1day Piezo Training 2010

Overview on piezoelectric actuators, mechanisms & motors with their related driving electronics: Technology & Applications
Topics overview
1 / Piezo materials for actuators
1.1/ Piezo theory & properties 1.2/ Multilayer ceramic 1.2.1 /current properties, trends, perspectives, 1.2.2 / Reliability aspects,
4 / How to choose an actuator & its related electronics ?

4.1 Exercises 4.2 Demonstration
5/ Piezomotors
5.1 / Inchworm and Inertial step motors 5.2 / Resonant structure 5.2.1 / example of motors 5.2.1 / modelling techniques 5.3 / Tribology of piezo motors 5.4 / Driving of piezo motors
2 / Piezo actuators & mechanisms

leveraged piezo actuators, 2.2/ Piezo mechanisms,
2.1/ Internally & externally
3 / Driving and control of piezo actuators

3.1 / Basic of amplifiers 3.2 / Static & Dynamic conditions
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6 / Applications & references
1 Day Piezo Training 2010
Piezoelectricity Theory & Properties
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Piezoelectricity : an overview
Materials aspects Equations Materials constants Technological aspects Illustrative example Electromechanical analogy
Piezo electric ceramics & magnetostrictive alloys

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Various effects in materials
Charge current Electrical field Magnetic field Stress Heat Light Permittivity Conductivity Mag-electric effect
Magnetisation Elec-mag effect Permeability
Strain
Temperature
Light Optic
Inverse piezo Elec. Caloric Elec. effect effect effect Magnetostriction Elastic constant Thermal expansion Photostriction Mag.caloric effect _ Specific heat _
Mag.optic effect Photoelastic effect _ Refractive effect
Direct Piezo- Direct Piezoelectric effect magnetic effect (biased mat.) Pyroelectric _ effect Photovoltaic effect _
"Smart" materials refer to materials having a non - diagonal effect (sensing or actuating functions).
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Active strains of active materials

Applying a field (E or H) on an free sample, it deforms
Small deformation in the elastic domain Strain = relative expansion : S = L / L
Expansion = positive strain / Contraction = negative strains Units : ppm= 10-6 or % = 10-2
Typical active free strains are S= 1000ppm = 0.1% Stroke : u = L = S . L

Example : L = 100mm, S = 1000ppm => u = L = 0.1mm = 100m
E L L
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Active stress of active materials

Blocked Stress of active materials
Stress = force par unit of surface : T = - F / A
Compression is positive stress ; Traction is negative stress Units : MPa = N /mm2
Typical active blocked stresses are T= 20MPa = 20 N /mm2

Ex. A = 1cm ; T = 20MPa => F = 2000N = 2kN
Stress from electromagnets T = B/2o = 0.4 MPa with B=1T
-F
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Active materials properties

Active materials offer small strains (ie small displacement) & high forces density compared with electromagnetic actuators
Field E Field / H Field E (MV/m) H (MA/m) Piezo-electrics Bulk PZT - 7 Bulk PZT - 4 Bulk PZT - 5 MLA Magnetostrictives Terfenol-D Mag. Shape Mem. NiMnGa H + 0.5 + 60 000 (6%) +2 H + 0.16 + 1 800 + 50 25 70 4 380 9.1 E E E E +- 0.5 + - 0.5 +- 0.5 +- 2.6 +- 70 +- 150 +- 300 + 1 250 +- 5 +- 10 +- 15 + 40 72 66 48 30 67 70 75 70 425 1300 3400 2100 350 325 195 180 7.7 7.6 7.5 8.0 Strain (ppm) Stress (MPa) Youngs modulus (Gpa) Coupling factor (%) Relative permitivity / permeability Curie temp. (C) Density (kg/m3)
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Piezoelectric effects
Piezoelectric material = non centro-symmetric crystal below the Curie temperature
d: piezo coefficient E: Electrical field S: Strain; D: Electric displacement T: Stress
D ~dT Direct effect: sensing
S ~dE Inverse effect: actuation Courtesy of APC
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Pyroelectricity & Electrostriction

Pyroelectric material = piezoelectric + polar material => P = p T
P: Polarisation; T: Temperature; p: pyroelectric coefficient
Pure electrostrictive material = non piezoelectric material => S = M E2 = Q P2

M & Q: cofficients of electrostriction; S: strain; E: electric field
Pyroelectricity & electrostriction are disturbing effects on piezoelectric response Actually, piezo strain combines all effects in a more or less extend :
S = d E + M E2 + T
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Ferroelectric materials
PZT lead Titanium Zirconate: Ferroelectric material under the Curie temperature. A poling process gives the material its remanent polarization. During the poling process, the material is subjected to a high electric field at the Curie temperature. If the material is subjected to a temperature that is greater than its Curie point, its no longer piezoelectric but it can be repoled again in some conditions. Std 80C but 150C on request
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Ferroelectric materials
Origin of poling in ferroelectric materials :
Crystal structure, + & - charge centres may not coincide, even if E = 0. Ferroelectric = material whose direction of poling can be reversed by an electric field.
Characteristic of a ferroelectric material :

high relative permittivity
D = 0 E + P = . 0 E D : electric displacement , P : polarization ,
: relative permittivity
Interpretation of poling in PZT crystal structures

Perovskite structure in PZT Different shapes of the crystal structure
Sub solidus phase diagram of PZT Ceramics (B. Noheda & al)
Courtesy of Tokin
Intrinsic / Extrinsic piezoelectricity

Intrinsic piezoelectric effect : strain of the crystal lattice Extrinsic piezoelectric effect : domain reorientation => Hysteresis
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Hysteresis butterfly cycle
Courtesy of Tokin
Repoling process in the domains
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Piezo ceramic vs Single Crystal

PZT Piezo ceramics
Industrial materials produced by sintering of powder Compatible with multilayer technique to get low voltages Linear strain response
Single crystals
New material obtained by crystal growth Large strains with large E-field Not compatible with multilayer so need large voltages Non linear (electrostrictive contribution)
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Piezo ceramics : Manufacturing process of bulk materials

Mixing oxyde powders Zr02, Ti02, PbO, with a binder Sintering at high temperature (1200C), Cutting & Grinding at the correct size, External electrodes deposition (Screen printing, PVD, ) Poling operation : room temp. / 2 kV/mm for soft - type, 120C, 5 kV/mm, in oil for hard type.
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General constitutive law of piezoelectric body

No electrostriction & pyroelectric effects Choosing T and E as independent variables
S =
S : Strain
E s
T + d n E n
T mn
D m = d m T +
T : Stress
En
, = 1, ..., 6 m, n = 1, 2, 3
E : Field
3 6 P 4 5 1 2
D : Induction
sE : Compliances at constant field d : Piezoelectric strains per unit of field eT : Permittivity at constant stress
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Constitutive law of PZT ceramics

PTZ ceramic : 6 mm class
E s11 S1 E S s12 2 E S 3 s13 0 S4 S 5 0 = + S 6 0 D1 0 D 2 0 D 3 d 31
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E E s12 s13 0 0 0 E E s11 s13 0 0 0 E E s13 s 33 0 0 0
0 0 0 0
0 0 0 0
E s 44 0 0
0 sE 0 44
E 0 0 s 66
0 d 15 0 d 15 0 0
0 0
d 31 d 33 0 0 0
d 31 T1 0 0 d 31 T 2 0 0 d 33 T3 0 d 15 0 T4 T5 d 15 0 0 . T6 0 0 0 T E1 11 0 0 E T 2 0 11 0 E 3 T 0 0 33 0 0
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Electromechanical coupling effect

Materials show 3 coupled deformation due to non-zero coefficients d33 d31 d15
3 6 P 4 5 1 2
33 : Longitudinal mode In static : S3=d33 E3

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31 : Transverse mode In static : S1=d31 E3

15 : Shear mode In static : S5=d15 E1

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Materials properties are characterised by intrinsic coupling coefficients
Longitudinal coupling factor k33 Transverse coupling factor k31 Shear coupling factor k15
k332 = d332 / s33E 33T k312 = d312 / s11E 33T k152 = d152 / s44E 11T
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Meaning of the coupling coefficient:
Coupled energies in a usual magnetic transformer
U12 = Mutual Energy U1 = Energy in the Primary U2 = Energy in the Secondary
Transformer coupling factor
k2 = U122 / U1 .U2
In an electromechanical device
Uem = Mutual Electromecanical Energy Ue = Electrical Energy Um = Mecanical Energy
kem2 = Uem2 / Ue .Um

Physical properties of piezo materials
Courtesy of Nava Seter (ABC of piezoelectricity, Interlaken conference, feb. 2002)
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Constitutive law of PZT ceramics

Simplification for a length - expansion mode (33-mode)
T1 = T2 = T4 = T5 = T6 = 0 E1 = E 2 = 0 ; D1 = D 2 = 0
S 4 = S5 = S6 = 0
E S1 = S2 = s13 . T3 + d 31 E 3 E S3 = s33 . T3 + d 33 E 3 T D 3 = d 33 . T3 + 33 E 3
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Laws of Piezo actuators

Simplification for a length - expansion bar (33-mode)
A : active area L : active length
U1 0 0 L
U2 + V
E k E = A / s 33 L
N = d 33 . k E
T C T = 33 . A / L
u = u 2 u 1 = L . S 3 F = A . T3 V = L . E3 Q = A . D3
1 N .F + E .V kE k N Q = E .F + C T .V k u =
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Simplification for a length - expansion bar (33-mode)
U1 0 0 L
U2 + V
S1
S2 S3 D
3
= = =
E s13 E s 33
. T3 . T3 +
d 31 d 33
T 33
E3 E3 E3
k332 = d332 / s33E 33T = N2/kE.CT
d 33
. T3 +
N 1 . F + E E . V k k N . F + CT . V Q = k u =

Generalisation
u
k2 eff Cs
N2 = CTk E = C T (1 k 2 ) eff
F = k E .u + N.V Q = N u +C S .V
NV k
F NV
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Generalisation Characteristic curve of a piezo actuator
u max = NV/K = Max Displacement @ V Stroke u max If V = Vmax = 150 V => u max is the max stroke
u = (NV-F)/K
V=150V
V=50V
Slope 1/K = elasticity Force
Fb NV = Max Force without displacement @ V
If V = Vmax = 150 V => Max Force = Blocked Force (Fb)

