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Abstract—We evaluate the impact of band-to-band tunneling (at zero gate bias) due to effective work-function difference
(BTBT) on the characteristics of n-channel junctionless transistors with that of the gate electrode. This results in very low currents
(JLTs). A JLT that has a heavily doped channel, which is fully in the OFF state [1]. A positive gate bias forces the JLT layer
depleted in the OFF state, results in a significant band overlap
between the channel and drain regions. This overlap leads to a to flatband and then into accumulation, resulting in an increase
large BTBT of electrons from the channel to the drain in n-channel in the drain-to-source current [1]. The gate of JLT modulates
JLTs. This BTBT leads to a nonnegligible increase in the OFF-state the resistance of the heavily doped semiconductor; hence, the
leakage current, which needs to be understood and alleviated. In device behaves like a gated resistor [1].
the case of n-channel JLTs, tunneling of electrons from the valence Trigate JLTs with channel length of 1 μm were demonstrated
band of the channel to the conduction band of the drain leaves
behind holes in the channel, which would raise the channel poten- in the case of SOI substrates [1]. Recently, performance of
tial. This triggers a parasitic bipolar junction transistor formed 50- [8] and 26-nm- [10] gate-length JLTs has been reported. p-
by the source, channel, and drain regions induced in a JLT in the channel JLTs on germanium-on-insulator (GeOI) substrates
OFF state. Tunneling current is observed to be a strong function [11] and n-channel JLTs with poly-Si nanowire channels have
of the silicon body thickness and doping of a JLT. We present been also reported [9]. It has been shown that a JLT can be
guidelines to optimize the device for high ON-to-OFF current ratio.
Finally, we compare the OFF-state leakage of bulk JLTs with that a good candidate for Flash [12], dynamic, and static random
of silicon-on-insulator JLTs. access memory devices [13], [14]. Recent studies have also
include temperature dependence of electrical characteristics
Index Terms—Gated resistor, junctionless transistor (JLT),
scaling, tunneling. [15], effects of strain on JLT performance [16], ballistic trans-
port at short channel lengths [17], and radio-frequency perfor-
I. I NTRODUCTION mance analysis [18]. These devices are known to offer several
advantages over the conventional MOSFETs, viz., 1) better
EALIZING metallurgical junctions beyond 32-nm node
R for a metal–oxide–semiconductor field-effect transistor
(MOSFET) has become extremely challenging due to the need
scalability; 2) reduced fabrication process complexity [6];
3) low electric field during the ON state of the device [6]; 4) im-
pact ionization induced sharp subthreshold slope at a drain bias
of ultrasteep doping profiles [1]. Recently, new kind of device
of 1.5 V, which is better than that of conventional MOSFETs
designs, based on Lilienfeld’s first transistor architecture [2],
[19]; and 5) mobility enhancement due to bulk conduction [16].
which does not have any metallurgical junctions, have been
However, it has been reported that the JLT suffers large thresh-
proposed [3]–[7] and successfully fabricated in silicon [1],
old voltage variability with channel length and silicon body
[8], [9]. New JLT designs include nanowire gate-all-around
thickness, as compared to inversion-mode devices [8], [10].
(GAA) architectures [4], [8], trigated nanowire architectures
Although there are many studies that explore the physics of
with a silicon-on-insulator (SOI) [1], and bulk substrates [5].
JLTs [1], [3], the effect of band-to-band tunneling (BTBT) on
Planar JLT architectures on bulk substrates were also proposed
their characteristics is yet to be well understood. The current in
to further simplify the fabrication process [6]. Junctionless
the OFF state of a thin-body SOI-MOSFET (due to BTBT) is
transistors (JLTs) have an ultrathin device layer of a highly
known to turn ON the parasitic bipolar junction transistor (BJT)
doped semiconductor, which is volume depleted in the OFF state
formed by the source, channel, and drain [20]–[22]. While
BTBT [22]–[24] and parasitic transistor actions in MOSFETs
Manuscript received August 30, 2011; revised November 23, 2011;
accepted January 13, 2012. Date of publication February 17, 2012; date of
are well known [20]–[22], these are yet to be understood
current version March 23, 2012. The review of this paper was arranged by in JLTs.
