Classification number

504C3 027

Pages Distribution number

33 1

Version

Design standard document

Teaching pendant - Transport

22nd September 2011

Distribution number Destination Distribution number Destination

System device part 1 design

TAZMO Ltd.
Approved by Examined by Draft

Classification number

504C000 0

Version

Software Business Procedures System equipment

Revision history

Page

Tazmo Ltd.

Classification Number

504C302 7
Item number page

Design Standards
Teaching Pendant

Revision History

Page 1

Version

History No

Establishme nt/last revised

Revision description

Approva l Yamano be

Checke d

Proposal

1.1

11/09/2 2

All pages

New establishment

Kohat a

Yamaz oe

Tazmo Ltd.

Classification Number

504C302 7

Design Standards
Teaching Pendant

Revision History

Page 2

Version

Tazmo Ltd.

1. General rules..................................................................................................................3 1.1. Purposes....................................................................................................................3 1.2. Scope of application..................................................................................................3 1.3. Establishment-abolition, maintenance management................................................3 2. Terminologies.................................................................................................................. 3 3. Robot safety requirement items.....................................................................................5 3.1. General industrial robots...........................................................................................5 3.2. Emergency stop-irregular stop..................................................................................6 3.3. Teaching..................................................................................................................... 6 4. Teaching pendant............................................................................................................ 7 5. Concept of the teaching pendant...................................................................................8 5.1. Password on entry.....................................................................................................8 6. Basic operation of the Teaching Pendant......................................................................10 6.1. Select the item (for example, when selecting the command).................................11 6.2. Input datasuch as time teaching.......................................................................12 6.3. The confirmation pagefor example, when running the command....................12 6.4. JOG operation screen...............................................................................................14 6.5. Error screen.............................................................................................................15 7. About screen................................................................................................................16 8. Control of teaching pendant.........................................................................................16 8.1. Initial Control of Teaching Pendant..........................................................................16 8.2. Configure actions.....................................................................................................16 9. Notes............................................................................................................................. 20 10. Appendix.....................................................................................................................21

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 3

Version

1. General rules
1.1. Purposes
This standard document establishes the design criteria of the teaching pendant operation method of a TAZMO conveying machine, and aims at unification of the teaching pendant operation method between equipments.

1.2. Scope of application

This document is applied for the conveying machine (mainly robots, aligners, loaders, unloaders) manufactured by TAZMO. When there is no particular request from the user, the manual for any neighbor teaching pendant will be prepared following this standard. However,it is not that limitation when applying this standard document to equipment composition is difficult.

1.3. Establishment-abolition, maintenance management

Provided in a "quality documentation administrative establishment and revision, and maintenance management. provision", performs

2. Terminologies
Industrial robots Machines which have the ability to move through automatic control or manipulation functions, can perform various tasks by programs, and are used in industry. Manipulator Machines constituted from segments connected mutually, which aim at holding or moving objects (parts, tools, etc.). Operator Those who carry out with a robot or a robot-system, are recognized as who can start, supervise and stop the operation. Rectangular Robot (Cartesian-Coordinated Robot) The mechanical structure of an arm is mainly a robot of rectangular-coordinates form. Cylindrical Robot (Cylindrical-Coordinated Robot) The mechanical structure of an arm is mainly a robot of cylinder coordinates form. SCALAR Robot The mechanical structure of the arm joints has parallel axes of rotation of the robot in compliance with a plane perpendicular to the axis. Link The machine structure or individual rigid element which is relatively movable to each other. Degrees of freedom The number of independent variables required to describe movement of a rigid body in space. Motion space The region that can be swept by moving parts of the robot (any end effector is not included) Maximum space The moving space, plus the working region that can be swept by end effectors.

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 4

Version

Restricted space The region restricted by the limit equipment which does not exceed in a part of maximum space no matter failure and malfunction what may arise in a robot system. Operating space Distance or angle ready for each axis. Teaching Point to a position and store information required in order to do work in a robot. Direct teaching People need to move a robot's arm, a hand, etc. directly and teach them. Remote teaching A kind of direct teaching, use a pendant etc., and move and teach a robot's arm, a hand, etc. Operation mode Operating status of the robot controller. Automatic mode An operation mode which controls a robot according to a set-up task program. Manual mode An operation mode which has priority over other modes, operating a robot by an operator. Pendant The portable unit which is connected to a control device and performs teaching operation to a robot in a program. Simple speed Speed of the point specified when the single axis operated. Track speed Velocity along the path. PTP Control The control for moving the tool center point of a robot axis to another point, theres no specification received about the route in that case. CP Control Control performed by the instruction given all orbitals or the entire route. Interpolation The function which carries out continuous movement without stopping point given at intervals. Stop category Stop function of the mechanical drive. Be classified into following three categories. Stop category-0: The stop performed by turning off a machine actuator directly, and is not controlled. Electronic logic and the software must not intervene. Stop category-1: The stop in which the machine actuator is stopped and the power supply is stopped after that, controlled by orders from a control circuit. The stop of power supply must not pass electronic logic and the software. Stop category-2: The stop by which power supply is carried out at a machine actuator.

