OPM XDAL237 952-589 en

Operator's Manual
FISCHERSCOPE® X-RAY XDAL® 237
Coating Thickness Material Analysis Microhardness Material Testing

Operator’s Manual
X-ray fluorescence (EDXRF) measuring instrument

For coating thickness measurements and materials analysis according to the energy dispersive
X-ray fluorescence method
Document order number: 952-589

Issue date: December 7, 2016
Manufacturer
Helmut Fischer GmbH Phone: +49 (0) 70 31 3 03 - 0

Institut für Elektronik und Messtechnik Fax: +49 (0) 70 31 3 03 - 710
Industriestraße 21 www.helmut-fischer.com
D-71069 Sindelfingen mail@helmut-fischer.de
On our home page www.helmut-fischer.com you will find the addresses of our sole agencies and
subsidiary companies around the globe.
Quality Assurance System of the Helmut Fischer GmbH
DIN EN ISO 9001:2008 Management system certified by DNV GL - Business Assurance
DIN EN ISO/IEC 17025 Calibration lab accredited for certified mass per unit area stan-
dards
© 2016 by Helmut Fischer GmbH Institut für Elektronik und Messtechnik, Germany.
This operator’s manual remains the copyrighted property of Helmut Fischer GmbH. All rights
reserved. This manual may not be reproduced by any means (print, photocopy, microfilm or any
other method) in full or in part, or processed, multiplied or distributed to third parties by electronic
means without the written consent of Helmut Fischer GmbH.
Subject to correction and technical changes.
FISCHERSCOPE® and XDAL® are registered trade marks of the Helmut Fischer GmbH Institut für
Elektronik und Messtechnik in Germany and/or other countries.
Note: The fact, that the trademark characters ® and ™ may be missing does not indicate that such
names are free trademarks.
Table of Contents
Table of Contents
1 Safety Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.1 Read the Operator’s Manual Carefully Before Operating. . . . . . . . . . . . . . . . .9
1.2 Warning Notices Used . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9
1.3 Intended Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9
1.4 Safety of the Electrical Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.5 Maintenance and Repair . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.6 X-Radiation Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.7 Requirements for the Operating Personnel . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.8 Frequently Asked Questions Concerning X-Radiation Safety . . . . . . . . . . . . . . 13
2 Instrument Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.1 Areas of Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.2 Standard-free Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.3 X-Ray Fluorescence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
2.4 Functional Principle of the Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
2.5 Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
3 Set up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.1 Set-up Location . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.2 Unpacking the Measuring System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
3.3 Removing the Shipping Lock. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
3.4 Establishing Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
3.5 Switching on the Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
3.6 Switching off the Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
3.7 Communication between Instrument and WinFTM . . . . . . . . . . . . . . . . . . . . . 29
4 Position Specimen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
4.1 Flat Specimens . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
4.2 Cylindrical or Curved Specimens . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
4.3 Measurements in Recesses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
4.4 Measurements on Inclines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
4.5 Positioning of Specimen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
4.6 Position the Specimen by Using the Mouse . . . . . . . . . . . . . . . . . . . . . . . . . 34
5 Performing Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
FISCHERSCOPE® X-RAY 3
Table of Contents
6 User Interface of the WinFTM Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

6.1 WinFTM Main Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
6.2 Video Image. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
6.3 Statistics Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
6.4 Measurement Value Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
6.5 Status Bar. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
6.6 mq Value . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
6.7 Limited Operating Mode - Short menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
6.8 The Spectrum Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
7 WinFTM File Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53

7.1 Def.MA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
7.2 Measurement Application. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
7.3 Product . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
8 Product Administration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
8.1 Creating a Product . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
8.2 Changing the Properties of a Product . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
8.3 Importing a Product . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
8.4 Deleting a Product . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
8.5 Assigning a new Measuring Application to a Product . . . . . . . . . . . . . . . . . . 59
8.6 Modifying a Measuring Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
8.7 Copying a Measuring Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
8.8 Deleting a Measuring Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
8.9 Viewing the Def.MA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
8.10 Importing a Def.MA. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
9 Handling of Measurement Readings and Statistical Evaluations . . . . . . . . . . . . . 63

9.1 Block . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
9.2 Setting the Block Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
9.3 Closing a Block. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
9.4 Labeling a Block . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
9.5 Deleting Measurement Readings or Blocks . . . . . . . . . . . . . . . . . . . . . . . . . . 65
9.6 Saving/not Saving Measurement Readings . . . . . . . . . . . . . . . . . . . . . . . . . 66
9.7 Overwriting a Measurement Reading . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
9.8 Evaluating Individual Blocks (Block Result) . . . . . . . . . . . . . . . . . . . . . . . . . . 67
9.9 Evaluating all Blocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
4 FISCHERSCOPE® X-RAY
Table of Contents
10 Setting Up the Print Form Using PDM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69

10.1 Statistical Evaluation and Documentation Using the
Supplementary Software PDM69
10.2 Editing Print Form Templates Using PDM . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
10.3 Inserting Variables for Print Form Templates . . . . . . . . . . . . . . . . . . . . . . . . . 71
10.4 Variables Available for Block Evaluation . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
10.5 Variables Available for the Final Evaluation . . . . . . . . . . . . . . . . . . . . . . . . . 76
10.6 Products with a Variable or Fixed Block Size . . . . . . . . . . . . . . . . . . . . . . . . 79
10.7 Special Features for SPC Charts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
10.8 Printing the Print Form Using the Supplementary Software PDM . . . . . . . . . . . 82
11 Measurement Uncertainty and Measuring Ranges . . . . . . . . . . . . . . . . . . . . . . . 83

11.1 Meaning of the Measurement Uncertainty . . . . . . . . . . . . . . . . . . . . . . . . . . 84
11.2 Random Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
11.3 Systematic Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
11.4 Display of the Measurement Uncertainty . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
12 Task Programming . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
12.1 Starting a Task . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
12.2 Programming Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
12.3 Getting Started with Task Programming . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
12.4 Syntax of Task Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
12.5 List of Task Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
12.6 Example Specification Limit Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
13 Data Back-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
14 Mass per Unit Area and Geometric Coating Thickness . . . . . . . . . . . . . . . . . . . . 96

14.1 Correlation between Mass per Unit Area and Coating Thickness . . . . . . . . . . 98
14.2 Calibration Standards from FISCHER. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
14.3 Setting the Density in the Def.MA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
15 Measurement Device Monitoring for the FISCHERSCOPE X-RAY . . . . . . . . . . . . 102

15.1 Calibration of X-ray Fluorescence Measuring Instruments . . . . . . . . . . . . . . . 102
15.2 Why Monitor Measurement Devices? . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104
15.3 Variation of Measurement Readings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
15.4 Trueness of Measurement Readings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
15.5 Random and Systematic Deviations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
15.6 Trueness and Precision. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
Table of Contents
15.7 Practical Monitoring of the Measurement Devices . . . . . . . . . . . . . . . . . . . . 111

15.8 When and how to Carry out Corrections? . . . . . . . . . . . . . . . . . . . . . . . . . 113
15.9 Pre-run for Determining the Control Limits . . . . . . . . . . . . . . . . . . . . . . . . . . 114
15.10 Long-Term Monitoring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119
16 Def.MA. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121
16.1 The Def.MA Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121
16.2 Creating a new Def.MA. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122
16.3 Entering Compensation Spectra . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123
16.4 Display the Measurement Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 125
17 Programming Coordinates for Automatic Measurements . . . . . . . . . . . . . . . . . 127

17.1 Point & Shoot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128
17.2 Point & Save. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128
17.3 Point & Measure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128
17.4 Traveling to any Desired Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129
17.5 Opening and Closing the Window XY(Z) coordinates . . . . . . . . . . . . . . . . . 130
17.6 Deleting Programmed Coordinates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131
17.7 Programming Individual Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132
17.8 Programming a Line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132
17.9 Programming an Array . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
17.10 Same Programming on Multiple Parts (Points + Pattern) . . . . . . . . . . . . . . . . 133
17.11 Circular Coordinates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135
17.12 Programming Datum Points. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 136
17.13 Traveling to All Programmed Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 137
18 Calibration and Base Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139

18.1 Base Correction (Substrate Material Correction) . . . . . . . . . . . . . . . . . . . . . 139
18.2 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140
19 Solution Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147

19.1 Structure of the Measuring Cell . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
19.2 Filling the Measuring Cell. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 148
19.3 Positioning the Measuring Cell . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149
19.4 Cleaning the Measuring Cell After Use . . . . . . . . . . . . . . . . . . . . . . . . . . . 150
19.5 Def.MA and Product for the Solution Analysis. . . . . . . . . . . . . . . . . . . . . . . 150
20 Measurement Data Export . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 155

20.1 Starting the Measurement Data Export . . . . . . . . . . . . . . . . . . . . . . . . . . . . 155
20.2 Export Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 156
20.3 Setting up an Export Template . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 158
Table of Contents
21 Pattern Recognition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163

21.1 Scenarios: Pattern Recognition, XY Programming and Task Programming . . . 163
21.2 Settings and their Meaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 164
21.3 Pattern Recognition: Contact Pads of SMD Components . . . . . . . . . . . . . . . 166
21.4 Pattern Recognition: Measurements on Printed Circuit Boards . . . . . . . . . . . . 170
22 Cleaning and Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 177

22.1 Cleaning the Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 177
22.2 Never Clean Calibration Standards! . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 177
22.3 Replacing the Line Fuse . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 178
22.4 Preparing the Instrument for Transport . . . . . . . . . . . . . . . . . . . . . . . . . . . . 179
22.5 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180
23 Addendum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 183
23.1 Description of the Characteristic Statistical Parameters. . . . . . . . . . . . . . . . . 183
23.2 Periodic Table of the Elements with X-Ray Properties . . . . . . . . . . . . . . . . . . 192
Data Sheet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 193
WinFTM Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 197
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . I
EC DECLARATION OF CONFORMITY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . V
Table of Contents
Safety Information
1 Safety Information
1.1 Read the Operator’s Manual Carefully Before Operating
 Make sure to read this Operator’s Manual carefully before taking the instrument into operation.
 Keep the manual in a safe place, so that you will be able to consult it whenever necessary.
1.2 Warning Notices Used
ATTENTION Indicates a risk that can lead to damage or destruction of the product.
CAUTION Indicates a risk that can lead to light or moderate injuries.
WARNING Indicates a risk that can lead to death or serious injuries.
DANGER Indicates a risk that will lead immediately to death or serious injuries.
1.3 Intended Use
The FISCHERSCOPE X-RAY is used for coating thicknesses measurements and for materials analy-
sis. The measurement method conforms to DIN 50 987, ASTM B568 and EN ISO 3497.
When used as intended, the FISCHERSCOPE® X-RAY is safe in its operation. When you use the
instrument as intended and observe the safety information, the instrument does not pose any risks.
Only accessories recommended and approved by FISCHER may be connected to this instrument.
Modifications, repairs, maintenance and service work on the instrument and its accessories must
be performed by authorized FISCHER service personnel only.
There is no other intended use. The risk for damage from unintended use lies solely with the user.
FISCHERSCOPE® X-RAY
Safety Information
1.4 Safety of the Electrical Equipment
The instrument is designed as a Protection Class I instrument according to the IEC 348 / VDE 0411
standard. The instrument contains components under line voltage and under high voltage. Observe
the directives and standards IEC 348, VDE 0411.
1.5 Maintenance and Repair
Repair, maintenance and service work on the instrument and its accessories must be performed by
authorized FISCHER service personnel only.
Exceptions are described in the operator’s manual, as replacing the line fuse.
1.6 X-Radiation Safety
The design as a fully protected instrument and the functions of several integrated protective devices
protects the operating personnel and the surroundings fully from x-radiation.
Two devices that work independent of each other ensure that x-radiation can be generated only
when the measurement chamber is closed. For the safe operation of the instrument please also note
the intended use; ref. chap. 1.3. on Page 9.
Observe the laws and regulations of the country where the FISCHERSCOPE X-RAY is operated. The
responsible government authority must possibly be informed or consulted about the commissioning
of the FISCHERSCOPE X-RAY .
In addition, we would like to point out the following:
 Operate the instrument according to the instructions in this manual and the online help.
 Do not attempt any structural alterations on the instrument.
 Maintenance and service work on the instrument may be performed only by FISCHER or by
companies authorized by FISCHER for this purpose.
1.6.1 Repeat Inspection
FISCHER recommends to check the instrument by an expert in intervals of no longer than five years.
Observe the laws and regulations of the country where the instrument is operated.
If you prefer to perform the repeat inspection yourself, contact the responsible authority for the ex-
pert responsible for your area.
During the repeat inspection, the expert must be provided with the Certificate of Approval. Store
the Certificate of Approval in a manner that it will be available at the time of the inspection.
The responsible authority must be notified of the result of the repeat inspection without being re-
quested to do so.
Safety Information
1.6.2 Safety Devices
The FISCHERSCOPE X-RAY is a fully protected instrument. A fully protected instrument has the fol-
lowing features:
 A protective housing fully encloses the x-ray tube and the object to be examined.
 The instrument features two safety devices that are independent of each other. The x-ray tube
can be operated only when the protective housing is fully closed.
The aforementioned technical features are fulfilled by two micro switches that observe the opening
condition of the measuring chamber door. If the door is opened, the x-ray escape will be closed
(shutter closed).
LED SHUTTER OPEN at the Instrument

If the LED SHUTTER OPEN lights, the escape of the x-ray tube is opened.
► Do not open the measuring chamber door, when the LED SHUTTER OPEN lights.
If you open the measuring chamber door, when the LED SHUTTER OPEN lights, the running mea-
surement will be terminated and the escape of the x-ray tube will be closed.
CONTROL LED at the Instrument

When closing the door, ensure that it is fully closed. The status is indicated by the CONTROL LED
at the measuring head. A permanently flashing LED indicates that the door is not closed properly,
it will not be possible to make measurements.
1.6.3 No Alterations to the Instrument!
Only specialized service personnel, as a rule the Service of FISCHER, is authorized to carry out
alterations to the measuring instrument.
DANGER X-radiation and high voltage

Carrying out alterations to the instrument can lead to death or serious injuries
and legal consequences.
► Do not carry out any alterations to the instrument.
Safety Information
1.7 Requirements for the Operating Personnel
1.7.1 Operators with Introductory Training
Operators with introductory training can work with the instrument efficiently and safely.
For this purpose, the instrument is prepared such that all settings for the measuring application are
made by trained specialists. Then, the software’s scope of functions is restricted such that only the
functions required for carrying out the measuring application remain accessible (Short menu). This
provides operators with introductory training with a clear workspace and the instrument is protect-
ed from interventions and changes in the software.
Operators with introductory training should have the following knowledge:
 Fundamental knowledge about the use of Microsoft® Windows®
 Knowledge of the safety information described in this manual
 Operators with introductory training must be instructed in the proper use by a person that has
the requisite qualifications.
1.7.2 Trained Specialists
Trained specialists can utilize the full bandwidth of the technical capabilities of the
FISCHERSCOPE X-RAY.
In addition, trained specialists have the following knowledge:
 Knowledge of the physical principle of x-ray fluorescence and of the functional principle of the
FISCHERSCOPE X-RAY instrument
The aforementioned physics knowledge is important for defining the measuring application and for
other settings. Only the most important facts are explained in this Operators Manual. This does not
replace detailed training.
The practice-oriented seminars of FISCHER are a worthwhile opportunity for obtaining the required
knowledge. Several times a year, user seminars that provide insights into the physical fundamentals
of x-ray fluorescence and prepare users for their work with the measuring instruments are conduct-
ed at various locations.
Seminar dates can be found on our website www.helmut-fischer.com.
Safety Information
1.8 Frequently Asked Questions Concerning X-Radiation Safety
Question Answer
Is there a risk that my health will No. The X-RAY instrument is a fully protected instrument.
be impaired by X-radiation due During no phase of your work at the instrument is it possi-
to my work on the X-RAY instru- ble for X-radiation to escape from the measurement cham-
ment? ber. This is also true when the cover of the measuring head
is opened. In such cases, the radiation source will be
switched off immediately through the security devices.
How can I check if the safety de- You can recognize its proper function via the red control
vice of the measuring head func- LED on the front side of the measuring head.
tions properly? Everything is OK as long as the CONTROL LED is not flash-
ing.
Will the specimens that have No. The fluorescence radiation of the specimen subsides
been exposed to X-radiation fully already a split-second after the primary X-radiation is
themselves turn into radiating switched off. You can touch the specimen after the mea-
material due to the X-ray fluores- surement procedure without any problems.
cence effect after the primary ra-
diation has been switched off?
Will the primary X-radiation No. The X-radiation has absolutely no lasting influence on
damage or alter the material the material; it fully retains its quality. The X-ray fluores-
structure of the specimen? cence method is a non-destructive measurement method.
Live animals or plants must not be exposed to the X-radia-
tion in the measurement chamber.
Is the safety or the accuracy of No. Magnets influence neither the measurement results nor
the measurement results influ- the safety. You can use magnets without problems.
enced by magnets on customer-
supplied fixtures in the measure-
ment chamber?
Safety Information
Instrument Overview
2 Instrument Overview
The FISCHERSCOPE® X-RAY is a high performance energy dispersive x-ray fluorescence (EDXRF)
spectrometer.
The WinFTM® (Fischer Thickness Management Software for Windows®) software controls the in-
strument and handles the evaluation of the signals supplied by the instrument.
The measured values (coating thickness, material compositions, mass per unit area) are stored and
displayed on the monitor. Using WinFTM, you can conveniently design the measurement results as
a print form for printout and export them to other applications.
WinFTM runs under Windows®.
2.1 Areas of Application
The instrument is suited for the following measurement applications:

 Analysis of solid, powdery and compound materials and liquids
 Measurement of the composition and coating thicknesses of complex multi-layered systems
The instrument is equipped with a programmable XY-stage, which allows for automated
measurements.
2.2 Standard-free Measurements
The instrument allows for standard-free measurements, that is measurements without calibration
standards. Coating thicknesses and compositions can be determined in one measurement without
the use of calibration standards. This is especially interesting when you develop new multi-layered
systems, where applicable calibration standards are not available.
Instrument Overview
2.3 X-Ray Fluorescence
The specimen is excited with the primary x-radiation. In the process electrons from the inner electron
shells are knocked. Electrons from outer electron shells fill the resultant voids emitting a fluorescence
radiation that is characteristic in its energy distribution for a particular material. This fluorescence
radiation is evaluated by the detector.
The generation of the x-ray fluorescence radiation is shown simplified in Fig. 2.1. One electron
from the K shell is knocked. The resultant void is filled by either an electron from the L shell or an
electron from the M shell. In the process the K and K radiation is generated, which is character-
istic for the particular material.
X-ray fluorescence radiation

K
K
Primary X-radiation
Electron
Shell M L K
Figure 2.1: Generation of the x-ray fluorescence radiation
Instrument Overview
2.4 Functional Principle of the Instrument
The following figure shows the principle structure of the instrument:
Cathode X-ray tube
Anode
WinFTM
main window
Primary x-radiation
Primary filter
Optics
Shutter
Mirror
Video camera
Aperture (Collimator)
Spectrum Detector
Coating layer
X-ray fluorescence radiation Base material
Figure 2.2: Functional principle of the instrument
Functional principle
1. The x-ray tube generates the primary x-radiation (primary radiation). The electrically heated
cathode emits electrons. Accelerated by the applied high voltage to very high speeds, the elec-
trons bombard the anode material. This generates the primary x-radiation.
2. The primary filter optimizes the energy distribution of the primary x-radiation.
3. The shutter serves as a safety device. It is opened during a measurement only. In case of a
malfunction or when opening the measurement chamber, it will be closed automatically. This
ensures, that the user is never exposed to x-radiation.
Instrument Overview
4. A light source (not shown in Fig. 2.2) illuminates the sample. A mirror and lens direct the image
of the measurement location to a color video camera. The mirror has a hole in its center for the
primary radiation to pass through.
5. The aperture (collimator) limits the cross-section of the primary beam in order to excite a
measurement spot of a defined size.
6. The primary x-radiation impacts the atoms on the sample surface (coating layer and base mate-
rial) and in the process knocks electrons from the inner electron shell. Electrons from outer elec-
tron shells fill the resultant voids emitting a fluorescence radiation that is characteristic in its
energy distribution for a particular material.
7. The energy dispersive detector measures the energy distribution of the fluorescence radiation.
A multistage electronics circuit processes the measurement signals.
8. The measured spectrum shows lines or peaks that are characteristic for the chemical elements
in the sample.
9. The WinFTM Software computes the thickness of the coating(s) and/or the analysis result. The
video image of the sample is shown in the WinFTM window. The precise position of the
measurement location and the measurement spot is possible due to the special design of the
optical and the x-ray guidance systems.
Components
2.5 Components
2.5.1 Cover of the Measurement Chamber
The cover of the measurement chamber is part of the safety devices of the instrument. It fully protects
the operator and the environment from x-rays.
The cover of the measurement chamber opens and closes in the vertical direction for easy and time-
saving placement or replacement of the specimen on the measuring stage in the measurement
chamber.
► When closing the cover of the measurement chamber, ensure that the cover is fully closed.
A flashing CONTROL LED indicates that the cover is not fully closed and measurements cannot
be made.
2.5.2 Motor-driven XY-stage
The instrument is equipped with a programmable motor-driven measuring stage with automated
loading function.
You can program coordinates for measurement points in order to let the instrument measure auto-
matically at various locations on the specimen. In this manner, you can define, for example, 100
measurement points and let the measurement run automatically over night at these measurement
points.
The loading function entails the motor-driven measuring stage moving out of the opened measuring
chamber for loading. The loading function is triggered automatically as soon as the cover of the
measuring head is opened. The stage automatically returns to its starting position when the cover
is closed.
With the measuring stage in the extended position, specimens can be positioned conveniently on
the stage using a laser pointer.
2.5.3 Laser Pointer for XY-Positioning
A laser pointer marks the measuring spot. This allows for exact positioning of the specimen.
2.5.4 Aperture (Collimator)
The aperture is used to limit the size of the primary x-ray beam to a defined diameter or cross-sec-
tion.
The aperture is a borehole with defined geometries (rectangular or round) and sizes, through which
part of the primary x-ray beam passes. Thus, a fraction of the primary radiation is suppressed.
A reproducible, controlled and defined primary x-ray beam geometry is an important prerequisite
for good measurement accuracy.
Changeable apertures
To create ideal excitation conditions for every measurement, the instrument is equipped with several
electrically changeable apertures (collimators), see the Technical Data Sheet in the appendix of this
Components
document. Using the software, you can select the optimum aperture for the respective measurement
application.
To select the aperture

1. In the WinFTM main window select Product > Modify….
The window Modify product appears.
2. Select the tab Application.
3. Click Collim..
4. Select the collimator and click OK.
2.5.5 Shutter
The shutter is used to keep the primary x-rays from entering the measurement chamber and the en-
vironment.
The shutter is part of the safety system. The shutter closes immediately, when you open the cover
of the measurement chamber or when a malfunction occurs. X-rays can then no longer reach the
measurement chamber and the environment.
2.5.6 Specimen Lighting
The specimen lighting ensures good visibility of the specimen in the video window. The lighting
elements are white LEDs that are located in the area of the aperture.
Use the slide control in the video window to adjust the intensity of the illumination.
2.5.7 Primary filter
The primary filter consists of a thin foil made of nickel, aluminum or plastic, (see Technical Data
Sheet in the appendix of the document), which is located between the x-ray tube and the specimen
to be measured.
By using a primary filter, the composition of the primary X-radiation can be influenced such that it
is optimally suited for the excitation of the respective specimen for x-ray fluorescence. Thus, unde-
sirable components of the fluorescence spectrum can be avoided from the outset.
Using a primary filter is useful for certain applications, however, it is not required in most cases.
The user requires special physical knowledge for a case-by-case evaluation of this question.
The primary filter can be controlled using the software, if the WinFTM extension SUPER is installed.
To change the primary filter:

1. In the WinFTM main window select Product > Modify….
3. Click Def.MA (local).
The window Definition of measuring conditions… appears.
4. In the upper right field select the desired primary filter and click OK.
Components
2.5.8 Key Switch for the X-Ray Energy
With the key switch you turn the high voltage supply of the x-ray tube on and off. Without high
voltage supply to the x-ray tube, x-radiation cannot be generated. Consequently, measurements are
not possible.
Measurements can only be performed when the key is inserted and turned to the right.
For your safety, you should turn off the x-radiation when you are finished using the instrument, then
pull the key and store it in a safe place. This prevents unauthorized use of the instrument and gen-
eration of x-radiation.
Control LEDs of the high voltage supply:
 The yellow LED HV ON on the control panel of the instrument lights immediately upon turning
on the high voltage.
 The red control LED X-RAY ON on the control panel of the instrument lights when the high
voltage is reached its full level. This may take a few seconds after turning the key switch.
2.5.9 Control Panel
You can use the control panel to control certain functions of the instrument.
Joystick
Figure 2.3: Control panel of the instrument
Table 2-1: Function of the control elements
Control element Function

Joystick Controls the measuring stage movement.
↑ Moves the detector unit up. For faster movement of the detector unit,
press FAST simultaneously.
FAST Press this key simultaneously with or to move the detector unit faster.
↓ Moves the detector unit down. For faster movement of the detector unit,
press FAST simultaneously.
START Starts a single measurement.
STOP Stops a measurement.
Components
Table 2-2: Function of the LEDs
LED Function
HV ON Lights yellow when the high voltage is turned on.
X-RAY ON Lights red when the X-radiation is ready.
SHUTTER OPEN Lights yellow when a measurement is in progress.
CONTROL Flashes red when the safety system discovers an error or when the cover
is not fully closed, measurements are not possible.
No malfunction message of the safety system is present if the LED does
not light.
POWER ON Lights green when the instrument is switched on.
X/Y-LIMIT Lights yellow when the measuring stage has been moved to a maximum
position (fully to the right, left, back or front).
Z-LIMITS Lights yellow when the detector unit is at its highest or lowest position.
Set up
3 Set up
3.1 Set-up Location
DANGER Explosion hazard

High voltage discharges inside the instrument can be dangerous in explosion
hazard zones.
► Do not place the instrument in explosion hazard zones.
The instrument is designed for the following conditions:
Operation temperature 10 °C – 40 °C / 50 °F – 104 °F

Storage temperature 0 °C – 50 °C / 32 °F – 122 °F
Relative humidity ≤ 95 %
The instrument is designed as a lab unit. Due to its sturdy construction, it is also possible to run it
in a production hall.
ATTENTION Destruction hazard caused by improper environmental conditions

The instrument can be destroyed, if you place it in hot or corrosive
environments.
► Place the instrument in rooms with a suitable operating/storage
temperature only.
► Make sure that the air can circulate freely in the area of the fan.
► Do not expose the instrument to direct sunlight.
► Do not place the instrument in corrosive environments such as
plating areas.
The set-up location influences the product life and maintenance effort directly.
Corrosive environments cause corrosion on mechanical and electronic components. This can lead
to the following problems:
 Rough-running or total breakdown of mechanical adjustment mechanisms
 Contact problems on plug connectors or total breakdown of electronic components
Salt acid steams or salt aerosols (salt spray test) in the ambient air cause defects on x-ray tubes,
proportional counters and silicon detectors in short intervals. Salt acid corrodes the Beryllium win-
dow of these components. Thus, the components will be damaged rapidly.
If the instrument is located in a room, separated from the electroplating, make sure that the exit air
of the electroplating cannot reach the room via doors, windows or extraction of air systems.
Heavy ambient air pollution causes the ventilation ducts getting clogged. Thus, the maximum per-
missible temperature of components can be exceeded. Additional damage can be caused by de-
posits of aggressive dirt.
Set up
3.2 Unpacking the Measuring System
1. Open all containers of the shipment and take out the components.
ATTENTION Destruction hazard

The instrument can be destroyed, if you connect the instrument to the line
voltage, before all components of the measuring system are connected to
one another.
► Do not yet connect the instrument and the PC to the line voltage.
2. Store the original shipping containers at a safe place.

If you need to transport the instrument, always use the original shipping containers. Failure to
comply will nullify any warranty claims.
3. Place the instrument, the PC with monitor, keyboard and mouse and the printer, if present, on
a sturdy table with the minimum dimensions of 150 x 90 cm (59 in x 35 in). Additional space
is required for the test samples and for other material.
NOTE:
To save space, place the PC under the table and not on top of it. However, consider that you will
need front access to the PC for inserting or removing CD-ROMs and for turning the unit on and off.
Set up
3.3 Removing the Shipping Lock

Switching on the instrument with mounted shipping lock can destroy the meas-
uring stage of the instrument.
► Do not switch on the instrument, before the shipping lock is removed.
To remove the shipping lock

► Open the cover of the measurement chamber and remove the shipping lock made of foam.
Store the shipping lock at a safe place.
To remove the shipping lock of the measuring stage
1. Unscrew the four hex socket screws that connect the red shipping lock with the measuring
stage. Make sure, that the screws do not drop into the instrument.
2. Remove the red shipping lock.
3. Store the shipping lock and the screws at a safe place for future transport.

Transporting the instrument without mounted shipping lock can destroy the
instrument.
► Before transporting the instrument, re-install the shipping lock.
► If you no longer have access to the original shipping lock, order a new set
from FISCHER.
Set up
3.4 Establishing Connections
Check the supply voltage before connecting the instrument to the voltage supply. The nominal line
voltage is shown on the name plate and is either 110 V or 230 V (AC).
ATTENTION Wrong line voltage

Connecting the instrument to the wrong voltage can damage the instrument.
► Make sure that the voltage, shown on the name plate of the instrument,
equals to your line voltage.
1 2 3 4
1 Main switch
3 USB interface, to PC
4 Main fuse
5 Voltage supply for instrument
Figure 3.1: Connectors and switches at the rightside of the instrument
Set up
Establish the following connections
ATTENTION Communication Breakdown Instrument – PC

If you connect the USB cable of the instrument with a USB 3 socket at the PC,
the communication between Instrument and WinFTM can be disturbed.
► Connect the USB cable of the instrument with a USB 2 socket and not with
a USB 3 socket at the PC.
1. USB: The USB cable has two different connectors: a quadratic one and a flat one. Connect the
quadratic connector to the instrument and the flat connector to a USB 2 socket at the PC. If no
free USB 2 socket is available, connect the mouse or the keyboard to a USB 3 socket.
The following table helps to distinguish between USB 2 and USB 3 sockets. Please note that not
all characteristics need to apply, e.g. a USB 3 socket may also be black.
Characteristic USB 2 USB 3

Socket colour black blue
Logo at the socket
SS
2. Voltage supply of the PC

3. Voltage supply of the instrument
Set up
3.5 Switching on the Instrument
Before you begin

 The instrument was placed correctly.
 The shipping lock was removed.
 All connections were established.
 Make sure that the FISIM (Fischer Software Identification Module) is plugged into a USB port
of the computer.
 Make sure that the high voltage key switch is in the on-position. For that purpose open the cover
of the measurement chamber. The key switch is located at the detector unit of the instrument.
To switch on the instrument and the PC

1. Switch on the instrument by using the main switch on the right side of the instrument.
2. Switch on the PC and the monitor.
Windows will be started.
3. To start WinFTM, double click the WinFTM icon .
WinFTM will be started. The WinFTM Start window appears.
4. In the WinFTM Start window click OK.
The software will be started and the communication between the instrument and the software
will be initialized. The product that had been selected prior to powering off will be called auto-
matically.
What you can do next

You can now perform measurements.
The following activities must not be performed immediately after power up, but only after
about half an hour of measuring time:
 Calibration/Normalization
 Monitoring measurement devices including corrective measures
Set up
3.6 Switching off the Instrument
If the instrument is not in use for a long time, switch it off.

Recommendation:
 If you use the instrument infrequently, e.g. once or twice a week, then switch off the instrument
when you have finished with your measurements.
 If you perform continuous measurements, e. g. over night, then let the instrument run continu-
ously including over night and weekends. The instrument powers down the high voltage auto-
matically on inactivity, so this also saves energy.
To switch off the instrument and the PC

1. To terminate WinFTM select File > Exit.
2. To shut down the PC select Start > Shut down.
3. Use the rocker switch on the right side of the instrument to switch off the instrument.
4. Switch off the monitor and the printer, if present.
5. If you need to protect the instrument against unauthorized access, turn off the high voltage
supply for the x-ray tube by turning the key switch to the left. For that purpose open the cover
of the measurement chamber. The key switch is located at the detector unit of the instrument.
3.7 Communication between Instrument and WinFTM
Communication between instrument and WinFTM is necessary to obtain measurements with the
instrument.
Determining the current communication condition

 If the communication is enabled, the measurement distance appears in the status bar.
 If the communication is disabled, XRAY Communication OFF appears in the status bar of the
WinFTM window.
It is not possible to make measurements when the communication is disabled, that is, when
WinFTM is in demo mode.
To enable the communication

► In the WinFTM main window select General > Communication ON.
To disable the communication

► In the WinFTM main window select General > Communication OFF.
Set up
Position Specimen
4 Position Specimen
There are some basic rules for positioning specimens. For each measurement it must be ensured
that the x-ray fluorescence radiation can reach the detector without obstruction. Otherwise, the
measurement result may be falsified.
4.1 Flat Specimens
Positioning flat specimens is simple.

