65nm CMOS Process Technology: Paul Kim Senior Manager, Foundry Services Fujitsu Microelectronics America, Inc

65nm CMOS Process Technology
Paul Kim Senior Manager, Foundry Services Fujitsu Microelectronics America, Inc.
Leading-edge Technology
Fujitsu 65nm
New 300mm Fabs Mie, Japan

300mm Fab No.2
Process 65nm/90nm CMOS Logic Structural Features Seismic-vibration control construction Clean room area: 24,000 sq. meters Production Capacity 10,000 wafers per month (FY07 projection) Maximum capacity of 25,000 wafers per month Planned Start of Operation April 2007
300mm Fab No.1

Process 90nm/65nm CMOS Logic Structural Features Seismic-control construction Clean room area: 12,000 sq. meters Production Capacity 15,000 wafers per month (FY06) Start of Operation April 2005
February 7, 2006
DesignCon 2006
Fujitsu 65nm
CMOS Technology Roadmap
1000
Physical Gate Length (nm)
180nm 180nm
500 200 100

CS90 CS80 / 80A
130nm 130nm
90nm 90nm 65nm 65nm 45nm 45nm
CS90A CS100A CS200A
CS100/CS100A (90nm) L actual=40-80nm SiOC (k:2.9) low-k Dual Damascene Cu CS200/CS200A (65nm) L actual=30-50nm NCS (Nano-Clustering Silica)
50
CS100HP
20 10 1998 2000 2002 2004
CS200
2006
2008
2010
Year (Production Start)

February 7, 2006
DesignCon 2006
Fujitsu 65nm
Proven Track Record of 90nm Complex Designs and Products
February 7, 2006
DesignCon 2006
Fujitsu 65nm
Proven Track Record of 90nm Complex Designs and Products continued

350-450 250-350 200-250 100-200 50-100 20-50 0 5 10 Tape Out Number
High End Low Power
Low-power Products Multimedia processor Digital AV products Others
February 7, 2006
Chip Size (mm2)
High-performance Products PC CPU (Transmeta) Large-scale FPGA (Lattice) Others
DesignCon 2006
Fujitsu 65nm
65nm, CS200 / 200A Features
Features
Ultra-high-speed performance (CS200) LG = 30nm, on-current enhance Compared to 90nm technology, CS200 offers: 1.3 times faster speed 0.6 times lower power 2 times higher density 3 variations of Vth on a chip (CS200A) (1.8V & 2.5V) or (1.8V & 3.3V) I/O combination available 11-layer copper interconnects with robust, very low K ILD
February 7, 2006
DesignCon 2006
Fujitsu 65nm
CS200 / 200A Transistor Variations
CS200: Ultra High Speed CS200A: Wide Speed Range + Low Power Consumption
Large
HS-Tr Server/ Network STD-Tr HVt-Tr Mobile Computing STD-Tr Digital Consumer
CS200
Leakage current
CS200A
HS-Tr
High End Server
LL-Tr Cellular Phone
HS:High speed STD:Standard LL:Low leakage
Speed
February 7, 2006
Fast
DesignCon 2006
Fujitsu 65nm
Leading-edge Transistors
Large
Performance
90nm node 65nm node 45nm node
Small
Leakage
tpd P
Fast
February 7, 2006
Propagation Delay
8
Slow
DesignCon 2006
Fujitsu 65nm
Ultra-Thin Gate Insulator / Mobility Improvement

Surface Cleaning
Normalized gm ( mobility)
2.0E-3
1nm-thick Gate Oxide
Poly-Si Nitrided-SiO2
40% increase
1.5E-3
1.0E-3
After optimize
5.0E-4
Si substrate
Before
0.0 -0.5 1.5 3.5 5.5
Electric Field [MV/cm]
February 7, 2006
DesignCon 2006
Fujitsu 65nm
Speed Performance Improvements
65nm CS200 (ps/gate) Inverter 2-input NAND 2-input NAND + 200 grid interconnect load 5.7 8.7 23.1
90nm CS100 Delay (ps/gate) Improvement 7.0 11.4 30.8 19% 24% 25%
February 7, 2006
10
DesignCon 2006
Fujitsu 65nm
High-Performance Competitive Transistors
Ion vs Ioff Characteristics of nMOSFETs

10-6
Ioff (A/um)
10-7
Company 1) B Company 2) 70nA/m A
Fujitsu
10-8
Ref. 1, 2) 2004 Symposium on VLSI Technology
Vd=1.0V
10-9 0.7
0.8
0.9
1.0 1.1 Ion (uA/um)
1.2
1.3
February 7, 2006
11
DesignCon 2006
Fujitsu 65nm
Advanced Cu and Low-k
Four Generations of Experience
Dielectric constant High Low
CS80/80A 6-Cu layers ILD FSG
CS90A 7-Cu layers ILD hybrid low-k CS100/100A/150 10-Cu layers ILD full low-k CS200/200A/250 11-Cu layers ILD hybrid Ultra-low K
ILD: Inter-layer Dielectric
180nm node
February 7, 2006
130nm node
12
90nm node
65nm node
DesignCon 2006
Fujitsu 65nm
Fujitsus Low-k Leads ITRS

500 <2.7 <2.4 3.0
k
2.5 <2.1 <1.9 2.0
400
Width [nm]
300
Intermediate Wire Pitch
200
1.5
130nm 130nm 100 90nm 90nm 65nm 65nm 45nm 45nm