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 5

Version

Acceleration-Deceleration Control There are a velocity-trapezoid system which uses constant acceleration as shown in Fig. 1.1 (a), and makes acceleration a trapezoid; and an S character acceleration-and-deceleration system which makes acceleration a curve as shown in Fig. 1.1 (b), and uses S-curve acceleration.

MAX

MAX

S PE ED

ACC

S PE ED S 1 S 0

ACC

S TAR T T IM E
aVeloci method

STAR T T IM E

(a) Velocity trapezoid methodS-curve acceleration

Figure Acceleration method

Initial speed The speed at the start of acceleration and or at the end of deceleration (START in Figure 1.1) Maximum speed When acceleration of the acceleration control is finished, the speed reaches the constant speed range (MAX in Figure 1.1). Acceleration The amount of change of velocity per time during acceleration and deceleration of acceleration and deceleration control (ACC in Figure 1.1). S-curve ratio The ratio of straight line acceleration part (S1) at the time of acceleration of an acceleration trapezoid system, and the S-curve acceleration part (S0-S1). From the figure, it becomesS0S1S0100.

3. Robot safety requirement items

3.1. General industrial robots
When equipped with industrial robots (the definition of an industrial robot is referring to the following), priority is given to Industrial Safety and Health Act, cope with it to meet the following safety standards. Definition: When it corresponds to all the followings, consider it as an industrial robot. 1 Having a driving source exceeding 80W. If you have more than one drive source, it is considered the maximum output of them. 2 Having a manipulator and a memory storage 3 Performing at least 2 operations of stretching, left-right, up-down.

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 6

Version

4 The motion space of a manipulator exceeds the range of either of four kinds of the following. a. 300mm radius x 300mm long for cylindrical-coordinated robot b. 300mm radius for spherical-coordinated robot c. 300mm x 300mm long for rectangular robot d. 100mm vertical distance for vertical and horizontal operation.

3.2. Emergency stop-irregular stop

When the emergency stop operates, the mechanical operation is made into the mechanism which can stop immediately (stop category 0).

3.3. Teaching
1 When a robot is in teaching mode, it is automatically set to safe working speed.. 2 Safe working speed of 250 mm/sec (path velocity)or less. 3 The teaching operation of a robot is performed only while pushing the pushbutton switch (Enabling SW). 4 When the teaching device (pendant) needs to perform teaching operation, a power supply interception button switch (Stop SW) should be installed to the pendant. 5 When you are operating in manual mode, do not perform any operation from the outside into the structure unless there is the emergency stop switch. 6 Display the purport of teaching operation with indicating lights etc. during teaching work. 7 Those who is working with industrial robots should carry out safety rules. Note: Health Law Article 59 Paragraph 3 (No. 31 Article 36 of the Occupational Health and Safety regulations, No. 32), Article 18 of the safety and health regulations established by the special education and training course is based on Article 19 "special education instructor for industrial robots", don't perform safety education for those who is non-qualified.

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 7

Version

4. Teaching pendant
Name Small Pendant Model HG1T-SB12UH-MK1444 Manufacturer: IDEC Corporation InterfaceYou cannot modify the settings below Communication form: RS232C Communication speed: 9600bps Data bit: JIS8 Parity: None Stop bit: XON/XOFF Control: Disableno control Local echo: Disableno control CR operation code: Crrecovery operation only Buzz Key: NoBeep

LCD d i s p l a y 8 x 3 2 c o l um n s

S e l e c t o r SW A u t om a t i c m o d e Manua l mode

S t o p SW

F1

F2

F3

F4

F5

E n a b l i n g SW

M em b r a n e SW 9 x 5 c o l um n s

F6

F7

F8

F9

F10

ESC

FUN C

ORG

S TO P

OK

C AN

CLR

BS

SH I F T

+/-

EN T

Figure Pendant figure

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 8

Version

1 LCD display The LCD display has 8 rows of 32 digits. 2 Stop SW By pressing the stop switch, the motor drive power supply is cut all off. RESET stop switch (turn slightly to the right) to release it. 3 Selector SW Switching between automatic and manual modes. When it is turned down, the automatic mode is selected, when turned up, the manual mode is selected. 4 3-position enabling SWEnabling SW When operating in manual mode, a drive power supply is switched on and it can operate. If this key is released, a drive power supply is cut off. It is ignored in automatic mode. Since it is a 3-position switch, when operating it, please press this key lightly. A switch will be come by off if pushed in strongly. 5 Key input unitMembrane SW It is used for an input or an operation of equipment from a pendant.

