UNIVERSIDAD NACIONAL MAYOR

DE SAN MARCOS
(Universidad del Per, DECANA DE
AMRICA)

Facultad: Ingeniera electrnica y elctrica

Escuela: Ingeniera electrnica

Tema: microresistor beam

Docente: ing. Alarcon Matutti

Alumno: pollera pollera, johann

Cdigo: 08190074

Fecha de presentacin: 04 de julio

Lima - Per
2017
OBJETIVOS
Conocer el diseo y la simulacin de microresistencias beam.
Conocer un poco sobre la tecnologa Biology, Electronis, Aesthetics Mechanics
Familiarizarnos con el comsol y la simulacin en dicho programa.
Este ejemplo ilustra la capacidad de anlisis trmico, elctrico y estructural pareja en un
modelo. Esta aplicacin particular mueve un haz haciendo pasar una corriente a travs de l; la
corriente genera calor, y el aumento de temperatura conduce a los desplazamientos que la
expansin trmica. El modelo estima la cantidad de corriente y el aumento de la temperatura
son necesarios para desplazar la viga.

MARCO TERICO
Tecnologa beam
Robtica BEAM es una forma de pensar y construir robots con races en el movimiento
robtico conductista o activista de la dcada de 1980. En lugar de confiar en los
microprocesadores, la programacin y la lgica digital, los diseos BEAM prefieren los
componentes discretos, sistemas de control de estmulo-respuesta, y lgica anloga. Desde
una perspectiva de diseo, la robtica BEAM trata de obtener los comportamientos ms
complejos e interesantes utilizando los actuadores, componentes y circuitos ms simples. Ah
est el desafo.

BEAM es un acrnimo de:

Biologa Los robots BEAM se inspiran en la naturaleza, especialmente en los organismos

simples, como las plantas, los gusanos y los insectos. A menudo se clasifican por su sistema
principal de sensores: audiotropos responden al sonido, termotropos responden al calor,
radiotropos responden a las fuentes de radio, etc.

Electrnica Robtica BEAM requiere el diseo de circuitos inteligentes. A diferencia de los

sistemas digitales en el que slo hay que interconectar todos los pines de forma correcta y
asegurarse de que sus tensiones van de alta y baja en los tiempos adecuados, los robots BEAM
utilizan circuitos analgicos, que son ms sutiles. Disear circuitos digitales es ms como la
programacin de computadoras, mientras que el diseo de circuitos analgicos se parece ms
a la plomera.

Esttica La robtica BEAM es tanto arte como ciencia. Un diseo que luzca bonito no
siempre es una prioridad para los ingenieros, pero el enfoque BEAM enfatiza la importancia de
la apariencia. La esttica pulida es una prueba de la madurez en los diseos BEAM. Un robot
bonito ha sido diseado y construido con gran atencin en el detalle. Su forma es refinada,
natural, eficiente, y una reflexin lgica de su funcin. La gente que los ve reconocer su
belleza y por ende quiere conservarlos, as la esttica se convierte en una funcin de
supervivencia, tambin.

Mecnica A veces una solucin mecnica es ms barata, ms fcil, o ms robusta que una
electrnica. Por ejemplo, en lugar de complicar un circuito con controles de motores
electrnicos, los diseos BEAM suelen adoptar simples hacks mecnicos (como inclinacin
pronunciada de los motores o el uso de ruedas de pequeo dimetro) para regular la velocidad
del motor
Este tipo de Robtica hoy en da puede considerarse obsoleta e intil, ya que con la aparicin
en 2001 de los microcontroladores con tecnologa "Flash", los cuales pueden incluso ser
programados en lenguaje BASIC, hacen que la construccin de mecanismos robticos
utilizando solo componentes discretos y analgicos, algo tpico de la robtica BEAM, sea algo
tedioso, con grandes prdidas de tiempo y recursos, calibrando arcaicos potencimetros y
estableciendo niveles de voltaje con resistencias y transistores de uso general, diodos, y un
largo etc. EStas labores pueden realizarse fcil y limpiamente, y sobre todo a un nivel casi
profesional, utilizando tan slo unas cuantas lneas de cdigo en un microcontrolador
estndar, como el 16F84A. Sin embargo, estas molestias se explican debido a que en los aos
90, su desarrollador al no disponer de microcontroladores adecuados para estas funciones
bsicas, dependa de sistemas discretos para resolver ecuaciones algebraicas usando
transistores.

