8.13301400 - Revised - USHIO UX-4 Series - Semicon Taiwan 2011

USHIO UX-4 Series USHIO UX-4 Series
Projection Aligner Projection Aligner

--LED Production Ver. LED Ver. --High Throughput High --Large D.O.F. Large --Simple Mechanism Simple
USHIO INC Business Division 1 Exposure BU
Presentation for 1
1 Company Overview
-USHIO Products In Taiwan Market
Agenda
2 What is Projection Aligner ? 3 Why is UX-4 Projection Aligner ?

-Target of UX-4
4 Performance of UX-4 Projection Aligner

-FeatureResolutionAlignmentMark DetectionWarp wf Handling -Throughput & Model Line Up
5 Sales Quantity
Presentation for
1 Company Overview
-USHIO Products In Taiwan Market
Presentation for
1 Company Overview
Listed on the First Section of the TSE and OSE Head Office Establishment Paidin capital Group Company Number of Personnel Consolidated sales : Otemachi, Chiyoda-ku, Tokyo : March,1964 : 19.6 billion yen : 44 : 4,620 : 120.8 billion yen Consolidated sales Consolidated operating income
151.4 129.2 119.1
billion yen
148.1 120.8
160 140 120 100 80 60
Consolidated operating : 8.9 billion yen income Consolidated ordinary : 9.9 billion yen income 89.1 As of March 31, 2009
51.8 0.7
1964
2.6
1970
15.9
1980 1990 2000
20.1
2004
18.5
19.7
20
40
8.9
2008
20 0
2005
2006
2007
Presentation for
1 Company Overview
USHIO in the World - Location of Group Companies

Presentation for
1 Company Overview
Business Division Business Division Production Division Production Division
Technology & Engineering Division
Processing
Light as processing energy
Photolithography ELE
Photolitho BU
Reforming FLA IR
UV hardening and bonding equipment
Optical measurement and visual inspection equipment

Equipment Unit BU
Exposure BU
Photon Process BU
Cure BU
UV lamps
Extensive exposure equipment Photo-alignment equipment Projection exposure equipment
Excimer lamp/FLA IR heater/Heating equipment
ODF Photo-alignment equipment UV curing equipment UV photo resist curing and Charge neutralization equipment Charge erase equipment, etc.
Spot UV exposure equipment Multipurpose exposure unit UV intensity meter Spectro-reflectance meter Accumulated UV meter UV intensity meter
Presentation for
UV Lamp for Lithography

Super-high-pressure UV lamp
UV lamp for circuit exposure, key for semiconductor/LCDs development World Share
80
Presentation for
Roll to Roll Stepper for TAB and COF LCD Driver IC Packaging Industry
World Share
100
Presentation for
UX-5 Stepper For PCB Industry
World Share
90
Presentation for
1 Company Overview
-USHIO TAIWAN,INC
Established1987July CapitalNT$238,000,000 Employee71 per ServiceSales/CS/TS OfficeTaipei/Hsinchu/ Taichung/Tainan OrganizationSales 19 per CS/TS 21 per
10
2 Whats Projection Aligner
Presentation for
2 Whats Projection Aligner

Lamp Oval Condenser Mirror
Mask Damage Free 2nd Plane Mirror

Condenser Lens Mask
Integrator
1st Plane Mirror Off Contact Projection Lens
Substrate
Yield Up
Presentation for
3 Why is UX-4 Projection Aligner ?

-Target of UX-4
Presentation for

-Target of UX-4 PSS Stepper
Dicing trench
UX-4
ITO
UX-4
L/S: <
3um
Contact Pad
L/S: >
5um UX-4
L/S: >
Protect layer
5um UX-4
EXCLUSIV E US E D
L/S: >
5um
L/S: >
5um
Presentation for

