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Diamagnetic Levitation With Permanent Magnets for Contactless Guiding and

Trapping of Microdroplets and Particles in Air and Liquids

Article  in  IEEE Transactions on Magnetics · November 2006

DOI: 10.1109/TMAG.2006.880921 · Source: IEEE Xplore

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CB-03 1

Diamagnetic levitation with permanent magnets

for contactless guiding and trapping of
microdroplets and particles in air and liquids
H. Chetouani, C. Jeandey, V. Haguet, H. Rostaing, C. Dieppedale, G. Reyne

contamination of the manipulated bodies are thus possible.

Abstract— Diamagnetic levitation was applied to micro-
positioning and trapping of diamagnetic micron-sized particles
and micro-droplets. Scale reduction laws for magnetism indicate
that diamagnetism is highly efficient for magnetic MEMS. We
demonstrate here that diamagnetic bodies can be contactless
guided along magnetic grooves or trapped in magnetic wells both
in air and in liquids. Levitation of water, ethanol and oil
microdroplets was achieved within a 1.6 mm bore of a cylindrical
magnet and in micromachined bulk magnets. Thick permanent
micromagnets were also electroplated above silicon wafers in
various matrix configurations. Diamagnetic levitation on
micromagnet arrays was tested with 3µm-large diamagnetic latex
beads in a paramagnetic buffered solution. Trapping and
arraying of microparticles in stable spatial levitation within
magnetic wells were successfully achieved.
Index Terms— Magnetic Micro-actuators and Systems, Lab-
on-chip, Magnetophoresis, Diamagnetic Levitation, Permanent
Magnets, Contactless Manipulation, Microparticles, Droplets.
The second approach reported herein provides passive
contactless manipulation, trapping and arraying of micro-
droplets and particles within magnetic traps created through a
precise configuration of permanent magnets. Diamagnetic
particles are guided and maintained in wells without any
magnetic labeling and without any surface contact [5,8]. Here,
we show that droplets and particles can be trapped and guided
by diamagnetic levitation both in air and in liquids. Permanent
magnets act as magnetic field sources without energy
dissipation and heating. Diamagnetism allows passive spatial
stability of levitating bodies [9]. Furthermore, when
considering scale reduction laws for magnetism [10], it
appears that diamagnetism is more efficient when the
dimensions of magnets decrease. In other words, what is
difficult and complex at macroscopic scale may become
effortless and simple in the micron-sized world.

II. MAGNETOPHORESIS PRINCIPLE AND FORMULATION

I. INTRODUCTION
A diamagnetic particle with a magnetic moment M, placed
M OVING and positioning small particles and low liquid
volumes are important tasks in miniaturized bio-
analytical and biomedical systems, where decreased sample
r r
into a magnetic field B, has energy U = − M ⋅ B and experiences a
r r r
torque τ = M × B . If the field is inhomogeneous, the
sizes can reduce analysis costs and times. Particularly, the diamagnetic particle experiences a magnetic force
r r r r r
manipulation of liquids in small discrete volumes Fm = −∇U = ∇( M ⋅ B) , as illustrated in Fig. 1. The force
(microdroplets) provides an amazing alternative solution, experienced by a volume segment dv of the particle can be
compared to microchannels, for the design of new promising expressed, considering as constant the magnetization within
r r rr
labs-on-chip [1]. Moreover, the ability to handle particles and this volume segment, by dFm = M ⋅ (∇B).dv . After integration
cells using magnetophoresis is currently under investigation over the whole volume of the particle, magnetophoretic force
for biotechnology applications, including separation of components are then given by:
particles [2,3] and cell trapping [4-6]. Current magnetic (1)
(χ p − χ m ) ⎛ ∂Bx ∂By ∂Bz ⎞ Δχ ⎛ ∂ B ⎞
2

approaches to organize and pattern particles fall into two Fmx = ∫∫∫ ⎜ Bx + By + Bz ⎟.dv = ∫∫∫ ⎜ ⎟.dv
µ0 v ⎝ ∂x ∂x ∂x ⎠ 2µ0 v ⎜⎝ ∂x ⎟⎠
categories. The first method involves paramagnetic or
superparamagnetic particles, or para-/superparamagnetic (χ − χm ) ⎛ ∂Bx ∂By ∂Bz ⎞ Δχ ⎛⎜ ∂ B ⎞⎟
2 (2)
Fmy = ∫∫∫ ⎜⎜ Bx + By + Bz ⎟⎟.dv =
p
∫∫∫ ⎜ .dv
v ⎝ ∂ ∂ ∂ ⎠ 2 ∂ ⎟
labeling of the target particles [2-4,6,7]. However, the µ0 y y y µ0 v ⎝ y ⎠
microdroplets and particles are in contact with labelling (χ − χm ) ⎛ ∂Bx ∂By ∂Bz ⎞ Δχ ⎛⎜ ∂ B ⎞⎟
2 (3)
Fmz = ∫∫∫ ⎜ Bx + By + Bz ⎟.dv =
p
∫∫∫ ⎜ .dv
materials, magnets or surfaces [7]. Adsorption and µ0 v ⎝ ∂z ∂z ∂z ⎠ 2µ0 v ⎝ ∂ z ⎟⎠

