling Examples Manipulation in the Micro-world Actuation Scaling in Machine Tools and Factory
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Scaling in Thermodynamics
Energy required to heat a system to temperature T is proportional to mass
Eth ~ L3
For conduction and radiation power dissipation is proportional to area
Pd ~ L2
The time needed to homogenize the temperature in a system of given shape is
th ~ L 2
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Q = kA
Fourier number
T ~ [l ] x
commonly used to determine the time increments in a transient heat conduction analysis:
Cp-Specific heat
Thermal diffusivity
Q Rate of heat conduction
Easier to remove heat from a smaller object 10x reduction in time with a 10x size reduction Application to mammals Efficient micro heat sinks dissipate up to 1 kw/cm2, 40 time more than a conventional heat sink
Hsu, Tai-Ran MEMS & MICROSYSTEMS: Design and Manufacture. Boston: McGraw Hill, 2002.
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Q = hAT ~ [l 2 ]
h - Heat transfer coefficient Q - Heat flow Total heat flow primarily depends on the crosssectional area, A
Hsu, Tai-Ran MEMS & MICROSYSTEMS: Design and Manufacture. Boston: McGraw Hill, 2002.
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Scaling in Thermodynamics
Nature seems to favor small, e.g., insects are very well adapted: See species abundance curve (many niches) Insects walk on water (surface tension supports their mass m) Insects jump very far (E~mh and muscle for that work is ~m so h is a constant) Faster cooling and heating (cold blooded) Small thermal stresses (Small Biot number, i.e., little thermal stress) Derivation of the heating/cooling time constant:
L Biot =
= CpV A
= CpV A
A = surface area V = volume Cp =specific heat capacity = heat transfer coefficient at the surface L = characteristic dimension = thermal conductance of the solid
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Scaling in Thermodynamics
By heating a micromachined and thermally isolated Pt line the thermal budget can be reduced drastically because: Small thermal mass makes the device consume much less power Switch on and off much faster Biot number is small so it does not crack that easily
B=
L
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Thermal Actuators
A) Thermopneumatic actuator B) Bimetallic actuator C) Shape Memory alloy actuator
B
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Electrochemistry
A molecule diffuses over 10 m, 1 million times faster than over 1 cm:
Total area remains constant : R 2 = n r 2 e.g. from 50 to 2 m
x =
2D
A microbattery on a micromachine is usually not a good idea as power scales with volume, a solar cell incorporated in a micromachine might be a good idea though, i.e., beam the power in rather than generate it on the micromachine There are advantages in working with arrays of micro-electrodes, for example, an increased sensitivity for micro arrays of amperometric sensors electrodes (see next viewgraph)
Electrochemistry
Nonlinear diffusion and the advantages of using micro-electrodes:
I l = nFAD 0 C0
D 2 I l = nFAC 0 0 + AnFD t
C0 r
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OUTLINE:
Introduction Scaling in Mechanics Scaling in Adhesive Forces Scaling in Electromagnetic Forces Scaling in Piezoelectric effects Scaling in Fluid Mechanics Scaling in Heat Transfer The Trimmer Force Scaling Vector Scaling Examples Manipulation in the Micro-world Actuation Scaling in Machine Tools and Factory
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Trimmer has created a matrix to represent force scaling with related parameters of acceleration, time, and power density (P/V) that is required for scaling systems in motion Force scaling vector: F=[lF]=[l1 l2 l3 l4]T
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Scaling in Time
Even in the worst case, F~l4, the time required to perform a task remains constant, when the system is scaled down. Under more favorable force scaling, for F~l2, a system 10 times smaller can perform an operation ten times faster. Smaller things tend to be fast.
Hsu, Tai-Ran MEMS & MICROSYSTEMS: Design and Manufacture. Boston: McGraw Hill, 2002.
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When F~l2, P/V0~ l-1. When the system is scaled down 10 time, P/V0 increase by a factor of 10.
