1.1.

1 Overall Equipment Efficiency (OEE)

1.1.1.1 OEE Concept

The above diagram shows the concept of E10 and EQP State mapping SEMI Standard E10 states are matched to equipment states as shown below:
Equipment State RUN IDLE DOWN MES PM Information Off-line Event E10 State Productive Time Engineering Time Standby Time Unscheduled Down Time Schedule Down Time Non-scheduled Time State Code 1000 3000 2000 5000 4000 6000 Description From BC From BC From BC From MES From BC

The general concept for OEE is to define KPI indexes and monitor items for Equipment productivity improvement. Below is the function category that OEE system will provide within this project: (1) OEE, Performance and Loss Analyzer The performance of equipments can be effectively analyzed by the SEMI Standard or customized indices and the history of events and alarms. Consequently, the cause of deterioration or problem may be

removed to improve the performance of the equipments. (2) Rule Based State Management States of the main equipment or sub-equipment that does not generate events or alarms can be easily assigned and managed by combining the states of lower level sub-equipments that generate events and alarms and applying Down and Run rules Furthermore, in the opposite case where the lower level sub-equipments do not generate events or alarms but the main equipment and higher level sub-equipments do generate events and alarms, the states of the main equipment or higher level sub-equipments are inherited (3) Real Time Equipment Monitoring Based on the equipment event report and alarm report generated and transmitted real-time, the states of the main equipment and subequipments are assembled and managed in details in real-time (4) Standard Process Time The Process Start and End events from equipments are assembled and analyzed to evaluate and provide Actual Process Time (APT) and Actual Tact Time (5) SEMI Standard Index Based on the equipment states evaluated by real-time Equipment Monitoring and Rule Based State Management, various indices specified by SEMI Standard E10, E58, E79 and E116 are evaluated and provided (6) Web Based Graphic User Interface For CSOT CIM project will provide a Web GUIsystem, which is illustrated below. Modeling Monitoring WIP Analysis Index Analysis Down Analysis Admin

1.1.1.2

Capability Metrix

Base on SEMI Standards E10 and E79, below are the Equipment Capability Metrics information: Equipment Reliability Index MTBIp: Mean (productive) time between interrupts MTBFp: Mean (productive) time between failures MTBAp: Mean (Productive) time between assists MCBI: Mean cycles between interrupts MCBF: Mean cycles between failures MCBA: Mean cycles between assists Equipment Availability Index Equipment dependent uptime (%) Supplier-dependent uptime (%) Operational uptime (%) Equipment Maintainability Index MTTRf: Mean time to repair MTTRi: Mean time to repair MTOL: Mean time off-line Equipment dependent scheduled downtime (%) Supplier dependent scheduled downtime (%)

Formula Productive time / # of interrupts that occur during productive time Productive time / # of failures that occur during productive time Productive time / # of assists that occur during productive time Total equipment cycles / # of interrupts Total equipment cycles / # of failures Total equipment cycles / # of assists

Formula Equipment uptime x 100% / OT -(All MD + out-ofspec input DT + FR DT) Equipment uptime x 100% / OT -(user MD + out-ofspec input DT + FR DT) Equipment uptime x 100% / Operations time

Formula Total repair time / # of failures Total repair time / # of interrupts Total equipment downtime / # of interrupts Equipment scheduled downtime x 100% / OT -(All MD + out-of-spec input DT + FR DT) Equipment scheduled downtime x 100% / OT - (User MD + out-of-spec input DT + FR DT)

Equipment Utilization Index Operation utilization (%) Total utilization (%)

Formula Productive time x 100% / Operations time Productive time x 100% / Total time

Equipment Efficiency Index OEE(Overall Equipment Efficiency)

Formula Theoretical Production Time for Effective Units / Total Time (Availability Efficiency) X (Performance Efficiency) X (Quality Efficiency) (Equipment Uptime) / (Total Time) (Operational Efficiency) X (Rate Efficiency) (Production Time) / (Equipment Uptime) (Theoretical Production Time for Actual Units) / (Production Time) (Theoretical Production Time for Effective Units) / (Theoretical Production Time for Actual Units) (Actual Units of Recipe I x THTi) or (Actual Units of Recipe I / UPHi) (Efficiency Units of Recipe I x THTi) (Efficiency Units of Recipe I / UPHi) Theoretical production time per unit of recipe Theoretical unit throughput by recipe of recipe

Availability Efficiency Performance Efficiency Operational Efficiency Rate Efficiency Quality Efficiency Theoretical Production Time for Actual Units Theoretical Production Time for Efficiency Units THTi UPHi

1.1.1.3

OEE & Loss Analysis

The ultimate goal of this system is improving OEE (Overall Equipment Effectiveness) and, in order to improve, various types of equipment loss need to be removed or reduced There are following types of equipment loss: (1) Availability Loss: includes losses that are not related to actual production such as Scheduled Downtime, Unscheduled Downtime, Non-Scheduled Time and so on (2) Performance Loss Operational Loss: includes losses that are related to Standby/Idle Time and Engineering Time during Equipment Uptime, excluding Availability Loss Rate Loss: also called Speed Loss and is the ratio of actual throughput against ideal throughput
(3)

Quality Loss: includes losses that are related to rework, scrap, etc

The following diagram illustrates the relationship between SEMI Standard E10 states and Equipment Losses

System analyzes these losses effectively and consequently improves OEE by constructing and utilizing various types of charts, reports and other tools Different analysis method for OEE loss:
(1) Analyzing OEE indices by types of causes of loss and equipment states (2) Analyzing OEE indices by types of equipment and major sub-equipment (like chambers) (3) Analyzing OEE indices by equipment groups (such as area, bay and type) (4) Analyzing OEE indices by time (shift, daily, weekly and monthly)