Additional effects in static applications

Hysteresis:
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Creep effect:
Actuator's displacement (m) - Record of the creep effect using a capacitive displacement sensor 140,00 120,00 Displacement (m) 100,00 80,00 60,00 40,00 20,00 0,00 0 200 400 600 800 Time (s) 1000 1200 1400 1600
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Displacement with load: 2 cases
Stiffness Gravity
May be accounted in equivalent circuits
(b)
(a)
(c)
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Application parameters that influence the piezo actuators

Spring Gravity
Displacement
Displacement Spring stiffness No-load charac. curve
Working point Load characteristics Shifted curve
Force Force

Displacement with load: 2 cases
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Laws of Piezo actuators - Equivalent circuit

Equivalent electromechanical circuit : Dynamic aspects
v = v 2 v 1 = I = j Q c = 1/ k
I C V
s
Current
j u
speed
1 F = v + N V j c I = N v + j C s V
CS = Blocked capacitance
Motional capacitance = 1/ Stiffness
NV 1:N
Electrical Branch
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Motional Branch
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Electro-mechanical analogy
Symbol Electric Mechanics Symbol
Capacitance
Elasticity
e = 1/k (k=stiffness)
Inductance
Mass
Resistance
Damping
rm u
Electrical charge
Displacement
I = dQ/dt = j.Q
Current
Speed
V = du/dt = j.u
Potential
Force
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Equivalent circuits & related data

Same equivalent circuit but : Boundaries conditions
Free-free configuration: The same mass each side of the piezo actuator: The stroke is divided by 2 and the resonant frequency is higher. Blocked-free configuration: Blocked on the back side of the actuator the stroke in the front is the full stroke & the frequency is lower than the free free configuration.
Blocked-Blocked configuration: the piezo actuator is rigidly fixed on each side. The actuator generates force when voltage is applied.
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Losses in equivalent circuit

Dielectric Losses
Dielectric loss angle : tg d => Ro
Mechanical losses
Mechanical quality factor : Qm => rm
I C
Ro
s
rm
NV 1: N
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Masses in equivalent circuit

Masses effect
In blocked-free condition,
Blocked side : v1 = 0 Free side, loaded with a mass M : F = j..M.v2
In free-free conditions, with M1 and M2

Equivalent mass M = M1 . M2 / (M1 + M2)
I C
Ro
s
rm
v M F
NV 1: N
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Transfer functions
Vibration speed & displacement vs voltage
NV = v . (1 / j c + rm + j M ) v = NV / (1 / j c + rm + j M ) v / V = j cN / (1 + j cr m 2 cM ) u / V = cN / (1 + j cr m 2 cM )
v M F
I C
Ro
s
rm
NV 1:N
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Transfer functions
Mechanical resonance frequency & Mode quality factor :
r =
1 cM
kE M
1 kE = Q = r cr m r rm
v / V = j cN / (1 + j / Q r ( / r ) 2 ) u / V = cN / (1 + j / Q r ( / r ) 2 )
I C
Ro
s
rm
v M F
NV 1:N
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Transfer functions
At low frequency : Free displacement
u / V = cN
v / V = j cN
v / V = Q r cN
At resonance : Amplified displacements
u / V = QcN = Q .( u / V ) = 0
At high frequency : Blocked force
F /V = N
I C
Ro
s
rm
v M F
NV 1:N
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Equivalent circuit & associated data

Example APA200M+Mass M=40gr (Blocked-Free)
Low Frequency f << fr
No opposing force from the Mass Free displacement : uLF = N/k. V
Resonance f = fr
fr = 1/2pi (k/M)0.5 Amplification by Qm : Mec. Quality factor Displacement : uRes = Qm. N/k. V = Qm. uLF 3dB Bandwidth : df / Qm = fr /df
High Frequency f >> fr
Mass opposing force = Blocked force : FHF= N.V
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Example APA200M+Mass=40gr (Blocked Free)
Low Frequency f << fr
Free disp. : uLF = N/k.V => uLF/V= N/k u=230m@V=150V => uLF/V= 1.3m/V
Resonance f = fr
k=0.32N/m ; M=0.04kg ; Qm = 10 fr = 1/2pi (k/M)0.5 => fr = 0.4kHz Displ. : uRes = Qm. uLF => uRes/V= 13m/V 3dB Bandwidth : df = fr / Qm => df = 40 Hz Blocked force : FHF= N.V => FHF/ V = N F=73N@150V => FHF/ V = N = 0.43N/V
High Frequency f >> fr
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APA200M+Mass=40gr (B.F.) / displacement per volt vs freq.
[m/V] 16,00 14,00
Displacement generation
[]
0 -20 -40
Controllable displacement : Displ. Amplitude & Phase = Constant if :
12,00 -60 10,00 8,00 6,00 4,00 -160 2,00

Mod(u) [m/V] Phase(u) []
-80 -100 -120 -140
f < fr/3
uLF/V = N/k
0,00 0,000
fr
0,100 0,200 0,300 0,400 0,500 0,600 Frequency [kHz] 0,700 0,800
-180 -200 0,900
Cedrat Technologies - COMPACT v4.33
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APA200M+Mass=40gr (B.F.) / displacement per volt vs freq.
[m/V] 16,00
[]
ures/V = Qm. N/k 14,00 Vibrations : Non Controllable displacements (Phase varies) Amplitudes are amplified by Qm
12,00 10,00 8,00 6,00 4,00
Vibration generation
0 -20 -40
Qm
Mod(u) [m/V] Phase(u) []
-60 -80 -100 -120 -140 -160
uLF/V = N/k
2,00 0,00 0,000
fr
0,100 0,200 0,300 0,400 0,500 0,600 Frequency [kHz] 0,700 0,800
-180 -200 0,900
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APA200M+Mass=40gr (B.F.) / speed per volt vs freq.
Mod(v) [mm/s/V] 40,0 35,0 Phase [] 0,00 -20,00 -40,00
Vibration generation
Vibrations : Controllable Speed Amplitude 3dB Bandwidth : df = fr / Qm
30,0
Mod(v1) [mm/s/V]
25,0 20,0 15,0 10,0 5,0 0,0 0,0000
-60,00 -80,00
Phase(v) []
df = fr / Qm
-100,00 -120,00 -140,00 -160,00 -180,00 0,9000
fr
0,1000 0,2000 0,3000 0,4000 0,5000 0,6000 0,7000 0,8000 Frequency [kHz]
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APA200M+Mass=40gr (B.F.) / Force per volt vs freq.
5,0 4,5 4,0 3,5
Dynamic Force generation
Controllable Dynamic Forces Force Amplitude & Phase = Constant if f >1.5 fr
Force [N/V]
3,0 2,5 2,0 1,5 1,0
Mod(Fa) [N/V]
FHF/V = N = force factor
0,5 0,0 0,0000
fr
0,1000 0,2000 0,3000 0,4000 0,5000 0,6000
Frequency [kHz]
0,7000 0,8000 0,9000 Cedrat Technologies - COMPACT v4.33
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Admittance from equivalent circuit

Transferring motion branch in the electrical branch Motional capacitance Cm = c . N 2
Motional resistance Motional inductance
R m = rm / N Lm = M / N
2 2
im
Cm
Rm
Lm
C
Ro
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APA200M+Mass=40gr (B.F.) / Admittance vs frequency
[S]
2,00E-02 1,80E-02
[]
100
Free capa. : CT Blocked capa. : CS Motion Cap : Cm Cm=CT-CS Effective coupling keff2 = 1 - fr2/fa2 =1-CS/CT
1,60E-02 1,40E-02 1,20E-02 1,00E-02 8,00E-03 6,00E-03 4,00E-03 2,00E-03 0,00E+00 0,0000
80
Mod(Y) [S] Phase(Y) []
60
CS CT
40
20
fr
0,1000 0,2000 0,3000
fa
0,4000 0,5000 Frequency [kHz]
-20 0,6000 0,7000 0,8000 0,9000 Cedrat Technologies - COMPACT v4.33
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Equivalent circuits & related data

Effective coupling coefficient :
keff2 = 1 - fr2/fa2 = Cm / (Cm+Cs)
Electrical Resonance frequency :

fr2 = (1/42) k/m = (1/42) / CmLm
Electrical Antiresonance frequency :

fa2 = (1/42) [(Cs+Cm)/LmCsCm]
Mechanical quality factor :

Qm = 1/(2frCmRm)
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3 Frequency regions
Low frequency f < fr/3
Positioning applications Fast actuation: injection valves, shutters
Resonance f = fr
Sonic and ultrasonic transducers Acoustic generators
High frequency f> fr

Structure exciters in health monitoring Proof mass dampers
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Displacement Transient response for a step voltage
Overshot effects & Stabilisation time => Dynamic effects occur even on static applications => High fr and low Q is better for static applications
Step response
T = 1 / fr Tmin (open loop) = T/4 Tmin (Closed loop) = T/3
u / u0
1
High Q Low Q
1/4
0 0 1 2 3 4 t/T 5
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Additional effects in dynamic applications

Multiple vibration modes
Multi modes electromechanical model:
Voltage
Speed
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Electromechanical circuits : summary

Lumped representation, Electromechanical transduction means a strong coupling effect, Basic representation, widely used in measurements, semi active control, switching electronic design, A common basis for piezoactive actuators description.
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Conclusion
Piezoelectricity : strong electromechanical coupling effect, The materials are characterised through 3 types of constants (s,d,), Wide use of the electromechanical analogy, An electrical scheme can be derived for simple cases and measured.
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Piezoelectric Multi-layer Ceramics
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Introduction
Basic architecture Process Internal & external electrodes Behaviour, failure modes Future of MLA
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Bulk Piezoelectric Stack

Structure
Assembled stack made of thick piezo plates & external electrodes electrically connected in parallel with alternative poling and electrodes
+ -
P P P P
E E E E
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Piezoelectric multilayer actuators

