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High Purity Chemical Valve

Integral Fittings Series LVC


b N.C./N.O. with same configuration/Double acting b Compatible with 100C

VC VDW VQ VX2 VX

fluid temperature

w Ne w Ne

l:: atteriia l a er a ody m ody m B B

FA New P
3 port added

VX3 VXA VN LVC LVA LVH LVD LVQ LQ LVN


TI/ TIL

Series LVC

Threaded Ports Series LVA


b Diaphragm material PTFE, EPR, NBR are

selectable

w Ne w Ne

all:: a eri a matter i Body m Body

Series LVA

PFA / el / New te inless s Sta PS P


3 port added

PA PAX PB

Manual Operation Series LVH


b Locking and non-locking types available b Integral fitting type/Threaded type

all:: a eri a matter i Body m Body

Series LVH

PFA / el / New te inless s Sta PS P


17-5-3

Stable Sealing Surface


Guide ring A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation with a stable work surface.

Low particle generation


Piston bumper

Prevents Micro-Bubbles Diaphragm (PTFE)


Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles.

A bumper absorbs piston momentum to minimize impact-induced particles.

Back-pressure resistance and long life Buffer


The diaphragm is supported by a buffer that minimizes deformation, which gives it long life and resistance to backpressure.

Minimal dead space


In addition to a body designed for smooth flow with minimal internal dead space, integral fittings eliminate the possibility of residual liquid in pipe threads.

Outstanding corrosion resistance Body (New PFA)


Compatible with chemicals such as acids, bases and ultra DI water.

PAT.

Different tubing sizes can be selected Hyper fitting

No leak design (quadruple seal) Nut lock mechanism (sealing) High flexural strength (tubing supports)

Main applications and fields

LVC
IC manufacturing Chemicals lines Medical Analytical equipment Instruments PharmaCleaning ceutical manu- equipment facturing

LVA
Medical Analytical Instruments IC manufacturing Chemicals Food processing Cleaning equipment

LVH
For shut off For air bleeding

17-5-4

High Purity Chemical Valve

Series

LV

Air Operated Integral Fitting Type Series LVC


Model LVC2 Orifice diam eter 4 Tubing O.D. Metric 4, 6 Inch 1/8, 3/16, 1/4 Valv e typ Symbol e
PA B A B PB AB

P. 17-5-7
LVC3
8 6, 8, 10 1/4, 3/8

LVC4
10 10, 12 3/8, 1/2

LVC5
16 12, 19 1/2, 3/4

LVC6
22 19, 25 3/4, 1

Type Basic type

N.C.
PA A PB

N.O.

N.C. N.O. Double

Double acting acting N.C. Double acting N.C. Double acting N.C. Double acting N.C.

VC VDW VQ VX2 VX VX3 VXA

With flow rate adjustment With bypass With flow rate adjustment & by-pass With indicator

PA B A B

PA A PB PA A PB PA A PB

N.C. Double acting


PA B A B

N.C. Double acting


PA B A B

N.C. Double acting


PA B A

N.C.

Suck back Manifold (5 stations max.)

P B A B

P P A

Single type Unit

VN LVC LVA

Single type

Unit

3 port

PA R A P

LVH
N.C.

N.C.

LVD LVQ

Air Operated Threaded Type Series LVA


Model LVA1 Orifice diam eter 2 Bod Note y ma 1) Sta Port size inless teria 1/8 1/4 steel (S l US316 ) PPS Valv e typ PFA Symbol e
PA B AB PB AB PA A PB

P. 17-5-17
LVA2 4
1/8 1/4

LQ
Note1) Refer to the page 17-5-17 for the applicable optional body materials.

LVA3 8
1/4 3/8

LVA4 12
3/8 1/2

LVA5 20
1/2 3/4

LVA6 22
1

LVN
TI/ TIL

Type Basic type

PA PAX PB

N.C. N.C.

N.C. N.O. Double

acting N.O.

With flow rate adjustment With bypass With flow rate adjustment & by-pass With indicator Manifold (5 stations max.)

PA B A B

PA A PB PA A PB PA A PB

N.C. Double acting


PA B A B

Double acting Double acting N.C. Double acting N.C. Double acting N.C.

N.C. Double acting


PA B A B

N.C. Double acting


PA B A

N.C.

3 port
A

PA R P

Note 2)

N.C.

Note2) Only PFA is applicable as a body material.

N.C.

17-5-5

Series

LV
P. 17-5-27
LVH30 8 6, 8, 10 1/4, 3/8 LVH40 10 10, 12 3/8, 1/2

Manually Operated Series LVH


Integral Fitting Type
Model Orifice diam eter Tubing O.D. Metric Inch Valv e typ Symbol
e

Type Basic type

LVH20 4 4, 6 1/8, 3/16, 1/4

N.C.

Non-locking Locking

Manifold (5 stations max.)

Threaded Type
Model LVH20 LVH30 LVH40 Orifice diam eter 4 8 12 Material SUS316 PPS PFA SUS316 PPS PFA SUS316 PPS PFA Port s Valv ize 1/8 1/4 1/4 1/4 1/4 3/8 3/8 3/8 3/8 1/2 1/2 1/2 e typ Symbol e
B A B A

Type Basic type

N.C.

Non-locking Locking

Manifold (5 stations max.)

Special Tools

P. 17-5-35

17-5-6

Integral Fitting Type (Hyper Fittings)

Series LVC
How to Order Valves (Single Type)
VC VDW
Option Body class
Symbol Body class 2 2 3 3 4 4 5 5 6 6 Orifice dia. 4 8 10 16 22 Nil 1 2 3 4 None With flow rate adjustment With by-pass With flow rate adjustment & by-pass With indicator
Note) Refer to Variations in the table below for option combinations. Options can not be combined each other.

LVC 2 0
Valve type
0 1 2 N.C. N.O. Double acting

S 06

VQ VX2 VX VX3 VXA VN LVC LVA LVH LVD

Note) Refer to variations in the table below for valve type combinations.

Material
Symbol Body Nil

Applicable tubing size


Symbol Connecting tubing O.D. Body class 2 3 4 5 6

Actuator section DiaApplicable option phragm 1 2 3 4 End plate PPS PTFE PFA PFA PFA PVDF PPS PTFE PTFE

Note Hydrofluoric acid compatible (Only LVC40, 50 type) Ammonium hydroxide compatible

Port B (OUT) different dia. size


Symbol Nil Refer to the applicable tubing table to the left. Application Ports A & B same size Different diameter tubings can be selected within the same body class.

F N

Metric sizes 04 4 06 6 08 8 10 10 12 12 19 19 25 25 Inch sizes 03 1/8 05 3/16 07 1/4 11 3/8 13 1/2 19 3/4 25 1 Basic size With reducer

Pilot port thread type


Symbol Nil N Body class 2 3, 4, 5, 6 3, 4, 5, 6 Thread type M5 Rc 1/8 NPT 1/8

Variations

Model Orifice d iameter Tubin g O. D. Metric Type Basic type


PA B AB PB AB PA

LVC20
4 4, 6 1/8, 3/16, 1/4

LVC30
8 6, 8, 10 1/4, 3/8

LVC40
10 10, 12 3/8, 1/2

LVC50
16 12, 19 1/2, 3/4

LVC60
22 19, 25 3/4, 1

LVQ LQ LVN
TI/ TIL

Symbol

Va

lve

typ

Inch

N.C.

A PB N.C. N.O. Double acting Double

N.O.

PA PAX PB

acting

With flow rate adjustment

PA B A B

PA

N.C. Double acting N.C. Double acting N.C. Double acting

A PB N.C. Double acting PA PA

With by-pass
B

A PB N.C. Double acting PA PA

A B

With flow rate adjustment & by-pass With indicator

A PB Double N.C. acting PA B A

A B

N.C.

N.C.

17-5-7

Series

LVC
Standard Specifications
Model Metric size Tubing O.D. Orifice diameter Flow characteristics Av x 10-6m2 Cv Inch size LVC20 6 1/4 4 8.4 0.35 LVC30 10 3/8 8 40.8 1.7 LVC40 12 1/2 10 60 2.5 1 0 to 0.5 0.3 or less 0.4 or less 0 (with water pressure) 0.3 to 0.5 M5 Rc 1/8, NPT 1/8 0 to 100 0 to 60 0.09 0.23 0.42 0.86 1.00 0 to 0.4 0.2 or less 0.3 or less LVC50 19 3/4 16 144 6 LVC60 25 1 22 192 8

Withstand pressure (MPa) Operating pressure (MPa) Back pressure N.C./N.O. (MPa) Double acting Valve leakage (cm3/min) Pilot air pressure (MPa) Pilot port size Fluid temperature (C) Ambient temperature (C) Weight (kg)

Note 1) Contact SMC if the valve is to be used with vacuum and B A flow.

Different Diameter Tubing Applicable with Reducer


Different diameter tubing can be selected (within a body class) by using a nut and insert bushing (reducer). With reducer
Tubing O.D. Body class 4 6 Metric sizes 8 10 12 19 25 Inch sizes 1/8 3/16 1/4 3/8 1/2 3/4 1

2 3 4 5 6
Note) Refer to page 29 for information on changing tubing sizes.

Specific Product Precautions


Be sure to read before handling. Refer to page 17-6-3 for Safety Instructions and 17-5-41 to 17-5-42 for High Purity Chemical Valve Precautions.

Piping

Caution
1. Connect tubing with special tools.
Refer to pages 17-5-35 through 17-5-37 regarding tubing connection and special tools.

2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below.
Tightening torque for piping
Body class Torque (Nm) 0.3 to 0.4 0.8 to 1.0 1.0 to 1.2 2.5 to 3.0 5.5 to 6.0

2 3 4 5 6

17-5-8

Integral Fitting Type

Series

LVC

Suck Back
A change of volume inside the suck back valve pulls in liquid at the end of the nozzle to prevent dripping.

Standard Specifications
Model
Note 1)

Single type

Adjustment knob
Adjusts the amount of suck back.

LVC23 Metric sizes Inch sizes Av x 10 Cv


-6

LVC23U (4), 6

Tubing O.D. Orifice diameter Flow characteristics

Lock nut Symbol


P

(1/8), (3/16), 1/4 3 4.8 0.2 1 0 to 0.2 0.1 0.3 to 0.5 M5 0 to 100 0 to 60 0.08 0.16

Locks the adjustment knob position.

VC VDW VQ VX2 VX VX3 VXA VN LVC LVA

m2

Withstand pressure (MPa) Operating pressure (MPa) Maximum suck back volume (cm3) Pilot air pressure (MPa)

Unit type
Adjustment knob
Adjusts the amount of suck back.

Pilot port size Fluid temperature (C) Adjustment knob


Adjusts the flow rate.

Ambient temperature (C) Weight (kg)

Lock nut
Locks the adjustment knob position.

Lock nut
Locks the adjustment knob position.

Note 1) Different diameter tubing shown in ( ) can be selected when used with a reducer. Refer to page 17-5-35 for details.

How to Order

LVC 2 3
Symbol
P P

S 06
Port B (OUT) different dia. size
Symbol Nil Refer to the applicable tubing in the table below. Application Ports A & B same size Different diameter tubing can be selected within the same body class.

LVH LVD LVQ LQ LVN


TI/ TIL

Body class
A

Suck back body

Symbol Body class 2 2

Valve type
3 Suck back valve

Applicable tubing size Body type


Nil Single type U Unit type with 2 way valve Symbol Connecting tubing O.D. 4 6 1/8 3/16 1/4 With reducer Body class 2

Metric sizes 04 06 Inch sizes 03 05 07

PA PAX PB

Options
With flow rate adjustment
The flow rate is adjusted by controlling the diaphragm stroke.
Adjustment knob
Adjusts the flow rate.

Basic size

With by-pass
A small amount of fluid from the inlet side is allowed to flow continuously to the outlet side by providing a by-pass inside the body.

Lock nut
Locks the adjustment knob position.

Adjustment handle
Adjusts the flow rate.

Lock nut
Locks the adjustment knob position.

17-5-9

Series

LVC

Construction
Standard type N.C. type N.O. type Double acting type

PB

PB PA

PB PA

PA

With reducer

With flow rate adjustment

With by-pass

PB PA

Suck back (single type)

Suck back (unit type)

P P

With indicator Parts list


No. 1 2 3 4 5 6 7 8 9 Body Diaphragm End plate Insert bushing Nut Collar Flow rate adjuster section Indicator Description Actuator section Material PPS PFA PTFE PPS PFA PFA PFA PPS PP Option PVDF PVDF B A

17-5-10

Integral Fitting Type Dimensions


Basic type

Series

LVC

VC VDW VQ
4-M

VX2 VX VX3

Sensor (Breathing port) R

2-Q

VXA VN
H

PB

LVC LVA

PA

SMC

LVH LVD LVQ LQ LVN


TI/ TIL

B (F)

Dimensions
Model

PA
(mm)

A
30 36 46 58 58

B
30 47 60 75 75

C
54.5 79 96 129 138

D
44 56 68 84 84

E
11 16.5 22 26 32

F
79 106 131 154 165

G
28.5 43 55 68 77

H
13 17.5 18 27.5 27.5

J
4 7.5 8 8 8

K
20 34 42 56 56

L
37 46 57 71 71

M
3.5 5.5 5.5 6.5 6.5

N
23.5 39 48 62 71

Q
M5 x 0.8

R
M3 x 0.5

PAX PB

LVC2 LVC3 LVC4 LVC5 LVC6

Rc 1/8 NPT 1/8

Rc 1/8 NPT 1/8

17-5-11

Series

LVC
With by-pass

Dimensions
With flow rate adjustment
(Max. S)

PB

PA
PB

SMC

PA

A
SMC

SMC

Dimensions (mm)
Model

(Max. T)

S
11.5 24 29 34.5 36

LVC2 LVC3 LVC4 LVC5 LVC6

Dimensions (mm)
Model

T
49.5 54.5 60.5

LVC3 LVC4 LVC5

With flow rate adjustment & by-pass


(Max. S)

With indicator

PB

PA

SMC

W
(Max. T)

Dimensions
Model (mm)

(mm)

W
64 90 110.5 147 156

Dimensions
Model

S
24 29 34.5

T
49.5 54.5 60.5

LVC3 LVC4 LVC5

LVC20 LVC30 LVC40 LVC50 LVC60

Suck back (Single type)

Suck back (Unit type)


50 4.5 3.5 (Max. 11.5) 30 44

37

(Max. 11.5)

4-3.5

20

30 44

M5 x 0.8 M5 x 0.8

37

M5 x 0.8

51

51

45

30

SMC

SMC

SMC

30 (78)

12.5

61 (110)

17-5-12

12.5

45

Series LVC

Manifolds
Manifold Specifications
Model Manifold type P (IN), A (OUT) type Valve stations Tubing size (port P) Tubing size (port A) 3/8 1/4 LLC2A LLC3A LLC4A LLC5A Stacking type Common IN/Individual OUT 2 to 5 stations 1/2 3/8 3/4 1/2 3/4 3/4

VC VDW VQ VX2

Note 1) Contact SMC if the manifold will be used with vacuum and A P flow.

How to Order Manifold Base

VX VX3 VXA
Tubing size for P port and R side connection
Symbol Tubing size 00 Plug 06 6 07 1/4" 08 8 10 10 11 3/8" 10 10 11 3/8" 12 12 13 1/2" 12 12 13 1/2" 19 19, 3/4" 12 12 13 1/2" 19 19, 3/4" Body class 2 to 5

LLC 2 A
Body class
Symbol Body class 2 2 3 3 4 4 5 5

02

S 11
Tubing size for P port and L side connection
Symbol Tubing size 00 Plug 06 6 07 1/4" 08 8 10 10 11 3/8" 10 10 11 3/8" 12 12 13 1/2" 12 12 13 1/2" 19 19, 3/4" 12 12 13 1/2" 19 19, 3/4" Body class 2 to 5

VN LVC LVA LVH

Base type
A Stacking type

Manifold stations
02

2 stations

LVD LVQ

05

5 stations

LQ
5

LVN
TI/ TIL

How to Order Valve

PA

LVC 2 0 A
Body class
Symbol Body class Orifice dia. 2 2 4 3 3 8 4 4 10 5 5 16

S07
Option
Body class Nil 1 4 None With flow rate adjustment With indicator
Note) Options can not be combined each other.

PAX PB

Valve type
0 1 2 N.C. N.O. Double acting

Tubing size
Symbol Tubing size S03 1/8" S04 4 S05 3/16" S06 6 S07 1/4" S06 6 S07 1/4" S08 8 S10 10 S11 3/8" S10 10 S11 3/8" S12 12 S13 1/2" S12 12 S13 1/2" S19 19, 3/4"

Material
Symbol Body Nil 3 F PFA PVDF PTFE Actuator section Dia- Applicable option End plate phragm 1 4 PTFE PPS PFA Note Hydrofluoric acid compatible (Only LVC40, 50 type) Ammonium hydroxide compatible

Body type
A Stacking type for manifold

N 4

PFA

PPS

PTFE

Pilot port thread type


Symbol 5 Nil N Body class 2 3/4/5 3/4/5 Thread type M5 Rc 1/8 NP T1/8

17-5-13

Series

LVC
Manifold variations
Model LVC20A LVC30A LVC40A LVC50A materia l PFA Tu Orif bing size 1/4 3/8 1/2 3/4 ice Va diam lve eter typ Symbol 4 8 10 16 e

How to Order Manifold Assembly (Example)


Enter the part number of the valves to be mounted together with the manifold base part number. s tion Sta ... 2 1

Manifold

Type Basic type

P PA

P PB

P PA

N.C.

