A published experimental physicist originally from Japan with a background in so lid-state physics and specialization in magnetism and superconductivity.

Current ly an R&D Engineer in the semiconductor industry focused on design and character ization of next-generation plasma etching tools. Expertise in design and construction of characterization instrumentations, such as nuclear magnetic resonance (NMR) system and electrical transport measurement system. In addition, wide variety of engineering skills including plasma diagnostics (La ngmiur probe, optical emission spectroscopy, etc.), finite element analysis (FEA ), high power RF circuit design and analysis, plasma source and process developm ent (for applications at 2x node) and thin film deposition. Skilled in numerical and statistical data analysis utilizing MATLAB and JMP statistical software. Qualifications PhD in experimental condensed matter physics from UCLA. Patent granted for process development work, and patent application filed for p lasma chamber development. 10 years working with RF systems including 10kW multi-frequency (2, 27 and 60MH z) RF-driven plasma etching tools and 1kW RF-driven NMR systems. Designed and built RF circuits in ultra-cold cryogenic NMR system including pul sed RF transmitter/receiver, impedance matching networks and super conducting wi re circuit to manage thermal load. RF electric field simulation in COMSOL to design plasma etching chamber parts u sing RF modeling. Expertise in electrical data acquisition using oscilloscope and RF network anal yzer. Automation of data acquisition system using LabVIEW and Visual Basic. Experience in ultra high vacuum systems. Know-how on vacuum leak detection usin g residual gas analyzer (RGA). Significant cross-organizational team experience, including project startups. S upported several project teams that received company recognition awards. In-depth understanding of basic plasma chemistry and plasma physics. Experience in the development of plasma etching tools. Experience in MATLAB, COMSOL (FEA), JMP, Igor, LabVIEW, Microsoft Visual Basic and SolidWorks. Professional Experience Process Engineer, Lam Research, May 2007 - CURRENT Responsible for both process productivity and prototype source R&D projects. Next Generation Plasma Chamber R&D: Involved with the project team since its inc eption for which the team was tasked to develop a next generation chamber. Design, implement and characterize prototype plasma etching chambers. Design and implement custom plasma density and optical emission spectroscopy (O ES) probes. ~ Built and implemented novel plasma density and OES probes that are used to cha racterize plasma etching chambers. o The probes provide data that enhance characterization capabilities which were heretofore not possible by existing probes. Manage ramp-up of the experimental chamber and associated supply chain for new sources. ~ Produced the working prototype that came 80% under budget by working through c ross-organizational teams. o Successful ramp-up jumpstarted the prototype chamber data collection. Dielectric Etch Products: Assigned to the project team tasked to enhance the pro ductivity through the development of critical chamber parts, for which the team was recognized with an achievement award in February 2010.