Structure
Monolithic Stack made of thin piezo layers & internal electrode electrically connected in parallel with alternative poling and electrodes & external electrodes
P P
E E
S S
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Piezoelectric Multilayer actuator : technological aspects
Green tape (mixture of oxydes (Zr02, Ti02, Pb0) with an organic binder), Indexing and screen printing of internal electrodes, Laminating operation (tape, stacking), Sintering operation, Cutting, grinding at the correct size, External electrodes deposition, Insulation, Poling operation.
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Bulk Piezo Ceramic: Manufacturing process
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Piezo Multilayer actuator : Manufacturing process
Courtesy of Ceramtec
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Piezo Multilayer components : technological aspects

Technical difficulties :
compatibility between the internal electrodes material and the sintering operation, shrinking during sintering (15 - 20 %).
Nickel, Copper
Palladium
Platinium
850C
1150C
1250C
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Piezoelectric multilayer actuators : internal & external electrodes

Internal and external electrodes influence the materials properties ; example of electrodes configurations :
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Fully open internal electrodes :
indexing operation, thermal mismatch, capability to deal with several sizes are easy, external insulation (esp. on the external electrodes) is tricky, subjected to ion migration, patented by Tokin (J).
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Semi-open internal electrodes : thermal mismatch is medium, indexing operation is medium, need for an insulating coating, subjected to ion migration,
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Buried internal electrodes
thermal mismatch & stress relieving are tricky, no needs for external insulation coating, current density is limited, non poled ceramic tends to clamp the component.
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Special design internal electrodes :
claimed advantage : stress relieving during the sintering operation is easier, performances depend on the clamped region, 1st special geometry patented by Siemens (D).
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Piezoelectric multilayer components : technologies for external electrodes

Sputtered Ag-Pd external electrodes :
bad solderability,
Ni-Au electro-deposited + Pb-Ag solder :

better behaviour, subjected to fatigue effects,
Ni-Au electro-deposited + brazed mesh :

good fatigue behaviour, patented by Ceramtec (D), subjected to failures with thermal shocks.
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Coating technologies
Required dielectric strength : 80 kV/mm, Stability of the electrical insulation with temperature, humidity, Compatibility with aggressive media, Relative independence of the elastic behaviour with temperature, ageing, Easiness of application (viscosity, ..).
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Functional performances
Standard materials (PZT5H) gives 1000 - 1300 ppm @ 1.5 - 2 kV/mm, On-going development of PZT5A materials :
high Curie Temp. (300 C), 1300 ppm @ 1.5 - 2 kV/mm, not necessarily commercially available.
Hard - type material (PZT4) may give 2000 ppm when driven at the mechanical resonance :
subjected to high cost of the internal electrodes.
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Functional performances
Static strain level Dielectric losses CTE Drift Hysteresis
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FMECA analysis
Process errors are expected to be discovered at the poling operation or through an over- voltage test, Electrical breakdown is the most current problem :
loss of insulation (failure in the coating due to humidity or excessive temperature), excessive stresses, crack propagation, Ag+ ion migration under humidity combined with high DC field.
Mechanical failure is often meet in dynamic conditions

Piezo ceramic are fragile in tensional forces See Prestressed-actuator section
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MLA tested in APA : Lifetime tests

1010 cycles are achieved on a APA200M-NM
! Prestressed Actuator
Test conditions : 0-150 V @ 625 Hz, continuous 101 cycles 109 cycles
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Electrical admittance evolution vs number of cycles.
Admittance (S) 0,8 0,7 0,6 0,5
Cyclage APA200M
Phase() 100 80 60 40 20 Mag 0 [S] Mag 1e6 [S] Mag 1e7 [S] Mag 1e8 [S] Mag 1e9 [S] Phase 0 [] Phase 1e6 [] Phase 1e7 [] Phase 1e8 [] Phase 1e9 []
0,4 0 0,3 -20 0,2 0,1 0 3300 -40 -60 -80 3900
3400
3500
3600 f( Hz)
3700
3800
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Fatigue effects of the external electrodes after 4 109 cycles
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Leakage current test under high humidity

Electrical DC field under humidity Ion migration Increase of leakage current Increase of temperature Electrical breakdown
Current (A)
Leakage current test

2.00E-03 1.20E+02
0.00E+00
-2.00E-03 8.00E+01 Relative humidity (%) -4.00E-03
-6.00E-03
APA50S_01011 APA50S_00060 APA50S_00059 PCT1 PCT 2 Failure 4.00E+01
-8.00E-03
-1.00E-02
T1 T2 Failure T3 APA150M_01003 TCMEL Rel. Humidity (%) 0 200 400 600 Time (hours) 800 1000 1200 0.00E+00 1400
-1.20E-02
-1.40E-02
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Reliability aspects
Arc over is the most important source of failure, Expertise of failed components.
Optical microscope view
Acoustic tomography
High porosity
Void probably after the arc over ?
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Future of MLAs
Most advanced factories produce 100,000 units to 1,000,000 units / year. Demonstrating the reliability in a given applications :
Arrhenius laws, Hass-halt tests,
Correct functional behaviour with a low sintering temperature, Use of the internal electrodes materials as dopants for the PZT material.
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Piezoactive actuators : introduction

Material properties, Advantages and drawbacks of piezoactive actuators, Conventional mechanical amplifiers,
internally leveraged actuators externally leveraged actuators
Amplified Piezo Actuators = Innovative solutions, Design methodology & Performances, Mechanisms = multi axis actuation Conclusion.
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Active materials : properties

Field E Field / H Field E (MV/m) H (MA/m) Piezoelectrics Strain Stress Youngs modulus (Gpa) Coupling factor (%) Relative permitivity / permeability Curie temp. (C) Densit y (kg/m3 )
(%)
(MPa)
PZT - 7 PZT - 4 PZT - 5 CMA

Magnetostrict ives
E E E E
+- 0.5 + - 0.5 +- 0.5 +- 2.6
+- 0.007 +- 0.015 +- 0.030 + 0.125
+- 5 +- 10 +- 15 + 40
72 66 48 30
67 70 75 70
425 1300 3400 2100
350 325 195 180
7.7 7.6 7.5 8.0
Terfenol-D
+ 0.16
+ 0.18
+ 50
25
70
380
9.1
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Active properties
MATERIALS
Optimal Max S-cst Max fieldMax Control dielectric / cst elastic Mechanical dissipated field quality factor magnetic energy energy E electric energy density density H magnetic density on (Qm)opt (Qm) (kJ/m3) (kJ/m3) opt (kJ/m3)
Max dissipated energy density on Qm =2 (kJ/m3)
MASSIVE PIEZOELECTRICS PZT - 8 PZT - 7 PZT - 4 PZT - 5 Soft type Hard type TERFENOL-D E E E E E E H 0.6 0.3 0.7 1.6 8.0 12.6 8.2 16.9 17.4 19.0 26.0 26.7 25.0 50.0 6.1 9.1 5.2 3.5 1.9 1.9 2.5 2.8 1.9 3.7 7.4 14.3 13.3 19.8 0.9 0.4 1.4 4.2 13.3 12.5 15.8
MULTILAYERED PIEZOELECTRICS
MAGNETOSTRICTIVES
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New European classification : example of material

Type 100 Property Free relative permittivity Curie Temperature Mechanical quality factor Piezoelectric charge coefficient Example of material Sym bol Unit Hard PZT 1100 - 1600 C 300 300 PC/N 300 Ceramtec SP4 Ferroperm PZ26 Matroc PZT4D Channel 5400 Type 200 Soft PZT 1600 - 2500 300 100 400 Ceramtec SP5 Ferroperm PZ27 Matroc PZT5A Channel 5500 Type 300 Very hard PZT 800 - 1100 250 800 250 Ceramtec SP8 Ferroperm PZ28 Matroc PZT8 Channel 5804 Type 600 Very soft PZT 2500 4000 180 100 600 Ceramtec SP51 Ferroperm PZ29 Matroc PZT5H Channel 5700
T33
Tc Qm d33
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Piezoelectric actuators and mechanisms
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Advantages & drawbacks of piezoelectric actuators

Limited displacements Subjected to fatigue effect (depends on the design) Temperature dependant (Curie temperature)
Fast response Unlimited positioning resolution Large force Non-magnetic operation & no magnetic field generated
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Piezoelectric Multi-Layer Actuators (MLA) History of piezo ceramics

1880 : Quartz (P.Curie) 1922 : Langevin Transducers 1960 : PZT ceramics
L/L = 0,3mm/m @ V= 2000V
Structure of a MLA
Piezo layers (PbZrTi) Internal Electrodes (Pt or AgPd) External Electrodes Insulation (Coating or ceramic)
1990 : MLA components

L/L = 1,2mm/m @ V=200V
The naked MLA ceramic bar is fragile to tensile force...
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Internally leveraged Actuators (stack) that is why we pre-stress it to increase its life time
Direct Piezo Actuators Two different prestress
serial parallel
Belleville washers
Piezo stack
DPA30
Preload / Prestress of Piezo Ceramic

Stress Strain Diagram
Thanks to an optimum static Preload, the strain is symmetric in traction & in compression The dynamic strain & stress range is symmetric and much more increased than without preload
F/A = Stress Piezo Ceramic is fragile in tensile stress
Elastic limit in traction Dynamic range with preload
S = Strain
Dynamic range without preload Optimum level of static preload / compression pre-stressing force
Elastic limit in compression
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Internally leveraged Actuators (stack)

Direct piezo actuators can be prestressed through an external frame.
Stress analysis of the pre-stress frame of the PPA (I-DEAS computation of half the frame)
The design of the parallel spring is dependant on the applied prestress.
PPA60L
Pre-load effect - short & open circuit
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Internally Leveraged Actuators (bender)
Courtesy of Mid (ACX) & CeraNova
Quick Pack 10ni

Courtesy of PI
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Ring Bender CMB-R - Courtesy of NOLIAC
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Internally Leveraged Actuators (unimorph)
Courtesy of Aura Ceramics Inc.
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Internally Leveraged Actuators (unimorph)
Thunder TH 8-R
Courtesy of Face international

