Professional Documents
Culture Documents
1) 2) 3) 4)
Disadvantage
Directionality
E. Chen (4-12-2004)
Liftoff
Lithography
Mask Film
Mask
Lithography
Substrate
Substrate
Etching
Deposit Film
Mask
Substrate
Substrate
Film
Film
Substrate
Substrate
E. Chen (4-12-2004)
RL = 1
Mask
RL =
0 < RL < 1
Mask
Bias: the difference in lateral dimensions between the feature on mask and the actually etched pattern smaller RL results in smaller bias
Applied Physics 298r 3
RL = 0
E. Chen (4-12-2004)
Bias
Film
Film
Mask
W (% ) = 2 (cot + Rm ) hf S fm
Substrate
RmL =
rmH rmV
rfV rmV
W/2 (Bias)
Mask
hf
Film
S fm =
2)
Substrate
If film horizontal etch rate (rfh) > mask horizontal etch rate (rmh):
W/2 (Bias)
Mask
Film
W (% ) = 2 Rm hf
Applied Physics 298r 5
Substrate
E. Chen (4-12-2004)
Selectivity
Selectivity
Rm = 100%
80 60 40 20 0
= 90 = 60 = 30
60 40 20 0 0 2 4 6
Rm = 100% 0 2 4 6 8 10
10
W/h (% )
W/h (% )
(100)
(100) Si Wafer
E. Chen (4-12-2004)
54.7 (111)
(100)
54.7 (111)
(100)
E. Chen (4-12-2004)
Etching on (110) Si
{100}
<100> <100>
<110>
<111>
(Undercut!)
E. Chen (4-12-2004)
<100>
{110}
<100>
{111}Ga {100}
(100)
Zincblende
) 00 (1
M k as
Mask
E. Chen (4-12-2004)
Si (a-Si)
Resist
> 50:1
SiO2
> 50:1
SI3N4
> 50:1
GaAs
Resist
> 50:1
Au Al
Resist Resist
11
E. Chen (4-12-2004)
Dry Etching
+
Problems with wet etching: Isotropic unable to achieve pattern size smaller than film thickness Main Purpose of Developing Dry Etching is to Achieve Anisotropic Etching Type of Dry Etching Technology Physical Sputtering - Physical bombardment Ion Mill Plasma sputtering Plasma Etching - Plasma-assisted chemical reaction Reactive Ion Etching (RIE) - Chemical reaction + ion bombardment
Applied Physics 298r 12
E. Chen (4-12-2004)
Low
Low
Very Good
Medium
Medium
Good
High
High
Poor
13
E. Chen (4-12-2004)
eAr
eAr+ t
Shaw Heads
Substrate
RF
14
E. Chen (4-12-2004)
Si (a-Si)
SiO2 SI3N4
~ 200 ~ 100
GaAs
~ 200
15
E. Chen (4-12-2004)
16
E. Chen (4-12-2004)
17
E. Chen (4-12-2004)
18
E. Chen (4-12-2004)