5. Concept of the teaching pendant

Teaching pendant are used for robot operations, there are automatic and manual modes, selected via the selector switch on the teaching pendant. In automatic mode, control operates from the top, you cannot teach pendant operation (monitor functions only). In manual mode, operates under the control of the teaching pendant, cannot be controlled from the top (only read status command). Each command is grouped by using features, and a hierarchy (a tree of functions). Each operation also has a password-protection, and that differentiation is made.

5.1. Password on entry

The password at the entry of a teaching pendant has just two modes, User mode and Tazmo mode. However, this is not limited if the user requires more. Password type The following 2 password modes are prepared. Changing a pre-set password is impossible. User Mode the password open to a user Tazmo Mode not open to a user Error release Mode not open to a user Password level User modefor the userwhen a user operates it, a pertinent portion is made with basic functions and private security. Tazmo Mode for Tazmo, which can access the full functionality (running operation, speed parameter settings, etc.) Error release Mode Error surveillance is stopped and pendant operation is enabled. Suppose that manual operation of an operation category is impossible. A password screen is displayed after power activation, the screen is either automatic mode or manual mode in respect to the selection switch (refer to Fig. 5.1 and Fig. 5.2). MODELModel name VERSoftware version PONProgram number of software

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 9

Version

12345678901234567890123456789012 [UNIT INFORMATION] |REMOTE MODEL:***** | VER :*.** | PNo. :********* | | [INPUT PASSWORD] | PASSWORD:******** | |
Figure 1 Password screen in automatic mode

12345678901234567890123456789012 [UNIT INFORMATION] TEACHING MODEL:***** | VER :*.** | PNo. :********* | | [INPUT PASSWORD] | PASSWORD:******** | | Password screen in manual mode |

Figure

How to enter password Clear KeyClear the password Backspace KeyDelete a password character Enter KeyEnter password Numeric KeysPassword input When a wrong password is entered If the password is wrong, characters appear in line 8 as below: Enter KeyRetype the password

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 10

Version

6. Basic operation of the Teaching Pendant

In order to make it equivalent to traditional pendant (PF820), 20 digits are used from the left; another 12 digits are used from the right, showing operation mode on the 1 st line, and the operation unit on the 2nd line, and arbitrary use on lower ones. For reference, the example is shown in Figure 6.2.

12345678901234567890123456789012 [**********] */*|MODE 1.************* |UNIT

Align operations The top 2 lines: Status display

Main title

2.************* 3.************* 4.************* 5.************* 6.************* 7.*************

| | | | | |

The lower 6 lines are not specified

Figure 1 Basic operation screen

Type of operation Password level

[**********] */*|MODE 1.************* |UNIT 2.************* |MANUAL 3.************* |TAZMO 4.************* |OVERRIDE 5.************* |READY!! 6.************* |SPEED * 7.************* |ALARM:****

Sensor override

Power ready

Currently set speed

Alarm is occurring

Figure Right screen example Operations of the teaching pendant are divided in to the follow five, which are the standards of operation of this. The screen displays main title is on the first line and in [] brackets.

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 11

Version

6.1. Select the item (for example, when selecting the command)
Among the items that are displayed on the screen, you choose what you want to work. Screen display Item selection on the same menu layer is performed by the numeric keys [1] [7]. The screen just displays buttons and items which are available. Number keys are separated by periods (.). Also, if there are more than seven choices, it displays according to the arrangement (see below) of screen page scrolling. A keystroke is performed to select the item carried out by numeric keys .In item selection, do not use numeric key of 8 or more Operation methods Numeric Keys Item selection move to lower menu layers. Cursor KeysSwitch between pages Escape KeysMove to the upper menu layers. Cursor display No cursor is displayed in an item selection menu.