Stations are counted from station 1 on the left side, with the A (OUT) ports in front.
A (OUT) port

A PA

A PB

PB PA

N.O.

PB

N.C.

<Example> LLC2A-03-S11

N.O. Double Double acting acting


P PA P PA

1set

1 set Manifold base part no.

LVC20A-S07-1 2 sets 2 sets Valve part no. (stations 1 & 2) LVC20A-S07 1 set 1 set Valve part no. (station 3) Add the symbol at the beginning of part numbers for valves, etc. to be mounted.
Enter together in order counting from station 1 on the left side, with the A (OUT) ports in front.

With flow rate adjustment


A

N.C.
A PA PB PA

PB

N.C.

Double acting

Double acting

Dimensions
LLC AStations

-C

4-Mounting hole for W

A K

2-Q

(Max. S)

L1 L2 L3

Breathing port: R

SMC
SMC SMC SMC

Pitch = B n-A port

Dimensions
Station

N
3/8

Dimensions
Model

A
47 60 75

B
36.5 47 59

C
67.5 93.5 111.5 131

D
67 76 95 114

E
19 27.5 33.5 33.5

G
41.5 57.5 70.5 70

H
13 17.5 18 27.5

LLC2A LLC3A LLC4A LLC5A

46.5 31

17-5-14

1/4

1/4

1/4

(mm)

Model

Symbol

2
62

3
93

LLC2A

LLC3A
(mm)

K
18 39 50 62

N
36.5 53.5 63.5 64

Q
M5 x 0.8 Rc 1/8 NPT 1/8

R
M3 x 0.5 Rc 1/8 NPT 1/8

S
11.5 24 29 34.5

U
19 27.5 33.5 27.5

V
34 47 56 56.5

LLC4A

M4 5.5 M5 6.5 M6 7.5 M6 7.5

LLC5A

L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3

124 155 137 168 208 239

75 106 146 177

73 109.5 146 182.5 84 120.5 157 193.5 183 219.5 256 292.5 94 141 109 156 219 266 118 177 130 189 240 299 188 235 203 250 313 360 236 295 248 307 358 417

Series LVC

3 Port
Standard Specifications
Model Orifice diameter Flow characteristics Av x 10 Cv
-6

LVC200 4 m2 7.2 0.3 1 0 to 0.5 0 (with water pressure) 0.4 to 0.5 M5 x 0.8 0 to 100 0 to 60 0.120

VC VDW VQ VX2 VX VX3 VXA VN

Withstand pressure (MPa) Operating pressure (MPa) Valve leakage (cm3/min) Pilot air pressure (MPa) Pilot port size Fluid temperature (C) Ambient temperature (C) Weight (kg)

How to Order Valve

LVC LVA LVH

LVC 2 0 0
PA A R P
N.C.
Valve type
0 N.C

S 07
Applicable tubing size
Symbol Metric sizes 04 06 Inch sizes 03 05 07 Connecting tubing O.D. 4 6 1/8 3/16 1/4 Basic size With reducer Body class 2

Body class
Symbol Body class 2 2 Orifice dia. 4

LVD LVQ LQ LVN


TI/ TIL

PA
Construction

PAX PB

Parts list
No. 1 2 3 4 5 6 Body Diaphragm End plate Nut Insert bushing Description Actuator section Material PPS PFA PTFE PPS PFA PFA

17-5-15

Series

LVC

Dimensions

30

A
30

M5 x 0.8 Pilot port


PB

39.5

54.5

13

M3 x 0.5 Breathing port

PA

SMC

66.5

SMC

40.5

SMC

22.5

11.5

79

4-3.5

20

36.5 43

17-5-16

30

35.5

Threaded Type

Series LVA
How to Order Valves (Single Type)

LVA 2 0
Body class
Symbol 1 2 3 4 5 6 Body class 1 2 3 4 5 6 Orifice dia 2 4 8 12 20 22

02

A
Option
Nil 1 2 3 4 None With flow rate adjustment With by-pass With flow rate adjustment & by-pass With indicator
Note) Refer to Variations in the table below for option combinations. Options can not be combined each other.

VC VDW VQ VX2 VX VX3 VXA


Note Except LVA60 Except LVA10 Except LVA60 Except LVA60
Hydrofluoric acid compatible (Only LVA40, 50 type)

Valve type
0 1 2 N.C. N.O. Double acting
Note) Refer to Variations in the table below for valve type combinations.

Material Port size


Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class 1 2 3 4 5 6 A B C D E F G H N Symbol Body Actuator section Dia- Applicable option End plate phragm 1 2 3 4 PPS Stainless PTFE steel PPS PFA
Stainless steel Stainless steel

VN LVC LVA LVH LVD LVQ LQ LVN


TI/ TIL

PPS PPS PPS PPS PVDF PPS PPS PPS

PTFE PTFE NBR EPR PTFE NBR EPR PTFE

PFA PPS PPS PFA

Thread type
Symbol Nil N Thread type Rc NPT

Except LVA60 Except LVA60


Ammonium hydroxide compatible Except LVA10

Variations
Body materi al Note 1)

Model Orifice diame ter Port size Stainle ss


steel (S US316 )

LVA10 2 1/8 1/4

LVA20 4 1/8 1/4

LVA30 8 1/4 3/8

LVA40 12 3/8 1/2

LVA50 20 1/2 3/4

LVA60 22 1

Note) Refer to the Material table for the applicable optional body materials.

PA PAX PB

Type

Symbol

Valv

PPS
e ty pe

PFA

Basic type
PA B AB N.C. PB AB PA A PB

N.C. N.O. Double acting N.C. Double acting N.C. Double acting N.C. Double acting

N.O. Double

acting

With flow rate adjustment

PA B A N.C. B

PA A PB

Double acting
PA B A PB

With by-pass
B

PA A N.C.

Double acting
PA B A PB

With flow rate adjustment & by-pass

PA B A

N.C. Double acting

With indicator
B

PA A N.C.

N.C.

17-5-17

Series

LVA
Standard Specifications
Model Orifice diameter Port size Av x 10 Flow characteristics Cv
-6

LVA10 2 1/8, 1/4 m2 1.7 0.07

LVA20 4 1/8, 1/4 8.4 0.35

LVA30 8 1/4, 3/8 40.8 1.7 1

LVA40 12 3/8, 1/2 79.2 3.3

LVA50 20 1/2, 3/4 144 6

LVA60 22 1 192 8

Withstand pressure (MPa) Operating pressure (MPa) Back pressure N.C./N.O. 0.15 or less (MPa) Double acting 0.3 or less Valve leakage (cm3/min)
Note 2)

0 to 0.5 0.3 or less 0.4 or less 0 (with water pressure) 0.3 to 0.5 M5

0 to 0.4 0.2 or less 0.3 or less

Basic type

Pilot air pressure (MPa) Pilot port size Fluid temperature (C) Ambient temperature (C) Stainless steel (SUS) Weight (kg) PPS PFA 0.12 0.05 0.18 0.08 0.09

Rc 1/8, NPT 1/8 0 to 100 Note 1) 0 to 60 0.44 0.18 0.20 0.86 0.32 0.35 1.67 0.73 0.78 1.96 0.90

Note 1) 0 to 60C when the diaphragm is NBR or EPR. Note 2) The N.O. type is not available for LVA10. Note 3) Contact SMC if the valve will be used with vacuum and B A flow.

Specific Product Precautions


With flow rate adjustment Be sure to read before handling. Refer to page 17-6-3 for Safety Instructions and 17-5-41 to 17-5-42 for High Purity Chemical Valve Precautions.

Piping

Caution
1. Avoid using metal fittings with a resin body (taper threads).
This can cause damage to the valve body.

Options
With flow rate adjustment
Adjusts the flow rate by controlling the diaphragm stroke.
Adjustment knob
Adjusts the flow rate.

Lock nut
Locks the adjustment knob position.

17-5-18

Threaded Type Construction


Standard type N.C. type N.O. type

Series

LVA

Double acting type

PB

Y packing

PB

Y packing

PB

PA

PA

PA

VC VDW

VQ VX2 VX VX3

With flow rate adjustment

With indicator

VXA VN LVC LVA


PB

LVH LVD

PA

LVQ LQ

LVN
TI/ TIL

Parts list
No. 1 2 Description Actuator section Body Material PPS Stainless steel PPS PFA PTFE 3 4 5 6 Diaphragm End plate (PFA body only) Flow rate adjuster section Indicator NBR EPR PPS PPS PP PVDF Option PVDF

PA PAX PB

17-5-19

Series

LVA

Dimensions
Body material: Stainless steel Basic type
A

2-Q Sensor (Breathing port) R


PB

PA

B
2-P

G L L C
B
B A

H
A

LVA10

2-F

LVA20
(Max. S)

LVA60

With flow rate adjustment

With indicator

Dimensions
Model

(mm)

Dimensions
Model

S
11.5 24 29 34.5 36
B A

LVA2 LVA3 LVA4 LVA5 LVA6

LVA20 LVA30 LVA40 LVA50 LVA60


(mm)

110 140.5 148

Dimensions
Model

A
20 30 36 46 58 58

B
33 33 47 60 75 85

C
49.5 57 78.5 95.5 122.5 130

E
10 10 13 16 19 24

F
M5 x 0.8 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M8 x 1.25

G
27.5 31 42.5 54.5 61.5 69

H
11 13 17.5 18 27.5 27.5

K
22 37 47.5 60 60

L
13 22 26 33.5 43 43

N
27.5

P
Rc 1/8, 1/4 NPT 1/8, 1/4

R
4.2

LVA1 LVA2 LVA3 LVA4 LVA5 LVA6

M5 x 0.8 M3 x 0.5

26 38.5 47.5 55.5 63 Rc 1/4, 3/8 NPT 1/4, 3/8 Rc 3/8, 1/2 NPT 3/8, 1/2 Rc 1/2, 3/4 NPT 1/2, 3/4 Rc 1 NPT 1

Rc 1/8 NPT 1/8

Rc 1/8 NPT 1/8

17-5-20

C
(mm)

W
66.5 89.5

Threaded Type Dimensions


Body material: PPS Basic type

Series

LVA

VC VDW

4-M

VQ
K

VX2
2-Q Sensor (Breathing port) R
PB

VX VX3 VXA
H

PA

VN LVC
G

B
SMC

LVA LVH LVD

2-P

LVA10

With flow rate adjustment


(Max. S)

With indicator

LVQ LQ LVN
TI/ TIL

49.5

PA
W

Dimensions
Model

(mm)

Dimensions
2-2 Depth 4 L Model

(mm)

W
67 88.5 110.5 147

PAX PB

S
11.5 24 29 34.5 B
SMC

B
SMC

LVA2 LVA3 LVA4 LVA5

LVA20 LVA30 LVA40 LVA50 LVA60

Dimensions
Model

(mm)

A
20 30 36 46 58

B
33 36 47 60 75

C
49.5 57.5 77.5 96 129

D
44 56 68 84

E
10 11 15 22 26

G
27.5 31.5 41.5 55 68

H
11 13 17.5 18 27.5

J
4 7.5 8 8

K
4 20 34 42 56

L
11 37 46 57 71

M
3.5 5.5 5.5 6.5

N
27.5 26.5 37.5 48 62

P
Rc 1/8, 1/4 NPT 1/8, 1/4

R
4.2

LVA1 LVA2 LVA3 LVA4 LVA5

M5 x 0.8 Rc 1/4 NPT 1/4 Rc 3/8 NPT 3/8 Rc 1/2 NPT 1/2 Rc 3/4 NPT 3/4 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 M3 x 0.5

17-5-21

Series

LVA

Dimensions
Body material: PFA Basic type

A
4-M

2-R Sensor (Breathing port) U


PB

PA

B
SMC

2-P

B Q (LVA6 )

(Max. S)

With flow rate adjustment

With indicator

Dimensions
Model

(mm)

Dimensions
Model

G
(mm)

H S
11.5 24 29 34.5 36
SMC

W
70.5 92.5 110.5 147 156

B
SMC

LVA2 LVA3 LVA4 LVA5 LVA6

LVA20 LVA30 LVA40 LVA50 LVA60


(mm)

Dimensions
Model

A
30 36 46 58 58

B
36 47 60 75 75

C
61 81.5 96 129 138

D
44 56 68 84 84

E
14.5 19 22 26 32

G
35 45.5 55 68 77

H
13 17.5 18 27.5 27.5

J
4 7.5 8 8 8

K
20 34 42 56 56

L
37 46 57 71 71

M
3.5 5.5 5.5 6.5 6.5

N
30 41.5 48 62 71

P
Rc 1/4 NPT 1/4 Rc 3/8 NPT 3/8 Rc 1/2 NPT 1/2 Rc 3/4 NPT 3/4 Rc 1 NPT 1

Q
117

R
M5 x 0.8

U
M3 x 0.5

LVA2 LVA3 LVA4 LVA5 LVA6

Rc 1/8 NPT 1/8

Rc 1/8 NPT 1/8

17-5-22

Series LVA

Manifolds
Manifold Specifications
Model Manifold type P (IN), A (OUT) type Valve stations Port size (port P) Port size (port A) 1/4 1/4 LLA2A LLA3A LLA4A LLA5A Stacking type Common IN/Individual OUT 2 to 5 stations 3/8 3/8 1/2 1/2 3/4 3/4

VC VDW VQ VX2

Note 1) Contact SMC if the manifold will be used with vacuum and A P flow.

How to Order Manifold Base

VX VX3 VXA
Material
Symbol C Manifold PFA

LLA 2 A
Body class
Symbol Body class 2 2 3 3 4 4 5 5

05

02

C
Thread type
Symbol Thread type Nil Rc N NPT

VN LVC LVA LVH LVD LVQ LQ

Base type
A Stacking type

Port size (port P)


Symbol 02 03 04 06 Port size 1/4 3/8 1/2 3/4 Body class 2 3 4 5

Manifold stations
02

2 stations 5 stations

05

How to Order Valve

LVN
TI/ TIL

LVA 2 0 A
Body class
Symbol Body class Orifice dia. 2 2 4 3 3 8 4 4 12 5 5 20

02

C
Option
Nil 1 4 None With flow rate adjustment With indicator
Note) Options can not be combined each other.

PA PAX PB

Valve type
0 1 2 N.C. N.O. Double acting

Material Body type


A Stacking type for manifold Symbol Body C
Applicable option Actuator section Diaphragm End plate 1 4 PPS PTFE PFA

Note
Hydrofluoric acid compatible (Only LVA40, 50 type) Ammonium hydroxide compatible

Port size (port A)


Symbol 02 03 04 06 Port size 1/4 3/8 1/2 3/4 Body class 2 3 4 5

F N

PFA PFA

PVDF PPS

PTFE PTFE

Thread type
Symbol Thread type Nil Rc N NPT

17-5-23

Series

LVA
Manifold variations
Model LVA20A LVA30A LVA40A LVA50A materia PFA l Orif Port size 3/8 1/2 3/4 1/4 ice Valv diame ter e ty Symbol 8 12 20 4 pe

How to Order Manifold Assembly (Example)


Enter the part number of the valves to be mounted together with the manifold base part number. s tion Sta ... 2 1

Manifold

Type Basic type

P PB

P PA

N.C.

A (OUT) port

Stations are counted from station 1 on the left side, with the A (OUT) ports in front.

PA

<Example> LLA2A-03-02-C LVA20A-02-C1 LVA20A-02-C

Add the symbol at the beginning of part numbers for valves, etc. to be mounted.
Enter together in order counting from station 1 on the left side, with the A (OUT) ports in front.

Dimensions
LLA AStations

N P

(Max. S)

Dimensions
Model

A PA

A PB

PB PA

N.O.

PB

N.C.

N.O. Double Double acting acting


P PA P PA

1 set 2 sets 1 set

1 set Manifold base part no. 2 sets Valve part no. (stations 1 & 2) 1 set Valve part no. (station 3) With flow rate adjustment
A PA

N.C.