Wautelet, Michel. Scaling laws in the macro-, micro- and nano-world, European Journal of Physics 22 (2001): 602-611. Hsu, Tai-Ran MEMS & MICROSYSTEMS: Design and Manufacture. Boston: McGraw Hill, 2002.
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there is no reduction in acceleration (l0) there is an (l0.5)= (10)0.5= 3.16 reduction in time there is an (l0.5)= 3.16 reduction in power density (P/V) Finally, since V is reduced by a factor of 10, the power consumption reduces by P = 3.16/10 ~ 0.3 times reduction
Hsu, Tai-Ran MEMS & MICROSYSTEMS: Design and Manufacture. Boston: McGraw Hill, 2002.
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Example
A 1.0 cm cube of a material weighing 1.0N acted upon by gravity.
S
l*S
1 2x t= l2 a
l-linear dimension
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OUTLINE:
Introduction Scaling in Mechanics Scaling in Adhesive Forces Scaling in Electromagnetic Forces Scaling in Piezoelectric effects Scaling in Fluid Mechanics Scaling in Heat Transfer The Trimmer Force Scaling Vector Scaling Examples Manipulation in the Micro-world Actuation Scaling in Machine Tools and Factory
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Scaling Effects
Feddema, Xavier and Brown, 1999, Micro-Assembly Planning with van der Waals Force
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Scaling Effects
Adhesive force could be attributed to electrostatic, Van der Waals or surface tension. Proportional to surface area. In the micro-world, adhesive forces dominate gravity It is typically easy to pick up parts, but very difficult to release parts because of these interactive forces Part adheres to one finger when the gripper opens Pneumatic probes require reversible pressure to blow the part away from the probe, thus releasing it Release of objects is difficult.
Feddema, Xavier and Brown, 1999, Micro-Assembly Planning with van der Waals Force
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Feddema, Xavier and Brown, 1999, Micro-Assembly Planning with van der Waals Force
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Feddema, Xavier and Brown, 1999, Micro-Assembly Planning with van der Waals Force
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Feddema, Xavier and Brown, 1999, Micro-Assembly Planning with van der Waals Force
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Feddema, Xavier and Brown, 1999, Micro-Assembly Planning with van der Waals Force
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Feddema, Xavier and Brown, 1999, Micro-Assembly Planning with van der Waals Force
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The disadvantage of these strategies is that friction between tool and part may generate micro dust from yhe object.
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Pd
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Vacuum Gripper
A vacuum gripper consists of a glass pipette and a vacuum control unit.
Glass pipette Made from soda or borosilicat glass tubes. Characterized by inner and outer diameter. An optimum tip size can be found in the range between 25 and 50 m, which is about 25 - 50% of the object size
Vacuum control system Provides an adequate air flow rate in both directions for the whole range of operations Vacuum must be sufficient to pick up objects.
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Basic Skills Pick Hold Place Releasing Strategies Strip off Push Blow away
Ref: Zeach(1997)
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OUTLINE:
Introduction Scaling in Mechanics Scaling in Adhesive Forces Scaling in Electromagnetic Forces Scaling in Piezoelectric effects Scaling in Fluid Mechanics Scaling in Heat Transfer The Trimmer Force Scaling Vector Scaling Examples Manipulation in the Micro-world Actuation Scaling in Machine Tools and Factory
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Madou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. Boca Raton: CRC Press, 2002
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Electrostatics is useful in dry environments and over limited distances; eletromagnetics is still difficult to collapse into integrated structures.
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Hertz contact drives scaling of ballscrews and friction drives Leadscrews (sliding contact) scale linearly Wire capstan drives scale non-linearly (in favor of use in smaller machines!)
