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Article history: Microcantilever based oscillators have shown the possibility of highly sensitive label-free detection by
Received 14 April 2010 allowing the transduction of a target mass into a resonant frequency shift. Most of such measurements
Received in revised form 9 July 2010 were performed in air or vacuum environment, since immersion in liquid dramatically deteriorates the
Accepted 29 July 2010
mechanical response of the sensor. Besides, the integration of microcantilever detection in a microfluidic
Available online 5 August 2010
platform appears a highly performing technological solution to exploit real time monitoring of biomolec-
ular interactions, while limiting sample handling and promoting portability and automation of routine
Keywords:
diagnostic tests (Point-Of-Care devices). In the present paper, we report on the realization and opti-
Lab-on-Chip
Microcantilever
mization of a microcantilever-based Lab-on-Chip, showing that microplates rather than microbeams
Real-time exhibit largest mass sensitivity in liquid, while pirex rather than polymers represents the best choice for
Protein detection microfluidic channels. Maximum Q factor achieved was 140 (for fifth resonance mode of Pirex prototype),
Angiogenesis as our knowledge the highest value reported in literature for cantilever biosensors resonating in liquid
environment without electronic feedback. Then, we proved the successfully detection of Angiopoietin-1
(a putative marker in tumor progression), showing that the related frequency shifts coming from non-
specific interactions (negative controls) are roughly one order of magnitude lower than typical variations
due to specific protein binding. Furthermore, we monitored the formation of antibody–antigen com-
plex on MC surface in real-time. The proposed tool could be extremely useful for the comprehension of
complex biological systems such as angiogenic machinery and cancer progression.
© 2010 Elsevier B.V. All rights reserved.
0956-5663/$ – see front matter © 2010 Elsevier B.V. All rights reserved.
doi:10.1016/j.bios.2010.07.114
1566 C. Ricciardi et al. / Biosensors and Bioelectronics 26 (2010) 1565–1570
important drawback in MC-based biosensing (Waggoner and Four main objectives can be identified in the following work: (I)
Craighead, 2007). Moreover, operation in liquid assures the reduc- optimization of sensor geometry (in particular, MC aspect ratio); (II)
tion of the risk of breaking the MCs in transporting them between optimization of microfluidic platform (in particular, best choice for
different environments as well as during the drying procedure. materials of microchannels and interconnections); (III) successfully
Finally, in vacuum conditions, residual salt precipitated from the in liquid detection of Ang-1 (with respect to negative controls); (IV)
buffer solution, employed in cleaning or functionalization steps, observation of antibody–antigen real-time kinetics.
could remain on cantilever surfaces thus invalidating target mass
estimation (Liu et al., 2009). 2. Materials and methods
Recent literature contains some interesting studies about can-
tilevers vibrating in liquid performed under static fluid conditions 2.1. Reagents
(Campbell and Mutharasan, 2005a; Park et al., 2005). Campbell and
Mutharasan (2005b) performed measurements using millimeter- 3-Aminopropyltriehoxysilane (APTES, anhydrous, 99% Aldrich),
sized cantilever partially immersed in a static liquid; this approach glutaraldehyde (GA, 25%, v/v, water solution) and toluene
has the disadvantage to register a decrease of volume during the (anhydrous, 99.8% Aldrich) were used without any further purifi-
experiment due to the evaporation and consequently it requires a cation. Sulphuric acid (95–97%, w/w) and hydrogen peroxide
more complex calibration. It is worth to note that almost all the (30%, w/w) were also purchased from Sigma–Aldrich. Ortho-
experiments concerning cantilevers immersed in liquid are carried boric acid and sodium chloride used to prepare borate buffer
out in commercial or home-made fluid cell (Arntz et al., 2003; Braun were ACS reagents (assay ≥ 99.5%) and were obtained from
et al., 2005; Ghatkesar et al., 2008; Moulin et al., 2000; Vančura et Sigma–Aldrich. Recombinant Protein G, purified from Streptococ-
al., 2005) with volume from tens of microliters to 2 mL, in which cus, was from PIERCE. Ang-1 was obtained from R&D Systems,
the device is placed and sealed through o-ring or rubber membrane. while the anti-Ang-1 (A0604) mAb was from SIGMA. Dulbecco’s
Maraldo et al. (2007a, 2007b) and Campbell et al. (2007) obtained Phosphate-Buffered Saline (PBS; BE17-512F) was procured from
great results in biomolecules mass detection at different concentra- BioWhittaker/Cambrex.
tions by piezoelectric-excited millimeter-sized cantilever (PEMC).