PB PA

PB

N.C. Double acting

Double acting

-C
Y 4-Mounting hole for W

Dimensions
Model

(mm)

S
11.5 24 29 34.5

L1 L2 L3 Sensor (Breathing port) U 2-R

LLA2A LLA3A LLA4A LLA5A

(mm)
Station

Model

Symbol

2
62

A (OUT) port n-Q P (IN) port 2-Q

Pitch = B

LLA2A

LLA3A

LLA4A

LLA5A

L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3

93 124 155

75 106 137 168 118 149 180 211 74 111 148 185 90 127 164 201 118 155 192 229 94 141 188 235 112 159 206 253 144 191 238 285 118 177 236 295 140 199 258 317 178 237 296 355

(mm)

A
50 47 60 75

B
31 37

C
68 88.5

E
20.5 25.5 29 32.5

G
41.5 52.5 62.5 74.5

H
13 17.5 18 27.5

K
18 39 50 61

M
4.5 5.5 6.5

N
34 42.5 48 61

P
35

U
M3 x 0.5 Rc 1/8 NPT 1/8

V
19 23.5 26 29

W
M4 M5 M6 M6

Y
5.5 6.5 7.5 7.5

LLA2A LLA3A LLA4A LLA5A

Rc 1/4, NPT 1/4 M5 x 0.8 Rc 1/8 NPT 1/8

51.5 Rc 3/8, NPT 3/8 62.5 Rc 1/2, NPT 1/2 68.5 Rc 3/4, NPT 3/4

47 103.5 59 135.5

17-5-24

Series LVA

3 Port
Standard Specifications
Model Orifice diameter Port size Flow characteristics Av x 10 Cv
-6

LVA200 4 1/4 m2 7.2 0.3 1 0 to 0.5 0 (with water pressure) 0.4 to 0.5 M5 x 0.8 0 to 100 0 to 60 0.162

VC VDW VQ VX2 VX VX3 VXA VN

Withstand pressure (MPa) Operating pressure (MPa) Valve leakage (cm3/min) Pilot air pressure (MPa) Pilot port size Fluid temperature (C) Ambient temperature (C) Weight (kg)

How to Order Valve

LVC

LVA 2 0 0
PA
Body class

02

C
Material
Symbol Body Actuator section Diaphragm

LVA LVH LVD LVQ LQ LVN


TI/ TIL

A N.C.

R P

Symbol Body class Orifice dia. 2 2 4

Thread type
Symbol Nil N Thread type Rc NPT

PFA

PPS

PTFE

Valve type
0 N.C

Port size
Symbol 02 Port size 1/4

PA
Construction

PAX PB

Parts list R P
No. 1 2 3 4 Body Diaphragm End plate Description Actuator section Material PPS PFA PTFE Stainless steel

17-5-25

Series

LVA

Dimensions

R
30

P
41

M5 x 0.8 Pilot port


PB

3-Rc1/4 (3-NPT1/4)

26 M3 x 0.5 Breathing port 13


PA

46

72

22.5

6.5

30

52.5

2-M5 x 0.8 Depth 6

17-5-26

20

41

Manually Operated

Series LVH
How to Order Valve (Single Type)
Applicable tubing size Body class
Symbol Body class 2 2 3 3 4 4 Orifice dia. 4 8 10

VC VDW VQ VX2 VX VX3 VXA VN LVC LVA LVH LVD LVQ LQ LVN
TI/ TIL

Port B (OUT) different dia. size


Symbol Nil Refer to the applicable tubing table to the right Application Ports A & B same size Different diameter tubings can be selected within the same body class.

Integral fitting type Threaded type

LVH 2 0 LVH 2 0
Body class
Orifice dia. 4 8 12

S 06 02

A
Material
Symbol

Connecting Body class Symbol tubing O.D. 2 3 4 Metric sizes 04 4 06 6 08 8 10 10 12 12 Inch sizes 03 1/8 05 3/16 07 1/4 11 3/8 13 1/2
Basic size With reducer

Symbol Body class 2 2 3 3 4 4

Valve type
0 N.C. A B C

Lever operation
Symbol Lever operation Nil Non-locking type (self-reset type) L Locking type

Actuator section Diaphragm End plate PP Stainless steel PTFE (SUS) PP PTFE PPS PPS PP PTFE PFA PPS Body

Port size
Symbol Port size 01 1/8 02 1/4 02 1/4 03 3/8 03 3/8 04 1/2 Body class 2 3 4

Pilot port thread type


Symbol Thread type Nil Rc N NPT

Integral fitting type/Variations


Model Tubin Type Basic type
B A B A N.C.

Orifice d
g O.
Va

LVH20
4 4, 6 1/8, 3/16, 1/4

LVH30
8 6, 8, 10 1/4, 3/8

LVH40
10 10, 12 3/8, 1/2

iameter
Inch

PA PAX PB

D. Metric
typ e

Symbol

lve

Non-locking Locking

Threaded type/Series variation


Orifice d
Model LVH20 LVH30 LVH40 iameter 4 8 12 Port size 1/8 1/4 1/4 1/4 1/4 3/8 3/8 3/8 3/8 1/2 1/2 1/2 Mat Stainless Stainless eria Stainless Val l steel PPS PFA steel PPS PFA steel PPS PFA ve typ e (SUS316) (SUS316) (SUS316)

Type Basic type

Symbol

A B

A N.C.

Non-locking Locking

17-5-27

Series

LVH
Standard Specifications/Integral Fitting Type
Model Metric size Tubing O.D. Inch size Av x 10-6m2 LVH20 6 1/4 4 8.4 0.35 LVH30 10 3/8 8 40.8 1.7 1 0 to 0.5 0.3 or less 0 (with water pressure) Toggle type (non-locking/locking) 0 to 60 0 to 60 0.06 0.14 0.26 LVH40 12 1/2 10 60 2.5

Orifice diameter Flow characteristics Cv

Withstand pressure (MPa) Operating pressure (MPa) Back pressure (MPa) Valve leakage (cm3/min) Action Fluid temperature (C) Ambient temperature (C) Weight (kg)

Note) Contact SMC if the valve is to be used with B A flow.

Specific Product Precautions


Be sure to read before handling. Refer to page 17-6-3 for Safety Instructions and 17-5-41 to 17-5-42 for High Purity Chemical Valve Precautions.

Different Diameter Tubing Applicable with Reducer


Different diameter tubing can be selected (within a body class) by using a nut and insert bushing (reducer).
With reducer

Tubing O.D. Body class 4 6 Metric sizes 8 10 12 1/8 Inch sizes 3/16 1/4 3/8 1/2

Piping

Caution
Integral fitting type
1. Connect tubing with special tools.
Refer to pages 17-5-35 through 17-5-37 regarding tubing connection and special tools.

2 3 4
Note) Refer to page 17-5-35 for information on changing tubing sizes.

2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below.
Tightening torque for piping
Body class 2 3 4 Torque (Nm) 0.3 to 0.4 0.8 to 1.0 1.0 to 1.2

Standard Specifications/Threaded Type


Model Port size Orifice diameter Av x 10 m2 Flow characteristics Cv Withstand pressure (MPa) Operating pressure (MPa) Back pressure (MPa) Valve leakage (cm3/min) Action Fluid temperature (C) Ambient temperature (C) Stainless steel (SUS) Weight (kg) PPS PFA
-6

LVH20 1/8, 1/4 4 8.4 0.35

LVH30 1/4, 3/8 8 40.8 1.7 1 0 to 0.5 0.3 or less 0 (with water pressure) Toggle type (non-locking/locking) 0 to 60 0 to 60

LVH40 3/8, 1/2 12 60 2.5

Threaded type
1. Avoid using metal fittings with a resin body (taper threads).
This can cause damage to the valve body.

0.15 0.04 0.05

0.36 0.09 0.11

0.71 0.17 0.20

17-5-28

Manually Operated Integral Fitting Type/Threaded Type Construction


Integral fitting type Threaded type

Series

LVH

VC
B A B A

Parts list
No. 1 Description Actuator section Material PP PFA Integral fitting type
Stainless steel

VDW
Note

VQ VX2
Threaded type

With reducer

Body

PPS PFA 3 4 5 6 7 8 Diaphragm End plate Insert bushing Nut Lever Collar PTFE PPS PFA PFA PP PFA

VX
PFA body only

VX3 VXA VN LVC

Dimensions/Integral Fitting Type


N

LVA LVH LVD LVQ


G A D L

LQ LVN
4-M

K
Non-locking type

TI/ TIL

Locking type

PA PAX
60

PB
(H1)
B A

B (F)

Dimensions
Model

(mm)

A
30 36 46

B
30 47 60

C
52 81.5 100

D
44 56 68

E
11 16.5 22.5

F
79 106 131

G
10 19 20.5

H1
72.5 111 139

H2
74 113 143

J
4 7.5 8

K
20 34 42

L
37 46 57

M
3.5 5.5 5.5

N
27 37.5 50

LVH20 LVH30 LVH40

(H2)

17-5-29

Series

LVH
N

Dimensions/Threaded Type
Body material: Stainless steel
G A

Body material: PPS

Locking type

Non-locking type
60

4-M

K
Non-locking type

(H1) (H2)

Locking type

2-P

B C
B A
SMC

2-F

2-P

Body material: PFA

4-M Locking type

K
Non-locking type

A
SMC

2-P

Dimensions
Body material Model

(H1) (H2)

A D

A
30 36 46 30 36 46 30 36 46

B
33 47 60 36 47 60 36 47 60

C
54.5 81 99 55 80 99.5 58.5 84 99.5

D
44 56 68 44 56 68

E
10 13 16 11 15 22 14.5 19 22

F
M5 x 0.8 M6 x 1 M8 x 1.25

G
10 19 10 19 10 19

H1
75

H2
76.5 142 77

J
4 7.5 8 4 7.5 8

K
22 37 47.5 20 34 42 20 34 42

L
22 26 33.5 37 46 57 37 46 57

M
3.5 5.5 5.5 3.5 5.5 5.5

N
27 37 50 27 37 50 27 37 50

P
Rc 1/8, 1/4, NPT 1/8, 1/4 Rc 1/4, 3/8, NPT 1/4, 3/8 Rc 3/8, 1/2, NPT 3/8, 1/2 Rc 1/4, NPT 1/4 Rc 3/8, NPT 3/8 Rc 1/2, NPT 1/2 Rc 1/4, NPT 1/4 Rc 3/8, NPT 3/8 Rc 1/2, NPT 1/2

Stainless steel LVH30 (SUS)

LVH20 LVH40 LVH20 LVH30 LVH40 LVH20 LVH30 LVH40

110.5 112.5 75.5

20.5 138

PPS

109.5 111.5 79 80.5

20.5 138.5 142.5 113.5 115.5

PFA

20.5 138.5 142.5

17-5-30

(H1) (H2)
60
(mm)

G A D
60

Series LVH/Integral

Fitting Type

Manifolds
Manifold Specifications
Model Manifold type P (IN), A (OUT) type Valve stations Tubing size (port P) Tubing size (port A) 3/8 1/4 LLH2A LLH3A Stacking type Common IN/Individual OUT 2 to 5 stations 1/2 3/8 3/4 1/2 LLH4A

VC VDW VQ VX2

Note 1) Contact SMC if the manifold will be used with vacuum and A P flow.

How to Order Manifold Base

VX VX3

LLH 2 A
Body class
Symbol Body class 2 2 3 3 4 4

05

S 11
Tubing size for port P and L side connection
Symbol Tubing size 00 Plug 06 6 07 1/4" 08 8 10 10 11 3/8" 10 10 11 3/8" 12 12 13 1/2" 12 12 13 1/2" 19 19, 3/4" Body class

VXA
Tubing size for port P and R side connection
Symbol Tubing size 00 Plug 06 6 07 1/4" 08 8 10 10 11 3/8" 10 10 11 3/8" 12 12 13 1/2" 12 12 13 1/2" 19 19, 3/4" Body class

VN LVC LVA LVH LVD

Base type
A Stacking type

Manifold stations
02

2 stations

05

5 stations

LVQ
4

LQ LVN

How to Order Valve

TI/ TIL

PA

LVH 2 0 A
Body class
Symbol Body class Orifice dia. 2 2 4 3 3 8 4 4 10

S07
Tubing size
Symbol Tubing size S03 1/8" S04 4 S05 3/16" S06 6 S07 1/4" S06 6 S07 1/4" S08 8 S10 10 S11 3/8" S10 10 S11 3/8" S12 12 S13 1/2" Body class

PAX PB

Valve type
0 N.C.

Body type
A Stacking type for manifold

Lever operation
Symbol Lever operation Nil Non-locking type (self-reset type) L Locking type

17-5-31

Series

LVH
Threaded type manifold/Variations
Model Manifold materia l Tubin g siz Orif e ice Val diame ve ter typ Symbol e
P P

How to Order Manifold Assembly (Example)


Enter the part number of the valves to be mounted together with the manifold base part number. s tion Sta ... 2 1

LVH20

LVH30
PFA

LVH40

1/4
4

3/8
8

1/2
10

Type Manifold

A (OUT) port

Stations are counted from station 1 on the left side, with the A (OUT) ports in front.

N.C.

Non-locking Locking

<Example> LLH2A-03-SH LVH20A-S07 LVH20AL-S07

1 set 2 sets 1 set

1 set Manifold base part no. 2 sets Valve part no. (stations 1 & 2) 1 set Valve part no. (station 3)

Add the symbol at the beginning of part numbers for valves, etc. to be mounted.
Enter together in order counting from station 1 on the left side, with the A (OUT) ports in front.

Dimensions
LLH AStations

4-Mounting hole for W

A K

L1 L2 L3 G

Non-locking type

Locking type

(H1)

60

SMC

SMC

SMC

3/8

Pitch = B

2-P port

n-A port

Dimensions
Model

(mm)

(H2)
SMC

D
67 76 95

E
19

G
10

H1
85.5

H2
87 158

K
18 39 50

65 LLH2A 46.5 31 LLH3A 47 36.5 94.5 115 LLH4A 60 47

27.5 19

125.5 127.5

33.5 20.5 154

17-5-32

1/4

1/4

1/4

(mm)
Station

N
27 37 50

U
19 27.5 33.5

V
34 47 56

W
M4 M5 M6

Y
5.5 6.5 7.5

Model

Symbol

2
62 75 146 73 84 183 94 109 219

3
93 106 177 109.5 120.5 219.5 141 156 266

LLH2A

LLH3A

LLH4A

L1 L2 L3 L1 L2 L3 L1 L2 L3

124 155 137 168 208 239 146 182.5 157 193.5 256 292.5 188 235 203 250 313 360

Series LVH/Threaded

Type

Manifolds
Manifold Specifications
Model Manifold type P (IN), A (OUT) type Valve stations Port size (port P) Port size (port A) 1/4 1/4 LLH2A LLH3A Stacking type Common IN/Individual OUT 2 to 5 stations 3/8 3/8 1/2 1/2 LLH4A

VC VDW VQ VX2 VX

Note 1) Contact SMC if the manifold will be used with vacuum and flow A P.

How to Order Manifold Base

VX3 VXA VN
Material

LLH 2 A
Body class
Symbol Body class 2 2 3 3 4 4

05

02
Symbol Nil N

C
Thread type
Thread type Rc NPT Symbol C Manifold PFA

LVC LVA LVH LVD LVQ LQ

Base type
A Stacking type

Port size (port P)


2 stations 5 stations

Manifold stations
02 05

Symbol 02 03 04

Port size 1/4 3/8 1/2

Body class 2 3 4

How to Order Valve


Threaded type
Body class
Symbol Body class Orifice dia. 2 2 4 3 3 8 4 4 12

LVN
TI/ TIL

LVH 2 0 A

02

C
Material
Symbol Body Actuator section End plate PP PPS Diaphragm PTFE

PA PAX PB

Valve type
0 N.C. C PFA

Thread type Body type


A Stacking type for manifold Symbol Nil N Thread type Rc NPT

Lever operation
Symbol Lever operation Nil Non-locking type (self-reset type) L Locking type

Port size (port A)


Symbol 02 03 04 Port size 1/4 3/8 1/2 Body class 2 3 4

17-5-33

Series

LVH
Threaded type manifold/Variations
Manifold
Model

How to Order Manifold Assembly (Example)


Enter the part number of the valves to be mounted together with the manifold base part number. s tion Sta ... 2 1

LVH20

LVH30
PFA

LVH40

Type Manifold
Stations are counted from station 1 on the left side, with the A (OUT) ports in front.

Symbol
P

materia l Port Orif size ice Val diame ve ter typ e


P

1/4 4

3/8 8

1/2 12

N.C.

A (OUT) port

<Example> LLH2A-03-02-C LVH20A-02-C LVH20AL-02-C

Non-locking Locking

1 set 2 sets 1 set

1 set Manifold base part no. 2 sets Valve part no. (stations 1 & 2) 1 set Valve part no. (station 3)

Add the symbol at the beginning of part numbers for valves, etc. to be mounted.
Enter together in order counting from station 1 on the left side, with the A (OUT) ports in front.

Dimensions
LLH AStations

-C
K

4-Mounting hole for W

G L1 L2 L3

Locking type

Non-locking type

(H1) (H2)

N R A (OUT) port n-P P (IN) port 2-P


Pitch = B

A
(mm)

Dimensions
Model

60

(mm)
Station

A
50 47 60

B
31 37 47

C
65 90 107

H1
85.5

H2
87 150

K
18 50

N
27 37 50

P
Rc1/4, NPT1/4 Rc3/8, NPT3/8 Rc1/2, NPT1/2

R
19 24

U
34 48

W
M4 M5 M6

Y
5.5 6.5 7.5

LLH2A LLH3A LLH4A

20.5 10 25.5 19 29

Model

Symbol

2
62 75 118 74 90 118 94 112 144

3
93 106 149 111 127 155 141 159 191

4
124 137 180 148 164 192 188 206 238

5
155 168 211 185 201 229 235 253 285

112.5 114.5 39

23.5 42.5

20.5 146

LLH2A

LLH3A

LLH4A

L1 L2 L3 L1 L2 L3 L1 L2 L3

17-5-34

Series LV

Fittings and Special Tools


Fittings
Changing tubing sizes
The tubing size can be changed within the same body class (body size) by replacing the nut and insert bushing. Part composition
Tubing O.D. Body class 4 6 Metric sizes 8 10 12 19 25 1/8 3/16 Inch sizes 1/4 3/8 1/2 3/4 1 Nut Component parts Insert Collar (insert assembly) Yes Yes No Yes

VC VDW VQ VX2 VX VX3 VXA VN LVC LVA

Basic size

Yes

2 3 4 5 6

Reducer type Yes

Changing the tubing size


Example) Changing the tubing from an O.D. 1/4" to O.D. 1/8" in body class 2.

