Course Audit

Steady
Boaz Kramer
Control and application development ACS Motion Control Inc. Plymouth, Minn.

does

Velocity (mm/sec)

Amplitude (m)

Vibration isolation systems are useful, but introduce issues of their own. In this series, well review those challenges and some control-based solutions.

it

Part 1 of 2

Two key factors

Aggressive profile

Less aggressive profile moves more slowly.

Settling time is determined by dynamic effects and it increases when a system moves aggressively. Left are two velocity profiles for the same moving distance. The graph at right shows their servo position error. Though the blue profile has significantly shorter duration, it generates a higher position error and results in a longer settling time. Total move and settle time is much shorter with the less aggressive profile.

20 20 15 10 5 0 -5 -10 -15 -20 -25 0 Move and settle 2 Move and settle 1 0.5 1 1.5 Time (sec) 2 2.5 3 Fig. 1b Move 1 Move 2 More aggressive profile actually takes longer to settle.

Fig. 1a

In this installment:
Passive and active isolation issues Isolation system behavior Challenges

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igher velocities and accelerations are usually required to increase machine throughput, but forces are often limited by the voltage and current restraints of a systems motors and drives. That said, even if a motor can produce enough power to deliver faster operation, an aggressive motion profile does not necessarily yield higher throughput. In many
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cases, practical velocity and acceleration are well below maximum achievable values. Why? Profile duration, the commanded move time, is only half of the equation. The other part is settling time. Settling time is determined by dynamic effects and can significantly increase when a system makes very aggressive moves. An example is shown in Figure 1. The problem is even more severe when the settling widow is tightened and higher resolution is required.

To illustrate, the resolution of semiconductor instruments is approaching (and in some cases, going below) 1 nm. Instruments with this resolution are sensitive to even the smallest vibration or disturbance particularly vibrations excited by the motion profile itself. The most common vibration mitigation approach is to modify the motion profile by means of trial and error, to keep the entire move and settle duration as short as possible. Often, however, this method is insuf-

0.5 Time (sec)

ficient. Lets explore more effective solutions to address the problem. Passive isolation systems are typically used to isolate systems from disturbances transmitted from the floor. They employ a seismic mass supported on a soft spring made of air, metal, or rubber. The springs damping action absorbs vibrations above the springs resonance. For this reason, passive isolation manu-

Passive isolation

Consider the plight of motion system designers in the semiconductor industry, who face constant demand for higher performance to produce more semiconductors, faster, and at a lower cost. This makes for significant challenges. To illustrate, one aspect of the semiconductor manufacturing process, inspection, usually involves positioning silicon wafers relative to optical (or other) components by placing the wafers on a fast-moving XY stage. How can this delicate operation be sped up with accuracy? Part of the answer, which we cover here, is in mitigation of vibration. Whether you work in the semiconductor industry or another field, controls-based damping could help your design move more nimbly.
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facturers usually try to lower spring force is applied to a load to generresonant frequency to increase the ate motion, it also acts on the isolateffective isolation range. The prob- Extended ringing lem is that this makes most passive 60 isolation systems Servo position error with isolation 40 system vibration excluded. very soft and 20 softness is detri0 mental on fast-20 moving systems such as stages. -40 Vibration deteriorates settling time. When a servo -60
-80 Error taking vibration into account -100 -120 0.5 1 Time (sec) 1.5 2 Fig. 2

When force is applied to a load to generate motion, it also acts on the isolated stationary base, causing it to vibrate. Low frequency and light damping contribute to isolation system vibration, even long after motion has ceased. This vibration acts as a disturbance to the servo system, introduces position error, and prolongs settling time.
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Course Audit
Frame acceleration compensation control scheme Move time vs. settling time
20 20 15 10 Amplitude (m) 5 0 -5 Settling time can last longer than move time. Move time 0 0.5 Settling time 1 1.5 Time (sec) 2 2.5 Position error Velocity profile
Acceloremeter Filter Command + K.ML

In this example, the settling window is one count.

-10 -15 -20 -25

Fig. 3 3

Move time is the duration of the motion profile. It is dominated by commanded motion parameters such as velocity and acceleration. Settling time is the duration of time from when the profile ends until the system reaches and stays within a certain target window. The sum of move plus settle times is what determines a systems agility. That is why for applications with point-to-point moves, machine throughput is affected and expressed in terms of move and settle.

the active isolation system not only absorbs energy entering from the floor, but also effectively absorbs vibrations generated by the moving stage. In addition, typical active systems are inherently stiffer than air tables. Their resonant frequency depends on the tuning of their servo, but it is typically higher (greater than 10 Hz) than that of the passive systems and actively isolated systems are much better damped. As a result, vibration is suppressed more quickly and effectively. Here is the catch: Most active vibration isolation systems are relatively complex and costly. They are also more difficult to install and their support electronics often require adjustment. A simpler and less expensive approach for active damping is the command feedforward method. It is most useful where a known force is applied to an isolated base, and a signal proportional to that force is available. More sophisticated motion controllers are necessary with this method, as the applied force depends on the stage acceleration determined by the motion controller.

