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Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in
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A simple approach to determine five thermomechanical properties of thin ductile films on an elastic substrate
Appl. Phys. Lett. 85, 6173 (2004); 10.1063/1.1840125
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JOURNAL OF APPLIED PHYSICS VOLUME 93, NUMBER 2 15 JANUARY 2003
a兲
Electronic address: sun@ecn.purdue.edu FIG. 1. A platelike nanomaterial.
冉 冏 冊
assumption, the discrete displacements u (l) (l) (l)
i, j , v i, j , and w i, j of 1 u 共 l 兲 共 x,y 兲 2
(l)
atom (x i ,y j ,z ) in atom layer l, can be expressed with con- ⬇ ␣1 a . 共4a兲
2 x
tinuous functions of x and y, i.e., u (l) i, j ⫽u (x i ,y j ), v i, j
(l) (l)
共 x i ,y j 兲
⫽ v (x i ,y j ), and w i, j ⫽w (x i ,y j ). The discrete nature
(l) (l) (l)
along the thickness direction is still kept. The stretching of the next-nearest neighbor spring between
The deformation energy U (l) i, j of the representative ele- atom 1 and atom 6 共see Fig. 4兲 is
ment shown in Fig. 4 can be written as
⫹U 1⫺5 ⫹U 1⫺7 ⫹U 3⫺5 , 共2兲 By using the binomial expansion, the above expression can
where U 1⫺2 , U 1⫺6 ,..., represent deformation energies due be approximated as
to the stretching of the spring between atom 1 and 2, and 1
and 6,..., respectively. Detail derivations will be presented for
& 共 l⫹1 兲 & 共 l⫹1 兲
U 1⫺2 and U 1⫺6 . Other terms can be obtained in a similar 共 u i⫹1,j ⫺u 共i,l j兲 兲 ⫹ 共 w i⫹1,j ⫺w 共i,l j兲 兲 .
manner. 2 2
Deformation energy U 1⫺2 is due to the stretching of
nearest-neighbor spring between atom 1 and atom 2. Because Therefore, deformation energy U 1⫺6 due to the stretching of
displacements in each layer vary slowly from atom to atom, the next-nearest neighbor spring between atom 1 and atom 6
a two-term Taylor series expansion is obtained as
1
U 1⫺6 ⫽ ␣ 2 冋
& 共 l⫹1 兲
共 u i⫹1,j ⫺u 共i,l j兲 兲 ⫹
& 共 l⫹1 兲 2
1
共 w i⫹1,j ⫺w 共i,l j兲 兲 ⫽ ␣ 2
& 共 l⫹1 兲
关u 册 冋
共 x i⫹1 ,y j 兲 ⫺u 共 l 兲 共 x i ,y j 兲兴 ⫹