► Place the specimen flat on the table and position the desired measurement location.
4.2 Cylindrical or Curved Specimens
Bolts, rods or other cylindrical specimens must be positioned such that they are not shadowed or
that the curvature does not influence the measurement result.
► Position cylindrical specimens on the table in the manner shown in the following figure.
 
Figure 4.1: Positioning of the specimen for cylindrical or curved specimens
Regardless of the positioning, cylindrical or curved specimens must always have a minimum diam-
eter or a minimum curvature diameter. If the diameters are smaller than this minimum value, then
a greater coating thickness than the actual value will be displayed. This is caused by the effectively
inclined radiation through the coating at the measurement location, which causes a higher fluores-
cence intensity.
The following applies to simple measuring applications (e.g., single coating applications) and in
one plane cylindrical or curved objects):
Specimen  4  Measurement spot
This means that the diameter of the specimen must be at least four times as large as the diameter
of the measurement spot.
Position Specimen
Correspondingly, the following applies to the curvature radius:
r Specimen  2   Measurement spot
For multi-coating measuring applications that are curved in more than one direction (many curved
and bent contacts), this minimum value may be increased by a factor of up to 10 for top coatings,
depending on the measuring application. This factor may be even higher for interim coatings.
In addition, when making such measurements ensure that the position of the measurement spot cor-
responds to the position in the video image in order to ensure accurate positioning and measure-
ments. If you have questions in this regard, please contact FISCHER.
Information about measurements on thin wires can be obtained from your authorized dealer or
from FISCHER.
4.3 Measurements in Recesses
When making measurements in recesses, it is important that the X-radiation and the x-ray fluores-
cence radiation are not shadowed by the specimen, see the Figure below.
 
Figure 4.2: Positioning the specimen for recesses
4.4 Measurements on Inclines
The primary x-radiation must strike the measurement location at a right angle. Otherwise measure-
ment errors will occur.
► Use aids (devices, modeling clay and the like), to orient the plane of the measurement location
horizontally.
Position Specimen
4.5 Positioning of Specimen
Observe the rules for positioning different specimen in Chap. 4 on Page 31.
Procedure
1. Open the door of the measurement chamber.
The measuring stage will automatically move out of the measurement chamber.
2. Position the specimen with the measurement location pointing up. Orient the specimen such that
the laser pointer points at the measurement location.
3. Close the door of the measurement chamber.
The measuring stage will automatically move back into the measurement chamber.
4. Focus the video image by clicking the Autofocus icon in the video image.
If the auto-focus function doesn’t work, because the specimen’s contrast is too low, focus the
video image by using the slide control at the left in the video image:
a Position the mouse pointer over the handle of the slide control at the middle of the slide
control.
b Press and hold down the left mouse button. Slide the handle up or down.
The Z-axis moves to the desired direction. The speed of the movement is controlled by the
distance between the handle and the middle of the slide control.
c To stop the movement, release the left mouse button.
If the video image is too bright or too dark, change the brightness using the slide control at the
bottom left in the video image.
If the crosshairs in the video image is not very visible, change the color of the crosshairs by
clicking (several times) the icon Change color (crosshair).

 You can now perform measurements.
 You can correct the measurement location or position a new measurement location without
opening the measurement chamber door. Position the measurement location by using the mouse
as described in the following section.
Position Specimen
4.6 Position the Specimen by Using the Mouse
The instrument is equipped with a motor-driven measuring stage. You can position the specimen by
using the mouse, while the measurement chamber door is closed (Point & Shoot).
Before you begin

You have already (roughly) positioned the specimen (see Chap. 4.5 on Page 33).
Procedure
To position the specimen by using the mouse:
1. Position the mouse pointer in the video field on the desired measurement spot.
2. Press the left mouse button.
The measuring stage moves to the desired measurement location.
To position the specimen by using joystick function of the mouse:
1. Position the cursor at the center of the crosshairs in the video image.
2. Press and hold down the right mouse button. Moving the mouse will now control the X/Y/Z
stage drive:
The angle position of the cursor relative to the center of the crosshairs controls the direction of
the X/Y/Z stage movement.
The distance of the cursor from the center of the crosshairs controls the speed of the X/Y/Z
stage movement.
3. To stop the movement, release the right mouse button.
The speed of the stage movement can be set by the Service engineer.

Performing Measurements
5 Performing Measurements
To perform measurements you need a product. A product is a file, which contains all settings for a
specific measurement task.
When the instrument is delivered by FISCHER, products that cover your measurement tasks are usu-
ally available. With these products you can perform measurements immediately.
If you need new measurement tasks, you can request products from FISCHER. The products are then
send to you by email or on a data carrier. Before you can use the new products, you need to import
and calibrate them.
This section describes how to perform measurements.
For further information see the following chapters:
 Importing a product: Chap. 8.3 on Page 58
 Performing a calibration: Chap. 18 on Page 139
Before you start

 The instrument is switched on (see Chap. 3.5 on Page 28).
 An appropriate product file is present.
Procedure
1. In the WinFTM main

window click Select.
2. Choose the product from

the list.
You can sort the list by
name, number, date etc.
3. Click OK.
4. Position the specimen (see Chap. 4 on Page 31).
5. To start the measurement,

click Start.
The measurement will be performed.
Performing Measurements
User Interface of the WinFTM Software
6 User Interface of the WinFTM Software
6.1 WinFTM Main Window
The WinFTM main window appears, when you start WinFTM.
Title bar
Menu bar
(WinFTM main menu)
Tool bar
Product bar
Statistics field
Calibration status
line
Measurement
value field
Video window
Status bar
Instruction field
Figure 6.1: WinFTM main window
Item Function
Title bar Shows the current folder.
Menu bar Contains all menus. Many of the functions available from the menu bar are
also available from the tool bar.
Tool bar The tool bar offers quick access to the most frequently used functions. You
can adapt the tool bar according to your needs.
Item Function
Product bar Here you can select a product by clicking the button Select. In the center
the number and name of the current product are displayed, here No. 60
Au/Pd/Ni/Cu.
Video window Here you can see the specimen, see Chap. 6.2 on Page 39
Instruction field Here you can start a measurement or a sequence of automatic measure-
ments. Hints and error messages are displayed in this field (e.g. messages
during calibration).
Statistics field Here the statistical results of the last block are displayed, see Chap. 6.3 on
Page 41.
Calibration status If the measurement application is calibrated, the name of the calibration
line standard set is displayed here. If the measurement application is not cali-
brated, the message Calibration: Standard-free is displayed.
Measurement val- The measurement readings are displayed here. The field displays either the
ue field last measurement reading or a list of all readings of the current product, see
Chap. 6.4 on Page 41.
Status bar Here important information is displayed, e.g. measurement distance, XYZ
coordinates, and the mq-value of the last measurement.
6.2 Video Image
With the help of the video image you can position and focus the specimen exactly (see Chap. 4
on Page 31). If you don‘t see the video image, it is switched off.
To switch on the video image

► In the WinFTM main menu select Video > Video on.
Auto focus button1
Button for changing Measurement unit

the color of the
crosshairs
Crosshairs
Z-axis slide control1
Brightness slide con- To scale presenta-

trol tion of the
measurement spot
Figure 6.2: Video image, 1) only available at instruments equipped with motor-driven
measuring stage
Item Function
Auto focus button1 Adjusts the focus automatically, if the specimen‘s contrast is sufficient.
Measurement unit Displays the measurement unit for the crosshairs and the measurement spot.
Crosshairs To scale presentation of the crosshairs.
To scale presenta- Displays the form and size of the actual measurement spot. Aperture shape
tion of the mea- and size as well as the measurement distance are considered.
surement spot
Brightness slide Changes the brightness of the video image.
control
Z-axis slide con- Moves the Z-axis up or down. The more the slider is scrolled, the faster the
trol1 Z-axis moves.
Button for chang- Changes the color of the crosshairs in order to optimize the contrast be-
ing the color of tween specimen and crosshairs.
the crosshairs
1. only available at instruments equipped with motor-driven measuring stage
6.2.1 Zooming and Enlarging the Video Image
You can enlarge and zoom the video image to have a better view of the specimen and the mea-
surement spot and for focusing the video image.
To zoom in the video image

► Select in the WinFTM main menu Video > Zoom > 200% or 300% or 400%.
To set the zoom factor of the video image to its standard value, select in the WinFTM main
menu Video > Zoom > 100%.
To enlarge the video image

► Select in the WinFTM main menu Video > Video LARGE. Repeat this step to set the size of the
video image to its standard value.
6.2.2 Showing Programmed Coordinates
If you have programmed coordinates for automated measurements, you can show them in the video
image. The programmed coordinates appear as crosses in the video image.
To show programmed coordinates in the video image

► Select in the WinFTM main menu Video > Display X-Y Positions. The coordinates are displayed,
if the option is ticked.
6.2.3 Changing the Color of the Crosshairs
To increase the contrast between specimen and crosshairs, you can change the color of the cross-
hairs. Each click on the button (see Fig. 6.2 on Page 39) changes the color of the crosshairs. You
can choose between three different colors: black, white and one user-defined color.
To define a crosshairs color

1. Select in the WinFTM main menu Video > Crosshair color.
The window Color appears.
2. Select a color or define a new one.
3. Click OK.
6.2.4 Stops of the XY(Z) Measuring Stage
When at instruments equipped with motor-driven measuring stage the stage is travelled to its limit,
the X/Y or Z limits LED on the control panel lights. In addition, an indicator in the video image
appears, see the following table:
Indicator Explanation
The XY measuring stage is travelled to its front stop.
The XY measuring stage is travelled to its back stop.
The XY measuring stage is travelled to its left stop.
The XY measuring stage is travelled to its right stop.
The detector unit is travelled to its upper stop.
The detector unit is travelled to its lower stop.
6.3 Statistics Field
The statistical results of the last block are displayed in this field (see Fig. 6.1 on Page 37). A block
is a test series. The test series has a first and a last value. The last value marks the end of the block.
An additional measurement value belongs to the next test series.
The following features of a block are displayed in the statistics field: Number of the block, Mean
value, Standard deviation, Coefficient of variation, Number of measurements, Order no. and Op-
erator.
6.4 Measurement Value Field
This field either displays the last measurement value or a list of all measurement values acquired
with the current product.
You can choose between three different display modes:
 Large number presentation
 List presentation
 SPC chart presentation (Statistical Process Control Chart)
6.4.1 Large Number Presentation
In this display mode the current measurement value (or the last values, if several characteristics are
measured) is displayed in large digits. In addition to the measurement value, the measurement un-
certainty is displayed as well. The measurement uncertainty depends on the measurement condi-
tions (measurement time, measurement distance, measurement application).
If you have set up tolerance limits, the measurement value is displayed with colored background.
If the measurement value is within the tolerance limits, the measurement value is displayed on green
background, otherwise on red background.
6.4.2 List Presentation
The list of measurement values are presented in the order of the measurements. In addition to the
measurement values, the date and time, the name of the operator and the tolerance limits are dis-
played as well. The name of the operator and the tolerance limits are displayed, if they were pre-
viously entered.
If you have set up tolerance limits, the measurement value is displayed with colored background.
If the measurement value is within the tolerance limits, the measurement value is displayed on green
background, otherwise on red background.
6.4.3 SPC Chart Presentation
In this display mode the SPC chart (Statistical Process Control chart) is displayed in the statistics
field. The measurement values are displayed in the list presentation in the measurement value field.
Within the statistical process control chart you can identify trends in automated measuring proce-
dures with large lot sizes. Thus, you can easily determine changes with regard to coating thickness
and other process parameters. Furthermore, the SPC chart presentation simplifies the monitoring of
the measurement devices.
Figure 6.3: SPC chart presentation, the upper image shows the mean value over time,
the lower image shows the standard deviation over time
6.4.4 Changing the Measurement Value Presentation
To display or hide result channels

WinFTM BASIC/SUPER/PDM can process up to 24 result channels (coating thickness values or an-
alytical parameters). WinFTM LIGHT can process up to four coating thickness values or up to five
analytical parameters. The result channels are defined within the DefMA.
You can display or hide the result channels defined within the DefMA according to your needs.
1. In the WinFTM main menu, click .

2. Select the tab Presentation.
3. In the area Display, check or uncheck the result channel to be displayed.
To change the display modes (Large numbers, Listing or SPC presentation)

3. In the area Presentation, select the display mode to Large numbers, Listing or SPC. SPC can
only be selected, if the Block definition is set to fix.
To change the display resolution

2. Select the tab Product.
3. In the field Display Resolution, select a resolution.
To enter tolerance limits

3. In the area Tolerance limits, check activated.
4. Within the area Tolerance limits, choose the result channels, for which tolerance limits shall be
displayed.
5. In the columns LSL (Lower Specification Limit) and USL (Upper Specification Limit), enter the
tolerance values.
To enter the name of the operator

► In the WinFTM main menu, select Evaluation > Order No. / Operator….
6.5 Status Bar
The status bar is located at the bottom of the WinFTM window and displays the following:
Help text mq value
Operator‘s name XYZ coordinates

Measurement distance
Display Explanation
Help text If you hover with the mouse pointer over a command button, additional help
text will be displayed here.
Measurement dis- Measurement distance between the specimen measurement spot and colli-
tance mator minus 15 mm, when the video image is focused.
XYZ coordinates1 Coordinates of the current position of the measurement stage.
Display Explanation
mq value Quality factor of the last measurement value. The mq value is a measure for
the agreement of the measured spectrum with the theoretical spectrum, see
Chap 6.6 on Page 45.
CAP The caps lock key of the computer keyboard was pressed.
NUM The number pad of the keyboard is activated.
1. only available at instruments equipped with motor-driven measuring stage
6.6 mq Value
The mq value (measurement quality value) is a quality factor of the measurement value. It is dis-
played in the status bar.
The mq value is a measure for the agreement of the measured spectrum with the theoretical spec-
trum. The mq value is an indication for the confidence level and the trueness of the measurement
value. The smaller the mq-value of a reading is, the more correct is the measurement result. The
optimal value for mq is 0.
General recommendation:
mq = 0 – 5 The measurement is OK.
mq > 5 The measurement must be discarded.
6.6.1 Upper Limit of the mq Value
The factory default for the upper limit of the mq value is set to 5. You do have the option to change
this upper limit.
When the upper limit of the mq value is exceeded during a measurement, the measurement will be
terminated and the error message ERROR: Spectrum not suitable! will be issued. The related mea-
surement value will not be added to the result list.
To change to upper limit of the mq value

3. In the field mq_Max, enter the new value for the upper limit.
If a value of 0 is shown in the field mq_Max, WinFTM will automatically set the mq value to 5.
6.6.2 Possible reasons for mq values that are too high
The specimen is not correctly defined, e.g.:

 wrong measurement application or wrong Def.MA
 the expected substrate material does not correspond to the actual composition
 interim coatings are not taken into account
Other reasons that may have influenced the measured spectrum in an unforeseeable manner are
possible as well, e.g.:
 Shading of the radiation on its path from the sample to the detector through protruding parts
of the specimen
 poor sample positioning
 complex geometry of the specimen, curvature on the specimen too strong
 measurement area too small
 out of focus
6.7 Limited Operating Mode - Short menu
You can adapt the menu functions to the needs of the operator and disable functions. You can hide
the functions, which are not needed. In this manner, sensitive data such as measuring time and
calibration parameters can be protected from overwriting, and the operator is presented with a
simplified menu. The full menu with full functionality is accessible only with a password.
To disable menu functions

1. Select in the WinFTM main menu General > Define Short Menu….
The window Modify Menu appears.
2. Select the menu items that you want to disable. A menu item is disabled, if the related box is
unchecked.
NOTE:
In order to prevent the operator from activating the disabled menu functions, do not forget to
disable the menu function General > Define Short Menu….
3. Click OK.
To activate the short menu

► Select in the WinFTM main menu General > short Menu.
To activate the full menu

1. Select in the WinFTM main menu General > full Menu.
The window Input Password appears.
2. Enter the password ?Fischer? The password is case sensitive.
6.8 The Spectrum Window
X-ray fluorescence radiation is emitted from the irradiated sample. The detector receives this radi-
ation, the instrument amplifies it and presents it as a spectrum.
You can evaluate the measured spectrum in the spectrum window. With unknown samples you can
analyse, which components comprise the sample.
To open the spectrum window

► Select in the WinFTM main menu General > Spectrum.
The currently measured spectrum is presented in the spectrum window. The spectra display window
remains empty if a measurement has not yet been made after the program start. Each spectrum is
composed of the characteristic plots (peaks) of the elements that comprise the sample.
Cursor
Spectral lines
Figure 6.4: The spectrum window
The spectrum window shows the channels [Chan] at the X axis and the count rates [cps, counts per
second] at the Y axis. Each channel corresponds to an energy value.
The spectrum of the X-ray fluorescence radiation is displayed as a distribution curve of count rate
contents (in cps) of a certain number of channels.
At your instrument, this number is between:
Channel # 0 (corresponding to an energy of 0 keV) and
Channel # 1023 (corresponding to an energy of approx. 33 keV).
You can change the display of the X axis to show the energies directly.
To toggle the display of the X axis between energies and channels

► Select in the Spectrum window Scaling > X-Axis energy.
To display the spectrum as colored area or colored line

► In the window Spectrum click . With this button you can toggle between both
representations.
To display the spectral lines of all elements of the current product

► Select in the Spectrum window View > Elements of Product.
6.8.1 Saving a Spectrum
You can use a saved spectrum to re-evaluate it with a different measurement application, without
the need of performing the measurement again.
To save a a single spectrum

You can save a single spectrum in the WinFTM main window or in the Spectrum window.
1. Depending on the window that is currently opened, do one of the following:
• The Spectrum window is opened: Select Spectrum > Save as….
• The WinFTM main window is opened: Select General > Save Spectrum….
The window Save as appears. A default file path is specified, which contains the current high
voltage and the current primary filter, if available. Using this file path makes it easy to retrieve
the spectrum later.
2. Enter a file name and click Save.
3. The file will be saved with the extension *.spk or *.spe.
To save the spectrum after every measurement automatically

► In the WinFTM main window select Store Spectrum Automatically. If the automatic storing is
activated, a disk symbol appears on the Start button.
Repeat the step to deactivate the automatic storing.
6.8.2 Loading a spectrum
You can load a saved spectrum for evaluation purposes at any time. You can also load several
spectra to compare them.
1. In the window Spectrum click .
The window Open appears.
2. Select the spectrum and click Open.
If a spectrum is already displayed in the spectrum window, then the newly loaded spectrum will be
displayed in a different color.
6.8.3 Deleting a spectrum
With this function you can remove one spectrum or several spectra from the spectrum window. It
does not make a difference whether you have just generated the spectrum by a measurement or
you have loaded a saved spectrum.
This function doesn‘t delete a saved spectrum file, but removes it from the spectrum window only.
You can load a saved spectrum into the spectrum window again at any time.
► In the window Spectrum select Spectrum > Delete.
If you have loaded several spectra, only one spectrum is deleted with this step. You can delete ev-
ery single spectrum one after the other.
6.8.4 Printing a spectrum
You can print all spectra, displayed in the spectrum window together with the spectral lines of the
clicked elements.
► In the window Spectrum select Spectrum > Print.
Please note that the printout will not go directly onto paper but first into the printer buffer. The
printout will go onto paper when the printer buffer is full or when you close the Spectrum
window and click the printer icon in the WinFTM main window.
6.8.5 Performing Measurements in the Spectrum Window
Before you start

► Position the specimen (see Chap. 4.5 on Page 33).
You can display and change the measurement parameters for this particular measurement. If you
change parameters, the change is valid for this particular measurement only. The parameters of the
current product are not influenced by your change. When you close the spectrum window, all
changes will be discarded that you have made here.
► To display or change the measurement parameters for this particular measurement, select in the
Spectrum window View > Meas.-Parameter.
Procedure
1. To start a measurement, click .
The measurement runs until you terminate it.
2. To terminate a measurement, click
6.8.6 Determining the Elements of a Sample
Before you start

 With this function only solid samples and no coating systems can be analyzed.
 Perform a measurement (see Chap. 6.8.5 on Page 49).
Procedure
1. Select in the Spectrum window View > Elements.
You can display the extended elements list. To do so, select in the Spectrum window
View > Full element list.
2. Click into the spectrum window, keep the mouse button pressed and move the cursor to a peak
of the spectrum.
A list of radiation components of one or more elements is displayed on the left next to the spec-
trum window.
3. Click in the elements list on one radiation component.
The energy lines associated with this element appear as colored lines in the spectrum window.
You can compare the peaks of the measured spectrum with the superimposed lines to identify
the elements that comprises the sample.
4. Repeat steps 2 to 3 to determine further elements of the sample.
You can change the colors of the spectra and the energy lines. To do so, select in the spectrum
window View > Color….
6.8.7 Energy
The energy distribution contained in the spectrum informs about the composition of the sample, be-
cause each occurring element of the sample reflects the qualitative composition through its peak
position (at the horizontal position specified for this element).
The higher the X-ray fluorescence energy of an element, the further to the right the corresponding
line will be in the spectrum.
According to Moseley’s Law, the energy increases as the atomic number of the respective element
increases, i.e., the lines of the “heavier” elements (those with a higher atomic number) are further
to the right in the spectrum.
The energy is measured in keV = kilo electron volts. 1 eV is the energy that an electron gains as it
moves through a field with a potential difference of 1 V.
6.8.8 Intensity
The intensity of a radiation is the amount of radiation that strikes a certain unit of area in a specified
time period.
In X-ray spectroscopy, the intensity of the radiation is measured as the count rate in counts per
second (cps).
Each peak in the spectrum corresponds to a relative maximum referenced to its surrounding. This
maximum correlates to the amount of radiating atoms of the corresponding element.
The higher the peak, the more atoms of the respective element are present in the sample, i.e., the
higher the concentration of the respective element in the sample.
Thus, the intensity of the spectral line is a measure for the quantitative composition of the sample.
Intensity: Dependency on the Coating Thickness

With coated samples, one generally sees the spectra of all coatings involved, their elements as well
as the spectrum of the substrate material where the coatings are deposited. The intensity of the spec-
tral lines of the coating material increases with an increase in the coating thickness, because the
number of the atoms in the coating increases, and thus the intensity of the radiation of all atoms.
At the same time, the radiation of the atoms of coatings located under the top coating (buried coat-
ings) and of the substrate material decreases, because their spectral lines are absorbed to a greater
degree, and thus weakened, by the thicker top coating.
Intensity: Dependency on the Measurement Distance

The total intensity of the X-ray fluorescence radiation emitted by the specimen decreases with the
distance D of the detector from the sample with 1/D2, because the solid angle of radiation collect-
ed by the detector decreases with an increase in the distance as well, while the area of the radia-
tion entry window of the detector remains the same.
For the coating thickness of a sample to be computed correctly, the distance D is automatically tak-
en into account by the evaluation software.
WinFTM File Structure
7 WinFTM File Structure
To ensure correct measurements, a set of specific files needs to be set up. The process flow for set-
ting up the files needed for measurements, is the same on all FISCHERSCOPE X-RAY instruments:
Def.MA: Definition of the measurement set-

tings of the application
Figure 7.1: Process flow for preparing measurements
The essential content of the files product, measurement application and Def.MA and their relations
among each other is shown in the following figure:
Product
 Measurement results and their presentation
 Image of the specimen
 Measurement time and number of measurements
 Export masks, block protocol etc.
Measurement Application
 Calibration data (Calibration standard set)
 Measurement time during calibration
 Number of measurements during calibration
 Anode current, aperture
Def.MA
 Measurement mode
 Type and order of the coatings
 Tube voltage
 Type and composition of the calibration standards
 Treatment of interfering spectra
 Special evaluation methods
Figure 7.2: Content of the files Def.MA, measurement application and product
7.1 Def.MA
The Def.MA Definition of the Measurement Settings of the Application) is a file, in which the basic
settings for a measurement are saved, like:
 Tube voltage used
 Type and composition of the substrate material of the specimen and of the calibration standards
To create a Def.MA you need the WinFTM extension SUPER. The usage of the SUPER software re-
quires knowledge about the physics of x-ray fluorescence and the functionality of the instrument.
If you don’t have the knowledge, do not use the SUPER software, but request a new measurement
application from FISCHER instead. FISCHER offers a professional service for the creation of custom-
er’s Def.MA.
7.2 Measurement Application
The measurement application is a file, which contains everything that is necessary for the trueness
of a measurement:
 Local copy of the Def.MA
 Calibration data (Calibration standard set)
 Measurement time during calibration
 Number of measurements during calibration
 Anode current, aperture
7.3 Product
The product is a file, which serves for the data organization and the measurement control.
Everything you define and enter for solving a measurement task is saved in the product file:
 Measurement results and their presentation
 Image of the product
 Measurement time and number of measurements
 Export masks
7.3.1 Dual Function of a Product
A product consists of two parts that function independent of one another:
Product
Product part for the cali-

Product part for the specimen
bration standard set1
The parts have the following function:

 The product part for the specimen is used to measure the specimens.
 The product part for the calibration standard set1 is used for the calibration or substitute cali-
bration and for the monitoring of the measurement devices.
The two different product parts are used to store, organize and evaluate the respective measure-
ment data separately.
To some degree, the WinFTM software permits differences in the composition between the speci-
men and the calibration standards, both for the substrate material and for the coating(s). The dif-
ferent compositions are defined in the respective Def.MA of the two product parts and can be
evaluated in any desired way using the functions of block evaluation and final evaluation. In this
manner, the measurement data that has been taken at the actual specimen, using the product part
for the specimen, will remain uninfluenced when the calibration standards are re-measured.
The dual function is also implemented in the Def.MA and measurement application files. From the
user’s point of view mainly the dual function of the product file is important.
1. In this context a calibration standard set is a particular data set, which contains the characteristics of the used
calibration standards.
Product Administration
8 Product Administration
The instrument needs certain basic information to generate measurements. This information is con-
tained in the product file, see also Chap. 7 on Page 53. For this reason a product that fits your
specimen must be selected or created before performing a measurement.
8.1 Creating a Product
Before you start

A Def.MA that fits your specimen is already available in WinFTM.
Procedure
1. Select in the menu bar Product > New… .
The window Select an application appears.
2. Shall the new product base on an existing measuring application or on a new one?
Existing measuring application: continue with Step 9.
New measuring application: continue with Step 3.
3. In the window Select an application click New.
The window Select a Def.MA appears.
4. Select the Def.MA and click OK.
The window Input of the application name appears.
5. Enter in the fields the Name and No. of the measuring application and click OK.
The window Select collim. + meas. dist. appears.
6. Select the collimator (aperture), the anode current and click OK.
The window Input Calibr. Std. Set appears.
7. Do not enter anything in the window Input Calibr. Std. Set and click OK.
The window End of calibration. Accept? appears.
8. Click Yes. Continue with Step 10
9. Select the measuring application and click OK.
The window Create new product appears.
10.Enter in the fields the Name and No. of the product. Further options:
• To rename the folder, click .
• To create a new folder, click .
11.Click OK.
The new product is now created and active.

Using the new product, you can now perform measurements. If you have created a new measuring
application, you can now perform standard-free measurements or calibrate the product.
8.2 Changing the Properties of a Product
When creating a new product, many properties are automatically taken from the product that is
active at the beginning of a new product creation. You can change these properties at any time
afterwards.
Procedure
1. In the WinFTM main window select Product > Modify… .
2. You can change many properties of the product, e.g.:
Property Tab in the Modify

product window
Measurement time and number of single measurements per started
measurement
Unit of measurement and display resolution Product
Print forms: You can replace the automatically assigned print forms by
customer specific print forms.
Measurement time and number of single measurements for the calibra-
Application
tion, see Step 11 on Page 142.
Fixed or variable block size
Measurement presentation
Presentation
Elements that should be displayed or hidden in the measurement result
Tolerance limits
Product notes Product notes
8.3 Importing a Product
If you have received a new product file from FISCHER, you need to import it. The file name has the
extension *.sav, *.sv1 or *.sv3.
Procedure
1. If you have received the product file by email as a file attachment, save the file in a directory
that does not belong to WinFTM, e.g. C:\temp.
2. If you have received the product file by CD, insert the CD into the CD drive.
3. In the WinFTM main window select Product > Copy to/from File….
The window Copy from/to file appears.
4. Select the tab File >>> Product.
5. Click Select.
The window Select file appears.
6. Select the product file and click Select.

The selected path appears in the field File.
7. Click Start copy.
The file will be copied. After this the report The product was copied successfully appears.
8. Click OK.
9. To close the window, click cancel.

Before you can perform measurements using the new product, you need to normalize or calibrate
the product.
8.4 Deleting a Product
Procedure
1. In the WinFTM main window select Product > Delete… .
The window Delete product appears.
2. Select the product file you want to delete and click Delete.
If the message Current product cannot be deleted! appears, activate another product first
(Product > Select). The currently active product cannot be deleted.
8.5 Assigning a new Measuring Application to a Product
You can assign a new measuring application to a product, if the new measuring application has
the same measurement mode as the existing measuring application.
Changes performed in the measuring application, are effective in all products assigned with this
measuring application.
Procedure
3. Click Other Application.
The window Modify application appears.
8.6 Modifying a Measuring Application
Procedure
1. In the WinFTM main window select Calibrate > Modify application… .
The window Modify application appears.
3. Change the properties of the measuring application and click OK.
8.7 Copying a Measuring Application
Procedure
1. In the WinFTM main window select Calibrate > Copy application… .
The window Copy application appears.
2. Select the measuring application, enter a name in the field Name and click Copy.
8.8 Deleting a Measuring Application
If you delete a measuring application that is assigned to a product, the assigned product will be
deleted, too. If several products are assigned to the measuring application, all assigned products
will be deleted.
Procedure
1. In the WinFTM main window select Calibrate > Delete application… .
The window Delete application appears.
2. Select the measuring application you need to delete and click OK.
If the measuring application is assigned to one or several products, the following message
appears for each assigned product: Application is used in: <Folder Name>, Product No.
<Product Number> <Product Name> Delete this product?
To delete the product assigned to the measuring application, click Yes.
8.9 Viewing the Def.MA
You can easily view the Def.MA, e.g. to check, whether the Def.MA is suitable for a new product.
For more information about Def.MA, see Chap. 16 on Page 121.
To open the Def.MA window of the current product

5. Click Def.MA (lokal).
8.10 Importing a Def.MA
If you have received a new Def.MA file from FISCHER, you need to import it. The file name has
the extension *.pb0. After this you create a new measurement application and a product based
on the imported Def.MA.
For more information about Def.MA, see Chap. 16 on Page 121.
Procedure
1. If you have received the Def.MA file by email as a file attachment, save the file in a directory
2. If you have received the Def.MA file by CD, insert the CD into the CD drive.
4. Select the tab File >>> Def.MA.
5. Click Select.
6. Select the Def.MA file and click Open.
The file will be copied. After this the report The Def.MA was copied successfully appears.
8. Click OK.