Internally Leveraged Actuators (building block)
Courtesy of Michigan University & MSI
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Externally leveraged actuators (hydraulic amplification)
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Externally leveraged actuators (lever arm)

Use of flexural hinges and pivots
Hertzian pivots
MLA piezo ceramic
Mechanical Efficiency = (FActuator*uActuator) / (FMLA*uMLA) = 10%
flexure pivots
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Externally leveraged actuators (flextensional)
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Externally leveraged actuators (flextensional & others)
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Amplified piezoelectric actuators

magnification of the MLA displacements using an elastic amplifier, reduction of the blocked force, optimisation of the overall efficiency Includes a high prestress to get good dynamic properties
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Amplified piezoactive actuators

Use of the flextensional principle (uniform distribution of flexure pivots along the shell), The elastic amplifier is used to prestress the active material.
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Amplified Piezo Actuators

Finite element deformations (ATILA software)
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Amplified piezo actuators

Range of APAs
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Smallest APAs to largest APAs
APA 40XS , APA35XS, APA500XXL

APA static properties

APA Deformations
APA strain : Sa = ua / h Piezo strain : Sp = up / L
ua up/2 up/2
h
L

APA Deformations
APA strain : Sa = ua / h Piezo strain : Sp = up / Lp
Actuator data Free displacement Max Blocked force Stiffness Actuator Height Actuator free strain Active material data Length Section No-load strain Blocked stress No-load displacement Blocked force Amplifcation analysis Displac. amplification factor
Actuators type
APA 120ML m 130 1 400 10,8 4,5 0,29
APA 400M 400 40 0,1 1,4 2,9
APA 900M 916 16 0,017 1,1 8,3
ua
Fa N N/m cm h
%
Sa
cm cm2 ppm MPa m N
6 1
4 0,25 1000 40 40 1000
4 0,25 1000 40 40 1000
Sp up Fp
1000 40 60 4000
Au As
%
2,2 2,9 2,9 76%
10,0 28,6 25,0 40%
22,9 83,3 63,5 36%
Strain amplification factor Force disamplification factor Actuator mechanical efficiency
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Actuators type Actuator data Free displacement Max Blocked force Stiffness Actuator Height Actuator free strain m APA 120ML 130 1 400 10,8 4,5 0,29 APA 400M 400 40 0,1 1,4 2,9 APA 900M 916 16 0,017 1,1 8,3
APA amplification
Displacement amplification: A d = u a / up Strain amplification: As = Sa / Sp
ua
Fa N N/m cm h
%
Sa
Active material data Length Section No-load strain Blocked stress No-load displacement Blocked force Amplifcation analysis Displac. amplification factor Strain amplification factor Force disamplification factor Actuator mechanical efficiency
cm cm2 ppm MPa m N
6 1
4 0,25 1000 40 40 1000
4 0,25 1000 40 40 1000
Sp up Fp
1000 40 60 4000
Au As
%
2,2 2,9 2,9 76%
10,0 28,6 25,0 40%
22,9 83,3 63,5 36%
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Actuators type
APA amplification
amplification efficiency: = (ua Fa) / (up Fp)
APA 120ML m 130 1 400 10,8 4,5 0,29
APA 400M 400 40 0,1 1,4 2,9
APA 900M 916 16 0,017 1,1 8,3
Actuator data Free displacement Max Blocked force Stiffness Actuator Height Actuator free strain Active material data Length Section No-load strain Blocked stress No-load displacement Blocked force Amplifcation analysis Displac. amplification factor Strain amplification factor Force disamplification factor Actuator mechanical efficiency
ua
Fa N N/m cm h
%
Sa
cm cm2 ppm MPa m N
6 1
4 0,25 1000 40 40 1000
4 0,25 1000 40 40 1000
Sp up Fp
1000 40 60 4000
Au As
%
2,2 2,9 2,9 76%
10,0 28,6 25,0 40%
22,9 83,3 63,5 36%
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APA dynamic properties

Prestress of Piezo Ceramic :
Needed as it cannot bear tensile stress
APA stress budget considered at the design :

prestress stress : static stresses from the prestress process. actuation stress : stresses produced in the shell when the ceramic is supplied. external force stress : stresses due to external vibrations or shock or applied forces.
No weak point in APAs :No hinges, elastic pivot...
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APA amplification
Stiffness (N/m)
amplification efficiency: = (ua Fa) / (up Fp) Use of a genetic algorithm with the following objective :
free displacement efficiency as high as possible stresses < 0.75*Re.
20 15 10 5 0 100
Stress >=700MPa Stress >=600MPa Stress <600MPa 56% Eff Curve APA120ML
110
120 Stroke (m)
130
140
Example of a genetic run for the APA120ML
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Performances comparison
Best actuator in 1998 according to US specialists before Cedrat product launching Actuator names P844.60 PPA90L
Actuator Actuator Mass Actuator Height Actuator Volume No-load free displacement Stiffness Blocked force Stored elastic energy Output elastic energy
Some CEDRAT products : Standard & customised

APA120ML APA230L APA500L APA500L- APA750XLSV SV 170 4.9 41 560 1.39 778 0.218 54 600 7.0 91 1150 0.8 920 0.529 132
gr cm cm3 m N/m N J mJ
204 13.7 43 90 33 2 970 0.134 33
147 10.7 43 90 39 3 510 0.158 39
155 4.5 36 120 11.7 1 400 0.084 21
275 8.5 74 236 5.7 1 345 0.159 40
200 5.5 48 500 1.14 570 0.143 36
Performances ratio Free deformation along active axe % Output Energy / actuator volume J/dm3 Output Energy / actuator mass J/kg
0.07 0.78 0.16
0.08 0.91 0.27
0.27 0.59 0.14
0.28 0.54 0.14
0.91 0.74 0.18
1.14 1.31 0.32
1.64 1.45 0.22
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APA force limits
Ceramic Prestress : typically designed to about half blocked stress of the piezo ceramic force limit at the actuator level Fmax : half the max actuator blocked force Fa : Fmax = Fa/2
This criteria is used to analyse the limitation of the actuator in dynamic conditions, including resonance
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Prestress of Piezo Ceramic :
Needed as it cannot bear tensile stress
APA stress budget considered at the design :

prestress stress : static stresses from the prestress process. actuation stress : stresses produced in the shell when the ceramic is supplied. external force stress : stresses due to external vibrations or shock or applied forces.
No weak point in APAs :No hinges, elastic pivot..
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APA force limits
Ceramic Prestress : designed to half blocked stress of the piezo ceramic force limite at the actuator level Fmax : half the max actuator blocked force Fa : Fmax = Fa/2
This criteria is used to analyze the limitation of the actuator in dynamic conditions, including resonance
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APA120ML in blocked-free with M=180g & Q=10
Static properties
Free displacement : ua = 130m @170V Displacement per volt : u/V = 0,76m/V Blocked force : Fa = 1400N @150V
Dynamic limits
Max voltage : Max dynamic force due to prestress : Vmax = 170Vpp = 85Vp Fmax = 700N
Analysis with COMPACT tool based on eq circuit
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Voltage limit
Force limit
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Voltage limit Force limit
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Thanks to prestress : Fmax = 700N
umax > 120 m between 0 and 1000Hz
If low prestress : Fmax = 70N

umax > 100 m between 0 and 200Hz umax = 15 m at 1000Hz
Prestress allows to get high displacements in a large bandwidth Advantage for dynamic applications such as scanning, active damping, vibration generators ...
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Mechanical integration issues
Type Quick Pack Bimorph Ring Bender Thunder DPA PPA APA
Pre-stress NO NO NO YES YES YES YES
Mechanical interfaces for actuator s fixing NO NO NO YES YES (Threaded Hole) YES (TH) YES (TH)
Mechanical interfaces for payload s fixing NO NO NO NO YES (TH) YES (TH) YES (TH)
Mounting techniques Glue Glue Glue Glue / Screw Glue / Screw Glue / Screw Glue / Screw
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Conclusion about APAs

Use of Ceramic Multilayer Actuators Use of an elastic amplifier with amplification ratio in the range 2 - 10 Optimization of the efficiency using FEM Includes a high prestress to get good dynamic properties
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Mechanisms
Multi axis actuation
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Mechanims
At least one active axis : Possibility of several degrees of freedom (dof)
Linear motion, rotation motion, combinations
Passive axis controlled by guiding Active axis could be geared
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XY orthogonal stages
Stack of 2 linear stages slow response time risk of orthogonality error No axis runout compensation
Monolithic but nested module No axis run out compensation
Monolithic but nested module Run out & cross talk compensation in closed loop
Neither mechanically centred nor thermally compensated

Courtesy of PI
XY orthogonal stages
This stage, [+/-100m]x[+/-100m], is mechanically & electrically centred and thermally compensated
Active Control of Position :Symmetric XY stage XY200M
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XY micro sanner piezo stage : Improvement of Camera Sensor Resolution

Applications
Embedded IR cameras
> 100 THALES cameras > 400 piezo actuators
Future space missions

IR cameras / telescopes
XY microscanners for improving resolution of Infra Red cameras Push-pull stage based on APA25XS
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Piezo Mechanisms with several dof
Hexapode HEX100M Tx = Ty = 65 m; Tz = 57 m Rx=Ry= 2.7 ; Rz= 1.1 mrad (+/-)
XYZ200M-SG Tx=Ty= +/- 100 m ; Tz = 200 m
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Single axis - linear stage
X60SM
Push pull configuration Mechanically & electrically centred Thermally compensated Very low parasitic motions stroke = 60 m
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Tilt Mechanisms
The tip-tilt mechanisms are the most simple structures that can perform one or two rotations, plus a vertical (z) actuation :
one rotation: +/- 0.5
two rotations: +/- 2mrad
TT50S
Space qualified DTT35XS

Courtesy of CNES Pharao project
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Objective Piezo Positioner

