Cryogenic

Drum Target System

User Manual

Meisyo Kiko Co., Ltd.

Head Office & Factory
148, Numa, Hikami-cho, Tanba-City, Hyogo, Japan 669-3634
TEL: +81-795-82-7111 FAX: +81-795-82-7648
Development Center
2-17-7, Arino-Nakamachi, Kita-ku, Kobe City, Hyogo, Japan 651-1313
TEL : +81-78-981-2148 FAX : +81-78-981-2153
 Contents

1. Overview of the system...............................................................................................................1

2. Name and type ............................................................................................................................1
3. Specifications ...............................................................................................................................1
3. 1 Appearance of the system ....................................................................................................1
3. 2 Composition of the system ................................................................................................2
3. 2. 1 Main unit of the system................................................................................................2
3. 2. 2 Control unit ...................................................................................................................2
3. 2. 3 Xe layer observation device ..........................................................................................3
3. 2. 4 Liquid nitrogen supply system.....................................................................................3
3. 2. 5 List of specifications......................................................................................................3
3. 2. 6 Safety mechanism .........................................................................................................4
3. 2. 7 List of major devices .....................................................................................................4
3. 2. 8 List of accessories and spare parts ..............................................................................4
4. External dimensions and weight ...............................................................................................4
5. Installation conditions ................................................................................................................5
6. Cautions .......................................................................................................................................5
7. Warranty policy............................................................................................................................5
8. After-sale service .........................................................................................................................5
9. Installation procedure .................................................................................................................6
9. 1 Control unit .......................................................................................................................6
9. 2 Main unit .........................................................................................................................11
10. Operation screen ........................................................................................................................16
11. Starting up the system ............................................................................................................16
11. 1 Checkpoints before startup ..............................................................................................16
11. 2 Supplying the utilities ......................................................................................................16
11. 3 Switching on the system...................................................................................................17
12. Operating method ......................................................................................................................19
12. 1 Operation flow...................................................................................................................19
12. 2 Returning the drum vertical axis to the home position .................................................20
12. 3 Screen operations..............................................................................................................21
12. 3. 1 Main screen ...............................................................................................................21
12. 3. 2 Actuator screen..........................................................................................................26
12. 3. 3 Liquid nitrogen screen ..............................................................................................28
12. 3. 4 Xe flow control screen ...............................................................................................29
12. 3. 5 Magnetic fluid tab ..................................................................................................30
13. Stopping the system ................................................................................................................31
13. 1 Operations to stop the system........................................................................................31
13. 2 Stopping the supply of utilities........................................................................................31
13. 3 Checkpoints after the end of operation ...........................................................................31
13. 4 Other points to be noted ...................................................................................................31
14. Malfunctioning of the system .................................................................................................32
14. 1 Display of alarms ..............................................................................................................32
14. 2 Alarm history ....................................................................................................................33
14. 3 Alarm list and recovery method ......................................................................................34
15. Example of operating procedure.............................................................................................36
For inquiries:.................................................................................................................................40
 Introduction
Thank you very much for purchasing this system. We ask you to kindly observe the content
of this user manual to ensure long-term use of this system.

Please note that this manual contains sentences preceded by !! Warning !! or !!

Caution !!. Sentences preceded by !! Warning !! and shown within a gray rectangle are
those that may cause an accident resulting in injury or death, if the content of which is
disregarded, while sentences preceded by !! Caution !! are those that may result in a critical
failure of the system, if the content of which is disregarded.

Please feel free to contact us if you have any questions or need any clarifications. The
contact address is given at the end of this manual.
 !! Warning !!
This system comprises high voltage electrical parts (AC220V). Do not
leave the cover of each device open while using the system.
Otherwise, you may be electrified.

!! Warning !!
Do not dismantle this system without an approval of the manufacturer.
As each unit contains a high voltage electrical part, you may be
electrified or get burned if you open the case inadvertently.
Do not leave the cover of each unit open, while using the system.
Otherwise, you may be electrified.

!! Caution !!
Be sure to read this user manual and the user manuals of the
accessories carefully before operating this system.

!! Caution !!
This system contains high voltage electrical parts (AC220V). Do
not leave the cover of each unit open, while using this system.
Otherwise, the system may be short-circuited due to the invasion
of foreign materials.
 !! Warning !!
Some parts of this system are exposed to voltage or heated/cooled to a
high/low temperature while the system is in operation. You may get
injured if you inadvertently touch such parts.
Do not operate this system leaving the cover of the unit open except
when handling it for the purpose of maintenance.

Be sure to read this user manual carefully before operating this

system. Wrong operation, wrong maintenance or inadequate
maintenance of this system may lead to a danger of the operator
and/or damage of property.
1. Overview of the system
This system forms and continuously supplies a cryogenic Xe target on the surface of a
rotating drum, using liquid nitrogen as a refrigerant. The target is formed by spraying Xe gas onto
the surface of the drum that has been cooled to an extremely low temperature achievable by
liquid nitrogen. As the drum rotates and makes vertical movements by an external drive motor, a
fresh target is constantly supplied even though it is repeatedly irradiated with laser pulse.