where Δχ is the susceptibility contrast between magnetic

Manuscript received March 13, 2006.
H. Chetouani, H. Rostaing and G. Reyne are with Laboratoire
d’Electrotechnique de Grenoble, ENSIEG, Domaine Universitaire, BP46, F-
38402 SMH, France (e-mail: hichem.chetouani@leg.ensieg.inpg.fr).
C. Jeandey, V. Haguet and C. Dieppedale are with Commissariat à
l’Energie Atomique (CEA), 17 rue des Martyrs, F-38054 Grenoble Cedex 9,
France.
susceptibility of the particle χp and the one of the medium χm,
and μ0 is the vacuum magnetic permeability.
Direction and velocity of particle movement in a magnetic
field gradient are determined by magnetic (Fm), drag (Fd),
gravitational (Fg), and Archimedes (Fa) forces. Thus a stable
CB-03 2

position of the particle can be determined from the balance of at x=0 and y=0. Therefore, the microparticle will stabilize at
forces. x=0, y=0 and z= 4.2µm.
r r
Fd = 6 ⋅ π ⋅ Rp ⋅η ⋅ Vp (4) 3
Fmz (pN)
r 4 r
Fg (pN) (a)
Fg = ⋅ π ⋅ Rp ⋅ ρp ⋅ g (5) 2
12
0

3 x=y=0
r 4 r 0 112
Fa = − ⋅ π ⋅ Rp ⋅ ρm ⋅ g (6) (7) (2) (1)
3
00
where Rp is the particle radius, η is the dynamic viscosity of z(µm)

the medium, Vp is the magnetically-induced velocity (relative 00 0.75

2
1.5
4
2.25
6
38 3.75
10
4.5
12
5.25
14
616 6.75
18
7.25
20
0 zz 20

to the medium), g is the gravitational field acceleration, ρ p

12
Fmx(pN)
2 F (pN)
my (b)
and ρ m are respectively the particle density and the medium
x=0 or y=0,
density. The particle acquires a potential energy density (Ep): x) 0 0
z=4.2µm
Δχ
E p ( x, y, z ) = − g.( ρ p − ρ m ).z + B ( x, y, z )² (7)
2µ0 -2 y(µm)
12
x(µm)
100
Z(µm) -3.75 0 2
-3 4 6
-2.25 -1.5 -0.75 8 10
0 12
0.75 14
1.5 16
2.25 18
3 20
3.75
Fm 0 xx 20
80
Fa+Fd Fig. 3 Relation between the force and the displacement. (a) Fmz along z (red
full line), gravitational force (blue dotted line), (b) Fmx and Fmy along x and y
60
respectively (χp=-8.21.10-6, χm=9.95.10-5 and Jr=0.3T).
40
Fg III. DESIGN, PROTOTYPING AND MICROFABRICATION
20

0 A. Millimeter scale structures

-20 The first structure (Fig. 4-a) is a cylindrical magnet with
Magnet Magnet
Jr =1.2T Jr =1.2T radial magnetization surmounted by a ferromagnetic ring. This
-40 X(µm)
structure provides a stable punctual magnetic trap within the
-120 -100 -80 -60 -40 -20 0 20 40 60 80 100 120 ferromagnetic ring. The second structure (Fig. 4-b) involves a
Fig. 1 2D cartography of potential energy density in the case of a pure water micromachined NdFeB bulk magnet magnetized through the
droplet in air medium (small blue circle). The water droplet finds its
equilibrium at z=60µm (Rp=15µm, ρp=103 kg/m3, χp=-9.05.10-6). plane, providing stable traps at the groove intersections. The
levitating bodies can be guided along these grooves.
Spatial magnetic stability of diamagnetic levitation is
required for contactless manipulation of particles. Thus either
parallelepiped magnet arrays or cylindrical magnet Magnetic traps
configurations were used to provide punctual stabilities at
precise locations. As an example, a stable punctual levitation
between four cubic magnets is demonstrated and illustrated in
Fig. 2 and Fig. 3. The x, y and z positions indicated in Fig. 3 Jr=1.2T
500 µm 600 µm
correspond to the scales indicated on Fig. 2. Jr=1.2T (a) (b)
Fig. 4 Millimeter scale structures, (a) a cylindrical structure, (b) a bulk
Z (a) Y
6
(b) NdFeB micromachined magnet.
9
5
8

