HR3000 GEMSpecVer06

GEM Interface Spec HR3000III A363
MANUFACTURING SPECIFICATION
TITLE : GEM INTERFACE SPECIFICATION
Model HR3000III
Ver. 06
NITTO DENKO CORPORATION

NITTO SEIKI INC.
1/91
CONTENTS
1. Introduction
2. Functions of equipment
3. HSMS Parameters
4. Message summary
4-1 Message List
5. GEM Compliance Statement
6. State Models
6-1 Communication State Model
6-2 Control State Model
6-3 Processing State Model
6-4 Spooling State Model
6-5 Wafer Cassette State Model
7. Scenarios
8. Message details
9. Event Reports
9-1 Event Collection
10. Dynamic Event Setting
10-1 Data Variable List
11. Alarm Management
11-1 Alarm Collection
12. Remote Control
13. Clock
14. Process Program Control
14-1 Process Program Details
14-2 Process Program Data Collection
14-3 Ex. Of Program Data
2/91
RECODE LIST
Version Revised date Person Page Contents

01 2011/09/22 N.Nagata Original
02 2012/12/18 H.Kurooka 82 Correction :Peel Tape Wind Speed ECMIN 2 -> 1
Correction :Peel Angle 2byte -> 4byte
85 Add : Peel Tape Tension Select
Add : Peel Tape Tension Time
86 Add : Peel Tape Tension Wind Length
03 2013/06/11 A.Ogawa Add A364
Add : 34010 Hepa Particle Err.(HEP10712)
77
Add : 34011 Hepa filter change Err.(HEP10713)
Add : 34012 Hepa Alarm Err.(ALM10714)
Add : 34013 Ups Power Supply Err.(CUT10728)
Add : 34014 Ups Important Trouble Err.(TRB10729)
Add : 34015 Ups Alarm Err.(ALM10730)
04 2013/08/21 H.Kurooka Add A458
81 Add : Cleaning Wafer Select
88 Add : Cleaning Wafer Select
Add : A468
61 Add : 10072 L.Port Static Bar Alarm(ALM10610)
Add : 10073 L.Port Static Bar Cond.Error(CON10611)
Add : 10074 L.Port Static Bar Ion Error(ION10612)
62 Add : 12072 R.Port Static Bar Alarm(ALM10607)
Add : 12073 R.Port Static Bar Cond. Error(CON10608)
Add : 12074 R.Port Static Bar Ion Error(ION10609)
68 Add : 18072 Alig Static Bar Alarm Error(ALM10601)
Add : 18073 Alig Static Bar Cond. Error(CON10602)
Add : 18074 Alig Static Bar Ion Error(ION10603)
70 Add : 20000 UV Light Level Lower Limit Error
75 Add : 34016 Dry Air is Insufficient(PSW10810)
82 Repair : 127-128 => 127-130
83 Repair : 129-130 => 131-132
Repair : 183-184
Repair : 183-186 => 185-186
04 2014/01/08 H.Kurooka 79 Add: HOST_LOT_ID
05 2015/12/04 H.Kurooka 52 Add: CEID 55: Right Cassette RFID Read

Add: CEID 56: Right Cassette RFID Read Fail
Add: CEID 57: Left Cassette RFID Read
Add: CEID 58: Left Cassette RFID Read Fail
3/91
06 2016/2/23 N.Nagata 52 Add: CEID 35: Slot Start

80 Add: Remote Command [MAP_PROCEED]
Add: Remote Command [MAP_CANCEL]
Add: Remote Command [OPE_ACCESS_R]
4/91
1. Introduction
(1) Application
This specification is applied to GEM interface of NEL equipment
made by Nitto Denko Co.
(2) Equipment name

Protection tape remover.
(3) Model
HR3000III
(4) Software revision

“YMDD”
Ver. YMDD means Year+Month+Day+GEM version.
Ex. B412 shows 2011/Apr./12 and GEM version=01.
(October = A, November = B, December = C)
(5) SEMI standard

-SEMI E37.1-96 compliance
HIGH-SPEED SECS MESSAGE SERVICES
SINGLE-SESSION MODE(HSMS-SS)
-SEMI E5-0997 compliance
SEMI Equipment Communications Standard 2 Message
Content (SECS-II)
-SEMI E30-0997 compliance
Generic Model for Communications and Control of SEMI
Equipment (GEM)
5/91
2. Functions of Equipment
This machine loads a wafer from Wafer cassette, and automatically an

adhesive protection tape from the wafer pattern surface using peeling tape,
and unloads the wafer into the wafer cassette.
6/91
3.HSMS Parameters
Parameters
Parameter Typical
Value Range Resolution Description
Name Value
T3 Reply 1-120 1 second 45 seconds Reply timeout.Specifies maximum amount of time an
Timeout seconds entity expecting a reply message will wait for that reply
T5 Connect 1-240 1 second 10 seconds Connection Separation Timeout.Specifies the amount
Separation seconds of time which must elapse between successive
Timeout attempts to connect to a given remote entity
T6 Control 1-240 1 second 5 seconds Control Transaction Timeout.Specifies the time which a
Transaction seconds control transaction may remain open before it is
Timeout considered a communications failure.
T7 NOT 1-240 1 second 10 seconds Time which a TCP/IP connection can remain in NOT
SELECTED seconds SELECTED state (i.e.,no HSMS activity) before it is
Timeout considereda communications failure.
T8 Network 1-120 1 second 5 seconds Maximumtime between successive bytes of a single
Intercharacter seconds HSMS message which may expire before it is
Timeout considereda communications failure.
Connect Mode PASSIVE, --- --- Connect Mode. Specifies the logic this local entity will
ACTIVE use during HSMS connection establishment.
Local Entity IP determined --- --- Required for any entity operating in PASSIVE mode.
Address and by Determines the address on which the local entity will
Port number TCP/IP listen for incoming connection requests.
Remote Entity IP determined --- --- Required for any entity operating inACTIVE mode.
Address and by Determines the address of the remote entity to which
Port Number TCP/IP the local entity will attempt to connect.
7/91
4. Message summary
4-1 Message List
S1, F0 Abort Transaction S, H E
S1, F1 Are You There Request (R) S, H E
S1, F2 On Line Data (D) S, H E
S1, F3 Selected Equipment Status Request (SSR) S, H E
S1, F4 Selected Equipment Status Data (SSD) M, H E
S1, F11 Status Variable Namelist Request (SVNR) S, H E
S1, F12 Status Variable Namelist Reply (SVNRR) M, H E
S1, F13 Establish Communication Request (CR) S, H E
S1, F14 Establish Communication Request Acknowledge (CRA) S, H E
S1, F15 Request OFF-LINE (ROFL) S,H E,Reply
S1, F16 OFF-LINE Acknowledge (OFLA) S, H E
S1, F17 Request ON-LINE (RONL) S,H E,Reply
S1, F18 ON-LINE Acknowledge (ONLA) S, H E
S2, F13 Equipment Constant Request (ECR) S, H E
S2, F14 Equipment Constant Data (ECD) M, H E
S2, F15 New Equipment Constant Send (ECS) S, H E
S2, F16 New Equipment Constant Acknowledge (ECA) S, H E
S2, F17 Data and Time Request (DTR) S, H E
S2, F18 Date and Time Data (DTD) S, H E
S2, F29 Equipment Constant Namelist Request (ECNR) S, H E
S2, F30 Equipment Constant Namelist (ECN) M, H E
S2, F31 Date and Time Set Request (DTS) S, H E
S2, F32 Date and Time Set Acknowledge (DTA) S, H E
S2, F33 Define Report (DR) M, H E
S2, F34 Define Report Acknowledge (DRA) S, H E
S2, F35 Link Event Report (LER) M, H E
S2, F36 Link Event Report Acknowledge (LERA) S, H E
S2, F37 Enable/Disable Event Report (EDER) S,H E,Reply
S2, F38 Enable/Disable Event Report Acknowledge (EERA) S, H E
S2, F39 Multi-block Inquire (MBI) S, H E
8/91
S2, F40 Multi-block Grant (MBG) S, H E

S2, F41 Host Command Send (HCS) S, H E
S2, F42 Host Command Acknowledge (HCA) S, H E
S2, F43 Reset Spooling Streams and Functions (RSSF) S, H E
S2, F44 Reset Spooling Acknowledge (RSA) M, H E
S5, F1 Alarm Report Send (ARS) S, H E
S5, F2 Alarm Report Acknowledge (ARA) S, H E
S5, F3 Enable/Disable Alarm Send EAS) S, H E
S5, F4 Enable/Disable Alarm Acknowledge (EAA) S, H E
S5, F5 List Alarm Request (LAR) S, H E
S5, F6 List Alarm Data (LAD) M, H E
S6, F5 Multi-block Data Send Inquire (MBI) S, H E
S6, F6 Multi-block Grant (MBG) S, H E
S6, F11 Event Report Send (ERS) M, H E
S6, F12 Event Report Acknowledge (ERA) S, H E
S6, F15 Event Report Request (ERR) S, H E
S6, F16 Event Report Data (ERD) M, H E
S6, F19 Individual Report Request (IRR) S, H E
S6, F20 Individual Report Data (IRD) M, H E
S6, F23 Request Spooled Data (RSD) S, H E
S6, F24 Request Spooled Data Acknowledgement Send (RSDAS) S, H E
S7, F1 Process Program Load Inquire (PPI) S, H E
S7, F2 Process Program Load Grant (PPG) S, H E
S7, F3 Process Program Send (PPS) S, H E
S7, F4 Process Program Acknowledge (PPA) S, H E
S7, F5 Process Program Request (PPR) S, H E
S7, F6 Process Program Data (PPD) S, H E
S7, F19 Current EPPPD Request (RER) S, H E
S7, F20 Current EPPD Data (RED) S, H E
S9, F1 Unrecognized Device ID (UDN) S, H E
S9, F3 Unrecognized Stream Type (USN) S, H E
S9, F5 Unrecognized Function Type (UFN) S, H E
S9, F7 Illegal Data (IDN) S, H E
S9, F9 Transaction Timer Timeout (TTN) S, H E
S9, F11 Data Too Long (DLN) S, H E
S9, F13 Conversation Timeout (CTN) S, H E
9/91
S10, F1 Terminal Request (TRN) S,H E,Reply

S10, F2 Terminal Request Acknowledge (TRA) S, H E
S10, F3 Terminal Display, single (VTN) S,H E,Reply
S10, F4 Terminal Display, single Acknowledge (VTA) S, H E
10/91
5.GEM COMPLIANCE STATEMENT
GEM COMPLIANCE STATEMENT

FUNDAMENTAL GEM REQUIREMENTS IMPLEMENTED GEMCOMPLIANT
State Models ■ Yes □ No
Equipment Processing States ■ Yes □ No ■ Yes
Host-Initiated S1, F13/F14 Scenario ■ Yes □ No
Event Notification ■ Yes □ No
On-line Identification ■ Yes □ No
Error Messages ■ Yes □ No □ No

Control (Operator Initiated) ■ Yes □ No
Documentation ■ Yes □ No
ADDITIONAL CAPABILITIES IMPLEMENTED GEM COMPLIANT

Establish Communications ■ Yes □ No ■ Yes □ No
Dynamic Event Report Configuration ■ Yes □ No ■ Yes □ No
Variable Data Collection ■ Yes □ No ■ Yes □ No
Trace Date Collection □ Yes ■ No □ Yes ■ No
Status Date Collection ■ Yes □ No ■ Yes □ No
Alarm Management ■ Yes □ No ■ Yes □ No
Remote Control ■ Yes □ No ■ Yes □ No
Equipment Constants ■ Yes □ No ■ Yes □ No
Process Program Management ■ Yes □ No □ Yes ■ No
Material Movement ■ Yes □ No ■ Yes □ No
Equipment Terminal Services ■ Yes □ No ■ Yes □ No
Clock ■ Yes □ No ■ Yes □ No
Limits Monitoring □ Yes ■ No □ Yes ■ No
Spooling ■ Yes □ No ■ Yes □ No
Control (Host-Initiated) ■ Yes □ No ■ Yes □ No
11/91
6. State Models
6-1 Communications State Model
1 COMMUNICATIONS
Ｃ DISABLED
ENABLED 2 3
NOT
4 COMMUNICATING
HOST-INITATED EQUIPMENT-
CONNECT INITIATED
CONNECT
WAIT CR
10
FROM HOST WAIT DELAY
8 7 6
5 WAIT CRA
15
14 9
COMMUNICA
TING
12/91
COMMUNICATION State Transition Table

# Current State Trigger New State Action Comment
1 (Entry to System initialization System None The system default may be
COMMUNICA Default set to DISABLED or
TIONS). ENABLED.
2 DISABLED Operator switches ENBLED None SECS-II communications
From DISABLED to are enabled
ENABLED
3 ENABLED Operator switches DIABLED None SECS-I communications are
From ENABLE to prohibited.
DISABLED
4 (Entry to Any entry to NOT None May enter from system
ENABLED) ENABLED state COMMUNICA initialization to ENABLE or
TING through operator switch to
ENBLED.
5 (Entry to (Any entry to NOT WAIT CRA Initialize Begin the attempt to
EQIPMENT- COMMUNICATING) communications establish communications.
INITIATED Set COM Delay
CONNECT) Timer”expired.”S
end S1, F13
6 WAIT CRA Connection WAIT Initialize If appropriate, dequeued
Transaction failure. DELAY CommDelay messages shall be placed in
timer. Dequeue spool buffer in the order
all messages Genereted. Wait for timer
queued to send. To expire.
7 WAIT CooDelay timer WAIT CRA Send S1, F13 Wait for S1, F14.May
DELAY Expired. receive S1, F13 from Host.
8 WAIT Received a message WAIT CRA Discard Indicates oppotunity to

DELAY Other than¥n S1, F13 message. No Establish communications.
reply. Set
CommDelay
timer.” Expired”.
Send S1, F13.
9 WAIT CRA Received expected COMMUNICA None Communications
S1, F14 with TING established.
COMMACK = 0.
13/91
10 (Entry to (Any entry to NOT WAIT CR None Wait for S1, F13 from Host.
INITIATED COMMUNIVATING) FROM HOST
CONNECT)
14 COMMUNICA Communication NOT Dequeue all Dequeued messages may
TING failure. COMUNICATI messages be placed in spool buffer as
NG queued to send. appropriate.
15 WAIT CR Received S1, F13. COMMUNICA Send S1, F14 Communications are
FROM HOST TING with COMMACK Established.
=0.
14/91
6-2 CONTROL state Model

1 Ｃ CONTROL
OFF-LINE 2
Ｃ
Equipment
OFF-LINE 3
Attempt
12 Ｃ 4
ON-LINE
6 Host
OFF-LINE
11 10 5
7
Ｃ ON-LINE
8
LOCAL REMOTE
9
15/91
CONTROL State Transition Table

# Current State Trigger New State Action Comments
1 （Undefined） Entry into CONTROL CONTROL None Equipment may be configured to
state（system initial- (Substate default to ON-LINE or OFF-LINE.*
zation）. conditional on
Configuration).
2 （Undefined） Entry into OFF-LINE OFF-LINE None Equipment may he configured to
state. (Substate default to any substate of OFF-LINE.
conditional on
Configuration).
3 EQUIPMENT Operator actuates ATTEMPT ON- None Note that an S1, F1 is sent whenever
OFF-LINE ON-LINE switch. LINE ATTEMPT ON-LINE is activated.
4 ATTEMPT S1, F0 New state None This may be due to a communication