12345678901234567890123456789012 [TITLE] */*|MODE 1.********** |UNIT 2.********** | 3.********** | 4.********** | 5.********** | 6.********** | 7.********** |
Figure Item selection screen

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 12

Version

6.2. Input datasuch as time teaching

Parameter settings such as teaching or performing direct input of numeric data. Screen display It is desirable to display the data and the range of data being set at the time of entering data. Operation methods Clear KeyClear input line Backspace KeyDelete one input character Escape KeyReturn data from the input modeinput Move to the upper menu layer input selection Enter KeyData input Numeric KeyInput selection Numeric data entry Period KeyFloating-point data entry Positive/Negative Key/Toggle the sign of the data Item selection and cursor display If an item is chosen by a number key, a cursor will be displayed on the portion which requires an input. In the case of a selection item, selection items are displayed one by one. (Example: YES<=>NO)

12345678901234567890123456789012 [TITLE] 1.****** 2.****** 3.****** 4.****** 5.****** 6.****** 7.****** */*|MODE : **.** |UNIT : **.** | : **.** | : **.** | : **.** | : **.** | :*** |

Figure Data entry screen

6.3. The confirmation command

page for

example,

when

running

the

Command execution and data changes require confirmation. The confirmation screen will be displayed at this time. Screen display The title and operation keys are displayed. Operation methods OK KeyRun Cancel KeyCancelgo back to the original Enter KeyOK Escape KeyCancelgo back to the original Cursor display The confirmation screen doesnt display the cursor.

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 13

Version

12345678901234567890123456789012 [ READY? ] |MODE |UNIT *********** | | START -> OK | CANCEL -> CAN | | |
Figure Operation confirmation Operation confirmation screen.is pressed to start the operation. to cancel it and return to the previous screen. Whenis shown at the bottom of the scree, press the SW to enable the operation.

12345678901234567890123456789012 [****/****] |MODE |UNIT **** : *** | **** : *** | | | DECIDE -> ENT | CANCEL -> ESC |
Figure Enter number for confirmation Enter the confirmation number. Display the cursor at the item to enter, then type the number, and press to confirm. Pressto go to the previous screen.

12345678901234567890123456789012 [********] */*|MODE 1.***** : **.** |UNIT 2.***** : **.** | | [SAVE BACKUP MEMORY]| SAVE -> ENT | CANCEL -> ESC | |
Figure Setting change confirmation screen

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 14

Version

Setting checking screen. Under the current screen, five lines is displayed, as shown in the above figure, and all of a numerical value and an item are saved. []to save the backup memory, and to return to the menu.to go to the original menu.

12345678901234567890123456789012 |MODE |UNIT ************ | | EXECUTING!! | | | |

Figure Running screen Screen during operation. During the operation, press and hold SW to enable, and release to stop

6.4. JOG operation screen

It is operated in JOG or JOG teaching. Screen display The display of an axis and the operation of each axis in JOG operation are performed. Moreover, input operation is performed in JOG teaching. Operation methods Choose the axis Cursor KeysAxis selection Cursor KeysLow speed JOG operation Cursor KeysHigh speed JOG operation Enter KeysOK Item selection and cursor display Item selection is performed by numeric keys , and for scrolling selection. The selected item is highlighted. While holding the enabling SW, press for JOG operation to be performed. Either or is for positive direction or for negative direction.Low-speed JOG runs at speed number 1. High-speed JOG runs at speed number 2.

12345678901234567890123456789012 [****] 1.******* 2.******* 3.******* 4.******* 5.******* 6.******* 7.******* */*|MODE |UNIT | | | | | |

Figure operation screen

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 15

Version

6.5. Error screen

When an error occurs, the error status is displayed. Screen display When an error occurs, if it is able to continue, the screen in Figure 6.10 is displayed, if not, the screen in Figure 6.11 is displayed. For a continuation possible error, the error can be canceled by generating ENT key.For a continuation impossible error, press ENT to remove the error and perform a CPU reset. Operation methods Enter KeyClear the error, reset CPU Item selection and cursor display Cursor display is not performed Since pendant operation cannot be performed in a continuation impossible error, error release may not be able to be carried out. In order to prevent it, an error screen is not displayed for 5 seconds after a power supply injection. The password in error release mode is entered between them.

12345678901234567890123456789012 [ERROR] |MODE |UNIT ***:XXXXXXXXXXX | | | CONTINUE -> ENT | | |

Figure Error 10 occurrence screen (able to continue)

12345678901234567890123456789012 [ERROR] |MODE |UNIT ***:XXXXXXXXXXX | | | CPU RESET -> ENT | POWER OFF | |
Figure Error 10 occurrence screen (unable to continue)
*** Error Code characters XXXXXXXXXXXXX Error Messagemaximum 16 character

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 16

Version

7. About screen
Scroll the screen page Screen at the same hierarchical level can be made in the initial screen. The following page is created when a display cannot be performed. At this time, (the number of pages / the total number of pages) is specified in the screen upper right. Each page can be switched using the cursor keys [] [], you can toggle crossed.reverse direction,: forward direction