2. Name and type

Cryogenic drum target system MZ11W000

3. Specifications
3. 1 Appearance of the system
The appearance of the system is shown in the pictures below (Photos 1 4).

Photo 2 Control unit

Photo 1 Main unit of the system

Photo 3 Xe layer observation device Photo 4 Liquid nitrogen supply system

1
3. 2 Composition of the system
Attached sheets 3. 2-1 to 3. 2-6 show the composition of the system.
Attached sheet 3. 2-1 Cryogenic Drum Target System Assembly M1Z11W001
Attached sheet 3. 2-2 Cryogenic Drum Target System Control Unit M3Z11W601
Attached sheet 3. 2-3 Xe Layer Observation Device Assembly M2Z11W209
Attached sheet 3. 2-4 Xe Layer Observation Device Parts List M2Z11W210
Attached sheet 3. 2-5 Xe Layer Observation Device Wiring Diagram M3Z11W697
Attached sheet 3. 2-6 Liquid Nitrogen Supply System Assembly M2Z11W211

3. 2. 1 Main unit of the system

Drum revolution: 10-1000 rpm (set with touch panel)
Drum vertical drive speed: 30 - 450mm/min (set with touch panel)
Drum vertical travel distance: 3 - 30mmset with touch panel
Drum diameter: 100mm
Wobbling of drum surface during rotation: 70m or less
Wobbling of cylindrical surface of Xe layer scraped with wiper during drum rotation:
40m or less
Beam irradiation position: 150mm from the interface of vacuum chamber
Target window size: 15mm43mm (equipped with a shutter)
Thickness of Xe target layer: 500m or more
Xe gas supply control: 20 - 1000ml/minset with touch panel
Xe gas supply control method: By mass flow controller (Accuracy: 1.5F.S. at
20oC )
Xe gas supply pressure: 0.2MPa
Thermocouple: 5 pieces (Upper limit of liquid nitrogen in the drum1, lower limit2, 1
each for monitO-ring the temperature of magnetic fluid and drum case)
Weight: Approximately 60kg
Continuous operating hours: 8 hours or less

3. 2. 2 Control unit
The control unit comprises a programmable controller that controls the above-described
main unit and the solenoid valve of the liquid nitrogen supply system.
It is operated with a touch panel on the front of the unit.
The controller is accommodated in the control unit.
The power source is three-phase AC220 V (60Hz), 20A.
It issues a system ready signal as an external output (no voltage contact output) from the
front panel by means of a BNC connector. (Contact capacity: 3.5A or less)

-The system ready signal is issued only when all the conditions in the table below are
fulfilled.

Condition No. Details

1 The drum rotation axis is revolving at the set speed.
2 The drum vertical axis is operating at the set speed.
3 Xe is supplied at the set flow rate.
4 LN2 is controlled properly.
5 The drum case shutter is open.
6 The alarm screen does not indicate any errors.

2
3. 2. 3 Xe layer observation device
Camera: 1/3 color CCD camera (The monitor and power source should be prepared by
the customer.)
Camera type: WAT-240VIVID NTSC (Watec)
Lighting: LED spot lighting, white (The power source should be prepared by the
customer.)
Lighting type: IHV-SP30W (IMAC)
The camera and the lighting equipment are packed in separate sealed containers.
Flange for taking out cables: ICF70-FH
The camera monitor may be calibrated, for example, by measuring the travel distance of
the drum on the monitor when the drum vertical axis is moved by the controller for 3mm.

3. 2. 4 Liquid nitrogen supply system

Liquid nitrogen is automatically supplied as it decreases in the drum.
Supply method: Self-pressurizing
Pipe size: 1/2 inch
Safety valve operating pressure: 1.54 - 1.86MPa
Liquid nitrogen tanks equivalent to that described below should be prepared by the customer.
- Low temperature tank made by Cryo One Type: DLS-175
- Liquid outlet bore: W22-14 male (The bore should be specified when ordering the
tank.)