7
4

3
5µm B. On-chip magnet microarrays
6

5 3µm
2

1
Different magnet microarray configurations were designed
4
0 2.5µm and fabricated as shown in Fig.5.
3
-1
2 7 µm 5 µm 15 µm
-2
1
2.5µm -3 5µm
0
-4
-1
-5
-2
-6

-5 -4 -3 -2 -1 0 1 2 3 4 5 6 X -6 -5 -4 -3 -2 -1 0 1 2 3 4 5 6 X

Fig. 2 (a) Side view, and (b) top view of a matrix of four cubic magnets.
Fig. 5 Electroplated CoPt micro-magnet arrays.
Relation between the components of magnetic force and
displacements of the particle are reported in Fig.3. The A brief summary of the fabrication of micro-magnet arrays
gravitational force value Fg and Fmz illustrated in Fig. 3(a) is described in Fig. 6. First, a thin conductive layer of gold
demonstrate two equilibrium positions but only the position was spotted above a silicon wafer (1). Then, patterns were
(1) is stable as the balance of forces is null and δFmx/δx, formed through a thick NFR15 photoresist (2). Then, a 10µm-
δFmy/δy and δFmz/δz are <0 at this position. The components thick CoPt layer was electroplated (3). Finally, photoresist
Fmx and Fmy demonstrate respectively that the particle is stable layer was removed (4).
CB-03
(1) (2)
Gold deposition on a silicon wafer Photoresist patterning
(3) (4)
CoPt electroplating Photoresist lift-off
Fig. 6 Fabrication steps of electroplated CoPt micro-magnet arrays on a
silicon wafer.
IV. EXPERIMENTATIONS AND RESULTS
A. Microdroplets levitating in the air
Water, ethanol, oil and 15:85 (w/w) glycerol:water
microdroplets of 20 to 200 µm in diameter were ejected above
the cylindrical structure (Fig. 4-a) using a piezoelectric
dispenser or a spray. Independently of their falling positions,
the microdroplets levitate and move spontaneously to the hole
center. This motion is caused by a radial magnetophoretic
force which tends to concentrate the droplets at the center in
order to reach the stable position. At the center, microdroplets
coalesce and produce a larger droplet, as shown in Fig. 7-b.
0.4mm (a) 0.4mm (b)
Fig. 7 (a) Levitation and motion of microdroplets toward the hole center, (b)
Merging of the droplets results in a larger drop.
30µm microdroplets were ejected toward the bulk
microstructured magnet illustrated in Fig. 4-b using a
piezoelectric dispenser. The levitating droplets can move
along the grooves, as shown in Fig. 8.
(a) (b)
Levitating Single levitating droplet
droplets
Magnet Magnet
150 µm 200 µm
Fig. 8 Levitating water microdroplets of about 30μm in diameter. (a) Droplets
aligned in the groove, (b) side-view of a levitating droplet.
B. Latex beads levitating in a paramagnetic medium
The volume magnetic susceptibility of 3µm-large
polystyrene-latex beads is χp=-8.21×10-6 [11]. As shown in
equations (1), (2) and (3), the magnetic force is expressed
according to the magnetic susceptibility contrast between the
particle and the suspension medium. However, the magnetic
susceptibility of latex beads is low. Thus, in order to obtain
significant magnetophoretic forces, the diamagnetic latex
microbeads must be in a strongly paramagnetic solution. The
medium was 0.6 M MnCl2.4H2O in pure water. Its volume
magnetic susceptibility χm =9.95.10-5 was measured with a
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SQUID (Superconducting QUantum Interference Device).
The Fig. 9 illustrates contactless arraying of latex microbeads.
7µm 5µm 5µm
CoPt micromagnets Levitating latex beads
Fig. 9 Contactless passive levitation and precise positioning of 3 μm latex
beads in a paramagnetic solution. Levitating beads are located above the
surface of magnets.
V. CONCLUSION
We demonstrated contactless trapping and arraying of
microdroplets and latex microbeads either in liquids or in air.
Contactless manipulation and patterning of micro-particles in
air and in liquid is an important subject in various fields,
including biotechnology and biochemistry. Diamagnetic
levitation brings amazing possibilities to labs-on-chip,
including fast arraying of unlabelled cells or microbeads on
micro-magnets, and contamination-free biochemical micro-
reactors. This approach can be generalized to other research
fields due to the very ubiquitous and universal feature of
diamagnetic levitation.
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