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Preceramic polymers are a kind of polymer that can be converted into ceramics by
heat treatment typically above 800 o C (Bernardo et al. 2014, p. 1927). Various methods can
be used to process the preceramic polymer one of which is microcomponent processing using
processing or soft lithography and polymer-derived ceramics (Schulz 2013; Ye et al. 2010;
According to del Campo & Arzt (2008, p. 912), most research in recent decades
focuses on trying to shrink the lateral dimensions of the imaged features. In their research,
they suggested that the current trends were to improve shrinking to at least 45nm by the year
2010 (del Campo and Arzt 2008, p. 912). There is also research done on projection optical
lithography by Rothschild (2005, p. 24) which projected 32nm nodes by 2013. Martnez-
Crespiera et al. (2011, p. 242) did an experiment on the fabrication of SiOC ceramic
and found that the former had an advantage of allowing production of microstructures on
substrates(Martnez-Crespiera et al. 2011, p. 248). They also experimented with use of photo-
crosslinking as a procedure to obtain rapid and crack-free infusible polymers to great success.
They were able to achieve ratios as high as 3:1 and micro-sizes in the order of 20m
frequently used method to obtain the micrometer-sized surface features needed for sensors
Literature review on preceramic polymer processing by photolithography 2
and actuators (Yang et al. 2001, p.54). However, to remain competitive to traditional
ceramics, preceramic polymers have to be cheap, and thus the fabrication process needs to be
at low cost (Colombo et al. 2010, p. 1808). Therefore, further research on the use of
photolithography is required to make the process even cheaper in the future. Furthermore,
Reference list
References
Bernardo, E., Fiocco, L., Parcianello, G., Storti, E. and Colombo, P. 2014, Advanced
Colombo, P., Mera, G., Riedel, R. and Sorar, G. 2010, Polymer-Derived Ceramics: 40 Years
del Campo, A. and Arzt, E. 2008, Fabrication Approaches for Generating Complex Micro-
Martnez-Crespiera, S., Ionescu, E., Schlosser, M., Flittner, K., Mistura, G., Riedel, R. and
Schulz, M., Brner, M., Hauelt, J. and Heldele, R. 2005, Polymer derived ceramic
Yang, H., Deschatelets, P., Brittain, S. and Whitesides, G. 2001, Fabrication of High-
Ye, C., Chen, A., Colombo, P. and Martinez, C. 2010, Ceramic microparticles and capsules