& w 共 l⫹1 兲 共 x i⫹1 ,y j 兲
⫺w 共 l 兲 共 x i ,y j 兲 冉 冊册 2
冋 册
2 2 2 2 2 2
1
2
u 冉
& 共 l⫹1 兲
共 x i ,y j 兲 ⫹a
u 共 l⫹1 兲 共 x,y 兲
x
冏 共 x i ,y j 兲
共l兲
⫺u 共 x i ,y j 兲 ⫹ 冊 2
冉 冏 冊
⬇ ␣2
2 & 共 l⫹1 兲
w 共 l⫹1 兲 共 x,y 兲
w 共 x i ,y j 兲 ⫹a ⫺w 共 l 兲 共 x i ,y j 兲
2 x
冋冉 冊册
共 x i ,y j 兲
1
u 共 l⫹1 兲 共 x,y 兲
x
冏 共 x i ,y j 兲
⫹
w 共 l⫹1 兲 共 x i ,y j 兲 ⫺w 共 l 兲 共 x i ,y j 兲
a
2
冏
⫽ ␣ 2a 2 共 l⫹1 兲 . 共4b兲
4 u 共 x i ,y j 兲 ⫺u 共 l 兲 共 x i ,y j 兲 w 共 l⫹1 兲 共 x,y 兲
⫹ ⫹
a x 共 x i ,y j 兲
Similarly,
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J. Appl. Phys., Vol. 93, No. 2, 15 January 2003 C. T. Sun and Haitao Zhang 1215
冋 冉 冏 冊
册
& 共l兲 u 共 l 兲 共 x,y 兲 2
u 共 x i ,y j 兲 ⫹a ⫺u 共 l⫹1 兲 共 x i ,y j 兲 ⫺
2 x 共 x i ,y j 兲
1
冉 冏 冊
U 2⫺5 ⬇ ␣ 2
2 & w 共 l 兲 共 x,y 兲
w 共 l 兲 共 x i ,y j 兲 ⫹a ⫺w 共 l⫹1 兲 共 x i ,y j 兲
2 x
冋冉 冊册
共 x i ,y j 兲
1
u 共 l 兲 共 x,y 兲
x
冏 共 x i ,y j 兲
⫹
w 共 l⫹1 兲 共 x i ,y j 兲 ⫺w 共 l 兲 共 x i ,y j 兲
a
2
冏
⫽ ␣ 2a 2 , 共4c兲
4 u 共 l⫹1 兲 共 x i ,y j 兲 ⫺u 共 l 兲 共 x i ,y j 兲 w 共 l 兲 共 x,y 兲
⫺ ⫹
a x 共 x i ,y j 兲
冋冉 冉 冏 冏 冊
册
& u 共 l 兲 共 x,y 兲 u 共 l 兲 共 x,y 兲 2
a ⫹a ⫹
2 x 共 x i ,y j 兲
y 共 x i ,y j 兲
1
冏 冏 冊
U 1⫺4 ⫹U 2⫺3 ⬇ ␣ 2
2 & 共 l 兲 共 x,y 兲 共 l 兲 共 x,y 兲
a ⫹a
2 x y
冋冉 册
共 x i ,y j 兲 共 x i ,y j 兲
1
冉 &
2
a
u 共 l 兲 共 x,y 兲
x
冏 共 x i ,y j 兲
⫺a
u 共 l 兲 共 x,y 兲
y
冏 共 x i ,y j 兲
冊 ⫺
2
冏 冏 冊
⫹ ␣2
2 & 共 l 兲 共 x,y 兲 共 l 兲 共 x,y 兲
a ⫺a
2 x y
冋冉 冊册
共 x i ,y j 兲 共 x i ,y j 兲
1
冉 u 共 l 兲 共 x,y 兲
x
冏 共 x i ,y j 兲
⫹
共 l 兲 共 x,y 兲
y
冏 共 x i ,y j 兲
冊 2
冏 冏
⫽ ␣ 2a 2 , 共4d兲
2 u 共 l 兲 共 x,y 兲 共 l 兲 共 x,y 兲 2
⫹ ⫹
y 共 x i ,y j 兲
x 共 x i ,y j 兲
1
U 1⫺3 ⬇ ␣ 1 a 2
2 冉
共 l 兲 共 x,y 兲
y
冏 共 x i ,y j 兲
冊 2
, 共4e兲
1
U 1⫺5 ⫽ ␣ 1 a 2
2
冉
w 共 l⫹1 兲 共 x i ,y j 兲 ⫺w 共 l 兲 共 x i ,y j 兲
a
冊 2
, 共4f兲
冋 冉 冏 冊
册
& 共 l⫹1 兲 共 l⫹1 兲 共 x,y 兲 共l兲
2
共 x i ,y j 兲 ⫹a ⫺ 共 x i ,y j 兲 ⫹
2 y 共 x i ,y j 兲
1
冉 冏 冊
U 1⫺7 ⬇ ␣ 2
2 & 共 l⫹1 兲
w 共 l⫹1 兲 共 x,y 兲
w 共 x i ,y j 兲 ⫹a ⫺w 共 l 兲 共 x i ,y j 兲
2 y
冋冉 冊册
共 x i ,y j 兲
1
共 l⫹1 兲 共 x,y 兲
y
冏 共 x i ,y j 兲
⫹
w 共 l⫹1 兲 共 x i ,y j 兲 ⫺w 共 l 兲 共 x i ,y j 兲
a
2
冏
⫽ a2 共 l⫹1 兲 , 共4g兲
4 共 x i ,y j 兲 ⫺ 共 l 兲 共 x i ,y j 兲 w 共 l⫹1 兲 共 x,y 兲