References
Notes Sensors option Active axis Max. No-load displacement Max. parasitic X Y rotations Voltage range Resolutio n Stiffness Heigth Dimensio ns Mass Unloaded resonance frequency (in the actuation's direction) Response time Loaded resonance frequency (in the actuation's direction) load = 200 g Loaded response time Capacitance (per electrical port) Mechanical interfaces (payload) Mechanical interfaces (frame) Ele ctrical interfaces m rad V nm N/m mm mm g Hz ms Hz ms F
Unit
OPP120SM
Preliminary data ECL TZ 90 140 -20 150 9 1,11 50,0 65 * 40 170 450 1,11 285 1,75 3,15 objective interface to be specif ie d tbd 1 RG178B/U coaxial cable
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Fast Piezo Shutter FPS200M
Technical Features with dedicated SP75 driving electronics : Aperture > 300 m; response time < 2 ms; Overshoot < 10%; low jitter;
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Conclusion about mechanisms

Combinations of several dof Push pull configuration to cancel thermo- mechanical issue Guiding and closed loop needed to compensate or cancel parasitic motions Compatibility in option with severe environment (UHV, Cryogenic, Non magnetic, Space )
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Driving & control electronics for piezoelectric actuators & mechanisms
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Introduction
Specifity of piezoelectric loads, different cases (static, quasistatic, resonant), Basics of amplifiers, Practical implementations, Control of piezoelectric actuators, Conclusion.
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Introduction load & frequency

Piezoelectric actuators constitute capacitive resonant loads: pretty high stress generated in the active switches Different types of applications :
Static :
load of a capacitance; compensation of dielectric losses,
Dynamic :
reactive load, I = jC.V (out side resonance)
[S]
2,00E-02 1,80E-02 1,60E-02 1,40E-02 1,20E-02 1,00E-02 8,00E-03 6,00E-03 4,00E-03 20 40 80
Resonance :
Complex load
[]
100
Mod(Y) [S] Phase(Y) []
60
Admittance Curve Y=I/V
2,00E-03 0,00E+00 0,0000 -20 0,6000 0,7000 0,8000 0,9000 Cedrat Technologies - COMPACT v4.33
0,1000
0,2000
0,3000
0,4000 0,5000 Frequency [kHz]
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Introduction driving signal

Definition of the output signals voltage&Current
DC, sine or square signal
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Linear amplifier for static / dynamic applications

For a given amplifier, having a given current limitation, Bandwidth varies with the actuator capacitance
Bandwidth using a 40W Vcc source
Frequency Response of the LA75 Linear Amplifier against various Capacitive Loads
200 180 160
Voltage range (V)
140 120 100 80 60 40 20 0 1 10 100

Frequency (Hz)
C = 0,7 F C = 2,2 F C = 24,0 F 1000 10000
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Dynamic applications : example with a linear amplifier

V = -R1 / R2 Vin Required electrical power Electrical current i = 2 f V Cbf Electrical power dissipated in the amplifier, P = 4V2 f Cbf Numerical example : Cbf = 1 F, V=100V, f = 2 kHz i = 1.3 A, P = 80 W
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Example of dynamic application: APA500L
Standard APA500L features: Displacement = 500 m Blocked force = 560 N Resonant Freq. = 460 Hz C = 40 F Peak Amplitude vs frequency Displacement = 500 m @ 100 Hz Driven by a LA75C-1 from Cedrat T.
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Noise in static / dynamic applications

Noise in static applications : 80 mV/ @ 50V = 0.16 % 80 dB signal to noise ratio can be obtained through a correct shield. 100 dB signal to noise ratio obtainable at the expense of a reduced bandwidth
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Amplifiers for static applications

2 principal classes:
The linear amplifier, A, B or AB classes, The switching amplifier D classes and Co, Characterised by:
Output current, Output voltage, Bandwidth, Gain, Capacity to drive reactive loads, THD, SNR, Protections
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Basics of amplifiers
Use of a the traditional linear amplifier
R2 R1 Vin Rg Cbf PZT
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Class A amplifiers : dynamic behavior around the static polarisation point,
Low efficiency on a resistive load : 25 %,
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Class B amplifiers :
The characteristics is influenced by the non linear characteristics of the transistors around the static point => pretty high distortion.
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Resulting distortion of the Class B amplifier, Efficiency on a resistive load = 78 %
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Class A-B amplifiers : cancellation of the distortion through diodes or junction multipliers
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Class D (switching) amplifiers : high frequency on / off operations and filtering, Half-bridge and Full bridge topologies (depending on load) :
Half bridge is used for capacitive load, Full bridge is used for inductive load.
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Class D (switching) amplifiers :On-off control through PWM in open loop, Filtering function is often necessary to reduce to output voltage ripple.
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Basics of amplifiers : Synthesis

Criteria Class A Linear Amplifier Class B Class AB Comments Switching Amplifier Class D
Voltage
High
High
High
Bipolar transistor
High
Bandwidth
High
High
High
High (require high frequency switching) Low High High Low
Distortion Noise Efficiency Dimensions (for a given load) Maximal power
Low Low Very low Important
Medium Low Medium Important
Low Low Medium Important
Low
Low
Low
High
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Amplifiers for Dynamic applications

Linear amplifier :
high reactive load, design of heat sinks necessary,
Switching amplifier :
More complex control strategy, Possibilities for energy recovery.
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Dynamic applications
Schematic of a switching amplifier
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Schematic of a switching amplifier
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Basic circuit
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Switching strategy including energy recovery
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Dynamic applications : Conclusion

Energy recovery and precise charging results from a compromise, Switching strategy should be monitored through a numerical controller. Monitoring the charge (and the resulting displacement) may be used as an alternative strategy.
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Introduction - control
Static & dynamic : controller (PID) to remove the hysteresis, Charge controlled versus voltage controlled amplifiers,
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Control in static applications

Very high position accuracy can be obtained with piezoelectric actuator Sensors for a closed-loop system
strain gauge capacitive displacement sensor Eddy current sensor
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Control in quasi-static applications

Typical structure of an analogue controller :
PI + Filter topology
Typical step response
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Control in quasi-static applications

The Strain gauges are the most simple sensor : Use of a complete Wheastone bridge bonded on the MLA to achieve the best sensitivity. Example of a APA50S with strain gauges :
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Static applications
Removal of the creep effect (process of repoling)
Actuator's displacement (m) - Record of the creep effect using a capacitive displacement sensor 140,00 120,00 Displacement (m) 100,00 80,00 60,00 40,00 20,00 0,00 0 200 400 600 800 Time (s) 1000 1200 1400 1600
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Static applications
Removal of the hysteresis
Removal of the piezoelectric actuator hysteresis using a displacement sensor

9 8 displacement measurement (Volts) 7 6 5 4 3 2 1 0 0 2 4 Order (Volts) 6 8 10 closed loop off closed loop on
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Static applications
Alternative hysteresis removal method by using an electrical charge control, The control is more complex.
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Static applications
Charge amplifier:
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Static applications
Charge amplifier:
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Conclusion
Piezo actuators constitute mainly capacitive loads ; it can differ for resonant applications The reactive power requires attention Quasi static applications & use of MLA can use PWM driver, without step-up transformer
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Driving Electronics for Piezo Actuators & Mechanisms

CA45 & LA75A : Linear Amplifier for driving Actuators with low noise for precise & quasi-static motion LA75B & LA75C: Linear Amplifier for driving Actuators in power demanding dynamic motion SP75 : Switching Power for driving Actuators in fast onoff motion Options available: PID and Micro Controller for feedback and monitoring through a PC, via USB or RS-232 .
See technical data sheets in the Piezo Products catalogue

How to choose the right actuators and driving electronics ?
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How to chose the right actuator ?

Depending on the type of applications, several parameters govern the selection of the actuator :
Static Param eters of the actuator Stroke Stiffness B andw idth Electrical capacitance Param eters of the application Payload m ass Parallel stiffness X M ax. current of the driver X X X X D ynam ic Im pulse
X X X
X X X
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How to chose the right actuator ?

Frequency / response time considerations in dynamic applications
Controllable frequencies : f< fmax = fr/3 Impulse response : tmin = 1/(3*fr) =T/3 fr= device resonance frequency
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Displacement Transient response for a step voltage
Overshot effects Stabilisation time
Step response
u / u0
1
High Q Low Q
0 0 1 2 3 4 t/T 5 6 7 8
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Arrangement of piezo-actuators
Parallel arrangement adds force Serial arrangement adds displacement
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Deriving the electrical circuit from the actuator s properties
Stiffness k, modal mass m, unloaded resonance frequency fr, capacitance CBF, force factor N, voltage V, blocked force F, payload mass M, motional capacitance Cm, clamped capacitance C0, m = k/(2fr)2 ; N = F/V ; Cm = N2/k C0 = CBF - Cm Loaded fr = 1/2 (k/(m+M))1/2
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Exercices
How to select piezo actuators, associated mass and electronics ?
Analytical models Finite element models COMPACT tool
Excel tool based on an analytical model Free ware, download from Cedrat web Fast way for predimensioning or selecting components
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Exercice 1: Slow positioning of an optic

A summary of the specifications is given in the table beside : Application is optic positioning in lab environment Specs Required
Payload Mass (g)
1000
Max Displacement (m) Max Frequency (Hz)
400
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Exercice 2: Fast positioning of a tool

A summary of the specifications is given in the table beside : Application is oval piston machining Specs Required
Payload Mass (g)
2000
Max Displacement (m) Max Frequency (Hz)
100
100
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Exercice 3: Ultrasonic vibrations

A summary of the specifications is given in the table beside : Specs Required
Application is ultrasonic glass cutting
Payload Mass (g)
Displacement (m)
With Piezoactuator Assistance
Frequency (Hz)
20 000
Without Piezoactuator Assistance Courtesy of Schott

Example 4: Pulsation force Generation

A summary of the specifications is given in the table beside : Application is Anti-vibration for a turbo-engine aircraft cabin (ATR42) Specs Required
Payload Mass (g)
100 Kq
Force (N)
8-10N
Frequency (Hz)
100-500
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Example 5: Fast response

A summary of the specifications is given in the table beside : Application is Piezo injectors for fuel injection Specs Required
Payload Mass (g)
0,015 Kq
Stroke (N)
>60m
Resp.time (ms)
<1ms
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Illustration of limitations in dynamic applications