You can now create a new product based on the imported Def.MA.
Handling of Measurement Readings and Statistical Evaluations
9 Handling of Measurement Readings and Statistical Evaluations
9.1 Block
A block is a test series that combines several readings that have been made under the same con-
ditions or that belong to the same order.
All single readings of a block are numbered consecutively and each block, in turn, has a consec-
utive number as well.
Table 9-1: The various block definitions
Block definition WinFTM option Description

Variable block variable Each new measurement reading is part of the block,
size (default until you close the block by clicking .
setting)
Fixed block size fix After n (n = block size) measurements the block will be
closed automatically. Meaningful setting for SPC
charts. Once fixed block size is set, you are not able
to change to variable block size. This is only possible,
if you delete all measurement readings of the product,
see Chap. 9.5 on Page 65.
Fixed block size, autom. Block clos- After n (n = block size) measurements the block will be
but with the option ing, variable closed automatically. You do have the option to close
to close the block the block before the block size is reached by clicking
before the block . Meaningful setting e.g. if you measure n random
size is reached. samples regularly, but n samples are not available
from time to time.
9.2 Setting the Block Definition
To set the block definition (variable block size, fixed block size, autom. block closing, variable)
1. Click .
2. In the tab Presentation, area Block Definition choose the required option, see table 9-1.
If you have chosen fix or autom. Block closing, variable, enter the block size additionally.
9.3 Closing a Block
If you have set fix, then the block will be closed automatically after the bock size is reached and
has no function.
If you have set variable or autom. Block closing, variable, then you close a block as follows:
► To close a block, click .
The icon has been changed to grey. The next measurement reading is part of the next block
and gets the number 1.
9.4 Labeling a Block
You can label a block with the following fields:

 Order No.
 Lot No.
 Label 1
 Label 2
 Operator
All inserted values are linked to the block, that is, they are always valid for one block. Exception:
The field Operator is linked to the measurement reading. For every single measurement reading
you can enter another Operator.
The labels appear in the list presentation on the screen and can be exported in test protocols or
during measurement data export.
To label a block
1. In the WinFTM main window select Evaluation > Order No. / Operator….
The window Order No. / Operator appears.
2. Fill in the fields. All blocks will be labelled with your entered values from now on. In doing so,
the values are taken as long as you enter new values.
To prompt the user to input values before each new block

You can prompt the user to fill in the fields before each new block.
1. In the WinFTM main window select General > Setup "Order No./Operator…".
The window Order No. / Operator appears.
2. Activate the option To be displayed for new group.
To change the labeling fields

You can change the labeling fields (Order No., Lot No., Label 1, Label 2, Operator) according to
your needs.
1. In the WinFTM main window select General > Setup "Order No./Operator…".
The window Order No. / Operator appears, see above.
2. Click Setup.
The labeling fields are editable.
3. Change the labeling fields and click OK.
9.5 Deleting Measurement Readings or Blocks
To delete a single measurement reading

1. Highlight the measurement reading you want to delete.
2. In the WinFTM main window select Evaluation > Delete Reading.
When you delete a measurement reading, - - - - - - appears in its place in the list of measurement
data and the reading will no longer be included in the evaluation. You can undelete a deleted
measurment reading by selecting Evaluation > Undelete Reading.
If you delete the last measurement reading of the current product, it will be permanently deleted
from the measurement data memory and cannot be recovered.
To delete all measurement readings of the current product

► In the WinFTM main window select Evaluation > Delete All Meas. Data.
To delete individual blocks, already closed

1. In the WinFTM main window select Evaluation > Evaluate Single Block….
The window Block Result appears.
2. Select the block you want to delete.
3. Click Delete Block.
To permanently delete several blocks, already closed

1. In the WinFTM main window select Evaluation > Evaluate All Blocks….
The window EVALUATION appears.
2. In the area Group No. enter the blocks you want to delete.
3. Click Delete groups.
To delete individual measurement readings of blocks, already closed

2. Click Readings.
The window Readings appears.
3. In the list, highlight the reading, you want to delete.
4. Click delete reading.
When you delete a measurement reading, - - - - - - appears in its place in the list of measurement
data and the reading will no longer be included in the evaluation. You can undelete a deleted
measurement reading by clicking again delete reading.
If you delete the last measurement reading of the current product, it will be permanently deleted
from the measurement data memory and cannot be recovered.
To recover a deleted block

1. Highlight the line of the deleted block Block Nr. n. deleted.
2. In the WinFTM main menu select Evaluation > Undelete Reading.
9.6 Saving/not Saving Measurement Readings
Usually, WinFTM saves all readings automatically in blocks within product files. Sometimes it can
be useful not to save the measurement readings, for example, if during a test series you wish to
measure samples that are not part of the test series.
To set up whether or not measurement readings are to be saved

1. Click .
2. Activate/deactivate in the tab Presentation the option Readings not stored.
3. Click OK.
9.7 Overwriting a Measurement Reading
Sometimes it can be useful for certain reasons to measure a specimen again and to overwrite the
old measurement reading with the new one.
To overwrite a measurement reading

1. Select the list presentation. To do so proceed as follows:
a Click .
b In the tab Presentation, area Presentation choose the option Listing.
c Click OK.
2. in the list select the measurement reading, which is to be measured again and overwritten. This
can also be a deleted measurement reading.
3. Click .
The message WARNING: Reading no. n in block N remeasure? appears.
4. Click Yes.
If you click No, then the measurement reading appears at the end of the list.
9.8 Evaluating Individual Blocks (Block Result)
You can evaluate a single a block. You can evaluate the statistical data of the block (mean value,
standard deviation, coefficient of variation, range, max and min values) and see the labels of the
block (Order No., Lot No., Label 1, Label 2, Operator).
Procedure
2. You can now read the statistical data, move quickly between blocks or delete blocks.
9.9 Evaluating all Blocks
You can evaluate the statistical data of all blocks or specific blocks of the product.
Procedure
1. In the WinFTM main window select Evaluation > Evaluate All Blocks….
The window EVALUATION appears.
2. You can now display various evaluations, such as:

• the statistical data of all blocks of the product
• the statistical data of specific blocks of the product.
• SPC chart (if fixed block size is set only)
Statistical Evaluation and Documentation Using the Supplementary Software PDM Setting Up the Print Form Using PDM
10 Setting Up the Print Form Using PDM
10.1 Statistical Evaluation and Documentation

Using the Supplementary Software PDM
The optional supplementary software PDM (product data

management) allows for a more convenient evaluation of the
measurement data than the basic version of WinFTM.
The simple block and final evaluation of the basic WinFTM software
continues to be available. In addition, product-related
documentation is possible
To print a print form, so-called print form templates are available to

the user, where - individually for each print form template - the
variables can be entered. These variables will be replaced by the
content of the actual value of the variable when printing the print
form.
In the supplementary software PDM, the user assigns to the

product a print form template for the block evaluation and a print
form template for the final evaluation.
Menu command for calling the respective dialog window:
“Product > Modify product”.
Setting Up the Print Form Using PDM Editing Print Form Templates Using PDM
10.2 Editing Print Form Templates Using PDM
Starting the Print Form Template Editor

Select from two menu commands:
 “Evaluation > Print Form > new” or
 “Evaluation > Print Form > modify”
Functions:
 Insert variable
 Enter any desired text
 Insert Bitmap graphics (e.g., company logo)
 Insert content of the Windows clipboard
 Format print form (font, font color and font attributes, graphics ele-
ments, tabs and indents, paragraph formats)
The inserted text and the graphics remain stored in the print form
template as well.
File Name of the Print Form

When saving the print form template, the user will give it any
desired file name.
The file extension is added automatically corresponding to the type

of print form:
Type of Print Form Template File Extension

Block Print Form Templates *.rp2
Final Print Form Templates *.rp1
Path for Saving the File

 By default, the created print form template files will be stored in the
sub-folder …\Report1.
Exiting the Print Form Template Editor

Use the command button “Exit” (cf. graphics to the side).
If changes have been made to the current print form template prior
to exiting the editor, the user will be prompted in a dialog window to
confirm or discard these changes:
Inserting Variables for Print Form Templates Setting Up the Print Form Using PDM
Example of a print form template for block evaluation:
10.3 Inserting Variables for Print Form

Templates
How to insert variables into print form templates:
1. You will find a list of all variables that can be inserted into the print
form template to the right of the editing field.
2. Double-click a variable in the list and it will be inserted into the print
form template.
10.4 Variables Available for Block Evaluation

Regarding the numerals 1; 2; 3 … after certain variables
A measurement consists of one or more single readings
(“channels”) that are identified by consecutive numbers (1,2,3).
With the software version WinFTM BASIC, a measurement may
contain a maximum of 24 channels.
Setting Up the Print Form Using PDM Variables Available for Block Evaluation
Example “Dual coating measurement”

Top coating thickness = 1 and intermediate coating thickness = 2
List of variables for block evaluation:
@ANBOrder number of the selected block

or the information that has been entered into the first entry
field of the dialog window “Order No./ Operator”.
@ANRNumber of the current product.
Regarding the numerals @ARTName of the current product.

1; 2; 3 … after certain
variables:
A measurement consists @BDTDate of the selected block, i.e., the date, when the last
of one or more single measurement of the block was taken.
readings (“channels”) that
are identified by consecu-
tive numbers (1,2,3). @BM1Lot number of the selected block
Example “Dual coating or the information that has been entered into the entry field
measurement” of the dialog window “Order No./ Operator”.
Top coating thickness = 1
Intermediate coating
thickness = 2 @BNRBlock number of the selected block.
@BTMTime of the selected block.

That is, the time when the last measurement of a block
was taken.
@CK1Critical process capability index Cpk
Prerequisites for computing and inserting the
process capability indexes:
1) The control box “with Cp and Cpk” from the product tab
“Presentation” (“Product > Modify product”) is checked and
2) The control box “Specification limits” is checked.
@CP1Process capability index Cp

Prerequisites for computing and inserting the
process capability indexes:
1) The control box “with Cp and Cpk” from the product tab
“Presentation” (“Product > Modify product”) is checked and
2) The control box “Specification limits” is checked.
Variables Available for Block Evaluation Setting Up the Print Form Using PDM
@DATCurrent date for the print form

Default format: DD/MM/YYYY, e.g., 24.05.1998)
@DF1Density of the coating that has been entered into the current
product. This applies only to coatings with a fixed
composition.
@DIRName of the directory (folder),

where the current product is saved.
@DM1Unit of measurement (e.g., μm, mils or %) of the respective

quantity to be measured
@FISInserts the header with the instrument name into the

print form.
Note: If this variable is not used in the print form template
it will automatically be placed at the beginning of the
the print form template, when saving.
The header will then appear at the beginning of the print
form; i.e., the header cannot be deactivated!
@MA1Largest single reading in the block = Maximum Regarding the numerals
variables:
@MABName of the measurement application that the current A measurement consists
product accesses. of one or more single
@MI1Smallest single reading in the block = Minimum tive numbers (1,2,3).
Example “Dual coating

@MNRNumber of the measurement application that the current measurement”
product accesses. Top coating thickness = 1
thickness = 2
@MW1Mean value of the single readings of the block.
@N<1Number of readings in the block that fall below a

preset lower specification limit (LSL) .
@N>1Number of readings in the block that exceed a

preset upper specification limit (USL)
@NB1Number of readings present in the block that contribute to
Setting Up the Print Form Using PDM Variables Available for Block Evaluation
the statistical block result
@NCALNumber of single readings that are taken on the calibration

standard during the calibration of the current measurement
application (the current meas. application is that meas.
application that the current product accesses).
Cf. @TCAL.
@NTZText content of the notepad of the product.

Enter/edit notes in the product
-> Command “Product > Modify product”; Tab “Notepad”
@OG1Upper specification limit USL (upper tolerance) for the

presentation and computation of the upper limit
violations in a block
@P<1Percentage of single readings in a block that fall below the

lower specification limit LSL
@P>1Percentage of single readings in a block that exceed the

upper specification limit USL
@PRF“Operator” (= the person making the measurements) of the

selected block, or the information entered into the third entry
@RG1Range
Difference between the largest (maximum) and smallest
(minimum) single reading of the selected block.
@SD1Standard deviation of the single readings of the selected

block.
Variables Available for Block Evaluation Setting Up the Print Form Using PDM
The standard deviation s is a measure for the distribution of Regarding the numerals
the single readings of the measurement series around their 1; 2; 3 … after certain
variables:
common mean value. It equals the mean square deviation of A measurement consists
the single readings from the mean value and is computed of one or more single
according to the equation found in the appendix “Statistical are identified by consecu-
formulas of measurement technology for the tive numbers (1,2,3).
FISCHERSCOPE X-RAY”
measurement”
@STFThe text “Calibration standard-free” Top coating thickness = 1
appears in the print form at that location where the variable Intermediate coating
thickness = 2
@STF has been inserted in the print form template.
Prerequisite:
The current product accesses a measurement application
that has been calibrated standard-free.
This means:
No calibration standards have been entered into the
calibration standard set of this measurement application and
used for the calibration.
Note: If this variable is not used in the print form template,

it will automatically be placed at the beginning of the
the print form template, when saving. At the beginning of the
print form appears the text “Calibration standard-free”.
@TCAL Measurement time (in seconds) for the single readings that
are carried out during the calibration of the current
measurement application on every calibration standard.
The current meas. application is that meas. application that
accesses the current product. Cf. @NCAL
@TIMCurrent time at the time the print form is printed

Format: hh:mm:ss, e.g., 13:45:30
@TMSMeasuring time in seconds currently set in the product.
@UG1Lower specification limit LSL (lower tolerance) for the

presentation and computation of the violations of the lower
limit in a block.
@VALList of single readings measured in a block.
Setting Up the Print Form Using PDM Variables Available for the Final Evaluation
This list includes graphical elements with upper and

lower limit as well as an “analog display” showing upper and
lower violations, when the specification limits are enabled
in the product, as well as the number of each single reading
within the block.
@VB1Confidence interval of the mean value of the selected block.
@VIDInserts the current video image into the print form

(= image of the sample that is visible in the video field at the
time the print form is printed). The image height in [mm]
is stated in square brackets, e.g., @VID[40].
Regarding the numerals @VIFInserts a video image that has been saved in BMP format
into the print form.
variables:
A measurement consists The video image must be located on the hard disc in the
of one or more single directory (folder)…WinFTM\Video
Image height and file name are stated within square brackets,
tive numbers (1,2,3). separated by a comma.
Example: @VIF[40,Fischer.bmp] -> the image that is saved
measurement” in the file “Fischer.bmp” appears in the print form.
Top coating thickness = 1 Image height = 40 mm.
thickness = 2
@VK1Coefficient of variation of the single readings of the selected
block. The coefficient of variation is the standard deviation
in percent based on the mean value and is computed
according to the equation found in the appendix “Statistical
formulas of measurement technology for the
FISCHERSCOPE X-RAY“.
Note: During block evaluation, only the measurements of the
selected block will be used to determine the results!
10.5 Variables Available for the Final Evaluation
To a large degree, the variables for the final evaluation are identical
to those of the block evaluation.
The following variables differ in their meaning from those of the
block evaluation or are available for print form templates for the
final evaluation in addition to those for the block evaluation:
Variables Available for the Final Evaluation Setting Up the Print Form Using PDM
@ANBOrder number of the last block of the selected blocks

or the information that has been entered into the first entry
@BM1Lot number of the last block of the selected blocks

or the information that has been entered into the second entry
@EDBNumber of the last block of the selected blocks.
@EDTDate of the last block of the selected blocks.
@ETMTime of the last block of the selected blocks.
@HG1Histogram of all single readings of the selected blocks

in the current product.
See also @WN1.
@OE1Upper control limit UCL(d) of the mean values of an Regarding the numerals
SPC chart.
variables:
A measurement consists
@OG1Upper specification limit USL (upper tolerance) for the of one or more single
presentation and computation of the upper limit are identified by consecu-
violations in the selected blocks of the current product. tive numbers (1,2,3).

@OR1Upper control limit UCL(s) or UCL(R) of the standard measurement”
deviation s or the range R of an SPC chart. Top coating thickness = 1
thickness = 2
@P<1Percentage of single readings in the selected blocks of the
current product that fall below the lower specification limit
LSL.
@P>1Percentage of single readings in the selected blocks of the

current product that exceed the upper specification limit
USL.
@PRFOperator of the last block of the selected blocks
or the information entered into the third entry field of the
dialog window “Order No./ Operator”.
@RG1Range = Difference between the largest (maximum) and

smallest (minimum) single readings of the selected blocks
Setting Up the Print Form Using PDM Variables Available for the Final Evaluation
of the current product.
@SA1Standard deviation s_a.

This standard deviation expresses the additional distribution
of the mean values of fixed blocks that cannot be explained
by the standard deviation s of the single readings within the
blocks. Thus, it is an additional distribution that is based on
causes different from the distribution of the single readings.
This characteristic statistical quantity is available only with
fixed block sizes.
@SD1Standard deviation s of the single readings of the selected

blocks in the current product.
The standard deviation s is a measure for the distribution of
the single readings of the measurement series around their
common mean value. It equals the mean square deviation of
the single readings from the mean value and is computed
For fixed block sizes @SD1 is the standard deviation of the
block mean values.
Regarding the numerals @SDTDate of the first block of the selected blocks in the current
product. The date of the last measurement of the block
variables:
A measurement consists is used as the date for this block.
of one or more single
are identified by consecu- @SP1Statistical process control chart (SPC chart) for the
tive numbers (1,2,3). attribute 1 of the sample.
measurement” @STBNumber of the first block of the selected blocks in
Top coating thickness = 1
the current product.
thickness = 2
@STMTime of the first block of the selected blocks in
the current product. The time of the last measurement of
the block is used as the time for this block.
@UE1Lower control limit LCL(d) of the mean values of an

SPC chart.
@UG1Lower specification limit LSL (lower tolerance) for the
Products with a Variable or Fixed Block Size Setting Up the Print Form Using PDM
presentation and computation of the violations of the lower

limit in the selected block of the current product.
@VK1Coefficient of variation of the single readings of the selected

block. The coefficient of variation is the standard deviation
in percent based on the mean value and is computed
For fixed block sizes, @VK1 is the coefficient of variation
of the block mean values.
@WN1Normal probability chart of the single readings of the

selected blocks in the current product. See also @HG1.
@BDT, @BTM and @BNR:

- Are available for the block print form template
- Refer to the individual block
- Are not available for the final print form template
10.6 Products with a Variable or Fixed

Block Size
Evaluation mode for products with variable block size: Products with variable
block size
For products with variable block size, all single readings of the
current product, or the single readings of the blocks to be evaluated
selected from the block selection, are used to determine the final
result.
Select block:
Menu command “Evaluation -> Block selection”
Evaluation mode for products with fixed block size :

The following are used to determine the results of the final Products with fixed
evaluation: block size
- Block mean values of the current product, or
- The block mean values of the blocks to be evaluated selected
from the block selection.
Setting Up the Print Form Using PDM Products with a Variable or Fixed Block Size
All variables and parameters that otherwise refer to single readings

refer, in this case, to the mean values of the individual blocks
(except for histogram and normal probability chart, which continue
to refer to single readings).
This changes the meaning of the characteristic statistical quantities
(see appendix “Statistical formulas of measurement technology for
the FISCHERSCOPE X-RAY” in the operator’s manual).
Example: Final evaluation

28 measurements are stored in a product in three blocks.
For 28 measurements of a product, which have been measured
using variable block size, the result for the variable "@NB1"
(number of measurements) in the final print form is 28, because all
single readings of this product have been used to determine the
final result.
If, on the other hand, the measurements have been taken using
fixed block size, the result for the variable "@NB1" is 3, because
the block mean values of the three blocks of this product have been
used to determine the final result.
Attributes of the sample / dependence on the measurement

mode
The number of quantities to be measured (attributes) in a
measurement application that can be computed, displayed and
evaluated depends on the measurement mode.
Example: Triple coating measurement

Measured and displayed are:
- Thicknesses of the top coating and the two intermediate coatings,
or
- for alloy coating measurements, the coating thickness and the
composition.
To display the statistical quantities, such as mean value or standard

deviation of these measurement quantities in the print form,
different variables are required.
For example, if after double-clicking the variable “@MW1”, the

command button [Measurement quantity 2] is actuated in the dialog
Special Features for SPC Charts Setting Up the Print Form Using PDM
window “Measurement quantity selection”, the variable “@MW2”

will appear in the print form template.
NOTE: Note: The variables must always be entered in upper
case letters!
NOTE: Note: The character @ is part of the variable, i.e., it
must be entered, must not be deleted and it must not
be followed by space!
NOTE: Note: Images that are located in the clipboard can be
inserted in the print form template using the menu
command mentioned below.
- Sub-program “Edit print form or print form template”
- Menu command "Edit > Insert"
Images saved in the BMP format can be inserted in the print form
template with the variable @VIF.
10.7 Special Features for SPC Charts
When the option box “all” is checked, the SPC charts of all
quantities to be measured (attributes) will be inserted in the print
form template one after the other.
If one of the option boxes “Measurement quantity 1”, "Measurement

quantity 2” or “Measurement quantity 3” is checked, only the SPC
chart of the respective measurement quantity will be inserted in the
print form template.
Option boxes “Maximum number of groups in the graphics”
Use these boxes to specify the maximum number of groups that will
be presented in the SPC chart.
Option boxes “Size”

When the option box “Standard” is checked, the SPC chart will
appear on the print form in the standard size.
If the option box “user-defined” is checked, the fields “Height” and
“Width” can be filled in to influence the size of the SPC chart to be
printed.
“Height” or “Width”
Use these fields to enter the height, or the width, of the SPC chart
to be printed.
The size specifications will appear in square brackets immediately
following the variable after inserting the variable in the print form
template
Setting Up the Print Form Using PDM Printing the Print Form Using the Supplementary Software PDM
(e.g., @SP1[150,90]).
NOTE: Note: You can only enter numbers in these fields if
the option box “Size user-defined” is checked.
10.8 Printing the Print Form Using the

Supplementary Software PDM
Print forms can be printed very easily when using the

supplementary software PDM.
Select the print form using the menu commands OR the

command buttons:
Icon for block evaluation Icon for final evaluation
Call using the menu command: Call using the menu command:
“Evaluation > Print form block “Evaluation > Print form final
evaluation” evaluation”
The final print form evaluates only those blocks that have been
selected before for the final print form using “Evaluation”, sub-menu
“Block selection” or the command button “Block selection” (cf. figure
on the side).
Three options for printing the print form are available:

- Menu command “File > Print”, or
- Control command “CTRL-P” from the keyboard, or
- Clicking the command button “Printer” (cf. figure on the side)
Before printing, the print form can still be edited (e.g., removing the
video image: Click the image and press the Del key) or text entered.
These changes disappear once the Print window is exited and
“Print form block evaluation” or “Print form final evaluation” is
selected again.
Printing the Print Form Using the Supplementary Software PDM Measurement Uncertainty and Measuring Ranges
11 Measurement Uncertainty and

Measuring Ranges
The program is able to display for each measurement result a

corresponding measurement uncertainty.
To estimate the Measuring range
1 In the WinFTM main menu select Calibrate > Estimate

meas. Range.
The window Measuring Range appears.
2 Change the value for Required precision or meas. time, if

necessary.
3 Click Calculate.
Measurement Uncertainty and Measuring Ranges Meaning of the Measurement Uncertainty
Definition "Measuring range"

Range, where the precision does not exceed a specified limit value.
Precision: random measurement uncertainty due to distribution of
the spectral channel contents of the instrument.
11.1 Meaning of the Measurement Uncertainty
Measurement uncertainty refers to the unknown difference to the

true value. Physical samples representing the "true value" are
called standards. Their characteristic values are called nominal
values or engraved values. However, they are valid and can be
used for calibrations only if their uncertainty is specified. This is a
measure for the difference to the true value and is, by nature, a
probability statement. Its numeric value X characterizes a range X
+ X. It depends on the probability of still being able to capture the
true value when using this value.
PTB [German Physical and Technical Institute] uses the term

"Überdeckungswahrscheinlichkeit" [overlapping probability], which
is identical with the term "confidence interval" used in statistics
literature.
Assuming a normal distribution probability density for the difference
to the true value, one identifies its distribution parameter s with the
standard measurement uncertainty u, and using multiples thereof,
can specify well-defined measurement uncertainties. The often
recommended expansion factor k shall be 2, such that a range X +
2*u contains the true value with a 95% probability.
For several reasons, k=1 is meaningful as well, because here the
standard deviation reaches the random portion (see below) of the
measurement uncertainty for a large number of repeat
measurements. However, here the hit rate is only 68%.
Safety conscientious companies and people prefer to allow less

than 1% probability for errors - and select k=3. In the end, however,
it does not matter in what unit the measurement error is specified;
important is that it is known.
To meet different requirements WinFTM allows for the input of k, cf.

picture at the side. The default value is set to k=2.
Expansion factor k. Input of the expansion factor k that determines

the confidence interval of the error specification, using "General >
Measuring Head Parameters > Default Settings".
Random Error Measurement Uncertainty and Measuring Ranges
11.2 Random Error
If a measurement is repeated N times, the single readings will

deviate around a mean value. The cause for this is the random
distribution of the channel contents of the spectrum, whose law of
formation (Poisson distribution) we know. This is a special case in
measurement technology that allows us, or the program,
respectively, to make a prediction about the repeatability precision
from only one single measurement, or one single spectrum,
respectively. The respective value will be displayed or can be
exported (cf. Section 4). In reality, there are, however, additional
causes for random fluctuations that cannot be determined
theoretically, such as the influence of the gas amplification in
connection with the software drift compensation, for example. In
some cases this may lead to the measured deviations (standard
deviation) exceeding the theoretical prognoses. However, they
typically correspond surprisingly well.
NOTE: Side note: If a measurement application does not cor-
respond to the reality of the measured sample, this
not only leads to an increased mq value but also to
an increase in the deviations). In any case, the ran-
dom portion of the error can be determined using sta-
tistical means. The program computes the
uncertainty of the mean value from the repeatability
deviations, where the numeric value depends on the
setting of the confidence interval k (see above).
WinFTM cannot describe the differences between reproducibility
and repeatability (= precision) described in the literature since they
depend on the way the tests are carried out. Only if, for example,
the individual measurements always include a new positioning of
the sample, and maybe even a new operator, will the deviations of
the measurements reflect these influences as well. In this case, the
confidence interval of the mean value characterizes the
reproducibility concerning the investigated influencing factors. In
any case, these measurement errors are greater than the random
measurement uncertainties due to the Poisson-distributed
deviations of the spectral intensities owed to the X-ray fluorescence
method.
Measurement Uncertainty and Measuring Ranges Systematic Error
Calibration standard set.

Input of the nominal values of the standards. The uncertainties (errors)
must be entered as well. If the pre-set Zero is not changed then the
program will automatically use 1% of the nominal values for coating
thicknesses and area masses, and 1 mass % for concentrations as the
uncertainty, referenced to k=1 (68% confidence interval).
The example applies to the measurement application Au/AuCuCd/Ni/
CuZnPb.
11.3 Systematic Error
While the random errors described above can be characterized

using statistical means, the systematic portion of the error can be
characterized only by comparison with measurement results from
standard samples. The systematic error could be described
precisely and also corrected if the nominal values of the used
standard samples were precise and it were possible to measure
them without a random portion of the error. Unfortunately, this is not
the case. Both the uncertainty of the nominal value and the
(random) measurement uncertainty of the calibration measurement
determine the calibration error. One must additionally take into
account that for measurement results that are distant from the
standard values, the uncertainty of the calibration (with WinFTM,
this is the correction of the standard-free result value) increases
according to experience. The uncertainty of the correction depends,
of course, on the extent of the correction itself. Thanks to the quality
of the FP-supported evaluation program, the required corrections
are typically small, such that this fact rarely dominates the
measurement error. It is significant that this error can now be
specified and the risk is, therefore, known.
One prerequisite for its computation is the specification of the
uncertainties of the standards. This is done in the calibration
Display of the Measurement Uncertainty Measurement Uncertainty and Measuring Ranges
standard set, cf. figure below. For the confidence interval, the
general provision according to Section 1 applies here as well.
For program-technology reasons, the systematic portion of the error

is available only via On-line-Export.
Setting of the error display for screen output and export in the
"Calibration standard set". Default setting: Systematic portion.
The systematic portion cannot be determined if no calibration has

been carried out. It will be set to Zero by the program.
11.4 Display of the Measurement Uncertainty
To be able to display all possible information, both the systematic

and the random portion of the error can be suppressed during the
error output. The setting for the type of error to be output is carried
out in the "Calibration standard set" ( ‘Calibration standard set.’,
beginning on Page 86). The table below shows the effect of the
error type setting for single readings and mean values.
Error types, cf. Fig. 2
Switch "Measurement Error specification for Error specification for

uncertainty display" single readings mean values
Random portion Theoretic error esti- Confidence interval of

mate from the mea- the mean value
sured spectrum according to t-distribu-
tion (student-V.), com-
puted from the
standard deviation of
the block.
Measurement Uncertainty and Measuring Ranges Display of the Measurement Uncertainty
Systematic portion Computed from the Uses the error value of

random error of the the last measurement
calibration measure- of the block
ment and the uncer-
tainties of the nominal
values of the stan-
dards, according to the
input in the "Calibra-
tion standard set"
Systematic + random Root of the squared Root of the squared

portion sum of the random sum of the random
and the systematic and the systematic
portions portions
Tab. 2: Output of the measurement uncertainty of the single

readings
Screen output Only for large number display, can be switched

off in "..\Measuring head parameter\Pre-set-
tings"
Output in block print Not possible

form
Output in final print Not possible

form
Export Output with every single reading, only with

Online-Export
Tab. 3 Output of the measurement uncertainty of the mean

values
Screen output Not possible
Output in block print ONLY FOR THE RANDOM ERROR PORTION,

form regardless of the error type setting
Output in final print ONLY FOR THE RANDOM ERROR PORTION,

form regardless of the error type setting
Export Output after each end of a block (block evalua-

tion), with On-line-Export. For Off-line (subse-
quently), only the random portion can be output.
Display of the Measurement Uncertainty Measurement Uncertainty and Measuring Ranges
Example for the export of single readings and block results
Online export to text file.

Export template
"Single reading" por- @NBR. @VA1 +/- @ER1@CRX@LFX@END

tion:
"Block evaluation" por- Evaluation Block No. @BLK @ANB @PRF

tion: @LOT@CRX@LFX@MW1+/- @VB1 s=@S_1
(N=@NM1)@CRX@LFX@CRX@LFX@END
Task Programming Starting a Task
12 Task Programming
A Task is a sequence of predefined commands which can be used

for programming WinFTM procedures.
12.1 Starting a Task
The menu command “Task > Task start” starts a task.