En cuantas aplicaciones prcticas, la experiencia demuestra que no existe un solo robot

limpiador, barredor, industrial, domstico, comercialmente disponible para usos serios que
haga uso de dicha robtica BEAM. Su estudio es ms un acto de curiosidad innata y
meramente educativo, pero si el estudiante desea realizar sistemas tiles y elegantes, es mejor
pasar por alto la robtica BEAM y adentrarse en el mundo de los microcontroladores. Es
importante recordar que esta rama data de los aos 1990 y por lo tanto es ahora en el siglo XXI
algo obsoleto y fugaz, sera algo parecido a comparar un sistema de entretenimiento casero
XBOX 360 de 2009 (Microcontroladores) con un arcaico 2685 Game computer de 1978
(robtica Beam).
MARCO METODOLGICO
Definicin de modelo

Figura 1: Geometra Microbeam.

A microbeam cobre tiene una longitud de 13 m con una altura y anchura de 1 m. Pies en
ambos extremos unirla rgidamente a un sustrato. Un potencial elctrico de 0,2 V aplicada
entre los pies induce una corriente elctrica. Debido a la resistividad del material, la corriente
se calienta la estructura. Debido a que el haz opera a la intemperie, el calor generado se disipa
en el aire. La tensin inducida trmicamente carga del material y se deforma la viga.

Como primera aproximacin, se puede asumir que la conductividad elctrica es constante. Sin
embargo, la resistividad de un conductor aumenta con la temperatura. En el caso del cobre, la
relacin entre la resistividad y la temperatura es aproximadamente lineal en un amplio
intervalo de temperaturas:

= 0 (1 + (T - T0 ))

es el coeficiente de temperatura. Se puede obtener dependencia de la temperatura del

conductor de la relacin que define la resistividad elctrica; conductividad es simplemente su
recproco (= 1 / ).

Para las ecuaciones de transferencia de calor, establecer los lmites de base hacia el sustrato a
una temperatura constante de 323 K. Usted en el modelo de la refrigeracin por aire de
conveccin en otros lmites utilizando una calor como condicin lmite de flujo con un
coeficiente de transferencia de calor, h, de 5 W / (m2 K) y una temperatura exterior, Tinf, De
298 limitaciones K. estndar manejan conexin rgida las bases' al sustrato.

PRODUCTOS ESPERADOS
Figura 2 muestra el campo de temperatura en la superficie microbeam al resolver el
modelo utilizando una resistividad dependiente de la temperatura como en
ecuacin 1. Sobre la base de la escala de color, la temperatura mxima es de
aproximadamente 710 K.
Figura 3 muestra la deformacin del microbeam. El desplazamiento para el caso
dependiente con temperatura es de 48 nm en comparacin con el desplazamiento
mximo para la conductividad elctrica constante, que es 88 nm (la trama escalas
de la deformacin por un factor de alrededor de 20).

Figura 2: Temperatura de la superficie con conductividad elctrica dependiente de la temperatura.

Figura 3: deformacin Microbeam con conductividad elctrica dependiente de la temperatura

FABRICACIN Y MANUFACTURA
Acontinuacion detallaremos los pasos para crear el modelo que hemos simulado en el
comsol

From the File menu, choose New.

NE W
In the New window, click Model Wizard.
MODE L WIZAR D
1 In the Model Wizard window, click 3D.
2 In the Select Physics tree, select Structural Mechanics> Joule Heating and Thermal
Expansion.
3 Click Add.
4 Click Study.
5 In the Select Study tree, select Preset Studies for Selected Physics
Interfaces>Stationary.
6 Click Done.

G L OB AL DE FI NI TI ON S
Parameters
1 On the Home toolbar, click Parameters.
2 In the Settings window for Parameters, locate the Parameters section.
3 In the table, enter the following settings:

Na Expressio Value Description

V0
me 0.2[V]
n 0.2 V Applied voltage
T0 323[K] 323 K Heat sink temperature
Text 298[K] 298 K External temperature
k 5[W/(m^2 5 Heat transfer coefficient
*K)] W/(mK)

GEO M ETR Y 1
1 In the Model Builder window, under Component 1 (comp1) click Geometry 1.
2 In the Settings window for Geometry, locate the Units section.
3 From the Length unit list, choose m.

Work Plane 1 (wp1)

1 On the Geometry toolbar, click Work Plane.
2 In the Settings window for Work Plane, click Show Work Plane.

Bzier Polygon 1 (b1)

1 On the Work Plane toolbar, click Primitives and choose Bzier Polygon.
2 In the Settings window for Bzier Polygon, locate the Polygon Segments section.
3 Find the Added segments subsection. Click Add Linear.
4 Find the Control points subsection. In row 2, set xw to 5 and yw to 1.5.
5 Find the Added segments subsection. Click Add Linear.
6 Find the Control points subsection. In row 2, set xw to 18.
7 Find the Added segments subsection. Click Add Linear.
8 Find the Control points subsection. In row 2, set xw to 23 and yw to 0.
9 Find the Added segments subsection. Click Add Linear.
10 Find the Control points subsection. In row 2, set yw to 4.
11 Find the Added segments subsection. Click Add Linear.
12 Find the Control points subsection. In row 2, set xw to 18 and yw to 2.5.
13 Find the Added segments subsection. Click Add Linear.
14 Find the Control points subsection. In row 2, set xw to 5.
15 Find the Added segments subsection. Click Add Linear.
16 Find the Control points subsection. In row 2, set xw to 0 and yw to 4.
17 Find the Added segments subsection. Click Add Linear.
18 Find the Control points subsection. Click Close Curve.
19 On the Work Plane toolbar, click Build All.
20 Click the Zoom Extents button on the Graphics toolbar.