[TITLE] 1.****** 2.****** 3.****** 4.****** 5.****** 6.****** 7.******

1/2|MODE : **.** |UNIT : **.** | : **.** | : **.** | : **.** | : **.** | :*** |

[TITLE] 2/2|MODE 1.****** : **.** |UNIT 2.****** : **.** | 3.****** : **.** | 4.****** : **.** | 5.****** : **.** | 6.****** : **.** | 7.****** :*** | Figure Screen scrolling

Display data It is based on not outputting "0" on a beam when displaying digital data Eg Regular False

8. Control of teaching pendant

8.1. Initial Control of Teaching Pendant
When teaching pendant is starting, it shows initial control. It returns to a password entry screen by changing a selection switch, and enables operation by another mode of operation, without intercepting power supply. However, the change by that a robot is a halt condition at the time of a selection switch change and an operating state is forbidden. When pull it out, teaching pendant is stopped and alarm is generated.

8.2. Configure actions

Configure actions Operation mode selection Unit selection Category selection Operation itemDetails of an operation itemReference figure . Operation mode selection Automatic modeand Manual modecan be chosen by selecting a switch of teaching pendant. In the case of Automatic mode, the following categories of actions can only monitor operationsBut in TAZMO mode, running is possible. Unit selection Each unit is chosen when two or more units operated with a teaching pendant exist. In the case of a single unit, suppose that an abbreviation is possible. A unit name refers to table 8.1 and determines it individually. Table 1 Unit name Unit name ALL UNIT WAFER TRANSFER ALIGNER LOADER Operation category
Unit All units Common items Transfer robot Aligner Opener

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 17

Version

According to a teaching pendant, an operation category is classified into the four following kinds. ManualMANUAL Work that related to operating. Operation for performing the manual operation of axial movement or auxiliary operation, and setup JOG teaching data. ParameterPARAMETER Operation which writes data to memory. Operation for setting various parameters. MonitorMONITOR Operation of checking a state. Operation for performing the monitor of an input-and-output signal or a log. RunningRUNNING Operation that a pendant performs individual operation. Operation will become possible if it inputs with the password in TAZMO mode from automatic mode. Some items is not displayed in user mode. In running operation, a sensor override is used and it can be made to perform a conveyance check without a work. Operation mode selection
l e c t o r SW
R EMO T E

Manual mode
[UN I T IN FO RM A T ION ] MO D E L : * * * * * VER : * . * * PNO : * * * * * * * * *

Automatic mode
[UN I T IN FO RM A T ION ] MOD E L : * * * * * VER : * . * * PNO : * * * * * * * * * [ IN PU T P A S SWO RD ] P A S SWO RD : * * * * | R EMO T E | | | | | | |

Se | T E A CH IN G | | T E A CH ING | | [ IN PU T P A S SWO RD ] | P A S SWO RD : * * * * | | Unit selection

[UN I T ] 1 . A L L UN I T 2 .UN I T 1 3 .UN I T 2 4 .UN I T 3 5 .UN I T 4 1 / 1 | T E A CH IN G | | | | |

Category | | selection

Unit selection
Category selection

[UN I T ] 1 . A L L UN I T 2 .UN I T 1 3 .UN I T 2 4 .UN I T 3 5 .UN I T 4

1 / 1 | R EMO T E | | | | | | |

[MO D E ] 1 .M AMU A L 2 . P A R AM E T E R 3 .MON I TO R

1 / 1 | T E A CH IN G |UN I T | | | | | |

Operation item

[MOD E ] 1 .MON I TO R 2 . RUNN ING

1 / 1 | R EMO T E |UN I T | | | | | |

[M ANU A L ] 1 .*** 2 .***** 3 .*** 4 .*** 5 .******** 6 .******* 7 .*******

1 / * | T E A CH IN G |UN I T | | | | | |

[ P A R AM E T E R ] 1 .*** 2 .***** 3 .*** 4 .*** 5 .******** 6 .******* 7 .*******

1 / * | T E A CH ING |UN I T | | | | | |

[MON I TO R ] 1 .*** 2 .***** 3 .*** 4 .*** 5 .******** 6 .******* 7 .*******

1 /* |****** |UN I T | | | | | |

Figure Pendant

operation composition

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 18

Version

Operation items Select specified operation item. The item with reference to the following table, corresponding to the individual. Table Operation items
Category MANUAL Item ORG HOME MOVE GET PUT EXTEND RETRACT HOLD RELEASE LIFT UP LIFT DOWN LIFT MID CHANGER XCHANGE MAPPING MAP MOVE MAP EXTEND MAP RETRACT MAP UP MAP DOWN ALIGNMENT CENTERING LDP OPEN LDP CLOSE JOG TEACHING * ORG SEACH M Detail Content Initialization Move to HOME position Move to STOP POINT Extract operation Storage operation Stretch arm Retract arm Hold operation Release operation Arm PUT start height movement Arm GET start height movement Arm teaching start height movement Inversion-axis operation Exchange operation Mapping operation Mapping position movement Mapping sensor growth Mapping sensor shrinkage Mapping sensor move up Mapping sensor move down Alignment start Center alignment operation Open LOAD PORT Close LOAD PORT JOG Operation JOG Teaching Starting point detecting operation