ON-LINE Conditional failure,** reply timeout, or receipt of
On configuration. S1, F0.Configuration may be set to
EQUIPMENT OFF-LINE or HOST
OFF-LINE.
5 ATTEMPT Equipment receives ON-LINE None Host is notified of transition to
ON-LINE Expected S1, F2 ON-LINE at transition 7.
Message from the
host.
6 ON-LINE Operator actuates EQUIPMENT None “Equipment OFF-LINE” event
OFF-LINE switch. OFF-LINE occurs***.
Event reply will be discarded while
OFF-LINE is active.
7 （Undefined） Entry to ON-LINE ON-LINE None “Control State LOCAL” or “Control
State. (Substate State REMOTE” event occurs. Event
conditional on reported based on actual ON-LINE
REMOTO/LOCAL substate activated.
Switch setting)
8 LOCAL Operator sets front REMOTO None “Control State REMOTE” event
panel switch to occurs.
REMOTE.
9 REMOTO Operator sets front LOCAL None “Control State LOCAL”event occurs.
panel switch to
LOCAL.
16/91
10 ON-LINE Equipment accepts HOST OFF-LINE None “Equipment OFF-LINE” event occurs.
“”Set OFF-LINE”
message from host
(S1, F17)
11 HOST Equipment accepts ON-LINE None Host is notified to transition to
OFF-LINE host request to go ON-LINE at transition 7.
ON-LINE (S1, F17).
12 HOST Operator actuates EQUIPMENT None “Equipment OFF-LINE” event occurs.
OFF-LINE OFF-LINE switch. OFF-LINE
* The configuration mentioned for transitions 1and 2 should be a single setting. This would provide the user
with a choice of entering the EQUIPMENT OFF-LINE, ATTEMPT ON-LINE, HOST OFF-LINE states.
** If SECS-I is used, this means the retry limit RTY is exceeded during the attempt to send a message.
*** Any host-initiated transaction open at the equipment must be completed. This may happen either by
sending the appropriate reply to the host prior to sending the event message or by sending an Sx,FO
message following the event message (i.e., after the transaction).
17/91
6-3 Processing State Model
INIT
13
IDLE
14 SETUP
3 MANUAＬ
10
READY
17
H
4 5
ABORT 11 12
(Err_Stop &
Q_Stop) 15 EXECUTING H
6 7 8 9
CYCLE_END PAUSE_END
16
PROCES
AUTO
Processing State Diagram
18/91
Processing State Transaction Table

1 INIT Device initial is finished IDLE
2 IDLE Press [INITIALRESET] key SETUP Start initializing
3 SETUP Complete Initial Reset READY
4 READY Equipment received the EXECUTING Start auto operation
command “START” from
host.
Or [START] key is pressed.
5 EXECUTING All the wafer in a cassette READY Operation Panel displays
have been processed “Auto operation
complete”.
Buzzer sounds.
6 EXECUTING Equipment received the CYCLE_END Start cycle operation
command “STOP” from the
host. Or [END CYCLE] key
is pressed.
7 CYCLE_END Equipment received the EXECUTING Restart Auto operation
command “START” from the
host. Or [START] key is
pressed.
8 EXECUTING Equipment received the PAUSE_END Start Pause
command “PAUSE” from
the host. Or [PAUSE] key is
pressed.
9 PAUSE_END Equipment received the EXECUTING Restart Auto operation
command “START” from the
host. Or [START] key is
pressed.
10 READY Equipment received the IDLE
program of “S7F3” from the
host, and rewrote the the
recipe to to one that
requires initial resetting
11 [Engineer] key, [Operator] Manual Tape feed, and
key on operation panel are equipment conditions
pressed.
Or Interlock is switches to
19/91
“valid”, and [MANUAL] key

is pressed.
12 MANUAL [MAIN] key on ENGINEER IDLE Wait Initial resetting
screen is pressed to switch
interlock to invalid
13 MANUAL [MAIN] key on OPERATION Return to original
screen is pressed. Condition
14 SETUP Alarm occurs ABORT Equipment stops,
Operation panel displays
“ERROR Massage”.
Buzzer sounds
15 EXECUTING Alarm occurs ABORT Equipment stops,
Operation panel displays
“ERROR Massage”.
Buzzer sounds
16 All states Equipment received the ABORT Stop the process
command “ABORT” from promptly.
the host. Or [Q.STOP] key
is pressed.
17 ABORT Equipment received the Before ABORT
command “RESET” and state
“START” from the host. Or
[RESET] and [START] key
are pressed.
20/91
6-4 Spooling State Diagram
SPOOL
ACTIVE
SPOOL OUTPUT
PURGE TRANSMIT
SPOOL SPOOL
Ｈ 3 4 5 6
8
NO SPOOL
OUTPUT
POWER SPOOL
OFF SPOOL UNLOAD
1
7 INACTIVE SPOOL
LOAD SPOOL
NOT
FULL
2
SPOOL
FULL
POWER ON
21/91
Spooling State Transition

# Current Trigger New Action Comment
State State
1 SPOOL Communication SPOOL SpoolCountActual and The defort state is in cash or
ACTIVE state change ACTIVE SoolCountTotal are substate is entered.
from Initialized to zero. The message, which could not
COMMUNICATIN Any open transactions be sent, remains in the send
G to NOT COM with the host are quere and is dealt whthin spool
-MNICATING or Aborted. Active state.
from WAIT CRA SpoolStart-Time (SV) is The collection event Spooling
to WAITDELAY set to current time. Activated has occurred.
and Enable Alert the operator that
Spool is true. Spooling is active.
2 SPOOL NOT Message SPOOL SpoolFullTime (SV) is The message, which would not
FULL generate FULL set to current time. Alert fit into the spooling area, is dealt
which will not fit the operator that spool with after the transition.
into spool area. is full. No collection event is generated.
3 SPOOL Spool area SPOOL Spooling process The collection event Spooling
OUTPUT emptied. INACTIV disabled. Alert the Deactivated has occurred.
E operator that spooling Transition from the OR substate
has been terminated. Spool Load component occurs.
4 NO SPOOL S7, F23 received PURGE No action. Initiates purging process.
OUT PUT W/RSDC=1. SPOOL No collection event is generated
since this is based on host
request.
5 NO SPOOL S6, F23 received TRANS- No action. Initiates message transmission
OUT PUT W/RSDC=0. MIT from spool. No collection event is
SPOOL generated since this is based on
host request.
6 TRANSMIT Comm. Failure or NO Spool transmission If communications failure, the
SPOOL MaxSpoolTransm SPOOL Process suspended. event Spool Transmit Failure has
it reached. OUT PUT occurred. No collection
event generated for
MaxpoolTransmi t reaches.
7 POWER ON Equipment power POWER No action. Spooling context has been
source OFF maintained in nonvolatile
discontinued. Storage prior to this transition.
22/91
8 POWER ON Equipment power POWER Spooling context If spooling were active prior to
source ON restored from power down, it shall continue.
restored. nonvolatile memory. If TRANSMIT SPOOL we re
Memory. active at power down, transition
#6 is expected to follow since
communications state is initially
NOT COMMUNICATING.
23/91
6-5 Wafer Cassette State Model
Cassette State Transaction Table

1 NoCassette Cassette is set Set
2 Set Cassette is got off NoCassette
3 Set Cassette is set Wait
4 Wait Cassette is got off NoCassette
5 Wait Equipment start operation Busy
6 Busy All the wafers in a cassette have Finish
been processed.
7 Finish Cassette is moved Wait Position. End
8 End Cassette is got off NoCassette
24/91
7 Scenarios
ON-Line Switch
HOST EQUIPMENT
Power ON
Setting Communications
Establish Communication
S1､F13 Request
(CR)
Establish Communication Request
Acknowledge S1､F14
(CRA)
<COMMUNICATING>
State
　(Reference E30-0997)
25/91
Process Program Send(Change Recipe)
HOST EQUIPMENT
Select Equipment Status S1,F3
Request (SSR)
S1,F4 Select Equipment Status Data

(SSD)
Process Program Send S7,F3

(PPS)
1Validity Check
(Check within Setting range or not.)
2.Status Check
2.1 IDLE
2.2 READY
Send NG except above tow statuses
S7,F4 Process Program Acknowledge
(PPA)
Process State Chenge

Event Report Send
S6､F11 CEID=9<ProcessingStateChange>
(ERS)
(CEID=9<ProcessingStateChange>)
Event Report Acknowledge S6､F12

(ERA)
Set Current Recipe and
Save Recipe
Change Equipment Status to IDLE
for initial resetting requirement
(Change of FrameSize etc.)
If Recipe Number Change

Event Report Send
S6､F11 CEID=22<RecipeNumber>
(ERS)
(CEID=22<RecipeNumber>)
Evnet Report Acknowledge S6､F12

(ERA)
Process State Change

Event Report Send
(ERS)
Evnet Report Acknowledge S6､F12

(ERA)
Recipe Check
Process Program Request S7,F5
(PPR)
S7,F6 Process Program Data

(PPD)
26/91
HOST EQUIPMENT
Selected Equipment S1,F3
Status Request (SSR)
S1,F4 Selected Equipment

(SSD) Status Data
New Equipment S2,F15

Constant Send (ECS)
1.Validity Check (ECV)

(Check within Setting range or not.)
2.Process Status Check
2.1 IDLE
2.2 READY
S2,F16 2.3 CYCLE
(ECA) Send NG except above three status
Change Setting Data and Save
Equipment Constant S2,F13

Request (ECR)
S2,F14 Equipment Constant Data

(ECD)
HOST EQUIPMENT
Select Equipment S1,F3
Status Request (SSR)
S1,F4 Select Equipment

(SSD) Status Data
Equipment Constant S2,F13

Request (ECR)
S2,F14 Equipment Constant

(ECD) Data
27/91
Host Command Send([INITIAL] Command)
HOST EQUIPMENT
Host Command
Send
<RCMD>=INITIAL S2､F41
(HCS)
S2､F42 Host Command Acknowledge

(HCA)
Change Process Status

Event Report Send
(ERS)
Event Report S6､F12

Acknowledge (ERA)
Operator Press [INITIAL] SW
HOST EQUIPMENT
Operator Command
Event Report Send
S6､F11 CEID=4<OperatorCommandIssued>
(ERS)
(CEID=4<OperatorCommandIssued>

Acknowledge (ERA)
Event Report Send
(ERS)

Acknowledge (ERA)
28/91
Finish Initial Reset and Ready Auto Operation.
HOST EQUIPMENT
Finish Initial Reset
Event Report Send
(ERS)

Acknowledge (ERA)
Operator set W_Cass.

Event Report Send
CEID=18<Port1 State Change>
S6､F11 (Send <CEID> crresponding with the cassette.)
(ERS)
CEID=18<Port1 State Change>

Acknowledge (ERA)
29/91
Host Command Send([START] Command)
HOST EQUIPMENT
Host Command Send
RCMD=START
S2､F41
(HCS)
(RCMD=START)
S2､F42 Host Command

(HCA) Acknowledge
Operator Press [START] SW
HOST EQUIPMENT
Operator Press [START] SW
Event Report Send
S6､F11 CEID=4<Operator Command Issued>
(ERS)
CEID=4<Operator Command Issued>
Event Report Acknowledg S6､F12

(ERA)
Start Auto Operation
HOST EQUIPMENT
Event Report Send
S6､F11 CEID=5<ProcessingStarted>
(ERS) CEID=9<ProcessingChange>
(CEID=5<ProcessingStarted>)
S6､F11
(ERS)
(CEID=9<ProcessingChange>)
Event Report Acknowledge

S6､F12
(ERA)
Event Report Acknowledge

S6､F12
(ERA)
30/91
Error Happened
HOST EQUIPMENT
Error Happened
　Alarm Cord(ALCD)
　Alarm ID(ALID)
S5F1 　Alarm Text(ALTX) Send
(ARS)
Alram Report S5F2

Acknowledge (ARA)

Event Report Send
CEID=8<ProcessingAborted>
S6F11 CEID=9<ProcessingStateChange>
(ERS)
(CEID=8<ProcessingAborted>)
S6F11
(ERS)
Event Report S6F12

Acknowledge (ERA)
Event Report S6F12

Acknowledge (ERA)
Event Report Send

S6F11 CEID=10<AlarmnDetected>
(ERS)
(CEID=10<AlarmｎDetected>)
Event Report S6F12

Acknowledge (ERA)
31/91
Error Reset
HOST EQUIPMENT
Host Command Send
<RCMD>=RESET S2F41
(HCS)
S2F42 Host Command

(HCA) Acknowledge
Error Reset
　Alarm Cord (ALCD)
　Alarm ID (ALID)
S5F1 　Alarm Text (ALTX)
(ARS)
Alarm Report S5F2

Acknowledge (ARA)
Event Report Send

S6F11 CEID=11<AlarmnCleard>
(ERS)
(CEID=11<AlarmnCleard>)
Event Report S6F12

Acknowledge (ERA)
Host Command Send

<RCMD>=START S2F41
(HCS)
S2F42 Host Command

(HCA) Acknowledge

Event Report Send
CEID=5<ProcessingStart>
S6F11 CEID=9<ProcessingStateCh
(ERS)
(CEID=5<ProcessingStart>)
S6F11
(ERS)
Event Report S6F12

Acknowledge (ERA)
Event Report S6F12

Acknowledge (ERA)
32/91
Data Item Restrictions

Data Item Format Code Meaning
ALCD 10 Binary
ALID 54 Unsigned 4byte int
CCODE N/A
CPNAME N/A
CEID 51 Unsigned 1byte int
DATAID 51 Unsigned 1byte int
DATALENGTH N/A
ECID 51 Unsigned 1byte int
ECID 11 Boolean
LENGTH N/A
PPID 10 Binary
PPBODY 10 Binary
RCMD 20 ASCII
REPGSZ N/A
RTPID 51 Unsigned 1byte int
=>RPTID
SEQNUM N/A
SMPLN N/A
SVID 0 List
SVID 51 Unsigned 1byte int
SVID 20 ASCII
TEXT N/A
TOTSMP N/A
TRID N/A
VID 51 Unsigned 1byte int
HCACK 10 Binary
33/91
8. Message Detail
S1, F0 Abort Transaction (SIFO) S, H E

Description： Used in lieu of an expected reply to abort a transaction. Function 0 is defined in every stream and
has
the same meaning in every stream.
Structure： Header only
S1, F1 Are You There Request(R) S, H E,reply

Description： Establishes if the equipment is on-line. A function 0 response to this message means the
communication
is inoperative. In the equipment, a function 0 is equivalent to a timeout on the receive timer after
issuing
S1, F1to the host.
S1, F2 On Line Data (D) S, H E

Description: Data signifying that the equipment is alive.
Structure： L,2
1, <MDLN>
2, <SOFTREV>
Exception： The host sends zero-length list to the equipment.
S1, F3 Selected Equipment Status Request (SSR) S, H E, reply

Description： A request to the equipment to report selected value of its status.
Structure： The following structure is approved for all item formats and should be used by all new
implementations:
L, n
1. <SVID1>
.
.
n. <SVIDn>
The following structure is included for compatibility with previous implementations and may only be
used for items of format 3() and 5():
n. <SVID1,...,SVIDn>
Exception： A zero-length list (structure 1) or item (structure 2) means report all SVIDs.
34/91
S1, F4 Selected Equipment Status Data (SSD) M, H E

Description： The equipment reports the value or each SVID requested in the order requested. The host
remembers
the names of values requested.
Structure: L,n
1.<SV1>
.
.
n.<SVn>
Exceptions： A zero-length returned for Svi means that SVIDi does not exist
S1,F11 Status Variable Namelist Request(SVNR) S,H E,reply

Description： A request to the equipment to identify certain status variables.
Structure： L,n
1.<SVID1>
.
.
n.<SVIDn>
Exception： A zero length means report all SVIDs.
S1,F12 Status Variable Namelist Reply(SVNRR) M,H E

Description： The equipment reports to the name and units of the requested SVs.
Structure： L,n
1.L,3
1.<SVID1>
2.<SVNAME1>
3.<UNITS1>
2.L,3
.
.
n.L,3
1.<SVIDn>
2.<SVNAMEn>
3.<UNITSn>
S1,F13 Establish Communication Request(CR) S,H E,reply

Description： The purpose of the message is to provide a formal mean s of initializing communications at a
logical application level both on power-up and following a break in communications. It should be the
35/91
first message sent following any period where host and Equipment SECS applications are unable
to cmmunicate. An attempt to send an Establish Communications Request (S1,F13) should be
repeated at programmable intervals until an transaction timeout period with an acknowledgement
code accepting the establishment.
Structure： L,2
1.<MDLN>
2.<SOFTREV>
Exception： The host sends a zero-length list to the equipment.
S1,F14 Establish Communications Request Ackowledge(CRA) S,H E

