Wyko Optical Profilers: Most Repeatable Step Measurements

By: Mike Zecchino,

Veeco Instruments Inc.

Introduction
Optical profiling (white light interferometry) is a standard Figure 1. Optical profilers measure step heights from
technique for accurately assessing step heights and other nanometers (magnetic recording head, left) to millimeters
surface topography. Wyko® NT Series optical profilers (SU-8 photo-resist, right, courtesy EV Group).
have long led the industry with hardware and software
advances that have improved step measurement range, Repeatability Over Entire Range
speed and repeatability. The advanced Wyko NT8000
has now made it possible to obtain step measurement from In a recent study, the repeatability of three Wyko NT8000
several nanometers to many millimeters, with excellent profilers was compared over step measurements ranging
repeatability, stability, and tool-to-tool correlation. from 90 nm to 5 mm. Each step was measured thirty times
on each system, and the standard deviations were
computed (Table 1). Repeatability far below 0.05 % was
Multiple Measurement Modes demonstrated across the entire measurement range. The
reference signal enables repeatability below 0.02 % for
The NT8000’s capability is due in large part to the variety steps over 100 µm, even at high scan speeds. The
of measurement techniques it supports. Phase Shifting NT8000 was shown to be 5-50 times more repeatable
Interferometry (PSI) offers sub-nanometer resolution for steps than the stated performance of competing systems, even
less than 160 nm. Vertical Scanning Interferometry (VSI)
at 10 times the scan speed.
enables step measurements up to eight millimeters. A third
mode, unique to Wyko profilers, is Enhanced Vertical Standard Stnd Dev
Scanning Interferometry (EVSI). EVSI combines the x100 Measurement
Step (µm) Deviation Step Height
resolution of PSI with the range of VSI for roughness and Mode
(nm) (%)
step assessment on difficult-to-measure surfaces.
0.090 0.008 0.009 PSI
1 0.14 0.016 EVSI
2 0.17 0.010 EVSI
Capable Hardware 4 0.34 0.008 EVSI
8 0.36 0.004 EVSI
The NT8000 also benefits from a wealth of hardware 25 5.74 0.022 VSI*
improvements that have increased its capabilities and 50 8.31 0.017 VSI*
lowered its noise floor. The addition of an on-board, 100 15.5 0.015 VSI*
distance-measuring interferometer allows constant 200 34.4 0.017 VSI*
calibration of the scanner’s position to a primary standard. 500 24.0 0.005 VSI*
Advanced stages and electronics maintain high-resolution, 1000 56.4 0.006 VSI*
even at scan speeds of 100 µm/second. 2000 74.4 0.004 VSI*
5000 155.4 0.003 VSI*

Table 1. Step Measurement Repeatability. *with reference signal

Figure 2. Excellent tool-to-tool correlation between Wyko
NT8000 systems.
Tool-to-Tool Correlation
Production-grade metrology requires not only repeatability
but also excellent correlation across multiple tools. This
requirement is particularly important to manufacturers
whose process and quality control data must correlate
from factory to factory, even internationally. Correlation is
described by R2, the square of the correlation coefficient.
Manufacturers typically require an R2 value greater than
0.9 for metrology systems.
To demonstrate correlation between three NT8000
profilers, step measurements from 1 µm to 5 mm were
performed ten times each, on each system. Figure 2
shows that the systems exhibited correlation well in excess
of 0.99 over the entire measurement range. Such high
correlation is a major factor in manufacturers’ decisions to
use Wyko NT8000 systems in demanding production
roles worldwide.
Stability
Thirdly, gauge-capable metrology systems must be able to
exhibit measurement repeatability across time. To
demonstrate long-term stability, a 8.41 µm step was
Solutions for a nanoscale world.
Figure 3. NT8000 stability over a 16-day period.
measured thirty times per day over a 16-day period. One
NT8000 system employing VSI mode and reference signal
was used for the test.
Figure 3 shows the average measured values for each
day. The standard deviation of the NT8000 measurements
was only 0.15 %, despite an eight-degree temperature
swing during the test period. The Wyko NT8000’s ability
to self-calibrate each measurement to a primary standard
ensures long-term stability, without manual calibration.
Conclusion
Reliable, repeatable data is critical in both lab and
production measurement applications. Innovative hardware
that supports multiple measurement modes makes it
possible for Wyko NT8000 optical profilers to maintain
high repeatability for step measurements from nanometers
to millimeters. No other system approaches the NT8000’s
combination of measurement accuracy, speed,
repeatability, range and flexibility.
Veeco Instruments Inc.
2650 E. Elvira Road
Tucson, AZ 85706 USA
520-741-1044 · 1-888-24-VEECO
Visit www.veeco.com
AN521-1-0404
© 2004 Veeco Instruments Inc. All rights reserved.
Wyko is a registered trademark of Veeco Instruments Inc.