Prepare an insert bushing and nut for 1/8" O.D. tubing (LQ-2U03) and change the tubing size. (Refer to the section on how to order fitting parts.)
Note) Tubing is sold separately.
Insert bushing LQ-2B07 Nut LQ-2N07 Insert bushing LQ-2B03 Nut LQ-2N03

LVH LVD LVQ LQ

Tubing O.D. 1/4" LQ-2U07 (Basic size)

Tubing

Collar

Tubing

LVN
TI/ TIL

How to order fitting parts

Tubing O.D. 1/8" LQ-2U03 (Reducer type)


Type U is recommended when changing tubing sizes.

PA PAX PB

LQ
Type of fitting
Symbol Applicable fitting Nil LQ2 1 LQ1

2 U 03

Tubing size
Symbol Tubing O.D. 03 1/8" 04 4 05 3/16" 06 6 07 1/4" 06 6 08 8 10 10 07 1/4" 11 3/8" 10 10 12 12 11 3/8" 13 1/2" 12 12 13 1/2" 19 3/4", 19 19 3/4", 19 25 1", 25 Body class Applicable fitting

Body class
Symbol 2 3 4 5 6 Body class 2 3 4 5 6 Applicable fitting

3 LQ2

LQ2

LQ1

Type of part
Symbol U B N Type of part Insert bushing & nut Insert bushing Nut

5 6 LQ1

17-5-35

Series

LV

Special Tools
How to order fitting jigs

LQ G J

Insert pin material


Nil S Resin Stainless steel (J/K type ony)

Option (L/M type only)


Symbol Nil Option None

Insert pin/Holder type


Nil N Metric size Inch size
Note 1) Compatible pins and holders are included with all sizes. (with the parts case)

With bracket

Type
Body Symbol class

Option
Description Part No.

Bracket assembly

LQ-GBL

J/K

1, 2

J type

K type

L/M

1, 2, 3, 4, 5, 6
L type M type (for short piping)

Table 1 Tubing size symbols


Tubing O.D. Type Body Class J 1 2 1 2 3 4 5 6 3 03 03 4 04 04 04 04 Metric sizes 6 8 10 12 06 06 06 08 10 10 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 Inch sizes 1/4" 3/8" 1/2" 07 07 07 11 11 13 13 3/4" 19 19 1" 25

Replacement parts
Description Part No.

LQ-GP J
Insert pin holder assembly (with the parts case) Type

Insert pin/ Holder type


Nil Metric sizes Inch sizes

Insert pin material


(J/K type only)
Nil Resin Stainless steel

LQ-GP 2 J
Insert pin (single) Body class
(Refer to Table 1)

- 07
Tubing size symbol
(Refer to Table 1)

Type

Insert pin material


(J/K type only)
Nil Resin Stainless steel

LQ-GH J - 07
Holder (single) Type
Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK. Replacement part type L shows the parts for LQ-GL and LQ-GM.

Tubing size symbol


(Refer to Table 1)

17-5-36

High Purity Chemical Valve

Series

LV

Special Tools
Dimensions
LQ-GJ LQ-GK

VC
LQ-GJ

36

30 24 45 (adjustable)

VDW VQ VX2 VX

117

76
LQ-GK

36

63 43

53

SET POS.

114

(Max. 50)

VX3 VXA
53

63 43

127

VN LVC LVA LVH LVD

LQ-GM

LQ-GL
50

LVQ LQ LVN
207
LQ-GL

50 85

342 40 28
LQ-GM

85

TI/ TIL

40 28

SET POS.

PA
4R3

SET POS.

R3

6 325

4-

(Max. 91)

4-

R3

PAX PB

4R3

191

(Max. 91)

87 60

87 112 60

112

17-5-37

Series

LV

Fitting Assembly Procedure


Assemble fittings following the procedure shown below.

J type
y Tubing u Fitting nut !1 Holder assembly replacement screw i Holder assembly r Insert pin assembly t Insert bushing !0 Insert pin assembly replacement screw

J type fitting assembly procedure


1

Pull out the lever pin q . Rotate the lever assembly w to align the holes on the lever assembly w and the base e . Insert the lever pin q into the holes to fix the lever assembly w. Place the insert bushing t on the insert pin assembly r. Cut the end of the tubing y at a right angle and pass it through the fitting nut u. After placing the tubing y in the holder assembly i , push it onto the insert bushing t until it stops and clamp it with the hook o .

o Hook y Tubing t Insert bushing e Base

Caution

q Lever pin

When the tubing y is curved, straighten it out before using it. The tubing y may slip if there is oil or dust, etc., on the holder assembly i. Remove the contamination using alcohol or another suitable cleaner.

Press the insert bushing t into the tubing y by turning the lever assembly w. To replace the insert pin assembly r and holder assembly i , use the insert pin assembly replacement screw !0 and the holder assembly replacement screws !1, respectively.

w Lever assembly Packed state

K type
Holder assembly replacement screw Insert pin assembly replacement screw

K type fitting assembly procedure


For procedure to set and press fit the insert pin assembly, refer to L, M type fitting assembly procedures. For procedure to set the tubing, refer to J type procedure.
1

Lever
5

Refer to J type assembly procedure.

Tubing Insert bushing


SET POS .

Holding screw

Tighten the fitting nut u until it reaches the prescribed position on the body (end face). As a guide, refer to the proper tightening torques shown below.

Nut tightening torque for piping


Body class
End face

Torque (Nm) LQ1 0.3 to 0.4 LQ2 1.5 to 2.0

Note 1) In case of body class 1, the nut should be tightened manually. Optimum position
l na ctio Se w vie

Precautions on installation
Seal Insert bushing

Standard size
End face

Minimum position

Body Reducer type

Tubing

Be careful not to scratch or dent the seal of the insert bushing. (Refer to the illustration on the left.) When the insert bushing inserted, its tubing end should be closer to seal side than the minimum position. (Refer to the illustration on the left.)

17-5-38

High Purity Chemical Valve

Series

LV

Fitting Assembly Procedure


Assemble fittings following the procedure shown below.

L type
r Tubing t Fitting nut u Knob w Insert pin assembly

L and M type fitting assembly procedure


1 2

Turn the lever q and move to SET POS. Place the insert bushing e on the insert pin assembly w. Cut the end of the tubing r at a right angle and pass it through the fitting nut t. After placing the tubing r in the holder assembly y , push it onto the insert bushing e until it stops and clamp it with the knob u. When tightening the tubing r with the knob u , maintain a uniform gap on both sides of the holder.

VC VDW VQ VX2 VX VX3 VXA VN LVC LVA LVH LVD LVQ LQ LVN
TI/ TIL

e Insert bushing Space


3

q Lever

y Holder assembly

r Tubing e Insert bushing


SET POS .

Caution

When the tubing r is curved, straighten it out before using it. The tubing r may slip if there is oil or dust, etc. on the holder assembly y . Remove the contamination using alcohol or another suitable cleaner.

M type

!0 Holder assembly replacement screw (2 places) o Insert pin assembly replacement screw q Lever

Press the insert bushing e into the tubing r by turning the lever q. (Pressing in can be accomplished with 2 or 3 turns of the lever q.) To replace the insert pin assembly w and holder assembly y , use the insert pin assembly replacement screw o and the holder assembly replacement screws !0 , respectively. In case of M type for short piping, remove the handle !1 , slide the clamp assembly !2 to attain the specified length, then secure it again with the handle !1. Tighten the fitting nut t to the prescribed position on the body (end face). As a guide, refer to the proper tightening torques shown below.

!2 Clamp assembly !1 Handle (M type only)

PA PAX PB

End face

Nut tightening torque for piping


Body class 2 Torque (Nm) LQ1 0.3 to 0.4 0.8 to 1.0 1.0 to 1.2 2.5 to 3.0 5.5 to 6.0 LQ2 1.5 to 2.0 3.0 to 3.5 7.5 to 9 11 to 13

w vie al ion ct Se

3 Standard size
End face

4 5 6

Body Reducer type

Note 1) In case of body class 1, the nut should be tightened manually.

Optimum position Minimum position Seal Insert bushing

Precautions on installation
Be careful not to scratch or dent the seal of the insert bushing. (Refer to the illustration on the left.) When the insert bushing inserted, its tubing end should be closer to seal side than the minimum position. (Refer to the illustration on the left.)

Tubing

17-5-39

Applicable Fluids
Material and fluid compatibility check list for air and manually operated high purity valves
Body material Diaphragm material Fluoro resin PTFE Nitrile rubber NBR Ethylene propylene rubber EPR

Chemical

Stainless steel SUS316

Polyphenylene Fluoro resin sulfide resin PFA PPS

Acetone Ammonium hydroxide Isobutyl alcohol Isopropyl alcohol Hydrochloric acid Ozone (dry) Hydrogen peroxide Concentration 5% or less, 50C or less Ethyl acetate Butyl acetate Nitric acid (except fuming nitric acid) Concentration 10% or less DI water Sodium hydroxide Concentration 50% or less Nitrogen gas Super pure water Toluene Hydrofluoric acid Sulfuric acid (except fuming sulfuric acid) Phosphoric acid Concentration 80% or less
The material and fluid compatibility check list provides reference values as a guide only. Note 1) Use a stainless steel body, as static electricity may be generated. Note 2) Use caution as permeation may occur and any permeated fluid could effect other material parts.

Table symbols

: Can be used : Can be used in certain conditions : Cannot be used

Compatibility is indicated for fluid temperatures of 100C or less. The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product. The data above is based on the information presented by the material manufacturers. SMC is not responsible for its accuracy and any damage happened because of this data.

17-5-40

Series LV

High Purity Chemical Valve Precautions 1


Be sure to read before handling.
Design & Selection Piping

Warning
1. Confirm the specifications.
Give careful consideration to operating conditions such as the application, fluid and environment, and use within the operating ranges specified in this catalog.

Caution
1. Preparation before piping
Before piping is connected, it should be thoroughly blown out with air (flushing) or washed to remove chips, cutting oil and other debris from inside the pipe. Install piping so that it does not apply pulling, pressing, bending or other forces on the valve body.

VC VDW VQ VX2 VX VX3 VXA VN LVC LVA LVH LVD LVQ LQ LVN
TI/ TIL

2. Fluids
Operate after confirming the compatibility of the product's component materials with fluids, using the check list on features page 17-5-40. Contact SMC regarding fluids other than those in the check list. Operate within the indicated fluid temperature range.

2. Use the tightening torques shown below when making connections to the pilot port.
Operating port tightening torque
Operating port M5 Rc, NPT 1/8 Torque (Nm) 1/6 turn with a tightening tool after first tightening by hand 0.8 to 1.0

3. Maintenance space
Ensure the necessary space for maintenance and inspections.

4. Fluid pressure range


Keep the supplied fluid pressure within the operating pressure range shown in the catalog.

3. Use of metal fittings


Do not use metal fittings for piping on taper threads made of resin, as this may cause damage to the threads. LVA PPS body ported tightening torque for fittings.
Size LVA20 LVA30 LVA40 LVA50 Breaking torque 2 to 3 6 to 8 11 to 14 18 to 20 Tightening torque (Nm) 0.5 to 1 2 to 3 5 to 7 8 to 10 Guideline for tightening torque (Number of turns) 2 to 3 turns 3 to 4 turns 3 to 4 turns 3 to 4 turns

5. Ambient environment
Operate within the ambient operating temperature range. After confirming the compatibility of the product's component materials with the ambient environment, operate so that fluid does not adhere to the product's exterior surfaces.

6. Liquid seals
When circulating fluid Provide a relief valve in the system so that fluid does not get into the liquid seal circuit.

7. Countermeasures for static electricity


Since static electricity may be generated depending on the fluid being used, implement suitable countermeasures.

Guideline for tightening torque Number of turns when the fitting is screwed into the body with 2 to 3 windings of sealant tape applied to threaded portion of the piping. The value may differ for types other than sealant type.

Mounting

4. Use pilot ports and sensor (breathing) ports as indicated below.


PA Port N.C. N.O. Double acting Pressure Breathing Pressure PB Port Breathing Pressure Pressure Sensor (breathing) port Breathing Breathing Breathing

Warning
1. If air leakage increases or equipment does not operate properly, stop operation.
After mounting, perform suitable function and leak tests to confirm that the mounting is correct.

PA PAX PB

2. Instruction manual
Mount and operate the product after reading the manual carefully and understanding its contents. Also keep the manual where it can be referred to as necessary.

In the case of N.C. and N.O. types, the port which does not receive operating pressure is released to atmosphere. When intake and exhaust directly from the valve is not desired due to problems with the ambient environment or scattering of dust, etc., install piping and perform intake and exhaust at a location which does not present a problem.

5. See page 17-5-38 regarding tubing connections.


Operating Air Supply

Warning
1. Use clean air.
Do not use compressed air which includes chemicals, synthetic oils containing organic solvents, salt, or corrosive gases, etc., as this may cause damage or malfunction.

17-5-41

Series LV

High Purity Chemical Valve Precautions 2


Be sure to read before handling.
Operating Environment Precautions on Usage

Warning
1. Do not use in a location having an explosive atmosphere. 2. Do not operate in locations where vibration or impact occurs. 3. Do not use in locations where radiated heat will be received from nearby heat sources.
Maintenance

Warning
1. Operate within the ranges of the maximum operating pressure and back pressure.

Caution
1. When the diaphragm is made of PTFE
Please note that when the product is shipped from the factory, gases such as N2 and air may leak from the valve at a rate of 1cm3/min (when pressurized).

Warning
1. Maintenance should be performed in accordance with the procedures in the instruction manual.
Incorrect handling can cause damage or malfunction of machinery and equipment, etc.

2. Before removing equipment or compressed air supply/exhaust devices, shut off the air and power supplies, and exhaust compressed air from the system. Further, when restarting equipment after remounting or replacement, first confirm safety and then check the equipment for normal operation. 3. Perform work after removing residual chemicals and carefully replacing them with DI water or air, etc. 4. Do not disassemble the product. Products which have been disassembled cannot be guaranteed.
If disassembly is necessary, contact SMC.

5. In order to obtain optimum performance from valves, perform periodic inspections to confirm that there are no leaks from valves or fittings, etc.

Caution
1. Removal of drainage
Flush drainage from filters regularly.

2. When operated at a very low flow rate, the series LV with flow rate adjustment may vibrate, etc. depending on the operating conditions. Therefore, operate it after careful examination of the flow rate, pressure and piping conditions. 3. In the series LV , water hammering may occur depending on the fluid pressure conditions. In most cases, improvement is possible by adjusting the pilot pressure with a speed controller, etc., but the flow rate, pressure and piping conditions should be reviewed. 4. To adjust the flow rate for the series LV with flow rate adjustment, open gradually starting from the fully closed condition. Opening is accomplished by turning the adjustment knob counter clockwise. Additionally, do not apply any unreasonable force to the adjustment handle when nearing a fully opened or closed state. This may result in deformation of the orifice sheet surface or damage to the threaded part of the adjustment handle. It is in the fully closed condition when the product is shipped from the factory. 5. After a long period of nonuse, perform a test run before beginning regular operation. 6. Since the LVC is packaged in a clean room use sufficient care in handling when opened. 7. Take extra care when setting the operating direction and when handling the lever of series LVH.

17-5-42

SMC Information SMC Information


Table of Contents (for Back Pages) Safety Instructions 2/3 Port Process Valve Precautions Quality Assurance Information (ISO 9001, ISO 14001) SMC Product Conforming to International Standards Unlisted/Specialized Catalog Information SMC Corporations Web Site Information Products INDEX in Alphanumerical Order SMCs Global Service Network

17-6-1

17-6-2

Safety Instructions
These safety instructions are intended to prevent a hazardous situation and/or equipment damage. These instructions indicate the level of potential hazard by labels of "Caution", "Warning" or "Danger". To ensure safety, be sure to observe ISO 4414 Note 1), JIS B 8370 Note 2) and other safety practices.

Caution : Operator error could result in injury or equipment damage. Warning : Operator error could result in serious injury or loss of life. Danger :
In extreme conditions, there is a possible result of serious injury or loss of life.

Note 1) ISO 4414: Pneumatic fluid power--General rules relating to systems. Note 2) JIS B 8370: General Rules for Pneumatic Equipment

Warning
1. The compatibility of pneumatic equipment is the responsibility of the person
who designs the pneumatic system or decides its specifications.
Since the products specified here are used in various operating conditions, their compatibility for the specific pneumatic system must be based on specifications or after analysis and/or tests to meet your specific requirements. The expected performance and safety assurance will be the responsibility of the person who has determined the compatibility of the system. This person should continuously review the suitability of all items specified, referring to the latest catalog information with a view to giving due consideration to any possibility of equipment failure when configuring a system.