Description： Accept or deny Establish Communications Request(S1,F13). MDLN and SOFTREV are on-line
data and are valid only if COMMACK = 0.
Structure： L,2
1.<COMMACK>
2.L,2
1.<MDLN>
2.<SOFTREV>
Exception： The host sends a zero-length list for item 2 to the equipment.
S1,F15 Request OFF-LINE(ROFL) S,H E,reply

Description： The host requests that the equipment transition to the OFF-LINE state.
Structure： Header only.
S1,F16 OFF-LINE Ackowledge(OFLA) S,H E

Description： Acknowledge or error.
Structure： <OFLACK>
S1,F17 Request ON-LINE (RONL) S,H E,reply

Description： The host requests that the equipment transition to the ON-LINE state.
Structure： Header only.
S1,F18 ON-LINE Acknowledge(ONLA ) S,H E

Structure： <ONLACK>
S2,F0 Abort Transaction(S2F0) S,H E

Description： Same form as S1F0.
36/91
S2,F13 Equipment Constant Request(ECR) S,H E,reply

Description： Constants such as for Calibration, servo gain, alarm limits, data collection mode and other values
that are changed infrequently can be obtained using this message.
Structure： The following structure is approved for all item formats and should be used by all new
implementations:
L,n
1.<ECID1>
．
．
．
n<ECID1>
The following structure is included for compatibility with previous implementations and may only be
used for items of format 3() and 5():
<ECID1,...,ECID1N>
Exception： A zero-length list (structure1) or item (structure2) means report all ECV’s according to a predefined
order.
S2,F14 Equipment Constant Data(ECD) M,H E

Description： Data Response to S2F13 in the order requested.
Structure： L,n
1.<ECV1>
2<ECV2>
．
．
n<ECV1>
Exception： A zero-length ECVi means that ECIDI does not exist.
S2,F15 New Equipment Constant Send(ECS) S,H E,reply

Description： Change one or more equipment constants.
Structure： L,n
1.<ECID1>
2.<ECV1>
．
．
n,L,2
1.<ECID1>
2.<ECV1>
37/91
S2,F16 New Equipment Constant Ackowledge(ECA) S,H E

Description： Acknowledge or error. If EAC contains a non-zero error code, the equipment should not change any
of
the ECIDs specifiedin S2F15.
Structure： <EAC>
S2,F17 Date and Time Request(DTR) S,H E,reply

Description： Useful to check equipment time base or for equipment to synchronize with the host time base.
S2,F18 Date and Time Data(DTD) S,H E

Description： Actural time data.
Structure： <TIME>
Exception： A zero-length item means to time exists.
S2,F29 Equipment Constant Request(ECNR) S,H E,reply

Description： This function allows the host to retrieve basic information about what equipment constants are
available in the equipment.
Structure： L,n
1.<ECID1>
．
．
n.<ECIDn>
Exception： A zero-length list means send information for all ECIDs.
S2,F30 Equipment Constant Namelist(ECN) Ｍ,H E

Description： Data Response.
Structure： L,n(number of equipment constants)
1.L,6
1.<ECID1>
2.<ECNAME1>
3.<ECMIN1>
4.<ECMAX1>
5.<ECDEF1>
6.<UNITS1>
2 .L,6
.
.
38/91
n.L,6
1.<ECIDn>
2.<ECNAMEn>
3.<ECMINn>
4.<ECMAXn>
5.<ECDEFn>
6.<UNITSn>
S2,F31 Data and Time Set Request(DTS) S,H E,reply

Description： Useful to synchronize the equipment time with the host time base.
Structure： <TIME>
S2,F32 Data and Time Set Acknowledge(DTA) S,H E

Description： Acknowledge the receipt of time and date.
Structure： <TIACK>
S2,F33 Define Report(DR) Ｍ,H E,reply

Description： The purpose of this message is for the host to define a group of reports for the equipment.
The type of report to be transmitted is designated by a Boolean “Equipment Constant.” An “Equip-
ment Constant Value” of “False” means that an “Event Report”(S6F11) will be sent, and a value of
“True” means that an “Annotated Event Report”(S6F13) will be sent.
If S2F33 is Multi-block, it must be preceded by the S2F39/S2F40 Inquire/Grant transaction.
Structure： L,2
1.<DATAID>
2.L,a (# reports)
1.L,2 (report 1)
1.<PRTID1>
2.L,b (#VIDs this report)
1.<VID1>
.
.
b.<VIDb>
a.L,2 (report a)
1.<PRTIDa>
2.L,c (#VIDs this report)
1.<VID1>
.
.
39/91
c.<VIDC>
Exception： 1. A list of zero-length following <DATAID> deletes all report definitions and associated links.
See S2F35 (Link Event /Report).
2. A list of zero-length following <RPTID> deletes report type RPTID. All CEID links to this
PRTID are also deleted.
S2,F34 Define Report Acknowledge(DRA) S,H E,reply

Description: Acknowledge or error. If an error condition is detected the entire message is rejected (i.d.,partical
changes are not allowed).
structure： <DRACK>
S2,F35 Link Event Report(LER) Ｍ,H E,reply

Description： The purpose of this message is for the host to link n reports to an event (CEID). These linked
events reports will default to ‘disabled ‘ upon linking. That is , the occurrence of an event would not
cause the report to be set until enabled. See S2F37 for enabling reports.
If S2F35 is Multi-block, it must be preceded by the S2F39/S2F40 Inquire/Grant transaction.
Structure： L,2
1.<DATAID>
2.L,a (#events)
1.L,2 (event 1)
1.<CEID1>
2.L,b
1.<PRTID1>
.
.
b.<PRTIDb>
a.L,2 (event a)
1.<CEIDa>
2.L,c (# PRTIDS this event)
1.<PRTID1>
.
.
c.<PRTIDC>
Exception： A list of zero length following CEID deletes all report links to that event.
S2,F36 Link Event Report (LERA) S,H E

Description： Acknowledge or error. If an error condition is detected the entire message is rejected (i.e., partial
changes are not allowed) .
40/91
Structure: <LRACK>
S2,F37 Enable/Disable Event Report (EDRA) S,H E,reply

Description： The purpose of this message is for the host to enable or disable reporting for a group of
events(CEIDs).
Structure： L,2
1.<CEED> (enable/disable)
2.L,n (#CEIDs)
1.<CEID1>
n.<CEIDn>
Exception： A list of zero length following <CEID> means all CEIDs.
S2,F38 Enable/Disable Event Report Acknowledge (EERA) S,H E,reply

Description： Acknowledge or error. If an error condition is detected the entire message is rejected,i.e.,partial
changes are not allowed.
Structure：<ERACK>
S2,F39 Multi-block Inquire (EDRA) S,H E,reply

Description: If a S2F33,S2,F35,S2F45, or S2F63 message is more than one block, this transaction must
precede
the message.
Structure： L,2
1.<DATAID>
2.<DATALENGTH>
S2,F40 Multi-block Grant (MBG) S,H E,reply

Description : Grant permission to send multi-block message.
Structure： <GRANT>
S2,F41 Host Command Send (HCS) S,H E,reply

Description: The Host requests the Equipment perform the specified remote command with the associated
parameters.
Structure： L,2
1.<RCMD>
2.L,n (# of parameters)
1.L,2
1.<CPNAME1> (parameter 1 name)
2.<CPVAL1> (parameter 1 value)
41/91
.
.
n.L,2
1.<CPNAMEn> (parameter n name)
2.<CPVALn> (parameter n value)
S2,F42 Host Command Acknowledge (HCA) S,H E

Description： Acknowledge Host command or error. If command is not accepted due to one or more invalid
parameters
(i.e., HCACK=3), than a list of invalid parameters will be returned containing the parameter name
and
reason for being invalid.
Structure： L,2
1.<HCACK>
2.L,n (# of parameters)
1.L,2
1.<CPNAME1> (parameter 1 name)
2.<CPVAL1> (parameter 1 reason)
.
.
n.L,2
1.<CPNAMEn> (parameter n name)
2.<CPVALn> (parameter n reason)
Exception： If there are no invalid parameters, then a list of zero length will be sent for item 2.
S2,F43 Reset Spooling Streams and Functions (RSSF) S,H E,reply

Description： This message allows the host to select specific streams and functions to be spooled whenever
spooling is active.
Structure： L,m
1.L,2
1.<STRID1>
2.L,n
1.<FCNID1>
.
.
n.<FCNIDn>
.
.
42/91
m.L,2
1.<STRIDm>
2.L,n.
1.<FCNID1>
.
.
n.<FCNIDn>
Exceptions： 1.A zero-length list , m=0, turns off spooling for all streams and functions.
2.A zero-length list, n=0, turns on spooling for all functions for all functions for the associated s
tream.
Notes： 1.Turning off spooling for all functions for a specific stream is achieved by omitting reference to the
stream from this message.
2.Spooling for Stream 1 is not allowed.
3.Equipment must allow host to spool all primary message for a stream (except stream1)
4.A defined list of functions for a stream in this message will replace any previously
selected functions.
S2,F44 Reset Spooling Acknowledge (RSA) Ｍ,H E

Description: Acknowledge or error.
Structure： L,2
1.<RSPACK> (accept or reject)
2.L,m (m = number of streams with errors)
1.L,3
1.<STRID1>
2.<STRACK1> (error in stream)
3.L,n (n = number of functions in error)
1.<FCNID1>
.
.
n.<FCNIDn>
.
.
m.L,3
1.<STRIDm>
2.<STRACKm> (error in stream)
3.L,n (n = number of functions in error)
1.<FCNID1>
.
43/91
.
n.<FCNIDn>
Exceptions： 1.If RSACK = 0, a zero-length list, m=0, is given, indicating no streams or functions in error.
2.A zero-length list, n=0, indicates no functions in error for specified stream.
S5,F0 Abort Transaction (S5F0) S,H E

Description： Same form as S1F0.
S5,F1 Alarm Reports Send (ARS) S,H E,[reply]

Description： This message report a change in or presence of an alarm condition. One message will be issued
when the alarm is set and one message will be issued when the alarm is cleared. Irrecoverable
errors and attention flags may not have a corresponding clear message.
Structure： L,3
1.<ALCD>
2.<ALID>
3.<ALTX>
S5,F2 Alarm Reports Send (ARS) S,H E, [reply]

Structure： <ACKC5>
S5,F3 Enable/Disable Alarm Send (EAS) S,H E,[reply]

Description： This message will change the state of the enable bit in the equipment. The enable bit determines if
the alarm will be sent to the host. Alarms, which are not controllable in this way, are unaffected
by this message.
Structure： L,2
1.<ALED>
2.<ALID>
Exception： A zero-length item for ALID means all alarms.
S5,F4 Enable/Disable Alarm Acknowledge (EAA) S,H E, [reply]

Description: Acknowledge or error.
44/91
S5,F5 List Alarm Request (LAR) S,H E,reply

Description： This message requests the equipment to send binary and analog alarm information to the host.
： <ALID1.,...,ALIDn.>
Exception： A zero-length item means send all possible alarms regardless of the state of AFLED.
S5,F6 List Alarm Data (LAD) Ｍ,H E, [reply]

Description： This message contain the alarm data known to the equipment. There are “m” alarms in the list.
Structure： L,m
1.L,3
1.<ALCD1>
2.<ALID1>
3.<ALTX1>
2.L,3
.
.
m.L,3
1.<ALCDm>
2.<ALIDm>
3.<ALTXm>
Exception： If m=0 no response can be made. A zero-length item returned for ALCDi or ALTXi means that value
does not exit.
S6,F0 Abort Transaction (S6F0) S,H E

Description： Same form as S1,F0.
S6,F5 Multi-block Data Send Inquire (MBI) S,H E,reply

Description： If the discrete data report S6F3, F9, F11, F13 can involve more than one block, this transaction
must precede the transmission.
Structure： L,2
1.<DATAID>
2<DATALENGTH>
S6,F6 Multi-block Grant (MBG) S,H E

Description： Grant permission to send.
Structure： <GRANT6>
45/91
S6,F11 Event Report Send (ERS) M,H E,REPLY

Description： The purpose of this message is for the equipment to send a defined, linked, and enabled group of
reports to the host upon the occurrence of an event (CEID).
Structure： L,3
1.<DATAID>
2.<CEID>
3.L,a
1.L,2
1.<PRTID1>
2.L,b
1.<V1>
.
.
b.<Vp>
.
.
a.L,2 report a
1.<PRTIDa>
2.L,c (# Vs this report)
1.<V1>
.
.
c.<VC>
Exception： If there are no reports linked to the events a ‘null’ report is assumed. A zero-length list for # of
reports
means there are no reports linked to the given CEID.
S6,F12 Event Report Acknowledge (ERA) S,H E

Description： Acknowledge(ERA)
S6,F15 Event Report request (ERR) S,H E,reply

Description： The purpose of this message is for the host to demand a given report group from the equipment.
Structure： <CEID>
S6,F16 Event Report Data (ERD) Ｍ,H E

Description： Equipment sends reports to given CEID to host.
Structure： Identical to structure of S6,F11.
46/91
Exceptions： A zero-length item means there are no reports linked to the given CEID.
S6,F19 Individual Report Request (IRR) S,H E,reply

Description： The purpose of this message is for the host to request a defined report from the equipment.
Structure： <PRTID>
S6,F20 Individual Report Data (IRD) Ｍ,H E

Description： Equipment sends variable data defined for the given RPTID to the host.
Structure： L,n # of variable data items
1.<V1>
.
.
n.<Vn>
Exceptions： A zero length list means RPTID is not defined.
S6,F23 Request Spooled Data (RSD) S,H E,reply

Description： The purpose of this message is for the host to request transmission or deletion of the message
currently spooled by the equipment.
Structure： <RSDC>
S6,F24 Request Spooled Data Acknowledgement Send (RSDAS) S,H E

Description： The purpose of this message is to acknowledge the receipt of the Request Spooled Data (S6,F23)
and to respond with an appropriate acknowledge code.
Structure： <RSDA>
S7F0 Abort Transaction (S7F0) S,H E

S7F3 Process Program Send (PPS) M,H E

Description： The program is sent. If S7,F3 is multi-block, it must be preceded by the S7,F1/S7,F2 Inquire/Grant
Transaction.
Structure： L,2
1.<PPID>
2.<PPBODY>
S7F4 Process Program Acknowledge (PPA) S,H E

47/91
S7F5 Process Program Request (PPR) S,H E

Description： This message is used to request the transfer of a process program.
Structure： <PPID>
S7F6 Process Program Data (PPD) S,H E

Description： This message is used to transfer a process program.
Structure： L,2
1.<PPID>
2.<PPBODY>
Exception : A zero-length list means request denied.
NOTE : The equipment –to-host transefer of the process program, denoted by the R bit in the header (R=1),
Provides the mechanism for the host computer to receive process programs created on the
equipment.
This allows use of the equipment without having process program generation capabilities on the host.
S7,F19 Current EPPD Request (RER) S,H E,reply

Description： This message is used to request the transmission of the current equipment process program
Directory (EPPD). This is a list of all the PPIDs of the process programs stored in the equipment.
S7,F20 Current EPPD Data (RED) M,H E

Description： This message is used to transmit the current EPPD.
Structure： L,n (number of process programs in the directory)
1.<PPID1>
.
.
n.<PPIDn>
S9,F1 unrecognized Device ID (UDN) S,H E

Description： The device ID in the message block header did not correspond to any known device ID in the node
detecting the error.
Structure： <MHEAD>
S9,F2 Not Used
S9,F3 unrecognized Stream Type (USN ) S,H E

Description： The equipment does not recognize the stream type in the message block.
48/91
S9,F4 Not Used
S9,F5 unrecognized Function Type (UFN ) S,H E

Description： Theis message indicates that the function in the message ID is not recognized by the receiver.
S9,F6 Not Used
S9,F7 Illegal Data (IDN) S,H E

Description： This message indicates that the stream and function were recognized, but the associated data
format
could not be interpreted.
S9,F8 Not Used
S9,F9 Transaction Timer Timeout (TTN) S,H E