Use the F3 function key to interrupt the program run.
12.2 Programming Tool
The commands are similar (or in some cases equal to) the import
commands. The list of commands represents a TXT file which can
be edited by common programs. WinFTM supports this
"programming" by a tool which inserts the selected commands with
a double-click in the command list of the task.
Selecting and opening a task

The menu command “Task > Task Modify or Create” opens the
dialog window „Open“, in which you can select and open tasks.
Getting Started with Task Programming Task Programming
12.3 Getting Started with Task Programming
There are some predefined examples which are helpful for testing.
The user should start his task programming by a modification of
these examples. The "Save as .." option can be used to create new
task files. The commands and examples are described below.
12.4 Syntax of Task Commands
3. The command (cf. list of task commands below) starts with a "|" -
except from the first command.
Please note! If there is no vertical line "|" in front of the first com-
mand, the task will not be operable!
4. Characters following a ";" are ignored - up to the next "|".
Hence, all what follows a semicolon is a comment.
5. The commands, variables, and arguments have to be separated
by a TAB. Otherwise they are ignored.
6. Each command returns a logic argument TRUE or FALSE.
Normally, TRUE is for O.K. and FALSE is for Error.
Other meanings are possible, please see below.
12.5 List of Task Commands
All task commands are listed in the right part of the dialog window
"Create task". They are listed within functional groups and are
accessible within a hierarchic order. Click the knot symbol left of the
functional group's name. This will give you direct access to the
single task commands.
CodeVariable(s)Description
Measurement
f40 N measuring time = N sec.
f01 - Starts a single a measurement
f02 - Starts a XY-RUN
f41 - Ready for measuring ?
Returns TRUE (OK) or FALSE (Error)
f60 - Switch ON "Measuring calibration standards"
f61 - Switch OFF "Measuring calibration standards"
Product handling
Task Programming List of Task Commands
f10 X Loads - from current directory - product no. X

f11 A,XLoads - from of directory A - product no. X
f12 B Loads - from current directory - product with
designation B
f13 A,BLoads - from directory A - product with
designation B
f15 N Loads Stabi Test product no. N
f16 S Loads Stabi Test product S
Block handling
f20 S Sets Order No.= S
f21 S Sets Lot No.= S
f22 S Sets Operator = S
f25 - Closes block
XY(Z)-stage
f30 x,y,zTable moves to x,y,z (abs. coordinates)
f31 x,y,zTable moves to x,y,z (rel. coordinates)
f32 - Sets offset
f33 - Deletes offset
f35 - Deletes all XY(Z) coordinates
f36 x,y,zAppends XY(Z) coordinates (abs.)
f37 x,y,zAppends XY(Z) coordinates (rel.)
f38 - Test coordinates
f39 - Resets the test counter
Evaluation
p01- Opens block report
p02- Print key (in block report)
p05- Closes block report
p10- Deletes last block
p15 -Deletes last measurement
f62 - Online export ON
f63 - Online export OFF
Labels & Loops

The term "jump address" has the same meaning like the term
"label".
A jump is an exit from the continuous program cycle due to a jump
List of Task Commands Task Programming
command. The program cycle is then continued at a different place,

that is, at the jump address. Only one jump address with the same
name may be entered in the Task.
A loop in the program cycle is created if the jump address points to

a program step that is ahead of the jump command more towards
the beginning of the program.
p51L Sets a label L

p52L GO TO L
p53L if Error in last command: GOTO label L
p61V1Sets variable 1 = V1
p71L V1 = V1 -1, if V1 > 0 GOTO label L
Accessories
f42 S Creates a text box on the screen (Text = S)
Returns TRUE or FALSE (Button [OK] or [Cancel])
f50 - Starts a reference measurement
f64 N Sets a delay (pause) of N sec.
f90 - Closes a window if not the main window
(If no window can be closed then return code = ERROR)
f91 - Reset X-RAY, new PC-Communication, new HV
control etc.
p98- Singlestep mode: Task is carried out by single steps
following F4 key print
p99- Singlestep mode (p98) OFF
… depending on the last readings (tolerance limits) …

p80S,LS symbolizes a logical relation acc. to the table given
below. In case of TRUE (the respective relation is
fulfilled) the task steps to label L.
… depending on the last measurement data … (specification

limit)
p80S,LS symbolizes a logical correlation according to the
table below.
Task Programming Example Specification Limit Commands
In case of TRUE (the respective relationship is fulfilled), the task

will jump to label L.
S Meaning
(“i” represents the number of the measurement data column)
> KiReading no. i (i=1,2,3) > USL

< KiReading no. i (i=1,2,3) < LSL
> KXminimum 1 reading is > USL
< KXminimum 1 reading is < LSL
?Ki Reading no. i (i=1,2,3) is not measurable
?KX minimum 1 reading is not measurable
(in the following sub-chapter, the commands of S are explained

using a practical example)
12.6 Example Specification Limit Commands
The following example clarifies the terms used on the previous

pages at “S”:
Task:
The values of the “current measurement data set” in the three-line
table shown below are sought.
The “current measurement data set” shall be the numeric set

printed in italics; it is the measurement data set of the last previous
measurement. In our example, it is the number set in the third line
(with “n = 3”).
The placeholder i (i=1,2,3) is the counter for the place number in
the line from left to right of the measured element within the current
measurement data set.
! Caution
The placeholder i does not stand for the consecutive number of
the measurement data set within the test series!
(Note: correctly, this would be the designation n)
i=1 i=2 i=3
n= 1 Cr = 0.70 μm Ni = 4.09 μm Cu = 6.17 μm
Example Specification Limit Commands Data Back-up
n= 2 Cr = 0.73 μm Ni = 4.12 μm Cu = 6.27 μm

n= 3 Cr = 0.78 μm Ni = 4.21 μm Cu = 6.20 μm
Solution: The values below from the third line (where n=3) were
sought:
Here, reading 1 is the reading for Cr, i.e., 0.78 μm

Reading 2 is the reading for Ni, i.e., 4.21 μm
Reading 3 is the reading for Cu, i.e., 6.20 μm
13 Data Back-up
Save the complete installation regularly with a backup program like Protect your data - back
Acronis. them up!
You can also copy the complete folder C:\FischerProg to a separate
data medium (network drive, external hard disk).
Thus, you are able to restore the data in case of a disk crash or
accidental erasure of important files.
Mass per Unit Area and Geometric Coating Thickness Example Specification Limit Commands
14 Mass per Unit Area and Geometric

Coating Thickness
The natural unit of measurement for X-ray fluorescence is mass per

unit area.
Definition "Mass per unit area": Mass per area
The number of atoms or the mass per unit area can be determined
from the fluorescence spectrum. However, this area-related mass
AM (e.g., in g per m² or mg per cm2) is not the typically preferred
unit of measurement in coating technology - rather, the coating
thickness Th (e.g., in μm) is normally used for the designation of the
coating process or for the specification of the coated product and is
usually requested in the supplier’s document.
Thus, the mass per unit area needs to be converted into the coating
thickness.
The correlation between mass per unit area AM and the geometric
coating thickness Th is
Th = AM /  (1)
where  designates an effective density (in g/cm³) that represents

the mass of the coating element per unit volume.
In combination with a thickness measurement per cross cut, i.e., at
a known coating thickness Th, the density  of the coating can be
computed from it using equation (1). Other coating thickness
measurement methods for determining the geometric coating
thickness may be used as well.
It is then possible to adjust the two methods through proper

selection of the density such that they provide the same
measurement result for the geometric coating thickness
However, a prerequisite is that the density does not fluctuate
significantly during the coating process. This would lead to
deviating coating thickness readings when using the X-ray
fluorescence method.
Physical background
An XRF coating thickness test instrument evaluates the intensities
of the radiation of the coating and substrate materials. The intensity
Example Specification Limit Commands Mass per Unit Area and Geometric Coating Thickness
of the characteristic radiation of the coating material is determined

from the number of atoms within the excited sample volume.
The intensity of this radiation is higher as more atoms of the sample
volume are excited by the primary radiation and emit their radiation
to the detector.
However, the following applies to the radiation of the substrate
material:
The higher the intensity of the characteristic radiation of the
substrate material, the lower is the coating thickness.
Reason: The absorption of the substrate material radiation

penetrating the coating is lower through a “thinner” coating.
The same applies to multiple coatings and coatings comprised of
several elements.
Functional principle of X-ray fluorescence

Primary X-radiation (symbolized by black arrows) excites the
sample volume to be analyzed into emitting fluorescence radiation.
Each occurring element emits a characteristic energy (symbolized
by red or green arrows) that are registered separately by the
detector.
The following assumption is made for the quantitative computation

of these effects in the defined test area (sample volume) under the
surface to be measured (measurement spot):
The excited atoms are distributed homogeneously across the entire

volume, i.e., the specific density  of the material is constant in the
entire volume that is to be measured.
Mass per Unit Area and Geometric Coating Thickness Correlation between Mass per Unit Area and Coating Thickness
Essentially, the measurement of the x-ray fluorescence is an

indirect count of the excited atoms under a surface with a precisely
defined size, the so-called “measurement spot”.
14.1 Correlation between Mass per Unit Area

and Coating Thickness
If a coating is comprised of several elements, the instrument initially

measures the mass per unit area of each individual element.
Then the respective masses per unit area of all elements are added
taking into account their weight proportions, and a mean value is
computed.
The division of the mean value of the mass per unit area through
the weighted mean density provides the sought coating thickness
Th.
Th = Fmges /  mean
 mean mean specific density 1/tot = 1/1  c1 + 1/2  c2 + 1/3  c3 + …

1, 2, Continuous number of the elements in the analyzed coating
…
c Element concentration
Th Coating thickness
NOTE: Important note for practical applications:

The computation assumes a homogeneous composi-
tion of the sample. When preparing the sample, en-
sure that a representative density is stated. The
analysis may provide a wrong result if samples are
not homogenous and only a small portion of the sam-
ple is used for the analysis.
! Important:
The thickness measurement using X-ray fluorescence assumes a
well-defined and constant density .
The two schematic drawings in Figure 2 show that the X-ray

fluorescence method is actually blind to the (geometric) thickness:
Two coatings with the same geometric thickness are presented
here (prerequisite: same material, i.e., coating element).
The presentation of process 1 shows the atoms of the coating being
stacked “loosely”. However, this cannot be measured as the
spectrum does not show a measurable line. The reason may be that
an additional “matrix element” is present in the coating.
The presentation of process 2 shows that the atoms are
significantly closer to one another.
Correlation between Mass per Unit Area and Coating Thickness Mass per Unit Area and Geometric Coating Thickness
Correspondingly, the density is greater than the one shown in

Figure 1. The XRF method can provide the correct (geometric)
coating thickness if the measurement application that is used in
process 1 uses a lower density for converting the mass per unit
area into coating thickness according to equation 1 than the one of
process 2. Otherwise, the measurement result would not
correspond to that of a method that measures the geometric
thickness directly.
Figure: Illustration of the
density issue
Although the linear

expansion of the two
coatings is the same, the
density (and with it the
mass per unit area) of
process 1 (left) is signifi-
cantly lower than that of
process 2 (right).
In practical applications, this issue often becomes apparent and is

the cause of deviating results between supplier and customer. This
is most often the case if the coating contains elements other than
the main element and the instrument or measurement application
does not or can not measure these elements. In such cases, the
density must be lower than the one that was to be used if only the
main element was present.
Examples:
1. Precious metal coatings, e.g., gold:

Here, instead of the density of pure gold of 19.3 g/cm³ found in
tables, a density of, for example, 17.5 g/cm³ as stated by the
manufacturer of the gold bath or as agreed upon between the
parties is used.
The reason for this is that the bath contains elements or
compounds (e.g., cyanide) that are included in the coating but not
visible in the X-ray fluorescence spectrum. However, the used
density should be provided in the supply documents and should be
part of the specifications; after all, it determines or not the products
meet the supply specifications.
2. Hard material coating, e.g., TiN or TiC:
Here, C or N is incorporated in the coating but remains invisible in
the fluorescence spectrum. The (effective) density can be
determined according to the method of comparison with a cross cut
as mentioned above.
Mass per Unit Area and Geometric Coating Thickness Calibration Standards from FISCHER
All stored density values within the measurement application of

WinFTM are values taken from tables (source: Periodic Table of
Elements, Heräus GmbH/Hanau, Reference 5C 3.81\N Ko).
However, they can be changed by the user.
14.2 Calibration Standards from FISCHER
The density information of all calibration standards are computed

according to the values of the Heräus table, and are stated
accordingly on the certificates. Thus, the coating information of the
calibration standards have been determined according to the mass
per unit area method.
No data have been obtained using the cross-cut method.
By default, WinFTM uses the density values of the Heräus table.
The calibration lab of FISCHER has been accredited by the
Deutsche Akkreditierungsrat [German Accrediting Council] for the
measurement unit “mass per area unit”.
14.3 Setting the Density in the Def.MA
You can manually set the density of an element in the Def.MA.

Please observe the notes of the previous sub-chapters.
Dialog window “Def.MA”. The current density setting for each

element is shown in the left window.
To open the dialog window “Def.MA”:

The menu command “Calibrate > Def.MA new > Thickness mode”
opens the dialog window “Def.MA” in the thickness mode.

Setting the Density in the Def.MA Mass per Unit Area and Geometric Coating Thickness
The thickness mode is the most frequent mode selection.

If you wish to work in a different mode, select the respective mode
command to operate the dialog window “Def.MA” in the desired
mode.
Dialog window “Definition of elements“. The density of the current

element can be entered or edited in the entry box “g/cmˆ3”.
To open the dialog window "Definition of elements"

7. Open the dialog window "Def.MA" (cf. instructions above).
8. Click [New coating] to open the dialog window "Definition of ele-
ments".

Measurement Device Monitoring for the FISCHERSCOPE X-RAY Calibration of X-ray Fluorescence Measuring Instruments
15 Measurement Device Monitoring for

the FISCHERSCOPE X-RAY
According to quality management guidelines, all measuring

instruments are subject to measurement device monitoring.
FISCHER, as a manufacturer of measurement instruments,
accounts for this and sees to it that customers who require advice
and support are able to properly use their measurement
instruments. The users of our instruments are companies all of
whom are essentially certified according to the DIN EN ISO 9000
QS Standards. They are required to perform quality management
and thus also plan, carry out and document measurement device
monitoring. We will offer some pointers below. These
recommendations can then be adopted either in part or in full into
the quality management manual in the form of process or test
instructions. Of course, they apply analogously to instruments of
other manufacturers.
15.1 Calibration of X-ray Fluorescence

Measuring Instruments
With X-ray fluorescence measuring instruments (DIN 50987, ISO

3497), the displayed readings are calculated from the spectrum of
the fluorescence radiation. Measurement applications define the
structures and features of the samples to be measured (order and
composition of the coatings and of the substrate material, quantities
to be measured), provide the spectra evaluation and set the
instrument to the intended measurement parameters, e.g., to the
operating voltage of the X-ray tube.
The expression ”calibrating”
NOTE: In the context of this recommendation, ”calibrating” in
the spirit of the instrument technology refers to an
”adjustment”. In the instrument technology, re-mea-
suring the calibration standards in order to verify that
the readings obtained with the measurement applica-
tion are still correct is referred to as ”calibration”. Still,
for practical and historical reasons and for the neces-
sary agreement with the Standards DIN 50987 and
ISO 3497 (Coating Thickness Measurement Using X-
ray Fluorescence) we will continue to use these once
selected designations, especially since these desig-
nations are also used in the software of the instru-
ments.
Each measurement application is calibrated with calibration
standards that should in their structures be as close as possible to
the sample but may, however, differ from the samples in their

Calibration of X-ray Fluorescence Measuring Instruments Measurement Device Monitoring for the FISCHERSCOPE X-RAY
coating thickness and to a limited degree in the composition of the

coatings and of the substrate material. The calibration standards
must exhibit known coating thicknesses, and for the analysis,
known compositions (nominal values).
To this end, the supplier of the calibration standards measures
them against higher-value master standards with secured nominal
values.
A certificate confirms the traceability, describes the method how the
nominal values have been determined and may also indicate the
test conditions, the nominal values and their measurement
uncertainties.
Through the calibration, the nominal values of the standards are
transferred to the measurement application. Thereafter, the
measured coating thicknesses and concentrations are correct, as
long as the calibration standards are labeled correctly. After each
calibration, the calibration is checked by re-measuring the
standards to ensure that all entries have been correct and that the
calibration indeed leads to correct results. These check
measurements should be documented in the same manner as all
other test measurements.
The instrument will then measure the coating thicknesses of other Trueness
specimens that correspond in coating structure and substrate
material to the measurement application correctly as well. The
trueness of measurements is a quality that is particularly important
because supply contracts for coated products often require the
observance of specification limits. Wrong or incorrect
measurements can then lead to unwarranted acceptance or
rejection. The trueness aids in avoiding non-conforming
measurement results both within the production and between
supplier and customer. A measurement must be based on
calibration standards and be traceable. Only then is it correct. If
calibration standards do not exist or are not available for certain
measurement applications, then reference samples that have been
measured using a calibrated measurement application or have
been measured standard-free shall assume their roll
(documentation is required; see Fischer Application Report
vr 9812).
Strictly speaking, a ”correct” measurement is secure only for such

samples that correspond to the calibration standards in their
coating structure and composition. WinFTM allows for certain
differences between the structure of the sample and that of the
standard, e.g., differences in the substrate material. Although these
differences are physically taken into account correctly, for formal
reasons they require documentation.

Measurement Device Monitoring for the FISCHERSCOPE X-RAY Why Monitor Measurement Devices?
15.2 Why Monitor Measurement Devices?
Stability In the course of time, each coating thickness measuring instrument

changes due to wear and drift. Long-term, this also changes the
measurement applications and calibrations, and thus, the
measurement readings. The resistance of an instrument to long-
term changes is called stability. Each user is interested in a high
stability of his instrument.
To determine the long-term behavior of the instrument and its

measurement applications, the user checks in regular intervals and
if required, takes corrective action. These measures are essential
for measurement device monitoring. Measurement device
monitoring secures the trueness of the measurements permanently.
As long as a measurement application does not change or if it is
always corrected on time, the calibration and thus the measurement
readings of the measurement application will remain correct.
However, a measurement application can also produce wrong
readings due to erroneous operation, e.g., changing the
measurement parameters, wrong or improper calibration or faulty
measurement conditions. This too can be recognized and remedied
by measurement device monitoring.
The user has the duty to check and monitor each individual
measurement application in the instrument, not only the instrument
as a whole. The instrument manufacturer cannot satisfy this task.
He may provide a calibration service but cannot continuously pay
attention to the trueness of the measurements. The basic
requirements of measurement device monitoring are that they are
carried out regularly and that they are documented. Thus,
measurement device monitoring is a task of the user who should
delegate this task to a trustworthy person with sufficient expertise.
The calibration standards are also measurement devices and

therefore subject to monitoring. However, they change very slowly,
generally through wear and tear during use, more rarely through
structural changes, e.g., diffusion or corrosion. In contrast to the
instrument, the user will not be able to carry out the measurement
device monitoring for the calibration standards. We recommend to
treat the standards gently, to store them according to instructions
and to have them tested or re-certified regularly, e.g., once a year.
Certified calibration standard sets or so-called application kits are
available for most of the typical measurement applications. They
are necessary to verify the trueness of the measured values in
cases of dispute and to minimize product liability risks.

Variation of Measurement Readings Measurement Device Monitoring for the FISCHERSCOPE X-RAY
15.3 Variation of Measurement Readings
The displayed value of any measuring instrument will not be exactly Repeatability
the same when repeating a measurement, instead it will vary, even Conditions
under otherwise equal measurement conditions (repeatability
conditions), due to random influences of the instrument. If repeated
measurements do not exhibit variations, either the resolution
(decimal places) is too low such that the variations are not visible
or the instrument is defective and shows the same value at all
times. The resulting deviations are considered random because it
cannot be predicted whether the next measurement is bigger or
smaller than the result of the test series up to that moment.
The standard deviation of a test series under repeatability

conditions is the general measure for the variations of the readings.
It can be calculated in the known manner from the single readings.
The measurement result (mean value and standard deviation) of a
test series is to a certain degree random as well and exhibits an
unavoidable measurement uncertainty. This can be seen in that
repeating a test series will lead to a (often only slightly) different
measurement result. However, the variations of the mean values
are smaller (by a factor of 1/n, where n is the number of the single
readings of the test series) than the variations of the single
readings.
The measurement uncertainty u of the mean values is derived from Measurement
the standard deviation s and the number n of the individual readings Uncertainty u
included in the test series:
u = c(n) · s (1)
where c(n) is a factor that is dependent on the number of single
readings and the so-called confidence level 1-. For n = 5, 10, 20,
30 and 50 (and a confidence level of 95%) the resultant factors are:
c(5) = 1.24 ---- c(10) = 0.71 ---- c(20) = 0.48 ---- c(30) = 0.37 ----
c(50) = 0.28.
The measurement uncertainty forms the confidence interval when Confidence Interval
deducted as difference from and added as sum to the mean value
(plus/minus). It is an interval around the mean value of the test
series that contains with a 95% probability the true (overall) result
that one was to obtain if one were to measure infinite times. In
measurement technology, the results are always displayed
graphically in the same manner by drawing the mean value as a
circle or point and the confidence interval as an ”error bar” from this
point (”bar-bell”). The confidence interval becomes narrower as the
number of single readings that form the mean value increases and
the better the repeatability precision of the instrument, or
respectively, the smaller the standard deviation of the single
readings is (see above equation for the measurement uncertainty u
and the factors c(n)).

Measurement Device Monitoring for the FISCHERSCOPE X-RAY Trueness of Measurement Readings
Variations The variations of an X-ray fluorescence instrument depend on the

measurement parameters measurement time, distance between
the detector and the specimen, intensity of the primary beam and
other characteristics of the instrument as well as on the physics of
the X-ray fluorescence with regard to the measurement application.
It is interesting that with the X-ray fluorescence method, the
variations of the readings can be calculated theoretically from the
spectrum of a single reading such that a measure for the variation
can be specified with one single reading. The standard deviation is
used to evaluate the repeatability precision of the instrument with
regard to the measurement application, the feature to be measured
and the setting parameters of the instrument. The better the
repeatability precision of the instrument, the less the measurement
results will be ”falsified” by the instrument. Thus, a good
repeatability precision is considered an important quality feature of
an instrument and is of particular importance when evaluating the
suitability of a measurement device.
Guaranteed Error The calibration standards are subject to a ”measurement
uncertainty” as well because their nominal values are obtained
through measuring. For this reason, the nominal values of the
standards also include an error, the guaranteed error (e.g., 5% of
the nominal value) that includes the mean value, and its interval
should include the true value.
15.4 Trueness of Measurement Readings
The repeatability precision of an instrument must not be confused

with the trueness of a reading. The trueness of a measurement
result is determined by comparing the mean value B of a test series
of a sample, for example a calibration standard or a reference
sample, with its known value A that has been recognized as being
correct, the nominal value. The trueness is represented by the
difference B – A between the mean value and the nominal value.
The measurement result is correct if the difference B – A is near
Zero.

Random and Systematic Deviations Measurement Device Monitoring for the FISCHERSCOPE X-RAY
Please note that we expressly speak of the trueness as a property

of the measurement readings. However, many believe the trueness
to be a property of the instrument! Unprofessionally, this is
expressed in the question for the ”accuracy of the instrument”.
However, the trueness is obviously very dependent on the settings
(e.g., the calibration) and the monitoring of the instrument. These in
turn depend on the competency and dependability of the user. For
this reason, the instrument manufacturer is not able to guarantee
the trueness of the values measured with this instrument or even
apply a sticker to the instrument stating the trueness. Each
measurement result is as correct or wrong as allowed by the user.
Thus, the trueness cannot be a criterion for the quality of an
instrument, at best it can be an indication of the stability (trueness
during long-term operation of the instrument without necessary
interim corrective measures).
In measurement technology, the term ”accuracy” is essentially

meaningless and of little relevance. In contrast to it, the terms
trueness and precision that are unambiguous (contrary to the term
accuracy) are preferred. On the international scene of
standardization, the situation is similar: the term accuracy can be
explained only qualitatively; it is split into the terms trueness and
precision. The term precision in turn is divided into repeatability
(repeatability precision = precision under repeatable conditions)
and reproducibility (comparative precision = precision under
comparable conditions).
15.5 Random and Systematic Deviations
Is a single reading that has been measured on a calibration

standard and that deviates significantly from its nominal value, such
that B – A is much bigger or smaller than zero, correct or rather
incorrect? It obviously has error, as long as the calibration standard
is not labeled incorrectly, that is, A being wrong. The question then
remains: is the deviation of B – A from zero a random or a
systematic (i.e., not a random) one?
For an expert, it is not enough to base the answer to this question
on one single reading.
To differentiate between random and systematic deviations, one

needs to make many (>10) measurements under repeatability
conditions on a calibration standard and then compare the nominal
value with the mean value. The first prerequisite for the comparison
is: the measurement application applies to this calibration
standard. This is very important and is often disregarded in
practical situations! The comparison is particularly inadmissible if
the expected substrate material of the measurement application
deviates significantly from the substrate material of the calibration

Measurement Device Monitoring for the FISCHERSCOPE X-RAY Random and Systematic Deviations
standard: In such a case, the user need not be surprised by the

deviation.
Statistics teaches: Only when a mean value of a test series of at

least 7 single readings misses the nominal value of a calibration
standard by more than one standard deviation can one assert that
the deviation is a systematic one. Expressed better and more
precisely: The deviation is systematic when the nominal value of a
calibration standard is outside the confidence interval of the mean
value of a test series.
Systematic measurement deviations from the nominal value always

have a particular algebraic sign: they are either always positive or
always negative. A systematic deviation must be made to disappear
through suitable corrective measures in order to measure correctly.
These measures will be treated in greater detail beneath.
We speak of a random deviation of a measurement result from the

nominal value when the nominal value is within the confidence
interval around the mean value. Thus, a random deviation should
not be considered an ”error”; quite to the contrary, it is actually
natural because it is caused by the variations of the instrument and
can, therefore, be explained. The mean value is correct despite a
random deviation from the nominal value. In other words: The
difference between the nominal value and the mean value cannot
be resolved with the existing precision of the instrument.
Check measurement The following applies to a check measurement (test) of the
(test) of the calibration calibration: The mean value of a test series on a calibration
standard may at times be smaller and at times bigger than the
nominal value of the standard when repeating the test series,
however, it must remain (in 95% of all cases) within the confidence
interval. Such a registered random deviation does not need to be,
or actually cannot be, corrected. The user can increase the
repeatability precision of the instrument (e.g., through longer
measurement times or more measurements in a test series). He
can then hope that the random deviations become very small and
the systematic deviations become more apparent.
If two parties obtain different measurement results on the same

specimen and even at the same position, the comparison of the
difference of the measurement result with regard to their confidence
interval (such as between the nominal value and the measurement
result on a calibration standard) also becomes helpful in detecting
a systematic measurement deviation. Only when the confidence
interval of one of the two measurement results does not overlap the
confidence interval of the other measurement result can one speak
of a (systematic) difference. Otherwise one must assume that in
truth the mean values differ randomly. A random difference may be

Trueness and Precision Measurement Device Monitoring for the FISCHERSCOPE X-RAY
explained by the lacking precision of the instruments involved and

does not need to cause a dispute. In such cases, one can no longer
speak of different measurement results. However, if one wishes to
prove that the difference is systematic, then the precision of the
involved instruments must be increased (e.g., by increasing the
measurement time or by decreasing the measurement distance or
by increasing the number of measurements) and in this manner the
confidence interval made narrower. If this establishes a systematic
deviation, it must be researched which of the two results is correct
and which one is not or even if both are false. How to do this will be
shown in the next section.
15.6 Trueness and Precision
Trueness is a property of measurement readings, namely to Trueness

possess larger or smaller systematic deviations from the correct
values.
As a rule, a systematic deviation is discovered when an instrument
has changed. It is a result of inadequate measurement device
monitoring if false readings are measured over longer periods.
However, the calibration of the instrument may also have been
wrong from the outset (e.g., through erroneous entries of nominal
values during the calibration or when using a wrongly labeled
calibration standard). Or the calibration standard in its composition
does not fit the properties of the instrument setup. A wrong
calibration can be corrected by re-measuring with one or more
standards and possibly through normalization or re-calibration.
Errors caused by faulty calibration standards or software influences
would become apparent only through comparative measurements
between different calibration standard sets. Both types of
deviations are systematic. Systematic measurement deviations
lead to situations that different users (e.g., supplier and customer)
measure different results at the same specimen.
In contrast to trueness, precision is an instrument property. It can Precision
be easily characterized, e.g., by repeated measurements on a
sample (whose true value must not even be known) at one and the
same location under repeatability conditions. The mean value
produces the requested measurement reading and the standard
deviation of the test series is a measure for the instrument’s
precision. If the measurement application has been calibrated
correctly, then the mean value of the test series is also correct and
corresponds to the true value (which is the mean value that results
from infinitely repeated measurements) within the confidence
interval.
However, if one knows the correct measurement result of a sample

at a marked location and measures it with a different instrument and
by a different user, the measurement result is typically different.

Measurement Device Monitoring for the FISCHERSCOPE X-RAY Trueness and Precision
This can be observed, for example, with round robin tests on the
same sample with a marked reference area, even if each
instrument is correctly calibrated and checked. The reasons are the
random deviations of each single reading, and thus of each mean
value of a test series, the random deviations at each calibration,
and also the fact that each calibration standard is labeled with a
nominal value that through its measurement is also afflicted with an
unavoidable deviation from the true value (expressed by the
uncertainty of the standard). The sum of these deviations is
expressed in the comparative precision of the measurement
method. The repeatability precision characterizes the random
deviations of the results that are obtained at one instrument by one
person with one and the same sample at the same measurement
location at repeated measurements, i.e., under repeatability
conditions. Comparative precision describes the random deviations
between different instruments, calibrated with different calibration
standards, at repeated measurements performed by different
persons at the same sample using the same measurement
locations (measurements under comparable conditions).
Theoretically, there should be trust between the supplier and

customer. However, the reality is: ”Trusting is good, inspecting is
better!”. One of the most important prerequisites for the inspections
is correct measurement readings. However, different readings
between supplier and customer should generally not be taken as a
cause to continuously doubt the measurement results or
measurement methods of the other party or to demand arbitration
measurements with different methods that are to verify that one’s
own measurement is correct. First one should investigate whether
the measurement results have been obtained at the same
measurement spots and the same specimens. To answer this
question, supplier and customer should exchange and measure the
same samples with marked measurement spots. If the results are
still different, the involved instruments should be calibrated using
certified calibration standards. This determines which instrument
measures correctly and which instrument requires corrective
measures. If the differences remain and the problem cannot be
resolved, only a well-founded consultation through experts of the
instrument manufacturer may help in the end.
Each user who monitors the measurement devices as described
herein, can verify the trueness of his own measurements at any
time. He can also trust his measurement results and will not be
troubled by unwarranted complaints. In practical situations, the
systematic deviations, which almost always arise from inadequate
or infrequent monitoring of the measurement devices, occur more
significantly and more frequently and above all are of a greater
magnitude than the random deviations between the instruments of
different parties. Typically, the random deviations are hardly
noticed and if they are noticed, they are accepted due to their
insignificance. Thus, random deviations as opposed to systematic
ones can usually be neglected as the reason for measurement

Practical Monitoring of the Measurement Devices Measurement Device Monitoring for the FISCHERSCOPE X-RAY
reading differences. It is not without reason that the X-ray

fluorescence method is considered the most accurate
measurement method for coating thicknesses due to its high
comparative precision. Because the most common and grave
deviations are of a systematic nature, they must be found and
corrected. This is the task of measurement device monitoring.
15.7 Practical Monitoring of the Measurement

Devices
How to test?
A measurement application that is calibrated and checked using
calibration standards and if necessary corrected and documented,
is considered secure. Measurements with a secure measurement
application provide correct measurement readings. This condition
should essentially continue for a long period, however, as
mentioned above, the measurement application can change,
because inevitably sooner or later the instrument changes. Users
must, therefore, check and if necessary correct each measurement
application regularly and as often as is economically feasible.
NOTE: For the Fischerscope XRAY with the WinFTM Soft-
ware, each product file contains in addition to the
measurement application for the sample a parallel
measurement application for the calibration stan-
dards (with an identical calibration but with a poten-
tially different substrate material). The parallel
measurement application can be used to measure
the calibration standards. Thus, the problem men-
tioned does not exist: a substrate material correction
when re-measuring is unnecessary and the test is,
therefore, simpler.
We recommend performing the checks using reference samples or
calibration standards. They are well suited for long-term monitoring
because one can assume that the samples do not change over a
long period as opposed to the measurement application and thus
one can easily recognize changes of the measurement application.
A reference sample is a coated storage sample from the production
that corresponds in its structure (order and composition of the
coatings and substrate material) to the measurement application to
be checked, and that exhibits a marked measurement spot
(reference area) and that is positively identifiable. Within the
reference area, the reference sample should exhibit essentially no
coating thickness differences, referenced to the mean value.
Checks with reference samples offer the advantage that the
reference samples are less expensive, that they can always be
replaced by new samples, that the standards are spared and that
the check may therefore be carried out more easily. Reference

Measurement Device Monitoring for the FISCHERSCOPE X-RAY Practical Monitoring of the Measurement Devices
samples can also be used to compare the measurement results of

two parties (e.g., supplier and customer) when calibration
standards are not available at one of the parties and one tries to
avoid shipping of relatively expensive calibration standards.
Reference samples Reference samples are considered derivative or secondary
calibration standards. There are no alternatives to reference
samples if no primary standards are used or use of an annual
calibration service is made. When checking the standards, a
potentially existing difference between the substrate materials of
the sample and the substrate material of the calibration standard
must be taken into account: prior to the check measurement, the
measurement application must be set to the base material of the
calibration standard set, and after the check it must be reset to the
substrate material of the sample. Otherwise, the standard or the
sample would not be measured correctly. This is not necessary with
a reference sample because its substrate material is identical to
that of the measurement application. A prominent example would
be the check measurement of the measurement application Sn/
CuSn6 with Sn/Ni or Sn/Cu standards. Here, a measurement
without taking into account the fact that the calibration standard
does not contain Sn in the substrate material would result in a
reading with a value that is up to 2-3 μm too low.
The check measurement is carried out by making an equal number
of measurements (e.g., 5) under repeatability conditions within the
reference area of one and the same sample at regular intervals.
Each of these test series is called a group. The same measurement
time and the same base setting of the measurement application to
be checked are used as during the regular measurements. Each
group provides as its result one mean value and a measure for the
variation, e.g., the standard deviation. For each feature, these
measurement results are entered into a test protocol or even better
into a quality control chart (SPC chart). Documentation of the
measurement results is extremely important because only the
documentation provides the proof whether measurement readings
are correct using the current calibration and whether the instrument
is okay. Measurement device monitoring is unthinkable without
documentation and would not deserve its name.
Time intervals The time intervals of the check measurements are determined by
the respective measurement application. We recommend verifying
simple measurement applications (e.g., Zn/Fe, Au/Ni, Sn/Cu etc.)
once a week. However, the user should verify more complex
measurement applications (e.g., Cr/Ni/Cu/Zn) every other day or
even once a day. The measurement application is to be re-verified
after every correction. The intervals may be increased if the
repeated verification never or only rarely shows a significant
deviation from the nominal value.
These recommended intervals indicate that annual checks with

standards by a calibration service of the manufacturer cannot
replace measurement device monitoring. If the manufacturer

When and how to Carry out Corrections? Measurement Device Monitoring for the FISCHERSCOPE X-RAY
performs a calibration service, for example, because no calibration

standards are available, the user only has the option to monitor the
measurement device using reference standards. Thus, establishing
reference samples is an obligatory consequence of using a
calibration service, because continued access to standards by the
user is not possible.
To determine the actual situation of the measurement application at

the beginning of the control chart, the characteristics of the
reference sample or of the calibration standard, respectively, are
determined with the secured measurement application in the form
of a larger random sampling (n > 50) without break. This is called a
pre-run. The reason for measuring the random sample in an as
short as possible period is that the instrument should remain stable
during this time such that systematic changes of the instrument can
be neglected during this time span. The result of the pre-run is the
mean value of all group mean values (nominal value) and the mean
value of the standard deviation from the single readings within the
groups. The limits for the mean value and for the standard deviation
that are not to be violated by the random deviations are calculated
from the nominal value in relation to the mean standard deviation
and the number of single readings per group. These limits are
called statistical control limits. With subsequent measurements,
upper and lower violations of these control limits are therefore
caused by systematic changes to the measurement application.
Thus, the control limits characterize when subsequent

measurement results are random or ”natural” (mean value and/or
standard deviation fall within the limits) or when they deviate
systematically or ”unnaturally” from the nominal values determined
during the pre-run (measurement results are outside the limits) and
in doing so indicate a change in the measurement application that
must be corrected. With subsequent regular checks of the
measurement application, using upper or lower violations of the
control limits, it is then very easy to discover on time deviations of
the measurement application from the nominal values and to make
control corrections.
15.8 When and how to Carry out Corrections?
We recommend the correction of a measurement application as

soon as the mean value or the standard deviation of a group
violates the control limits that have been determined by the pre-run.
As corrective measures we recommend:
 a normalization (measurement of the spectra of the pure elements
and of the substrate material) of the measurement application