3. 2. 5 List of specifications

Drum revolution
10 - 1000rpm
adjustment range
Drum vertical travel speed
30 - 450mm/min
adjustment range
Performance
Drum vertical travel
3 - 30mm
distance adjustment range
Xe gas supply flow rate
20 - 1000ml/min
adjustment range
1/4 inch Swagelok tube fitting
Xe gas connection
Input pressure: 0.2MPa
Liquid nitrogen connection W22-14 female loose nut with packing

One-touch fitting for tubes of 1/4 inch outside diameter

Compressed air connection
Input pressure: 0.4MPa

Power source for control unit : 3-phase AC220V(60Hz)

Specification 20A
Power source
Power source for CCD camera : DC6V 165mA
Power source for LED lighting : Max. DC12V 1A

Operating temperature 5 - 40oC

Main unit: 385mm332mm height 1112.5mm

External
Weight Approx. 60kg
dimensions/weight
Control unit: 600mm600mm height 1070mm

3
3. 2. 6 Safety mechanism
(1) Emergency stop switch
(2) Safety valve (attached to the liquid nitrogen supply system)

3. 2. 7 List of major devices

Device name Type Manufacturer

Servo motor Motor: HC-RP103
Mitsubishi Electric
For rotational drive of the drum Driver: MR-J3-200AN
Stepping motor Motor: RK564BCE-T10 Single phase 200-230V
Oriental Motor
(For vertical drive of the drum) Driver: RKD514L-C
CPU Q03UDECPU Mitsubishi Electric

Mass flow controller

8500MC-0-1/4SW-XE-1000SCCM-1-1-0.3MPA Kofloc
(For Xe gas supply control)
Air cylinder
( For opening/closing of the drum CDU25-40D-A93 SMC
case)
Solenoid valve
(For opening/closing the drum case SY5120-5LOZD-C4N SMC
shutter)
Thermocouple M3Z11W338 Meisyo Kiko

Thermocouple (for vacuum) M3Z11W698 Meisyo Kiko

Color CCD camera WAT-240VIVID NTSC Watec

LED spot lighting IHV-SP30W Imac

Solenoid valve for liquid nitrogen 114-453-23 AC220V 60Hz ASCO Japan

The user manual of each device is downloadable from the manufacturers website.

3. 2. 8 List of accessories and spare parts

- Hexagon socket head cap screws for fixing the main unitM825 12 pieces
- O-ring for vacuum chamber interfaceG260-type 4C 1 piece
- Bellows unit+O-ring 2 sets
- Adaptor for nitrogen outlet 1 piece
- Drum case shutter axis seal part 1 set
- Teflon packing for fittings of the liquid nitrogen supply system 4 pieces

4. External dimensions and weight

Main unit: 385mm332mm height 1112.5mm Weight: Approx. 60kg
Control unit: 600mm600mm height 1070mm

4
5. Installation conditions
1 Power source
Three-phase AC220V60Hz 20Acontrol unit
DC6V 165mA (CCD camera)
Max. DC12V 1A (LED lighting)

2 Compressed air
Compressed air of 0.4MPa should be supplied.

3 Installation space
For the convenience of maintenance, leave a space of around 600mm in each direction from
the above-described external dimensions when installing the control unit.
Also, do not install the system in a high temperature, high humidity or high dust atmosphere
to prevent the breakdown of the system.

6. Cautions

1 Do not damage the vacuum seal surface of each part.

2 Be sure to use each device in the right way, reading the user manual carefully.

3 Contact us when you wish to order spare parts for regular maintenance (O-rings, etc.), in
case the system breaks down or if you have any questions regarding the system.

7. Warranty policy

We guarantee the system against failures attributable to us for one year, or no more than 250 days of
operation for eight hours a day, after the delivery of the system. We will repair or modify the system
for improvement free of charge in case any failure or trouble attributable to us has occurred to the
system during this period. However, transportation cost of devices and other costs that are not directly
relevant to the repair or modification of the system will be charged separately.
It should be noted, however, that we are not held responsible for troubles occurred due to mistakes
in the replacement of expendables, misuse of the system, neglect of the user manual, failures caused
by remodeling the system, natural disasters or fire.

8. After-sale service

Contact us for inquiries about the system, orders of spare parts or in the event of a breakdown of the
system.

5
9. Installation procedure
9. 1 Control unit
1) Bring the control unit to the place of installation.
2) Removing the back cover of the control unit

!! Caution !!
Do not perform any operations other than those specified in this
user manual. Do not touch the devices and cables in the control unit
unless instructions are given in this manual to operate them.

When you press the push button (at

2 locations), the lever springs up
and the back cover goes off.

Remove the back cover.

2

6
3) Removing the front covers of the control unit

Remove these two

covers.

Remove the screws fixing

the covers. 2

After the removal of the covers

3

7
4) Connecting the Xe tubes
Run the Xe tubes through the space at the bottom of
the back of the control unit.
1

Tube from the Xe

Tube from the cylinder
system

Connect the tubes to the Swagelok tube fitting

attached to the mass flow controller.
2

Tube from the

Tube from the Xe system
cylinder

Tighten the nut of the Swagelok tube fitting

to fix the tubes. 3

8
5) Connecting the power cable

Run the power cable through the Remove the cover of the terminal
space at the bottom of the back of block at the bottom of the front of
the control unit. the control unit.
1 2

Connect the power cable to L1, L2 and

Connect the power cable to the L3 terminals and an earth wire to E
bottom of the terminal block. terminal.
3 4

Attach the cover to the terminal

block.