Station number

Station number Station number

Specified for each axis Specified for each axis Each independent axis

PARAMATE R

**** COMMUNI

BA RATE DATA PARITY STOP TIME OV RSP NUM RSP TIM X POSI Y POSI R POSI T POSI Z POSI S POSI P POSI STATIONNo. X POSI Y POSI

Communication baud rate Data bits Parity Stop bit Communication time over Respone times Respone time interval X-axis (rect coordinate) home position Y-axis (rect coordinate) home position R-axis (cyl coordinate) home position -axis (cyl coordinate) home position Lift axis home position Slide axis home position Inversion axis home position Station number X-axis (rectangular) teaching position Y-axis (rectangular) teaching position

HOME POSITION

STATION

Classification Number

504C30 27

Design Standards
Teaching Pendant
R POSI T POSI Z POSI S POSI P POSI UP LIFT DOWN LIFT LIFT STOP COMPLE X ORG Y ORG R ORG T ORG Z ORG S ORG P ORG

Page 19
R-axial (cylinder) teaching position -axial (cylinder) teaching position Lift axis teaching position Slide axis teaching position Inversion axis teaching position Upper lift movement Bottom lift movement Lift stop teaching position Teaching end X-axis original offset Y-axis original offset R-axis original offset -axis original offset Lift axis original offset Slide axis original offset Inversion axis original offset

Version

ORG DATA

MOVE SPEED STATION SPEED

Each specification STATIONNo. ARM EXTEND ARM RETRACT LIFT LO LIFT HI MAPPING TEACHING SPEEDNo. MAX START ACC S CRV SIZE SLOT S PITCT STROKE EXTENT RANGE POINT FLYOUT SEN OFF

speed

Speed of the specified position Station number Arm speed when there is work Arm speed when there is no work Low speed of lift position teaching Top speed of lift position teaching Mapping speed Teaching speed Speed number (each axis) Top speed Start speed Acceleration S ratio Work size The number of slots of a cassette Slot width of a cassette Amount of lift mapping Existence detection width operation Thickness detection width operation Mapping detection depth position Running-out detection position Difference bt chuck & sensor position GET waiting time PUT waiting time GET/PUT times of retry Execute operating time GET/PUT existence check is sometimes ignored **Limit position of the axis in the positive direction * Limit position of the axis in the negative direction Arm length Servo motor in-position width Step motor position gap width

SPEED TABLE

MAPPING

TIMING

GET WAIT PUT WAIT RETRY EXEC TIM * +LIM * -LIM ARM LENGTH SV INP ST INP

OVERRIDE CONFIGURAT ION

Classification Number

504C30 27
DEFAULT ALRAM LOG CLEAR COMMUN LOG CLEAR

Design Standards
Teaching Pendant

Page 20
Data is returned to an initial value Clear the alarm log Clear communication log

Version

MONITOR

ERROR LOG COMMUNICA TION LOG INPUT/OUTP UT ENCODER CASSETTE TEACH MAPPING RESULT MAPPING DATA

Display error log Display communication log I/O display ABS ENCODER INC ENCODER DEFF COUNT Display absolute value of encoder Display incremental value of encoder Display deviation value of encoder Cassette teaching display Mapping result display Mapping data display

RUNNING

TRANSFER ARM RUNNING TURN RUNNING LIFT RUNNING SLIDE RUNNING FLIP RUNNING

Station specification

Transfer operation running Single arm operation running Turn operation running Lift operation running Slide operation running Flip operation running

MMode is displayed in TAZMO mode.

9. Notes
In the creating of the teaching pendant software, pay attention to the following notes:In the manual mode of a pendant, there are 2 ranks of speed low speed, high speed, speed is used to set at mm or less. In the times of a start of operation, such as the time of running or operation, inside of area where operating is being dangerous.

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 21

Version

10.

