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Microfabricated devices include:
Processes
Microfabrication is actually a collection of
technologies which are utilized in making
microdevices. Some of them have very old
origins, not connected to manufacturing,
like lithography or etching. Polishing was
borrowed from optics manufacturing, and
many of the vacuum techniques come
from 19th century physics research.
Electroplating is also a 19th-century
technique adapted to produce micrometre
scale structures, as are various stamping
and embossing techniques.
Substrates
Deposition or growth
Thermal oxidation
Local oxidation of Silicon (LOCOS)
chemical vapor deposition (CVD)
APCVD
LPCVD
PECVD
Physical vapor deposition(PVD)
sputtering
evaporative deposition
Electron beam PVD
epitaxy
Patterning
Photolithography
Shadow Masking
Etching
Microforming
Microforming is a microfabrication
process of microsystem or
microelectromechanical system (MEMS)
"parts or structures with at least two
dimensions in the submillimeter
range."[2][3][4] It includes techniques such
as microextrusion,[3] microstamping,[5] and
microcutting.[6] These and other
microforming processes have been
envisioned and researched since at least
1990,[2] leading to the development of
industrial- and experimental-grade
manufacturing tools. However, as Fu and
Chan pointed out in a 2013 state-of-the-art
technology review, several issues must
still be resolved before the technology can
be implemented more widely, including
deformation load and defects, forming
system stability, mechanical properties,
and other size-related effects on the
crystallite (grain) structure and
boundaries:[3][4][7]
In microforming, the ratio of the
total surface area of grain
boundaries to the material
volume decreases with the
decrease of specimen size and the
increase of grain size. This leads
to the decrease of grain boundary
strengthening effect. Surface
grains have lesser constraints
compared to internal grains. The
change of flow stress with part
geometry size is partly attributed
to the change of volume fraction
of surface grains. In addition, the
anisotropic properties of each
grain become significant with the
decrease of workpiece size, which
results in the inhomogeneous
deformation, irregular formed
geometry and the variation of
deformation load. There is a
critical need to establish the
systematic knowledge of
microforming to support the
design of part, process, and
tooling with the consideration of
size effects.[7]
Other
See also
3D microfabrication
Actuators
Integrated circuit
Microelectronics
Microfluidics
Semiconductor fabrication
Sensors
Transducers
References
1. Nitaigour Premchand Mahalik (2006)
"Micromanufacturing and Nanotechnology",
Springer, ISBN 3-540-25377-7
2. Engel, U.; Eckstein, R. (2002).
"Microforming - From Basic research to its
realization". Journal of Materials Processing
Technology. 125–126 (2002): 35–44.
doi:10.1016/S0924-0136(02)00415-6 .
3. Dixit, U.S.; Das, R. (2012). "Chapter 15:
Microextrusion". In Jain, V.K.
Micromanufacturing Processes . CRC
Press. pp. 263–282. ISBN 9781439852903.
4. Razali, A.R.; Qin, Y. (2013). "A review on
micro-manufacturing, micro-forming and
their key issues" . Procedia Engineering. 53
(2013): 665–672.
doi:10.1016/j.proeng.2013.02.086 .
5. Advanced Manufacturing Processes
Laboratory (2015). "Process Analysis and
Variation Control in Micro-stamping" .
Northwestern University. Retrieved
18 March 2016.
6. Fu, M.W.; Chan, W.L. (2014). "Chapter 4:
Microforming Processes". Micro-scaled
Products Development via Microforming:
Deformation Behaviours, Processes, Tooling
and its Realization. Springer Science &
Business Media. pp. 73–130.
ISBN 9781447163268.
7. Fu, M.W.; Chan, W.L. (2013). "A review on
the state-of-the-art microforming
technologies". International Journal of
Advanced Manufacturing Technology. 67
(9): 2411–2437. doi:10.1007/s00170-012-
4661-7 .
Further reading
Journal of Microelectromechanical
Systems (J.MEMS)
Sensors and Actuators A: Physical
Sensors and Actuators B: Chemical
Journal of Micromechanics and
Microengineering
Lab on a Chip
IEEE Transactions of Electron Devices,
Journal of Vacuum Science and
Technology A: Vacuum, Surfaces, Films
Journal of Vacuum Science and
Technology B: Microelectronics and
Nanometer Structures: Processing,
Measurement, and Phenomena
Books about microfabrication
External links
Wikibooks has a book on the topic of:
Microtechnology
Videos and animations on
microfabrication techniques and related
applications .
MicroManufacturing Conference .
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