9
6) Attaching the front covers of the control unit
2
Fix the cover by tightening
the screws.

Attach these two covers.

7) Attaching the back cover of the control unit

Insert the back cover into the slit (at 2 Attach the back
locations). cover.
1 2

Press down the lever (at 2

locations) until it clicks.
Then, the cover is fixed.
3

10
9. 2 Main unit
1) Mounting the main unit on the chamber

Lift the main unit with a forklift,

etc. to mount on the chamber.
Make sure that the vacuum seal
surface of the system has no flaw
or dust before mounting.

After mounting, fix the flange

to the chamber with bolts.

11
2) Installing the liquid nitrogen supply system
Connect the fittings of the flexible hose
Make sure that the flexible and the main unit of the liquid nitrogen
hose fitting has a Teflon supply system and tighten the nut of
packing with no flaw or dust. the fitting by hand.
1 2

After tightening the nut by hand until it is

too difficult to continue, use a wrench to Connect the flexible hose and the liquid
tighten it about a quarter turn more. nitrogen tank in the similar procedure.

3 4

Connect the main unit of the liquid

nitrogen supply system and the main unit
of the system in the similar procedure.
5

!! Caution !!
When installing the liquid nitrogen supply system, make sure
that each device faces up as shown in the picture. Installing it
in the wrong direction will cause a failure of the system.

12
3) Connecting the tubes

Connect the compressed Connect the Xe gas tube.

air tube.

Run the Xe gas tube between the liquid

nitrogen supply system and the heat
insulation material.

13
4) Connecting the cables

Connect the servo motor

connectors (at 2 locations).

Connect the connector of the

liquid nitrogen electromagnetic
valve.
Connect the connector of the
connector box (at 2 locations).

Connect the thermocouple

connectors (5 connectors).

When the connection of the

connectors is complete, bind the
cables with a plastic band, referring
to the pictures.

14
5) Piping of the nitrogen gas outlet

During the cooling operation of the drum

Attach a pipeline to the nitrogen

gas outlet as needed.

!! Warning !!
While the system is running to cool the drum, nitrogen
gas blows out forcefully from the nitrogen gas outlet. It
is advisable to run a pipeline from the outlet to the
exhaust duct. (The pipeline from the outlet to the
exhaust duct and the duct should be prepared by the
customer.) If you use the system without the piping,
make sure that the room in which the system is
operated is adequately ventilated. Inadequate
ventilation may lead to the danger of suffocation.

This concludes the installation of the system.

15
10. Operation screen

This system is operated with a color touch panel provided on the front of the control unit.

Descriptions of the displays on the screen are given in addition to

user instructions in the following sections.

11. Starting up the system

11. 1 Checkpoints before startup

Before starting up the system, make sure that:

1) there is no trace of water leakage around the system.
2) none of the vents around the system is blocked.

11. 2 Supplying the utilities

Supply the following utilities to the main unit.

* Electric power: Three-phase AC220V (60Hz) 20A (control unit)

* Compressed air: Connect 1/4 inch tube (0.4MPa)
* Xe: Connect 1/4 inch tube (0.2MPa)
* LN2: Connect 1/2 inch flexible hose (delivered with the system as an accessory)

16
11. 3 Switching on the system

1) Press the ON switch on the front of the control unit. This will turn on the electricity
and the main screen as shown below will appear on the color touch panel.

Warming up

2) The drum rotation axis cannot be operated while the Warming up sign is blinking on
the top right the screen. Start operating the drum rotation axis after the sign goes off.
The system is warmed up when the temperature of the magnetic fluid sealing reaches
20oC or higher.

17
3) If the buzzer sounds after switching on the system, press the Alarm tab at the
bottom of the screen to switch to the Alarm monitor screen. Eliminate the cause
of the error indicated on the screen and press the Error reset button on the
screen.
The buzzer will sound when the system malfunctions. If you only wish to stop the
sound, press the Buzzer reset button.
If you press the Error reset button without resolving the malfunction, the buzzer
will sound again.

18
12. Operating method
12. 1 Operation flow

Returning the drum vertical axis to the home position

If the axis has not returned to the home position (when
switching on the power or after pressing the Error reset
button.)

Setting the parameters

Rotating speed of the drum rotation axis
Travel speed and travel range of the drum vertical axis
Control temperature of the liquid nitrogen supply system
Xe gas supply flow rate

Start of operation
Start operating the system while checking the condition of each
device. (See 15. Example of operating procedure for details of
the operating method.)

System ready signal turns on

The signal turns on when the conditions are fulfilled.

Start of laser irradiation

Start laser irradiation after checking the thickness of the Xe
layer on the camera monitor.
(The laser should be prepared by the customer.)