E.g., Roland Modella machines
Short stroke solid state actuators range of motion generally still too small
Piezoelectric, Electrostatic, Magnetostrictive Inchworm traveling wavedesigns that use these actuators can provide long range of motion
Much exciting development work in this area (Kobe, Delft, Philips) Enables X,Y, motion planar stages
The greatest benefit of small machines is architectures that allow actuators to mostly be anchored to ground thereby minimizing the amount of moving cables
Alexander Slocum, design of Design of Small Precision Machines
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OUTLINE:
Introduction Scaling in Mechanics Scaling in Adhesive Forces Scaling in Electromagnetic Forces Scaling in Piezoelectric effects Scaling in Fluid Mechanics Scaling in Heat Transfer The Trimmer Force Scaling Vector Scaling Examples Manipulation in the Micro-world Actuation Scaling in The Machine Tools and Factory
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Scaling of Structures
Size of machine/range of motion ratio is generally less of an issue the smaller the machine becomes. Structurally, smaller machines can be made higher performance:
Beam stiffness is proportional to:
Thickness to the 3rd power Length to the -3rd power Width
Because the structure is smaller it is often easier to make it monolithic and hence of a more rigid nature
More material is also often tolerated/allowed to be added Snap fit structures?
Cabling and wiring can become more problematic because sensor wires do not shrink.
Alexander Slocum, Design of Small Precision Machines
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Small precision machines might have work volumes on the order of:
Cubic foot, football, grapefruit Include benchtop hobby machines to benchtop production machines
http://www-ieem.ust.hk/dfaculty/ajay/courses/ieem215/lecs/cnc_f1.jpg
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MACHINE:
Thermal Expansion Geometric Errors Rigidity Clearance Forces Static Deformation Inertial Forces Etc.
MT
N N N N N2 N N3
mMT
1 1 1 1 1 1 1
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Scaling Laws
Natural Frequency:
n = n
EI mL4
E: I: m:
Elastic Modulus The area moment of inertia Mass per unit length Length of the beam an appropriate coefficient for boundary conditions
Equivalent Rigidity:
K eq =
EI L3
L: a n:
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Scaling Laws
Comparing Two Beams
I L4 IA = mA = LA =
Natural Frequencies
IB
4
n _ A = n _ B
Equivalent Rigidity
mB
LB
K eq _ A =
K eq _ B
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Modes 1 2 3
st
Natural Frequency (Hz) FE analysis Experiment 24.85 27.11 64.45 77.82 23.7 28.0 59.6 71.1
nd rd th
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Joint Properties
Modeling joints as springs and dampers in the lumped parameter model Parameter identifications using measured FRFs Lee et al. (2005) - Individual joint parameters are identified by separate sets of tests - Larger damping and smaller rigidity due to bolted and sliding joints were found.
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Lumped Model
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Exchangeable units
Middle-speed spindle (25,000 rpm) Low-speed spindle (with rotary encoder)
Laser units
Processes
Milling, Drilling, Turning, Grinding, Polishing, EDM, ECM, Laser machining Milling, Drilling, Turning, Grinding, Polishing, EDM, ECM, Laser machining Laser treatment, ED grinding, EC grinding, EC polishing, Laser-assisted milling, etc. Laser treatment, ED grinding, EC grinding, EC polishing, Laser-assisted milling, etc.
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2000
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Problems:
Technological hurdles Mass production How to ensure quality
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Conclusions
Due to the scaling down, there are so called scaling effects which must be taken into account in the micro-world. The physical laws remain the same, but their significance at different scales changes
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References
Hsu, Tai-Ran, MEMS & MICROSYSTEMS: Design and Manufacture. Boston: McGraw Hill, 2002. Madou, Marc J., Fundamentals of Microfabrication: The Science of Miniaturization. Boca Raton: CRC Press, 2002. Wautelet, Michel., Scaling laws in the macro-, micro- and nano-world, European Journal of Physics, 22 (2001): 602-611. Feddema, Xavier and Brown, Micro-Assembly Planning with van der Waals Force, 1999 Yamagata, Y., T., Higuchi, Micropositioning device for precision automatic assembly using impact force of piezoelectric elements, Proceedings - IEEE International Conference on Robotics and Automation, v 1, pp. 666-671, 1995 Arai, F. , D.Ando, T. Fukuda, Y. Nonoda, T. Oota, Micro manipulation based on micro physics, 1995.
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Northwestern University
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