Editor G. Jeong. We study, in detail, the OFF-state behavior of JLTs. We
S. Gundapaneni is with the Indian Institute of Technology Bombay, Mumbai
400076, India, and also with the IBM Semiconductor Research and Develop-
show that the JLT operating in volume depletion in OFF state
ment Center, Bangalore 560045, India (e-mail: gunsuresh@ee.iitb.ac.in). has a significant overlap between the valence and conduction
M. Bajaj, R. K. Pandey, and K. V. R. M. Murali are with the IBM Semicon- bands in the channel and drain, respectively. As doping of the
ductor Research and Development Center, Bangalore 560045, India.
S. Ganguly and A. Kottantharayil are with the Department of Electrical
source–channel–drain regions of JLT is high, the band overlap
Engineering and Centre of Excellence in Nanoelectronics, Indian Institute of during OFF state triggers tunneling of electrons from the valence
Technology Bombay, Mumbai 400076, India (e-mail: anilkg@ee.iitb.ac.in). band of the channel to the conduction band of the drain (for n-
Color versions of one or more of the figures in this paper are available online
at http://ieeexplore.ieee.org.
channel JLT operation). JLTs with a thicker device layer (or
Digital Object Identifier 10.1109/TED.2012.2185800 nanowire diameter of a GAA JLT) make the OFF-state BTBT
Fig. 1. Structure of (a) n-channel JLT and (b) BPJLT. Fig. 2. ID–VG plot for a JLT with and without the BTBT model. In addition,
shown is the ID–VG plot when SRH recombination rate is made high in
TABLE I order to keep the diffusion length of the carriers less than the channel length.
PARAMETERS USED FOR THE DEVICE SIMULATION Lg = 20 nm, TSi = 6 nm, Nd = 1019 cm−3, φm = 5.1 eV, Tox = 1 nm,
and VD = 1 V. Carrier lifetimes are set to 10−7 s; these are corresponding to
the lifetimes at a doping of∼1019 cm−3 and are set to 10−15 s for the high
SRH recombination case.
Fig. 5. ID–VG plot for a JLT with several device layer thicknesses. Lg =
20 nm; TSi = 4, 5, and 6 nm; Nd = 1019 cm−3; φm = 5.1 eV; Tox = 1 nm;
and VD = 1 V.
Fig. 9. ID–VG plot for a BPJLT with and without the tunnel model. Lg =
Fig. 8. (a) OFF-state current at VG = 0 V. (b) ON-state current at VG = 20 nm; Xj = 12 nm; TSi = 6 nm; Nd = 1019 (1.5 × 1019) cm−3, i.e.,
1 V for a JLT. Lg = 20 nm, TSi = 3 to 8 nm, Nd = 6 × 1018 cm−3 to uniform doping (peak doping) for SOI-JLT (BPJLT); φm = 5.1 eV; Tox =
5 × 1019 cm−3, φm = 5.1 eV, Tox = 1 nm, and VD = 1 V, with the BTBT 1 nm; and VD = 1 V.
model.
lowers the tunneling width and would facilitate easy turn 6 nm (see Fig. 2). We observe that the OFF-state tunneling
ON of the parasitic BJT, hence, a higher OFF current for a
leakage dominates the drift–diffusion current approximately at
short-channel JLT. −0.3 V (this is 1.3 V lower than the flatband voltage). On the
2) In addition to the DIBL effect, a base of the parasitic BJT other hand, the BTBT current in the SOI-JLT with TSi = 6 nm
is wider for a long-channel JLT. A wider base has more starts to be dominant at +0.1 V (this is 0.9 V lower than the
recombinations happening in it; this results a reduced flatband voltage). This indicates that the tunneling current and,
gain of the BJT and, hence, a lower OFF current. hence, the parasitic BJT action in the BPJLT are less dominant
than those in the SOI-JLT, i.e., the gain of the parasitic BJT
For channel lengths up to 1 μm, DIBL would be almost is less in the BPJLT. The reason for reduced parasitic BJT
negligible, and also, the diffusion length comes in comparison action in the BPJLT compared with the SOI-JLT is explained
with the channel length. Hence, in a very long channel length as follows.