Stop of laser irradiation

End of operation

19
12. 2 Returning the drum vertical axis to the home position

1) When the electricity is turned on without malfunctions, return the drum vertical
axis to the home position. Press the Actuator tab at the bottom of the screen to
switch to the Actuator screen.

2) If the Home position button on the right of the screen is shown in red, the drum
vertical axis has not returned to the home position. When you press the Home
position button, the button will blink and the axis will begin to return to the home
position. When it is complete, the Home position button will turn green. The
drum will stop at the center of the full stroke.

The axis will also begin to return to the home position if you press the Start
button for Vertical axis on the Main screen when the Home position button
is red. In this case, the axis will immediately begin the movement that was set on
the Actuator screen after returning to the home position.

20
12. 3 Screen operations
12. 3. 1 Main screen

1) The Main screen appears when you press the Main tab at the bottom of the screen.

2) Axis of rotation part

1. This indicates the current condition of the drum rotation axis.

2. This indicates the current set value of the drum revolution, which is set on the
Actuator screen.
3. This indicates the current revolution of the drum.
4This button is used to start/stop the drum rotation. When it is pressed to start, the
drum will accelerate to the revolution set on the Actuator screen and constantly
rotate at the set revolution.

21
3) Vertical axis part

1This indicates the current condition of the drum vertical axis

2This indicates the current set value of the travel range of the drum vertical axis, which
is set on the Actuator screen.
3This indicates the current travel speed of the drum vertical axis
4. This button is used to start/stop the vertical movement of the drum. When it is
pressed to start, the drum will make reciprocating movements over the travel range
set on the Actuator screen. If the drum is on the upper or lower limit switch, move
it away from the limit position by jog operation (See Section 7 of 12. 3. 2 1)) before
starting the operation.

22
4) LN2 part

1 This indicates the current condition of the liquid nitrogen supply system.
2 This indicates the current temperature measured by the thermocouples in the drum
(at three locations; upper, middle and lower rows).
3 This button is used to start/stop the control of liquid nitrogen supply. The supply
system is controllable when the drum revolution reaches 50rpm or higher. When the
drum revolution goes below 50rpm, the control of the supply system automatically
stops.

23
5) Xe part

1This indicates the current condition of Xe supply control.

2This indicates the current set value of the flow rate of Xe supply.
3This indicates the current flow rate of Xe supply.
4This button is used to start/stop the control of Xe supply. The control of the Xe
supply system can be started when the liquid nitrogen supply control has started.
The control automatically stops when the control of liquid nitrogen supply stops.
When you start the Xe supply control when the control of liquid nitrogen supply has
been stopped, the following window will appear.

When you press the YES button, the control of Xe supply will start.
When you press the NO button, the screen will return to the Main screen
without starting the control of Xe supply.

24
6) Shutter, Magnetic fluid and Drum case parts

1 3
5
4
2

1This button is used to open the shutter of the drum case. It is shown in red when the
shutter is open.
2This button is used to close the shutter of the drum case. It is shown in red when the
shutter is closed.
3This indicates the current condition of the control of the heater of the magnetic fluid
sealing.
4This indicates the current temperature measured by the thermocouple of the magnetic
fluid sealing.
5This indicates the current temperature measured by the thermocouple of the drum
case.

25
12. 3. 2 Actuator screen

1) The Actuator screen appears when you press the Actuator tab at the bottom of the screen.

1
6

2
7

1When you press the number, the following window appears. You can set the drum
revolution between 10rpm and 1000rpm.

2These buttons are used for the jog operation of the drum rotation axis. The axis
will move while the buttons are pressed.
3This indicates the cumulative operating hours of the drum rotation axis.
4When you press the number, the following window appears. You can set the
vertical travel speed of the drum between 30mm/min and 450mm/min.

26
 5This indicates the current position of the drum vertical axis. It is not shown if the
axis has not returned to the home position.
6This button is used to return the drum vertical axis to the home position. (See
11.2 Returning the drum vertical axis to the home position for details.)
7These buttons are used for the jog operation of the drum vertical axis. The axis
will move while the buttons are pressed. The buttons will turn red if the drum is
on the limit switch.
8When you press the number, the following window appears. You can set the
vertical travel range of the drum between -15mm and +15mm.

If the travel range is set at less than 3mm, the following alarm appears. Correct the
setting to 3mm or longer.

9This indicates the cumulative operating hours of the drum vertical axis.

27
12. 3. 3 Liquid nitrogen screen

1) The liquid nitrogen screen appears when you press the LN2 tab at the bottom of the
screen.

1. The following window appears when you press the number. You can set the
control temperature of the liquid nitrogen supply.

< Control method >

- If the temperature measured by the thermocouple in the upper row of the
drum remains lower than the set value for 10 seconds, the valve for the supply of
liquid nitrogen will close.
- If the temperature measured by the thermocouple in the upper row of the
drum is equal to or higher than the set value, the valve will open.

