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    Smart Material Systems and MEMS: Design and Development Methodologies
    Smart Material Systems and MEMS: Design and Development Methodologies
    Smart Material Systems and MEMS: Design and Development Methodologies
    Ebook302 pages13 hours

    Smart Material Systems and MEMS: Design and Development Methodologies

    By Vijay K. Varadan, K. J. Vinoy and S. Gopalakrishnan

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    About this ebook

    Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications.

    Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail.

    Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.

    LanguageEnglish
    PublisherWiley
    Release dateNov 2, 2006
    ISBN9780470093627
    Smart Material Systems and MEMS: Design and Development Methodologies

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