2. Only trained personnel should operate pneumatically operated machinery


and equipment.
Compressed air can be dangerous if an operator is unfamiliar with it. Assembly, handling or repair of pneumatic systems should be performed by trained and experienced operators.

3. Do not service machinery/equipment or attempt to remove components until


safety is confirmed.
1. Inspection and maintenance of machinery/equipment should only be performed once measures to prevent falling or runaway of the driver objects have been confirmed. 2. When equipment is to be removed, confirm the safety process as mentioned above. Cut the supply pressure for this equipment and exhaust all residual compressed air in the system. 3. Before machinery/equipment is restarted, take measures to prevent shooting-out of cylinder piston rod, etc.

4. Contact SMC if the product is to be used in any of the following conditions:


1. Conditions and environments beyond the given specifications, or if product is used outdoors. 2. Installation on equipment in conjunction with atomic energy, railway, air navigation, vehicles, medical equipment, food and beverages, recreation equipment, emergency stop circuits, clutch and brake circuits in press applications, or safety equipment. 3. An application which has the possibility of having negative effects on people, property, or animals, requiring special safety analysis.

17-6-3

2/3 Port Process Valve Precautions 1


Be sure to read before handling. For detailed precautions on every series, refer to main text.
Caution on Design Selection

Warning
1. Cannot be used as an emergency shutoff valve, etc.
The valves presented in this catalog are not designed for safety applications such as an emergency shutoff valve. If the valves are used in this type of system, other reliable safety assurance measures should also be adopted.

Warning
3. Quality of operating fluids
Since the use of fluid which contains foreign matter can cause problems such as malfunction and seal failure by promoting wear of the valve seat and core, and by sticking to the sliding parts of the armature, etc., install a suitable filter (strainer) immediately upstream from the valve. As a general rule, use 80 to 100 mesh. When used to supply water to boilers, substances such as calcium and magnesium which generate hard scale and sludge are included. Since this scale and sludge can cause valve malfunction, install water softening equipment, and a filter (strainer) directly upstream from the valve to remove these substances.

2. Extended periods of continuous energization


Please consult with SMC if valves will be continuously energized for extended periods of time.

3. Solenoid valves are not allowed to use as an explosion proof one. 4. Maintenance space
The installation should allow sufficient space for maintenance activities (removal of valve, etc.).

4. Quality of operating air


1) Use clean air. If the compressed air supply includes chemicals, synthetic materials (including organic solvents), salinity, corrosive gas, etc., it can lead to damage or malfunction. 2) Install an air filter. Install an air filter at the up stream side to the valve. Filtration degree should be 5 m or less. 3) Install an air dryer, after cooler, etc. Compressed air that includes excessive drainage may cause malfunction of valves and other pneumatic equipment. To prevent this, install an air dryer or after cooler, etc. 4) If excessive carbon powder is seen, install a mist separatoron the upstream side of the valve. If excessive carbon powder is generated by the compressor, it may adhere to the inside of valves and cause malfunction. For compressed air quality, refer to Air Cleaning Equipment catalog.

5. Liquid rings
In cases with a flowing liquid, provide a by-pass valve in the system to prevent the liquid from entering the liquid seal circuit.

6. Operation of actuator
When an actuator, such as a cylinder, is to be driven using a valve, take appropriate measures to prevent potential danger caused by actuator operation.

7. Holding pressure (including vacuum)


Since the valve may have slight internal air leakage, it may not be suitable for holding pressure (including vacuum) in a tank or other vessel for an extended period of time.

8. When the conduit type is used as equivalent to an IP65 enclosure, install a wiring conduit, etc. (Series VC)
For details, refer to page 17-6-7.

Selection Selection

5. Ambient environment
Operate within the ambient operating temperature range. After confirming the compatibility of the products component materials with the ambient environment, operate so that fluid does not adhere to the products exterior surfaces.

Warning
1. Check the specifications.
Give careful consideration to operating conditions such as the application, fluid and environment, and use within the operating ranges specified in this catalog.

6. Countermeasures for static electricity


Since static electricity may be generated depending on the fluid being used, implement suitable countermeasures.

2. Operating fluids
1) Type of operating fluids Select model according to the operating fluid for its material. Viscosity of the operating fluids must be less than 50 cst in general. Please contact SMC for further information. 2) Flammable oil or gases Confirm the specifications for the internal/external leakage. 3) Corrosive gases Since corrosive gases may cause stress corrosion, cracking or other accidents, it is not applicable for valves in this catalog. 4) Use a Non-lube valve when impurities such as oil should not be in the fluid passage. 5) Option and fluids may not be usable on the operating conditions. General use of option and fluids are shown in the catalog to be referred for model selection.

17-6-4

2/3 Port Process Valve Precautions 2


Be sure to read before handling. For detailed precautions on every series, refer to main text.
Selection
Series VQ20/30
When mounting the valve, secure with brackets. When mounting it directly, tighten the mounting screws with the appropriate torque (0.2 to 0.23 Nm).

Caution
1. Leakage voltage
Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor and C-R element, etc., creating a danger that the valve may not shut OFF.
Switching element OFF
Leakage voltage Power supply

Mounting screw Tightening torque 0.2 to 0.23 Nm

Port Direction
Valve

Leakage voltage

Caution
1. Preparation before piping
Before piping is connected, it should be thoroughly blown out with air (flushing) or washed to remove chips, cutting oil and other debris from inside the pipe. Install piping so that it does not apply pulling, pressing, bending or other forces on the valve body.

Series VC, VD, VQ


AC coil: 10% or less of rated voltage DC coil: 2% or less of rated voltage

Series VX
AC coil: 20% or less of rated voltage DC coil: 2% or less of rated voltage

Series VN
AC coil: 15% or less of rated voltage DC coil: 3% or less of rated voltage

2. Sealant tape

Winding direction

2. Low temperature operation


1) Valve use is possible to temperature extremes of 10C. Take appropriate measures to avoid freezing of drainage, moisture etc. by using an air dryer. 2) When using valves for water application in cold climates, take appropriate countermeasures to prevent the freezing in tubing after cutting the water supply from the pump, e.g. drain the water, etc. When heating by steam, be careful not to expose the coil portion to steam. Installation of dryer, heat retaining of the body are recommended to prevent the freezing in condition that dew-point temperature is high and ambient temperature is low.

When installing piping or fitting into a port, ensure that sealant material Pipe tape does not enter the port internally. E Furthermore, when sealant tape is 2 xpos thr e used, leave 1.5 to 2 thread ridges ea ap ds pro exposed at the end of the threads. x.

3. Avoid connection of ground lines to piping, as this may cause electric corrosion of the system. 4. Always tighten threads with the proper tightening torque.
When screwing fittings into valves, tighten with the proper tightening torque shown below.

Mounting

Tightening Torque for Piping


Connection thread M5 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1 Rc 11/4 Rc 11/2 Rc 2 Applicable tightening torque (Nm) 1.5 to 2 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50

Warning
1. If air leakage increases or equipment does not operate properly, stop operation.
Check mounting conditions after air and power supplies are connected. Initial function and leakage tests should be performed after installation.

2. Do not apply external force to the coil section.


Apply spanner to the external connection part when tightening.

3. Avoid installing the coil downward.


Foreign materials in the fluid may stick to the armature and it could cause malfunction. (In the case of VX series)

4. Do not warm the coil assembly part by the heat insulating material, etc.
Tape heater for anti-freezing is applicable to use only for piping or body.

5. Other than fittings made of stainless steel or copper should be tightened with a bracket. 6. Do not use in locations subjected to vibrations. If impossible, arm from the body should be as short as possible to prevent resonance. 7. Instruction manual
Install only after reading and understanding the safety instructions. Keep the catalog on life so that it can be referred to when necessary.

Reference How to tighten M5 threads on the fittings After tightening by hand, use a tightening tool to add about 1/6 turn more. But when using miniature fittings, after tightening by hand, use a tightening tool to add 1/4 turn more. (When there are gaskets for universal elbow, universal tee, etc. in 2 locations, tighten them with twice as 1/2 turn.)

5. Connection of piping to products


When connecting piping to a product, avoid mistakes regarding the supply port, etc.

8. Coating
Warnings or specifications indicated on the product should not be erased, removed, or covered up.

6. Steam generated in a boiler contains a large amount of drainage. Be sure to operate with a drain trap installed. 7. In applications such as vacuum and non-leak specifications, use caution specifically against the contamination of foreign matters or airtightness of the fittings.

17-6-5

2/3 Port Process Valve Precautions 3


Be sure to read before handling. For detailed precautions on every series, refer to main text.
Port Direction Electrical Connections

Caution
Series LV 1. Use the tightening torques shown below when making connections to the pilot port.

Caution
Series VC Grommet
Class H coil: AWG18 Class B coil: AWG20

Operating Port Tightening Torque


Operating port M5 Rc, NPT 1/8 Torque (Nm) 1/6 turn with a tightening tool after first tightening by hand 0.8 to 1.0 0.8 to 1.0

(1) (2) Rated voltage DC (Type B only) 100 VAC 200 VAC Other AC There is no polarity.

SMC

2. Use of metal fittings


Do not use metal fittings for piping on taper threads made of resin, as this may cause damage to the threads.

Lead wire color (1) Black Blue Red Gray (2) Red Blue Red Gray

3. Use pilot ports and sensor (breathing) ports as indicated below.


PA Port N.C. N.O. Double acting Pressure Exhaust PB port Exhaust Pressure Sensor (breathing) port Exhaust Exhaust

Exhaust Pressure Pressure In the case of N.C. and N.O. types, the port which does not receive operating pressure is released to atmosphere. When intake and exhaust directly from the valve is not desired due to problems with the ambient environment or scattering of dust, etc., install piping and perform intake and exhaust at a location which does not present a problem.

Series VC, VX DIN terminal (Class B only)


The figure below shows the internal connection of DIN terminal, so connect DIN terminals with power supply.
1: + ()

4. For tubing connections, refer to pages 17-5-38 to 39.


3 2 + 1

Wiring

Caution
1. Use electrical wires for piping with more than 0.5 to 1.25 mm2. Further, do not allow excessive force to be applied to the lines. 2. Use electrical circuits which do not generate chattering in their contacts. 3. Use voltage which is within 10% of the rated voltage. In cases with a DC power supply where importance is placed on responsiveness, stay within 5% of the rated value. The voltage drop is the value in the lead wire section connecting the coil. 4. When electrical circuit is not acceptable for surge voltage generated by solenoid, install a surge absorber in parallel to the solenoid or use a optional type with surge killer. (VCB, VCL: Class H coil, Series VCS, VDW, VX, VQ) 5. Series VX, VQ Use the option with surge voltage suppressor, with surge voltage protection circuit.

2: (+)

Terminal no.

DIN terminal + () (+) There is no polarity. Heavy-duty cord can be used up to the cable O.D. 6 to 12. Use the tightening torques below for each section.
Connector Binding head screw with flange Tightening torque 0.5 to 0.6 Nm

Note)

Washer Rubber seal

Conformed cable (Cable O.D. 6 to 12 mm)

Binding head screw Tightening torque 0.5 to 0.6 Nm


Gasket

Note) For the one with outside diameter of the cable 9 to 12 mm, remove the internal parts of the rubber seal before using.

17-6-6

2/3 Port Process Valve Precautions 4


Be sure to read before handling. For detailed precautions on every series, refer to main text.
Electrical Connections

Warning
Series VC, VX Conduit terminal
In the case of the conduit terminal, make connections according to the marks shown below. Use the tightening torques below for each section. Properly seal the terminal connection (G 1/2) with the special wiring conduit, etc.
Terminal cover Combination screw M3 Tightening torque 0.5 to 0.6 Nm

Series VN
The figures below show the internal connection of DIN terminal or terminal box, so connect them with power supply.

With DIN terminal box

With terminal box

1
A

G1/2 Tightening torque 0.5 to 0.6 Nm

+ mark

mark

Terminal no. DIN terminal


A

2 -

1 +

Terminal

+ +

Combination screw M3 Tightening torque 0.5 to 0.6 Nm

Connect the conduit terminal according to the marks shown below.


Conduit terminal Combination screw M3 A

View A-A (Internal connection diagram)


mark
2 -

1 +

Series VC Conduit
When used as an IP65 equivalent, use seal (Part no. VCW20-156) to install the wiring conduit. Also, use the tightening torque below for the conduit.

+ mark

Combination screw M3

Conduit terminal

Class H coil: AWG18 Class B coil: AWG20 (1)


SMC

View A-A (Internal connection diagram)

(2)
Wiring conduit Port size G 1/2 Tightening torque 0.5 to 0.6 Nm Seal (VCW20-15-6)

Rated voltage DC 100 VAC 200 VAC Other AC There is no polarity. Description

Lead wire color (1) Black Blue Red Gray (2) Red Blue Red Gray

Part no.

Seal VCW20-15-6 Note) Please order separately.

17-6-7

2/3 Port Process Valve Precautions 5


Be sure to read before handling. For detailed precautions on every series, refer to main text.
Electrical Connections Electrical Circuit

Caution
Series VDW
(1)

Caution
Series VC (Class B coil)
Grommet, Conduit, Conduit terminal, DIN connector
DC circuit
ZNR
1 (+, )

AC circuit
ZNR 1 SOL.

Rectifying device

(2)
SOL. 2
2 (, +)

Rated voltage DC 100 VAC 200 VAC Other AC There is no polarity.

Lead wire color (1) Black Blue Red Gray (2) Red Blue Red Gray Without indicator light

Without indicator light

Conduit terminal, DIN terminal


DC circuit
ZNR 1 (+, )

AC circuit
ZNR 1 SOL.

Rectifying device

Series VQ20/30
Grommet
Black () DC Blue (100 VAC) Red (200 VAC)

SOL. 2

2 (, +) Indicator light

Indicator light

With indicator light


Red (+) DC Blue (100 VAC) Red (100 VAC)

With indicator light

Series VC (Class H coil)


Grommet, Conduit, Conduit terminal
AC circuit
1

For energy-saving circuit, there is the polarity.

DIN terminal
Since internal connections are as shown below for the DIN terminal, make connections to the power supply accordingly.
2
3 +

SOL.

1: + ()

Without indicator light


2

2: (+)

Series VDW
DC circuit
1 (+, )

AC circuit
ZNR 1 SOL. SOL. 2

Rectifying device

Terminal no. DIN terminal

2 (, +)

For energy-saving circuit, there is the polarity. Heavy-duty cord can be used up to the cable O.D. 3.5 to 7.
Ground nut Tightening torque 1.65 to 2.5 Nm Washer Grommet (Rubber) (Voltage symbol) Housing Holding screw Tightening torque 0.3 to 0.4 Nm

(Position for light mounting) Terminal block Shaved part

Terminal screw (3 locations) Tightening torque 0.2 to 0.25 Nm

17-6-8

2/3 Port Process Valve Precautions 6


Be sure to read before handling. For detailed precautions on every series, refer to main text.
Electrical Circuit

Caution
Series VX Grommet, Conduit, Conduit terminal, DIN connector
DC circuit
1 (+, ) SOL. 2 (, +) 2

Series VQ20/30 Grommet, DIN terminal


DC voltage (With energy-saving circuit) AC circuit

AC circuit
1

Rectifying device SOL. 1 (+) Timer circuit SOL. 2 1 SOL.

Without indicator light

Without indicator light

2 ()

Without indicator light

Without indicator light

Conduit terminal, DIN terminal


DC circuit
1 (+, ) SOL. 2 (, +) Indicator light 2

AC circuit
1 SOL.

DC circuit
1 (+, ) SOL. 2 (, +) Indicator light

With indicator light

With indicator light

With indicator light

Grommet
DC voltage (With energy-saving circuit)
1 (+) Timer circuit SOL. SOL. 2 Indicator light

AC circuit
Rectifying device
1 Indicator light

2 ()

With indicator light

With indicator light

DIN terminal
DC voltage (With energy-saving circuit)
Indicator light Rectifying device 1 (+) Timer circuit SOL. 2 1 SOL.

AC circuit

2 ()

With indicator light

With indicator light

17-6-9

2/3 Port Process Valve Precautions 7


Be sure to read before handling. For detailed precautions on every series, refer to main text.
Operating Environment
4. Manual override
When the manual override is operated, connected equipment will be actuated. Operate after safety is confirmed.

Warning
1. Do not use valves in atmospheres of corrosive gases, chemicals, salt water, water or steam, or where there is direct contact with same. 2. Do not use in explosive atmospheres. 3. Do not use in locations where vibration or impact occurs. 4. Do not use in locations subject to emissive heat. 5. Employ suitable protective measures in locations where there is contact with water droplets, oil or welding spatter, etc.

5. Do not disassemble the product. Products which have been disassembled cannot be guaranteed.
If disassembly is necessary, please contact SMC.

Maintenance and Inspection

Caution
1. Filters and strainers
1) Be careful regarding clogging of filters and strainers. 2) Replace filters after one year of use, or earlier if the amount of pressure drop reaches 0.1 MPa. 3) Clean the strainer when pressure drop exceeds 0.1 MPa.