⫹ ⫹
a y 共 x i ,y j 兲
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1216 J. Appl. Phys., Vol. 93, No. 2, 15 January 2003 C. T. Sun and Haitao Zhang
冋 冉 冏 冊
册
& 共 l⫹1 兲 共 l 兲 共 x,y 兲 2
共 x i ,y j 兲 ⫺ 共 l 兲 共 x i ,y j 兲 ⫺a ⫺
2 共 x i ,y i 兲
y
1
冉 冏 冊
U 3⫺5 ⬇ ␣ 2 共 兲
2 & w 共 x,y 兲
l
w 共 l⫹1 兲 共 x i ,y j 兲 ⫺w 共 l 兲 共 x i ,y j 兲 ⫺a
2 y
冋 册
共 x ,y i j兲
1
⫽ ␣ 2a 2
冉 共 l⫹1 兲 共 x i ,y j 兲 ⫺ 共 l 兲 共 x i ,y j 兲 w 共 l 兲 共 x,y 兲
a
⫹
y
冏 共 x i ,y j 兲
冊 ⫺
共 l 兲 共 x,y 兲
y
冏 共 x i ,y j 兲
. 共4h兲
4 共 l⫹1 兲 共l兲
w 共 x i ,y j 兲 ⫺w 共 x i ,y j 兲
⫺
a
Similarly, we obtain
U tor
i, j ⬇
1
␣
2 1
a
x冉
u 共 N 兲 共 x,y 兲
冏 冊 2
1
⫹ ␣1 a
y 冉
共 N 兲 共 x,y 兲
冏 冊 2
冋
2
册
共 x i ,y j 兲 共 x i ,y j 兲
1
&
2
a 冉
u 共 N 兲 共 x,y 兲
x
冏 共 x i ,y j 兲
⫹a
u 共 N 兲 共 x,y 兲
y
冏 共 x i ,y j 兲
冊 2
冉 冏 冏 冊
⫹ ␣2
2 & 共 N 兲 共 x,y 兲 共 N 兲 共 x,y 兲
a ⫹a
x y
冋冉
2
冊册
共 x i ,y j 兲 共 x i ,y j 兲
&
冉
共 N 兲 共 x,y 兲
冏 ⫺a
共 N 兲 共 x,y 兲
冏 冊 ⫺
2
冉 冊
a
冏
2 x y
1 共 x i ,y j 兲 共 x i ,y j 兲 1 u 共 N 兲 共 x,y 兲 2
冏 冏
⫹ ␣2 ⫽ ␣ 1a 2
2 & 共 N 兲 共 x,y 兲 共 N 兲 共 x,y 兲 2 x 共 x i ,y j 兲
a ⫺a
2 x 共 x i ,y j 兲
y 共 x i ,y j 兲
1
⫹ a 1␣ 2
2 y 冉
共 N 兲 共 x,y 兲
冏 共 x i ,y j 兲
冊 2
1
⫹ ␣ 2a 2
2 冋冉 u 共 N 兲 共 x,y 兲
x
冏 共 x i ,y j 兲
⫹
共 N 兲 共 x,y 兲
y
冏 共 x i ,y j 兲
冊 冉
2
⫹
u 共 N 兲 共 x,y 兲
y
冏 共 x j ,y j 兲
⫹
共 N 兲 共 x,y 兲
x
冏 共 x i ,y j 兲
冊册2
. 共5兲
冉兺 冊冒
U 1⫺3 ⬇ ␣ 1 a 1
2
2
共 共yly兲 兲 2 , 共7e兲 N⫺1
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J. Appl. Phys., Vol. 93, No. 2, 15 January 2003 C. T. Sun and Haitao Zhang 1217
U tot⫽ 冕冕 A0
hW 共 x,y 兲 dxdy. 共9兲
xy ⫽⫺
yy
xx
冦 冧
u
共xxl 兲 ⫽ xx ⫽ , 共yly兲 ⫽ y y ⫽ , 2N ␣ 1 ⫹4N ␣ 2 ⫹ ␣ 1 ⫹ ␣ 2 ⫺
x y ␣ 1 ⫹2 ␣ 2
⫻
共 2N ␣ 2 ⫹ ␣ 2 ⫺ 共 2N ␣ 2 兲 / 共 ␣ 1 ⫹2 ␣ 2 兲兲 2
2
⫺
w 共 l⫹1 兲 ⫺w 共 l 兲 共 2N ␣ 1 ⫹4N ␣ 2 ⫹ ␣ 1 ⫹ ␣ 2 ⫺2N ␣ 22 / 共 ␣ 1 ⫹2 ␣ 2 兲
⌬共l兲
zz ⫽ 0 ⫽ . 共11兲
a 共17兲
This implies that the simple tension produces a state of uni- is the Young’s modulus in the x direction. It is evident that
form strains for which the strain energy density function W both Young’s modulus E and Poisson’s ratios xz and xy
reduces to depend on the number of atom layers of the material.
