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silicon die. P
The AE-800 sensor elements are well proven after being used
E : Modulus of elasticity = 1.6 10 kp/mm for silicon
I : Moment of inertia of beam crossection =
in transducer products for many years covering applications max : Max strain in the beam
within medical, military, industrial and automotive instrumen- Loading of the sensor element by adding a force at the tip.
tation. 3 2
(Eq. 1) d = P = 2 .
2. Description of the Sensor EI 3 3 max h
Elements where P, and h are given in the figure above.
The sensor elements consist of two main parts, the silicon The average strain in the resistors can be calculated by
cantilever beam itself and the header to which the beam is equation 2.
mounted. The beam is made of single crystal N-type silicon
and has one ion-implanted P-type resistor on each side. The
surface of the beam is passivated with thermally grown . - 2
(Eq. 2) =
silicondioxide. In order to obtain a creep free mounting of the m max
beam, an alloying technique has been developed for joining
the four pins of the header to contact areas on the beam. The relative resistance change is given by equation 3.
Thus the four pins of the header serve both as mechanical
mount as well as electrical connections for the resistors.
(Eq. 3)
Fig. 1 -
R= . = 2 . 1.5 h . d
2
R m
(Eq. 4)
U =U
R=
0.75 . U .
- 0.5 . h
2
.d
2R
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SensorOne Corporation
Technologies Corporation
4. Mechanical Characteristics Fig. 3
Active
4.1 Mechanical Strength Resistors -
Single crystal silicon is nearly an ideal elastic material that can Rx = 1000 ohm
be bent almost to the breaking point without any hysteresis
effects. Hysteresis in the sensor element output signal is
U U
therefore very low and does not usually contribute to significant
signal error. As part of the quality assurance in the sensor Ry
element production, each element is being bent in both
directions to an output signal of 30 m V/V corresponding to
+
movement of the tip of the beam of about 60 - 80 um. When
Balancing bridge Zero-shift with resistor Ry.
used, the sensor element should not be bent more than o
corresponding to this output signal. each element is measured in the temperature range 20-70 C and
the shift is calculated and expressed in % of a full scale signal of
4.2 Stiffness 30 mV/V. At this point of the test the sensor elements are selected
into different accuracy groups. The elements AE-801 have a
The stiffness of the beam can be calculated from equation 1. o
thermal Zero shift better than ±0.005%FS/ C. The value of the
Normally the stiffness is expressed through the spring constant, balancing resistor Ry needed to balance the bridge when Rx in
see equation 5. figure 3 is 1000 , and can be given on the certificate upon
request.
P = E . b h3 Typical change in Zero-point with temperture over a larger
(Eq. 5) C =
d 4 3 temperture range for AE-801 sensor elements is shown in figure 4.
Fig. 4
f = 1.31 . 10
6 h
(Eq. 7) 2
-3
-50 -25 0 25 50 75 100 125oC
changing temperature. During manufacturing the zero-shift for Relative change in sensitivity with temperature.
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5.4 Leakage Current 7. Electrical Circuitry for use
Leakage current may have an effect on the measuring signal at
high temperature. Typical leakage current for a bridge resistor is with the Sensor Element
shown as a function of temperature in figure 6. For temperature controlled measurements where the physical
size must be at a minimum, it is recommended that the
balancing part of the Wheatstone bridge is located away from
Fig. 6
10-5
the measuring device containing the beam.
Leakage
Current In the case of a potentiometer solution, the balancing circuitry
(A)
-6
shown below in figure 7 has been found useful.
10
Maximum
Signal, up to 180 mV
-7 Fig. 7
10
Active
Resistors
Typical
10
-8 500 ohm
Battery or
power
supply max
200 ohm - 10 turn
-9
potentiometer 6V
10
o
25 50 75 100 125 C
500 ohm
Leakage Current for a bridge resistor as a function of temperature
with 10 V excitation.
Maximum excitation voltage that should be used will usually be Bridge balancing by potentiometer.
Kronex Technologies
SensorOne Corporation
Technologies Corporation