-Target of UX-4
4
30 25 20 15 400 200 0 10 5 0 1 0 ,0 0 0 3 0 ,0 0 0 5 0 ,0 0 0 7 0 ,0 0 0 9 0 ,0 0 0 4
65 115 195 375 2 4 9 16 2 3 6 11
D
(M N T D )
1 ,0 0 0 800 600
80 160 360 640
10,000 20,000 50,000 100,000
30 25 20 15
70 140 230 440 4 6 12 24 2 4 7 13
D
160 240 480 960
(M N T D )
1 ,0 0 0 800 600 400 200 0 1 0 ,0 0 0 3 0 ,0 0 0 5 0 ,0 0 0 7 0 ,0 0 0 9 0 ,0 0 0 6
10,000 20,000 50,000 100,000
10 5 0
Number of Machine & Investment Plan4 inch 6 inch

Presentation for

-Trend of worldwide LED maker
Presentation for

NEW MASK SAVED
NTD 3.8mil saved / 1 yr

(5 inch mask)
YIELD UP SAVED
NTD 37mil saved / 1 yr

(4 inch mask)
HIGH THROUGHPUT
77,760 layer / 1 mth

Totally Effective 2.25 Times AREA CAN BE PRODUCTED
Presentation for
46 INCH ENLARGE
3 Why is UX-4 Projection Aligner

NEW MASK SAVED
NTD 3.8mil saved / 1 yr

(5 inch mask)
PX(layer)/*5inch= 777,600 layer/500 layer*ntd 2,500=NTD 3,888,000
YIELD UP SAVED
NTD 37mil saved / 1 yr (4 inch mask)
[PX(wf)*4inch]**= [777,600/5*32,412]*0.05*0.15=NTD 37,805,357
N NTD 4,169 UX-4 X U 1

Presentation for
4 Performance of UX-4 PJ Aligner

-Feature @Resolution
Presentation for

L/S 8/8um
L/S 6/6um
L/S 4/4um
L/S 3/3um
L/S 2/2um
Si PR t:1um
arantee Res. Gu um L/S 3

Presentation for

100um Gap
Projection
OK
Proximity
Presentation for
NG

Proximity
+20um
Gap10um
NG
+20um
Gap30um Gap50um
Projection
-50um
Focus:-50um
OK
+50um
Just Focus Focus+50um Presentation for

-Feature @Alignment
Presentation for

-Feature @Alignment
Accuracy
2um
P-P=1.69
1 2 3 4 5
1um
um
Acuracy Real Data WorkAccuracy Test 8 inch Qz wf ResistOFPR-800=1m 150mJ/cm2(@UVD-365)

Presentation for

-Feature @Alignment Usual Tester
USHIO Large Diameter Tester Totally Made B y
RD
Only Spot Areas Controlled
Full Areas Controlled
1.16um Usual Polished Distortion
Presentation for
0.37um High Accuracy Distortion

-Feature @Mark Detection
Presentation for
No.1 halogen100W 80%
No.2 halogen150W 80%
Presentation for
No.1 No.2 (0.2pxl) (5msec)
Presentation for
ITO
Before After
, !!
1um!!
Presentation for

-Feature @Warp wf Handling
Presentation for

-Feature @Warp wf Handling
600 550 [um] 500 450 400 350 300 250 -100 -50 0 Y[mm]
600 550 [um] 500 450 400 350 300 250 -100 -50 0 Y[mm] 50 100
Example of Cruel Cu
Afetr Vaccum
rve
Concavity Curve
Before Vaccum
50 100
Afetr Vaccum
Convex Curve
Before Vaccum
Pasted USHIO INC Business Division 1 Exposure BU
with Si&Glass (t=600um)
Presentation for

-Throughput & Model Line-up
Presentation for

-Throughput & Model Line-up
(Typical) inch mm m m W sec 3
A
2 100 5 1 500 3 4
B
4 100 3 1 1000 1.5
&
C
6 150 3 1 2000 1.2 2,000kg
2200(W)x1600(D)x2400(H)
GEM (1) (2)LED (3)PX (4)
Presentation for
5 Sales Quantity
Presentation for
5 Sales Quantity
Over 1200 systems in Market
Stepper for FC-BGA / FC-CSP
Roll Stepper for COF (COF: Package for LCD Driver)
Stepper for WL-CSP
Aligner for LED/MEMS
Presentation for
YOU CAN DO WITH
USHIO
Ushio Inc. started out in 1964 as a manufacturer of industrial light sources and has since evolved into a "creator of light" that offers light source and optical systems segments around Expectations of "light" as an effectthe development of an affluent societ the world as well of use and application as "energy".
USHIO
LIGHTING EDGE TECHNOLOGIES