Appendix

An error code may include 4 figures. The first is error level, the following figure is unit number, lower 2 figure be an error code. When a display is a double figure display, lower 2 figure is displayed. Error code Unit number Error level Error code Table Error code table2 lower figures
Code 00 01 02 03 04 05 06 07 08 09 10 20 21 22 23 24 25 26 27 28 29 2a 2b 2c 2d 2e 2f 30 31 32 33 34 35 36 37 38 39 3a 3b 3c 3d 3e 3f Message RUN TEACHING READY ACTIVE Content Standby state Teaching box operation Moto preparation Running Level LV0 LV0 LV0 LV0 LV0 LV0 LV0 LV0 LV0 LV0 LV0 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1

PAUSE INTERLOCK INITIAL WAIT INITIAL WORK OFF WORK ON WORK OFF SLOT WORK ON SLOT SLOT ERROR NO STATION ARM NO. ERROR

Paused Under interlock In preparation Waiting for untreated initialization No wafer There is wafer No wafer in a specified slot Specified slot has wafer Error at specified slot No location is specified Specified arm is abnormal

MAPPING SENSOR MAP PARAMETER

Mapping sensor error Parameter is not set

MAP FLYOUT ERR MAP DISABLE ARM1 OVER ARM2 OVER TURN OVER LIFT OVER SLIDE OVER FLIP OVER

ARM1 BATT WORN ARM2 BATT WORN TURN BATT WORN LIFT BATT WORN SLIDE BATT WORN FLIP BATT WORN

Running out of wafer Stop during mapping Out of range error Out of range error Out of range error Out of range error Out of range error Out of range error RESERVE RESERVE Battery of absolute encoder decreased Battery of absolute encoder decreased Battery of absolute encoder decreased Battery of absolute encoder decreased Battery of absolute encoder decreased Battery of absolute encoder decreased RESERVE RESERVE

Classification Number

504C30 27
NOT READY

Design Standards
Teaching Pendant
Power supply of driver is not switched on LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV1 LV3 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV2 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3

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Version
40 41 42 43 44 45 46 47 48 49 4a 4b 4c 4d 4e 4f 80 a0 a1 a2 a3 a4 a5 a6 a7 a8 a9 aa ab ac ad ae af b0 b1 b2 b3 b4 b5 b6 b7 b8 b9 ba bb bc bd be bf c0 c1 c2 c3 c4 c5 c6 c7 c8 c9 ca cb cc

BACKUP MEMORY BEFORE INITIAL TIME OVER WORK FLYOUT RB POSI ERR WORK(1) LOST WORK(2) LOST BRAKE LOCK CANCEL PAUSE ARM1 POSI ERR ARM2 POSI ERR TURN POSI ERR LIFT POSI ERR SLIDE POSI ERR FLIP POSI ERR

ARM1 +LIMIT ON ARM1 -LIMIT ON ARM2 +LIMIT ON ARM2 -LIMIT ON TURN +LIMIT ON TURN -LIMIT ON LIFT +LIMIT ON LIFT -LIMIT ON SLIDE +LIMIT ON SLIDE -LIMIT ON FLIP +LIMIT ON FLIP -LIMIT ON

FAN1 ERROR FAN2 ERROR

Backup memory error Can not run command before initialize Time is over Wafer jumped out during operating Robot operated during the stop Wafer (1) lost during operating Wafer (2) lost during operating Brake ON error Cancel operation after pause Malposition Malposition Malposition Malposition Malposition Malposition RESERVE RESERVE Abnormal positive limit Abnormal negative limit Abnormal positive limit Abnormal negative limit Abnormal positive limit Abnormal negative limit Abnormal positive limit Abnormal negative limit Abnormal positive limit Abnormal negative limit Abnormal positive limit Abnormal negative limit RESERVE RESERVE RESERVE RESERVE Malfunctioning fan Malfunctioning fan

ARM1 ENCODE ARM2 ENCODE TURN ENCODE LIFT ENCODE SLIDE ENCODE

Error Error Error Error Error

in in in in in

reading reading reading reading reading

absolute absolute absolute absolute absolute

encoder encoder encoder encoder encoder

Classification Number

504C30 27
FLIP ENCODE

Design Standards
Teaching Pendant
Error in reading absolute encoder RESERVE RESERVE Abnormal position Abnormal position Abnormal position Abnormal position Abnormal position Abnormal position RESERVE RESERVE LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3 LV3

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Version
cd ce cf d0 d1 d2 d3 d4 d5 d6 d7 d8 d9 da db dc dd de df e0 e1 e2 e3 e4 e5 e6 e7 e8 e9 ea eb ec ed ee ef f0 f1 f2 f3 f4 f5 f6 f7 f8 f9 fa fb fc fd fe ff