(∼1 μm) device, it is not expected that any parasitic BJT action It was explained in Section III that the hole accumulation
takes place [1]. in the channel region turns ON the parasitic BJT, increasing
the leakage current. However, in a BPJLT, the holes gen-
erated due to BTBT are also near the depletion region of
C. Dependence of OFF-State Current on Channel Doping the substrate–channel junction. The built-in field of the ver-
tical junction would sweep away the holes to the substrate.
Fig. 8 shows the OFF current and ION/IOFF as a function
We observe from the schematic of the parasitic BJT shown
of TSi for several channel dopings. Fully depleting the channel
in Fig. 4(c) that there is no such provision for the SOI-JLT.
would be difficult for a thick TSi or for a high channel doping
Hence, there would be less accumulation of holes in the
(Nd); hence, DIBL and BTBT are higher in these cases, leading
channel region and, hence, the reduced BJT action and re-
to a high OFF-state current [see Fig. 8(b)]. A careful choice
duced OFF-state leakage in BPJLT. We show in Fig. 10
of TSi and Nd should be made for an optimum value of
the 2-D plot for hole concentration in the channel regions of
ON current, OFF current, and their ratio. In Fig. 8(b), we show
SOI-JLT and BPJLT at a gate bias of 0 V. It is observed that
the ratio of ON-to-OFF current as a function of TSi and Nd. An
the hole accumulation in the channel of the bulk device is much
ON-to-OFF ratio of at least on the order of∼104 can be achieved
lower when compared to its SOI counterpart. We also observe
with Nd of ∼1019 along with a TSi of ∼5 nm. Although
that the magnitude of current at 0 V of gate bias for BPJLT is
we have shown the channel design space [see Fig. 8(b)] for
unaffected by the tunneling leakage. Hence, the design space
a drain voltage of 1 V with normal silicon carrier lifetimes,
for BPJLT reported in [6] is still valid when BTBT is taken into
reducing the lifetime of carriers or reducing the operating
account.
drain voltage can further increase the room for optimization
For the JLT to offer a proper switching behavior, the BTBT
of the JLT.
in the OFF state needs to be minimized. This can be done either
by reducing the body thickness or the channel doping. While
lower silicon doping offers several advantages such as increased
V. OFF-STATE B EHAVIOR OF BPJLT
channel mobility [10] and lower BTBT, the contact resistance
In this section, we evaluate the OFF-state behavior of the at source and drain will increase due to low doping. On the
bulk device that was proposed earlier [6]. In Fig. 9, we show other hand, reducing the body thickness demands an extremely
the ID–VG plot for a typical BPJLT when simulated with and controlled process. Other ways to improve the JLT characteris-
without the BTBT model included. The device is designed so tics include the work-function engineering and recombination
that its OFF current is similar to that of the SOI-JLT with TSi = lifetime engineering [28].
1028 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 59, NO. 4, APRIL 2012
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GUNDAPANENI et al.: EFFECT OF BTBT ON JUNCTIONLESS TRANSISTORS 1029
Suresh Gundapaneni (S’11) is currently working Kota V. R. M. Murali (M’11) received the M.S.
toward the Ph.D. degree on the physics of nanoscale and Ph.D. degrees from Massachusetts Institute of
metal–oxide–semiconductor devices at the Indian Technology, Cambridge.
Institute of Technology Bombay, Mumbai, India. He is the Lead Scientist and Senior Manager
Since January 2011, he has been an Intern at of Nanodevice Modeling Group at the IBM
the IBM Semiconductor Research and Development Semiconductor Research and Development Center,
Center, Bangalore, India. Bangalore, India. He has been a Visitor in IBM
Watson and Almaden Research centers and is also
an Adjunct Faculty Member at the Indian Institute of
Technology Bombay, Mumbai, India. His interests
are in nanoscale and quantum-scale device physics,
and he is currently leading efforts on 22/14 nm and beyond materials and device
modeling.