Current limitation of the driving electronics (working frequency) Force limitation of the piezo actuator (Payload mass & working frequency) Self heating limitation of the piezo ceramic (Duty cycle) => Computations and curve analysis (Cedrat Technologies Excel sheets - COMPACT tool)
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Current limitation
APA120ML + 1 kg in blocked free condition (Resonant Freq = 0,5 kHz) driven by a LA75A-1 (Imax peak = 90 mAmps)
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Power and Force Limitations
APA120ML + 1 kg in blocked free condition (Resonant Freq = 0,5 kHz) driven by a LA75C-1 (Imax peak = 2,4 Amps)
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Adiabatic Self Heating
APA120ML + 1 kg + LA75A-1
APA120ML + 1 kg + LA75C-1
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Piezo Motors Overview
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Different types of piezoactive motors

INCHWORM motors : high resolution, low speed. Inertial Step Motors (ISM) : simple structure, multiple degrees of freedom, high potential for micronization. Ultrasonic motors (USM) : large torque at low speed and at rest, silent and nonmagnetic operation, excellent dynamic characteristics.
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Inchworm motors
Use of active grips and active member along a rail & combination of activations of grips and active member.
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Inchworm motors
Linear inchworm CIMMS Virginia Tech
M.Vaughan ,D.J.Leo from US Center for Intelligent Material Systems & Structures, Integrated piezoelectric linear motor for vehicule applications, Proc IMECE02/TTRST-32942, ASME Symp., New Orlean US, Nov.17-22, 2002,, 9p.
Inchworm with APA120ML

CEDRAT piezo motor stepping solution

Use of at least two Amplified Piezo Actuators
Slider (or rotor) Driving direction (a) driving stage
Anchor point
(b) return stage
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LISA Laser Interferometer Space Antenna

High Pointing Precision Piezo Motor
Principle
Normal displacement : same voltage supply
MLA-1 MLA-2
Tangential displacement : opposite voltage supply
Anchor point
Anchor point
Amplified Piezo Actuators APA with the piezo ceramics driven : in phase (left) / in opposition (right)
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LISA Laser Interferometer Space Antenna

High Pointing Precision Piezo Motor
Accuracy <100nrad resolution < 5nrad non magnetic no lubricant
LISA HP Piezo Motor Breadboard (courtesy of ESA)

Inertial step motors (ISM)
Working principle:
sudden contractio: inertia effect slow contraction: no inertia
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reliability for multiple degrees of freedom motion : for instance, a piezoelectric XY micrometric stage
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Rotating ISM
New Focus active screw = pico motor
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CEDRAT New miniature linear piezo motors

SPA Stepping Piezo Actuator from Cedrat
New APA-based piezo motors Golden Micron 2008 at Micronora Cedrat patent
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CEDRAT New miniature linear piezo motors

SPA Stepping mode Principle
4 components
Mass APA (piezo) Rod Clamp
SPA60SM
Animated Principle (2 steps)
One stick-slip step
Stick-Slip step excited by a saw tooth signal Accumulation of steps to get a long stroke (several mm)
New miniature linear piezo motors : SPA

SPA combined modes for Nano positioning
Stepping mode (M1)
Saw tooth signal Stick-slip of the rod in the clamp
Deformation mode (M2)

Load fixed on the Mass APA deformation proportional to voltage
u1
One stick-slip step (M1)
t M1
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Long stroke combining Stepping (M1) and Deformation (M2) Modes
M2

SPA tests : Combined M1M2 modes for Nano positioning
Achieved precision : 60nm (due to sensor) Achieved resolution : 0.5nm (due to amplifier)
SPA35XS bench with sensor
Long stroke combining Stepping (M1) and Deformation (M2) Modes, and associated electric excitation
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SPA Advantages
Simple APA-based structure
Reliable, large heritage from APA
One channel electronics Scalable

Various APA size and forces
High degree of miniaturization SPA30uXS Cryogenic versions Non- magnetic versions (MRI-compatible) Firm connection between the load and the motor Fine positioning with nanometer resolution on a large range (due to the APA amplified stroke) Cost effective approach
New CEDRAT miniature linear piezo motors

SPA performances
References
Notes Base Long stroke (M1) Stiffness (M1) Max speed (M1) Blocking force at rest (M1, M2) Max actuation force (M1) Short high resolution stroke (M2) Resolution (M2) Bandwidth (M2)** Capacitance (M1, M2) Height along active axis Base size Inertial mass Mass Max current consumption Holding current LA75 types compatibility CA45 compatibility
Unit
mm N/m mm/s N N m nm kHz F mm mm2 gr gr mA mA
SPA uXS-S
Preliminary APA30uXS 4 0,108 70 0,4 0,1 30 1,7 3,2 0,052 15 5x9 0,27 2 60 0 A-B-C yes
SPA uXS-F
Preliminary APA30uXS 4 0,108 30 0,8 0,3 30 1,7 3,2 0,052 15 5x9 0,27 2 60 0 A-B-C yes
SPA XS-S
Preliminary APA35XS
SPA XS-F
Preliminary APA35XS
SPA SM-S
Preliminary APA60SM 20 1,38 30 15 5 80 4,5 0,6 1,55 50 27 x 27 70 120 350 0
SPA SM-F
Preliminary APA60SM 20 1,38 5 30 10 80 4,5 0,6 1,55 50 27 x 27 70 120 350 0 B-C no
10 10 0,49 0,49 30 5 3 6 1 2 55 55 3,1 3,1 0,6 0,6 0,25 0,25 30 30 16 x 16 16 x 16 30 30 50 50 60 60 0 0 A-B-C A-B-C B-C yes yes no
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What are ultrasonic motors ?

Use piezoelectric material to produce a small elliptical displacement in the stator, Drive a moving member through friction forces.
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Ultrasonic Motors : USM classification
Travelling Wave Ultrasonic Motors (TWUM) Standing Wave Ultrasonic Motors (SWUM) Hybrid Type Ultrasonic Motors (HTUM) Mode Conversion Ultrasonic Motors (MCUM) Multi Mode ultrasonic motors (MMUM) Mode Rotation Ultrasonic Motors (MRUM)
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Travelling Wave Ultrasonic Motors (TWUM)
Excitation of a rotating flexural mode in an elastic ring.
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Geometric conformity of static contact

Machining tolerance of contact surfaces
- Flatness - Roughness
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Mode Conversion Ultrasonic Motors (MCUM)

Newscale Technologies -> Squiggle motor
AF system
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Design of multi-mode ultrasonic motors

Working principle (patented Cedrat technology) :
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Design of multi-mode ultrasonic motors

Two vibrations modes
Flexural mode
excitation in phase normal displacement
Translation mode
excitation opposite in phase tangential displacement
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LPM20-3 using a LVDT position sensor
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LPM20-3 Load characteristic
Perfomances of standard LPM20-3 measured in 1999
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Friction layers properties

Thermal stability Elasticity : dynamic interpenetration at the interface Absence of noise generated by sliding Size of the third body particles Wear resistance : fibbers & powder reinforced polymer
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Wear aspects in piezomotors

Critical role of the fibbers use to reinforce the polymer. Surface after 520,000 actuation's in vacuum :
polymer vibrating steel
Frictional direction Frictional direction
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Wear aspects in piezomotors

A stable frictional coefficient of 0.45 is obtained after an adequate running procedure, No change of performances after 520,000 strokes View of the wear zone :
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Conclusion for piezo motor tribology
Mechanism of preload application Running aspects Stability of shift velocity accommodation mechanisms Debris evacuation device
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Driving piezo motor

Inchworm / ISM => Standard electronics similar to piezo actuator drive, USM : resonant load
switched inverters are generally used, automatic frequency resonance tracking necessary, non linear behaviour of the USM for the automatic point of view.
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Piezomotors : conclusion
Motors useful for positioning applications, Superior torque / mass ratio, Current applications in microelectronic, space, Difficult subject, Development require multidisplinary skillness (piezoelectricity, mechanics, tribology, electronic, automatic, ).
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Applications using piezo actuators
CEDRAT TECHNOLOGIES REFERENCES
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Applications for piezo actuators

Optics , Air & Space Valves Active damping Machine tools Telecom
Actuation
Electrical generator
Reclamation
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220
Standard Actuators Products
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Standard Actuators Products
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Standard Drivers / Conditionners Products
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Optics Air & Space

Identified Applications
Active vibration controls of electronics,instruments Active vibration controls in cameras, telescopes Improvement in CCD/CMOS cameras resolution Refocusing of space telescopes Active optical filters, extended cavity lasers, Active Flaps of Helicopter blade, Missiles, Drones Active Flaps of Air plane (mock-up) flaps, Active shape control of wings Direct drive of Hydraulic jacks Scanning function in fine space instruments ...
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Optics, Air & Space

Id. applications needs Actuators with:
High output energy to mass ratio Low power consumption Resistance to severe environment (esp vibrations) High bandwidth High resolution
Cedrat Response:
Piezo Actuators based on pre-stressed MLA MLA = low voltage multilayer piezo ceramics Design under ECSS standards + Qualification
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225
Piezo Actuators & Electronics: Application for Space Telescopes

5 dof mechanism for telescope secondary mirror
BERTIN mechanism using CEDRAT APA120ML actuators & electronics

Piezo Actuators & Electronics: Space Qualification

FB-LA75A electronics
Fly-Back DC-DC converter (from 2050V to 150V) Linear Amplifier for Piezo Actuators Strain Gage conditioner Analog Servo controller
Space qualification
EEE components analysis Radiation analysis Thermal analysis EMC analysis Mechanical analysis Thermal-Vacuum tests
FB-LA75A space electronics for piezo actuators from CEDRAT TECHNOLOGIES
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227
Active Control of Position (scanning): Space XYZ stage for ROSETTA/MIDAS
FM Piezo mechanism including SMA latch actuators
CAD view of XYZ piezo stage : 9 Piezos : 8 APA50S + 1 PPA10M + 2 SMA latch actuators + positions/check sensors
Flight model on board ROSETTA satellite, flying since Feb. 2004 displacement = [100*100*8] m resolution = 4 nm successful commissioning !
Dust analysis of the comet, heart of MIDAS AFM instrument (Courtesy of ESA, European Space Agency)
Normally centred piezo mechanisms: Symmetric XY stage XY200M