Since the cantilevers are made individually and manually, a low 2.2. LOC fabrication
reproducibility and repeatability in fabrication process is obtained.
In addition their design is difficult to be integrated in standard low The cantilever chips were fabricated starting from Silicon On
cost production both for what concerns the materials and the pro- Insulator (SOI) wafers with the following layers and thicknesses:
cesses. The large dimension of the PEMC forces to design a wide polished silicon device layer of 7 ± 0.5 m, silicon handle layer of
housing flow cell and the fabrication processes are not easy to 450 ± 5 m, buried and backside oxide layers 1.5 ± 0.1 m. The pro-
integrate in Lab-on-Chip (LOC) technology. cess flow is composed of the following steps: photolithography on
Very few works report a fluidic circuit integrated on microcan- the back side, wet etching in Buffered Oxide Etch (BOE) solution for
tilever sensor device (Park et al., 2008; Thaysen et al., 2001). Aubin the patterning of the mask layer on the back side, front side pro-
et al. (2005) presented a design of integration between resonator tection with a polymeric coating (Protek B2 from Brewer Science),
sensor array and microfluidic channel using micromachining pro- wet etching in KOH solution, sample cleaning, photolithography
cesses. Since the dimensions of their resonators are about 10 m, on the front side of the membrane, Reactive Ion Etching (RIE) of
during the measurements, the microfluidic channels hosting the silicon, removal of the buried oxide layer in BOE and cleaning
sensors are pumped down to a pressure where damping effects by piranha solution (Canavese et al., 2007). The complete process
become negligible. This last solution appears to be expensive and flow, together with additional MC fabrication details, is reported in
does not promote integration and device portability. Supplementary material.
It is clear, therefore, that MC biosensors would benefit in Three different materials (SU-8, PDMS, Pirex) and relative
case of integration with microfluidic technology; advantages process fabrication were chosen for three different microfluidic
such as reduction of volume reagents and time assay, in situ prototypes of LOC for the integration with microcantilever sen-
measurements and high level of automation are evident. More- sors. All layouts have at least two wells (roughly 2 L in volume,
over, diagnostic biosensing protocols, as well as single-molecule each), in order to perform different biodetection experiments
detection, could express their practical potentiality only with simultaneously. Polydimethylsiloxane (PDMS) was selected for the
microfluidic assembly, where total fluidic volumes is minimized, fabrication of the microfluidic interconnection for its peculiar char-
recirculation procedure can be created to achieve enhanced acteristics as biocompatibility, transparency, cost-efficiency, etc.
binding probabilities, and the environment to which the sensor is A particular interconnection layout requiring no external clamp-
exposed can be actively controlled. ing or gluing was studied. For all the prototypes were adopted the
In this paper, we report on the realization and optimization same PDMS microfluidic reversible interconnections designed and
of a MC-based LOC to perform in liquid real-time detection of fabricated as described in a previous study (Quaglio et al., 2008).
specific proteins. We chose Angiopoietin-1 (Ang-1) as our target A picture and a 3D sketch of the device, together with impor-
molecule representative of the wide range of angiogenic factors, tant parts of the experimental set-up are reported in Fig. 1a and b,
whose expression level is largely investigated in different tumors. respectively.
Angiopoietin-1 and -2 are oligomeric-secreted glycoprotein ligands Processes flow description as well as fabrication details are
of the receptor tyrosine kinase Tie-2 (Davis et al., 1996). Even if reported in Supplementary material.
it is well established that the Ang–Tie-2 pathway is involved in
tumor angiogenesis, the exact effects of angiopoietins on tumor 2.3. Experimental set-up and data analysis
angiogenesis are under debate (Metheny-Barlow and Li, 2003).