Description： This message indicates that a transaction (receive) timer has timed out and that the corresponding
transaction has been aborted. It is up to the host to respond to this error in an appropriate manner
to keep the system operational.
Structure： <SHEAD>
S9,F10 Not Used
S9,F11 Data Too Long (DLN) S,H E

Description： This message to the host indicates that the equipment has been set more data than it can handle.
S9,F12 Not Used
S9,F13 Conversation Timeout (CTN) S,H E

Description： Data were expected but none were received within a reasonable length of time. Resources have
been cleared
Structure： L,2
1.<MEXP>
2.<EDID>
49/91
S9,F14 Not Used
S10F0 Abort Transaction (S10F0) S,H E

S10,F1 Terminal Request (TRN) S,H E,reply

Description： A terminal text message to the host.
Structure： L,2
1.<TID>
2.<TEXT>
S10,F2 Terminal Request Acknowledge (TRA) S,H E

S10,F3 Terminal Display ,Signal (VTN) S,H E,reply

Description： Data to be displayed
Structure： L,2
1.<TID>
2.<TEXT>
S10,F4 Terminal Display, Signal Acknowledge (VTA) S,H E

50/91
9. Event Reports
9-1 Collection Events List
CEID Event Designation RPTID VID Variable Data Reference
Control-Related Events:
1 Equipment OFF-Line 1 9 ControlState ON-LINEOFF-LINE
1 Clock
2 Control State LOCAL 2 9 ControlState REMOTELOCAL or
1 Clock OFF-LINELOCAL.
3 Control State REMOTE 3 9 ControlState LOCALREMOTE or
1 Clock OFF-LINEREMOTE
4 Operator Command Issued 4 52 OperatorCommand Operator Activity while

REMOTE state is
active.
Processing-Related Events:
5 Processing Started 5 1 Clock Entry into
10 PreviousProcessState EXECUTING state.
6 Processing Completed 6 1 Clock Normal exit of
10 PreviousProcessState EXECUTING state.
7 Processing Stopped 7 1 Clock Result of STOP
10 PreviousProcessState command from host or
operator.
8 Processing Aborted 8 1 Clock Processing aborted.
10 PreviousProcessState
9 Processing State Change 9 1 Clock Any processing state
11 ProcessState transition.
10 PreviousProcessState
Alarm Management Events:
10 Alarmn Detected 10 1 Clock ALARMn CLEAR
50 AlarmID ALARMn SET.
3 AlarmsSet
11 Alarmn Cleard 11 1 Clock ALARMn SET
50 AlarmID ALARMn CLEAR.
3 AlarmsSet
Equipment Constant Events:
12 Operator Equipment Constant 12 51 ChangedECID Operator Activity
Change
Spooling Events:
13 Spooling Activated 13 8 SpoolStartTime SPOOL INACTIVE->
SPOOL ACTIVE.
14 Spooling Deactivated 14 6 SpoolCountTotal SPOOL OUTPUT->
SPOOL INACTIVE.
15 Spool Transmit Failure 15 1 Clock TRANSMIT SPOOL->
5 SpoolCountActual NO SPOOL OUTPUT.
6 SpoolCountTotal
16 Spooling Enabled 16 1 Clock Spooling enabled.
51/91
17 TerminalAcknolege 17 1 Clock Terminal Acknolege
18 Right Cassette State Change 18 1 Clock Right Cassette State

12 Right Cassette State transition.
19 Left Cassette State Change 19 1 Clock Left Cassette State
13 Left Cassette State transition.
20~ Space
21
22 Recipe Selected 22 1 Clock Current Recipe
14 RecipeNumber
25 RecipeName 25 1 Clock Recipe Name
62 Recipe Name
27 LotID 27 1 Clock LotID
64 LotID (Option)
31 Lot Start 31 1 Clock Lot Start Event
62 Recipe Name
32 Lot End 32 1 Clock Lot End Event
62 Recipe Name
33 Space
34 Slot End 34 1 Clock Wafer is unloaded

56 Port Number
57 SlotNumber
35 Slot Start 35 1 Clock Wafer is loaded.
56 Port Number
57 SlotNumber
36 MappingCommandEnable 36 20 MappingCommand Mapping Command
Receive state
37 Right Slot Map Read 37 1 Clock Slot Map Event
69 Right Slot Map
38 Left Slot Map Read 38 1 Clock Slot Map Event
70 Left Slot Map
39 Right Cassette ID Read 39 1 Clock Right Cassette ID
67 Right Cassette ID Read
40 Right Cassette ID Read Fail 40 1 Clock
41 Left Cassette ID Read 41 1 Clock Left Cassette ID Read

68 Left Cassette ID
42 Left Cassette ID Read Fail 42 1 Clock
43~
44
45 Right Cassette Ready to Load 45 1 Clock Right Cassette Ready

to Load Event
46 Left Cassette Ready to Load 46 1 Clock Left Cassette Ready
to Load Event
52/91
47 Right Cassette Ready to Unload 47 1 Clock Right Cassette Ready

to Unload Event
48 Left Cassette Ready to Unload 48 1 Clock Left Cassette Ready
to Unload Event
49 Right Cassette Load to Complete 49 1 Clock Right Cassette Load
Complete Event
50 Left Cassette Load to Complete 50 1 Clock Left Cassette Load
Complete Event
51 Right Cassette Unload to Complete 51 1 Clock Right Cassette
Unload Comp. Event
52 Left Cassette Unload to Complete 52 1 Clock Left Cassette Unload
Complete Event
55 Right Cassette RFID Read 55 1 Clock Right Cassette RFID
301 Right Cassette ID Read Event
56 Right Cassette RFID Read Fail 56 1 Clock Right Cassette RFID
Read Fail Event
57 Left Cassette RFID Read 57 1 Clock Left Cassette RFID
303 Right Cassette ID Read Event
58 Left Cassette RFID Read Fail 58 1 Clock Left Cassette RFID
Read Fail Event
59~
20000
Wafer ID Read 30 1 Clock Wafer ID Read
20001 62 Recipe Name (Option)
63 Lot Name
61 Wafer ID
53/91
10. Dynamic Event Setting

10-1 Data Variable List
Range / Description
Format Enumeration / (Related CEID. Of course All ECIDs
VID Name Class Unit
(Octal) ECMIN / ECMAX / are related to CEID #12, if changed
ECDEF by Operator. )
Clock SV ASCII -- 19990101000000～ Equipment internal clock.
1
16 2098123123595999 YYYYMMDDhhmmsscc
(20) (1,2,3,5,6,7,8,9,10,11,15,16,17,18,
19,20,21,22,23,24,25)
2 AlarmsEnabled SV List (00) -- -- List of alarms enabled for reporting.
(10, 11)
3 AlarmsSet SV List (00) -- -- List of alarms currently set.
(10,11)
4 EventsEnabled SV List (00) -- -- List of events enabled for reporting.
(All CEIDs)
5 SpoolCountActual SV U1 (51) -- 0 ～ Actual count of messages in spool
area. (15)
6 SpoolCountTotal SV U1 (51) -- 0 ～ Total count of messages spooled.
(14,15)
7 SpoolFulltime SV ASCII -- Same as clock Time stamp from the time spool last
16 became full.
(20) YYYYMMDDhhmmsscc
8 SpoolStartTime SV ASCII -- Same as clock Time stamp from the time spooling
16 last became active.
(20) YYYYMMDDhhmmsscc
(13)
9 ControlState SV U1 (51) -- 1=OFF-LINE/ Current control state.
EQUIPMENT (1,2,3)
OFF-LINE
2=OFF-LINE/
ATTEMPT
ON-LINE
3=OFF-LINE/
HOST OFF-LINE
4=ON-LINE/
LOCAL
5=ON-LINE/ REMOTE
10 PreviousProcessState SV U1 (51) -- Same as Process State Previous processing state.
(5,6,7,8)
11 ProcessState SV U1 (51) -- 1=INIT Current processing state.
2=IDLE (9)
3=SETUP
4= READY
5=EXECUTING
6=CYCLE_END
7=PAUSE_END
54/91
8=MANUAL
9=ABORT
10=MAPPING_WAIT
11=MAPPING
12 Right Cassette State SV U1 (51) -- 0=NoCassette Right Cassette current state.
1=End
2=Data
3=Wait
4=Busy
5=Set
6=Finish
13 Left Cassette State SV U1 (51) -- 0=NoCassette Left Cassette current state.
1=End
2=Data
3=Wait
4=Busy
5=Set
6=Finish
14 RecipeNumber SV U1 (51) -- ECMIN = 1 Recipe Number
ECMAX = 100
15 Spare
～19
20 MappingCommand SV U1(51) -- 0:Disable
1:Enable
21 Spare
～49
50 AlarmID DVVAL U4 (54) -- Set or cleared alarm ID.
(10, 11)
51 ChangedECID DVVAL U1 (51) -- Changed ECID for reporting.
(12)
52 OperatorCommand DVVAL U1 (51) -- 1=start_sw Command operator issued. (4)
2=cycle_sw
3=pause_sw
4=reset_sw
5=initial_sw
6=stop_sw
56 CassetteNumber DVVAL U1 (51) -- 1:Left Cassette Cassette Number
2:Right Cassette
57 SlotNumber DVVAL U1 (51) -- Slot Number
58 TotalCount DVVAL U4(54) Count ECMIN = 0 Total Count

ECMAX = 99999999
59 AlignerLampTime DVVAL U2(52) Hour ECMIN = 0 Aligner lamp current time count
Current ECMAX = 4000
60 UVLampTimeCurrent DVVAL U4(54) Hour ECMIN = 0 UV Lamp current time count
ECMAX = 9999 (automatically include)
61 Wafer ID DVVAL ASCII -- -- Wafer ID Readind Result
20(20) (Option)
55/91
62 Recipe Name SV ASCII -- Recipe Name

20(20)
63 Spare
64 LotID DVVAL ASCII -- LotID

20(20)
65~ Spare
66
67 Right Cassette ID DVVAL ASCII -- -- Right Cassette ID
20(20)
68 Left Cassette ID DVVAL ASCII -- -- Left Cassette ID
20(20)
69 Slot Map DVVAL ASCII --- 1:Empty Scanner Slot Map
(Right Cassette) 25(20) 3:Occupied (Right Cassette)
4:Double (Option)
5:Cross
3:Occupied
4 Occupied
5:Abnormal
70 Slot Map DVVAL ASCII --- 1:Empty Scanner Slot Map
(Left Cassette) 25(20) 3:Occupied (Left Cassette)
4:Double (Option)
5:Cross
3:Occupied
4 Occupied
5:Abnormal
71~ Spare
73
74 Lot Start DVVAL U1(51) -- -- Lot Start
75 LotEnd DVVAL U1(51) -- -- Lot End
76 WaferUnload DVVAL U1(51) -- -- Unload Wafer
77 WaferLoad DVVAL U1(51) -- -- Load Wafer
78~ Spare
80
81 RightCassReadytoLo DVVAL U1(51) -- -- Right Cassette Ready to Load
ad
82 LeftCassReadytoLoad DVVAL U1(51) -- -- Left Cassette Ready to Load
83 RightCassReadytoUnl DVVAL U1(51) -- -- Right Cassette Ready to Unload

oad
84 LeftCassReadytoUnlo DVVAL U1(51) -- -- Left Cassette Ready to Unload
ad
85 RightCassReceived DVVAL U1(51) -- -- Right Cassette Received
86 LeftCassReceived DVVAL U1(51) -- -- Left Cassette Received
56/91
87 RightCassRemoved DVVAL U1(51) -- -- Right Cassette Removed
88 LeftCassRemoved DVVAL U1(51) -- -- Left Cassette Removed
89 Spare
90 RightCassIDReadFail DVVAL U1(51) -- -- Reading of right cassette is failure.
91 Spare
92 LeftCassIDReadFail DVVAL U1(51) -- -- Reading of left cassette is failure.
93~ Spare --- --- --- --- --

99
100 EstablishCommunicati ECV U2 (52) Sec ECMIN =1 The length of time of the Interval
onTime-out ECMAX=65535 between attempts to send S1F13
ECDEF=45 when establishing communications.
101 MaxSpoolTransmit ECV U4 (54) -- ECMIN=0 The maximum number of messages,
ECMAX=9999 which the equipment will transmit
ECDEF= 1 from the spool in response to an
S6F23.
102 OverWriteSpool ECV Boolean -- ECMIN= FALSE This indicates either to overwrite
(11) ECMAX= TRUE data in the spool area or to stop
ECDEF= TRUE spooling whenever the spool area
limits are exceeded.
103 EnableSpooling ECV U1 (51) -- ECMIN = 0(False) This indicates either to enable
ECMAX = 1(True) spooling or to disable spooling.
ECDEF = 0(False)
150 BG/T Peeling trigger ECV U1(51) -- ECMIN = 0(NoUse)
select ECMAX = 1(Use)
ECDEF = 0(NoUse)
151 UV Auto Off select ECV U1(51) -- ECMIN = 0(NoUse) (Option)
ECMAX = 1(Use)
ECDEF = 0(NoUse)
301 Right Cassette RFID DVVAL ASCII -- Right Cassette RFID
20(20)
302 Right Cassette RFID DVVAL UI1(51) -- Right Cassette RFID Failure
Failure
303 Left Cassette RFID DVVAL ASCII -- Left Cassette RFID

20(20)
304 Left Cassette RFID DVVAL UI1(51) -- Left Cassette RFID Failure
Failure
57/91
11. Alarm Management
The constitutional diagram about Alarm ALIDn
ALARMn 1 ALARMn
CLEAR 2 SET
Alarm State Transaction

1 ALARMnCLEAR Equipment detects ALARMnSET To ensure safety, if Work by operator
(Alarm resets.) ALARM n. (Alarm occurs.) an action presents, or host is required
equipment starts it. before inhibit
AlarmsSet and actions.
ALCD are updated.
If “Valid”, alarm
message is made
and issued.
2 ALARMnSET Equipment cannot ALARMnCLEAR To ensure safety, if Work by operator
(Alarm occurs) detect ALARM n. (Alarm resets) an action presents, or host is required
equipment starts it. before inhibit
AlarmsSet and actions.
ALCD are updated.
If “Valid”, alarm
message is made
and issued.
58/91
11-1 Alarm Collection
Code Name
10000 L.Port 300W.Cass Pres. Det. Err(PH10618)
10001 L.Port 200W.Cass Pres. Det. Err(PH10618)
10002 L.Port 300W.Cass Place Det. Err(PH10617)
10003 L.Port 200W.Cass Place Det. Err(PH10619)
10010 L.Port Wafer Displace still ON
10011 L.Port Door still Open Error(L10627)
10012 L.Port Door Open Error(L10627)
10013 L.Port Door still Close Error(L10628)
10014 L.Port Door Close Error(L10628)
10015 L.Port still Dock Error(L10623)
10016 L.Port Dock Error(L10623)
10017 L.Port Undock still ON(L10624)
10018 L.Port Undock Error(L10624)
10019 L.Port Latch Key still Open Err.(L10625)
10020 L.Port Latch Key Open Error(L10625)
10021 L.Port Latch Key still Close Err(L10626)
10022 L.Port Latch Key Close Error(L10626)
10023 L.Port Door Vacuum still ON(PSW10629)
10024 L.Port Door Vacuum Error(PSW10629)
10070 L.Port Static Alarm(ALM10812)
10071 L.Port Static Cond. Alarm On(CON10813)
10500 L.Port Checksum Error

10502 L.Port cannot receive Command
10503 L.Port Door Up/down error by ForeignObj
10505 L.Port Alarm happen
10506 L.Port Command in Processing
10507 L.Port Operation Mode Change Error
10508 L.Port Mapping command cannot receive
10511 L.Port Comd cannot execute by Interlock
10512 L.Port Not detect Cassette by Interlock
10513 L.Port Not Original Pos. by Interlock
10514 L.Port Loading Not End by Interlock
10515 L.Port Clamp Not End by Interlock
10516 L.Port Dock Not End by Interlock
59/91
10517 L.Port Vacuum Not End by Interlock