This stage, [+/-100m]x[+/-100m], is mechanically & electrically centred and thermally compensated
Space qualified model
Closed loop options: Strain Gages or Capacitive Sensors
( Courtesy of CNES, French Space Agency )
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Application for Improvement of Camera Sensor Resolution

Over-sampling technique
4 successive pictures (n 1 to 4) are merged. The distance between points correspond to 1/2 sensor pixel. The XY stage carries either a lens or the CCD itself.
Principle of the over sampling
Lens motion produced by the XY micro scanner to perform over-sampling
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Improvement provided by over-sampling technique
Improved images using over-sampling technique


Cedrat XY micro scanners
Push-pull stages based on 4 APA25XS Monolithic design Thermally compensated Stroke [-15m +15m] Open loop control Qualified :
Operation in vibration Temperature -40 +80C Life time
XY microscanners manufactured by CEDRAT TECHNOLOGIES


Applications of Cedrat XY micro scanner piezo stage
Embedded IR cameras
> 1000 THALES cameras > 1000 Microscanners > 4000 piezo actuators
Future space missions

IR cameras / telescopes
THALES Catherine MP LWIR QWIP Camera Courtesy of THALES OL
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233
Normally centred piezo mechanisms: Tilt Mechanism for laser pointing

DTT35XS PHARAO Double tilt : a space MOEMS
MOEMS = Micro Optical Electro Mechanical System Control of a mirror on 2 dof in rotation (Rx, Ry) Key Components: 1 Mirror 4 Hinges 4 APA35XS Actuators 4 Strain Gages Sensors (bonded on PZT MLA)
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Mass = 15 gr (2gr per actuator) Rx, Ry = +/- 2mrad (Tz = 20m is not used) Positioning Precision = 1rad r ms Temperature = -40C / +75C Passed qualifications :
Life time Vibration Shocks Thermal Vacuum cycling Non magnetism ...
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235

Batch of 10 Qualification Models of DTT35XS in casing delivered to EADS Sodern (Jan 2003) Batch of 8 Flight Models in production
Qualification Models of the PHARAO/MEF space piezo mechanisms based on 4 APA35XS (courtesy of EADS)
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236
Normally centred piezo mechanisms: A Rz mechanism for despinning correction

Correction of the spinned movement of the GAIA spacecraft on the CCD of the RVS instrument
Breadboard for GAIA/RVS space piezo mechanism based on 2 APA400M (courtesy of Obs. Meudon)
04/06/2010
237

Qualification of 1 FPS200M (1 year test ) by ESRF Batch of 8 FPS200M delivered to ESRF
Technical Features with dedicated SP75 driving electronics : Aperture > 300 m; response time < 2 ms; Overshoot < 10%; low jitter;
Refocusing mechanisms (1/3)

External laser cavity tuning by a PPA10M Parallel Pre-stress piezo Actuator. 10 Flight Models planned for the end of 2004
PHARAO/LCE space piezo mechanism (courtesy of EADS / SODERN)
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239

The dynamic refocusing of the 1st European LIDAR (ALADIN on board on ESA /AEOLUS).
The main difficulties are : The high bandwidth (> 2 kHz), The lifetime (4*1010 cycles). 4 QM/FM delivered before end 2004
ALADIN AEOLUS space refocusing piezo mechanism (courtesy of GALLILEO Avionica)
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The piezo actuator is used to refocus a laser beam
ALADIN Lidar (courtesy of GALLILEO)
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241
Piezo Actuators: Application for Helicopter Flap Control

Flap design proposed by CEDRATECHNOLOGIES in 1998
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RPA Helicopter Project:
Active trailing edge flaps on the main rotor for:
decrease BVI noise in descent flight improve the dynamic behaviour of the rotor throughout the largest possible flight domain
Work done by Onera (French Aircraft Design Inst.) Support of:

French Civil Aviation Authority Ministry of Defense (DGA) Eurocopter
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Blade Vortex Interaction (BVI) noise:
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Wind tunnel scale rotor
diameter of the Mach-scaled rotor : 4.2 m the maximum blade chord : 140 mm the flap dimensions at wind-tunnel scale :
210 mm in span 21 mm in chord
geometrical reduction factor : 2.619
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Requirements for the Mach-scaled rotor:

natural freq. of the flap/hinge axis : > 150Hz min. flap deflection : 5, 78 Hz, static moment of 1.22 Nm for hinge centred at 0% ideal flap deflection : 15, 262 Hz, static moment of 4.9 Nm for hinge centred at 0% flap actuation frequencies : from 0 to 5-per-rev with respect to rotor rotation speed required energy/kg of actuators : > 150mJ/kg maximum centrifugal field : 2300 g
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Comparison of Actuators by ONERA for selection
Maryland 1/7th scale blade model in-house fabricated Multi-layer actuator configuration (8 layers) 134V 400 V 14 g 8N 165 m 0.048 106 N/m above 150 Hz 24 mJ/kg 0.44 33 mm 60 mm 2 mm to 5 mm 11.5 Maryland full scale blade Prototype Piezostacks with L-L amplification mechanism 0-120 V 634 g 20 N 889 m 0.021 106 N/m Above 150 Hz 28 mJ/kg 1 71 mm 183 mm 19 mm 11.5 CEDRAT APA230 For 1/ 2.62th model mass production Piezostacks in elliptic housing CEDRAT APA500L mass production Piezostacks in elliptic housing
Actuator technology
Voltage Mass of actuator Blocked force ( F ) Maximum stroke ( x ) Stiffness Resonance frequency nergy to weight ratio of actuator Ratio of Energy.. /L-L Energy.. Width (chord axis) Length (span axis) Thickness Pk-to-pk flap deflection
0- 200 V 250 g 1350 N 230 m 3.48 106 N/m 800 Hz 310 mJ/kg 5.86 69 mm 140 mm 10 mm 4.5
0- 200 V 208 g 570 N 500 m 1.14 106 N/m 450 Hz 342 mJ/kg 6.45 55 mm 145 mm 10 mm 9.5
Selection of the standard APAs from CEDRAT because of highest energy density

Onera flap concept using APAs
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ONERA Centrifugal tests rig
APA actuator Dummy flap Strain gage Rotation sensor BRAVoS rig
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ONERA Centrifugal tests results
Active flap based on the standard APA230L under 0g
Active flap based on the standard APA230L under 2000g
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Selection between APA230L & APA500L
H i n g e mo me n t ( N m)
Ac t ua t o r o pe ra t io n c urv e
AP A230L U=0V
B l oc ki ng M ome nt
1,00 0,50 0,00 -7 -0,50
AP A500L
Aer odynamic Hinge Moment Envelope f or ps i=0-360
-5
-3
-1
1
U=1 8 0 V
Fl a p a ng l e ( )
11
-1,00
Uppe r Sur f a c e
-7 0 +11 M+ B l oc ki ng M ome nt
Selection of the APA500L for the aerodynamic test because of better performances

ONERA S3MA wind tunnel tests set-up
Accelerometers on flap and airfoil

04/06/2010
Calibration on the model in the wind tunnel


ONERA S3MA wind tunnel tests results
Flap deflection versus Input Control Voltage (at Mach=0.3)


ONERA S3MA wind tunnel tests results
10 8 Fl a p a ngl e ( ) 6 4 2 0 -2 -2 -4 -6 -8 0 2 Ri ght f l ap angl e Cent r al f l ap angl e Lef t f l ap angl e
Wi ng i nc i de nc e ( )
4 6
Max Flap Deflections versus Wing Incidence (at Mach=0.3)


New actuator APA750XL designed for ONERA
Stroke = 1150m Force = 920N Energy to weight : 441mJ/kg
APA750XL prototype for ONERA (scale 1 flap) from CEDRAT TECHNOLOGIES


ONERA conclusion & perspectives
No breakdown & Encouraging performances
ONERA perspectives
Improvement of the flap mechanism foreseen to get less than 8% loss of stroke @2300g New centrifugal tests of APA500L flap planned Scale 1 tests using the new actuator APA750XL Actuator improvements using composite shells
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Piezo Actuators: Application for Air Plane Flap Control

Flap control of Air plane mock-up (AWIATOR)
reduction of slipstream of Airbus A340 need for specific flat actuators
stroke : 500m force : 700N height : 60mm thickness : 9mm
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Flap control of Air plane mock-up (AWIATOR)
ONERA pre-selection : APA500L
stroke u= 500m force F= 560N => Pb / 700N height : 55mm thickness : 10mm => Pb / 9mm Length : 145mm
Standard APA500L-SG from CEDRAT TECHNOLOGIES
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CEDRAT offer to ONERA : an APA500L-SV
Customised product starting from the APA500L (SV = special version) Reduction of thickness : 10mm => 9mm Optimisation of the Force F, keeping constant the stroke u and the same PZT amount Reduction of capability to withstand external vibrations, noting that vibrations are smaller in this application than in space launching conditions
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Results on APA500L-SV developed for ONERA Actuator APA500L APA500L-SV Gain Thickness 10mm 9mm -9% Mass m 0.20 kg 0.17 kg -15% Stroke u 500 m 560 m +11% Force F 570 N 778 N +36% Emec=F.u/4 0.071 J 0.109 J +53% Emec/m 0.35 J/kg 0.64 J/kg +82%
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Conclusions
APA500L-SV is fully compliant with ONERA needs Standard APAs are designed for Space need and are not optimised for all applications (even if they possess highest power density on the market) APAs can be optimised for other needs than space, such as Aircraft applications, leading to significant improvements in energy densities
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Application for Mini Helicoptere

Mufly project Micro APA APAXS for wing orientation (0.2gr)
Mini BDLC motor for wing rotation (3gr)
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Piezo Actuators & Electronics: Application for proportional valves

Valve for micro thrusters : Implementation in a cold gas micro propulsion system
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Valve for micro thrusters
Cold gas (Nitrogen) APA200M actuator placed outside the gas
Proportional Piezo Valve from CEDRAT TECHNOLOGIES
04/06/2010
264