8.13301400 - Revised - USHIO UX-4 Series - Semicon Taiwan 2011

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8.13301400 - Revised - USHIO UX-4 Series - Semicon Taiwan 2011

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Available Formats

USHIO UX-4 Series USHIO UX-4 Series

Projection Aligner Projection Aligner

USHIO INC Business Division 1 Exposure BU

2 What is Projection Aligner ? 3 Why is UX-4 Projection Aligner ?

4 Performance of UX-4 Projection Aligner

USHIO INC Business Division 1 Exposure BU

-USHIO Products In Taiwan Market

USHIO INC Business Division 1 Exposure BU

151.4 129.2 119.1

160 140 120 100 80 60

USHIO INC Business Division 1 Exposure BU

USHIO in the World - Location of Group Companies

UV hardening and bonding equipment

Optical measurement and visual inspection equipment

Extensive exposure equipment Photo-alignment equipment Projection exposure equipment

Excimer lamp/FLA IR heater/Heating equipment

USHIO INC Business Division 1 Exposure BU

UV Lamp for Lithography

USHIO INC Business Division 1 Exposure BU

USHIO INC Business Division 1 Exposure BU

UX-5 Stepper For PCB Industry

USHIO INC Business Division 1 Exposure BU

2 Whats Projection Aligner

USHIO INC Business Division 1 Exposure BU

2 Whats Projection Aligner

Mask Damage Free 2nd Plane Mirror

1st Plane Mirror Off Contact Projection Lens

USHIO INC Business Division 1 Exposure BU

3 Why is UX-4 Projection Aligner ?

USHIO INC Business Division 1 Exposure BU

3 Why is UX-4 Projection Aligner ?

USHIO INC Business Division 1 Exposure BU

3 Why is UX-4 Projection Aligner ?

65 115 195 375 2 4 9 16 2 3 6 11

80 160 360 640

10,000 20,000 50,000 100,000

70 140 230 440 4 6 12 24 2 4 7 13

1 ,0 0 0 800 600 400 200 0 1 0 ,0 0 0 3 0 ,0 0 0 5 0 ,0 0 0 7 0 ,0 0 0 9 0 ,0 0 0 6

10,000 20,000 50,000 100,000

USHIO INC Business Division 1 Exposure BU

Number of Machine & Investment Plan4 inch 6 inch

3 Why is UX-4 Projection Aligner ?

USHIO INC Business Division 1 Exposure BU

3 Why is UX-4 Projection Aligner ?

NTD 3.8mil saved / 1 yr

NTD 37mil saved / 1 yr

77,760 layer / 1 mth

3 Why is UX-4 Projection Aligner

NTD 3.8mil saved / 1 yr

PX(layer)/*5inch= 777,600 layer/500 layer*ntd 2,500=NTD 3,888,000

NTD 37mil saved / 1 yr (4 inch mask)

[PX(wf)*4inch]**= [777,600/5*32,412]*0.05*0.15=NTD 37,805,357

USHIO INC Business Division 1 Exposure BU

N NTD 4,169 UX-4 X U 1

4 Performance of UX-4 PJ Aligner

USHIO INC Business Division 1 Exposure BU

4 Performance of UX-4 PJ Aligner

arantee Res. Gu um L/S 3

4 Performance of UX-4 PJ Aligner

4 Performance of UX-4 PJ Aligner

4 Performance of UX-4 PJ Aligner

USHIO INC Business Division 1 Exposure BU

PX(layer)/5inch= 777,600 layer/500 layerntd 2,500=NTD 3,888,000

[PX(wf)*4inch]**= [777,600/532,412]0.05*0.15=NTD 37,805,357