PURGING

1) All Annealing Furnace been purged at the end of the March - 2014
2) AF#5 and AF#6 not been verified due to machine down and no production requirement
3) AF#7 only run 4" wafers which has no stain issue
4) No abnormalities with the Furnace 1, 2 and 3 and thus no purging required upon verification
5) All the ceramic crucibles was replaced on March - 2014 during verification and before release to production
6) Have verified all the ceramics crucibles and all in good condition
7) Next purging will be carried out on July - 2014

Annealing Furnace 4

Annealing Furnace 8
Annealing Furnace 7

Annealing Furnace 1 , 2 and 3

Furnace#
25-Jul 26-Jul 27-Jul 28-Jul 29-Jul 30-Jul 31-Jul 1-Aug 2-Aug 3-Aug 4-Aug 5-Aug 6-Aug

Furnace Purging
Stain verification test
Off and Rest Day
Tools Down

Annealing Furnace#2
7-Aug 8-Aug 9-Aug 10-Aug 11-Aug 12-Aug 13-Aug 14-Aug 15-Aug 16-Aug 17-Aug 18-Aug 19-Aug
20-Aug 21-Aug 22-Aug 23-Aug 24-Aug 25-Aug 26-Aug 27-Aug 28-Aug 29-Aug 30-Aug 31-Aug 1-Sep
2-Sep 3-Sep
LG LOT STATUS
Summary (Month Of July) Defect Failure after anneal Summary (Month Of July) Defect Failure

LG (F505) LG (F505)
Defect In Failed Failure Defect
Stain 0 0.0% Stain
950
Patch Mark 11 1.2% Patch Mark

Action :
1) Standardize all the 6" product to have
2) Provide buzzer timer alarm to all demo
3) Remove the bad old demounter form
4) Qualify the new demounter in line

QC
Lapping

Anneal : 1400C @ 10 hours

PEREGRINE LOT STATUS

Summary (Month Of July) Defect Failure after P1 anneal Summary (Month Of July) Defect Failure

Peregrine (F534) Peregrine (F534)

Defect In Failed Failure Defect
Stain 31 14.4% Whitish) Stain
215
Patch Mark 4 1.9% Patch Mark

Action :
1) Follow the process flow and set up a Q
to identify the source of the whittish/

QC
Lapping

Clean Room
Anneal : 1400C @ 20 hours
mary (Month Of July) Defect Failure after P2

LG (F505)
Remarks
In Failed Failure
92 9.7% Haze/Dual Tone
950
11 1.2%

Status
ndardize all the 6" product to have 45min of demount time Done
vide buzzer timer alarm to all demounter machine
move the bad old demounter form line 1-Aug
alify the new demounter in line 4-Aug

QC Q
Anneal EG C Laser Mark

QC
Clean Room P2 P1

al : 1400C @ 10 hours

mary (Month Of July) Defect Failure after P2

Peregrine (F534)
Remarks
In Failed Failure
31 14.4% White Spot
215
4 1.9%

low the process flow and set up a QC check up after every process
identify the source of the whittish/white spot (min 3lots)

QC Q
EG Anneal C Laser Mark

QC QC
P2 Anneal P1
al : 1400C @ 20 hours
Ceramics Cleaning
1) All the ceramic will be sent to our vendor, Fronken for cleaning before used it to line
2) The cleaning process flow is as below

3) Once the cleaning completed and sent to RST, the ceramic will be checked by Process Engineer and Supervisor
before used it at line
4) All the ceramics box last changed on March before Furnace verification
eer and Supervisor
Before Purging
1) Production Personnel need to down the tools in MES for purging process
2) Make sure all the production wafers is unload from the Furnace and the Furnace is empty
3) Ceramic box can be stay inside the furnace for purging process
4) Change the settings the Annealing Temparature at 1500C with 10 hours of soaking time
5) The Temperature and time setting must be as below

1500C- 10 Hours

800C - 4 Hours 35 min

0C

Test and Verification Process

1) Select 10 clean 6" wafers and load into the furnace that just finish purged
2) Check the wafers before load in and after finsh processing
3) Verify stain check on the wafers and release to production the tools ONLY after no stain detected

After Purging and Verification Process - Production

1) Change the settings to production settings again accordingly
2) Change the tools from down mode to production mode at MES
800C - 4 Hours 35 min

0C