1
W⫽
冋 册
共 2N⫹1 兲 a
IV. DISCUSSION AND CONCLUSION
N ␣ 2 共 xx ⫹ zz 兲 2 ⫹N ␣ 2 共 y y ⫹ zz 兲 2
Figure 6 shows the Young’s modulus E as a function of
⫹N ␣ 2 共 xx ⫹ y y 兲 2 ⫹N ␣ 1 xx
2
⫹N ␣ 1 2y y the atom layer number (2N⫹1). The parameters used in the
⫻ . 共12兲 calculation are: a⫽1.74⫻10⫺10 m, ␣ 1 ⫽2.02 N/m, and ␣ 2
⫹N ␣ 1 zz
2
⫹ 21 ␣ 1 xx
2
⫹ 21 ␣ 1 2y y
⫽1.10 N/m. These parameters were obtained by Askar for
⫹ 12 ␣ 2 共 xx ⫹ y y 兲 2 NaCl using lattice dynamics method.10 These parameters are
also used later in analyzing Poisson’s ratios. It is evident
For simple tension, we require zz ⫽ W/ zz ⫽0 and
that, for layer numbers less than 10, Young’s modulus E will
y y ⫽ W/ y y ⫽0. The first condition yields
drop significantly with the decrease of the atom layer num-
␣2 ber. The Young’s modulus approaches a constant value as the
zz ⫽⫺ 共 ⫹ 兲 共13兲 layer number increases beyond 20. This constant is the
␣ 1 ⫹2 ␣ 2 xx y y
Young’s modulus E c of the bulk material, which can be ob-
and the second condition leads to tained from Eq. 共17兲 by letting N approach infinity. We have
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1218 J. Appl. Phys., Vol. 93, No. 2, 15 January 2003 C. T. Sun and Haitao Zhang
E c⫽
a 再
1 ␣ 21 ⫹3 ␣ 22 ⫹4 ␣ 1 ␣ 2
␣ 1 ⫹2 ␣ 2
modulus for a nanomaterial may be significantly lower than
its bulk counterpart. The thickness-wise Poisson’s ratio xz
⫺
共 ␣ 1 ␣ 2 ⫹ ␣ 22 兲共 2 ␣ 1 ␣ 2 ⫹2 ␣ 22 兲
共 ␣ 1 ⫹2 ␣ 2 兲共 2 ␣ 21 ⫹8 ␣ 1 ␣ 2 ⫹6 ␣ 22 兲
冎 . 共18兲
decreases and the in-plane Poisson’s ratio xy increases as
the thickness of the nanomaterial increases.
For the present case, E c is 21.6 GPa. It is noted that the ACKNOWLEDGMENT
Young’s modulus for the material of a single-atom layer is This work was supported by a NASA Langley Research
27% lower than its bulk counterpart. Center Grant No. NAG-1-01073 to Purdue University.
Figure 7 shows Poisson’s ratios xy and xz as a function
of the atom layer number 2N⫹1. Again, significant varia- 1
K. Petersen and C. J. Guarnieri, J. Appl. Phys. 50, 6761 共1979兲.
tions of the Poisson’s ratios can be observed when the mate- 2
J. A. Ruud, T. R. Jervis, and F. Spaepen, J. Appl. Phys. 75, 4969 共1994兲.
rial has less than ten atom layers. Both Poisson’s ratios ap-
3
H. Huang and F. Spaepen, Acta Mater. 48, 3261 共2000兲.
4
S. Govindjee and J. L. Sackman, Solid State Commun. 110, 227 共1999兲.
proach the same bulk value ␣ 1 ␣ 2 ⫹ ␣ 22 / ␣ 21 ⫹4 ␣ 1 ␣ 2 ⫹3 ␣ 22 . 5
B. I. Yakobson, C. J. Brabec, and J. Bernholc, Phys. Rev. Lett. 76, 2511
This is consistent with the bulk material properties of cubic 共1996兲.
materials, i.e., the bulk values of Poisson’s ratios xy and xz 6
C. Q. Ru, Phys. Rev. B 62, 9973 共2000兲.
are identical for cubic materials.11 It is interesting to note that
7
E. B. Tadmor, M. Oritz, and R. Philips, Philos. Mag. A 73, 1529 共1996兲.
8
P. Zhang, Y. Huang, P. H. Geubelle, P. A. Kevin, and K. C. Hwang, Int. J.
Poisson’s ratio xy decreases with the increase of the atom Solids Struct. 39, 3893 共2002兲.
layer number while xz exhibits the opposite behavior. A 9
A. K. Ghatak and L. S. Kothari, An Introduction to Lattice Dynamics
maximum change of 75% from its bulk value is observed in 共Addison-Wesley, Reading, MA, 1972兲, pp. 76 –111.
10
A. Askar, Lattice Dynamics Foundations of Continuum Theories 共World
xy . Scientific, Singapore, 1984兲.
The result of this study indicates that, at nanoscales, 11
J. P. Hirth and J. Lothe, Theory of Dislocations, 2nd ed. 共Wiley, New York,
elastic moduli of materials are size dependent. The Young’s 1982兲.
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