Lubrication

Caution
1. The valve has been lubricated for life at manufacture, and does not require lubrication in service.
If a lubricant is used in the system, use turbine oil Class 1, ISO VG32 (no additive). But do not lubricate the valve with EPR seal. Refer to the below brand name table of lubricants compliant to Class 1 turbine oil (without additive), ISO VG32.

2. Lubrication
If operated with lubrication, be sure to continue the lubrication.

3. How to store for a long period of time


Remove water completely from valves before storing for a long period of time to avoid the dust generation and damage to the rubber material.

4. Flush drainage from filters regularly.

Precautions on Handling

Class 1 Turbine Oil (with no additive), ISO VG32


Classification of viscosity (cst) (40C) Viscosity according to ISO Grade 32 Turbine oil P-32 Turbine oil 32 Cosmo turbine 32 Kyodo turbine 32 Turbine oil 32 Stork turbine 32 Mitsubishi turbine 32 Turbine 32 General R turbine 32 Fucoal turbine 32

Warning
1. Valves will reach high temperatures from high temperature fluids. Use caution, as there is a danger of being burned if a valve is touched directly.

Idemitsu Kosan Co.,Ltd. Nippon Mitsubishi Oil Corp. Cosmo Oil Co.,Ltd. Japan Energy Corp. Kygnus Oil Co. Kyushu Oil Co. NIPPON OIL CORPORATION Showa Shell Sekiyu K.K. Tonen General Sekiyu K.K. Fuji Kosan Co.,Ltd.

Caution
Series LV
1. When the diaphragm is made of PTFE
Please note that when the product is shipped from the factory, gases such as N2 and air may leak from the valve at a rate of 1 cm3/min (when pressurized).

Please contact SMC regarding Class 2 turbine oil (with additives), ISO VG32.

Maintenance and Inspection

Warning
1. Removing the product
The valve will reach high temperatures from high temperature fluids such as steam. Confirm that the valve has cooled sufficiently before performing work. If touched inadvertently, there is a danger of being burned. 1) Shut off the fluid supply and release the fluid pressure in the system. 2) In the case of air pilot or air-operated type, shut off the supply air source and discharge the compressed air inside a pilot piping. 3) Shut off the power supply. 4) Remove the product.

2. Remove any remaining chemicals and carefully replace them with pure water or air, etc., before beginning work activities. (Series LV) 3. Low frequency operation
In order to prevent malfunction, conduct a switching operation of a valve every 30 days. Also, in order to use it under the optimum state, conduct a regular inspection once a half year.

2. When operated at a very low flow rate, the series LV with flow rate adjustment may vibrate, etc. depending on the operating conditions. Therefore, operate it after careful examination of the flow rate, pressure and piping conditions. 3. In the series LV, water hammering may occur depending on the fluid pressure conditions. In most cases, improvement is possible by adjusting the pilot pressure with a speed controller, etc., but the flow rate, pressure and piping conditions should be reviewed. 4. To adjust the flow rate for the series LV with flow rate adjustment, open gradually starting from the fully closed condition. Opening is accomplished by turning the adjustment knob counterclockwise. It is in the fully closed condition when the product is shipped from the factory. 5. After a long period of nonuse, perform a test run before beginning regular operation. 6. Since the LVC is packaged in a clean room use sufficient care in handling when opened.

17-6-10

Quality Assurance Information (ISO 9001, ISO 14001)


Reliable quality of products in the global market
To enable our customers throughout the world to use our products with even greater confidence, SMC has obtained certification for international standards ISO 9001 and ISO 14001, and created a complete structure for quality assurance and environmental controls. SMC products pursue to meet its customers expectations while also considering companys contribution in society.

SMCs quality control system


Make customers our first priority, offering them reliable and friendly service. Produce the highest quality with the participation of all employees. Create new products using the latest technology, and offer the finest products in a timely manner.

Quality policies

Market research Product planning After service Sales coordination Quality system education Training of suppliers Research Education Design Training Development Production Process control Inspection, testing, etc. Initial production control New product evaluation Reliability design Reliability testing New technical development

Quality management system

ISO 9001
This is an international standard for quality control and quality assurance. SMC has obtained a large number of certifications in Japan and overseas, providing assurance to our customers throughout the world.

Quality control activities

Environmental management system

ISO 14001
This is an international standard related to environmental management systems and environmental inspections. While promoting environmentally friendly automation technology, SMC is also making diligent efforts to preserve the environment.

17-6-11

SMC Product Conforming to Inter


SMC products complying with EN/ISO, CSA/UL standards are supporting

CE Mark

The CE mark indicates that machines and components meet essential requirements of all the EC Directives applied. It has been obligatory to apply CE marks indicating conformity with EC Directives when machines and components are exported to the member Nations of the EU. Once A manufacturer himself declares a product to be safe by means of CE marking (declaration of conformity by manufacturer), free distribution inside the member Nations of the EU is permissible. CE Mark SMC provides CE marking to products to which EMC and Low Voltage Directives have been applied, in accordance with CETOP (European hydraulics and pneumatics committee) guide lines. As of February 1998, the following 18 countries will be obliged to conform to CE mark legislation Iceland, Ireland, United Kingdom, Italy, Austria, Netherlands, Greece, Liechtenstein, Sweden, Spain, Denmark, Germany, Norway, Finland, France, Belgium, Portugal, Luxembourg EC Directives and Pneumatic Components Machinery Directive The Machinery Directive contains essential health and safety requirements for machinery, as applied to industrial machines e.g. machine tools, injection molding machines and automatic machines. Pneumatic equipment is not specified in Machinery Directive. However, the use of SMC products that are certified as conforming to EN Standards, allows customers to simplify preparation work of the Technical Construction File required for a Declaration of Conformity. Electromagnetic Compatibility (EMC) Directive The EMC Directive specifies electromagnetic compatibility. Equipment which may generate electromagnetic interference or whose function may be compromised by electromagnetic interference is required to be immune to electromagnetic affects (EMS/immunity) without emitting excessive electromagnetic affects (EMI/emission). Low Voltage Directive This directive is applied to products, which operate above 50 VAC to 1000 VAC and 75 VDC to 1500 VDC operating voltage, and require electrical safety measures to be introduced. Simple Pressure Vessels Directive This directive is applied to welded vessels whose maximum operating pressure (PS) and volume of vessel (V) exceed 50 bar/L. Such vessels require EC type examination and then CE marking.

17-6-12

SMC Product Conforming to International Standards

national Standards
you to comply with EC directives and CSA/UL standards.

Mark of compliance for CSA/UL

Mark of compliance for CSA

CSA Standards & UL Standards UL and CSA standards have been applied in North America (U.S.A. and Canada) symbolizing safety of electric products, and are defined to mainly prevent danger from electric shock or fire, resulting from trouble with electric products. Both UL and CSA standards are acknowledged in North America as the first class certifying body. They have a long experience and ability for issuing product safety certificate. Products approved by CSA or UL standards are accepted in most states and governments beyond question. Since CSA is a test certifying body as the National Recognized Testing Laboratory (NRTL) within the jurisdiction of Occupational Safety and Health Administration (OSHA), SMC was tested for compliance with CSA Standards and UL Standards at the same time and was approved for compliance with the two Standards. The above CSA NRTL/C logo is described on a product label in order to indicate that the product is approved by CSA and UL Standards. TSSA (MCCR) Registration Products TSSA is the regulation in Ontario State, Canada. The products that the operating pressure is more than 5 psi (0.03 MPa) and the piping size is bigger than 1 inch. fall into the scope of TSSA regulation. Products conforming to CE Standard

With CE symbol for simple visual recognition In this catalog each accredited product series is indicated with a CE mark symbol. However, in some cases, every available models may not meet CE compliance. Please visit our web site for the latest selection of available models with CE mark.

http://www.smcworld.com

17-6-13

Unlisted/Specialized Catalog Information


Catalogs not listed in this general catalog, Best Pneumatics volume 1 to 17. Catalog sheets currently not listed in the general catalog Best Pneumatics version 4 are now additionally available. These are classified, along with the catalogs, by usage, group and system selection guide, etc.to satisfy every demand.
3. Proposals for Energy Saving Pneumatic Systems

CAT.E101 B

Electric Actuators
Pneumatic Clean Series
Actuator, Rotary actuator, Air gripper, Directional control valve, Air line equipment, Air preparation equipment, Pressure switch, Clean regulator, Clean gas filter

3rd edition

CAT-No.E101

CAT-No.3

CAT-No.E02-21

4. Energy Saving Program


P-00-3B
Supply of Energy saving program Ver.2-Web service version Energy saving program Ver.2-Web service version on the Internet is registered on SMCs web site (http://www.smcworld.com). It provides both Japanese and English versions.

5. Ozone Resistant Pneumatic Equipment


P-E00-6A

6. Pneumatic Cylinder Operating System


P-E99-5A

This program contributes to energy saving for pneumatic systems from its design stage to present analysis and simulation for improvement.

Energy Saving Program

b Main additional and improvements of Ver. 2

Ver.2

Calculation of gas, liquid, and steam Conductance search Pressure/flow rate graph Simplified manipulation

Ozone Resistant Pneumatic Equipment


(The use of pneumatic equipment in low ozone concentration environments)

Energy saving program was developed to provide for a better understanding of various states of the air (consumption, flow, pressure, and temperature) from the air supply to related equipment within a facility.

Air Supply
Compressed air cost Energy conversion Unit conversion

Terminal Equipment
Air consumption Selection of air-blow systems and calculation of its characteristics Flow rate and conductance Composition of conductance Conductance saerch

Dryer
Selection of air dryer Selection of aftercooler Selection of air filter Conversion of humidity and dew points Drain amount calculation State change of air

Automatically selects the optimum and minimum size equipment that meets the energy saving demands!
Cost Yt = Yi + Yr Yt: Total cost Total energy

SMC ECOLOGICALLY MINDED PNE

1. Electric Actuators

2. Pneumatic Clean Series

Regulators and Tanks


Selection of regulator Selection of booster Selection of air tank Charge and discharge from/to tank

Min.

Piping
Pressure drop of main piping Air pipelines network Air leakage loss cost Coolant pipelines

Yr: Running cost Operating energy Yi: Initial cost

SMC CORPORATION

Minimum energy consumption = Selecting the optimum equipment with minimum cost.

b Provides a pneumatic system with minimum energy consumption based on the LCA (life cycle assessment) evaluation.

Production/Waste energy Supply air pressure

CAT-No.P-E00-3

CAT-No.P-E00-6

CAT-No.P-E99-5

17-6-14

SMC Corporations Web Site Information


SMC's improved Web Siteoffering easy-to-use options!

http://www.smcworld.com
All the latest information delivered without delay. Use SMCs latest information, for all your business needs. We are waiting for your access.

HOME

http://www.smcworld.com

1. 2. 3.

Comprehensive product information


Select contents by subject such as: 1) Spotlight!, 2) New Products, 3) CAD System (no registration required), 4) Specialized Products for General Use, 5) Events, 6) Model Changes & Discontinued Products.

Improved search function


This improved Home page now provides fast, simple access, to our most up to date information, by simply viewing its contents page including: direct access to our latest five titles of New Products, CAD System (no registration required) and Specialized Products for General Use.

Software information now available


Linked to information on CD-ROM such as: 1) Conformity with EU & US/CA Standards, 2) Model Selection Software, 3) Best Pneumatics.

17-6-15

17-6-16

Products INDEX
in Alphanumerical Order

17-6-17

Products INDEX
in Alphanumerical Order
AC10 to 60 AC10A to 40A AC10B to 60B AC20C to 40C AC20D to 40D AD402/600 ADH4000 ADM200 AF10 to 60 AF800/900 AFD20/30/40 AFF AFM20/30/40 AK AKB AKH AL10 to 60 AL800/900 ALB900 ALD(U)600/900 ALF400 to 900 AM AMC AMD AME AMF AMG AMH AMJ AMR3000 to 6000 AN AN(25) AN-KM AN00 AN02 AN03 ANA1 ANB1 AQ AQ240F/340F AR10 to 60 AR20K to 60K AR425 to 935 ARJ1020F ARJ210 ARJ310 ARM10/11 ARM1000/2000
Modular Style Air Combination (AF+AR+AL) Modular Style Air Combination (AW+AL) Modular Style Air Combination (AF+AR) Modular Style Air Combination (AF+AFM+AR) Modular Style Air Combination (AW+AFM) Auto Drain Valve Heavy Duty Auto Drain Motor Operated Auto Drain Air Filter Large Flow Air Filter Micro Mist Separator Main Line Filter Mist Separator Check Valve Check Valve with One-touch Fitting Check Valve with One-touch Fitting Lubricator Large Flow Lubricator Booster Lube D.P. Lube (Unit) Auto Feed Lube Mist Separator Exhaust Cleaner Micro Mist Separator Super Mist Separator Odor Removal Filter Water Separator Micro Mist Separator Drain Separator for Vacuum Filter Regulator Silencer Silencer Silencer Silencer Silencer Silencer Silencer Silencer Quick Exhaust Valve Quick Exhaust Valve with One-touch Fittings Air Regulator Air Regulator Pilot Operated Regulator Miniature Regulator Miniature Regulator Miniature Regulator Compact Manifold Regulator Manifold Regulator 14 14 14 14 14 14 14 14 14 14 14 14 14 15 15 15 14 14 14 14 14 14 5 14 14 14 14 14 13 14 5 5 5 5 5 5 5 5 15 15 14 14 14 14 14 14 14 14

ARM2500/3000 ARP3000 ARX20 AS1F AS21 AS1F (In-line) ASD30F AS1F-U0 AS0 AS000 AS0 AS3500 AS1FE AS000E AS1FG AS1FG (In-line) ASD30FG AS1FM AS20M AS1FM (In-line) ASD30FM AS1F-3 AS1F-D AS1F-D (In-line) ASD30F-D AS20-D AS1F-T AS1F-T (In-line) ASD30F-T AS20-T ASP30F AS21FPQ AS21FPG ASN ASQ ASR ASS ASV AT AU AV2000/3000/4000/5000 AW10 to 40 AW20K to 40K AWD20 to 40 AWM20 to 40

Manifold Regulator Direct Operated Precision Regulator Regulator for 2 MPa Speed Controller Speed Controller Speed Controller Dual Speed Controller Speed Controller with Uni One-touch Fitting Speed Controller Speed Controller Speed Controller Speed Controller Speed Controller Speed Controller Speed Controller Speed Controller Dual Speed Controller Speed Controller Speed Controller Speed Controller Dual Speed Controller Speed Controller Speed Controller Speed Controller Dual Speed Controller Speed Controller Speed Controller Speed Controller Dual Speed Controller Speed Controller Speed Controller Clean Speed Controller Clean Speed Controller Metering Valve with Silencer Air Saving Valve Air Saving Valve Safety Speed Control Valve Speed Exhaust Controller Air Tank Lube Unit Soft Start-up Valve Filter Regulator Filter Regulator Micro Mist Separator Regulator Mist Separator Regulator

14 14 14 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 15 14 14 14 14 14 14 14

17-6-18

Products INDEX in Alphanumerical Order

C76 C76K C76R C76W C85 C85K C85R C85W C95S C95K C95N CA2 CA2H CA2Q CA2K CA2KW CA2W CA2WH CA2Y CBA2 CBG1 CBJ2 CBM2 CC CCT CCVS/CCVL CE1 CE2 CEP1 CEU1 CEU2 CEU5 CG1 CG1Q CG1K CG1KW CG1R CG1W CG1Y CG5-S CH CJ1 CJ2 CJ2K CJ2Q CJ2R CJ2RK CJ2W

Air Cylinder Air Cylinder Air Cylinder Air Cylinder ISO Cylinder ISO Cylinder ISO Cylinder ISO Cylinder ISO/VDMA Cylinder ISO/VDMA Cylinder ISO/VDMA Cylinder Air Cylinder Air-hydro Cylinder Air Cylinder Air Cylinder Air Cylinder Air Cylinder Air-hydro Cylinder Smooth Cylinder Air Cylinder Air Cylinder Air Cylinder Cylinder with End Lock Air-hydro Unit Air-hydro Converter Valve Unit Stroke Reading Cylinder Stroke Reading Cylinder with Brake Precision Stroke Reading Cylinder Preset Counter Controller Multi-counter Air Cylinder Air Cylinder Air Cylinder Air Cylinder Air Cylinder Air Cylinder Smooth Cylinder Stainless Steel Cylinder Hydraulic Cylinder Air Cylinder Air Cylinder Air Cylinder Air Cylinder Air Cylinder Air Cylinder Air Cylinder

6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 10 6 6 6 6 10 10 10 10 10 10 10 10 10 6 6 6 6 6 6 10 10 10 6 6 6 6 6 6 6

CJ2X CJ2Z CJ2ZW CJ5-S CJP CL1 CLG1 CLJ2 CLM2 CLQ CLS CM2 CM2P CM2K CM2KW CM2Q CM2R CM2RK CM2W CM2X CM2Y CNA CNAW CNG CNS CP95S CP95K CP95Q CQ2 CQ2K CQ2KW CQ2W CQM CQP2 CQS CQSS CQSK CQSW CQSX CQ2X CQSY CQ2Y CRA1/CDRA1 CRA1U CRB1 CRB2 CRB2BWU CRBU2