Measurement Device Monitoring for the FISCHERSCOPE X-RAY Pre-run for Determining the Control Limits
With a Fischerscope XRAY with WinFTM software, the spectra of

the ”pure elements” are not measured anew during the
normalization but instead are accepted from the spectra library that
contains their spectra when the switch ”Measure elements” of the
DefMA is disabled. In this manner, the measurement application is
not changed during normalization, and therefore not corrected,
except for a potential substrate material correction. For such
measurement applications, normalization cannot provide any new
information.
The measurement application should be checked once more after

every corrective measure. If the limits are still violated, we
recommend a re-calibration of the measurement application. Due to
its high stability, corrections of the measurement applications of a
Fischerscope XRAY are typically required only after several weeks
or months.
NOTE: Note: All measurements for monitoring of the mea-

surement devices as well as all potential corrections
should only be performed once the instrument has
been measuring for a sufficient length of time, that is,
it has generated ”radiation”. 15 – 30 min of operating
time are sufficient for this purpose. Thus, measure-
ment device monitoring is not recommended directly
after power-up of the instrument, even though regular
measurements can be made.
15.9 Pre-run for Determining the Control Limits
NOTE: Note: The equations and factors used here are all de-
scribed in the equation collection of the operator’s
manual for the Fischerscope XRAY. The control limits
can be calculated using the ”calculator” functions in
the control chart of WinFTM. Beyond that a spread-
sheet that contains the equations beneath for the cal-
culation of the control limits can be used for the pre-
run.
The pre-run consist of a minimum of m = 10 groups each with
n = 5 single readings, i.e., a total of 50 measurements. The
measurement application and the identity designations must be
documented.
The single readings for the pre-run should be carried out

successively using the setting parameters (measurement time,
measurement distance, collimator, etc.) typically used for the

Pre-run for Determining the Control Limits Measurement Device Monitoring for the FISCHERSCOPE X-RAY
measurement application and should be concluded within a short

period for the instrument to remain stable during this time.
Systematic changes during this period are then negligible. After
each group (not after each measurement!), the reference sample
should be taken from the instrument and re-positioned in order to
simulate as good as possible the subsequent procedure during the
check measurement. With instruments featuring a variable setting
of the measurement distance, such as the Fischerscope XRAY, the
measurement distance must be retained during the pre-run and the
subsequent check measurement because the standard deviation
correlates to the measurement distance. This distance can be
noted and viewed in the ”notepad” of the product that is used for
measurement device monitoring.
At first, the mean values x.i of the m groups 1 to 10 are used to

calculate the overall mean value x..:
x.. = (1/m) · x.i = x_est (2)
This overall mean value forms the estimated value x_est for the
mean value of the quality control chart.
The standard deviations si of groups 1 to 10 are used to build the

arithmetic mean value sI :
sI = (1/m) ·  si (3)
The index i runs across the number m of the groups.
The estimated value sI serves as the ”current” standard deviation of

the individual readings. The variations between the group mean
values due to drift, interference or changes in the position of the
reference samples during the pre-run are taken into account by
calculating the standard deviation of the mean values sII from the
group mean values x.i of the m groups 1 to 10:
sII = {(x.i – x..)2 /(m-1)}½ (4)
sII takes into account the ”extraordinary” influences (potentially
present during the pre-run) on the variations of the group mean
values that may come into existence due to sample re-positioning
for a new group or by changing the measurement location or the
operator – as will also occur during subsequent measurements in
the control chart.
Now, the standard deviations sI and sII are used to form the
estimated value of the standard deviation s of the population:
(4)
̂ = (sI2 + sII2 )½
The two limit values UCL(x) (upper control limit for the mean value
x.) and LCL(x) (lower control limit for the mean value x.) are the

product of the nominal value x_est and the standard deviation s

with:
(5a) UCL (x) = x_est + 3 · s / n
(5b) andLCL (x) = x_est – 3 · s / n
n is, as has already been mentioned above, the group size. It has
been taken into account that for every control limit an acceptance
probability of 99.5% applies, i.e., an upper and lower violation of the
control limits occurs randomly only at a total of 1% of all cases.
An upper control limit UCL(s) applies also for the standard
deviation that is calculated from the estimated standard deviation s
as follows:
(6) UCL (s) = Bá0 · s = 2.09 · s
The limiting factor Bá0 is a value that corresponds to the size of the
random sample n, in this case for n = 5, Bá0 = 2.09.
Bá0 is arithmetically determined as follows:

(7a) Bá0 = 1 + 3 ((1 -C(n)²) ½ / C(n))
with
(7b) C(n) = 1 - (0.25057315 / n) - (0.20580811 / n²) - (0.202729377 / n3)
The limit values calculated in this manner are accepted into the
quality control chart and serve the purpose of deciding whether the
measurement application must be corrected or not. Violation of the
upper or of the lower control limit means that a control correction of
the measurement application is required. The WinFTM software of
the Fischerscope XRAY facilitates (like its predecessor program
FTM for DOS) the set-up of products using quality control charts
specifically for monitoring the measurement devices and to
calculate the control limits automatically from the pre-run.
Example of a pre-run
10 groups, each with 5 measurement readings, have been
measured under repeatability conditions using a nickel-plated and
copper-plated reference sample (substrate material iron). For this
purpose, the number of single readings per group (in the ”Figure”)
is set to a fixed number (here n=5) in the product ”Ni/Cu/Fe
reference sample 10-245”.
We recommend entering the measurement data of the above pre-

run in a quality control chart (SPC chart) for each feature (here for
the nickel and the copper thicknesses). The purpose of the pre-run
is to calculate the control limits. They are graphically drawn into the
control chart as lines and correspond to the limit values that lead to
a correction if they are violated during subsequent measurements.

Pre-run for Determining the Control Limits Measurement Device Monitoring for the FISCHERSCOPE X-RAY
The final protocol of the pre-run generated with the WinFTM-PDM

software at the actual reference sample Ni/Cu/Fe 10-245 shows
beneath the group numbers (designated with "nbl"), the group
results (mean values Ni. and Cu. per group, standard deviation s
per group), the final result, the control limits as well as the control
charts for the nickel coating and for the copper coating:
Helmut Fischer GmbH Office West
Danziger Straße 1050374 Erftstadt
Tel.: 02235 41447Fax: 02235 922990
Fischerscope® XRAY Final protocol

___________________________________________________
Product: Ni/Cu/Fe reference specimen 10-245
Folder: ISO9000
Meas. application: Ni/Cu/Fe
Meas. mode:Dual coating (dd_)
Order:Pre-run
Operation.:5 x 10 measurements
Final evaluation fromGroup No. 1 measured 12:22:09

toGroup No. 10 measured 12:39:55
nbl= 1 Ni.= 7.54 μm Cu.= 7.79 μm
s = 0.085 μm s = 0.098 μm
nbl= 2 Ni.= 7.45 μm Cu.= 7.70 μm
s = 0.053 μm s = 0.155 μm
nbl= 3 Ni.= 7.36 μm Cu.= 7.68 μm
s = 0.123 μm s = 0.097 μm
nbl= 4 Ni.= 7.43 μm Cu.= 7.57 μm
s = 0.078 μm s = 0.174 μm
nbl= 5 Ni.= 7.45 μm Cu.= 7.54 μm
s = 0.155 μm s = 0.093 μm
nbl= 6 Ni.= 7.39 μm Cu.= 7.61 μm
s = 0.171 μm s = 0.148 μm
nbl= 7 Ni.= 7.46 μm Cu.= 7.69 μm
s = 0.111 μm s = 0.160 μm
nbl= 8 Ni.= 7.35 μm Cu.= 7.66 μm
s = 0.103 μm s = 0.135 μm
nbl= 9 Ni.= 7.49 μm Cu.= 7.72 μm
s = 0.215 μm s = 0.168 μm
nbl= 10 Ni.= 7.56 μm Cu.= 7.84 μm
s = 0.158 μm s = 0.101 μm

Mean value x.. 7.449 μm 7.681 μm

Standard deviation sI 0.125 μm 0.133 μm
Confidence mean value 0.051 μm 0.066 μm
Range R(x.) 0.321 μm 0.327 μm
Lower control limit (x) 7.26 μm 7.46 μm
Upper control limit (x) 7.64 μm 7.90 μm
Upper control limit (s) 0.300 μm 0.338 μm
Number of groups 10 10
Measurement time 20 s
All printed values are available in the print form of WinFTM PDM as
variables (including the control charts). They can re-calculate the
printed control limits by using the original values (mean value x. and
standard deviations s) and the equations specified in the previous
section. Please note that the pre-run has been concluded within a
short period (here: 17 minutes) in order to ensure the stability of the
instrument during the pre-run.

Long-Term Monitoring Measurement Device Monitoring for the FISCHERSCOPE X-RAY
The protocol shows the video image of the reference sample that
the camera of the Fischerscope XRAY has recorded. The
measurement area is identified by an orange-colored ring, the
measurement spots where the instrument made individual
measurements during the pre-run are identified by yellow crosses.
Even though the reference area is small compared to the
dimensions of the sample, the distribution of the coatings within the
reference area can be non-uniform. Because during the check
measurement any measurement spot may be selected within the
reference area, a potential inhomogeneity of the coating
thicknesses must already be taken into account during the pre-run.
If the lower and upper limits are too far apart in reference to the
confidence interval, then the reference sample is not suitable due
to a non-uniform coating thickness within the reference area or
because the sample cannot be positioned and measured in a
reproducible fashion. It is then recommended to use a different
specimen as a reference sample.
15.10 Long-Term Monitoring
After the pre-run, the user is to make at regular intervals new

measurements at the reference sample, or the calibration standard,
respectively, that were used for the pre-run. For practical purposes,
the time intervals should be specified according to the difficulty of
the measurement application (see above). Each new group
provides a point for x. (spoken as x_bar) in the control chart and a
point for s (thus, the respective quality control charts are also called
x_bar / s-charts). As has already been shown above, the control
limits can also be calculated automatically by the WinFTM software
even without knowledge of the equations. One control chart each is
required for each reference sample and for each feature. This,
however, is already being taken into account by the software.
Upper and lower violations of the control limits suggest to correct

the measurement application by taking the corrective measures
recommended by us. Then a second group is measured in order to
evaluate the success of the corrective measures. If the values
continue to be outside the control limits, a new calibration may
provide help (however, with the disadvantages and limitations that
were mentioned above).
A stability test should be performed if frequent corrections become
necessary because there is suspicion that the stability of the
instrument is not ensured and maintenance or repair including
replacement of components may be necessary. In such cases, the
user should entrust his problem and help to the support and service
personnel of FISCHER.

Measurement Device Monitoring for the FISCHERSCOPE X-RAY Long-Term Monitoring

Def.MA
16 Def.MA
If you have activated the SUPER software, you can create a Def.MA by yourself.
The usage of the SUPER software requires deep knowledge of the physics of x-ray fluorescence and
the functionality of the instrument.
Alternatively, you can request a new measurement application from FISCHER. FISCHER offers a
professional service for the creation of customer’s Def.MA.
16.1 The Def.MA Modes
When you create a new Def.MA, you can choose between different modes. The mode determines
the measurement method and the presentation of the measurement readings.
Table 16-1: Def.MA Modes
Mode Application
Material analysis For the analysis of bulk material (massive specimens).
Analysis with bal- For the analysis of bulk material (massive specimens), if the specimen can-
ance not be defined completely by 100 percent.
Typical applications: recycling, RoHS, soil specimens, biological specimens
Thickness mode For coating thickness measurements. The measurement results for the coat-
ing thickness are displayed in the typical units of length such as μm. The
analysis results are shown in percent units.
The density values of the elements are taken from internal tables. You do
have the option to change these values.
Mass per unit For coating thickness measurements. The overall area mass is displayed as
area (relative) well as the percentage portion of the individual elements.
Mass per unit For coating thickness measurements. The overall area mass is displayed as
area (absolute) well as the individual area masses of the respective elements.
Solution analysis You fill the measuring cell with the solution to be analyzed, see Chap. 19.2
on Page 148.
ROI-Mode ROI = Region of interest
Only a defined portion of the measures spectra is evaluated. You define
one or more regions (ROI) of energy channels. The portion of the spectra
that is located in the defined region is evaluated only.
Counting rates are issued, the fundamental parameter method is not used.
Used for special applications, where the fundamental parameter method is
not applicable.

Def.MA
Mode Application
Component mode For the analysis of specimens, which are not only composed of pure ele-
ments, but also contain chemical compounds (e. g. oxides). WinFTM offers
a list of components, which can be used like elements.
The result display shows the measurement readings of the complete compo-
nents, not only the elements the components are composed of.
Component mode For the analysis of bulk material (massive specimens), if the specimen can-
with balance not be defined completely by 100 percent and the specimen is not only
composed of pure elements, but also contain chemical compounds (e. g.
oxides).
The result display shows the measurement readings of the complete compo-
nents, not only the elements the components are composed of.
Typical applications: recycling, RoHS, soil specimens, biological specimens
16.2 Creating a new Def.MA
The creation of a new Def.MA in the thickness mode (see Table 16-1 on Page 121) is described
here. If you create a new Def.MA in another mode, the steps may differ.
Before you start

The WinFTM extension SUPER is activated.
Procedure
1. In the WinFTM main menu select Calibrate > Def.MA new… > <Mode, see
see Table 16-1 on Page 121>.
2. In the field Label enter an explicit name for the new Def.MA file.
3. In the field located right above select the high voltage and the primary filter (if present). The
high voltage and the primary filter has to fit your measurement task.
Enter the layer composition of your specimen as follows:
Start with the top layer, continue with all other layers and end with the base material (substrate
material) as the last layer.
4. Click New Layer.
The window Definition of Elements New Layer appears.
5. In the area Thickness select an option.
6. In the area Composition select an option.
7. Click Periodic system.
The window Periodic system appears.
8. In the window Periodic system click the element that the layer is composed of.
The element, the percentage and the density are displayed in the lower area of the window
Definition of Elements New Layer.

Def.MA
In case of a complex layer (mixture of materials or alloy) enter more elements and their percent-
ages.
9. Click Elem.+ to transfer the values to the display field.
The values of the entered layer appear in the large display field.
10.Repeat steps 8 to 9 for each element of the current layer.
11.Click OK to finish the value entry for the current layer and to save the data.
The window Definition of Elements New Layer disappears. The values of the layer appear in
the large display field of the window Definition of measuring conditions….
12.Repeat steps 4 to 11 for each layer of the coating system until all layers are entered.
Enter the base material (substrate material) like another layer with the following options:
a In the area Thickness check the option The thickness of the layer is fixed (known).
b Check the option Massive (Sat.)
13.Click OK to close the window Definition of measuring conditions….

You can enter compensation spectra, see Chap. 16.3 on Page 123.
You can create a new product based on the created Def.MA.
16.3 Entering Compensation Spectra
By entering compensation spectra you can increase the accuracy of the measurement.
Before you start

 The WinFTM extension SUPER is activated.
 The Def.MA is created, see Chap. 16.2 on Page 122.
Procedure
1. In the WinFTM main menu select Calibrate > Def.MA modify….
The window Def.MA modify appears.
3. In the window Definition of measuring conditions… click Compens.Spectra.
The window Spectrum Background appears.
4. You can select one or more of the following options:
• Compensation Elements
In the area Compensation Elements you can enter up to four elements. The entered compen-
sation elements are filtered out of the spectrum. If the relevant element area not shown in
the list field, check full Element list.
Example tin on glass: The glass contains Strontium (Sr) in variable concentration. If you
enter Sr as compensation element, the spectral lines caused by Sr are filtered out. The vari-
able amount of Sr does not influence the measurement reading.

Def.MA
• Compensation Spectrum
If a suitable compensation spectrum is available, you can activate the option yes in the in
the area Compensation Spectrum and enter a name for the spectrum, e. g. glass or plastics.
At a later moment during the calibration you will be prompted to position the compensation
spectrum. The name entered here will then be displayed.
Example tin on glass: The glass causes a scattering spectrum (also referred to as back-
ground spectrum or base spectrum). If a sample is available that is comparable with the
specimen and has no tin coating, you can enter here glass. At a later moment during the
calibration you will be prompted to position the glass sample. WinFTM measures then the
compensation spectrum and takes it into account when evaluating the spectrum.
• Base Spectrum
If a suitable base spectrum is available, you can activate the option yes in the in the area
Compensation Spectrum and enter a name for the spectrum, e. g. glass or plastics. At a
later moment during the calibration you will be prompted to position the base spectrum.
The name entered here will then be displayed.
• Background correction
If the theoretical characteristics (measured or calculated) of the compensation spectrum
differs from the actual characteristics, you can reach a correction by using this option. You
can choose from three options: no correction, with supporting points and by polynomial.
5. To close the window Spectrum Background click OK.
6. To close the window Definition of measuring conditions… click OK.

You can create a new product based on the created Def.MA, see Chap. 8.1 on Page 57.

Def.MA
16.4 Display the Measurement Mode
In the window Def.MA there is a field that displays the measurement mode.
Depending on the used Def.MA mode (see Table 16-1 on Page 121), this field has the name
Mode, Analysis Mode, Thickness Mode, Mass per unit area (relative/absolute), Components‘s
Mode or Solution Analysis. The meaning of the individual symbols is:
c Measurement of the concentration
d Measurement of the coating thickness
g Measurement of the area mass
Capital letters at the beginning of a series of symbols indicate the beginning of the substrate ma-
terial (base material).
Example: dCcc
d The coating thickness of the top layer (consisting of one element) is being
measured and
Ccc the concentrations of the substrate material, which contains three elements,
are being analyzed.

Def.MA

Programming Coordinates for Automatic Measurements
17 Programming Coordinates for Automatic Measurements
The instrument is equipped with a motor-driven measuring stage. You can program coordinates for
measurement points in order to let the instrument measure automatically at various locations on the
specimen. In this manner, you can define, for example, 100 measurement points and let the meas-
urement run automatically over night at these measurement points.
The following table describes the various programming options for the coordinates and references
the respective chapters.
Arrangement Function Chapter

Individual points You are programming any desired points. Chap. 17.7 on
Page 132
Lines You define the beginning and end point of a line Chap. 17.8 on
and the number of points on this line. Page 132
Array You define two corner points of an array and the Chap. 17.9 on
number of points within the array (columns and Page 133
rows). In addition, you define the order in which
the points are visited.
Same programming You define a single point and any desired num- Chap. 17.10 on
on multiple parts ber of points in relation to this single point. You Page 133
(points + pattern) can repeat this arrangement of points (pattern)
any number of times. In this manner, you can
travel to the same coordinate sequence on differ-
ent parts or at different locations.
Circular coordinates You define a center of a circle, the number of Chap. 17.11 on
measurement points on the circumference of the Page 135
circle and the starting point.
Datum points In addition to the measurement points (individual Chap. 17.12 on
points, lines, arrays or circular coordinates), you Page 136
can also program one or two datum points. No
measurements are made at these datum points;
rather, the datum points are used for the orienta-
tion of the specimen. You can then change
parts, or place parts anew and ensure that al-
ways the correct coordinates are visited, even if
the specimen is not positioned 100% at the
same place.

17.1 Point & Shoot
Using the Point & Shoot method, you can travel very quickly to the desired measurement location
on the specimen.
Procedure
1. On the video image, position the mouse pointer at the desired measurement location.
2. Press the left mouse button.
The mouse pointer assumes the form of crosshairs and the measuring stage travels until the
clicked measurement point is precisely in the crosshairs.
17.2 Point & Save
Using the Point & Save method, you can travel very quickly to a desired measurement location on
the specimen and save the associated coordinates. This function is not active when programming
an array.
Before you start

► Open the window XY(Z) Coordinates, ref. Chap. 17.5 on Page 130.
Procedure
2. Press the center mouse button.
The measuring stage travels until the clicked measurement point is precisely in the crosshairs.
The instrument stores the coordinates automatically into the coordinates list.
17.3 Point & Measure
Using the Point & Measure method, you can travel very quickly to a desired measurement location
on the specimen and immediately make a measurement at this measurement location.
Before you start

► Ensure that you are in the main WinFTM window. Close the window XY(Z) Coordinates if it is
open (ref. Chap. 17.5 on Page 130).
Procedure
2. Press the center mouse button.
The measuring stage travels until the clicked measurement point is precisely in the crosshairs.
The instrument will then perform the measurement.

17.4 Traveling to any Desired Position
Using the window Go to XY(Z) position, you can control the measuring stage from the screen.
Opening the XY position window

► To open the window, choose XY(Z)-Axis > Move to Position.
The window remains open even if you perform other functions or enter other commands.
Moving the measuring stage in the relative coordinates mode

► In the entry fields X, Y and Z, enter the desired relative travel paths and click Move to.
With every click on Move to, the measuring stage travels the desired distance in the respective
direction(s), measured relative to the last current position.
Moving the measuring stage in the absolute coordinates mode

1. In the field Input coordinates, click Absolute.
The current, absolute position values appear in the entry fields X, Y and Z. The Home position
of the measuring stage is the zero point of the coordinates system 0/0/0.
2. In the entry fields X, Y and Z, enter the desired absolute target coordinates and click Move to.
The measuring stage will visit the desired absolute target coordinates.
Moving the measuring stage using the control field XY-Axis and Z-Axis
1. Enter the desired travel path in the entry field in the center of the four direction arrow command
buttons.
2. Click on a direction arrow button.
With every click on a direction arrow button, the measuring stage travels the desired distance
in the respective direction, measured relative to the last current position.

17.5 Opening and Closing the Window XY(Z) coordinates
To open the window XY(Z) coordinates

1. Select from the menu bar XY(Z)-Axis > Programming.
The window XY(Z) coordinates appears:
1 2 3 4
Figure 17.1:Window for coordinates programming (XYZ coordinates)
No Element Function
1 Video field Here you can see the specimen
2 Programming Here you select, what you intend to program (individual points, circle,
field etc.), enter the coordinates and save the values.

No Element Function
3 Measuring Here, the programmed points on the measuring stage are shown.
stage field
4 Table field Here, the coordinates are displayed.
To close the window XY(Z) coordinates:

When you close the window, you can decide if the programmed values shall be stored or not.
► To store the programmed coordinates and close the
window, click Save + exit.
► To discard the programmed coordinates and close the
window, click Exit without saving.
17.6 Deleting Programmed Coordinates
You can delete individual coordinates or all coordinates. Always delete all stored coordinates be-
fore programming new coordinates.
Before you start

► Open the window XY(Z) coordinates, ref. Chap. 17.5 on Page 130.
Procedure
To delete all stored coordinates:
1. From the window XY(Z) coordinates select Coordinates > Delete All.
The window WARINING: All items will be deleted! appears.
2. Click OK.
To delete one stored coordinate:
► From the window XY(Z) coordinates select Coordinates > Delete.

You can now program new coordinates, ref. Chap. 17.7 and subsequent ones.

17.7 Programming Individual Points
You can program any desired points on the XY(Z) stage, travel to each individual point and then
store its coordinates.
Before you start

1. Open the window XY(Z) coordinates, ref. Chap. 17.5 on Page 130.
2. Delete all coordinates that are no longer applicable, ref. Chap. 17.6 on Page 131.
Procedure
1. From the programming field select the option Points.
2. Travel to the desired measurement point: In the video image, use the mouse to click the desired
location or use the joystick at the front of the instrument.
3. Click Store.
4. Repeat steps 2 to 3 for each desired measurement point.

You can now travel to all programmed points (ref. Chap. 17.13 on Page 137) or program one or
two datum points (ref. Chap. 17.12 on Page 136).
17.8 Programming a Line
To program a line, define the starting point and the end point and the number of interim points on
the line.
Before you start

1. Open the window XY(Z) coordinates (ref. Chap. 17.5 on Page 130).
2. Delete all coordinates (ref. Chap. 17.6 on Page 131).
Procedure
2. Travel to the starting point of the line: In the video image, use the mouse to click the desired
3. Click Store.
4. In the field No. of intermediate pos., enter the number of points on the line.
5. Travel to the end point of the line: In the video image, use the mouse to click the desired loca-
tion or use the joystick at the front of the instrument.
6. Click Store.
The line is generated from the starting point, the end point and the entered interim points. The
interim points are distributed evenly over the distance.


17.9 Programming an Array
To program an array, define the upper left and the lower right point of the array as well as the
points that shall be contained in the array.
Before you start

Procedure
1. From the programming field select the option Array.
2. Travel to the top left point: In the video image, use the mouse to click the desired location or
use the joystick at the front of the instrument.
3. Click 1. Pos >>.
4. Travel to the bottom, right point: In the video image, use the mouse to click the desired location
or use the joystick at the front of the instrument.
5. Click 2. Pos >>.
6. Enter the number of columns and rows of the array in the fields Columns N (x) and Rows N (y).
7. From the field Route for RUN, select the order in which the individual points of the array shall
be visited.

17.10 Same Programming on Multiple Parts (Points + Pattern)
You define a single point and any desired number of points in relation to this point. You can repeat
this arrangement of points (pattern) any number of times. In this manner, you can travel to the same
coordinate sequence on different parts or at different locations.
Before you start


Procedure
1. From the programming field select the options Points + Pattern.
The following Figure shows a section of the window for coordinates programming.
Pattern
Individual Points
Upper table field; the relative coordi-

nates of the points of the pattern are dis-
played here
Lower table field; the coordinates of the

individual points are displayed here
2. Click in the right side of the lower table field.

3. The lower table field is now highlighted in yellow. The coordinates of the individual points are
displayed in this window. Each individual point is the starting point of each pattern.
1. On the first part, travel to the first individual point: In the video image, use the mouse to click
the desired location or use the joystick at the front of the instrument.
1. Click Store.
The coordinates of the individual point are displayed in the lower table field.
2. Click in the right side of the upper table field.
The upper table field is now highlighted in yellow. The relative coordinates of the pattern, which
are then arranged around the respective point, are stored there.
The first point is already entered into the table as X=0 and Y=0. Thus, the first point of the
pattern is the respective reference point of the lower table.
3. Travel to the next measurement point of the pattern: In the video image, use the mouse to click
the desired location or use the joystick at the front of the instrument.
4. Click Store.
5. Repeat steps 3 and 4 for all measurement points of the pattern.
6. Click in the right side of the lower table field.
The lower table field is now highlighted in yellow.
7. Travel to the next individual point. In the video image, use the mouse to click the desired loca-
tion or use the joystick at the front of the instrument.
8. Click Store.
9. Repeat steps 7 and 8 for each individual point.


17.11 Circular Coordinates
You define a center of a circle, the number of measurement points on the circumference of the circle
and the starting point.
Before you start

Procedure
2. Travel to the desired center of the circle: In the video image, use the mouse to click the desired
3. In the field Radius enter the radius of the circle in mm.
4. In the field Nb. of meas. points enter the number of measurement points on the circumference
of the circle.
5. In the field Start point enter the starting point. Example: 0° means that the first measurement
point is at “12 o’clock”.
6. Click Calculate.
The measurement points are being calculated.


17.12 Programming Datum Points
In addition to the measurement points (individual points, lines, arrays or circular coordinates), you
can also program one or two datum points. You can then change parts, or place parts anew and
ensure that always the correct coordinates are visited, even if the specimen is not positioned 100%
at the same place.
You can program one or two datum points.
Program one datum point, if you can be certain that the placed parts cannot be turned,
ref. Fig. 17.2.
Figure 17.2:Working with one datum point (1: Datum point, X: Measurement points)
Program two datum points, if the parts can be turned as well when they are placed, ref. Fig. 17.3.
Figure 17.3:Working with two datum points (1,2: Datum points, X: Measurement points)
Before you start

2. Program the measurement points (individual points, lines, arrays or circular coordinates).
Procedure
1. From the programming field select the options 1 Datum Point or 2 Datum Points.
2. Travel to the first datum point: In the video image, use the mouse to click the desired location
3. Click Dat.1.
The datum point is stored.
4. If you work with only one datum point, skip the steps 5 and 6.
5. Travel to the second datum point: In the video image, use the mouse to click the desired location

6. Click Dat.2.
The second datum point is stored.

You can now travel to all programmed points (ref. Chap. 17.13 on Page 137).
17.13 Traveling to All Programmed Points
Procedure
1. To store the coordinates and close the window XY(Z) coor-
dinates click Save + Exit.
2. Perform the following steps if you programmed datum points:
a Travel to the first datum point: In the video image, use the mouse to click the desired
b Set the first datum point: Select XY(Z)-Axis > Set Offset (1.Datum).
c If you work with only one datum point, skip the steps d and e.
d Travel to the second datum point: In the video image, use the mouse to click the desired
e Set the second datum point: Select XY(Z)-Axis > Set Offset (2.Datum).
3. Click RUN to start the automatic measurement.
The programmed points are visited automatically and the measurements are performed at
these points.


Calibration and Base Correction
18 Calibration and Base Correction
18.1 Base Correction (Substrate Material Correction)
18.1.1 Purpose of the Base Correction
A base correction (also referred to as substrate material correction) is only possible, if the base is
an alloy.
A base correction is required whenever the base composition changes from one specimen to the
next.
Table 18-1: Explanation of the term base
Au/Ni/(CuSn6)
The Au coating and the Ni coating on bronze
shall be measured.
Measurement mode: d d -
Dual coating
The base is CuSn6
18.1.2 Performing a Base Correction
A base correction affects only the current measurement application. All other measurement appli-
cations remain unaffected.
Before you start

 The instrument must be at operating temperature before performing the base correction.
 Perform the base correction at the same workplace as you will perform the measurements. If
you set up the instrument at another place, perform the base correction at the new place again.
Procedure
1. To start the base correction, select Calibrate > Base correction.
The window Element: Measure product‘s base material appears.
2. Position the base material, then click OK.

18.2 Calibration
18.2.1 Purpose of the Calibration
A calibration is required in the following situations:

 A new measuring application has been set up.
 A product was imported.
 If during a reference measurement1 a deviation was encountered that is greater than two to
three times the standard deviation s.
The calibration sets the difference between nominal value and actual value to zero.
 Actual value refers to the reading displayed by the instrument.
 The nominal value is the value engraved on the calibration standard (engraved value).
Calibrating enables secured measurements: If the nominal values of the used standards can be
traced to recognized material measures or reference materials, then the measurement is secured
through the calibration.
Depending on the measuring application, it may be difficult to evaluate the result of a calibration
in individual cases. If you have any questions, please contact FISCHER via the website www.hel-
mut-fischer.com.
FISCHER can carry out a calibration service for you. In this case, you will receive a corresponding
sheet with calculations and implications for evaluating the calibration.
18.2.2 Performing the Calibration
The following is required for a calibration:
Calibration standards Coating thickness and material composition of a calibration stand-

ard are known and have been determined using a very accurate
measuring method.
Base material (substrate Specimen with the coating(s) to be measured.
material) Required only if the base material is not a pure element.
Base material of the cali- Required only if the base material is not a pure element.
bration standard set (same
as in the definition of the
measurement application,
Def.MA)
Pure element calibration Required only if the option Measure elements has been enabled in
standard(s) the definition of the measuring application (Def.MA), i.e., the spec-
tra library is not used to compute the pure elements.
Materials to measure the Required only in special cases.
spectra background
1. A reference measurement is a measurement on a reference sample with known properties.

FISCHER can supply the following calibration standards:
Calibration standard set Consists of a calibration standard set with several calibration
(Cal-NS) standards of a specific coating/base material combination.
Individual calibration Individual calibration standard of a certain coating/base material
standard combination
(Cal-N)
Calibration foil Calibration foil consisting of a free carrying layer of a certain ele-
(Cal-F) ment. Universally usable on many different base materials.
Customer-specific
standards
Occasionally, a calibration standard may also be referred to as a calibration normal.
Before you start

 The instrument must be at operating temperature before performing the calibration.
 Perform the calibration at the same workplace as you will perform the measurements. If you set
up the instrument at another place, perform the calibration at the new place again.
Procedure
1. In the WinFTM main window select Calibrate > Calibration Standard Set….
An empty window will

appear, if the measuring
application has not yet been
calibrated.
If the measuring application
has already been cali-
brated, check the values in
the window. If the values
are plausible, click OK and
skip the steps 2 to 7
2. Enter a name for the calibra-
tion standard set in the field
Label (e.g., Cr/Ni/Cu Ser.
No. 13917).
3. Click Input/Overwrite.

The window
Standard No. 1 appears.
4. Enter the name of the
standard (e. g., AAMGW).
5. Enter the values of the cali-
bration standard. Click the
field three times in order to
enter a value.
The fields have the following meaning:

 Value Nominal value of the calibration standard (in the example coat-
ing thickness d1 (Zn) in μm coating thickness d2 (Ni) in μm, Cu
concentration in %)
 u +/- If an uncertainty for the reference value is stated on the certificate
for the calibration standard, enter this value here. If you do not
enter a value, then the following values will be used: for coating
thicknesses, 1% of the coating thickness; for concentrations, 1%
absolute.
 Type With multi-coating systems, it may be the case that existing interim
coatings act as base material of a calibration standard or that
coatings are not present. This setting is made here.
6. Once you have entered all values of a calibration standard, click OK.
7. To enter additional calibration standards, repeat steps 3 to 6 for every calibration standard.
Before you enter an additional calibration standard, make sure that no line is selected in the
window Input Calibr. Std. Set. Otherwise the values of the selected standard will be changed.
8. Once you have entered all values of a calibration standard, click OK in the window Input
Calibr. Std. Set.
The calibration standard set is now entered and stored.
9. To check how many measurements will be performed for each
calibration standard, click Info.
The window Modify product

appears.
10.Click the tab Application.
11.Check the following values:

• T_cal (sec): Time for each individual measurement on the calibration standard
• N_cal: Number of individual measurements on each calibration standard

Typically, the default setting applies but you do have the option of changing the values.
The following applies to the measuring time T_cal:
• The longer the measurement, the better the repeatability precision. Do not select a meas-
uring time that is too short; 30 or 60 seconds is a typical value.
The following rules apply to the number of individual measurements N_cal:
• Pure elements, base materials or scatter spectra need to be measured only once.
• Calibration standards must be measured several times on each standard, at least three
times but typically five times. Perform the measurements at different locations on the calibra-
tion standard.
12.To start the calibration, select Calibrate > Calibrate….