Control laws

Drive

Machine

Feedback Fig. 5

turbances, which can extend settling time to nanometer or sub-nanometer settling windows. Lets explore another option. Consider isolation-system vibration of the model shown in Figure 4, which depicts a direct-drive system on a

Base acceleration is measured in each direction and a compensation force ML x a is applied to the drive command, such that resulting position error is significantly reduced (ML - moving load mass). This does not prevent isolation system vibration, but minimizes relative movement between the base and load.

Command feedforward

These, like passive systems, isolate systems from disturbances transmitted to the system from the floor. Active systems detect vibration levels with sensors that send signals into a feedback or feedforward controller, which in turn sends signals to actuators to counteract the forces. In other words, within the feedback Isolation system model loop, a sensor meaxB sures vibrations affecting the isolated x E K base and then the K d Active damping actuator reacts to F Vibration problems are much less reduce the level d severe with active isolation systems. of vibration. So, ed stationary base, causing it to vibrate. Because the frequency is low (usually below 1 Hz, to 10 Hz) and damping is very light, the isolation system continues vibrating long after the motion profile has ended. See Figure 2 on the previous page. This vibration acts as disturbance to the servo system, introduces error, and extends the settling time preventing inspection instruments, to use our example application, from taking measurements.
The effect of the isolation system vibration can be described using a basic model. A direct drive system is mounted on a base with limited mass and stiffness. Force is applied on the load at the stationary base.

Heres how it works: An analog signal (proportional to the commanded acceleration in a certain direction) is sent by the motion controller to an actuator, which in turn produces force equal in magnitude but opposite in direction. Typically, additional analog signals (indicating the commanded position) are also sent. They account for the effects of coupling twist: An isolated base twists clockwise if there is X acceleration when the stage is in full -Y position, and counterclockwise when the stage is in full +Y position. Besides being more cost effective than sensor-based isolation systems, command feedforward cannot become unstable, and significantly improves settling performance. One caveat: Command feedforward also requires setup and proper tuning of the feedforward gains.

Modeling isolation system vibration

Fig. 4

Active isolation systems, even when well tuned, cannot eliminate vibration entirely and to reiterate, semiconductor inspection machines can use very high-resolution feedback devices and are extremely sensitive to even the slightest disMONTH YEAR

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base with limited mass and stiffness. The feedback reading is relative to the base: X encoder = X L X B The force is applied both on the load at the stationary base. The transfer function describing the relation between the applied

force and feedback reading is:

X encoder F 1 1 = + 2 2 ML s M B s + ds + K 2 1 ( M B + M L ) s + ds + K = M B s2 + ds + K M L s2

The part in the parentheses represents isolation system dynamics, with parameters: ML = Total mass of load MB = Isolated stationary base mass F = Applied force X L = Load displacement relative to ground X B = Base displacement K = Stiffness of isolation system d = Damping of isolation system Two possible solutions exist: Increased disturbance rejection of the servo system Special motion profiles that do not excite disturbing vibrations One method to improve the servo disturbance rejection is frame acceleration compensation. The performance of a stage with passive isolation can be upgraded by using two accelerometers in XY directions. The acceleration of the base is measured in each direction, and a compensation force (ML a) is applied to the drive command such that the resulting position error is significantly reduced as shown in Figure 5. This method does not prevent isolation-system vibration, but does minimize the relative move between bases and loads beneficial because inspection instruments are installed on bases. Tune in for the second part of this two-part series next month, when well review frequency domain behavior, disturbance-rejection algorithms, and another approach using input shaping.
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Magnitude (dB) Phase (degrees)

40 20 0

-20 -40 -60 0 -90

-180 -270 -360

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101 102 Frequency (Hz)

103 Fig. 6

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Well also study a new class of controls, executed as special functions on motion controllers, that minimizes the effect of isolation-system vibrations on settling time. For more information, email boazk@acsmotioncontrol.com or visit acsmotioncontrol.com.
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Course Audit

Effect of isolation system dynamics

Phase (degrees)

Steady
Boaz Kramer
Control and application development ACS Motion Control Inc. Plymouth, Minn.

does

it
fA =

60

Magnitude (dB)

40 20 0

Part 2 of 2

-20 -40 -60 0 -90

A Bode plot of a system controlled by a PIV filter shows the system without the isolation system dynamics (blue) and under the influence of isolation system dynamics (red.)

Vibration isolation systems are useful, but introduce issues of their own. In this series conclusion, we review those challenges and some control-based solutions.