Low Speed Cylinder Air Cylinder Air Cylinder Stainless Steel Cylinder Pin Cylinder Lock-up Cylinder Fine Lock Cylinder Fine Lock Cylinder Fine Lock Cylinder Compact Cylinder with Lock Cylinder with Lock Air Cylinder Air Cylinder Air Cylinder Air Cylinder Air Cylinder Air Cylinder Air Cylinder Air Cylinder Low Speed Cylinder Smooth Cylinder Cylinder with Lock Cylinder with Lock Cylinder with Lock Cylinder with Lock ISO/VDMA Cylinder ISO/VDMA Cylinder ISO/VDMA Cylinder Compact Cylinder Compact Cylinder Compact Cylinder Compact Cylinder Compact Cylinder Compact Cylinder Compact Cylinder Compact Cylinder Compact Cylinder Compact Cylinder Low Speed Cylinder Low Speed Cylinder Smooth Cylinder Smooth Cylinder Rotary Actuator Rotary Actuator Rotary Actuator Rotary Actuator Rotary Actuator Rotary Actuator

10 6 6 10 6 9 9 9 9 9 9 6 6 6 6 6 6 6 6 10 10 9 9 9 9 6 6 6 7 7 7 7 7 7 7 7 7 7 10 10 10 10 11 11 11 11 11 11

17-6-19

CRBU2WU CRJ CRQ2 CS1/CDS1 CS1Q CS1W CU CUJ CUK CUW CUX CV3 CV3K CVJ3 CVJ5 CVM3 CVM3K CVM5 CVMK5 CVRA1 CVS1 CVS1K CXS CXS-A R CXSJ CXT CXW CXWL CXWM CY1B CY1F CY1H CY1L CY1R CY1S CY3B CY3R CYP CYV

Rotary Actuator Mini-rotary Actuator Compact Rotary Actuator Air Cylinder Air Cylinder Air Cylinder Free Mount Cylinder Mini-free Mount Cylinder Free Mount Cylinder Free Mount Cylinder Low Speed Cylinder Valve Mounted Cylinder Valve Mounted Cylinder Valve Mounted Cylinder Valve Mounted Cylinder Valve Mounted Cylinder Valve Mounted Cylinder Valve Mounted Cylinder Valve Mounted Cylinder Rotary Actuator Valve Mounted Cylinder Valve Mounted Cylinder Dual Rod Cylinder Dual Rod Cylinder Compact Dual Rod Cylinder Platform Cylinder Dual Rod Cylinder Slide Unit Slide Unit Magnetically Coupled Rodless Cylinder Magnetically Coupled Rodless Cylinder Magnetically Coupled Rodless Cylinder Magnetically Coupled Rodless Cylinder Magnetically Coupled Rodless Cylinder Magnetically Coupled Rodless Cylinder Magnetically Coupled Rodless Cylinder Magnetically Coupled Rodless Cylinder Clean Room Rodless Cylinder Rodless Cylinder for Vacuum

11 11 11 6 6 6 7 7 7 7 10 10 10 10 10 10 10 10 10 11 10 10 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8 8

DL DM DMK D-90/97 D-90A/93A D-A33/A34/A44

Self-align Fittings Multi-connector Multi-connector Reed Switch Reed Switch Reed Switch

15 15 15 6 11 6 11 6 9 10

D-A33A/A34A/A44A D-A33C/A34C/A44C D-A5/A6 D-A59W D-A7H/A80H D-A72/A73/A80 D-A73C/A80C D-A79W D-A90(V)/A93(V)/A96(V) D-B53/B54/B64 D-B59W D-C73/C76/C80 D-C73C/C80C D-E73A/E76A/E80A D-F59/F5P/J59/J51 D-F59F D-F59W/F5PW/J59W D-F5BAL D-F5NTL D-F79/F7P/J79 D-F79F D-F79W/F7PW/J79W D-F7BA(V)L D-F7NJL D-F7NTL D-F7NV/F7PV/F7BV D-F7NWV/F7BWV D-F8N/F8P/F8B D-F9BAL D-F9G/F9H D-F9NW(V)/F9PW(V)/F9BW(V) D-G39/K39 D-G39A/K39A D-G39C/K39C D-G59/G5P/K59 D-G59F D-G59W/G5PW/K59W D-G5BAL D-G5NBL D-G5NTL D-H7A1/H7A2/H7B D-H7BAL D-H7C D-H7NF D-H7NW/H7PW/H7BW D-J79C D-M5N/M5P/M5B D-M5NTL/M5PTL

Reed Switch Reed Switch Reed Switch Reed Switch Reed Switch Reed Switch Reed Switch Reed Switch Reed Switch Reed Switch Reed Switch Reed Switch Reed Switch Reed Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch

6 9 10 6 9 10 6 9 10 11 6 9 10 11 6 7 8 9 10 11 12 6 7 8 9 10 11 12 6 7 8 9 10 11 12 6 7 8 9 10 11 12 6 7 8 9 10 11 12 6 8 9 10 6 8 9 10 6 8 9 10 6 8 9 10 8 9 10 6 9 10 11 6 9 10 11 6 9 10 11 6 9 10 11 6 9 10 11

Solid State Switch 6 7 8 9 10 11 12 Solid State Switch 6 7 8 9 10 11 12 Solid State Switch 6 7 8 9 10 11 12 Solid State Switch 6 7 8 9 10 11 12 Solid State Switch Solid State Switch 7 6 7 8 9 10 11

Solid State Switch 6 7 8 9 10 11 12 Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch 6 7 8 9 10 7 8 11 12 7 8 9 10 11 12 7 8 9 10 7 8 9 10 11 12 6 9 10 6 9 10 6 9 10 6 8 9 10 6 8 9 10 6 8 9 10 6 8 9 10 6 8 9 10 6 8 9 10 6 8 9 10 6 8 9 10 6 8 9 10 6 8 9 10 6 8 9 10

Solid State Switch 6 7 8 9 10 11 12 Solid State Switch Solid State Switch 9 10 9 10

17-6-20

Products INDEX in Alphanumerical Order

D-M5NW/M5PW/M5BW D-M9N(V)/M9P(V)/M9B(V) D-P5DWL D-R73/R80 D-R73C/R80C D-S79/S7P/T79C D-S99(V)/S9P(V)/T99(V) D-Y59A/Y69A/Y7P(V) B B D-Y7BAL D-Y7G/Y7H D-Y7NW(V)/Y7PW(V)/Y7BW(V) D-Z73/Z76/Z80

Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch Solid State Switch

9 10 7 8 9 10 11 12 6 7 8 9 10 11 11 11 11 6 7 8 9 10 12 6 7 8 9 10 12 6 7 8 9 10 6 7 8 9 10 12 6 7 8 9 10

EVS1-01/1-02 EVS7-6/7-8/7-10

ISO Standard Solenoid Valve: Size 1, 2 ISO Standard Solenoid Valve: Size 1, 2, 3

3 3

G15 G27 G36 GA36 G46 GA46 G33 GA33 G43 G46E G49 G46-SRA/SRB GP46 GD40 GS40 GZ46

Pressure Gauge Pressure Gauge Pressure Gauge Pressure Gauge Pressure Gauge Pressure Gauge Pressure Gauge Pressure Gauge Pressure Gauge Pressure Gauge for Oil-free/External Copper-free Pressure Gauge for Clean Series Pressure Gauge for Clean Regulator Pressure Gauge Pressure Differential Gauge Digital Pressure Sensor Pressure Gauge for Vacuum

14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 13

IDFS IDG IDU IDUS IF3 IFW5 IR1000/2000/3000 IRV1000/2000/3000 IS1000 IS2761 IS3000 ISE1 ISE2 ISE3 ISE30 ISE40 ISE50 ISE60 ISE70 ISE75/75H ISA2 ISG ITV0000 ITV1000/2000/3000 ITV2090/2091

Air Dryer Membrane Air Dryer Refrigerated Air Dryer Air Dryer Paddle Style Flow Switch Diaphragm Style Flow Switch Precision Regulator Precision Regulator for Vacuum Pressure Switch Pressure Switch Pressure Switch Compact Pressure Switch Compact Pressure Switch Digital Pressure Switch Digital Pressure Switch Digital Pressure Switch Digital Pressure Switch Digital Pressure Switch Digital Pressure Switch Digital Pressure Switch Air Catch Sensor General Purpose Pressure Switch Electro-pneumatic Regulator Electro-pneumatic Regulator Electronic Vacuum Regulator

14 14 14 14 16 16 14 14 16 16 16 16 16 16 16 16 16 16 16 16 16 16 14 14 14

JA JAH JB JS

Floating Joint Floating Joint Floating Joint Floating Joint

10 10 10 10

H HAA HAW

Self-align Fittings Air Cooled Aftercooler Water Cooled Aftercooler

15 14 14

IC ID IDF

Controller for Electro-pneumatic Regulator Heatless Air Dryer Refrigerated Air Dryer

14 14 14

KA KB KC KDM KF KG KJ KK KKA KKH KM KP KPQ

Antistatic One-touch Fittings Piping Module Self-seal Fittings Rectangular Multi-connector Insert Fittings Stainless One-touch Fittings Miniature One-touch Fittings S Couplers S Couplers S Couplers One-touch Fittings Manifold Clean One-touch Fittings Clean One-touch Fittings

15 15 15 15 15 15 15 15 15 15 15 15 15

17-6-21

KPG KQ2 KQ-U KR KRM KS KX

Clean One-touch Fittings One-touch Fittings Uni One-touch Fittings FR One-touch Fittings FR One-touch Fittings Manifold Rotary One-touch Fittings Rotary One-touch Fittings

15 15 15 15 15 15 15

L LG1 LJ1 LL LQ1 LQ2 LVA LVC LVD LVH LVN LVQ LX

Self-align Fittings Compact Electric Actuator Single Axis Electric Actuator Self-align Fittings High Purity Fluoropolymer Fittings High Purity Fluoropolymer Fittings Air Operated High Purity Chemical Valve Air Operated High Purity Chemical Valve High Purity Chemical Valve Manually Operated High Purity Chemical Valve High Purity Fluoropolymer Needle Valve Air Operated Chemical Valve Non-Metalic Exterior Short Stroke Electric Actuator

15 10 10 15 17 17 17 17 17 17 17 17 10

M MA MB MBQ MB1 MB1K MB1W MBB MBK MBW MGC MGF MGG MGP MGPS MGQ MGT MGZ MGZR MHC2 MHC2-6 MHCA2-6

Miniature Fittings Auto Hand Changing System Air Cylinder Air Cylinder Square Tube Type Cylinder Square Tube Type Cylinder Square Tube Type Cylinder Air Cylinder Air Cylinder Air Cylinder Compact Guide Cylinder Guide Table Guide Cylinder Compact Guide Cylinder Compact Guide Cylinder Compact Guide Cylinder Cylinder with Turntable Double Power Cylinder Double Power Cylinder Angular Style Air Gripper Angular Style Air Gripper Angular Style Air Gripper

15 12 6 6 6 6 6 6 6 6 8 8 8 8 8 8 8 8 8 12 12 12

MHCM2-7S MHF2 MHK2 MHL2 MHR2/MDHR2 MHR3/MDHR3 MHS2 MHS3 MHS4 MHSH3 MHSJ3 MHSL3 MHT2 MHW2 MHY2 MHZ2 MHZA2-6 MHZAJ2-6 MHZJ2 MHZL2 MIW MIS MK MK2 ML1C ML2B MLGC MLGP MLU MNB MQM MQQ MRHQ MRQ MS MSQA MSQB MSUA MSUB MTS MU MUW MVGQ MXF MXH MXP MXQ MXS

Angular Style Air Gripper Low Profile Air Gripper Wedge Cam Operation Slide Guide Parallel Style Wide Opening Air Gripper Rotary Actuated Air Gripper Rotary Actuated Air Gripper 2 Finger Parallel Style Air Gripper 3 Finger Parallel Style Air Gripper 4 Finger Parallel Style Air Gripper 3 Finger Parallel Style Air Gripper 3 Finger Parallel Style Air Gripper 3 Finger Parallel Style Air Gripper Angular Style Air Gripper 180 Angular Style Air Gripper 180 Angular Style Air Gripper Parallel Style Air Gripper Parallel Style Air Gripper Parallel Style Air Gripper Parallel Style Air Gripper Parallel Style Air Gripper Escapements Escapements Rotary Clamp Cylinder Rotary Clamp Cylinder Mechanically Jointed Rodless Cylinder with Brake Stroke Reading Rodless Cylinder with Brake Fine Lock Cylinder with Guide Low Profile Guide Cylinder with Lock Plate Cylinder with Lock Cylinder with Lock Compact Low Friction Cylinder Compact Low Friction Cylinder Rotary Gripper Rotary Cylinder Miniature Fittings Rotary Table Rotary Table Rotary Table Rotary Table Precision Cylinder Plate Cylinder Plate Cylinder Valve Mounted Guide Cylinder Low Profile Slide Table Compact Slide Precision Air Slide Table Air Slide Table Air Slide Table

12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 10 10 10 10 9 10 9 9 9 9 10 10 12 11 15 11 11 11 11 8 7 7 10 8 8 8 8 8

17-6-22

Products INDEX in Alphanumerical Order

MXU MXW MXY MY1W MY1B MY1C MY1H MY1M MY2C MY2H MY2HT MY3A MY3B

Compact Slide Long Stroke Slide Table Air Slide Table Mechanically Jointed Rodless Cylinder Mechanically Jointed Rodless Cylinder Mechanically Jointed Rodless Cylinder Mechanically Jointed Rodless Cylinder Mechanically Jointed Rodless Cylinder Mechanically Jointed Rodless Cylinder Mechanically Jointed Rodless Cylinder Mechanically Jointed Rodless Cylinder Mechanically Jointed Rodless Cylinder Mechanically Jointed Rodless Cylinder

8 8 8 8 8 8 8 8 8 8 8 8 8

REAH REBR REBH REC RHC RLQ RQ RSA RSG RSH/RS1H RSQ RZQ

Sine Rodless Cylinder Sine Rodless Cylinder Sine Rodless Cylinder Sine Cylinder High Power Cylinder Compact Cylinder with Air Cushion and Lock Compact Cylinder with Air Cushion Stopper Cylinder Stopper Cylinder Heavy Duty Stopper Cylinder Stopper Cylinder 3 Position Cylinder

10 10 10 10 10 9 7 10 10 10 10 10

NCA1 NCM

NFPA Cylinder Air Cylinder

6 6

PA3000/5000 PAX1000 PB1000 PF2A PF2D PF2W PPA PS1000 PS1100 PSE100 PSE200 PSE300 PSE510 PSE530 PSE540 PSE550 PSE560

Process Pump Process Pump Process Pump Digital Flow Switch Digital Flow Switch Digital Flow Switch Compact Manometer Air Checker Air Checker Controller Multi-channel Controller Controller Pressure Sensor Pressure Sensor Compact Pressure Sensor Low Differential Pressure Sensor Pressure Sensor

17 17 17 16 16 16 14 16 16 16 16 16 16 16 16 16 16

S070 SQ1000/2000 SV1000 to 4000 SX3000/5000/7000 SY100 SY3000/5000/7000/9000 SYA3000/5000/7000 SYJ300/500/700 SYJ3000/5000/7000 SYJA300/500/700 SYJA3000/5000/7000 SZ3000

3 Port Solenoid Valve 5 Port Solenoid Valve 5 Port Solenoid Valve 5 Port Solenoid Valve 3 Port Direct Operated Solenoid Valve 5 Port Solenoid Valve 5 Port Air Operated Valve 3 Port Pilot Operated Solenoid Valve 4/5 Port Solenoid Valve 3 Port Air Operated Valve 4/5 Port Air Operated Valve 5 Port Solenoid Valve

4 2 1 1 4 1 5 4 1 5 5 1

RB RBL RBQ REA REAR REAS REAL

Shock Absorber Shock Absorber Shock Absorber Sine Rodless Cylinder Sine Rodless Cylinder Sine Rodless Cylinder Sine Rodless Cylinder

10 10 10 10 10 10 10

T TA TB TBR TCU TFU TG TIA TIL TISA TIUB TK TKS TL TM TMA TPH TPS

Nylon Tubing Antistatic Tubing Tube Stand Tube Reel Polyurethane Coil Tubing Polyurethane Flat Tubing Tube Releasing Tool Nylon Tubing (Inch size) High Purity Fluoropolymer Tubing (Inch size) Soft Nylon Tubing (Inch size) Polyurethane Tubing (Inch size) Tube Cutter Double Layer Tube Stripper High Purity Fluoropolymer Tubing Multi-tube Holder Multi-holder Polyorefin Tubing Soft Polyorefin Tubing

15 15 15 15 15 15 15 15 17 15 15 15 15 17 15 15 15 15

17-6-23

TRB TRBU TRS TS TU TUH TUS

FR Double Layer Tubing FR Double Layer Polyurethane Tubing FR Soft Nylon Tubing Soft Nylon Tubing Polyurethane Tubing Hard Polyurethane Tubing Soft Polyurethane Tubing