10518 L.Port Unlatch Not End by Interlock
10519 L.Port Door Open Not End by Interlock
10520 L.Port Mapping Not Start by Interlock
10521 L.Port Mapping Not End by Interlock
10522 L.Port Door Not Up by Interlock
10523 L.Port Not Undock by Interlock
10524 L.Port FOUP still detected by Interlock
10525 L.Port FOUP cannot Open by Interlock
10526 L.Port Door Not Close by Interlock
10527 L.Port Door Not Open by Interlock
10529 L.Port Door cannot Close(2) by Interlock
10530 L.Port Interlock Map Sensor Not Return
10531 L.Port Interlock Abso Parameter
10535 L.Port Auto Calibration Not 1st Wafer
10536 L.Port Auto Calibration Not 25st Wafer
10537 L.Port Mode Change Abnomal
10538 L.Port Door Close(1) by Interlock
10541 L.Port Clamp Timeover
10542 L.Port UnClamp Timeover
10543 L.Port Dock Timeover
10544 L.Port Undock Timeover
10545 L.Port Latch Timeover
10546 L.Port Unlatch Timeover
10547 L.Port Vacuum Timeover
10548 L.Port Unvacuum Timeover
10549 L.Port Door Open Timeover
10550 L.Port Door Close Timeover
10551 L.Port Mapping Forward Timeover
10552 L.Port Mapping Backward Timeover
10553 L.Port Return Origin Timeover
10554 L.Port Loading Timeover
10555 L.Port Unloading Timeover
10556 L.Port Set Position Timeover
10557 L.Port Mapping sensor Ready Timeover
10558 L.Port Clamp Sensor Abnormal
10559 L.Port Dock Sensor Abnormal
10560 L.Port LATCH Sensor Abnormal
10561 L.Port Door Sensor Abnormal
60/91
10562 L.Port Mapping Sensor Abnormal

10563 L.Port FOUP Door Vacuum Off
10564 L.Port Wafer Protrusion
10565 L.Port FOUP Placement Abnormal
10566 L.Port FOUP Presence Abnormal
10567 L.Port No IO Signal
10568 L.Port Mapping Parameter Abnormal
10569 L.Port Up/Down Abnormal by Interlock
10570 L.Port Fan Alarm
10571 L.Port Encoder Abnormal
10572 L.Port Door Up-Down Servo Alarm
10573 L.Port Door Lower end Overrun
10574 L.Port Pinch Dock
10575 L.Port Pinch Up/Down
10576 L.Port Mapping Data Abnormal
10577 L.Port Wafer Set No Good
10578 L.Port Door Up-Down Sensor Abnomal
10579 L.Port Door Hit Abnomal
10580 L.Port Air Insufficient
10581 L.Port Command response Timeover
10582 L.Port Operation Status
10585 L.Port Clamp Not Open
10586 L.Port Clamp Not Close
10588 L.Port Door Clamp Not Open
10589 L.Port Door Clamp Not Close
10591 L.Port Door Not Up Position
10592 L.Port Door Not Down Position
10593 L.Port FOUP Not Undock Position
10594 L.Port FOUP Not Dock Position
10595 L.Port FOUP Door Vacuum Not On
10596 L.Port FOUP Door Vacuum Not Off
10597 L.Port Cassette Detect Error
10598 L.Port Dsc Cassette Detect Error
10600 L.Port Mapping sensor Forward Error
10601 L.Port Mapping sensor Backward Error
10602 L.Port FOUP Door Forward Error
10603 L.Port FOUP Door Backward Error
10604 L.Port Map Sensor Z-Axis Start Pos. Err.
10605 L.Port Map Sensor Z-Axis End Pos. Error
61/91
11000 L.Port Command Error

11001 L.Port System Error
11002 L.Port Command Time Over
11003 L.Port Responce Time Over
11004 L.Port Access Error
11005 L.Port Break Signal Error
11006 L.Port Character Time Over
11007 L.Port Buffer OverFlow
11008 L.Port Parity Error
11009 L.Port Framing Error
11010 L.Port Communication Overrun
11019 L.Port Undefined Error
10050 L.Port RFID Read Error

10070 L.Port Static Alarm(ALM10812)
10071 L.Port Static Cond. Alarm On(CON10813)
10072 L.Port Static Bar Alarm(ALM10610)
10073 L.Port Static Bar Cond. Error(CON10611)
10074 L.Port Static Bar Ion Error(ION10612)
10100 L.Port RFID Command Error
10101 L.Port RFID System Error
10102 L.Port RFID Command Time Over
10103 L.Port RFID Responce Time Over
10104 L.Port RFID Access Error
10105 L.Port RFID Break Signal Error
10106 L.Port RFID Character Time Over
10107 L.Port RFID Buffer OverFlow
10108 L.Port RFID Parity Error
10109 L.Port RFID Framing Error
10110 L.Port RFID Communication Overrun
10119 L.Port RFID Undefined Error
10200 L.Port Bcr Command Error
10201 L.Port Bcr System Error
10202 L.Port Bcr Command Time Over
10203 L.Port Bcr Responce Time Over
10204 L.Port Bcr Access Error
10205 L.Port Bcr Break Signal Error
10206 L.Port Bcr Character Time Over
62/91
10207 L.Port Bcr Buffer OverFlow

10208 L.Port Bcr Parity Error
10209 L.Port Bcr Framing Error
10210 L.Port Bcr Communication Overrun
10219 L.Port Bcr Undefined Error
12000 R.Port 300W.Cass Pres. Det. Err(PH10602)

12001 R.Port 200W.Cass Pres. Det. Err(PH10602)
12002 R.Port 300W.Cass Place Det. Err(PH10601)
12003 R.Port 200W.Cass Place Det. Err(PH10603)
12010 R.Port Wafer Displace still ON(PH*****)
12011 R.Port Door still Open Error(L10611)
12012 R.Port Door Open Error(L10611)
12013 R.Port Door still Close Error(L10612)
12014 R.Port Door Close Error(L10612)
12015 R.Port still Dock Error(L10607)
12016 R.Port Dock Error(L10607)
12017 R.Port Undock still ON(L10608)
12018 R.Port Undock Error(L10608)
12019 R.Port Latch Key still Open Err(L10609)
12020 R.Port Latch Key Open Error(L10609)
12021 R.Port Latch Key still Close Err(L10610)
12022 R.Port Latch Key Close Error(L10610)
12023 R.Port Door Vacuum still ON(PSW10613)
12024 R.Port Door Vacuum Error(PSW10613)
12050 R.Port RFID Read Error
12070 R.Port Static Alarm(ALM10810)
12071 R.Port Static Cond. Alarm On(CON10811)
12072 R.Port Static Bar Alarm(ALM10607)
12073 R.Port Static Bar Cond. Error(CON10608)
12074 R.Port Static Bar Ion Error(ION10609)
12080 R.Port Wafer Detect Error
12100 R.Port RFID Command Error

12101 R.Port RFID System Error
12102 R.Port RFID Command Time Over
12103 R.Port RFID Responce Time Over
63/91
12104 R.Port RFID Access Error

12105 R.Port RFID Break Signal Error
12106 R.Port RFID Character Time Over
12107 R.Port RFID Buffer OverFlow
12108 R.Port RFID Parity Error
12109 R.Port RFID Framing Error
12110 R.Port RFID Communication Overrun
12119 R.Port RFID Undefined Error
12200 R.Port Bcr Command Error
12201 R.Port Bcr System Error
12202 R.Port Bcr Command Time Over
12203 R.Port Bcr Responce Time Over
12204 R.Port Bcr Access Error
12205 R.Port Bcr Break Signal Error
12206 R.Port Bcr Character Time Over
12207 R.Port Bcr Buffer OverFlow
12208 R.Port Bcr Parity Error
12209 R.Port Bcr Framing Error
12210 R.Port Bcr Communication Overrun
12219 R.Port Bcr Undefined Error
12500 R.Port Checksum Error

12502 R.Port cannot receive Command
12503 R.Port Door Up/down error by ForeignObj
12505 R.Port Alarm happen
12506 R.Port Command in Processing
12507 R.Port Operation Mode Change Error
12508 R.Port Mapping command cannot receive
12511 R.Port Commd cannot execute by Interlock
12512 R.Port Not detect Cassette by Interlock
12513 R.Port Not Original Pos. by Interlock
12514 R.Port Loading Not End by Interlock
12515 R.Port Clamp Not End by Interlock
12516 R.Port Dock Not End by Interlock
12517 R.Port Vacuum Not End by Interlock
12518 R.Port Unlatch Not End by Interlock
12519 R.Port Door Open Not End by Interlock
12520 R.Port Mapping Not Start by Interlock
64/91
12521 R.Port Mapping Not End by Interlock

12522 R.Port Door Not Up by Interlock
12523 R.Port Not Undock by Interlock
12524 R.Port FOUP still detected by Interlock
12525 R.Port FOUP cannot Open by Interlock
12526 R.Port Door Not Close by Interlock
12527 R.Port Door Not Open by Interlock
12529 R.Port Door cannot Close(2) by Interlock
12530 R.Port Interlock Map Sensor Not Return
12531 R.Port Interlock Abso Parameter
12535 R.Port Auto Calibration Not 1st Wafer
12536 R.Port Auto Calibration Not 25st Wafer
12537 R.Port Mode Change Abnomal
12538 R.Port Door Close(1) by Interlock
12541 R.Port Clamp Timeover
12542 R.Port UnClamp Timeover
12543 R.Port Dock Timeover
12544 R.Port Undock Timeover
12545 R.Port Latch Timeover
12546 R.Port Unlatch Timeover
12547 R.Port Vacuum Timeover
12548 R.Port Unvacuum Timeover
12549 R.Port Door Open Timeover
12550 R.Port Door Close Timeover
12551 R.Port Mapping Forward Timeover
12552 R.Port Mapping Backward Timeover
12553 R.Port Return Origin Timeover
12554 R.Port Loading Timeover
12555 R.Port Unloading Timeover
12556 R.Port Set Position Timeover
12557 R.Port Mapping sensor Ready Timeover
12558 R.Port Clamp Sensor Abnormal
12559 R.Port Dock Sensor Abnormal
12560 R.Port LATCH Sensor Abnormal
12561 R.Port Door Sensor Abnormal
12562 R.Port Mapping Sensor Abnormal
12563 R.Port FOUP Door Vacuum Off
12564 R.Port Wafer Protrusion
12565 R.Port FOUP Placement Abnormal
65/91
12566 R.Port FOUP Presence Abnormal

12567 R.Port No IO Signal
12568 R.Port Mapping Parameter Abnormal
12569 R.Port Up/Down Abnormal by Interlock
12570 R.Port Fan Alarm
12571 R.Port Encoder Abnormal
12572 R.Port Door Up-Down Servo Alarm
12573 R.Port Door Lower end Overrun
12574 R.Port Pinch Dock
12575 R.Port Pinch Up/Down
12576 R.Port Mapping Data Abnormal
12577 R.Port Wafer Set No Good
12578 R.Port Door Up-Down Sensor Abnomal
12579 R.Port Door Hit Abnomal
12580 R.Port Air Insufficient
12581 R.Port Command response Timeover
12582 R.Port Operation Status
12585 R.Port Clamp Not Open
12586 R.Port Clamp Not Close
12588 R.Port Door Clamp Not Open
12589 R.Port Door Clamp Not Close
12591 R.Port Door Not Up Position
12592 R.Port Door Not Down Position
12593 R.Port FOUP Not Undock Position
12594 R.Port FOUP Not Dock Position
12595 R.Port FOUP Door Vacuum Not On
12596 R.Port FOUP Door Vacuum Not Off
12597 R.Port Cassette Detect Error
12598 R.Port Dsc Cassette Detect Error
12600 R.Port Mapping sensor Forward Error
12601 R.Port Mapping sensor Backward Error
12602 R.Port FOUP Door Forward Error
12603 R.Port FOUP Door Backward Error
12604 R.Port Map Sensor Z-Axis Start Pos. Err
12605 R.Port Map Sensor Z-Axis End Pos. Error
13000 R.Port Command Error
13001 R.Port System Error
13002 R.Port Command Time Over
13003 R.Port Responce Time Over
66/91
13004 R.Port Access Error

13005 R.Port Break Signal Error
13006 R.Port Character Time Over
13007 R.Port Buffer OverFlow
13008 R.Port Parity Error
13009 R.Port Framing Error
13010 R.Port Communication Overrun
13019 R.Port Undefined Error
14100 Robot R Axis Motor Error

14101 Robot T Axis Motor Error
14102 Robot Z Axis Motor Error
14103 Robot Arm Vacuum Error(Robot PSW)
14104 Robot Teach Error
14105 Robot Teach Timer Over Error
14106 Robot Vacuum Error(PSW10228)
14107 Robot Vacuum still ON(PSW10228)
14108 Robot Slot Data Error
14109 Robot Stage Data Error
14110 Robot Command Error
14111 Robot System Error
14112 Robot Command Time Over
14113 Robot Responce Time Over
14114 Robot Access Error
14115 Robot Break Signal Error
14116 Robot Character Time Over
14117 Robot Buffer OverFlow
14118 Robot Parity Error
14119 Robot Framing Error
14120 Robot Communication Overrun
14129 Robot Undefined Error
14130 Robot Teachpendant Command Error
14131 Robot Teachpendant System Error
14132 Robot Teachpendant Command Time Over
14133 Robot Teachpendant Responce Time Over
14134 Robot Teachpendant Access Error
14135 Robot Teachpendant Break Signal Error
14136 Robot Teachpendant Character Time Over
67/91
14137 Robot Teachpendant Buffer OverFlow

14138 Robot Teachpendant Parity Error
14139 Robot Teachpendant Framing Error
14140 Robot Teachpendant Communication Overrun
14149 Robot Teachpendant Undefined Error
14150 Robot Get Wafer Error
14151 Robot Get Wafer Error
14152 Robot Vacuum Error(Robot PSW)
14153 Robot Get Wafer Left Side Err.(PH10815)
14154 Robot Get Wafer Right Side Err.(PH10814)
14200 Robot Params Set Error(PMC10201)
14201 Robot CW Limit Det.Error(PMC10201)
14202 Robot CCW Limit Det.Err.(PMC10201)
14203 Robot Pulse Over Error(PMC10201)
14204 Robot Origin Det. Error(PMC10201)
14205 Robot Memory Error(PMC10201)
14206 Robot System Error(PMC10201)
14207 Robot Command Time Over(PMC10201)
14208 Robot Move Time Over(PMC10201)
14209 Robot Responce Time Over(PMC10201)
14210 Robot Command Error(PMC10201)
14211 Robot Access Error(PMC10201)
14219 Robot Default Error(PMC10201)
14220 Robot Move Alarm(ALM10851)
16000 Plate 200 Vacuum still ON Err.(PSW10802)

16001 Plate 200 Vacuum Error(PSW10802)
16002 Plate 300 Vacuum still ON Err.(PSW10803)
16003 Plate 300 Vacuum Error(PSW10803)
16010 Plate Upper still ON Error(L10651)
16011 Plate Upper Det.Error(L10651)
16012 Plate Lower still ON Error(L10652)
16013 Plate Lower Det.Error(L10652)
16100 Plate Move Params Set Error(PMC10202)
16101 Plate Move CW Limit Det.Error(PMC10202)
16102 Plate Move CCW Limit Det.Err.(PMC10202)
16103 Plate Move Pulse Over Error(PMC10202)
16104 Plate Move Origin Det. Error(PMC10202)
68/91
16105 Plate Move Memory Error(PMC10202)

16106 Plate Move System Error(PMC10202)
16107 Plate Move Command Time Over(PMC10202)
16108 Plate Move Move Time Over(PMC10202)
16109 Plate Move Responce Time Over(PMC10202)
16110 Plate Move Command Error(PMC10202)
16111 Plate Move Access Error(PMC10202)
16119 Plate Move Another Error(PMC10202)
16120 Plate Move Alarm(ALM10852)
18000 Alig Size 200 Detect Error(PH10845)