ARM1 DEVI ERR ARM2 DEVI ERR TURN DEVI ERR LIFT DEVI ERR SLIDE DEVI ERR FLIP DEVI ERR

ARM1 COMMUNI ARM2 COMMUNI TURN COMMUNI LIFT COMMUNI SLIDE COMMUNI FLIP COMMUNI

ARM1 SV ALM ARM1 SV ALM TURN SV ALM LIFT SV ALM SLIDE SV ALM FLIP SV ALM

Communication Communication Communication Communication Communication Communication RESERVE RESERVE Amplifier error Amplifier error Amplifier error Amplifier error Amplifier error Amplifier error RESERVE RESERVE

error error error error error error

COLLISION1 COLLISION2 MAIN POWER OFF EMERGENCY STOP

Emergency stop (collision detection) Emergency stop (collision detection) Emergency stop (POWER OFF) Emergency stop (stop SW)

DescriptionLevel No error, display status Non-continuable error, error is released with following command Non-continuable error, error is released with (RST) command : Non-continuable error, error is released by reset or power supply reinjection

Table The mode of expression in a teaching pendant

Classification Number

504C30 27

Design Standards
Teaching Pendant
Japanese translation Axis X-axis Y-axis Z-axis -axis Default

Page 24
Other candidates

Version
Standard Axial relation Speed setup

Magnification Initial velocity Accelerating Maximum speed S-curve acc/deceleration Speed

Unit name Operation

Robot Industrial Robot Polar Robot Rectangular Robot SCARA Robot Aligner Handler Searcher Vonveyance Rotation mechanism Buffer Hoop SUMIFU Rail Boat station Bake Cool Coat Developer Dehyration bake Switchboard Bake furnance Indexer Power supply BOX Rotation cup Scrubber Vacuum dry Inspection equipment Elevator

RF

Extend Retract Forward Reverse Hold Loss Move Rotate Pickup Put down Rise and fall (except pickup

Classification Number

504C30 27

Design Standards
Teaching Pendant
stroke) Up Down Stick into Detect Complete Remove Replace Stuck at an angle Pile up Exchange (W arm) Delivery Override Stop Release Memorize Measure

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Version

Part

Line sensor Laser Changer Station Cassette Sensor Chuck Emergency Arm:first, second joint Wrist2nd axis +C106 Rotation of third joint Rotation of the chuck key Backspace Escape Clear Cancellation Number of stages Chamber Valve Wafer Reclaim wafer Substrate Air pressure Vacuum pressure Vaccum Pressure Pendant Overrun Mask Resist Reticle Pericle Magnetic shield Infrared laser

ACCUMORATOR

Classification Number

504C30 27

Design Standards
Teaching Pendant
Conversion kit Nozzle Self-diagnostic function Ionizer Encoder Grease Connector Cylinder Fiber Melody Regulator

Page 26

Version

Event O

Top Bottom Front Rear Height Direction First Adjust Current Safety Interlock Stroke Home position In-line Initial value High speed Low speed Control Installation Starting Path Trajectory Load Repeat accuracy Position accuracy Stopping accuracy Transport lead time Minimum positioning time Fail-safe Danger Safe working procedure Failure Exposure Fringe Bowing Operating rate Throughput Back side Cycle time Crack Metal comtamination Airflow

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 27

Version

State Command name Menu classification I Standard Others

Standby Resume Complete preparation Operating state Waiting state Preparation not complete Status State Initialization reset Command

Single unit movement Teaching setup Running Speed setup Environment setup Monitor display Extension Maintenance Operator Calibration Registration Modification Delete Confirm Return (screen) Executing operation Setup Press any key

Semi Jaidah Flat Notch Flat or notch Orientation flat

Operating mode Automatic mode Manual mode Enable Disable Report Message Select Content Dummy JOG Offset value Release

LIBERTE

Classification Number

504C30 27

Design Standards
Teaching Pendant

Page 28

Version

Calibration (correct orientation flat value) Angle Size Pitch Detailed Position Timesof running Recipe Target Result Process Sequence Definition Equipment Manual Center Inch Parameter Inside Outside Reading Writing Lap timer Reverse Standard Incorrect Floating point Motion space Restricted space Workspace Operating range Polar coordinate system Rectangular coordinate system Primary side, upper stream Secondary side, lower stream Pretreatment Post-processing Cleanliness Resistivity Data log Pulse Device

Table SEMIINTERNATIONALSTANDARDS1995 B215

Variable Trace Material Alarm Enable Disable Event (phenomenon) Abortion Boot Terminal Timeout Host

Classification Number

504C30 27

Design Standards
Teaching Pendant
Item Fixation Establishment Service Permission Substitution Notes Individual Validity Illegal Pascal Baud rate Horsepower (HP) Inch Micron Radian Second Starting Conclusion Standby state Operating state Prepairation step Waiting operation start Under excution Under a pause Interference Course Delivery Return Normal Abnormal

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Version