WinFTM will prompt you to position the calibration standards
in succession and to measure them.
Example: The calibration standard Cr/Ni/Cu with a coating
thickness of 2.58 μm shall be measured now.
NOTE: To read the full name of the calibration standard, click
in the row and use the arrow keys to scroll back and forth.
Depending on the measuring application, different prompts will appear that have the following
meaning:
 Scatt A scatter spectrum shall be measured. As a rule, it is already
saved in the software and can be opened automatically from the
menu General > Load Spectrum and Evaluate…. Measure a
scatter spectrum (e.g., plastic) if the spectrum does not exist.
 Element: Ni The pure element Ni from the pure element board shall be
measured.
 Base material Cal. Std. The base material of the calibration standard set shall be
Set (Analysis) measured.
Example: If you calibrate using the calibration standard set
Ni/Cu alloy, Cu is the base material of the calibration
standard set.
 Base material specimen The base material of the real part shall be measured. An
(Analysis) uncoated real part must be used for this purpose.
 Base (specimen) The base material of the real part shall be measured. An
uncoated real part must be used for this purpose.
 Ni-Zn/Fe 5.0 15.0 0.0 A calibration standard made of NiZn/Fe with a coating thickness
of 5 μm and a Ni content of 15 % shall be measured.
13.Position the standard, close the measuring chamber, adjust the focus and click Start.
The instrument will perform the measurement.
After the measurement, you will be prompted either to measure a new standard or to measure
the same standard one more time. If you measure the same standard again, move it slightly to
measure it at a different location.

After the last measurement,

the window Input of the cali-
bration standard set will
appear.
1 2 3 1 2 3
14.Ensure that the following conditions are met:

 The values in columns (3) Corr. (corrected values) are consistent with the values in columns
(1) Set (nominal values).
 The values in columns (2) Theor. (standard-free values) deviate from the values in columns
(1) Set (nominal values) by no more than 20 %.
 The values in columns (2) Theor. (standard-free values) should fit logically, i.e., a higher
value in column (2) Theor. (standard-free values) belongs to a higher value in column (1) Set
(nominal value).
15.if the conditions are not met, check your settings and repeat the calibration beginning with
step 12
16.When the conditions are met, click OK.
The calibration for this measuring application will be activated.
17.To verify the calibration, select Product > Measure Cal. Standards.
The name of the calibration
standard set will appear in
the field Product name with
a red background.
18.Measure the calibration standards as prompted. Measure each standard several times.
19.Verify that the nominal value of the standard is within the range x (mean value) ±2 s (standard
deviation of the re-measurement).
The following table shows some examples:

Nominal value x measured s measured min. value max. value Evaluation

Cr 1.5 μm 1.51 μm 0.03 μm 1.45 μm 1.57 μm OK
Cr 0.77 μm 0.75 μm 0.02 μm 0.68 μm 0.79 μm Not OK
The calibration was successful if all re-measurements are within the respective ranges and you are
able to use the measuring application.
If a standard is outside the range, check to see of this measurement range is relevant for your meas-
uring application. If the measurement range is not relevant for your measuring application, you can
still use the measuring application.
If several re-measurements are outside the range, check the data and potential error sources. Then
perform a new calibration.
For special measuring applications, other conditions may apply for a successful calibration. How-
ever, these will be stated separately.


Solution Analysis
19 Solution Analysis
For the solution analysis you need a measuring cell. You fill the measuring cell with the solution to
be analyzed, position the measuring cell and perform the measurement.
The measuring cells are available with different reference plates. When selecting the measuring
cell, note that the characteristic x-ray lines of the sample to be measured may not be too close to
the x-ray lines of the reference plate material. Otherwise, problems may arise during the evaluation
of the spectrum.
Table 19-1: Accessories for the solution analysis
Order No. Name

603-216 Accessory set for solution analysis Molybdenum: 2 measuring cells (red) with Mo-
lybdenum reference plate, 1 roll of foil
601-564 1 roll of foil
603-215 Measuring cell (red) with clamping ring, with Molybdenum reference plate
603-213 Measuring cell (green) with clamping ring, with Nickel reference plate
603-214 Measuring cell (grey) with clamping ring, with Zirconium reference plate
19.1 Structure of the Measuring Cell
1 Bottom part of measuring cell

2 Edge of cup
3 Cup
4 Reference plate
5 Clamping ring
6 Drip groove
Figure 19.1:Structure of a measuring cell for the solution analysis

Solution Analysis
19.2 Filling the Measuring Cell
WARNING Corrosive Liquids

The solution to be analyzed can be corrosive and can cause chemical burns.
► Avoid contact of the solution with skin or eyes.
► After skin or eye contact immediately rinse with plenty of water and consult
a physician.
Before you start

You need the following items to fill a measuring cell:
 Bottom part of measuring cell
 Clamping ring
 Foil
 A pair of scissors
 Sample (liquid)
 Pipette
Procedure
1. Place the measuring cell with the cup side

pointing upwards in the work area.
2. Fill the cup with the sample. Fill with the

maximum possible amount of liquid, i.e., the
surface of the liquid should be slightly convex.
3. Cut out a piece of the foil. The foil should be

cut such that it has an approximate square
shape and can cover the measuring cell well.
4. Place the foil on the measuring cell.

Solution Analysis
5. Place the clamping ring over the foil-covered

measuring cell and press it down carefully
until the foil is taught. Avoid:
• Tearing the foil
• Air bubbles
Overflowing liquid is caught in the drip
groove.
19.3 Positioning the Measuring Cell
Before you start

Before you position the measuring cell you need to fill it, see Chap. 19.2 on Page 148.
Procedure
1. Place the measuring cell into the measuring chamber. Depending on the instrument type, the
cup opening must face upwards or downwards:
• Instrument with measuring direction from top to bottom: Cup opening must face upwards.
• Instrument with measuring direction from bottom to top: Cup opening must face down-
wards.
To make the focusing easier, position the measuring cell such that the measurement beam does
not point to the center, but to the edge curvature of the measuring cell, see the following figure:
2. Adjust the focus of the instrument.

3. Shift the measuring cell carefully such that the measurement beam points to the center of the
measuring cell. Do not readjust the focus. The video image shows the metal reference plate out
of focus. This is correct. To measure correctly, the focus must always be set to the surface of
the foil.


Solution Analysis
19.4 Cleaning the Measuring Cell After Use
WARNING Corrosive Liquids

The solution to be analyzed can be corrosive and can cause chemical burns.
► Avoid contact of the solution with skin or eyes.
► After skin or eye contact immediately rinse with plenty of water and consult
a physician.
Before you start

To clean a measuring cell after use you need water and a paper towel or cleaning rag.
Procedure
1. Place the measuring cell with the cup opening

pointing down on the work area.
2. Press the clamping ring down to separate the
clamping ring, foil and bottom part. Grab the
clamping ring with the fingers of both hands
such that a uniform pressure is applied to the
entire circumference of the ring.
3. Empty the measuring cell.

4. Dispose of the foil and the chemicals. Observe the relevant waste disposal guidelines.
5. Rinse the measuring cell and the clamping ring thoroughly with water.
6. Dry the parts with a paper towel or a clean rag.
19.5 Def.MA and Product for the Solution Analysis
Usually you obtain either a product file or a Def.MA file for the solution analysis from FISCHER.
If you obtain a product file from FISCHER, you need to import the product file (see Chap. 19.5.1
on Page 151). The product file contains all relevant settings.
If you obtain a Def.MA file from FISCHER, you need to import the Def.MA file (see Chap. 19.5.2
on Page 151) and then you need to set up a new product file based on this Def.MA file (see
Chap. 19.5.3 on Page 152).
If you have installed the SUPER software, you can create a Def.MA for the solution analysis by your-
self.

Solution Analysis
19.5.1 Importing a Product
If you have received a new product file from FISCHER, you need to import it. The file name has the
extension *.sav, *.sv1 or *.sv3.
Procedure
1. If you have received the product file by email as a file attachment, save the file in a directory
2. If you have received the product file by CD, insert the CD into the CD drive.
4. Select the tab File >>> Product.
5. Click Select.
6. Select the product file and click Select.
The file will be copied. After this the report The product was copied successfully appears.
8. Click OK.

Before you can perform measurements using the new product, you need to normalize or calibrate
the product.
19.5.2 Importing a Def.MA
If you have received a new Def.MA file from FISCHER, you need to import it. The file name has
the extension *.pb0. After this you create a new measurement application and a product based
on the imported Def.MA.
Procedure
1. If you have received the Def.MA file by email as a file attachment, save the file in a directory
2. If you have received the Def.MA file by CD, insert the CD into the CD drive.
4. Select the tab File >>> Def.MA.
5. Click Select.
6. Select the Def.MA file and click Open.

Solution Analysis

The file will be copied. After this the report The Def.MA was copied successfully appears.
8. Click OK.
9. To close the window, click Cancel.

You can now create a new product based on the imported Def.MA.
19.5.3 Setting up a Product File for the Solution Analysis
Before you start

Before you can set up a product for the solution analysis, a Def.MA file for your solution analysis
must be present on the computer.
Procedure
1. In the WinFTM main menu select Product > New….
The window Select an application appears.
2. Click New.
The window Select a Def.MA appears.
The window Input of the application name appears.
4. Enter in the field Name an identifier for the new measurement application and click OK.
If your instrument is equipped with changeable apertures (collimators), the window Select
collim. + meas. dist. appears. Select the standard collimator No. 2 and click OK.
The window Input Calibr. Std. Set appears.
5. Do not enter anything in this window and click OK.
6. If your are prompted to measure scatt, do not perform a measurement, but perform the
following steps instead:
a In the WinFTM main menu select Tools > Load Spectrum and Evaluate….
b If the window Open appears, select the file scatt and click Open.
The window End of calibration. Accept? appears.
7. Click Yes.
8. The window Create new product appears.
9. Enter a name, directory and number for the new product and click OK.
10.To check the measurement time and the number of measurements click Info.
11.Click the tab Product.
12.Check the values for the measurement time and the number of measurements. Change the
values, if necessary.
The longer the measurement time, the better the repeatability precision. Do not select a meas-
uring time that is too short; 30 or 60 seconds is a typical value.

Solution Analysis
13.Click OK.
The new product file is set up and the related measurement application is normalized.

You can now perform standard free measurements.
You can also calibrate your measurement application. Use a sample of your electrolyte solution,
which was externally analyzed. Do not make up a solution for calibration.
19.5.4 Setting up a Def.MA for the Solution Analysis by yourself
If you have installed the SUPER software, you can create a Def.MA for the solution analysis by your-
self.
Structure of a Def.MA for the Solution Analysis

The typical structure of a Def.MA for the solution analysis is as follows:
 Coating 1: Elements in the sample
 Spectral background: Typically, the background spectrum is named with a brief designation
such as scatt or similar. The spectrum background is included with the shipment as a file.
Other typical brief designations of the background spectrum for a FISCHER Def.MA may be streu
or wasserdummy, for example.
The Def.MA window for the Solution Analysis

There is a special Def.MA window that is particularly suited for setting up Def.MAs for the solution
analysis. The range of functions of this window is reduced to the specific functions needed for solu-
tion analysis. The window is only accessible, if the SUPER software is installed.
► To open the window, select in the WinFTM main menu Calibrate > Def.MA new… >
Solution analysis.
The Def.MA dialog for the solution analysis differs from the standard Def.MA window in the fol-
lowing features:
 Only the layer with the sample material (the solution to be analyzed) must be entered. Only a
maximum of one layer can be entered.
 Oxygen must not be entered in the Def.MA. Oxygen is automatically taken into account when
calculating the results of the analysis. The Def.MA display window does not explicitly display
the symbol O.
 Background spectra and compensation spectra are entered in the same manner as with the
typical Def.MA definition.
 The material of the reference plate of the measuring cell for the solution analysis is defined
using the list field at the lower left of the window. The default setting is Mo.
 The Def.MA display window does not explicitly display the material of the reference plate.

Solution Analysis
 You cannot switch to the calibration standard set of the product and cannot modify it.
 A maximum of 22 elements can be written into the analysis task (excluding the material of the
reference plate and oxygen).
NOTE:
You can set up more complex Def.MAs for solution analyses using the standard Def.MA window.
However, doing so requires more background knowledge and greater diligence.

Measurement Data Export
20 Measurement Data Export
You can export the measured values, their XYZ coordinates, statistical evaluations and other data
to other applications like spreadsheets, statistical evaluation tools or process control systems.
All settings for the measurement data export are assigned to one product. For each product, you
can define different settings for the data export.
Basically there are two modes for exporting measurement data: online export and export on de-
mand.
Table 20-1: The two modes for exporting measurement data
Export mode Explanation

Online Export The measurement data (single readings, block statistics and header) is export-
ed continuously when measurement data is acquired by the instrument.
Export on de- The measurement data (single readings, block statistics and header) will be ex-
mand ported, when you start the export by using the evaluation dialog, after the
measurements are performed.
20.1 Starting the Measurement Data Export
A simple data export in the Export on demand mode is described here to explain the basics of data
export.
Before you start

For the data export you need an export template that defines, which data will be exported and
their format. For a quick start you can use the simple export template, which comes with the Win-
FTM installation. But you do have the option to setup your own export template according to your
needs, see Chap. 20.3 on Page 158.
Procedure
1. To define the export settings, select in the WinFTM main menu
Evaluation > Export > Export Setup….
The window Exporting Data appears.

2. In the window Exporting data select the following options:
a Do not check Online-Export ON.

b Press the button Select…, which is located besides the fields Template: and No.. Select the
export template, e. g. default.
c Click overwrite file.
d Press the button Select…, which is located besides the fields Destination file:. Enter a path
and a file name e. g. #002.exp.
e Click OK.
3. To start the data export, select in the WinFTM main menu Evaluation > Evaluate All Blocks….
The window Evaluation appears.
4. In the window Evaluation select the blocks, whose data shall be exported and click Export.
The data will be exported.
5. Click OK.

You can open the file with a spreadsheet tool and check, whether the data has been exported cor-
rectly.
20.2 Export Settings
Each product has its own data export settings, i. e., the export settings in this dialog window apply
only to the current Product.
► To open the window Exporting Data, select in the WinFTM main menu
Evaluation > Export > Export Setup….

Table 20-2: Explanation of the controls of the Exporting data window
Control Explanation
Online-Export ON The measurement data is exported continuously when measurement data
is acquired by the instrument.
 The reading is exported directly after a measurement is made.
 The block statistics are exported upon block closure.
 With product selection, the header is exported.
Template and No. The name and the number of the export template are displayed if an ex-
port template is assigned to the current Product.
► To assign an export template, click Select….
Deletes the assignment of an export template to the product.
Export destination
append to file Data is successively written to a file.
Complete file- WinFTM waits until the handshake file NET_EXPT.END is deleted. This
handshake (NET_- control box should be enabled only, if the technology of the target com-
EXPT.END) puter is capable of handling it.
overwrite file The export file contains only the last exported values, i. e. the old data
will be overwritten.
Destination file Displays the destination file, if already assigned.
► To assign a destination file for the data export, click Select….
Filename variable By clicking the list box you can select a rule, how the file name of the ex-
ported data will be created.
send to serial port Data is sent directly to the RS232 interface.
The parameters of the RS232 interface and of the WinFTM software of
the receiving instrument must be the same. Otherwise the receiving instru-
ment will not be able to read the data exported via the RS232 interface.
► To set the parameters of the RS232 interface select
Evaluation > Export > Define export interface….
to OLE-Automation WinFTM can be remote controlled via OLE and can transfer data via
OLE. A Visual-Basic (Version 6) program example is included on the Win-
FTM installation CD in the directory Service\OLE_Import_Sample_Visual-
Basic_6.0\AutomationDemo. This sample program can be used as a
template for the customers own remote control software.

Control Explanation
to Excel The data will be directly sent to an Excel file.
A new Excel workbook (Workbook 1) opens with the first exported value.
Even if Excel is already opened, a new workbook will open with the first
exported value. In the field Startposition Column Row enter the cell,
where the table shall start, e.g. C4.
@TAB must be inserted in the export template as column separators. In
addition, a period (.) and not a comma (,) must be selected as the deci-
mal character. Depending on the country setting, Excel might still display
the comma (,) as the decimal separator character. At the end, the Excel
workbook (Workbook 1) must be saved.
► Do not close Excel as long as WinFTM is still open.
to OPC-DA1..3 For the connection of the PC to a programmable logic control via Profib-
us, Profinet
to TCP-IP For the connection of the PC via TCP/IP
20.3 Setting up an Export Template
The format in which measurement data and other data is written to a file during data export is spec-
ified in an export template. With the export template you control, which data is exported and the
layout, into which the data is exported.
An export template can be assigned to one or several products. For each product you can set up
a specific export template.
Procedure
Do one of the following:
 To create a new export template select Evaluation > Export > new template.
The window New export template appears.
In the field Name enter a name for the new export template and click OK.
 To modify an existing export template select Evaluation > Export > modify template.
The window Select export template appears.
Select the template you want to change and click OK.

The window Definition of Export Template appears.
The three sub-windows on the left define the different sections of data to be exported: single read-
ings, block statistics and header info. With the check boxes in the area Export Mode you can ac-
tivate or deactivate the sections.
In the figure above only Single reading is checked, that is, only the section for single readings is
exported, the code in the other sub-windows will be ignored.
Table 20-3: The meaning of the sub-windows for Online Export and Export on demand
Input field Online Export Export on demand

Template A single reading is exported after every All single readings of the selected
for single measurement, if the Single reading ex- blocks are exported, if the Single read-
readings port mode is enabled. ing export mode is enabled.
Template Block statistics are exported, when a Block statistics of the selected blocks are
for block block is closed (automatically or manu- exported, if the Block statistics export
statistics ally) and if the Block statistics export mode is enabled.
mode is enabled.
Header ex- The header is exported, when a product The header of the current Product is ex-
port mask is retrieved and if the Header export ported, if the Header export mode is en-
mode is enabled. abled.
The sub-window on the right shows all variables with a short explanation.

To add a variable to your template:

1. Set the cursor to the position in your template, where the variable shall be inserted.
2. Highlight the variable in the window at the right.
3. Click .
20.3.1 The Syntax of the Default Template
To explain the general principle for setting up an export template and the effect of the variables,
the syntax of the default export template is described in this section.
The default export template consists of three parts:
 Template for single readings
 Template for block statistics
 Template for block statistics
General rules for export templates:
 An export template can have any chosen length.
 An export template must be defined in one row. Carriage returns and line feeds must be
entered by using the variables @CRX and @LFX, not by pressing the enter key.
Template for single readings

Syntax:
@NBR@TAB@PRF@TAB@VA1@TAB@VA2@TAB@VA3@TAB …
@VA20@CRX@LFX@END
For more clarity the syntax is shown here in two lines. In the window Definition of Export
Template the template must be written in one line to avoid unwanted carriage returns and
line feeds.
Table 20-4: Explanation of the elements
Variable Explanation
@NBR Contains the number of the reading
@TAB A tabulator will be inserted.
@PRF Contains the nam of the operator
@VA Contains the value of the reading, must always be supplemented with the number
of the respective reading, e. g. @VA1
@CRX A carriage return will be inserted.
@LFX A line feed will be inserted.
@END Ends the template

Template for block statistics

Syntax:
Block #@TAB@BLK@TAB@ANB@TAB@LOT@TAB@BM1@TAB@BM2@CRX@LFX
x = @TAB@TAB@MW1@TAB@MW2@TAB@MW3 … MW20@CRX@LFX
s = @TAB@TAB@S_1@TAB@S_2@TAB@S_3 … S_20@LFX@LFX@END
line feeds.
Block # The text Block # will be displayed.
@BLK Contains the number of the block
@ANB Contains the value of the field Order No.
@LOT Contains the value of the field Lot No.
@BM1 Contains the value of the field Label 1.
@BM2 Contains the value of the field Label 2.
x= The text x = will be displayed.
@MW Contains the mean value, must always be supplemented with the number of the
respective reading, e. g. @MW1
s= The text s = will be displayed.
@S_ Contains the standard deviation, must always be supplemented with the number of
the respective reading, e. g. @S_1

Header export mask

Syntax:
@CAL@TAB#@TAB@PRN@CRX@LFX@LFX
#@TABOperator@TAB@EL1 @DM1@TAB@EL2 @DM2@TAB@EL3 @DM3 …
@EL20 @DM20@LFX@LFX@END
line feeds.
@CAL Contains the product name.
# The character # will be displayed.
@PRN Contains the product number.
Operator The text Operator will be inserted.
@EL Contains the name of the result channel (element, coating thickness, ppm etc. ),
must always be supplemented with the number of the respective channel, e. g.
@EL1
@DM Contains the unit of the result channel (mils, nm, % etc.), must always be supple-
mented with the number of the respective channel, e. g. @DM1

Pattern Recognition
21 Pattern Recognition
The instrument is equipped with a motor-driven XY-stage. Pattern recognition allows you to place
specimens reliably even under difficult conditions. The WinFTM software saves a search item (pat-
tern) and looks for it during the measurement. It then adjusts the XY-stage so that the search item is
found and the measurement is done at the correct position. Advantages:
 Reduction of operator influence when the specimens are positioned
 Reduction of the influence of the dimensional tolerances of the specimens
 Time-saving measurement of e.g. bulk material and plug contacts
You can use the pattern recognition e.g. when measuring the coating thickness on the following
objects:
 Contacts on printed circuit boards
 Plug contacts
 SMD components
To use the pattern recognition function, the WinFTM extension SUPER must be activated.
Videos with pattern recognition applications can be found on the following website:
www.helmut-fischer.com/pattern-recognition
21.1 Scenarios: Pattern Recognition, XY Programming and Task

Programming
You can combine the pattern recognition with XY programming and task programming. The two
following typical scenarios are explained in this chapter:
 The coating thickness on the contact pads of SMD components is to be determined. The position
of the SMD components varies greatly, but the instrument still finds the exact measuring posi-
tion. The clever arrangement of the search item and the search area produces an automatic
feed. In this way, you do not have to carry out any XY programming but can still automatically
measure at several measuring points, see Chap. 21.3 on page 166.
 Process control or incoming goods inspections of printed circuit boards: For a printed circuit
board panel with several individual PCB's, the coating of the contact pads is to be checked.
Fluctuations in the positioning and manufacturing tolerances have a strong effect on small struc-
tures. You can roughly pre-position the measuring points with the XY programming and then
move to the exact measuring position with the pattern recognition. You can automate the
complete sequence of measurements with a task, see Chap. 21.4 on page 170.

Pattern Recognition
21.2 Settings and their Meaning
All settings for the pattern recognition are valid for one product. You can assign every
product its own settings for pattern recognition.
The settings apply to the current image number, i.e. you can make separate settings for
each image.
To start the pattern recognition, select Video > Pattern matching in the menu bar or click the
icon.
The pattern recognition window appears. The settings have the following meaning:
Setting/parameter Meaning
Move to saved xy-coordinates When you have programmed XY coordinates and activated
With progr. XY-Pos., move to a measuring position with these
1. Position
command buttons. You can make all the pattern recognition
Next Pos. settings for this measuring position.
Prev. Pos All pattern recognition settings apply to the current measuring
position/image number, i.e. you can save a separate image
Pos. and separate settings for the measuring position.
Find Starts the pattern recognition, searches for the next image.
Take new picture Transfers the video image of the camera to the pattern recog-
nition.
Error value Shows the error, the deviation between the defined search
item and the found search item.
With progr. XY-Pos. When you have programmed XY coordinates, activate this
option to save a search item for each XY position.
On measure, find automatically When this is activated, the pattern recognition is started
before each measurement, and the icon of the command
button changes:
Algorithms
Mode Selection of the search algorithm; you can find the right one
for your measuring application through trial and error.
Center weight If the search area contains several similar images, you can set
whether and how much the item near the crosshairs should be
preferred.
Error check Defines the threshold for the permissible deviation between
the defined search item and the found item. When the
threshold is exceeded, a window with a warning appears.
Use picture no. / Change Shows the currently saved, valid image number for the XY
position. Change Allows you to assign a different image to
the current XY position.

Pattern Recognition
Setting/parameter Meaning
Replay at Pos.No. If the specimen has repetitive structures (e.g. a panel with sev-
eral individual printed circuit boards), then you can use this to
define the position at which the pattern recognition is to start
again from the beginning.
Max. rotation If the measuring item is arranged so that it is skewed in rela-
tion to the defined search item (e.g. due to skewed posi-
tioning), then the measuring item can still be detected. Enter
the maximum expected rotation angle here; it should not be
larger than necessary though, because this increases the cal-
culation time.
Previous angle Setting: If you have measuring items with sev-
eral measuring positions that could have a skewed position.
Set the angle for the first measuring point, e.g. +/- 120
degrees, and Previous angle for the other measuring points.
This saves calculation time.
Angle= Shows the actual rotation angle that was found; see also
Max. Rotation.
Pattern definition
Total video area When activated, the search item is searched for in the entire
video image.
Show search item Shows the search item (the image that is to recognized). Acti-
vate this option to define the search item.
Show search area Shows the search area (the area of the video image in which
the search item is searched for). Activate this option to define
the search area.
Show cross hair Shows the crosshairs of the video image.
Saved pictures Deletes the current reference image with the corresponding
parameters or all reference images and all parameters.
Clear current
Clear all pict.
Correction / X / Y When the found position is not exactly in the crosshairs, you
can correct it here. Entry in pixels. The correction has a global
effect on the instrument and not just the product.

Pattern Recognition
21.3 Pattern Recognition: Contact Pads of SMD Components
In the following, the pattern recognition is explained using contact pads of SMD components as an
example. The clever arrangement of the search item and the search area produces an automatic
feed. In this way, you do not have to carry out any XY programming but can still automatically
measure at several measuring points.
All settings for the pattern recognition are valid for one product. You can assign every product its
own settings for pattern recognition.
Before you start

You have installed at least version 6.30 of the WinFTM software and activated the WinFTM exten-
sion SUPER. You can determine the WinFTM version via Help > About WinFTM....
Procedure
1. Place the SMD components equally spaced on a line, see Fig 21.1 on page 167.
2. Move the XY-stage so that the first component is in the middle of the video image; see Fig 21.1
on page 167.
3. Select Video > Pattern matching in the menu bar.
The Define pattern matching area window appears.
4. In the Saved pictures area, click Clear all pict..
Any video images saved previously in the product are deleted.
5. Click Take new picture.
The video image appears in the Define pattern matching area window.

Pattern Recognition
Measuring position
Search item
Figure 21.1: Pattern recognition window: The hatched rectangle shows the search item, and the
cross shows the measuring position
6. In the Pattern definition area, click Show search item. If the Total video area option is activated,
deactivate it.
A hatched rectangle appears. This rectangle marks the search item, i.e. the area of the image
that is to be found again.
7. Define the search item:
 Position of the search item: Place the cursor in the rectangle, keep the left mouse button
pressed and move the rectangle.
 Size of the search item: Place the cursor on one of the eight black points, keep the left
mouse button pressed and change the size of the rectangle.

Pattern Recognition
8. Define the measuring position by clicking on the measuring position with the right mouse
button. The measuring position can be inside or outside of the search item rectangle.
9. Set the parameters according to the following table:
Parameter Value
On measure, find automatically Activated
Algorithms area
Mode 2 = Norm.Corr
Center weight 0.0 = no
Error check 2% error
Max. rotation +/- 110 degree
10.Click Show search area.

Another hatched rectangle appears in the pattern recognition window. This rectangle marks the
search area, i.e. the area of the image in which the image details are to be searched for.
Search area
Figure 21.2: Pattern recognition window: The hatched rectangle shows the search area

Pattern Recognition
11.Define the search area:

 Position of the search area: Place the cursor in the rectangle, keep the left mouse button
 Size of the search area: Place the cursor on one of the eight black points, keep the left
If you automatically measure specimens that are in a row, then the search area must always be
to the right (or left) of the first specimen. This produces an automatic feed. If the search area
contains several identical specimens, then experiment with the Algorithms > Center weight
parameter or decrease the search area.
12.To test the function of the pattern recognition, carry out the following steps:
a Move the XY-stage so that the first SMD component is in the search area.
b Click Find in the pattern recognition window.
The XY-stage moves to the first/next measuring position.
c Repeat step b.
If the XY-stage does not correctly move to the first measuring position, then check the following:
 Are the SMD components arranged equally spaced on a line?
 Is the ratio of component size to distance selected so that only one component is completely
in the search area? If there are two components in the search area, for example, then exper-
iment with the parameter Algorithms > Center weight or decrease the search area.
13.To start the measurements with the pattern recognition, click Start in the WinFTM main menu.

Pattern Recognition
21.4 Pattern Recognition: Measurements on Printed Circuit Boards
In the following, the pattern recognition is explained using contact pads of SMD components as an
example, see Fig. 21.3.
Datum point 1
1
Panel
Individual printed
circuit board
Datum point 2
2
Figure 21.3: Printed circuit board panel with several individual printed circuit boards, datum points
1 and 2 serve as positioning aids
All settings for the pattern recognition are valid for one product. You can assign every product its
own settings for pattern recognition.
Before you start

You have installed at least version 6.30 of the WinFTM software and activated the WinFTM exten-
sion SUPER. You can determine the WinFTM version via Help > About WinFTM....
Procedure
1. Program the XY coordinates for automatic measurement. Use the following options for this:
 Same programming on multiple parts (points + pattern), see Chap. 17.10 on page 133.
 Datum points (two datum points), see Chap. 17.12 on page 136. If you program two
datum points, then the programmed XY coordinates will be reliably approached even with
a skewed positioning.
2. Select Video > Pattern matching in the menu bar.
The pattern recognition window appears.
3. In the Saved pictures area, click Clear all pict..
Any video images saved previously in the product are deleted.
4. Activate the With progr. XY-Pos. option.
5. In the Move to saved xy-coordinates area, click 1. Position.
The XY-stage moves to the first measuring position.

Pattern Recognition
6. Click Take new picture.

The video image appears in the pattern recognition window.
7. In the Pattern definition area, click Show search item. If the Total video area option is activated,
deactivate it.
A hatched rectangle appears. This rectangle marks the search item, i.e. the area of the image
that is to be found again.
Measuring position
Search item
Figure 21.4: Pattern recognition window: The hatched rectangle shows the search item
8. Define the search item:

 Position of the search item: Place the cursor in the rectangle, keep the left mouse button
 Size of the search item: Place the cursor on one of the eight black points, keep the left
In the example (see Fig. 21.4), the lower part of the solder pad is not in the area of the search
item. The lower area is very light; not all solder pads are that light. If the light area were in the
search item, pads might not be detected.

Pattern Recognition
9. Define the measuring position by clicking on the measuring position with the right mouse
button. The measuring position can be inside or outside of the search item rectangle.
10.Set the parameters according to the following table:
Parameter Value
With progr. XY-Pos. Activated
On measure, find automatically Activated
Algorithms area
Mode 2 = Norm.corr
Center weight 0.0 = no
Error check 5% error
Max. rotation +/- 110 degree
11.Click Show search area.

Another hatched rectangle appears in the pattern recognition window. This rectangle marks the
search area, i.e. the area of the image in which the image details are to be searched for.
Search area
Figure 21.5: Pattern recognition window: The hatched rectangle shows the search area

Pattern Recognition
12.Define the search area:

 Position of the search area: Place the cursor in the rectangle, keep the left mouse button
 Size of the search area: Place the cursor on one of the eight black points, keep the left
For the measurement of the solder pads, select the area of the vicinity of the pad as the search
area; see Fig. 21.5.
6 similar pads
4 different pads
Figure 21.6: The solder pads on an individual printed circuit board
For the printed circuit board panel, a total of 10 pads are to be measured on each individual
printed circuit board; see Fig. 21.6. Of these, 6 pads are very similar. Only one search photo
is defined for them. The 4 lower pads are very different; one photo is defined for each of these.
13.In the Move to saved xy-coordinates area, click Next position.
The XY-stage moves to the next measuring position, to the next pad that is very similar to the
first one. For this measuring position, a separate search photo is not defined but the first search
photo is used.
14.To assign the search photo of the previous measuring position for this measuring position, enter
1 in the Use picture no. field and click Change.
Search image no. 1 is now used for XY position no. 2.
15.Repeat steps 13 to 14 for all 6 pads that are very similar.
16.In the Move to saved xy-coordinates area, click Next position.
The XY-stage moves to the next measuring position, to the next pad. This pad and the following
three pads are different. For this reason, a separate search image is defined for each of these
four pads.
17.Repeat steps 6 to 13 for each of the four different pads. During step 13, make sure that you
define a separate search photo for each pad this time.
18.You have now defined the 10 measuring positions for an individual printed circuit board on
the printed circuit board panel. To define the measuring positions for the other individual
printed circuit boards, you have two possibilities:
 You can transfer the programmed search images to the other individual printed circuit
boards with the pattern recognition: Continue with step 19.
 You can automate the measurement with a task: Continue with Chap. 21.4.1 on
page 174.