18001 Alig Size 300 Detect Error(PH10846)
18002 Alig Pad Vacuum Error(PSW10804)
18003 Alig Pad Vacuum still ON(PSW10804)
18004 Alig 200 Pad Detect Error(PH10649)
18005 Alig 200 Pad still ON Err.(PH10649)
18006 Alig 300 Pad Detect Error(PH10650)
18007 Alig 300 Pad still ON Err.(PH10650)
18008 Alig Lamp End Pos Detect Error((L10701)
18009 Alig Lamp End Pos still ON Error(L10701)
18010 Alig Lamp Home Pos Detect E.((L10702)
18011 Alig Lamp Home Pos still ON E.(L10702)
18050 Aligner Lamp Service Life
18072 Alig Static Bar Alarm Error(ALM10601)
18073 Alig Static Bar Cond. Error(CON10602)
18074 Alig Static Bar Ion Error(ION10603)
18090 Aligner Range Over
18091 Wafer Alignment Error
18092 Alig DSP Command Time Over
18093 Alig DSP Communication Error
18094 Alig DSP System Error
18095 Alig CCD Measure Error
18096 Wafer Notch Double Detect Error
18097 Wafer Notch/Flat Detect Error
18098 Wafer Notch Data Detect Error
18099 Wafer Notch Data Position Detect Error
18100 Alig X Axis Params Set Error(PMC20201)
18101 Alig X Axis CW Limit Det.Error(PMC10206)
69/91
18102 Alig X Axis CCW Limit Det.Err.(PMC10206)

18103 Alig X Axis Pulse Over Error(PMC10206)
18104 Alig X Axis Origin Det. Error(PMC10206)
18105 Alig X Axis Memory Error(PMC10206)
18106 Alig X Axis System Error(PMC10206)
18107 Alig X Axis Command Time Over(PMC10206)
18108 Alig X Axis Move Time Over(PMC10206)
18109 Alig X Axis Responce Time Over(PMC10206)
18110 Alig X Axis Command Error(PMC10206)
18111 Alig X Axis Access Error(PMC10206)
18119 Alig X Axis Another Error(PMC10206)
18120 Alig X Axis Move Alarm(ALM10848)
18200 Alig Y Axis Params Set Error(PMC10207)
18201 Alig Y Axis CW Limit Det.Error(PMC10207)
18202 Alig Y Axis CCW Limit Det.Err.(PMC10207)
18203 Alig Y Axis Pulse Over Error(PMC10207)
18204 Alig Y Axis Origin Det. Error(PMC10207)
18205 Alig Y Axis Memory Error(PMC10207)
18206 Alig Y Axis System Error(PMC10207)
18207 Alig Y Axis Command Time Over(PMC10207)
18208 Alig Y Axis Move Time Over(PMC10207)
18209 Alig Y Axis Responce Time Over(PMC10207)
18210 Alig Y Axis Command Error(PMC10207)
18211 Alig Y Axis Access Error(PMC10207)
18219 Alig Y Axis Another Error(PMC10207)
18220 Alig Y Axis Move Alarm(ALM10849)
18300 Alig T Axis Params Set Error(PMC10208)
18301 Alig T Axis CW Limit Det.Error(PMC10208)
18302 Alig T Axis CCW Limit Det.Err.(PMC10208)
18303 Alig T Axis Pulse Over Error(PMC10208)
18304 Alig T Axis Origin Det. Error(PMC10208)
18305 Alig T Axis Memory Error(PMC10208)
18306 Alig T Axis System Error(PMC10208)
18307 Alig T Axis Command Time Over(PMC10208)
18308 Alig T Axis Move Time Over(PMC10208)
18309 Alig T Axis Responce Time Over(PMC10208)
18310 Alig T Axis Command Error(PMC10208)
18311 Alig T Axis Access Error(PMC10208)
70/91
18319 Alig T Axis Another Error(PMC10208)

18320 Alig T Axis Move Alarm(ALM10850)
20000 UV Light Level Lower Limit Error

20022 UV Lamp Origin Detect Error(CSW10839)
20024 UV Cover Upper Detect Error(L10719)
20025 UV Cover Upper still ON Error(L10719)
20026 UV Cover Lower Detect Error(L10720)
20027 UV Cover Lower still ON Error(L10720)
20028 UV Lamp Outer Shut.Open Error(L10717)
20029 UV Lamp Outer Shut.still Open(L10717)
20030 UV Lamp Outer Shut.Close Error(L10718)
20031 UV Lamp Outer Shut.still Close(L10718)
20032 UV Exhust Temp. Error(TC10402)
20034 UV N2 Supply Press Error(PSW10805)
20036 UV Lamp ON Error(UVI10721)
20038 UV Not Stable(UVI10722)
20040 UV Lamp Shut.Open Error(UVI10723)
20041 UV Lamp Shut.still Open Error(UVI10723)
20042 UV Lamp Shut.Close Error(UVI10724)
20043 UV Lamp Shut.still Close Error(UVI10724)
20045 UV ERR Signal still ON Error(UVI10725)
20047 UV Lamp ERR still ON Error(UVI10725)
20048 UV Cooling Signal Detect Error(UVI10727)
20050 UV CCD Shutter Close Detect Err.(L10703)
20051 UV CCD Shutter still Close Error(L10703)
20052 UV Sensor Lower Detect Error(L10704)
20053 UV Sensor Lower still ON Error(L10704)
20054 UV Sensor Upper Detect Error(L10705)
20055 UV Sensor Upper still ON Error(L10705)
20056 UV CCD Shutter OPEN Detect Err.(L10711)
20057 UV CCD Shutter still OPEN Error(L10711)
20060 UV Irradiation Not Start Error
20061 UV Irradiation Not Finish Error
20062 UV Light Level Measurement Error
20070 UV Temp Alarm Detect Error
20071 UV Exhaust Temp. Upper Limit Error
20072 Alig FAN Alarm(ALM10847)
20073 UV Lamp Origin Detect Error(CSW10839)
71/91
20074 UV Cover Lower Detect Error(L10720)

20075 UV Lamp Outer Shut.Open Error(L10717 )
20076 UV Lamp Outer Shut.still Open(L10717)
20077 UV Lamp Outer Shut.Close Error(L10718)
20078 UV Lamp Outer Shut.still Close(L10718)
20079 UV N2 Supply Press Error(PSW10805)
20080 UV Lamp Shut.Open Error(UVI10723)
20081 UV Lamp Shut.still Open Error(UVI10723)
20082 UV Lamp Shut.Close Error(UVI10724)
20083 UV Lamp Shut.still Close Error(UVI10724)
20084 UV CCD Shutter Close Detect Err.(L10703)
20085 UV Lamp Service Life
20086 UV Sensor Lower Detect Error(L10704)
20087 UV Sensor Lower Still ON Error(L10704)
20088 UV Sensor Upper Detect Error(L10705)
20089 UV Sensor Upper Still ON Error(L10705)
20120 UV Temp Range Over
20121 UV Temp Under Range Over
20122 UV Temp System Error
20123 UV Temp Command Time Over Error
20124 UV Temp Responce Time Over Error
20125 UV Temp Access Error
20129 UV Temp Default Error
22000 Peel Tape Runs Short(PH10733)

22001 Peel Waste Tape Full(L10742)
22010 Peel Table Vacuum still ON(PSW10806)
22011 Peel Table Vacuum Error(PSW10806)
22012 Peel Pin Vacuum still ON(PSW10807)
22013 Peel Pin Vacuum Error(PSW10807)
22020 Peel Trigger still Upper(L10745)
22021 Peel Trigger Upper Error(L10745)
22022 Peel Trigger still Lower(L10746)
22023 Peel Trigger Lower Error(L10746)
22024 Peel Pin still Upper(PH10753)
22025 Peel Pin Upper Error(PH10753)
22026 Peel Pin still Lower(PH10754)
22027 Peel Pin Lower Error(PH10754)
72/91
22028 Peel Pinch Roll still Close Err.(L10743)

22029 Peel Pinch Roll Close Error(L10743)
22030 Peel Pinch Roll still Open Err.(L10744)
22031 Peel Pinch Roll Open Error(L10744)
22032 Peel Feed Swing Upper(PH10734)
22033 Peel Feed Swing still Upper(PH10734)
22034 Peel Feed Swing Middle(PH10735)
22035 Peel Feed Swing still Middle(PH10735)
22036 Peel Feed Swing Lower(PH10736)
22037 Peel Feed Swing still Lower (PH10736)
22038 Peel Waste Swing Upper(PH10739)
22039 Peel Waste Swing still Upper(PH10739)
22040 Peel Waste Swing Middle(PH10740)
22041 Peel Waste Swing still Middle(PH10740)
22042 Peel Waste Swing Lower(PH10741)
22043 Peel Waste Swing still Lower(PH10741)
22044 Peel Trigger Check Error(PH10747)
22046 Peel Feed Shaft Tape Set Error(PSW10664)
22047 Peel Waste Shaft Tape Set Err.(PSW10661)
22048 Peel Wafer ID Read Error
22050 Peel W.Edge Detect Error(LAI10748)
22051 Peel Back Detect Error(PH10737)
22052 Peel Front Detect Error(PH10738)
22053 Peel Retry Over Error
22054 Peel Trigger Presence Det. Err(TL10731)
22055 Peel Trigger Thin Detect Error(TL10732)
22056 Peel Trigger Thin still ON Err.(TL10732)
22060 P.Table Vacuum Error(PSW10806)
22061 P.Table Vacuum Error(PSW10806)
22070 P.Table Static Alarm On Error(ALM10653)
22071 P.Table Static Cond. Alarm On(CON10654)
22072 P.Unit Static1 Alarm On Error(ALM10749)
22073 P.Unit Static1 Cond. Alarm On(CON10750)
22074 P.Unit Static2 Alarm On Error(ALM10751)
22075 P.Unit Static2 Cond. Alarm On(CON10752)
22080 Peel Table Temp. Error
22081 Peel Table Temp. Upper Limit Over
22082 P.Table Therm Trip still ON(THP10842)
22100 Peel Table Params Set Error(PMC10203)
73/91
22101 Peel Table CW Limit Det.Error(PMC10203)

22102 Peel Table CCW Limit Det.Err.(PMC10203)
22103 Peel Table Pulse Over Error(PMC10203)
22104 Peel Table Origin Det. Error(PMC10203)
22105 Peel Table Memory Error(PMC10203)
22106 Peel Table System Error(PMC10203)
22107 Peel Table Command Time Over(PMC10203)
22108 Peel Table Move Time Over(PMC10203)
22109 Peel Table Responce Time Over(PMC10203)
22110 Peel Table Command Error(PMC10203)
22111 Peel Table Access Error(PMC10203)
22119 Peel Table Default Error(PMC10203)
22120 Peel Table Move Alarm(ALM10853)
22200 Peel Bar Params Set Error(PMC10204)
22201 Peel Bar CW Limit Det.Error(PMC10204)
22202 Peel Bar CCW Limit Det.Err.(PMC10204)
22203 Peel Bar Pulse Over Error(PMC10204)
22204 Peel Bar Origin Det. Error(PMC10204)
22205 Peel Bar Memory Error(PMC10204)
22206 Peel Bar System Error(PMC10204)
22207 Peel Bar Command Time Over(PMC10204)
22208 Peel Bar Move Time Over(PMC10204)
22209 Peel Bar Responce Time Over(PMC10204)
22210 Peel Bar Command Error(PMC10204)
22211 Peel Bar Access Error(PMC10204)
22219 Peel Bar Default Error(PMC10204)
22220 Peel Bar Move Alarm(ALM10854)
22300 Peel Pinch Params Set Error(PMC10205)
22301 Peel Pinch CW Limit Det.Error(PMC10205)
22302 Peel Pinch CCW Limit Det.Err.(PMC10205)
22303 Peel Pinch Pulse Over Error(PMC10205)
22304 Peel Pinch Origin Det. Error(PMC10205)
22305 Peel Pinch Memory Error(PMC10205)
22306 Peel Pinch System Error(PMC10205)
22307 Peel Pinch Command Time Over(PMC10205)
22308 Peel Pinch Move Time Over(PMC10205)
22309 Peel Pinch Responce Time Over(PMC10205)
22310 Peel Pinch Command Error(PMC10205)
74/91
22311 Peel Pinch Access Error(PMC10205)

22319 Peel Pinch Default Error(PMC10205)
22320 Peel Pinch Move Alarm(ALM10855)
22400 Peel Turn Params Set Error(PMC10301)
22401 Peel Turn CW Limit Det.Error(PMC10301)
22402 Peel Turn CCW Limit Det.Err.(PMC10301)
22403 Peel Turn Pulse Over Error(PMC10301)
22404 Peel Turn Origin Det. Error(PMC10301)
22405 Peel Turn Memory Error(PMC10301)
22406 Peel Turn System Error(PMC10301)
22407 Peel Turn Command Time Over(PMC10301)
22408 Peel Turn Move Time Over(PMC10301)
22409 Peel Turn Responce Time Over(PMC10301)
22410 Peel Turn Command Error(PMC10301)
22411 Peel Turn Access Error(PMC10301)
22419 Peel Turn Default Error(PMC10301)
22420 Peel Turn Move Alarm(ALM10856)
22500 Peel Table Temp Range Over
22501 Peel Table Temp Under Range Over
22502 Peel Table Temp System Error
22503 Peel Table Temp Command Time Over Error
22504 Peel Table Temp Responce Time Over Error
22505 Peel Table Temp Access Error
22509 Peel Table Temp Default Error
24100 OCR Axis Params Set Error(PMC10302)

24101 OCR Axis CW Limit Det.Error(PMC10302)
24102 OCR Axis CCW Limit Det.Err.(PMC10302)
24103 OCR Axis Pulse Over Error(PMC10302)
24104 OCR Axis Origin Det. Error(PMC10302)
24105 OCR Axis Memory Error(PMC10302)
24106 OCR Axis System Error(PMC10302)
24107 OCR Axis Command Time Over(PMC10302)
24108 OCR Axis Move Time Over(PMC10302)
24109 OCR Axis Responce Time Over(PMC10302)
24110 OCR Axis Command Error(PMC10302)
24111 OCR Axis Access Error(PMC10302)
24119 OCR Axis Default Error(PMC10302)
75/91
24120 OCR Move Alarm(ALM10857)

24200 OCR Comm. Command Error
24201 OCR Comm. System Error
24202 OCR Comm. Command Time Over
24203 OCR Comm. Responce Time Over
24204 OCR Comm. Access Error
24205 OCR Comm. Break Signal Error
24206 OCR Comm. Character Time Over
24207 OCR Comm. Buffer OverFlow
24208 OCR Comm. Parity Error
24209 OCR Comm. Framing Error
24210 OCR Comm. Communication Overrun
24219 OCR Comm. Undefined Error
34000 1st Right Cover Opens(CSW10833)

34001 2nd Right Cover Open(CSW10834)
34002 1st Left Cover Open(CSW10835)
34003 2nd Left Cover Open(CSW10836)
34004 3rd Left Cover Open(CSW10837)
34005 4th Left Cover Open(CSW10838)
34006 All Safety Cover Open(CSW10840)
34007 Main Air Insufficient(PSW10808)
34008 Teach Pendant EMG still ON(TEM10841)
34009 Interlock Override Detect Err.(KEY10809)
34010 Hepa Particle Err.(HEP10712)
34011 Hepa filter change Err.(HEP10713)
34012 Hepa Alarm Err.(ALM10714)
34013 Ups Power Supply Err.(CUT10728)
34014 Ups Important Trouble Err.(TRB10729)
34015 Ups Alarm Err.(ALM10730)
34016 Dry Air is Insufficient(PSW10810)
35010 External Log PC Command Error

35011 External Log System Error
35012 External Log Time Over Error
35013 External Log Responce Time Over
35014 External Log Access Error
35015 External Log Brake Signal Error
35016 External Log Character Time Over
76/91
35017 External Log Buffer OverFlow

35018 External Log Parity Error
35019 External Log Framing Error
35120 External Log Over Run Error
35129 External Log Undefined Error
36010 Handy BCR Command Error

36011 Handy BCR System Error
36012 Handy BCR Time Over Error
36013 Handy BCR Responce Time Over
36014 Handy BCR Access Error
36015 Handy BCR Brake Signal Error
36016 Handy BCR Character Time Over
36017 Handy BCR Buffer OverFlow
36018 Handy BCR Parity Error
36019 Handy BCR Framing Error
36120 Handy BCR Over Run Error
36129 Handy BCR Undefined Error
60000 Panel Page Change Time Over