Nevertheless experimental and clinical studies have demonstrated Cantilever vibrational characteristics were measured using an
that increased expression of Ang-1 and -2 promotes or inhibits apparatus in which a function generator (HP 33120A) produced
tumor angiogenesis (Yu, 2005), suggesting that Ang-1 is a pro- a sinusoidal signal that was amplified and sent to a piezoelectric
angiogenic factor that promotes endothelial cell survival and tumor actuator (PI Ceramic). Cantilever resonance curves were monitored
angiogenesis, especially in the presence of vascular endothelial using an optical lever read-out (laser diode and PSD by Hama-
growth factor. matsu): the current output of the PSD was amplified and converted
C. Ricciardi et al. / Biosensors and Bioelectronics 26 (2010) 1565–1570 1567
Silicon MCs were soaked into piranha solution (70% H2 SO4 :30%
H2 O2 ) for 15 min, rinsed with doubly distilled water and dried in
a stream of nitrogen; after that, a silicon oxide film was grown
on them by thermal oxidation at 1100 ◦ C in O2 atmosphere for
3 h. Freshly cleaned MC were then incubated with 1% (v/v) solu-
tion of APTES in toluene at 60 ◦ C for 10 min. Silane-coated MCs
were rinsed several times with toluene and dried with nitrogen.
Freshly silanized-MCs were then incubated in a 1% GA solution
(in borate buffer 0.1 M, pH 8.8) for 1 h using an orbital shaker at
100 rpm. After 15 min of incubation, 300 L of a solution of sodi-
umcyanoboro hydride (5 M) in NaOH have been added to reduce
the imine (–N CH–) formed from the reaction between –NH2 and
–CHO moieties. After incubation, MCs have been rinsed several
times with doubly distilled water and dried in a stream of nitro-
gen (Ricciardi et al., 2010). Then, 60 L of protein G solution (PtG,
0.05 mg/mL) in PBS was pumped at 0.5 L/min through microfluidic
channels on functionalized cantilever for 2 h at room tempera-
ture. Afterward, Tween 20 (0.05% in PBS) was pumped for 30 min
to remove non-specifically bound proteins. After protein G bind-
ing, 30 L of anti-Ang-1 mAb (A0604) solution in PBS (0.05 mg/mL)
were pumped on cantilever surface and the incubation performed
Fig. 1. Microcantilever-based LOC: (a) picture and (b) 3D sketch. Most important for 2 h at room temperature. After this, channels and cantilevers
parts of the device are labeled as: (1) PDMS interconnections; (2) cantilever chip;
were washed with PBS. Antigen recognition was carried out by
(3) microfluidic platform (Pirex, SU-8 or PDMS); (4) piezo disk; (5) Peltier cell; (6)
heat sink.
flowing 30 L of Ang-1 solution in PBS (25 g/mL) at controlled
temperature 23 ± 0.2 ◦ C at a flow rate of 0.5 L/min.
Table 1
Measured frequency shifts and relative frequency changes for Ang-1 at 25 g/mL,
negative control 1 and 2. See text for further details.
Fig. 4. Histogram of average relative frequency deviation for Ang-1 specific binding,
negative control 1 (PBS on Ab-coated MC) and negative control 2 (Ang-1 on Ab-
uncoated MC).
than microbeams exhibit largest mass sensitivity in liquid, while Campbell, G.A., Uknalis, J., Tu, S.I., Mutharasan, R., 2007. Biosens. Bioelectron. 22,
pirex rather than polymers represents the best choice for microflu- 1296–1302.
Canavese, G., Marasso, S.L., Quaglio, M., Cocuzza, M., Ricciardi, C., Pirri, C.F., 2007. J.
idic channels. Maximum Q factor achieved was 140 (for fifth Micromech. Microeng. 17, 1387–1393.
resonance mode of Pirex prototype), as our knowledge the highest Davis, S., Aldrich, T.H., Jones, P.F., Acheson, A., Compton, D.L., Jain, V., Ryan, T.E.,
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