Developed and implemented characterization methodologies and productivity impro vement solutions for new hardware (e.g., new generation of electrostatic chucks or ESCs). ~ Established the characterization methodology to measure the lifetime of parts with shortened running time. Specialized in system RF and plasma-related projects. ~ Chamber operation margin improved by parts that were redesigned based on detai l RF circuit analysis and chamber impedance measurements. o Provided backup options for anticipated future customer escalations. Designed new chamber parts for improved productivity utilizing COMSOL RF simula tion. ~ Efforts resulted in 100% improvement in parts lifetime. o Reduced the cost of the consumables by half and $2M/year. Process Development: Develop plasma etching processes enabled by novel rapid gas switching technolog y for the 2x node flash applications applying double patterning. ~ The development of in-situ SiO2 deposition process for double patterning. Education PhD Physics, GPA=3.95/4.0, June 2007 University of California at Los Angeles, California Experimental condensed matter physics related to the magnetic and electrical ch aracterization of superconducting materials using NMR and electrical transport m easurements. Work resulted in discovery of novel superconducting phase not found in conventional superconductors. Focused on design and construction of RF receiver/transmitter circuits, as well as RF circuit design and implementation in ultra high vacuum (UHV), extreme low temperature systems (T<0.1K). Conducted spectral analysis using MATLAB. Thesis: NMR Investigation of the Novel Superconducting States in Quasi-1D Metal (TMTSF)2X and Tl Doped Semiconductor PbTe Committee: Prof. Stuart Brown (Chair), Prof. Gil Clark, Prof. Hong-Wen Jiang, a nd Prof. Craig Merlic BS Physics, GPA=3.97/4.0, June 2001 University of California at Los Angeles, California Patents Jisoo Kim, Conan Chiang, Jun Shinagawa, Reza Sadjadi, Pitch reduction using oxi de spacer, WO/2009/062123. Akira Koshiishi, Peter Ventzek, Jun Shinagawa, Ion and radical independent enha nced control decoupled source for etch applications, application to be filed. Awards LAM Research VISTA Award, Feb 2011. ~ Quarterly award given in recognition for significant achievements. LAM Research Achievement Award, Feb 2010. UCLA Physics and Astronomy Department Teaching Assistant Award, 2005. UCLA Outstanding Teaching Assistant Award, Winter 2002, Spring 2003, Spring 200 5. UCLA The E. Lee Kinsey Senior Award, June 2001. ~ Award given to the most academically accomplished graduating senior in physics . UCLA Summa Cum Laude, June 2001. Journal Publications and Presentations J. Shinagawa, Y. Kurosaki, F. Zhang, C. Parker, S.E. Brown, D. Jerome, K. Bechga ard, and J.B. Christensen, Superconducting State of the Organic Conductor (TMTSF )2ClO4, Phys. Rev. Lett. 98, 147002 (2007)

Physical Review Letters (PRL) on extremely low temperature and high magnetic fi eld NMR measurements on organic superconductor, which provided the experimental evidence for novel superconducting state and was cited more than 40 times as of today. J. Shinagawa, W. Wu, P.M. Chaikin, W. Kang, W. Yu, F. Zhang, Y. Kurosaki, C. Par ker, and S.E. Brown, 77Se NMR Studies on Magic Angle Effect and Nature of the Su perconducting State in the Organic Superconductor (TMTSF)2X, Journal of Low Temp erature Physics, 142, 227 (2006) Conference proceedings summarizing thesis-related projects. F. Zhang, Y. Kurosaki, J. Shinagawa, B. Alavi, and S.E. Brown, NMR Evidence for Very Slow Spin Density Fluctuations in the Organic Metal (TMTSF)2ClO4, Phys. Rev . B. 72, 060501 (2005) This publication reports on the exotic behavior of the normal state magnetic pr operty in the organic superconductor, which may provide clues for the mechanism of later revealed novel superconducting state. W. Wu, P.M. Chaikin, W. Kang, J. Shinagawa, W. Yu, and S.E. Brown, 77Se NMR Prob e of Magnetic Excitation of the Magic Angle Effect in (TMTSF)2PF6, Phys. Rev. Le tt. 94, 097004 (2005) Conducted majority of NMR measurements with the support of collaborators from P rinceton. This focuses on exotic magnetic angular dependence of normal state of the organic superconductor. J. Shinagawa, Y. Kurosaki, C. Parker, F. Zhang, B. Alavi, and S.E. Brown, NMR Kn ight Shift on (TMTSF)2ClO4, invited talk presented in Sixth International Sympos ium on Crystalline Organic Metals, Superconductors and Ferromagnets (ISCOM), Sep tember 11-16, 2005, Key West, Florida J. Shinagawa, C. Parker, F. Zhang, B. Alavi, and S.E. Brown, Probing Spin Pairin g of Superconducting State in (TMTSF)2ClO4 with 77Se Knight Shift Measurement, p resented in American Physical Society (APS) March Meeting, March 21-25, 2005, Lo s Angeles, California F. Zamborszky, G. Wu, J. Shinagawa, W. Yu, H. Balci, R.L. Greene, W.G. Clark, an d S.E. Brown, Inhomogeneous Electronic Structure Probed by Spin-Echo Experiments in the Electron Doped High-Tc Superconductor Pr1.85Ce0.15CuO4-y, Phys. Rev. Let t. 92, 047003 (2004) Credited for building NMR spectrometer used in the related-experiment.