60001 Panel Data Read Time Over
60010 Panel CSV Transfer Reset Error
60011 Panel CSV Transfer Status Error
60012 Panel CSV Transfer Ready Error
60013 Panel CSV Transfer Error
60014 Panel CSV No File Number
60015 Panel CSV File Error
60016 Panel CSV Device Malfunction Error
60017 Panel Not Card
60018 Panel CSV Read Error
60019 Panel CSV Write Error
60020 Panel Card Malfaunction Error
60021 Panel CSV Transfer Trigger Error
60022 Panel CSV Info Copy Trigger Error
60050 Panel Logging Trigger Bit Clr Error
60051 Panel Logging Trigger Bit ON Error
60052 Panel Logging File Make Error
77/91
60053 Panel Logging Run Log File Make Error

60054 Panel Logging Error Log File Make Error
60055 Panel Card Status Clr Error
60056 Panel Logging Clr End Bit Error
50160 Default Com. Command Error

50161 Default Com. System Error
50162 Default Com. Command Time Over
50163 Default Com. Responce Time Over
50164 Default Com. Access Error
50165 Default Com. Break Signal Error
50166 Default Com. Character Time Over
50167 Default Com. Buffer OverFlow
50168 Default Com. Parity Error
50169 Default Com. Framing Error
50170 Default Com. Communication Overrun
50171 Default Com. Undefined Error
51000 Error System Error
51001 Auto System Error
51500 SECS ERROR
51501 Module Check Error
51520 Default PMC Set Param Error
51521 Default PMC CW Limit Det.Error
51522 Default PMC CCW Limit Det.Error
51523 Default PMC Pulse Over Error
51524 Default PMC Origin Det. Error
51525 Default PMC Memory Error
51526 Default PMC System Error
51527 Default PMC Command Time Over
51528 Default PMC Move Time Over
51529 Default PMC Responce Time Over
51530 Default PMC Command Error
51531 Default PMC Access Error
51539 Default PMC Undefined Error
51540 Default Temp Range Over
51541 Default Temp Under Range Over
51542 Default Temp System Error
51543 Default Temp Command Time Over Error
78/91
51544 Default Temp Responce Time Over Error

51545 Default Temp Access Error
51546 Default Temp Default Error
53000 Auto System Error
53010 Auto Sytem Work Eject Error
53020 Initial Start Inter Lock Error
53021 Auto Start Inter Lock Error
53022 Cycle Start Inter Lock Error
53023 Semi-Auto Start InterLock Error
53024 Software InterLock Error
70001 Left Loadport Unit Error Reset Error
70002 Right Loadport Unit Error Reset Error
70003 Robot Unit Error Reset Error
70004 Plate Unit Error Reset Error
70005 Aligner Unit Error Reset Error
70006 Uv Unit Error Reset Error
70007 Peel Unit Error Reset Error
70008 Ocr Unit Error Reset Error
79/91
12. Remote Control
Remote commands which can be supported

In
In Local
Command Function Remote Remarks
By Host
By Host
INITIAL Initial resetting to be done No Yes
START Auto operation to be started No Yes
The machine to be stopped after
STOP No Yes
processing wafers is unloaded.
The machine to be stopped after the
PAUSE No Yes
current process is completed
RESET Error & stop condition to be reset No Yes
ABORT The machine to be stopped promptly No Yes
BUZZER_RESET Buzzer to be stopped No Yes
PPSELECT Process Program Change No Yes
MAP_PROCEED Proceed with carrier. No Yes
MAP_CANCEL Cancel carrier. No Yes
OPE_ACCESS_R Operator Access SW for right cassette. No Yes
OPE_ACCESS_L Operator Access SW for left cassette. No Yes
SLOTMAP Slot Mapping No Yes (Option)
UNCLAMP Unclamp No Yes (Option)
HOST_START Host Start No Yes (Option)
HOST_LOT_ID Lot ID No Yes (Option)
13. Resolutions of Clock

Resolution: 1/1768 sec.
80/91
14. Process Program Control

14-1 Process Program Detail
1.Recipe Number is send <PPID>.
2.When <PPBODY> is sent by S7, F3 (Process Program Send), operation recipe and the setting
recipe of the recipe number is changed, and stored in SRAM-Card. But, to stored into flash card.
Manual operation is required.
3.When <PPBODY> is required in S7, F5 (Process Program Request), the current recipe is not
changed, and the data stored in SRAM-Card is sent.
4.Equipment receives S7, F3 (Process Program Send), S7, F5 (Process Program Request) in the
condition where the equipment is in “safe” condition.
That is the equipment is in only IDLE or READY.
5.When Equipment receives S7, F3 (Process Program Send), S7, F5 (Process Program Request),
the equipment becomes MANUAL condition at recipe writing or reading, and after the
writing/reading returns to the original condition.
But, in the case that 10.WaferSize or 3.WaferType etc., is changed by S7, F3 (Process Program
Send) In before/after program send, Equipment status returns to IDLE surely.
14-2 Process Program Data Collection

RecipeNumber SV B1 (51) -- ECMIN = 1 Recipe Number is Used.
PPID ECMAX = 100
Range /
BYTE Enumeration /
CP Name Byte Unit Description
Count ECMIN / ECMAX /
ECDEF
1-2 Reserve 2byte --
3-32 Recipe Name -- Recipe Name

30byte
33 Wafer Type 0:NOTCH Wafer Type select

1byte --
1:FLAT
34-35 Wafer Thickness ECMIN = 10 Wafer Thickness
2byte um
ECMAX = 9999
36-37 BG Tape Thickness ECMIN = 0 BG Tape Thickness
2byte um
ECMAX = 999
38-39 Peel Tape Thickness ECMIN = 0 Peel Tape Thickness
2byte um
ECMAX = 999
40 Cassette Mode 0:Parallel Cassette Mode select
1byte --- 1:Cross
2:Single
81/91
41 Space Space
1byte ---
42 RFID Select 0:No Use RFID reader select

1byte --
1:Use (Option)
43 Wafer Size 0:200mm Wafer Size select
1byte ---
1:300mm
44 Cleaning Wafer Select 0:No Use Cleaning Wafer select
1byte --
1:Use
45-60 Left Cass Name Left Cassette Loadport
16byte --
Name
61 Left Cass Number ECMIN = 1 Left Cassette Loadport
1byte --
ECMAX = 10 Number
62 Space
1byte
63-78 Right Cass Name Right Cassette Loadport

16byte --
Name
79 Right Cass Number ECMIN = 11 Right Cassette Loadport
1byte --
ECMAX = 20 Number
80 Space
1byte
81 Cass BCR 0:No Use Cassette barcode reading

1byte --
1:Use select. (Option)
82 Mapping Select 0:No Use Mapping Select
1byte ---
1:Use (Option)
83 Wafer Transfer ECMIN = 1 Acc. Of Wafer Transfer in
1byte %
R-Axis Acc. ECMAX =100 R-axis transfer with wafer.
84 Wafer Transfer ECMIN = 1 Speed Of Wafer Transfer in
1byte %
R-Axis Speed ECMAX =100 R-axis transfer with wafer.
1byte %
T-Axis Acc. ECMAX =100 T-axis transfer with wafer.
1byte %
T-Axis Speed ECMAX =100 T-axis transfer with wafer.
1byte %
Z-Axis Acc. ECMAX =100 Z-axis transfer with wafer.
1byte %
Z-Axis Speed ECMAX =100 Z-axis transfer with wafer.
89 Wafer Transfer Move ECMIN = 1 Acc. Of Wafer Transfer in
1byte %
R-Axis Acc ECMAX =100 R-axis transfer without wafer.
90 Wafer Transfer Move ECMIN = 1 Wafer Transfer Move
1byte %
R-Axis Speed ECMAX =100 R-Axis Speed without wafer
1byte %
T-Axis Acc ECMAX =100 T-axis transfer without wafer.
1byte %
T-Axis Speed ECMAX =100 T-Axis Speed without wafer
1byte %
Z-Axis Acc ECMAX =100 Z-axis transfer without wafer.
82/91

1byte %
Z-Axis Speed ECMAX =100 Z-Axis Speed without wafer
95 Robot Vacuum Confirmation 0:No Use Robot vacuum check after pick
1byte ---
1:Use up.
96 Space
1byte
97 UV select 0:No Use Use select of the UV.

1byte ---
1:Use (Option)
98-99 UV Total Exposure 2 ECMIN = 0 UV total exposure.
2byte mJ/cm
ECMAX =6000 (Option)
100 N2 Select 0:No Use Use select of the N2 purge.
1byte ---
1:Use (Option)
101-102 N2 Purge Time ECMIN = 0 N2 purge time.
2byte 0.1sec
ECMAX =999 (Option)
103-104 Press Plate Blow Time ECMIN = 0 Press plate blowing time.
2byte 0.1sec
ECMAX =999
105 BG/T Peel Select 0:No Use BG/T Peeling select
1byte ---
1:Use
106 BG/T Peel Table Heater Select 0:No Use BG/T Peeling Table heater select
1byte ---
1:Use
107 BG/T Peel Delay Wind Select 0:No Use BG/T Peel Delay Wind select
1byte ---
1:Use
108 Peel Retry ECMIN = 0 Peeling Retry time
1byte ---
ECMAX = 9
109-110 Peel Preheat Time ECMIN = 0 Peel Preheat time
2byte 0.1sec
ECMAX = 3000
111-112 Peel Table Blow Time ECMIN = 0 BG/T Blow time.
2byte 0.1sec
ECMAX = 999
113-114 Space
2byte --
115-116 Space
2byte --
117-118 Space
2byte --
119 BG/T Trigger Select 0:No Use BG/T Peel trigger select.
1byte ---
1:Use
120-121 Peel End Wind Time ECMIN = 0 Peel/T move end pos. after
2byte 0.1sec
ECMAX = 300 Winding time.
122 Peel Edge Press Count ECMIN = 1 Peel Edge press count.
1byte time
ECMAX = 9
123-124 BG/T Trigger Time ECMIN = 0 BG/T trigger time.
2byte 0.1sec
ECMAX = 999
125-126 Peel Tape Wind Speed ECMIN = 1 Peel/T Wind speed
2byte mm/sec
ECMAX = 50
127-130 Peel Angle ECMIN = -1000 Peeling Angle
4byte *0.1deg
ECMAX = 950 (Option)
83/91
131-132 Space
2byte
133-134 Peel Table Speed to Bar Down ECMIN = 1 Peel Table Speed to Bar Down
2byte mm/sec
Position. ECMAX = 50 Pos.
135-136 Peel Table Speed to Peeling ECMIN = 1 Peel Table Speed to Peeling
2byte mm/sec
Start Position. ECMAX = 50 Start Pos.
137-138 Peel Table Speed to Peeling ECMIN = 1 Peel Table Speed to Peeling
2byte mm/sec
Speed Change Position. ECMAX = 50 Speed change Pos.
139-140 Peel Table Speed to Wind End ECMIN = 1 Peel Table Speed to Wind End
2byte mm/sec
Position. ECMAX = 50 Pos.
141-142 Peel Table Speed to Peeling ECMIN = 1 Peel Table Speed to Peeling End
2byte mm/sec
End Position. ECMAX = 50 Pos.
143-146 Peel Bar Down Position ECMIN = -1000 Peeling Bar Down Position.
4byte *0.01mm
ECMAX = 3000
147-150 Peel Start Pos. ECMIN = -2000 Peel/T Start Position.
4byte *0.01mm
ECMAX = 2000
151-154 Peel Speed Change Pos. ECMIN = 0 Peel/T Speed Change Position.
4byte *0.01mm
ECMAX = 5000
155-158 Peel Wind End Pos. ECMIN = 18000 Peel/T Wind End Position.
4byte *0.01mm
ECMAX = 31000
159-162 Peel End Pos. ECMIN = 18000 Peel/T End Position.
4byte *0.01mm
ECMAX = 31000
163-164 Peel Bar Height of Peel ECMIN = -300 Peel Bar Height
2byte um
Bar Down Position. ECMAX = 5000
2byte um
Start Position. ECMAX = 5000
2byte um
Speed Change Position. ECMAX = 5000
169-170 Peel Bar Height of Wind End ECMIN = -300 Peel Bar Height
2byte um
Position. ECMAX = 5000
171-172 Peel Bar Height of Peeling ECMIN = -300 Peel Bar Height
2byte um
End Position. ECMAX = 5000
173-174 Peel /T Rewind Length ECMIN = 0 Peel/T Rewind Length
2byte *0.1 mm
ECMAX = 600
175-176 Peel /T Delay Wind Length ECMIN = 0 Peel/T Delay Wind Length
2byte *0.1 mm
ECMAX = 600
177-178 Peel/T Wind Length ECMIN = 1500 Peel/T Wind Length
2byte *0.1mm
ECMAX = 3500
179-180 Peel/T Wind End Length ECMIN = 10 Peel/T Wind End Length
2byte *0.1mm
ECMAX = 200
181-182 Peeling Trigger Distance ECMIN = 0 Peel Table Distance for Peeling
2byte *0.01mm
ECMAX = 500 Trigger
183-184 Space
2bye
185-186 Peeling Table Temp. ECMIN = 0 Peel Table Temperature

2byte *0.1degC
ECMAX = 600
84/91
187 OCR Select 0:NoUse (Option)

1byte --
1:Use
188 Space
1byte --
189-218 Recipe Name for OCR OCR Recipe Name

30byte ---
(Option)
219-222 Read Position Of Peel Table ECMIN = 0 (Option)
4byte *0.01mm
For OCR. ECMAX = 92000
223-224 Read Angle Of Peel Table For ECMIN = -1000 Peel Table Read Angle for OCR.
2byte *0.1deg
OCR. ECMAX = 960
225 Left Cassette Type Number ECMIN = 1 Number of the cassette type.
1byte --
ECMAX = 10
226 Space
1byte --
227-242 Left Cassette Type Name Name of the cassette type.

16byte --
243 Left Cassette Slot Number ECMIN = 1 The number of slot for slot.
1byte --
ECMAX = 25
244 Left Cassette Type 0:Foup The Cassette type.
1byte -- 1:Open
2:DSC(Option)
245 Left Cassette Mapping Interlock 0:Disable The setting that mapping is
1byte --
1:Enable possible, or is impossible
1byte %
R-Axis Acc for Left Cass. ECMAX =100 R-axis transfer in cassette.
1byte %
R-Axis Speed for Left Cass ECMAX =100 R-axis transfer in cassette.
1byte %
T-Axis Acc for Left Cass. ECMAX =100 T-axis transfer in cassette.
1byte %
T-Axis Speed for Left Cass ECMAX =100 T-axis transfer in cassette.
1byte %
Z-Axis Acc for Left Cass. ECMAX =100 Z-axis transfer in cassette.
1byte %
Z-Axis Speed for Left Cass ECMAX =100 Z-axis transfer in cassette.
252 Wafer Transfer R-Axis Acc for ECMIN = 1 Acc. Of Wafer Transfer in
1byte %
Left Cass with wafer. ECMAX =100 R-axis transfer in cassette.
253 Wafer Transfer R-Axis Speed ECMIN = 1 Speed Of Wafer Transfer in
1byte %
for Left Cass with wafer ECMAX =100 R-axis transfer in cassette.
254 Wafer Transfer T-Axis Acc for ECMIN = 1 Acc. Of Wafer Transfer in
1byte %
Left Cass with wafer ECMAX =100 T-axis transfer in cassette.
255 Wafer Transfer T-Axis Speed ECMIN = 1 Speed Of Wafer Transfer in
1byte %
for Left Cass with wafer ECMAX =100 T-axis transfer in cassette.
256 Wafer Transfer Z-Axis Acc for ECMIN = 1 Acc. Of Wafer Transfer in
1byte %
Left Cass with wafer ECMAX =100 Z-axis transfer in cassette.
257 Wafer Transfer Z-Axis Speed ECMIN = 1 Speed Of Wafer Transfer in
1byte %
for Left Cass with wafer ECMAX =100 Z-axis transfer in cassette.
85/91
258 Space
1byte
259-262 Left Cassette Pitch ECMIN = 1 Left Cassette Pitch

4byte 0.01mm
ECMAX = 9999
263-266 Left Cassette Mapping Start ECMIN = 29000 Mapping Start Pos for left
4byte 0.01mm
Pos ECMAX = 140000 cassette.
267 Right Cassette Type Number ECMIN = 11 Number of the cassette type.
1byte --
ECMAX = 20
268 Space
1byte
269-284 Right Cassette Type Name Name of the cassette type.