Pattern Recognition
19.To transfer the search images programmed for the first individual printed circuit board to the
other individual printed circuit boards, enter 10 in the Replay at Pos.No. field.
21.4.1 Automation of the measurement with a task
To avoid having to define the search images and search areas for all individual printed circuit
boards, you can automate the measurement with a task. In the following, a task is described that
executes the steps listed below:
1. Setting the first datum point (+1)
2. Setting the second datum point (+2)
3. Loop: Execute the following steps for each individual printed circuit board:
a Move to the next XY position
b Perform pattern recognition: For the first six XY positions, search image no. 1 (definition in
command f58) is used, and for the next four XY positions, search images 7 to 10 are used.
c Start a measurement
f42 Adjust Datum Point 1 ;Create message ... dialog

|f32 ;Set XY(Z)-offset (1.datum)
|f42 Adjust Datum Point 2 ;Create message ... dialog

|f29 ;Set XY(Z)-offset (2.datum)
|p51 LabelA ;Set label ... for GOTO
|f38 ;Test coordinates, no para = next pos., or use pos.no.#

|f58 1 ;Picture No. Patternrecognition
|f01 ;Start measurement





Pattern Recognition





|p52 LabelA ;GOTO ...

Pattern Recognition

Cleaning and Maintenance
22 Cleaning and Maintenance
22.1 Cleaning the Instrument
DANGER Line voltage

Contact to line voltage can lead to death or serious injuries.
► Disconnect the instrument from the line voltage, before you start to clean
the instrument.

The instrument can be destroyed, if you clean the instrument improperly or with
aggressive cleaning agents or if the instrument is exposed to fluids.
► Do not pour liquid over the instrument. Do not immerse the instrument
in liquids.
► Use only gentle cleaning agents. Never use alcohol or similarly aggressive
substances.
► Use a soft brush to clean the measuring chamber. Never use a vacuum
cleaner to clean the measuring chamber.
► Clean the instrument with a damp cloth gently. For stubborn dirt use a
small amount of dishwashing detergent.
22.2 Never Clean Calibration Standards!
ATTENTION Measurement errors

The calibration standards are very sensitive to abrasion. The coating thickness
of calibration standards can be changed, if the standards are cleaned. This can
lead to measurement errors.
► Never clean calibration standards.

22.3 Replacing the Line Fuse
DANGER Line voltage

Contact to line voltage can lead to death or serious injuries.
► Disconnect the instrument from the line voltage, before you start to replace
the line fuse.
Before you begin

To replace the line fuse you need:
 A new 2 A (250 V) slow blow fuse
 A small screwdriver
Line Fuse
Figure 22.1:Position of the line fuse at the right side of the instrument
Procedure
1. Switch off the instrument and disconnect the power plug.
2. Pull the fuse holder out. This is best done by carefully lifting up the holder using the tip of a
screwdriver as a lever.
Figure 22.2:Lifting up the fuse holder
3. Remove the defective fuse and replace it with a new one.

4. Replace the fuse holder and press it in place.

22.4 Preparing the Instrument for Transport

Transporting the instrument without mounted shipping lock and in containers
other than the original shipping container can destroy the instrument and will
invalidate any warranty claims.
► Before transporting the instrument, re-install the shipping lock.
► Transport the instrument in the original shipping container. If you no longer
have access to the original shipping container, rent a container from
FISCHER.
Procedure
1. Disconnect and remove all connections.
2. Re-install the shipping lock of the measuring stage. Proceed in the reverse order as described
in Chap. 3.3 on Page 25.
3. Open the cover of the measurement chamber and re-install the shipping lock made of foam.
4. Remove the key for turning on the x-ray energy and place it in the case with the accessories.
5. Store the instrument in its original shipping container. If you no longer have access to the orig-
inal shipping container, rent a container from FISCHER.

22.5 Troubleshooting
Error Possible cause Solution

No display on the monitor The computer is not turned Turn the computer on.
on.
The monitor is not turned on. Turn the monitor on.
Specimen not visible in the The specimen lighting is too Change the brightness using the
video image bright or too dark. slide control at the bottom left in
the video image.
The specimen is not posi- Position the specimen properly
tioned properly. (see Chap. 4 on Page 31).
The communication between Enable the communication be-
instrument and WinFTM is tween instrument and WinFTM
disabled. (see Chap. 3.7 on Page 29).
Software crash Switch off the WinFTM software,
PC and the instrument and then on
again.
Instrument does not turn on The instrument is not con- Turn the instrument off and plug it
when switching on the main nected to line power. into a line socket.
switch
The line fuse is blown. Replace the fuse (see Chap. 22.3
on Page 178).
Printer prints garbage Wrong printer driver in- Install the correct printer driver.
stalled
No printout The printer is switched off. Switch on the printer.
The printer is not properly Check the connection between
connected to the computer. printer and computer.
CONTROL LED flashes The cover of the measure- Close the cover of the measure-
ment chamber is not fully ment chamber completely.
closed.
Wrong measurement data The selected product file Select or set up appropriate prod-
does not fit the specimen. uct file for the specimen.
Bad calibration Perform calibration correctly (see
Chap. 18 on Page 139).
Instead of a measurement The communication between Enable the communication be-
reading, the window Open instrument and WinFTM is tween instrument and WinFTM
appears after a measure- disabled. (see Chap. 3.7 on Page 29).
ment has been started

Error Possible cause Solution

Communication between in- The instrument is not correct- Check and correct the connection
strument and WinFTM can- ly connected to the comput- between instrument and computer
not be established er. (see Chap. 3.7 on Page 29),
switch the instrument off and on.
A menu or menu option The short menu is turned on. Turn on the long menu by selecting
does not appear in the menu General > full menu (requires
bar password).
Menu options to edit Def.MA The WinFTM extension SU- If you already have the WinFTM
files are grayed out and PER is not active. extension SUPER, shut down Win-
cannot be selected FTM, plug the SUPER FISIM dongle
and start WinFTM again.
If you not yet own the WinFTM ex-
tension SUPER, contact your
FISCHER representative.
XY(Z) stage cannot be mo- The XY(Z) stage has been Move the XY(Z) stage in the oppo-
ved moved up, down, right or site direction.
left too far.
The safety system is en- Remove the foreign object.
gaged, e. g. the stage has
been jammed by a foreign
object.


Addendum
23 Addendum
23.1 Description of the Characteristic Statistical Parameters
23.1.1 Block Result
Parameter Description Equation

Mean value x Mean value of the single readings,
called arithmetic mean value x .
The arithmetic mean value is the
summation of all single readings x i
of a measurement series (block/ 1 n
x = ---  x i
group), divided by the number of n i =1
measurements n.
xi: Single readings

n : Number of measurements per
block
Confidence Each measurement device produces q is calculated according to the
interval q random measurement errors. With a equation below assuming a normal
certain probability (confidence distribution for a confidence level of
level), the true value  of the 95 %:
measured parameter lies in an
s
interval (double-sided confidence q = t f ;1 – 0025 -------
interval) around the measured mean n
value x of a measurement series
(block/group). The borders of this t: Quantile of the Student’s t-distri-
interval are at a distance q from the bution (Student’s factor), can be
true value  . obtained from tables in
common publications [1]
x–qx+q
s: Standard deviation
n: Number of the measurements
per block
Standard The standard deviation is a measure
deviation s of the dispersion of the single 1 n 2
readings of a measurement series s = ------------   x – x i 
n – 1 i=1
about the mean value.
x : Mean value of the block
xi: Single readings
n: Number of measurements per
block

Addendum

Coefficient of Ratio of the standard deviation to
s
variation the mean value V = --100
x
V [%]
x: Mean value of the block
For sufficiently large samples it can
be said:

V = ---

: Standard deviation
: Mean value
Range R Difference between the maximum
and the minimum values of the block R = x max – x min
x max :Highest reading of the block

x min :Lowest reading of the block
Range Rp [%] Range relating to the mean value
R
R p = ---100
x
R: Range in percent
x: Mean value of the block
n (< LSL) Number of measurements that are Specification limits (USL, LSL) can
below the lower specification limit be entered in the menu
Evaluation > Final evaluation…, tab
n (> USL) Number of measurements that are
SPC, command button Parameter.
above the upper specification limit
[1] Graf, Henning, Stange und Wilrich: Formeln der angewandten mathematischen Statistik
(Equations in Applied Mathematical Statistics); Springer Verlag (Springer Publishing
Company)

Addendum
23.1.2 Final Result – Fixed Block Definition
Automatic block creation (Block definition fix) is enabled for the application.

Mean value x Mean value of the block mean
values. x is the summation of all n
1 Bl
block mean values x i of a x = --------  x i
n Bl i = 1
measurement series, divided by the
number of blocks n Bl
xi : Block mean values
n Bl : Number of blocks
interval (double-sided confidence s
q = t f ;1 – 0025 ------------
interval) around the measured mean n Bl
x–qx+q common publications [1]
s: Standard deviation of the block
mean values
n
1 Bl
2
s = -----------------   x – x i 
n Bl – 1 i = 1
n Bl : Numbers of blocks
x : Mean value of the block mean
values
xi: Block mean values
Mean The mean standard deviation is a
standard measure of the dispersion of the n
1 Bl
deviation s individual block standard deviations s = --------  s i

n Bl i =1
of a measurement series about their
common mean value x .
s i : Standard deviations of the
blocks

Addendum

Coefficient of Standard deviation referring to the
variation mean value
V [%]
s
V = --100
x
x
s : Mean standard deviation

values
Mean range R Mean range of the block ranges
n Bl
1-
R = -------  Ri
n Bl i = 1
sR i : Ranges of the blocks

Mean range Mean range referring to the mean
R p [%] value R
R p = ---100
xx
R : Mean range of the block
ranges
values
LSL Lower specification limit Specification limits (USL, LSL) can
be entered in the menu
USL Upper specification limit

Addendum

Cp Process capability index
Computed and displayed only if
specification limits are enabled
USL – LSL
C p = ---------------------------
6̂
USL:Upper specification limit

LSL:Lower specification limit
̂ : Estimated value for the mean
standard deviation s
n
1 - Bl s 2
n Bl i
̂ = ------- i
=1
si: Standard deviations of the
blocks
Cpk Process capability index
C pk = Min  C pu ,C po 
Computed and displayed only if
specification limits are enabled
x – LSL
C pu = ------------------
-
3̂
USL –
C po = -------------------x-
3̂
USL:Upper specification limit

LSL:Lower specification limit
̂ : Estimated value for the mean
standard deviation s
n
1 Bl
̂ = --------  s i2
n Bl i =1
si: Standard deviations of the
blocks

Addendum

Blocks (< LSL) Number of block mean values that
are below the lower specification
limit LSL
Blocks (< LSL) Number of block mean values that
[%] are below the lower specification
limit LSL in percent Displayed only if specification limits
Blocks (> USL) Number of block mean values that are enabled
are above the upper specification
limit USL
Blocks (> USL) Number of block mean values that
[%] are above the upper specification
limit USL in percent
Company)

Addendum
23.1.3 Final Result – Variable Block Definition
Manual block creation (Block definition variable) is enabled for the application.

Mean value x Arithmetic mean value of the single
readings
1 n
x = ---  x i
n i =1
xi: Single readings of the selected

blocks
n : Number of measurements of the
selected blocks
interval (double-sided confidence s-
q = t f ;1 – 0025 ------
interval) around the measured mean n
x–qx+q common publications [1]
n: Number of measurements of the
selected blocks
Standard The standard deviation is a measure
deviation s of the dispersion of the single 1 n 2
readings of a measurement series s = ------------   x – x i 
n – 1 i=1
about the mean value.
x: Mean value of the single read-

ings of the selected blocks
xi: Single readings of the selected
blocks
n: Number of measurements
Coefficient of Standard deviation relating to the
s
variation mean value V = --100
x
V [%]

Addendum

Range R Difference between the highest and
the lowest reading of the selected R = x max – x min
blocks
x max :Highest reading of the
selected blocks
x min :Lowest reading of the selected
blocks
Range Rp [%] Range relating to the mean value
R
R p = ---100
x
R: Range
LSL Lower Specification Limit Specification limits (USL, LSL) can
be entered in the menu
USL Upper Specification Limit
̂ Estimated standard deviation of the
populations ̂ = s I2 + s II
2
s I: Arithmetic mean value of the

standard deviation of the
blocks
sII: Standard deviation of the mean
values
sI Arithmetic mean value of the
standard deviations of the blocks
1 m
s I = ----  s i
m i =1
m: Number of blocks
s i: Standard deviation of the block
i
sII Standard deviation of the mean
values 1 m 2
s II = -------------   x i – x 
m – 1 i=1
m: Number of blocks
x i : Mean value of the block i
values

Addendum

n (> USL) Number of measurements that are
above the upper specification
limit USL
n (> USL) [%] Number of measurements that are
above the upper specification
limit USL in percent Displayed only if specification limits
n (< UGW) Number of measurements that are are enabled
below the lower specification
limit LSL
n (> UGW) [%] Number of measurements that are
below the lower specification
limit LSL in percent
Company)

192
Addendum
1 1.01 Periodic table of the Elements X-Ray Properties 2 4.00

Hydrogen Helium
H He
3 6.94 4 9,01 Atomic Number 79 197,0 Atomic weight 5 10.81 6 12.01 7 14.01 8 15.99 9 18.99 10 20.18
Lithium Berylium Gold Name ( IUPAC ) GAS LIQUID SOLID Boron Carbon Nitrogen Oxygen Fluorine Neon
Li Be Au B C N O F Ne
0,05 0,11 K-alpha 68,79 9,71 L-alpha 0,19 0,28 0,39 0,52 0,68 0,85
K-beta 77,97 11,44 L-beta
M-alpha 2,12 13,38 L-gamma
11 22.99 12 24.31 13 26.98 14 28,09 15 30,97 16 32,07 17 35,45 18 39,95
Sodium Magnesium Aluminium Silicon Phosphorus Sulfur Chlorine Argon
Na Mg Al Si P S Cl Ar
1,04 1,25 1,49 1,74 2,02 2,31 2,62 2,96
1,55 1,84 2,14 2,46 2,82 3,19
19 39,10 20 40,08 21 44,96 22 47,88 23 50,94 24 52,00 25 54,94 26 55,85 27 58,93 28 58,69 29 63,55 30 65,39 31 69,72 32 72,61 33 74,92 34 78,96 35 79,90 36 79,90
Potassium Calcium Scandium Titanium Vanadium Chromium Manganese Iron Cobalt Nickel Copper Zinc Gallium Germanium Arsenic Selenium Bromine Krypton
K Ca Sc Ti V Cr Mn Fe Co Ni Cu Zn Ga Ge As Se Br Kr
3,31 3,69 4,09 4,51 4,95 5,41 5,90 6,40 6,93 7,48 8,05 8,64 1,01 9,25 1,10 9,89 1,19 10,54 1,28 11,22 1,38 11,92 1,48 12,65 1,59
3,59 4,01 4,46 4,93 5,43 5,95 6,49 7,06 7,65 8,26 8,90 9,57 1,03 10,26 1,12 10,98 1,21 11,73 1,32 12,50 1,52 13,29 1,53 14,11 1,64
37 85,47 38 87,62 39 88,91 40 91,22 41 92,91 42 95,94 43 97,91 44 101,1 45 102,9 46 106,4 47 107,9 48 112,4 49 114,8 50 118,7 51 121,8 52 127,6 53 126,9 54 131,3
Rubidium Strontium Yttrium Zirconium Niobium Molybdenum Technetium Ruthenium Rhodium Palladium Silver Cadmium Indium Tin Antimony Tellurium Iodine Xenon
Rb Sr Y Zr Nb Mo Tc Ru Rh Pd Ag Cd In Sn Sb Te I Xe
13,39 1,69 14,16 1,81 14,96 1,92 15,77 2,04 16,61 2,17 17,48 2,29 18,41 2,42 19,28 2,56 20,21 2,70 21,18 2,84 22,16 2,98 23,17 3,13 24,21 3,29 25,27 3,44 26,36 3,61 27,47 3,77 28,61 3,94 29,80 4,11
14,96 1,75 15,83 1,87 16,74 2,00 17,67 2,12 18,62 2,26 19,61 2,40 20,59 2,54 21,66 2,68 22,72 2,83 23,82 2,99 24,94 3,15 26,09 3,32 27,27 3,49 28,48 3,66 29,72 3,84 30,99 4,03 32,29 4,22 33,64 4,42
2,30 2,46 2,62 2,79 2,96 3,14 3,33 3,52 3,72 3,92 4,13 4,35 4,57 4,80 5,04
55 132,9 56 137,3 72 178,5 73 181,0 74 183,9 75 186,2 76 190,2 77 192,2 78 195,1 79 197,0 80 200,6 81 204,4 82 207,2 83 209,0 84 209,0 85 210,0 86 222,0
Caesium Barium Hafnium Tantalum Tungsten Rhenium Osmium Iridium Platinum Gold Mercury Thallium Lead Bismuth Polonium Astatine Radon
Cs Ba 57-71 Hf Ta W Re Os Ir Pt Au Hg Tl Pb Bi Po At Rn
30,97 4,29 32,19 4,47 Lanthanides 55,76 7,90 57,52 8,15 59,31 8,40 61,13 8,65 62,99 8,91 64,89 9,19 66,82 9,44 68,79 9,71 70,82 9,99 72,86 10,27 74,96 10,55 77,10 10,84 79,30 11,13 81,53 11,42 83,80 11,72
34,98 4,62 36,38 4,83 63,21 9,02 65,21 9,34 67,23 9,67 69,30 10,01 71,40 10,35 73,54 10,71 75,74 11,07 77,97 11,44 80,26 11,82 82,56 12,21 84,92 12,61 87,34 13,02 89,81 13,44 92,32 13,87 94,88 14,32
23.2 Periodic Table of the Elements with X-Ray Properties
5,28 5,53 1,65 10,51 1,71 10,89 1,78 11,28 1,84 11,68 1,91 12,09 1,98 12,51 2,05 12,94 2,12 13,38 2,20 13,83 2,27 14,29 2,35 14,76 2,42 15,24 15,74 16,25 16,77
87 223,0 88 226,0 89 227,0 90 232,0 91 231,0 92 238,0 93 237,1 94 244,1 95 243,1 96 247,1 97 247,1 98 251,1 99 252,1 100 257,1 101 258,1 102 259,1 103 260,1 104 261,1
Francium Radium Acitinium Thorium Protactinium Uranium Neptunium Plutonium Americium Curium Berkelium Californium Einsteinium Fermium Mendelevium Nobelium Lawrencium Rutherford.
Fr Ra Ac Th Pa U Np Pu Am Cm Bk Cf Es Fm Md No Lr Rf
86,12 12,03 88,49 12,34 90,89 12,65 93,33 12,97 95,85 13,29 98,43 13,61 101,0 13,95 103,7 14,28 106,4 14,62 109,1 14,96 111,9 15,31 114,7 15,66 117,7 16,02 120,6 16,38
97,48 14,77 100,1 15,23 102,9 15,71 105,6 16,20 108,4 16,70 111,3 17,22 114,9 17,74 117,2 18,28 120,2 18,83 123,2 19,39 126,4 19,97 129,5 20,56 132,8 21,17 136,1 21,79
17,30 17,85 18,41 3,0 18,98 3,08 19,56 3,17 20,16 3,26 20,78 3,35 21,42 22,07
57 138,9 58 140,1 59 140,9 60 144,2 61 144,9 62 150,4 63 152,0 64 157,3 65 158,9 66 162,5 67 164,9 68 167,3 69 168,9 70 173,0 71 175,0
Lanthanum Cerium Praseodym. Neodymium Promethium Samarium Europium Gadolinium Terbium Dysprosium Holmium Erbium Thulium Ytterbium Lutetium
57-71 La Ce Pr Nd Pm Sm Eu Gd Tb Dy Ho Er Tm Yb Lu
Lanthanides 33,44 4,65 34,72 4,84 36,02 5,03 37,36 5,23 38,65 5,43 40,12 5,64 41,53 5,85 42,98 6,06 44,47 6,28 45,99 6,50 47,53 6,72 49,10 6,95 50,73 7,18 52,36 7,41 54,06 7,65
37,80 5,04 39,26 5,26 40,75 5,49 42,27 5,72 43,95 5,96 45,40 6,21 47,03 6,46 48,72 6,71 50,39 6,98 52,18 7,25 53,93 7,53 55,69 7,81 57,58 8,10 59,35 8,40 61,28 8,71
0,83 5,79 0,88 6,05 0,93 6,32 0,98 6,60 6,89 1,08 7,18 1,13 7,48 1,19 7,79 1,24 8,10 1,29 8,42 1,35 8,75 1,41 9,09 1,46 9,42 1,52 9,78 1,58 10,14
DATA SHEET
X-Ray Fluorescence Measuring Instrument with a

Programmable XY-Stage and Z-Axis for Automated
Measurements of thin Coatings and for Material
Analysis

Description
The FISCHERSCOPE X-RAY XDAL 237 is universally applicable energy dispersive x-ray
fluorescence measuring instrument. It is especially well suited for non-destructive meas-
urements and analysing very thin coatings, even with very complex compositions or
small concentrations as well as automated measurement tasks.
With the fast, programmable XY-stage, it is the fitting measuring instrument for auto-
mated measurements in quality assurance and production monitoring.
Typical fields of application:

• Analysis of very thin coatings of ≤ 0.1 μm (0.004 mils)
• Measurements of functional coatings in the electronics and semiconductor
industries, e.g. on lead frames, connectors or printed circuit boards
• Determination of complex multi-coating systems
• Automated measurements, e.g., in quality control
• Determination of the lead content in solder
• With Option SDD: Determination of the phosphorous content in NiP coatings
To create ideal excitation conditions for every measurement, the instruments feature
electrically changeable apertures and primary filters.
The modern silicon PIN detector achieves a high accuracy and a good detection sensi-
tivity. For even higher demands, the instrument can be equipped with a silicon drift
detector (SDD). This will result in higher resolution for light elements.
Outstanding accuracy and long-term stability are characteristics of all FISCHERSCOPE

X-RAY systems. The necessity of recalibration is considerably reduced, saving time and
effort.
The fundamental parameter method by FISCHER allows for the analysis of solid and
liquid specimens as well as coating systems without calibration.
Design
The FISCHERSCOPE X-RAY XDAL 237 is designed as user-friendly bench-top instru-
ment. It is equipped with a high-precision, programmable XY-stage and an electrically
driven Z-axis. A gap in the housing allows for measurements on large flat specimens,
which do not fit in the measuring chamber, e.g. large printed circuit boards. The
sample stage moves into the loading position automatically, when the protective hood
is opened.
A laser pointer serves as a positioning aid and supports the quick alignment of the
sample to be measured. A high-resolution colour video camera simplifies the precise
determination of the measurement spot.
The entire operation and evaluation of measurements as well as the clear presentation
of measurement data is performed on a PC, using the powerful and user-friendly
WinFTM® software.
The FISCHERSCOPE XDAL 237 fulfills DIN ISO 3497 and ASTM B 568. It is a fully
protected instrument with type approval according to the German regulations
„Deutsche Röntgenverordnung-RöV“
194
General Specification
Intended use Energy dispersive x-ray fluorescence measuring instrument (EDXRF) to determine thin
coatings, trace elements and alloys
Design Bench-top unit with hood opening upwards
XY-stage and Z-axis electrically driven and programmable
Motor-driven changeable apertures and filters
Video camera and laser pointer (class 1) for orienting the sample
Measuring direction Top down
X-Ray Source
X-ray tube Micro-focus tungsten tube with beryllium window
High voltage Three steps: 10 kV, 30 kV, 50 kV
Apertures (Collimators) 4x changeable: Ø 0.1 mm (3.9 mils), Ø 0.3 mm (11.8 mils), Ø 0.6 mm (23.6 mils),
slot 0.5 x 0.15 mm (19.7 x 5.9 mils), others on request
Primary filter 3x changeable (Standard configuration: Nickel, Aluminum, no filter)
Measurement spot Depending on the measuring distance and on the aperture, the actual measurement
spot size is shown in the video image. Smallest measurement spot:
approx. Ø 0.15 mm (5.9 mils) with aperture 0.1 mm (3.9 mils)
X-Ray Detection Standard Option SDD

X-ray detector Silicon PIN detector with Silicon drift detector (SDD) with
peltier cooling peltier cooling
Resolution (fwhm for Mn-Kα) ≤ 200 eV ≤ 160 eV
Element range Sulfur S (16) to Uranium U (92) Aluminium Al (13) to Uranium U (92)
Measuring distance 0 … 80 mm (0 … 3.2 in)
Distance compensation with patented DCM method for simplified measurements at
varying distances. For particular applications or for higher demands on accuracy an
additional calibration might be necessary.
Sample Alignment
Video microscope High-resolution CCD colour camera for optical monitoring of the measurement loca-
tion along the primary beam axis, manual focusing and auto-focus, crosshairs with a
calibrated scale (ruler) and spot-indicator, adjustable LED illumination, laser pointer
(class 1) to support accurate sample placement
Zoom factor Digital 1x, 2x, 3x, 4x
Electrical Data
Power source AC 115 V or AC 230 V 50 / 60 Hz
Power consumption max. 120 W, without evaluation PC
Protection class IP40
FISCHERSCOPE® X-RAY XDAL® 237 195

Dimensions
External dimensions Width x depth x height [mm]: 570 x 760 x 650 mm, [in]: 22 x 30 x 26
Interior dimensions Width x depth x height [mm]: 460 x 495 x 146 mm, [in]: 18 x 19.5 x 5.7
measurement chamber
Weight approx. 115 kg (52 lb)
Sample Stage
Design Programmable, motor-driven XY-stage
Maximum travel X/Y-axis: 255 x 235 mm (10 x 9 in); Z-axis: 140 mm (5 in)
Max. travel speed 80 mm/s (3.2 in/s)
Repeatability precision XY ≤ 0.01 mm (0.4 mils), direction-independent
Usable sample placement area Width x depth [mm]: 300 x 350 mm, [in]: 12 x 14
Max. sample weight 5 kg, with reduced approach travel precision 20 kg
Max. sample height 140 mm (5.5 in)
Environmental Conditions
Operating temperature 10 °C – 40 °C / 50 °F – 104 °F
Storage/Transport temperature 0 °C – 50 °C / 32 °F – 122 °F
Relative humidity ≤ 95 %
Evaluation Unit
Computer Windows® PC with extension cards
Software Standard: Fischer WinFTM® BASIC inklusive PDM®
Optional: Fischer WinFTM® SUPER
Standards
CE approval EN 61010
X-Ray standards DIN ISO 3497 and ASTM B 568
Approval Fully protected instrument with type approval according to the German regulations
„Deutsche Röntgenverordnung-RöV“.
Order
FISCHERSCOPE X-RAY XDAL 237
• Standard (PIN detector) 604-348
• Option SDD 605-567
Special XDAL product modification and technical consultation on request
7. December 2016
FISCHERSCOPE®, XDAL®, WinFTM®, PDM® are registered trademarks of Helmut Fischer GmbH Institut für Elektronik und
Messtechnik, Sindelfingen - Germany.
Windows® is a registered trademark of Microsoft Corporation in the United States and other countries.
952-061
www.helmut-fischer.com

Features
WinFTM®
Software for FISCHERSCOPE® X-RAY

Fluorescence Measuring Instruments

Contents
1 Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 199
1.1 WinFTM Versions: BASIC and LIGHT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 199
1.2 WinFTM Extensions: PDM and SUPER . . . . . . . . . . . . . . . . . . . . . . . . . . . . 199
1.3 FISIM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200
2 Features of WinFTM BASIC and LIGHT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201

2.1 Integrated Technology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201
2.2 Measurements Independent of the Substrate Material . . . . . . . . . . . . . . . . . 201
2.3 Coating Thickness Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201
2.4 Material Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202
2.5 Direct Analysis in the Spectrum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202
2.6 Automated Material Identification (Class of Materials) . . . . . . . . . . . . . . . . . 203
2.7 Measurement Methods. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203
2.8 Optical Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 204
2.9 Further Features of WinFTM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 205
2.10 Measurement Data Management . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 208
2.11 Displaying, Documenting and Backing up Measurement Results and Parameters208
2.12 Presentation of Readings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 210
2.13 Calibrating and Monitoring of the Measuring Equipment . . . . . . . . . . . . . . . 210
2.14 Display and Evaluation of Spectra. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 212
2.15 Control the XY(Z) Measuring Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 212
3 WinFTM PDM: Expanded Product Data Administration and Result Documentation214

3.1 Comparative Overview with/without WinFTM PDM . . . . . . . . . . . . . . . . . . 216
4 WinFTM SUPER: For the Experienced X-RAY User . . . . . . . . . . . . . . . . . . . . . . . 217

Overview
1 Overview
1.1 WinFTM Versions: BASIC and LIGHT
WinFTM is available in two versions: BASIC and LIGHT. The versions differ in the number of meas-
urable elements, see the following table:
Parameter WinFTM BASIC WinFTM LIGHT

Coating thickness 24 elements 4 elements
Material analysis of massive parts 24 elements 5 elements
Material analysis of solutions 22 elements 2 elements
1.2 WinFTM Extensions: PDM and SUPER
For both WinFTM versions BASIC and LIGHT the extensions PDM (Product Data Management) and
SUPER are available. The features the extensions are described in the following table:
WinFTM extension Features

PDM Expanded product data administration and result documentation
SUPER Additional features for defining the following parameters: Measurement
mode, tube voltage used, type and order of the coatings, type and com-
position of the substrate material of the specimen and of the calibration
standards, treatment of interfering spectra, special evaluation
methods, etc.

Overview
1.3 FISIM
The different versions and extensions of WinFTM are activated by different FISIMs (Fischer Software
Identification Module). A FISIM is a dongle, which is plugged into the computer’s USB socket, be-
fore WinFTM is started. Look at the data sheet of your instrument to find out, which WinFTM version
and extension is running on your system by default. If you need to extend the features of your Win-
FTM software, contact FISCHER.

Features of WinFTM BASIC and LIGHT
2 Features of WinFTM BASIC and LIGHT
The following section describes the features of the software versions BASIC and LIGHT. If there are
restrictions in the LIGHT version, they are indicated in the text.
2.1 Integrated Technology
 Coating thickness measurement and material analysis can be performed in one run.
 Both operate standard-free as well.
2.2 Measurements Independent of the Substrate Material
 During the measurement the substrate material is analyzed automatically. Thus, measurements
on different substrate materials can be performed without normalization in many cases. This
makes work much easier and saves time.
The reliability of the measurement result is increased, because the coating thickness is measured
correctly, even with hidden changes of the substrate material.
Even materials underneath the top coating can be analyzed without removing the top coating.
 Function for taking into account the spectral background. The user can define the spectral back-
ground in the Def.MA. This function increases the accuracy of the analysis as long as a suitable
underground spectrum is available.
2.3 Coating Thickness Measurement
With the BASIC version max. 24 individual parameters of a specimen can be measured (thickness,
composition, element).
Examples:
 A component is to be measured, that has 24 layers each consisting of one element.
 A component is to be measured, that has one coating, which consists of a mixture of 24
elements.
With the LIGHT version max. 4 or 5 individual parameters of a specimen can be measured (thick-
ness: 4 elements, composition: 5 elements).
Examples:
 A component is to be measured that has 4 layers each consisting of one element.
 A component is to be measured that has one coating, which consists of a mixture of 5 elements.
Even individual elements, which may occur several times in different coatings of the coating system,
can be measured.

2.4 Material Analysis
 Quantitative material analysis of complex layers. Individual layers may consist of several
elements. The total number of measured quantities amounts up to 24 with WinFTM BASIC and
4 with WinFTM LIGHT.
 Quantitative analysis of solid, powder or paste materials as well as solutions for up to 24
elements. The range of analysable elements depends on the detector (see Technical Data
Sheet).
 Even buried layers can be analysed.
 Analysis with balance: It is not required to completely define the composition of the specimen
by 100 percent. The analysis is performed by matching the peak areas, without the need for
the sum of concentrations amounting to 100 percent. Applicable for recycling, analysis of trace
elements in plastics, soil specimens, biological specimens and non-homogeneous composites.
2.5 Direct Analysis in the Spectrum
 Solid specimens with unknown compositions can be easily analyzed in the spectrum mode of
WinFTM. Instead of defining the composition via Def.MA, only the relevant elements need to
be highlighted. A calibration is not necessary. Specimens can consist of a maximum of 24
elements with WinFTM BASIC or 5 elements with WinFTM LIGHT.
 Matrix effects and cross-excitation are taken into account.
 The residual is displayed. The residual is the spread between the calculated sum spectrum and
the measured spectrum. You receive references to a potentially wrong selection of the elements
to be measured.
The direct analysis is not feasible for the analysis of light elements, solutions or coating systems.