The temperature can be set between -999.9 and 999.9oC. The manufacturers
recommended setting is -188.0oC.

28
 2. This indicates the temperature at which the alarm sounds when the supply from
the liquid nitrogen tank is interrupted.

The set temperature is -100.0oC. The setting has been done by the
manufacturer.

< Condition for alarm activation >

- The alarm is activated if the temperature measured by the thermocouple in the
lower row of the drum remains higher than the set value for 180 seconds after
having fallen to the set value or lower, while the supply of liquid nitrogen is being
controlled.

12. 3. 4 Xe flow control screen

1) The Xe flow control screen appears when you press the Xe tab at the bottom
of the screen.

1. The following window appears when you press the number. You can set the Xe
flow rate between 20 and 1000ml/min.

29
 2. This indicates the flow rate at which the alarm sounds when the supply from the
Xe cylinder is interrupted.
The set flow rate is 15ml/min. The setting has been done by the manufacturer.

< Condition for alarm activation >

- The alarm is activated if the Xe flow rate remains lower than the set value for 20
seconds while the Xe supply is being controlled.

12. 3. 5 Magnetic fluid tab

The setting for controlling the temperature of the magnetic fluid sealing has been done
by the manufacturer. Therefore, the Magnetic fluid tab cannot be operated by
the customer.

< Temperature control of the magnetic fluid sealing >

- The temperature is controlled at 20oC with a heater.
- The alarm is activated if the temperature remains 80oC or higher for 10 seconds.
- The alarm is activated if the temperature remains 0oC or lower for 10 seconds.

30
13. Stopping the system
13. 1 Operations to stop the system

1) Stop the control of Xe supply.

2) Stop the control of liquid nitrogen supply. (Do not close the needle valve of the
liquid nitrogen supply system.)
3) Close the liquid release valve of the liquid nitrogen tank.
4) Stop the operation of the drum vertical axis.
5) Stop the operation of the drum rotation axis to reduce the revolution of the drum.
6) When the drum rotation has stopped, press the power OFF switch beside the
touch panel to turn off the electricity.
7) Turn off the main breaker at the bottom of the front of the system.

!! Caution !!
Do not restart the system within 10 hours after the
drum rotation has stopped. The system may be
damaged if it is restarted while the guide part is
cold.
Do not expose the drum to atmosphere before it
returns to room temperature.
Pay attention to the pressure in the vacuum
chamber as the Xe layer of the drum will vaporize.

13. 2 Stopping the supply of utilities

Stop the supply of utilities to the system.

* Electricity
* Compressed air
* Xe

13. 3 Checkpoints after the end of operation

After stopping the system, make sure that:

1) there is no trace of water leakage around the system
2) there is no strange smell, etc.

13. 4 Other points to be noted

Stop the equipment of your company as necessary.

Because of the nature of the system, the liquid nitrogen tubes get frosted. Wipe off
the frost as needed.
This concludes the stopping of the system.

31
14. Malfunctioning of the system
14. 1 Display of alarms

1) If there is anything wrong with the system, an alarm will sound. Press the Alarm
tab at the bottom of the screen. Then, the Alarm monitor screen will appear.

2) The buzzer sound can be stopped by pressing the Buzzer reset button.

3) The item that the circle to the left has turned red is the malfunction in question.
Eliminate the cause of the malfunction in question and press the Error reset button
on the screen.
The circle that has turned red will turn blue when the cause of malfunction is
eliminated. If you press the Error reset button without eliminating the cause of
malfunction, the buzzer will sound again.

32
14. 2 Alarm history

1) When you press the Alarm history button, the Alarm history screen appears.

2) When you press the Alarm monitor button, the screen switches to the Alarm
monitor screen.