16byte --
285 Right Cassette Slot Number ECMIN = 1 The number of slot for slot.
1byte --
ECMAX = 25
286 Right Cassette Type 0:Foup The Cassette type .
1byte -- 1:Open
2:DSC(Option)
287 Right Cassette Mapping 0:Disable The setting that mapping is
1byte --
Interlock 1:Enable possible, or is impossible
1byte %
R-Axis Acc for Right Cass. ECMAX =100 R-axis transfer in cassette.
1byte %
R-Axis Speed for Right Cass ECMAX =100 R-axis transfer in cassette.
1byte %
T-Axis Acc for Right Cass. ECMAX =100 T-axis transfer in cassette.
1byte %
T-Axis Speed for Right Cass ECMAX =100 T-axis transfer in cassette.
1byte %
Z-Axis Acc for Right Cass. ECMAX =100 Z-axis transfer in cassette.
1byte %
Z-Axis Speed for Right Cass ECMAX =100 Z-axis transfer in cassette.
294 Wafer Transfer R-Axis Acc for ECMIN = 1 Acc. Of Wafer Transfer in
1byte %
Right Cass with wafer. ECMAX =100 R-axis transfer in cassette.
295 Wafer Transfer R-Axis Speed ECMIN = 1 Speed Of Wafer Transfer in
1byte %
for Right Cass with wafer ECMAX =100 R-axis transfer in cassette.
296 Wafer Transfer T-Axis Acc for ECMIN = 1 Acc. Of Wafer Transfer in
1byte %
Right Cass with wafer ECMAX =100 T-axis transfer in cassette.
297 Wafer Transfer T-Axis Speed ECMIN = 1 Speed Of Wafer Transfer in
1byte %
for Right Cass with wafer ECMAX =100 T-axis transfer in cassette.
298 Wafer Transfer Z-Axis Acc for ECMIN = 1 Acc. Of Wafer Transfer in
1byte %
Right Cass with wafer ECMAX =100 Z-axis transfer in cassette.
299 Wafer Transfer Z-Axis Speed ECMIN = 1 Speed Of Wafer Transfer in
1byte %
for Right Cass with wafer ECMAX =100 Z-axis transfer in cassette.
300 Space
1byte
301-304 Right Cassette Pitch 4byte 0.01mm

ECMIN = 1 Right Cassette Pitch
ECMAX = 9999
86/91
305-308 Right Cassette Mapping Start ECMIN = 29000 Mapping Start Pos for Right
4byte 0.01mm
Pos ECMAX = 140000 cassette.
309 Peel Tape Tension Select 0:No Use Peel Tape Tension Select
1byte ---
1:Use
310-311 Peel Tape Tension Time ECMIN = 0 Peel Tape Tension Time
2byte 0.1sec
ECMAX = 999
Space
312 ---
313-316 Peel Tape Tension Wind ECMIN = 0 Peel Tape Tension Wind
4byte 0. 1mm
ECMAX = 200
317 Reserve ---
ASCII character　List
HEX 20 21 22 23 24 25 26 27 28 29 2C 2D 2E 2F
Character [ｽﾍﾟｰｽ] ! " # $ % & ' ( ) , - . /
HEX 30 31 32 33 34 35 36 37 38 39 3A 3B 3D
Character 0 1 2 3 4 5 6 7 8 9 : ; =
HEX 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F
Character A B C D E F G H I J K L M N O
HEX 50 51 52 53 54 55 56 57 58 59 5A 5C 5F
Character P Q R S T U V W X Y Z \ _
HEX 61 62 63 64 65 66 67 68 69 6A 6B 6C 6D 6E 6F
Character a b c d e f g h i j k l m n o
HEX 70 71 72 73 74 75 76 77 78 79 7A 7C
Character p q r s t u v w x y z |
87/91
14-3 Ex. of Program Data

The contents of <PPBODY> that is used for S7,F3/S7,F6.
Program data list is transmitted using binary data.
(Ex. of Typical data)

Hex display of each byte of PPBODY.
13 00 38 22 20 4F 50 45 4E 32 35 20 53 49 4E 47
4C 45 20 33 20 20 20 20 20 20 20 20 20 20 20 20
00 D5 02 C8 00 50 00 02 00 00 00 00 4C 20 38 22
4F 50 45 4E 20 32 35 53 4C 4F 54 20 06 00 52 20
38 22 4F 50 45 4E 20 32 35 53 4C 4F 54 20 10 00
00 01 64 14 64 14 64 14 64 14 64 14 64 14 00 00
00 F4 01 01 32 00 0A 00 01 00 00 00 00 00 14 00
00 00 00 00 00 00 00 00 00 01 32 00 03 00 3E FE
FF FF 00 00 03 00 03 00 03 00 0A 00 0A 00 E8 03
00 00 00 00 00 00 D0 07 00 00 14 50 00 00 14 50
00 00 00 00 00 00 F4 01 B8 0B B8 0B 96 00 78 00
3A 07 1E 00 96 00 00 00 F4 01 00 00 00 00 00 00
00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00
00 00 00 00 00 00 00 00 00 00 28 23 00 00 00 00
06 00 4C 20 38 22 4F 50 45 4E 20 32 35 53 4C 4F
54 20 19 01 01 64 14 64 14 64 14 64 14 64 14 64
14 00 7B 02 00 00 64 0D 02 00 10 00 52 20 38 22
4F 50 45 4E 20 32 35 53 4C 4F 54 20 19 01 01 64
14 64 14 64 14 64 14 64 14 64 14 00 7B 02 00 00
64 0D 02 00 00 00 00 00 00 00 00 00 FF FF FF FF
FF FF FF FF FF FF FF FF FF FF FF FF FF FF FF FF
(Comment)
th
13 1 Reserve
th
00 2 Reserve
th
3 ~ 32 th
38 22 20 4F 50 45 4E 32 35 20 53 49 4E 47 4C
45 20 33 20 20 20 20 20 20 20 20 20 20 20 20
RecipeName [8" OPEN25 SINGLE 2 ]
th
00 33 Wafer Type
88/91
th th
34 ~ 35 Wafer Thickness
th th
36 ~ 37 BG Tape Thickness
th th
38 ~ 39 Peel Tape Thickness
th
02 40 Cassette Mode
th
00 41 Space
th
00 42 RFID Select
th
00 43 Wafer Size
th
00 44 Cleaning Wafer Select
th
45 ~ 60 th
4C 20 38 22 4F 50 45 4E 20 32 35 53 4C 4F 54 20
LeftCassName [L 8"OPEN 25SLOT ]
th
06 61 LeftCassNumber
th
00 62 Space
th
63 ~ 78 th
52 20 38 22 4F 50 45 4E 20 32 35 53 4C 4F 54 20
RightCassName [R 8"OPEN 25SLOT ]
th
10 79 RightCassNumber
th
00 80 Space
th
00 81 CassBCR
th
01 82 MappingSelect
th
64 83 WaferTransferR-AxisAcc.
th
14 84 WaferTransferR-AxisSpeed
th
64 85 WaferTransferT-AxisAcc.
th
14 86 WaferTransferT-AxisSpeed
th
64 87 WaferTransferZ-AxisAcc.
th
14 88 WaferTransferZ-AxisSpeed
th
64 89 WaferTransferMoveR-AxisAcc
th
14 90 WaferTransferMoveR-AxisSpeed
th
64 91 WaferTransferMoveT-AxisAcc
th
14 92 WaferTransferMoveT-AxisSpeed
th
64 93 WaferTransferMoveZ-AxisAcc
th
14 94 WaferTransferMoveZ-AxisSpeed
th
00 95 RobotVacuumConfirmation
th
00 96 Space
th
00 97 UVSelect
th th
98 ~ 99 UVTotalExposure
th
01 100 N2Select
th th
101 ~ 102 N2PurgeTime
th th
103 ~ 104 PressPlateBlowTime
th
00 105 BG/TPeelSelect
th
14 106 BG/TPeelTableHeaterSelect
th
00 107 BG/TPeelDelayWindSelect
th
01 108 PeelRetry
th th
01 109 ~ 110 PeelPreheatTime
th th
01 111 ~ 112 PeelTableBlowTime
89/91
th th
113 ~ 118 Space
th
00 119 BG/TTriggerSelect
th th
120 ~ 121 PeelEndWindTime
th
00 122 peelEdgePressCount
th th
123 ~ 124 BG/TTriggerTime
th th
125 ~ 126 PeelTapeWindSpeed
th th
127 ~ 130 PeelAngle
th th
131 ~ 132 Space
th th
133 ~ 134 PeelTableSpeedToBarDownPosition
th th
135 ~ 136 PeelTableSpeedToPeelingStartPosition
th th
137 ~ 138 PeelTableSpeedToPeelingSpeedChangePosition
th th
139 ~ 140 PeelTableSpeedToWindEndPosition
th th
141 ~ 142 PeelTableSpeedToPeelingEndPosition
th th
143 ~ 146 PeelBarDownPosition
th th
147 ~ 150 PeelStartPos
th th
151 ~ 154 PeelSpeedChangePos
th th
155 ~ 158 PeelWindEndPos
th th
159 ~ 162 PeelEndPos
th th
163 ~ 164 PeelBarHeightOfPeelBarDownPosition
th th
165 ~ 166 PeelBarHeightOfPeelStartPosition
th th
167 ~ 168 PeelBarHeightOfPeelSpeedChangePosition
th th
169 ~ 170 PeelBarHeightOfWindEndPosition
th th
171 ~ 172 PeelBarHeightOfPeelingEndPosition
th th
173 ~ 174 Peel/TRewindLength
th th
175 ~ 176 Peel/TDelayWindLength
th th
177 ~ 178 Peel/TWindLength
th th
179 ~ 180 Peel/TWindEndLength
th th
181 ~ 182 PeelingTriggerDistance
th th
183 ~ 184 Space
th th
185 ~ 186 PeelingTableTemp
th
00 187 OCRSelect
th
00 188 Space
th
189 ~ 218 th
00 00 00 00 00 00 00 00 00 00 00 00 00 00 00
00 00 00 00 00 00 00 00 00 00 00 00 00 00 00
RecipeNameForOCR [ ]
th th
219 ~ 222 ReadPositionOfPeelTableForOCR
th th
223 ~ 224 ReadAngleOfPeelTableForOCR
th
00 225 LeftCassetteTypeNumber
th
06 226 Space
th
227 ~ 242 th
4C 45 46 54 20 43 41 53 53 45 54 54 45 20 20
LeftCassetteTypeName [LEFT CASSETTE ]
th
20 243 LeftCassetteSlotType
th
19 244 LeftCassetteType
90/91
th
01 246 WaferTransferR-AxisAccForLeftCass
th
64 247 WaferTransferR-AxisSpeedForLeftCass
th
14 248 WaferTransferT-AxisAccForLeftCass
th
64 249 WaferTransferT-AxisSpeedForLeftCass
th
14 250 WaferTransferZ-AxisAccForLeftCass
th
64 251 WaferTransferZ-AxisSpeedForLeftCass
th
14 252 WaferTransferR-AxisAccForLeftCassWithWafer
th
64 253 WaferTransferR-AxisSpeedForLeftCassWithWafer
th
14 254 WaferTransferT-AxisAccForLeftCassWithWafer
th
64 255 WaferTransferT-AxisSpeedForLeftCassWithWafer
th
14 256 WaferTransferZ-AxisAccForLeftCassWithWafer
th
64 257 WaferTransferZ-AxisSpeedForLeftCassWithWafer
th
14 258 Space
th th
259 ~ 262 LeftCassettepitch
th th
263 ~ 266 LeftCassetteMappingStartPos
th
00 267 RightCassetteTypeNumber
th
10 268 Space
th
269 ~ 284 th
52 20 38 22 4F 50 45 4E 20 32 35 53 4C 4F 54 20
RightCassetteTypeNam[R 8"OPEN 25SLOT ]
th
19 285 RightCassetteSlotType
th
01 286 RightCassetteType
th
01 287 RightCassetteMappingInterlock
th
64 288 WaferTransferR-AxisAccForRightCass
th
01 289 WaferTransferR-AxisSpeedForRightCass
th
14 290 WaferTransferT-AxisAccForRightCass
th
64 291 WaferTransferT-AxisSpeedForRightCass
th
14 292 WaferTransferZ-AxisAccForRightCass
th
64 293 WaferTransferZ-AxisSpeedForRightCass
th
14 294 WaferTransferR-AxisAccForRightCassWithWafer
th
64 295 WaferTransferR-AxisSpeedForRightCassWithWafer
th
14 296 WaferTransferT-AxisAccForRightCassWithWafer
th
64 297 WaferTransferT-AxisSpeedForRightCassWithWafer
th
14 298 WaferTransferZ-AxisAccForRightCassWithWafer
th
64 299 WaferTransferZ-AxisSpeedForRightCassWithWafer
th
14 300 Space
th th
301 ~ 304 RightCassettepitch
th th
305 ~ 308 RightCassetteMappingStartPos
th
00 309 PeelTableTensionSelect
th th
310 ~ 311 PeelTapeTensionTime
th
00 312 Space
th
313 ~ 316 PeelTapeTensionWind
th
00 317 Reserve
91/91

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HR3000 GEMSpecVer06

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GEM Interface Spec HR3000III A363

TITLE : GEM INTERFACE SPECIFICATION

NITTO DENKO CORPORATION

Version Revised date Person Page Contents

05 2015/12/04 H.Kurooka 52 Add: CEID 55: Right Cassette RFID Read

06 2016/2/23 N.Nagata 52 Add: CEID 35: Slot Start

(2) Equipment name

(4) Software revision

(5) SEMI standard

This machine loads a wafer from Wafer cassette, and automatically an

S2, F40 Multi-block Grant (MBG) S, H E

S10, F1 Terminal Request (TRN) S,H E,Reply

5.GEM COMPLIANCE STATEMENT

GEM COMPLIANCE STATEMENT

Error Messages ■ Yes □ No □ No

ADDITIONAL CAPABILITIES IMPLEMENTED GEM COMPLIANT

COMMUNICATION State Transition Table

8 WAIT Received a message WAIT CRA Discard Indicates oppotunity to

6-2 CONTROL state Model

CONTROL State Transition Table

4 ATTEMPT S1, F0 New state None This may be due to a communication

6-3 Processing State Model

Processing State Diagram

Processing State Transaction Table

“valid”, and [MANUAL] key

6-4 Spooling State Diagram

Spooling State Transition

6-5 Wafer Cassette State Model

Cassette State Transaction Table

Process Program Send(Change Recipe)

S1,F4 Select Equipment Status Data

Process Program Send S7,F3

Process State Chenge

Event Report Acknowledge S6､F12

If Recipe Number Change

Evnet Report Acknowledge S6､F12

Process State Change

Evnet Report Acknowledge S6､F12

S7,F6 Process Program Data

S1,F4 Selected Equipment

New Equipment S2,F15

1.Validity Check (ECV)

Change Setting Data and Save

Equipment Constant S2,F13

S2,F14 Equipment Constant Data

S1,F4 Select Equipment

Equipment Constant S2,F13

S2,F14 Equipment Constant

Host Command Send([INITIAL] Command)

S2､F42 Host Command Acknowledge

Change Process Status

Event Report S6､F12

Operator Press [INITIAL] SW

Event Report S6､F12

Event Report S6､F12

Finish Initial Reset and Ready Auto Operation.

Event Report S6､F12

Operator set W_Cass.

Event Report S6､F12

Host Command Send([START] Command)

S2､F42 Host Command

Operator Press [START] SW

Event Report Acknowledg S6､F12

Start Auto Operation