2.6 Automated Material Identification (Class of Materials)
You can easily sort specimens with different compositions and/or coating thicknesses in different
classes of materials. You don’t need to perform reference measurements for each composition or
coating thickness. Each class of materials covers a range of composition and/or coating thickness.
Example: You need to sort the following specimens:
 5 – 8 μm Zn/Fe
 10 – 20 μm Zn/Fe
 5 – 12 μm NiZn/Fe
In WinFTM you define three classes of materials, perform one measurement and WinFTM displays,
what class of materials the specimen belongs to.
Additionally, you can assign a product to each class of materials. The exact composition is meas-
ured. This has the following advantages:
 The right product containing the appropriate parameters and calibration is loaded automati-
cally.
 Measurement errors, caused by wrong product selection, are avoided.
2.7 Measurement Methods
 Measurement by x-ray emission

 Measurement by x-ray absorption
 Measurement by simultaneous x-ray emission and x-ray absorption (Ratio Method)
 Mathematical deconvolution
 Measurement by Fundamental Parameter Method
The measurement methods comply with the following standards:
Standard Titel and Edition

ASTM B568 Standard Test Method for Measurement of Coating Thickness by
X-Ray Spectrometry, 98 (2004)
DIN EN ISO 3497 Metallic Coatings – Measurement of Coating Thickness – X-ray
Spectrometric Methods, 12 (2001)

2.8 Optical Functions
Function Description
Video image of the speci- The specimen is shown in the video window inside the WinFTM
men main window.
Scaled crosshairs Scaled crosshairs are electronically inserted into the video image.
They show the real size and position of the measurement spot on
the surface of the specimen. The color of the crosshairs is selecta-
ble.
Auto-focus (on models with The detector unit moves up and down automatically. The auto-fo-
motor-driven z-axis) cus function allows a significantly more precise setting of the meas-
urement distance than subjective manual focusing. Thus, the
reproducibility of the measurement result is increased.
Measurement of the dis- Focusing the video image provides the correct measuring distance.
tance between the test spot WinFTM takes into account these distance values, when comput-
and the detector / DCM ing the coating thickness measurement data, using the DCM Meth-
method od (Distance Controlled Measurement).
This allows for automated testing of complex surface geometries
and measurements in recesses.
Displaying programmed You can display programmed points in the video image.
points in the video image
(on models with motor-driv-
en XY-stage)
Software-based video You can zoom the video image in steps of 100, 200, 300 and
zoom function 400 percent. Additionally, you can display the video image in full
screen mode.
Saving video images to- You can edit the video image with a graphic program of your
gether with the measured choice e.g. for adding comments or dimensions. When you save
values the video image, it will be assigned to your measured values. Ad-
ditional text notes will be stored, linked to the video image.
Recognition of vertical or The instrument can recognize strip structures on specimens and re-
horizontal strips (on models adjust the XY position along this structure. Thus, you can make sure
with motor-driven XY-stage) that on specimens with geometric tolerances, the measurement is
always performed at the correct position.
Image/Pattern Recognition The instrument can recognize a predefined structure and readjust
(on models with motor-driv- the XY position of the XY-stage along this structure automatically.
en XY-stage and WinFTM Thus, you can compensate deviations in positioning during meas-
extension SUPER activated) urements on more specimen (e. g. for routine tests in production).

2.9 Further Features of WinFTM
Standard Windows® user Users with basic knowledge of Windows® will very quickly be fa-
interface miliar with the program’s user interface.
Product functions You can set up, select, delete, edit and copy products.
Additionally, you can search for products, using different search
criteria.
Definition of the spectral In the Def.MA (Definition of the Measurement Settings of the Appli-
background cation) the spectral background can be defined. This function in-
creases the accuracy of the analysis as long as a suitable
underground spectrum is available.
Multiple Excitation For each application, the excitation parameters “high voltage”
and “primary filter” are set to produce the best possible results. For
some applications, however, it may be necessary to work with dif-
ferent excitations in order to measure all parameters optimally.
You can use multiple excitations within a single measurement, so
that all parameters are measured under the best possible condi-
tions; the collected results are then presented in one combined
evaluation.
Application example: Determination of the thickness of a NiP
coating with simultaneous determination of the Phosphorus
concentration
Control field and joystick In addition to the operation via the Software WinFTM you can con-
on the measuring head trol program and instrument functions with the control field and the
(joystick on models with joystick on the measuring head.
motor-driven XY-stage only)
Automatic searching and You can search for products by name (designation) using a bar-
selecting of products code reader. An optional bar-code keyboard (order no. 602-296)
(option) with a bar-code reader pen (order no. 602-292) is available.
Short menu The supervisor can reduce the menu functions available for the op-
erator. In this manner, sensitive data such as measuring time and
calibration parameters can be protected from overwriting, and the
operator is presented with a simplified menu. The long menu with
full functionality is accessible only with a password.
Quick selection of products You can select products and tasks quickly by using command but-
and tasks tons (on the monitor), which can be edited.
Additionally, you can allocate products or tasks to the keys of the
control field on the measuring head.
mq value (measurement The mq value is a measure for the quality of a measurement result.
quality) It is displayed for every measurement and allows for a plausibility
check of the result. The mq value can be displayed or printed for
every individual result. A warning appears in case of a limit viola-
tion.

Calculating the random The measurement uncertainty, which is based on natural count sta-
measurement uncertainty u tistics, is an important quantity in measurement technology.
of a measured quantity  The measurement uncertainty u of the current single reading
can be displayed.
 The anticipated measurement uncertainty can be calculated
individually for each measured quantity.
 A measured quantity can be varied in a wide range.
 The calculated result for u is presented graphically as a chart:
either as theoretically anticipated standard deviation (SD) or as
relative standard deviation (RSD). This allows for an estimation
of the measurement range.
 If several measurement quantities are to be measured inde-
pendent of one another, the calculation will require specifica-
tions for the size of the other variables that will not have the
measurement uncertainty calculated. For example, when deter-
mining the measurement uncertainty of a buried coating (for
example Ni in Au/Ni/Cu), the thickness of the top coating(s)
must be known.
 The final result chart can be printed.
 Traceability of the measurement result is possible by calcu-
lating the random and systematic portions of the measurement
uncertainty.
 Random and systematic portion can be presented separately
(both the single readings and the mean values).
 Uncertainties of the calibration standards can be entered.
 The display of the measurement uncertainty(ies) can be shown
or hidden.
Convenient copying of Copying of Def.MA files is supported by a convenient data admin-
Def.MA istration tool.
 Two overview windows (source directory and target directory)
allow for a convenient and clear control of the copy proce-
dure. A Def.MA file can be opened and checked prior to
copying.
 Available Def.MA files can be taken from one folder.
 The Search/Sort function is helpful in finding the desired
Def.MA file.
 Easily viewable Def.MA notepad contents support searching.

Programmed measurement You can simply program routinely repeating measurement se-
sequences (Tasks) quences and execute them automatically.
 Even very complex measurement sequences can be simplified.
 Dialogs for operators can be shown on the screen (e.g. infor-
mation about positioning of the specimen).
 The sequence of a Task is started with the click of a soft key
(icon) on the monitor or with the push of a button on the control
panel of the instrument.
 Can be used even by semiskilled laborers.
Remote control You can operate WinFTM by remote control via your company net-
work.
Network operation Beside the operator at the measuring station one or several other
employees with linked computers can monitor the readings or can
do evaluations. On each of the client computers, WinFTM has to
be installed in the same version (e.g. BASIC or BASIC+PDM) like
on the host computer.
International units of meas- You can display the readings in international units of measurement
urement (μm / mils …) and define special individual units of measurement.
Multitasking Many software functions can be operated simultaneously to the
measurement e.g. toggling the SPC channel, scrolling the list scroll
field, performing an evaluation, changing the current product,
working on the video menu, help functions.
However, some other menu areas are locked during the measure-
ment (e.g. product selection, XY programming, calibration …).
Operating manual and The operating manual explains all essential facts of the program in
context-sensitive online a clear manner.
help The context-sensitive online help offers fast, direct access to easily
understandable operational information.
Language selection You can select different languages for the menus and dialogues of
the WinFTM software. Available languages: English, German,
French, Italian, Spanish, Turkish, Polish, Czech, Swedish, Finnish,
Portuguese. Selected Asian languages on request.

2.10 Measurement Data Management
Block function A block is a concluded series of measurements. Measurement data
is stored and evaluated as blocks, including the date and time of
the measurement, a notepad, the continuous number of the block
as well as block-related data. The content of additional data fields
such as order number, batch number, and operator name can be
defined freely.
Tagging and commenting Blocks can be tagged with event marks and can receive com-
blocks ments. For example, in the course of a process that is to be con-
trolled, you can tag certain events by adding event marks and
adding comments to the related block.
Deleting measurement data Measurement data and blocks can be deleted, overwritten and un-
and blocks deleted.
2.11 Displaying, Documenting and Backing up Measurement Results and

Parameters
Displaying the measure- You can display the measurement results in list form, as SPC chart
ment results or as a large number display (with optional display of the meas-
urement uncertainty). The resolution (Number of decimal places)
can be set.
BASIC: Up to 24 result You can control the representation for each channel individually.
channels,
LIGHT: Up to 3 result chan-
nels
Editing the video image You can edit the video image with a graphic program of your
and storing it together with choice e.g. for adding comments, dimensions and explanatory
the product text. The edited video image is stored together with the product.
Print functions With black and white printers, color values are printed in gray-
scale automatically. For larger page widths, the printer is switched
automatically to landscape format and reduction of the type size.
SPC presentation of the The SPC chart can directly be displayed on the monitor as x-bar/
measurement results s chart or x-bar/r chart. For automated measurement sequences
with large batch sizes, you can easily recognize long-term chang-
es of the coating thickness and of other process parameters
through the presentation of a trend line. This enables, among other
things, the testing of the measurement device capability.

Specification limits: Graph- BASIC: You can define specification limits for each of max. 24 re-
ical distinction (in color) for sult channels.
exceeding or falling short LIGHT: You can define specification limits for each of max. 3 result
channels.
Single readings and statisti- Display and printout of single readings as well as statistical evalu-
cal evaluation ation of the measurement data in the form of block results or final
results.
Displaying statistical evalu- Histograms, probability charts, statistical process control charts
ations (SPC), C_p and C_pk values can be displayed and printed.
Print forms for the block You can print the block and final evaluation with editable print
and final evaluation form header, measurement data, statistical results, histogram,
probability chart, etc.
Exporting data You can export measurement results via the USB interface or via
your company network. You can define the format via export tem-
plates.
Two- and three-dimensional You can display the coating thickness distribution in two- or three-
display of the coating thick- dimensional charts.
ness distribution (on mod-
els with motor-driven XY-
stage)
Storing and displaying of You can store and display the following additional information:
additional information date and time of the last change to a product, the last measure-
ment, normalization or calibration of the current product, the last
reference measurement, the time of operation etc.
Storing XY(Z)-coordinates, The XY(Z)-coordinates, video images and spectra are stored to-
video images and spectra gether with the measurement data for future use and documenta-
(XY(Z) coordinates on mod- tion.
els with motor-driven XY-
stage)
Copying products includ- You can copy products including related measurement data e.g.
ing measurement data for data backup.
Automatic, time-controlled You can select folders, which will be backed up automatically.
backup Thus, you can back up your measurement applications, products
including measurement data, spectra etc. automatically.

2.12 Presentation of Readings
You can control, how the measurement readings are presented.
Display mode Description

Thickness mode The measurement result shows:
 Coating thickness readings in the common length dimensions
e.g. in mils
 Analysis results in percent
The densities are taken from internal tables, but you do have the
option of changing the values.
Absolute area mass mode The measurement result shows:
 Total area mass
 Individual area masses of the respective elements, e.g., in g/
m² or g/l.
No densities needed.
Relative area mass mode The measurement result shows:
 Total area mass
 Relative area masses of the respective elements in %.
No densities needed.
Component mode Used for the analysis of specimens, which are not only composed
of pure elements, but also contain chemical compounds (compo-
nents).
Main application fields: Oxides, metallic alloys, …
2.13 Calibrating and Monitoring of the Measuring Equipment
Calibration of new or exist- The obtained calibration data are stored.
ing products
Standard-free calibration You can calibrate without calibration standards by means of the
fundamental parameter method.
Standard-based calibration You can correct the standard-free calibration by calibrating with
with the use of up to 64 calibration standards. Thus, the accuracy of the analysis and thick-
standards ness measurements is improved.
Matrix-specific calibration standards and pure element calibration
standards are available. Up to 64 calibration standards can be
used for each measurement application.

Calibration standard set Input and storing of nominal values of the used calibration stand-
ards is performed in the Calibration standard set in the measure-
ment application of the product. After the calibration has been
performed, the Calibration standard set contains, in addition to the
nominal values, the calculated actual values including the correc-
tion. You can use this data to create a document for monitoring the
measuring equipment.
Calculating and saving Measurement parameters like measuring time, calibration time,
measurement parameters correction data, data of the last normalization and calibration, etc.
and calibration results can be calculated and saved.
Library of pure element The library of pure element spectra makes measurement of pure el-
spectra ements unnecessary when performing a calibration. This is impor-
tant in cases, where pure elements are not available.
Spectra library During the installation of the instrument the spectra of 12 or 14 el-
ements (depending on the detector type) are measured and saved
in the spectra library. Using these spectra all further spectra are
calculated by the instrument.
You can control whether the elements are measured or the spectra
of the spectra library are used during calibration.
Reference measurement The Reference measurement checks and adjusts the drift of the in-
strument. It is also used for monitoring the measuring equipment.
Stability test of the tube and The instrument performs automatic long-term self tests to check the
of the detector primary radiation, the resolution and gain of the spectrometer (de-
tector and electronics).
Automatic reduction of the After several minutes of instrument idle the x-ray tube current is re-
x-ray tube current duced automatically. Thus, the service life of the tube is increased
and energy is saved.
Drift compensation A shift of the peak position in the spectrum is compensated by the
software. This avoids wrong results especially when there are crit-
ical peak overlaps.

2.14 Display and Evaluation of Spectra
Clear display of the sum  For the evaluation of measured spectra you can overlay the
spectra with colored ele- spectrum lines of up to 24 elements in different colours.
ment spectra  You can compare spectra in order to identify materials, e.g.,
for material sorting.
 You can compare the spectrum of an unknown material with
the reference spectra of known materials, which are stored in
a spectra library. The number of stored spectra in the library
can be increased or reduced.
Saving spectra You can save measured spectra for subsequent re-use (e.g., for
subsequent evaluation when the measurement application chang-
es). The spectra can be stored manually or automatically.
Loading of spectra into the You can load spectra into the background of the spectra window
background to compare measured and stored spectra.
Zooming spectra ranges You can zoom into an area of the spectra window by using the
right mouse button.
2.15 Control the XY(Z) Measuring Stage
If your instrument is equipped with a motor-driven XY(Z) stage you can use the following functions
to control the measuring stage:
Moving the XY(Z) stage You can control the move of the XY(Z) stage accurately by clicking
the mouse button in the video image.
Joystick function of the The right mouse button offers additional joystick functionality in the
mouse video field.
Travel to absolute or rela- You can enter absolute or relative coordinates to travel the stage.
tive coordinates The zero point of an operation can be specified individually.
Laser light pointer The red laser point points to the subsequent measurement position
in the retracted condition and thus significantly simplifies a quick
sample positioning
Point & Shoot You can travel to the desired position by clicking the left mouse
button.
Point & Measure You can travel to the desired position and perform a measurement
at this position by clicking the middle mouse button.
Point & Save You can travel to the desired position and save the related coordi-
nates by clicking the right mouse button.

Joystick at measuring head You can easily control the XY(Z) stage with the joystick at the meas-
uring head.
In addition, you can control the XY(Z) stage with the mouse.
Measurement point over- The measurement point overview windows offer you a full over-
view view of all programmed points of the current measurement coordi-
nates and of the entire travel range.
Programming individual You can program arbitrary individual coordinates, on which meas-
coordinates urements will be performed.
Programming lines You can define a start point and an end point of a line and a num-
ber interim points. On these points measurements will be per-
formed.
Programming arrays You can define two corner coordinates of an array and the num-
ber of points within the array (columns and rows). Furthermore you
can define the sequence, in which the points will be travelled. On
these points, measurements will be performed.
Programming patterns You can define a freely programmable geometric pattern of meas-
urement points. You can replicate this pattern as often as you
want. Thus, you can travel the same points on different specimens
or on different parts of the same specimen.
Programming offset In addition to the measuring points (line, array or pattern) you can
define one or two reference points. Thus, you can change speci-
mens and make sure the measurements are performed at the same
coordinates, while the specimen is not located at the same posi-
tion.

WinFTM PDM: Expanded Product Data Administration and Result Documentation
3 WinFTM PDM: Expanded Product Data Administration and

Result Documentation
PDM (Product Data Management) is a supplementary software module to WinFTM BASIC or LIGHT.
The PDM software features the following functions:
Setting up new products  A measurement application may be linked to any number of
linked to an existing products (1:n assignment). Thus, each edit of a measurement
measurement application application affects all products that are linked to it.
 With PDM, each product (a file that contains, among other
things, the measurement results) is saved in a freely selectable
folder. You can copy your products into different folders and
sort them according to supplier, customer and part number.
 The operator only needs the product designation for the test
order, and not necessarily knowledge of the measurement
application.
 PDM saves measurement data product-related and not meas-
urement application related.
Convenient administration  You can set up new measurement applications based on an
of measurement existing definition file (Def.MA).
applications  You can edit, copy and delete measurement applications.
With PDM, these procedures affect all products that are linked
to a measurement application. When copying a product, the
measurement application is not duplicated, instead it is
retained.
 You can normalize and calibrate measurement applications.
These procedures affect all products that are linked to a meas-
urement application.

Result documentation  You can assign individual print form templates to each product
for block and final evaluation.
 You can evaluate the measurement readings of several or even
all products of a measurement application simultaneously in
one template.
 You can freely set up, copy and edit product-related print forms
(print form templates).
 A portion of the print form template may include special
dummies (variables) for measurement results and field
contents. These dummies take the place of user-entered data.
 You can present your measurement results in a clear manner
with graphical effects. Additionally, various information
elements can be integrated like the image of the specimen,
your company logo etc.
 You can create and insert statistical characteristics.
 You can save the print form in data files for future use or for
documentation purposes.
Free block selection  Enables final evaluation and the subsequent export of selected
(Search function with filter) measurement data blocks. The filter criteria applied may
concern, for example, date and time, block number, order no.,
batch no., operator name.
 You can combine arbitrary blocks to a final evaluation and
export the data of arbitrary blocks.
Overview image (on You can create an overview image of the specimen automatically.
models with motor-driven If you have programmed measurement points, they are displayed
XY-stage) in the overview image.
You can simply navigate and measure using the overview image
(see Point & Measure on Page 212).
XY-Scan mode (on models You can travel the XY-stage while a measurement is running. Thus,
with motor-driven XY-stage) you can measure the mean value over a defined area of the spec-
imen.

3.1 Comparative Overview with/without WinFTM PDM
WinFTM PDM (Product Data Management) as a supplemental software is suitable for both WinFTM
BASIC and for WinFTM LIGHT. In both cases, the functional scope of WinFTM PDM is identical.
The following table presents an overview of the available functions with and without PDM.
Function without PDM with PDM

Assignment Measurement applica- 1:1 1:n
tion : Product Each measurement A measurement applica-
application is assigned to tion can be assigned to
only one product. several products
simultaneously.
Product management Measurement application Product-related
related
When copying a product the meas- … duplicated only as a lo- … is retained.
urement application is … cal measurement
application1
Setting up folders or directories for No Yes
product management
Normalization and calibration No Yes
affects all products linked to the
measurement application
Setting up and storing product-
related print forms
 Block print form Yes Yes
 Final print form No Yes
Free block selection (with search No Yes
function) with versatile filter
Evaluations using simple print forms: Yes Yes
readings of all blocks are being
evaluated, no block selection, no
customer-specific print form tem-
plates
Overview image (on models with No Yes
motor-driven XY-stage)
XY-Scan mode (on models with mo- No Yes
tor-driven XY-stage)
1. Local measurement application: The measurement application is assigned to one product
only. After copying, the copied measurement application has no relation or link to its or-
igin. Thus, edits have only a local effect on the assigned product.

WinFTM SUPER: For the Experienced X-RAY User
4 WinFTM SUPER: For the Experienced X-RAY User
For both WinFTM versions BASIC and LIGHT the extension SUPER is available. With WinFTM SU-
PER you can change the following parameters:
 Tube voltage used
 Type and composition of the substrate material of the specimen and of the calibration standards
These parameters are stored in the Def.MA file (Definition of the Measurement Settings of the
Application).
In addition, the SUPER software features the following functions:
Convenient entering of ele- Convenient entering of elements, e.g., in the Def.MA using the
ments window Periodic System.
Pool of Def.MA files You can establish a pool of Def.MA files. Several users can access
to this pool.
Image/Pattern Recognition The instrument can recognize a predefined structure and readjust
(on models with motor-driv- the XY position of the XY-stage along this structure automatically.
en XY-stage and WinFTM Thus, you can compensate deviations in positioning during meas-
extension SUPER activated) urements on more specimen (e. g. for routine tests in production).

WinFTM SUPER: For the Experienced X-RAY User

www.helmut-fischer.com

Form No. 087
Date: 2015-01-15
TRAINING PROTOCOL
Installation and Training of a
FISCHERSCOPE® X-RAY with WinFTM®
Instrument model: WinFTM® Version:
Serial No.:
Customer: Supplier:
........................................................... HELMUT FISCHER GMBH

Institut für Elektronik und Messtechnik
........................................................... Industriestraße 21
71069 Sindelfingen, Germany
...........................................................
Instructor:
Participants:
1. 2. 3.
4. 5. 6.
7. 8. 9.
Topics executed
1 Installation and connection of the instrument 
2 Radiation security instructions 
3 Theoretical basic instructions for the measuring principle 
4 Explanation of the main components 
5 Switching the instrument on and off 
6 Control elements and displays of the instrument 
7 Screen structure 
8 Operation of the Sample positioning 
instrument: Focusing with Z axis 
Focusing with optics (Md) 
Z axis security function 
XY-table 
Security device 
9 Measurements: Selecting product 
Starting measurements 
Closing a block 
10 Evaluation of Printing protocol 
measurement series: Block evaluation 
Final evaluation of several blocks 
Deleting single readings and blocks 
Re-measure 
Subsequent correction of entries 
11 Structure of WinFTM®: Product 
Application with 
Calibration standard set 
Def MA 
12 Product Creation via Copy or New 
Directory structure 
Product settings via Info 
XY-table programming 
13 Video image Control elements 
Travel measurement location 
Video settings 
Creating overview image (XY-table) 
Product video 
Printing 
14 Settings Definition Order No./Operator 
Assigning the function keys 
Customising the tool bar 
Creating individual protocols 
Data export 
Short menu 
15 Data backup Copying product to/from file 
Complete installation via file explorer 
Automatic backup to a network 
16 Monitoring of the Constance over time 
instrument (Calibration) Stability 
Corrections:
Reference Measurement 
Calibration 
Normalisation 
Base Correction 
Density correction 
Documentation 
17 Creating an application via copy 
18 Measuring and evaluating the spectrum 
19 Deleting products etc. 
The training included all points of the aforementioned list.
........................................... .........................................
Customer Supplier
…………………………………
Date and location
Index
Index
A Contact pads of SMD components, pattern
recognition 166
Administration, Product 57 Control Panel 21
Analysis with balance 121 Coordinates, programming 127
Aperture 19 Copying
Areas of application 15 Measuring application 60
Array 127 Cover of the Measurement Chamber 19
ASTM B568 9 Creating
Autom. Block closing, variable 63 a Def.MA 122
a product 57
B Curved specimens 31
Background correction 124 Cylindrical specimens 31
Base correction 139
Base spectrum 124 D
BASIC 199 Data export 155
Block 63, 208 Datum points 127
Definitions 63 Declaration of conformity V
Evaluation 82 Def.MA 53, 54
Block size Creating of 122
Fixed 63 Importing 61
variable 63 Modes 121
Bolts 31 Viewing 61
Breakdown, communication 27 Deleting
Measuring application 60
C Product 59
Calibration 139, 140 Determining the elements of a sample 50
Changing DIN 50 987 9
Measuring application 60 Disable the communication 29
Product 58 Dongle 200
Characteristic statistical parameters 183 Dual Function of a Product 55
Circular coordinates 127
Class of Materials 203 E
Cleaning 177 EC declaration of conformity V
Calibration standards 177 EN ISO 3497 9
Instrument 177 Enable the communication 29
Measuring cell 150 Energy 50
Collimator 19 Environmental conditions 23
Communication Establishing connections 26
between instrument and WinFTM 29 Evaluations
disable 29 statistical 63
enable 29 Event marks 208
Communication breakdown 27 Export template 158
Compensation spectra 123
Component mode 122 F
with balance 122
Component mode with balance 122 FAQ x-radiation safety 13
Components 19 File Structure of WinFTM 53
Connections 26 Final evaluation 82
FISCHERSCOPE® X-RAY I
Index
FISIM 28, 200 Uncertainty 42

Fixed block size 63 Value field 41
Flat Specimens 31 Measurement reading
Fluorescence, x-ray 16 Saving 66
Fully protected instrument 10 Measurement readings
Functional principle of the instrument 17 Handling of 63
Measurement, performing of 35
H Measuring application
Assigning Product 59
Handling of measurement readings 63 Changing 60
Humidity, relative 23 Copying 60
Deleting 60
I Measuring cell 147
IEC 348 / VDE 0411 standard 10 Cleaning of 150
Importing mq value 45
Def.MA 61
Product 58 O
Inclines, measurements on 32 Operating personnel, requirements 12
Individual points 127 Operation temperature 23
Instrument, functional priciple of 17 Operators with introductory training 12
Intended use 9 Overwriting a measurement reading 67
Intensity 51
P
K
Pattern 127
Key switch 21 Pattern recognition 163
On contact pads of SMD components 166
L On PCBs 170
Large number presentation 42 Scenarios 163
LIGHT 199 Settings 164
Lightning, specimen 20 PCBs, pattern recognition 170
Limited operating mode 46 PDM 199, 214
Line Fuse 178 Supplementary software 69
Lines 127 Performing measurements 35
List presentation 42 Periodic table of the elements 192
Location for set-up 23 Point & measure 128
Point & save 128
M Point & shoot 128
Position Specimen 31
Main fuse 26 Preparing
Main switch 26 Instrument for transport 179
Main window WinFTM 37 Measurements, process flow 53
Maintenance 177 Primary
Repair 10 Filter 20
Mass per unit area 96, 121 Primary x-radiation 16
Material analysis 121 Print Form Template Editor 70
Measurement Process flow for preparing measurements 53
Application 53, 54 Product 53, 54
Chamber cover 19 Administration 57
Data export 155 Assigning a new measuring
In recesses 32 application 59
On inclines 32 Changing 58
II FISCHERSCOPE® X-RAY
Index
Creating 57 Troubleshooting 180

Deleting 59
Importing 58 U
Uncertainty of the measurement 42
R
Unpacking the measuring system 24
Ratio method 203 USB
Recesses, measurements in 32 cable 27
Relative humidity 23 Interface 26
Removing shipping lock 25 User interface of the WinFTM software 37
Repair and maintenance 10
Repeat inspection 10 V
Requirements for the operating personnel 12
Residual 202 Variable block size 63
Rods 31 VDE 0411 / IEC 348 standard 10
ROI-mode 121 Video
Image 39
Viewing
S
Def.MA 61
Safety 9, 10 Voltage supply 26, 27
devices 11
Saving measurement reading 66 W
Scenarios, pattern recognition 163
Secured measurements 140 Warning notices 9
Set-up location 23 WinFTM 15, 37, 199
Shipping lock, removing 25 File structure 53
Short menu 46 Main window 37
SMD components, pattern recognition 166 User interface 37
Solution analysis 121, 147
SPC chart presentation 43 X
Specimen X-radiation safety 10
-Lighting 20 FAQ 13
Position of 31 X-ray fluorescence radiation 16
Spectrum window 47 XY-coordinates, programming of 127
Statistical XY-stage 19
Evaluations 63
Statistical parameter 183
Statistics field 41
Status bar 44
Storage temperature 23
Substrate material correction 139
SUPER 199
Supplementary software PDM 69
Switching off the instrument 29
Switching on the instrument 28
T
Temperature 23
Thickness mode 121
Trained specialists 12
Transporting the instrument 179
Traveling to any position 129
FISCHERSCOPE® X-RAY III

Index
IV FISCHERSCOPE® X-RAY
HELMUT FISCHER GMBH INSTITUT FÜR ELEKTRONIK UND MESSTECHNIK
Industriestraße 21, D-71069 Sindelfingen, Germany
EC DECLARATION OF CONFORMITY
We declare herewith for the following Serial Number and Type

described product:
FISCHERSCOPE® X-RAY XDAL® 237 (604-348)
that it corresponds to the following standards and regulations

2014/35/EC Low Voltage Directive
2014/30/EC EMC Directive
BGV A3 §5, paragraph 4 of accident prevention regulations,
"Electrical systems and equipment"
EN 61010-1 Safety requirements for electrical equipment for measurement, control, and
laboratory use
EN 55011 Industrial scientific and medical equipment – Radio-frequency disturbance character-
istics – Limits and methods of measurement
EN 61000-6-2 EMC – Generic standards - Emission standard for industrial environments
EN 61000-4-2 EMC – Electrostatic discharge immunity test
EN 61000-4-3 EMC – Radiated, radio-frequency, electromagnetic field immunity test
EN 61000-4-4 EMC – Electrical fast transient/burst immunity test
EN 61000-4-5 EMC – Surge immunity test
EN 61000-4-6 EMC – Immunity to conducted disturbances, induced by radio-frequency fields
EN 61000-4-8 EMC – Power frequency magnetic field immunity test
EN 61000-4-11 EMC – Voltage dips, short interruptions and voltage variations immunity tests
EN 61000-3-2 EMC – Limits for harmonic current emissions
This statement is declared by the manufacturer/importer:
HELMUT FISCHER GMBH INSTITUT FÜR ELEKTRONIK UND MESSTECHNIK

Industriestraße 21, 71069 Sindelfingen
and signed by Mr. Bernhard Scherzinger, Chief Engineer, Quality
____________________________ Sindelfingen, December 7, 2016

(Signature)
www.helmut-fischer.de mail@helmut-fischer.de

OPM XDAL237 952-589 en

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Operator's Manual

FISCHERSCOPE® X-RAY XDAL® 237

Coating Thickness Material Analysis Microhardness Material Testing

FISCHERSCOPE® X-RAY XDAL® 237

X-ray fluorescence (EDXRF) measuring instrument

Document order number: 952-589

Helmut Fischer GmbH Phone: +49 (0) 70 31 3 03 - 0

Quality Assurance System of the Helmut Fischer GmbH

DIN EN ISO 9001:2008 Management system certified by DNV GL - Business Assurance

6 User Interface of the WinFTM Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

7 WinFTM File Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53

9 Handling of Measurement Readings and Statistical Evaluations . . . . . . . . . . . . . 63

10 Setting Up the Print Form Using PDM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69

11 Measurement Uncertainty and Measuring Ranges . . . . . . . . . . . . . . . . . . . . . . . 83

14 Mass per Unit Area and Geometric Coating Thickness . . . . . . . . . . . . . . . . . . . . 96

15 Measurement Device Monitoring for the FISCHERSCOPE X-RAY . . . . . . . . . . . . 102

15.7 Practical Monitoring of the Measurement Devices . . . . . . . . . . . . . . . . . . . . 111

17 Programming Coordinates for Automatic Measurements . . . . . . . . . . . . . . . . . 127

18 Calibration and Base Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139

19 Solution Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147

20 Measurement Data Export . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 155

21 Pattern Recognition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163

22 Cleaning and Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 177

1.1 Read the Operator’s Manual Carefully Before Operating

1.2 Warning Notices Used

WARNING Indicates a risk that can lead to death or serious injuries.

1.3 Intended Use

1.4 Safety of the Electrical Equipment

1.5 Maintenance and Repair

1.6 X-Radiation Safety

1.6.1 Repeat Inspection

1.6.2 Safety Devices

LED SHUTTER OPEN at the Instrument

CONTROL LED at the Instrument

1.6.3 No Alterations to the Instrument!

DANGER X-radiation and high voltage

1.7 Requirements for the Operating Personnel

1.7.1 Operators with Introductory Training

1.7.2 Trained Specialists

1.8 Frequently Asked Questions Concerning X-Radiation Safety

2.1 Areas of Application

The instrument is suited for the following measurement applications:

2.2 Standard-free Measurements

2.3 X-Ray Fluorescence

X-ray fluorescence radiation

Figure 2.1: Generation of the x-ray fluorescence radiation

2.4 Functional Principle of the Instrument

The following figure shows the principle structure of the instrument:

Cathode X-ray tube

X-ray fluorescence radiation Base material

Figure 2.2: Functional principle of the instrument

2.5.1 Cover of the Measurement Chamber

2.5.2 Motor-driven XY-stage

2.5.3 Laser Pointer for XY-Positioning

2.5.4 Aperture (Collimator)

To select the aperture

2.5.6 Specimen Lighting

2.5.7 Primary filter

To change the primary filter:

2.5.8 Key Switch for the X-Ray Energy

2.5.9 Control Panel

Figure 2.3: Control panel of the instrument

Table 2-1: Function of the control elements