CMOS Technology Node
1.0 32nm 32nm 2015 CS300 Full - NCS
0 2000 CS90 SiLK TM/SiO
2005 CS100 Full- SiOC
2010 CS200 NCS/ SiOC
Products Year
2
K=2.7/4.1
February 7, 2006
K=2.9/2.9
13
K=2.25/2.9
K=2.25/2.25
DesignCon 2006
Fujitsu 65nm
Low-k Advantages of 65nm
Ultra low-k impacts on speed and power dissipation
CS100A (90nm) with SiOC/SiOC Rsh: 90m/sq., C: 56fF/1000 grid CS200A (65nm) with SiOC/SiOC Rsh: 150m/sq., C: 52fF/1000 grid CS200A (65nm) with NCS/SiOC Rsh: 150m/sq., C: 40fF/1000 grid
February 7, 2006
14
DesignCon 2006
Fujitsu 65nm
11-Layer Copper Interconnects

Cu 11-layer Stack-via Chain
February 7, 2006
15
DesignCon 2006
Fujitsu 65nm
The Fujitsu Ecosystem

Application Application & Software & Software Packaging, Packaging, Assembly Assembly & Test & Test Process Process Technology Technology Design Design Methodology Methodology EDA Design Design Services Services 3rd Party Design Houses IP IP Development Development & Support & Support 3rd Party IP Vendors Support Support Library Library Development Development 3rd Party Library Vendors
3rd Party Test Houses
Vendors
February 7, 2006
16
DesignCon 2006
Fujitsu 65nm
Fujitsu Technology Access
Flexible collaboration models provide easy access to Fujitsus leading-edge process for the development of highly complex silicon products
ASIC Flow
Customer Fujitsu
COT Flow
Customer Fujitsu
Custom Flow
Customer Fujitsu
RTL Design
Logical Synthesis DFT Insertion Formal Verification Floorplanning Physical Synthesis Clock Tree Synthesis Routing Timing & SI Verification STA / ECO Physical Verification Test Validation
February 7, 2006
17
DesignCon 2006
Fujitsu 65nm
Design Flow & Methodology
Reference design flow - Fujitsus leading-edge design methodology focuses on timing, signal and power integrity closure Support for both Cadence SOCEncounterTM and Synopsys GalaxyTM platforms In-house CAD software development augments leading third-party EDA solutions Ensures silicon correlation and a fast path to silicon success by combining Fujitsus strengths in process, CAD tool and methodology development with design experience and expertise Production proven flows used on 100+ multi-million-gate designs at 180, 130 and 90nm Constantly updated and improved to address all issues at each process node
February 7, 2006
18
DesignCon 2006
Fujitsu 65nm
Fujitsu Design Services
Library and tool support Methodology development and support High-speed I/O design and expertise Vertical expertise and IP cores RTL design Synthesis and physical synthesis Design partitioning and floorplanning Static timing analysis Test insertion and ATPG generation Place and route Timing and SI closure Formal verification Physical verification Test and product engineering
February 7, 2006
19
DesignCon 2006
Fujitsu 65nm
Fujitsu Worldwide Design Centers
Global Presence
Local design centers around the world provide design services for all phases of the development process
Skilled engineering teams experienced in development of large complex designs at 130nm and below 100+ multi-million gate designs taped out
February 7, 2006
20
DesignCon 2006
Fujitsu 65nm
Summary
Fujitsu Objective Helping customers accelerate their innovation, differentiate their products and enhance their competitive advantage, therefore helping them succeed Leading-edge technologies Strength in process technologies 90nm, 65nm and beyond Partnerships and customer collaborations Flexible customer engagements and close collaborations Early customer engagements Tailored support and services to meet customer needs System-level LSI solutions ASIC and ASSP/SoC, including10GbE switch chip and WiMAX SoC Full design and development environments and support
February 7, 2006
21
DesignCon 2006

65nm CMOS Process Technology: Paul Kim Senior Manager, Foundry Services Fujitsu Microelectronics America, Inc

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65nm CMOS Process Technology: Paul Kim Senior Manager, Foundry Services Fujitsu Microelectronics America, Inc

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65nm CMOS Process Technology

New 300mm Fabs Mie, Japan

300mm Fab No.1

CMOS Technology Roadmap

Physical Gate Length (nm)

500 200 100

90nm 90nm 65nm 65nm 45nm 45nm

CS90A CS100A CS200A

20 10 1998 2000 2002 2004

Year (Production Start)

Proven Track Record of 90nm Complex Designs and Products

Proven Track Record of 90nm Complex Designs and Products continued

Low-power Products Multimedia processor Digital AV products Others

Chip Size (mm2)

High-performance Products PC CPU (Transmeta) Large-scale FPGA (Lattice) Others

65nm, CS200 / 200A Features

CS200 / 200A Transistor Variations

High End Server

LL-Tr Cellular Phone

HS:High speed STD:Standard LL:Low leakage

Ultra-Thin Gate Insulator / Mobility Improvement

1nm-thick Gate Oxide

Electric Field [MV/cm]

Speed Performance Improvements

High-Performance Competitive Transistors

Ion vs Ioff Characteristics of nMOSFETs

Company 1) B Company 2) 70nA/m A

1.0 1.1 Ion (uA/um)

Advanced Cu and Low-k

Four Generations of Experience

Dielectric constant High Low

CS80/80A 6-Cu layers ILD FSG

ILD: Inter-layer Dielectric

Fujitsus Low-k Leads ITRS

130nm 130nm 100 90nm 90nm 65nm 65nm 45nm 45nm

1.0 32nm 32nm 2015 CS300 Full - NCS

0 2000 CS90 SiLK TM/SiO

2005 CS100 Full- SiOC

2010 CS200 NCS/ SiOC

Low-k Advantages of 65nm

Ultra low-k impacts on speed and power dissipation

11-Layer Copper Interconnects

The Fujitsu Ecosystem

3rd Party Test Houses

Fujitsu Technology Access

Design Flow & Methodology

Fujitsu Design Services

Fujitsu Worldwide Design Centers

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