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14. 3 Alarm list and recovery method
1) The following table shows an alarm list. See 14. 3 2) for the recovery method.
Alarm list Details
The system has made an
Emergency stop
emergency stop.
The drum rotation axis has
Drum rotation stop
stopped rotation.
Drum vertical driving The drum vertical axis has
stop stopped operation.
The Xe flow rate has
Xe flow decline
declined.
The amplifier of the drum
Drum rotation abnormal
rotation axis has an
amplifier
abnormality.
The voltage of the battery
Battery fall
has fallen.
abnormal PLC The PLC is malfunctioning.
The PLC unit of the drum
Drum vertical drive
vertical axis is
abnormal unit
malfunctioning.
The PLC unit of the drum
Drum rotaion drive
rotation axis is
abnormal unit
malfunctioning.
The supply of LN2 has
Out of LN2
failed.
LN2 upper row
The thermocouple in the
thermocouple
LN2 upper row is broken.
disconnection
LN2 middle row
The thermocouple in the
thermocouple
LN2 middle row is broken.
disconnection
LN2 lower row
The thermocouple in the
thermocouple
LN2 lower row is broken.
disconnection
Drum case The thermocouple in the
thermocouple drum case is broken.
disconnection
The thermocouple input
Abnormal thermocouple
unit is malfunctioning.
input unit
The thermocouple of the
Abnormal magnetic
magnetic fluid sealing is
fluid heater setting unit
broken.
There is something wrong
Abnormal shutter open with the opening of the
shutter.
There is something wrong
Abnormal shutter close with the closing of the
shutter.
There is something wrong
Magnetic fluid part
with the temperature of the
abnormal maximum
magnetic fluid exceeding
temperature
the upper limit.
There is something wrong
Magnetic fluid part
with the temperature of the
abnormal minimum
magnetic fluid exceeding
temperature
the lower limit.
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System status in case of an
Cause
alarm
The drum rotation and vertical
The emergency stop switch was
axes stop operation. Supply of
pressed.
LN2 and Xe stops.
The drum rotation and vertical
The drum rotation axis is not
axes stop operation. Supply of
operating.
LN2 and Xe stops.
The drum rotation and vertical
The drum vertical axis is not
axes stop operation. Supply of
operating.
LN2 and Xe stops.
There is no supply of Xe from
The system retains its status.
the cylinder.
Mitsubishi servo motor driver The drum rotation and vertical
(MR-J200AN) has detected axes stop operation. Supply of
an abnormality. LN2 and Xe stops.
The voltage of the sequencer
The system retains its status.
battery has dropped.
A problem has occurred to the
The drum rotation axis stops
PLC that controls the cryogenic
operation.
target system.
The PLC unit that controls the The drum rotation and vertical
drum vertical axis is axes stop operation. Supply of
malfunctioning. LN2 and Xe stops.
The PLC unit that controls the The drum rotation and vertical
drum rotation axis is axes stop operation. Supply of
malfunctioning. LN2 and Xe stops.
There is no supply of liquid
The system retains its status.
nitrogen from the tank.
Breakage of the thermocouple
installed in the LN2 upper row The system retains its status.
has been detected.
Breakage of the thermocouple
installed in the LN2 middle row The system retains its status.
has been detected.
Breakage of the thermocouple
installed in the LN2 lower row The system retains its status.
has been detected.
Breakage of the thermocouple
installed in the drum case has The system retains its status.
been detected.
The PLC unit for the input
control of signals from the The system retains its status.
thermocouple is malfunctioning.
Breakage of the thermocouple
installed in the magnetic fluid The system retains its status.
sealing has been detected.
The shutter does not open. The system retains its status.
The shutter does not close. The system retains its status.
The temperature of the magnetic The drum rotation axis stops
fluid remained 80oC or higher operation. Supply of LN2 and Xe
for 10 seconds or longer. stops.
The temperature of the magnetic The drum rotation axis stops
fluid remained 0oC or lower for operation. Supply of LN2 and Xe
10 seconds or longer. stops.
 2) Alarm recovery method: The following table shows the alarm recovery method.
Alarm list
Emergency stop
Drum rotation stop
Drum vertical driving stop
Xe flow decline
Drum rotation abnormal amplifier
Battery fall
abnormal PLC
Drum vertical drive abnormal unit
Drum rotation drive abnormal unit
Out of LN2
LN2 upper row thermocouple
disconnection
LN2 middle row thermocouple
disconnection
LN2 lower row thermocouple
disconnection
Drum case thermocouple disconnection
Abnormal thermocouple input unit
Abnormal magnetic fluid heater setting
unit
Abnormal shutter open
Abnormal shutter close
Magnetic fluid part abnormal maximum
temperature
Magnetic fluid part abnormal minimum
temperature
Recovery method
Release the emergency stop switch and touch Error reset on the touch
panel.
Touch Error reset on the touch panel.
Touch Error reset on the touch panel.
Touch Error reset on the touch panel.
It is necessary to eliminate the cause of error, switch off and restart the
system.
It is necessary to replace the battery in accordance with the manual provided
by the manufacturer (Attached sheet 14. 3 Replacement of the Battery).
It is necessary to eliminate the cause of error and touch Error reset on the
touch panel. If the alarm is not deactivated yet, it is necessary to switch off
and restart the system.
It is necessary to eliminate the cause of error and touch Error reset on the
touch panel. If the alarm is not deactivated yet, it is necessary to switch off
and restart the system.
It is necessary to eliminate the cause of error and touch Error reset on the
touch panel. If the alarm is not deactivated yet, it is necessary to switch off
and restart the system.
Touch Error reset on the touch panel.
It is necessary to eliminate the cause of error and touch Error reset on the
touch panel.
It is necessary to eliminate the cause of error and touch Error reset on the
touch panel.
It is necessary to eliminate the cause of error and touch Error reset on the
touch panel.
It is necessary to eliminate the cause of error and touch Error reset on the
touch panel.
It is necessary to eliminate the cause of error and touch Error reset on the
touch panel. If the alarm is not deactivated yet, it is necessary to switch off
and restart the system.
It is necessary to eliminate the cause of error and touch Error reset on the
touch panel.
It is necessary to eliminate the cause of error and touch Error reset on the
touch panel.
It is necessary to eliminate the cause of error and touch Error reset on the
touch panel.
Touch Error reset on the touch panel.
Touch Error reset on the touch panel.
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15. Example of operating procedure

An example of an actual operating procedure is described below. The set values are given as
a reference.