Valve for micro thrusters : Results
Flow control in open loop
Flow control with a feedback loop
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Piezo Actuators : Application for Aircraft Hydraulic jacks

Piezo-based EHA (Electro Hydrostatic Actuators) R&D works performed in co-operation with SABCA, ZFL, ALENIA, SAAB, ZIP ... Goal : Improving EHA with smart actuators :
piezoelectrics actuators piezomagnetics (biased magnetostrictives)
Expected improvements
Mass Power consumption Bandwidth
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Piezo-based EHA (Electro Hydrostatic Actuators)
1 hydraulic jack 2 actuated valves 1 actuated pump 1 accumulator (not shown)
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Piezo-based EHA (Electro Hydrostatic Actuators)
Piezoelectric or magnetostrictive Valves & Pump for an EHA prototype designed by CEDRAT TECHNOLOGIES
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Valve test bench
Flow meter Piezo Valve Pressure sensors
No leakage at 220 bars in closed position. Output Input
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Valve results
Type Actuator Piston stroke Maximal working pressure Maxi. tested working freq. limitation) Max. theoretical working freq. Open flow rate Normally closed APA500L 460 m 100 bars 400 Hz (power supply 1000 Hz > 2.5 l/min.
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Active Control of Fluids: Piezo Injectors for Automotive

short time response compact structure potential for low cost
small piezo ceramic amount few simple parts
Car Injectors based on an APA, according to C.R.Fiat
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Active Control of Fluids: Proportional Pneumatic Valves
Pneumatic Valve Prototype (designed by Cedrat Technologies ) based on the APA100S (Courtesy of ENS)
Piezo Actuators : Application for sound generation

Sound generator for urban water pipes localisation
APA230L + back mass + front membrane po < 10Bar Fr = 500 Hz V < 10Vrms @Fr u = 230m @Fr ufront = 110m @Fr
MADE Water Tracker sound emitter Transducer based on APA230L
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Active Control of Vibrations

Complete close loop electronics including :
a linear amplifier a sensor of displacement, speed, accel., force ... a controler : PI, PID, Feed forward, Force feed back .
in order to drive & control the actuator(s)
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Active Control of Vibration: Damping of a truss by active tendons

Truss vibration level after a shock excitation, without control (red curve) & with control (blue curve)
Space Truss of ULB using an active tendon concept based on APA100Ms for active damping (Courtesy of Micromega Dynamics & ULB & ESA)
Active Control of Vibration : 6 dof Stewart Isolation platform

Hexapod based on 6 APA50S
Courtesy of ULB & Micromega Dynamics
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Active Control of Vibration : 6 dof Stewart Isolation platform

Experimental results
Courtesy of ULB & Micromega Dynamics

Electronics for Piezo Actuators: Micro-Positioning & Damping

R&D works supported by CNES / Applications
Space Telescope mirror, Space fine instruments Aircraft embedded cameras
New Objectives for the electronics : 2 functions

Micro-positioning of a load Isolation of the load from micro-vibrations
Position
Micro vibration Isolation
5Hz
40Hz
Frequency (Hz)
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Electronics for Piezo Actuators : Micro-Positioning & Damping

Set-up list
APA120ML actuator : load positioning&damping FB-LA Space electronics : driving the APA Strain Gage & Capacitive Sensors : position sensing Accelerometers : vibration sensing Servo controller : closed loop control Large Magnetostrictive Actuator : Excitation
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Set-up view
Excitator
APA120ML
Dummy load
Electronics
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Electronics for Piezo Actuators : Micro-Positioning & Damping

Closed loop
D(p), A(p), F(p), H(p), the piezo+load transfer function, the power amplification transfer function, the position corrector function, the low pass filter transfer function, K(p), the position sensor transfer function, K1(p), the vibration sensor transfer function, H1(p), the filter of the control loop, F1(p), the vibration corrector function
Pdrift Prf F(p) A(p) D(p) Piezo
F1(p)
H1(p)
K1(p)
H(p)
K(p)
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Measured performances
-40dB/decade roll off, the cut off frequency close to 50Hz, the over shoot 5dB@50Hz, the maximum attenuation : 10 dB
6 4 2 Attenuation (dB) 0 -2 0 -4 -6 -8 -10 -12 -14 Frequency (Hz) 50 100 150 200
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Active Control of Vibration: One axis flexure beam / Rossignol Ski
Control OFF
04/06/2010
Control ON
Ski Rossignol
283
Active Tool Control: Oval Piston Machining
PPA80L-SG
04/06/2010
Courtesy of Entech (SP)

Active Tool Control: Oval Piston Machining
PPA80L + OEM LA75B inc. PI controler C = 26 F ; Imax = 1.2 A Tool mass = 1 kg
Peak Amplitude vs frequency Displacement = 70 m @ 100 Hz
Courtesy of Entech (SP)

04/06/2010
Active Control of Vibrations : One axis tool control in machining

Mechanical structure Chatter vib.
feed passive
cuttin g
m agnitude [m/s2] 7 6 5 4 3 2 1 0 Ha/38251 IFW passive force direction cutting force direction
Tool holder Tool interface Force sensor Tool case Actuated sleeve VDI-3425 Guiding membrane interface Elastic actuator pre-stress Piezo actuator
500 1000 frequency [Hz]
1500
Cooperation IFW - Cedrat (ACTUATOR 2004)
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Control by force feedback
actuator amplifier U U
analogue integrator U
Fp actuator
+ Fd
F Q force sensor
~ _ _
charge highpass amplifier filter
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Control by force feedback
-40 Magnitude g/N [dB] -46 -50 -56 -60 -66 -70 -74 -80
Acti ve damping off
Acti ve damping on Ha/38253 IFW IFW - Cedrat 0 200 500 700 Frequency [Hz] 1024
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Active damping of Vibration of Rossignol Ski

Application : Launched Kilometer Ski
Vibration level of the Ski tip : 8cm pk-pk Design configuration : APA120ML + pulling rod
Dynamic displacement divided : <120m to the actuator Dynamic force transmitted < 1200N to the actuator
LK Ski of SKI Rossignol equipped with APA120ML for active damping

Active damping of Vibration of Rossignol Ski

Application : Launched Kilometer Ski
FEM analysis to get Eq circuit Matlab simulink Test results on snow : 32bB damping / 1st mode Cedrat design patented by Rossignol
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Other Machine Tools

PDP Glass cutting assistance Wire bonding LCD screen alignement Chip testing on wafers Active damping on tools
APA100S
Courtesy of Kammrath & Weiss
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Telecom: stretching fibre

Active Fibber Bragg Gratings for DWDM Tunable Laser Optical switch Fibber alignment
APA50S + FBG for laser tuning

Electrical Power Generator
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Basic configuration
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APA-based Proof-mass
APA400M_MD + Mass Mesema project end user :
EADS, Eurocopter
APA400M proof mass
Out power & Effciency accounting for the electronics


References
Notes input mechanical energy Displacement Output electrical energy Load impedance Min. Voltage Time to maintain the voltage
Unit
mJ m pk-pk mJ kOhm V ms
GPA60SM
preliminary data 2 11 0.1 1.5 1.8 45
Wireless switch
based on APA60SM
Courtesy of LEGRAND
Synthesis: typology of applications of Piezo products
Position control Optical control Shape control Driving control Vibration control Fluid control Energy harvesting
Reduction of noise, vibration Generation of noise, vibration
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1day Piezo Training 2010

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Overview on piezoelectric actuators, mechanisms & motors with their related driving electronics: Technology & Applications

4 / How to choose an actuator & its related electronics ?

2 / Piezo actuators & mechanisms

2.1/ Internally & externally

3 / Driving and control of piezo actuators

6 / Applications & references

1 Day Piezo Training 2010

Piezoelectricity Theory & Properties

1 Day Piezo Training 2010

Piezo electric ceramics & magnetostrictive alloys

Various effects in materials

Magnetisation Elec-mag effect Permeability

Mag.optic effect Photoelastic effect _ Refractive effect

1 Day Piezo Training 2010

Active strains of active materials

Typical active free strains are S= 1000ppm = 0.1% Stroke : u = L = S . L

1 Day Piezo Training 2010

Active stress of active materials

Typical active blocked stresses are T= 20MPa = 20 N /mm2

Stress from electromagnets T = B/2o = 0.4 MPa with B=1T

1 Day Piezo Training 2010

Active materials properties

1 Day Piezo Training 2010

d: piezo coefficient E: Electrical field S: Strain; D: Electric displacement T: Stress

D ~dT Direct effect: sensing

S ~dE Inverse effect: actuation Courtesy of APC

1 Day Piezo Training 2010

Pyroelectricity & Electrostriction

Pure electrostrictive material = non piezoelectric material => S = M E2 = Q P2

1 Day Piezo Training 2010

1 Day Piezo Training 2010

Characteristic of a ferroelectric material :

D = 0 E + P = . 0 E D : electric displacement , P : polarization ,

Interpretation of poling in PZT crystal structures

Intrinsic / Extrinsic piezoelectricity

1 Day Piezo Training 2010

Hysteresis butterfly cycle

Repoling process in the domains

1 Day Piezo Training 2010

Piezo ceramic vs Single Crystal

1 Day Piezo Training 2010

Piezo ceramics : Manufacturing process of bulk materials

1 Day Piezo Training 2010

General constitutive law of piezoelectric body

1 Day Piezo Training 2010

Constitutive law of PZT ceramics

E E s12 s13 0 0 0 E E s11 s13 0 0 0 E E s13 s 33 0 0 0

1 Day Piezo Training 2010

Electromechanical coupling effect

33 : Longitudinal mode In static : S3=d33 E3

31 : Transverse mode In static : S1=d31 E3

15 : Shear mode In static : S5=d15 E1

Electromechanical coupling effect

1 Day Piezo Training 2010

Electromechanical coupling effect

Transformer coupling factor

kem2 = Uem2 / Ue .Um

Physical properties of piezo materials

Courtesy of Nava Seter (ABC of piezoelectricity, Interlaken conference, feb. 2002)

1 Day Piezo Training 2010

Constitutive law of PZT ceramics

1 Day Piezo Training 2010