15 15 15 15 15 15 15

V100 VBA1110 to 4200 VCA20/30/40 VCB20/30/40 VCL20/30/40 VCS20/30/40 VCW20/30/40 VDW10/20/30 VDW200/300 VEA VEF VEP VER2000/4000 VEX1 VEX130 3 VEX3 VEX5 VF1000/3000/5000 VFA3000/5000 VFM200/300 VFN2000N/3000N VFN200N VFR2000 to 6000 VFRA3000/4000 VFS1000 to 6000 VG342 VGA342 VH VHK VHS20/30/40/50 VHS400/500 VK300 VK3000 VKF300 VM100/200 VM1000 VM400/800 VMG

3 Port Solenoid Valve Booster Regulator Direct Operated 2 Port Solenoid Valve Direct Operated 2 Port Solenoid Valve Direct Operated 2 Port Solenoid Valve Direct Operated 2 Port Solenoid Valve Direct Operated 2 Port Solenoid Valve Compact Direct Operated 2 Port Solenoid Valve Compact Direct Operated 3 Port Solenoid Valve Power Amplifier Electro-pneumatic Proportional Valve Electro-pneumatic Proportional Valve 5 Port Electro-pneumatic Proportional Valve Power Valve Precision Regulator Power Valve Power Valve 5 Port Pilot Operated Solenoid Valve 4/5 Port Air Operated Valve 5 Port Mechanical Valve NAMUR Interface 5 Port Solenoid Valve NAMUR Interface 3 Port Solenoid Valve 5 Port Pilot Operated Solenoid Valve 5 Port Air Operated Valve 5 Port Pilot Operated Solenoid Valve 3 Port Pilot Operated Poppet Solenoid Valve 3 Port Air Operated Valve Hand Valve Finger Valve OSHA Standard 3 Port Pressure Relief Valve 3 Port Pressure Relief Valve 3 Port Direct Operated Poppet Solenoid Valve 5 Port Direct Operated Poppet Valve 3 Port Direct Operated Poppet Solenoid Valve 2/3 Port Mechanical Valve Micro Mechanical Valve 3 Port Mechanical Valve Blow Gun

4 14 17 17 17 17 17 17 17 14 14 14 14 5 14 5 5 3 5 5 3 4 3 5 3 4 5 5 5 5 5 4 3 4 5 5 5 15

VNA VNB VNC VND VNH VP300/500/700 VP3145/3165/3185 VP450/470 VPA300/500/700 VPA3145/3165/3185 VPA450/470 VQ0000/1000/2000 VQ100 VQ20/30 VQ4000 VQ5000 VQ7-6/7-8 VQC1000/2000/4000 VQD1000 VQZ100/200/300 VQZ1000/2000/3000 VR1210/1220 VR1210F/1220F VR1211F VR2110 VR3100 VR3110 VR3200/3201 VR4151/4152 VS3115/3110 VS3135/3145 VS410 VSA420/430/440 VT307 VT317 VT325 VTA301 VTA315 VVX31/32/33 VVXA21/22 VVXA31/32 VX21/22/23 VVX21/22/23 VX31/32/33 VXA21/22 VXA31/32 VXD21/22/23 VXF21/22

Process Valve Process Valve Coolant Valve Steam Valve Coolant Valve 3 Port Pilot Operated Poppet Solenoid Valve 3 Port Solenoid Valve 5 Port Solenoid Valve 3 Port Air Operated Valve 3 Port Air Operated Valve 5 Port Air Operated Valve 5 Port Solenoid Valve 3 Port Solenoid Valve 2 Port Solenoid Valve 5 Port Solenoid Valve 5 Port Solenoid Valve ISO Standard Solenoid Valve: Size 1, 2 5 Port Solenoid Valve 4 Port Direct Operated Poppet Valve 3 Port Solenoid Valve 5 Port Solenoid Valve Shuttle Valve Shuttle Valve with One-touch Fittings AND Valve with One-touch Fittings Time Relay Valve Pneumatic Indicator Miniature Pneumatic Indicator Pneumatic-electric Relay Relay Valve 3 Port Direct Operated Solenoid Valve 3 Port Direct Operated Solenoid Valve Direct Operated Solenoid Valve 4/5 Port Air Operated Valve 3 Port Direct Operated Popper Solenoid Valve 3 Port Direct Operated Popper Solenoid Valve 3 Port Poppet Solenoid Valve 3 Port Air Operated Valve 3 Port Air Operated Valve Direct Operated 3 Port Solenoid Valve/Manifold Direct Air Operated 2 Port Valve/Manifold Direct Air Operated 3 Port Valve/Manifold Direct Operated 2 Port Solenoid Valve Direct Operated 2 Port Solenoid Valve/Manifold Direct Operated 3 Port Solenoid Valve Direct Air Operated 2 Port Valve Direct Air Operated 3 Port Valve Pilot Operated 2 Port Solenoid Valve 2 Port Solenoid Valve

17 17 17 17 17 4 4 3 5 5 5 2 4 17 2 2 3 2 2 4 2 5 5 5 5 5 5 5 5 4 4 3 5 4 4 4 5 5 17 17 17 17 17 17 17 17 17 17

17-6-24

Products INDEX in Alphanumerical Order

VXH22 VXP21/22/23 VXR21/22/23 VXZ22/23 VY1 VZ100/300/500 VZ1000 VZ200/400 VZ3000/5000 VZA200/400 VZA2000/4000 VZM400/500 VZS2000/3000

Pilot Operated 2 Port Solenoid Valve Pilot Operated 2 Port Solenoid Valve Pilot Operated 2 Port Solenoid Valve Pilot Operated 2 Port Solenoid Valve E-P HYREG 3 Port Solenoid Valve 4 Port Solenoid Valve 3 Port Solenoid Valve 5 Port Solenoid Valve 3 Port Air Operated Valve 5 Port Air Operated Valve Mechanical Valve 5 Port Pilot Operated Solenoid Valve

17 17 17 17 14 4 3 4 3 5 5 5 3

ZCUK ZFA ZFB ZFC ZH ZL ZM ZMA ZPR ZPT ZPX ZPY ZQ ZR ZSE1 ZSE2 ZSE3 ZSE30 ZSE40 ZSE50F ZSE60F ZSM1 ZSP1 ZU ZX ZYY/ZYX

Free Mount Cylinder for Vacuum Air Suction Filter Air Suction Filter Air Suction Filter Vacuum Ejector Multistage Ejector Vacuum Ejector Vacuum Ejector Vacuum Pad Vacuum Pad Vacuum Pad Vacuum Pad Compact Vacuum Ejector Large Size Vacuum Module Compact Pressure Switch Compact Pressure Switch Digital Pressure Switch Digital Pressure Switch Digital Pressure Switch Digital Pressure Switch Digital Pressure Switch Vacuum Pressure Switch Adsorption Confirmation Switch Vacuum Ejector Vacuum Module Ejector Valve Unit

13 13 13 13 13 13 13 13 13 13 13 13 13 13 16 16 16 16 16 16 16 16 16 13 13 13

17-6-25

SMCs Global Service Network

America
U.S.A. SMC Corporation of America 3011 North Franklin Road Indianapolis, IN 46226, U.S.A. TEL: 317-899-4440 FAX: 317-899-3102 CANADA SMC Pneumatics (Canada) Ltd. 6768 Financial Drive Mississauga, Ontario, L5N 7J6 Canada TEL: 905-812-0400 FAX: 905-812-8686 MEXICO SMC Corporation (Mexico), S.A. DE C.V. Carr. Silao-Trejo K.M. 2.5 S/N, Predio San Jose del Duranzo C.P. 36100, Silao, Gto., Mexico TEL: 472-72-2-55-00 FAX: 472-72-2-59-44/2-59-46 CHILE SMC Pneumatics (Chile) S.A. Av. La Montaa 1,115 km. 16,5 P. Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 ARGENTINA SMC Argentina S.A. Teodoro Garcia 3860 (1427) Buenos Aires, Argentina TEL: 011-4555-5762 FAX: 011-4555-5762 BOLIVIA SMC Pneumatics Bolivia S.R.L. Avenida Beni Numero 4665 Santa Cruz de la Sierra-Casilla de Correo 2281, Bolivia TEL: 591-3-3428383 FAX: 591-3-3449900 VENEZUELA SMC Neumatica Venezuela S.A. Apartado 40152, Avenida Nueva Granada, Edificio Wanlac, Local 5, Caracas 1040-A, Venezuela TEL: 2-632-1310 FAX: 2-632-3871 PERU (Distributor) IMPECO Automatizacion Industrial S.A. AV. Canevaro 752, Lince, Lima, Peru TEL: 1-471-6002 FAX: 1-471-0935 URUGUAY (Distributor) BAKO S.A. Galicia 1650 esq. Gaboto C.P. 11200, Montevideo, Uruguay TEL: 2-401-6603 FAX: 2-409-4306 BRAZIL SMC Pneumaticos Do Brasil Ltda. Rua. Dra. Maria Fidelis, nr. 130, Jardim Piraporinha-Diadema-S.P. CEP: 09950-350, Brasil TEL: 11-4051-1177 FAX: 11-4071-6636 COLOMBIA (Distributor) Airmatic Ltda. Calle 18 69-05 Apart. Aereo 081045 Santa Fe de Bogot, Colombia TEL: 1-424-9240 FAX: 1-424-9260

Europe
U.K. SMC Pneumatics (U.K.) Ltd. Vincent Avenue, Crownhill, Milton Keynes, MK8 0AN, Backinghamshire, U.K. TEL: 01908-563888 FAX: 01908-561185 GERMANY SMC Pneumatik GmbH Boschring 13-15 D-63329 Egelsbach, Germany TEL: 06103-4020 FAX: 06103-402139 ITALY SMC Italia S.p.A. Via Garibaldi 62 I-20061 Carugate Milano, Italy TEL: 02-9271365 FAX: 02-9271365 FRANCE SMC Pneumatique S.A. 1 Boulevard de Strasbourg, Parc Gustave Eiffel, Bussy Saint Georges, F-77600 Marne La Vallee Cedex 3 France TEL: 01-64-76-10-00 FAX: 01-64-76-10-10 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 SWITZERLAND SMC Pneumatik AG Dorfstrasse 7, Postfach 117, CH-8484 Weisslingen, Switzerland TEL: 052-396-3131 FAX: 052-396-3191 AUSTRIA SMC Pneumatik GmbH (Austria) Girakstrasse 8, A-2100 Korneuburg, Austria TEL: 0-2262-6228-0 FAX: 0-2262-62285 SPAIN SMC Espaa, S.A. Zuazobidea 14 Pol. Ind. Jndiz 01015 Vitoria, Spain TEL: 945-184-100 FAX: 945-184-510 IRELAND SMC Pneumatics (Ireland) Ltd. 2002 Citywest Business Campus, Naas Road, Saggart, Co. Dublin, Ireland TEL: 01-403-9000 FAX: 01-466-0385 NETHERLANDS (Associated company) SMC Pneumatics BV De Ruyterkade 120, NL-1011 AB Amsterdam, Netherlands TEL: 020-5318888 FAX: 020-5318880 GREECE (Distributor) S.Parianopoulos S.A. 7, Konstantinoupoleos Street 11855 Athens, Greece TEL: 01-3426076 FAX: 01-3455578 DENMARK SMC Pneumatik A/S Knudsminde 4 B DK-8300 Odder, Denmark TEL: 70252900 FAX: 70252901

17-6-26

SMCs Global Service Network

Europe
FINLAND SMC Pneumatics Finland OY PL72, Tiistinniityntie 4, SF-02231 ESP00, Finland TEL: 09-8595-80 FAX: 09-8595-8595 NORWAY SMC Pneumatics Norway A/S Vollsveien 13C, Granfoss Nringspark N-1366 LYSAKER, Norway TEL: 67-12-90-20 FAX: 67-12-90-21 BELGIUM (Distributor) SMC Pneumatics N.V./S.A. Nijverheidsstraat 20 B-2160 Wommelgem Belguim TEL: 03-355-1464 FAX: 03-355-1466 POLAND SMC Industrial Automation Polska Sp.z.o.o. ul. Konstruktorska 11A, PL-02-673 Warszawa, Poland TEL: 022-548-5085 FAX: 022-548-5087 TURKEY (Distributor) Entek Pnmatik San.ve Tic. Ltd. Sti Perpa Tic. Merkezi Kat:11 No.1625 80270 Okmeydani Istanbul, Trkiye TEL: 0212-221-1512 FAX: 0212-221-1519 RUSSIA SMC Pneumatik LLC. 36/40 Sredny prospect V.O. St. Petersburg 199004, Russia TEL: 812-118-5445 FAX: 812-118-5449 CZECH SMC Industrial Automation CZ s.r.o. Hudcova 78a, CZ-61200 Brno, Czech Republic TEL: 05-4121-8034 FAX: 05-4121-8034 HUNGARY SMC Hungary Ipari Automatizlsi kft. Budafoki ut 107-113 1117 Budapest TEL: 01-371-1343 FAX: 01-371-1344 ROMANIA SMC Romania S.r.l. Str. Frunzei, Nr. 29, Sector 2, Bucharest, Romania TEL: 01-3205111 FAX: 01-3261489 SLOVAKIA SMC Priemyseln automatizci, s.r.o Nova 3, SK-83103 Bratislava TEL: 02-4445-6725 FAX: 02-4445-6028 SLOVENIA SMC Industrijska Avtomatilca d.o.o. Grajski trg 15, SLO- 8360 Zuzemberk, Slovenia TEL: 07388-5240 FAX: 07388-5249

Oceania/Asia
AUSTRALIA SMC Pneumatics (Australia) Pty.Ltd. 14-18 Hudson Avenue Castle Hill NSW 2154, Australia TEL: 02-9354-8222 FAX: 02-9894-5719 NEW ZEALAND SMC Pneumatics (New Zealand) Ltd. 8C Sylvia Park Road Mt.Wellington Auckland, New Zealand TEL: 09-573-7007 FAX: 09-573-7002 TAIWAN SMC Pneumatics (Taiwan) Co.,Ltd. 17, Lane 205, Nansan Rd., Sec.2, Luzhu-Hsiang, Taoyuan-Hsien, TAIWAN TEL: 03-322-3443 FAX: 03-322-3387 HONG KONG SMC Pneumatics (Hong Kong) Ltd. 29/F, Clifford Centre, 778-784 Cheung, Sha Wan Road, Lai Chi Kok, Kowloon, Hong Kong TEL: 2744-0121 FAX: 2785-1314 SINGAPORE SMC Pneumatics (S.E.A.) Pte. Ltd. 89 Tuas Avenue 1, Jurong Singapore 639520 TEL: 6861-0888 FAX: 6861-1889 PHILIPPINES SHOKETSU SMC Corporation Unit 201 Common Goal Tower, Madrigal Business Park, Ayala Alabang Muntinlupa, Philippines TEL: 02-8090565 FAX: 02-8090586 MALAYSIA SMC Pneumatics (S.E.A.) Sdn. Bhd. Lot 36 Jalan Delima1/1, Subang Hi-Tech Industrial Park, Batu 3 40000 Shah Alam Selangor, Malaysia TEL: 03-56350590 FAX: 03-56350602 SOUTH KOREA SMC Pneumatics Korea Co., Ltd. Woolim e-BIZ Center (Room 1008), 170-5, Guro-Dong, Guro-Gu, Seoul, 152-050, South Korea TEL: 02-3219-0700 FAX: 02-3219-0702 CHINA SMC (China) Co., Ltd. 7 Wan Yuan St. Beijing Economic & Technological Development Zone 100176, China TEL: 010-67882111 FAX: 010-67881837 THAILAND SMC Thailand Ltd. 134/6 Moo 5, Tiwanon Road, Bangkadi, Amphur Muang, Patumthani 12000, Thailand TEL: 02-963-7099 FAX: 02-501-2937 INDIA SMC Pneumatics (India) Pvt. Ltd. D-107 to 112, Phase-2, Extension, Noida, Dist. Gautaim Budh Nagar, U.P. 201 305, India TEL: (0120)-4568730 FAX: 0120-4568933 INDONESIA (Distributor) P.T. Riyadi Putera Makmur Jalan Hayam Wuruk Komplek Glodok Jaya No. 27-28 Jakarta 11180 Indonesia TEL: 021-625 5548 FAX: 021-625 5888 PAKISTAN (Distributor) Jubilee Corporation First Floor Mercantile Centre, Newton Road Near Boulton Market P.O. Box 6165 Karachi 74000 Pakistan TEL: 021-243-9070/8449 FAX: 021-241-4589 ISRAEL (Distributor) Baccara Automation Control Kvutzat Geva 18915 Israel TEL: 04-653-5960 FAX: 04-653-1445 SAUDI ARABIA (Distributor) Assaggaff Trading Est. P.O. Box 3385 Al-Amir Majed Street, Jeddah-21471, Saudi Arabia TEL: 02-6761574 FAX: 02-6708173

SOUTH AFRICA (Distributor) Hyflo Southern Africa (Pty.) Ltd. P.O.Box 240 Paardeneiland 7420 South Africa TEL: 021-511-7021 FAX: 021-511-4456 EGYPT (Distributor) Saadani Trading & Ind. Services 15 Sebaai Street, Miami 21411 Alexandria, Egypt TEL: 3-548-50-34 FAX: 3-548-50-34

17-6-27

17-6-28

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