1) After starting up the system as in 11. , press the ON switch on the front of the
control unit to switch on the system.

2) Set the supply pressure of Xe from the cylinder to the mass flow controller at
0.2MPa. Then, start the Xe supply control. After evacuating air from the piping, stop
the Xe supply control.

3) Return the drum vertical axis to the home position and set the parameters.
- Set value for drum revolution: 100rpm
- Set value for drum vertical axis travel range: -15 - +15mm
- Set value for drum vertical axis travel speed: 400mm/min
- Set value for liquid nitrogen control temperature: -188.0oC
- Set value for Xe supply flow rate: 100ml/min
- Drum case shutter: Closed

4) After warming up the system, start rotating the drum.

(Reference value) The vacuum chamber pressure at this point may be 1.710-4Pa.

5) Operate the Pressurization valve of the liquid nitrogen tank to adjust the internal
pressure of the tank to 0.6 0.9MPa. The pressure should be measured by the
pressure gauge attached to the tank. Adjust the Pressurization valve of the tank by
checking the pressure gauge to ensure that the internal pressure of the tank is always
within the range of 0.6 to 0.9MPa while the LN2 supply is being controlled.

Liquid outlet Liquid release valve

Pressure gauge for

internal pressure

Pressurization valve

!! Caution !!
The pictures above are of the liquid nitrogen tank
used by us. For the actual handling of the liquid
nitrogen tank that you use, refer to the instructions
in the user manual of the tank.

36
6) Open the needle valve of the liquid nitrogen supply system. The valve should be
open a half turn when the internal pressure of the liquid nitrogen tank is about
0.7MPa.

Needle valve

7) When the drum revolution exceeds 50rpm, open the liquid release valve of the tank
about a quarter turn and start the control of the liquid nitrogen supply.

8) When the drum has been cooled enough, change the setting of the drum revolution
to 1000rpm and start the operation of the drum vertical axis.
The following two conditions are examples of the criteria to determine whether or
not the drum has been cooled sufficiently and the system is ready to start the
supply of Xe.
1. The drum radius has shrunk about 0.2mm. (This should be checked on the
camera monitor.)
2. The temperature measured by the thermocouple in the lower row of the
drum remains -190oC or lower for one minute or longer after the solenoid
valve of the liquid nitrogen supply system has closed.

Drum

The drum edge, which was at the

100mm point on the scale on the
camera monitor (23 magnifications),
has moved to the 104.5mm point
after cooling the drum. As
104.5-100/23 is nearly equal to
0.2, it is determined that the drum
has been cooled sufficiently.

37
9) Start the control of Xe supply.

!! Caution !!
If you start supplying Xe when the drum is not
cooled enough, the internal pressure of the vacuum
chamber will increase sharply. Pay attention to the
drum temperature and the internal pressure of the
vacuum chamber when starting the supply of Xe.

10) When the wiper engages the Xe layer and the Xe layer looks flat on the screen, the
Xe layer is complete. Confirm that a Xe layer with a thickness of 500m or thicker
has been formed with the camera monitor.

About 15 minutes after the

supply of Xe was started

38
About 25 minutes after starting the About 25 minutes after starting the
supply of Xe supply of Xe
Center of the drum vertical axis Bottom of the drum vertical axis

About 35 minutes after starting the About 35 minutes after starting

supply of Xe the supply of Xe
Center of the drum vertical axis Bottom of the drum vertical axis

The Xe layer is complete in about 45 The Xe layer is complete in about 45

minutes after starting the supply of Xe. minutes after starting the supply of Xe.
Center of the drum vertical axis Bottom of the drum vertical axis

39
For inquiries:

Feel free to contact the address below in case any trouble has occurred to the
system or for requests of remodeling or maintenance.

Meisyo Kiko Co., Ltd.

Head Office & Factory
148, Numa, Hikami-cho, Tanba-City, Hyogo, Japan 669-3634
TEL: +81-795-82-7111 FAX: +81-795-82-7648
Development Center
2-17-7, Arino-Nakamachi, Kita-ku, Kobe City, Hyogo, Japan 651-1313
TEL : +81-78-981-2148 FAX : +81-78-981-2153

Website: www.meisyo.co.jp/
E-mail: infom@meisyo.co.jp

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