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Data Data
CF (#/cm3)
5.0E+11 Original
4.0E+11 CF2*
3.0E+11
2.0E+11
1.0E+11
0.0E+00
0 500 1000 1500 2000
Power (W)
2.0E+12 1.4E+14
1.8E+12
1.2E+14
1.6E+12
1.4E+12
CF2 F
1.0E+14
CF2 (#/cm3)
1.2E+12 F (#/cm3)
Original 8.0E+13 Original
1.0E+12
CF2* CF2*
8.0E+11 6.0E+13
6.0E+11
4.0E+13
4.0E+11
2.0E+11 2.0E+13
0.0E+00 0.0E+00
0 500 1000 1500 2000 0 500 1000 1500 2000
Power (W) Power (W)
T. Mori, M.Sasaki, T Nishizuka and T. Nozawa, 55th AVS, PS-TuM10
T. Mori, M.Sasaki, T Nishizuka and T. Nozawa, 55th AVS, PS-TuM10
13
Reaction model
-Charged species: e-, Br-, Ar+, HBr+, Br+, Br2+, SiBr2+, and SiBr+
-Neutral species: Ar, Ar*, HBr, Br, Br2, H2, H, SiBr2, SiBr, and Si
-Electron impact reactions: Ionization, excitation, dissociation,
attachment, and recombination
-Ion – neutral reactions
-Ion – ion reactions
-Molecule – molecule reactions
14
SiBr
49 Electrons
15
e + SiBr >
1000
Ionisation Elastic
100
10
0.1
0 2 4 6 8 10 12 14 16 18 20
Energy (eV)
SiBr2
84 Electrons
10
0.1
0.01
0.001
0.0001
1E-05
1E-06
0 2 4 6 8 10 12 14 16 18 20
Energy (eV)
Surface reactions with Walls
19
H
H
H
Br
HBr
Br2 H2
Open
HBr
H
Br
Br
Br
Surface reactions with wafer
20
ER / si i SiBr SiBr2 Si SiBr SiBr2 Si Si SiBr SiBr
SiH H H2
H Br HBr
Si H HBr
Ion SiBr2
Ion SiBr
SiBr2 SiBr
Br2 Br
H HBr
SiBr SiBr2
Si SiBr
SiBr2 SiBr
SiBr
Br
Br2 Br
21 Simulation model
• Comsol
• Incompressible Navier-Stokes (INSM)
• Convection and diffusion transport (CDTM)
• Convection and conduction heat transport (CCHT)
• Transverse electromagnetic wave propagation (TEM)
• Gas flow
• Electron temperature
• Charged particles
• Neutral particles
Gases
inlet
Without
SiBrx 6.6e13
1.5e13 4.6e11
reactions
Electron distributions are localized near top, because microwave heat comes from top.
Br negative ion produced both inlet and near wafer because of attachment reaction of SiBrx.
SiBr2 in case with SiBrx reactions is localized near wafer because there are reactions of SiBr2.
100 mTorr
24 SiBr2 SiBr Si
1.8e13
1.9e13 5.7e12
SiBr2+ SiBr+
Flux (#/cm2 s)
40
1.5E+16
Without SiBrx 70
80
reactions 1.0E+16
100
5.0E+15
0.0E+00
Ar+ Br+ HBr+ SiBr+ Br2+ SiBr2+
5.0E+15
4.0E+15
Flux (#/cm2 s)
Including SiBrx 40
3.0E+15
70
reactions 80
2.0E+15
100
1.0E+15
0.0E+00
Ar+ Br+ HBr+ SiBr+ Br2+ SiBr2+
26
180
150
30
0
0 50 100 150
Pressure (mTorr)
General conclusions:
27
Thank you for listening
Brought to you by:
Dr. Josef Brcka & Dr. Song-Yun Kang (for 2D Comsol model)
T. Mori, M.Sasaki, T Nishizuka & T. Nozawa (for experiment)