-180 -270 -360

100

101 102 Frequency (Hz)

103 Fig. 6

In this installment: Isolation resonance and time-domain response Vibration mitigation functions Disturbance-rejection algorithms, input shaping

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n the first part of this series (see August 2008 issue) we reviewed how although higher velocities and accelerations are usually required to increase machine throughput, even if a motor can produce enough power to deliver faster operation, an aggressive motion profile does not necessarily yield higher throughput. Profile duration, the commanded
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move time, is only half of the equation. The other part is settling time. Settling time is determined by dynamic effects and can significantly increase when a system makes very aggressive moves. The most common vibration mitigation approach is to modify the motion profile by means of trial and error, to keep the entire move and settle duration as short as possible. Often, however, this method is insufficient. Lets explore some more suitable and effective solutions to address the problem. Isolation system dynamic models show that a second-order pole (resonance) and a second-order zero (anti-resonance) are added. Their frequencies are f R and f A respectively.

fR =

1 K MB 2

Typically, MB >> ML, so the two frequencies are very close. That said, f A > f R.

on systems with passive isolation. Conside a system with 0.0625-m resolution and a 1-m settling window. The isolation system in this

case does not use air, and its resonance is relatively high, at greater than 10 Hz. See Figure 7 below. As with active

isolation systems, frame acceleration compensation is less effective when the required settling window is a few nanometers or less.

1 K (MB + ML ) 2

Frame acceleration compensation

Frequency domain behavior

Figure 6 (see above, facing page) shows the open-loop Bode plot of a system controlled by a PIV filter. The blue plot is of a system without isolation system dynamics; the red plot shows the effect of isolation system dynamics. Notice the additional resonance and anti-resonance. A phase lead is introduced in the phase: The effect in the frequency domain is not significant, and yet, the effect on time-domain performance can be crucial. Frame acceleration compensation is successfully implemented with certain equipped motion controllers

Velocity profile (yellow), position error (green), and in-position bit (red) plots before and after implementation show settling time reduced almost to zero. A: Performance before frame acceleration compensation is implemented shows that base vibration significantly influences settling. B: Performance after frame acceleration compensation shows that oscillation in position error is almost completely eliminated.
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Course Audit
Settling in a 1-nm window
or PIV control algorithm is insufficient, and additional high-order filters (and special nonlinear algorithms) further enhance disturbance rejection of the servo. The example in Figure 8 depicts settling performance in a system where the target move is a few millimeters and the settling window is only 1 nm. Here, a controller with an onboard SIN-COS multiplier enhances output from a 2-m resolution encoder, to give one example, for a final resolution of 0.49 nm. Another example is in Figure 9, which shows the performance of a large gantry stage used for flatpanel display inspection. For this particular setup, total moving stage mass is about 500 kg, and it must be moved at velocity of 500 mm/ sec with acceleration of 0.5 g, and then settle into 1-m window. Basic encoder resolution is 40 m and is multiplied by an on-board SINCOS multiplier for a final resolution of 4.9 nm. The stage is mount-

Improved settling time

In black is the position error when using a standard PIV algorithm. In red is the position error from a system driven by an ACS SPiiPlusseries motion controller using a special algorithm with enhanced disturbance rejection.

Again, it is impossible to compensate for vibration entirely and settling time is always affected. Systems may also be sensitive to noise resulting from accelerometers, so appropriate filtration should be ap-

plied. Increasing servo bandwidth can help, especially on air-table systems where resonance frequency is relatively low in other words, well inside the bandwidth of the servo. In many cases, a standard PID

Disturbance rejection works

Here is a velocity profile (yellow), position error (blue) and an in-position bit (green) with and without a disturbance rejection algorithm. A: Move and settle performance of a large gantry stage with standard PIV control is less nimble and stable than that in B of move and settle performance of a large gantry stage using a disturbance rejection algorithm.
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Input shaping principle

A2 response A1 response
Position (mm)

With input shaping, if a first impulse starts a vibration (blue graph), a second impulse (red graph) can cancel it. The total response has only half a cycle of vibrations. Timing and magnitude of the second impulse need to be accurate, so capable controllers must be used with this method. Additional pulses may be added to improve robustness.

Total response is quickly smoothed.

Time (msec)

Fig. 10

ed on a massive granite base with vibration frequency of 2.5 Hz. The figure shows the resulting velocity profile, position error, and the

in-position bit without and with a disturbance-rejection algorithm the latter of which shows significant improvement. Another effective approach is to use special motion profiles designed to avoid excitation of vibrations. Input shaping, a technique developed by Convolve Inc., Armonk, N.Y., is a method for generating motion profiles that minimizes vibrations excitation in moving systems. Software calculates sequences of impulses that do not excite resonant system modes. The impulse sequence is then convolved with target command signals. How is this effective? Because the impulse sequence causes no vibration, the convolution product also causes no vibration. Input shaping is a feedforward technique that requires no feedback and has no affect on servo stability. In addition, it can handle multiple modes of vibration so it can be used to eliminate not only isolation system vibration, but other disturbances as well, such as vibrations caused by system cables. It can also help eliminate vibrations unobservable by feedback transducers, but still affecting points of interest. The disadvantage of using input shaping is that for very low frequencies, it can significantly increase the profile time by at least half a cycle of the vibration. Preventing the isolation system from vibrating is key to a great design, but only if it does not severely degrade move time. Otherwise, isolation system vibration prevention is suitable wherever its effect on position error is minimized as much as possible. For more information, email boazk@ acsmotioncontrol.com or visit acsmotioncontrol.com.
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Input shaping

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