Work Plane 1 (wp1)

In the Model Builder window, under Component 1 (comp1)>Geometry 1 click

Work Plane 1 (wp1).

Extrude 1 (ext1)
1 On the Geometry toolbar, click Extrude.
2 In the Settings window for Extrude, locate the Distances section.
3 In the table, enter the following settings:

Distances (m)
3

4 Click Build All Objects.

5 Click the Zoom Extents button on the Graphics toolbar.
Work Plane 2 (wp2)
1 On the Geometry toolbar, click Work Plane.
2 In the Settings window for Work Plane, locate the Plane Definition section.
3 From the Plane type list, choose Face parallel.
4 Find the Planar face subsection. Select the Active toggle button.
5 On the object ext1, select Boundary 6 only.
6 In the Offset in normal direction text field, type -1.5.
7 Select the Reverse normal direction check box.
8 Click Show Work Plane.

Plane Geometry
1 In the Settings window for Plane Geometry, locate the Visualization section.
2 Find the In-plane visualization of 3D geometry subsection. Clear the Intersection
(cyan)
check box.
3 Clear the Coincident entities (blue) check box.

Bzier Polygon 1 (b1)

1 On the Work Plane toolbar, click Primitives and choose Bzier Polygon.
2 In the Settings window for Bzier Polygon, locate the Polygon Segments section.
3 Find the Added segments subsection. Click Add Linear.
4 Find the Control points subsection. In row 1, set xw to -11.5 and yw to -1.5.
5 In row 2, set xw to -6.3 and yw to -1.5.

6 Find the Added segments subsection. Click Add Linear.

7 Find the Control points subsection. In row 2, set yw to 0.5.
8 Find the Added segments subsection. Click Add Linear.
9 Find the Control points subsection. In row 2, set xw to 6.3.
10 Find the Added segments subsection. Click Add Linear.
11 Find the Control points subsection. In row 2, set yw to -1.5.
12 Find the Added segments subsection. Click Add Linear.
13 Find the Control points subsection. In row 2, set xw to 11.5.
14 Find the Added segments subsection. Click Add Linear.
15 Find the Control points subsection. In row 2, set xw to 6.5 and yw to 1.5.
16 Find the Added segments subsection. Click Add Linear.
17 Find the Control points subsection. In row 2, set xw to -6.5.
18 Find the Added segments subsection. Click Add Linear.
19 Find the Control points subsection. Click Close Curve.
20 Click the Zoom Extents button on the Graphics toolbar.

Fillet 1 (fil1)
1 On the Work Plane toolbar, click Fillet.
2 On the object b1, select Points 4 and 6 only.
3 In the Settings window for Fillet, locate the Radius section.
4 In the Radius text field, type 0.3.
5 On the Work Plane toolbar, click Build All.

Work Plane 2 (wp2)

In the Model Builder window, under Component 1 (comp1)>Geometry 1 click
Work Plane 2 (wp2).

Extrude 2 (ext2)
1 On the Geometry toolbar, click Extrude.
2 In the Settings window for Extrude, locate the Distances section.
3 In the table, enter the following settings:
Distances (m)
4

4 Click Build All Objects.

Intersection 1 (int1)
1 On the Geometry toolbar, click Booleans and Partitions and choose Intersection.
2 Click in the Graphics window and then press Ctrl+A to select both objects.
3 In the Settings window for Intersection, click Build All Objects.

Form Union (fin)

1 In the Model Builder window, under Component 1 (comp1)>Geometry 1 right-click
Form Union (fin) and choose Build Selected. The model geometry is now complete.

DEF I NI T I ON S
Add a set of selections that you can use later when applying boundary conditions.

Explicit 1
1 On the Definitions toolbar, click Explicit.
2 In the Model Builder window, right-click Explicit 1 and choose Rename.
3 In the Rename Explicit dialog box, type connector1 in the New label text field.
4 Click OK.
5 In the Settings window for Explicit, locate the Input Entities section.
6 From the Geometric entity level list, choose Boundary.
7 Select Boundary 1 only.

Explicit 2
1 On the Definitions toolbar, click Explicit.
2 In the Model Builder window, right-click Explicit 2 and choose Rename.
3 In the Rename Explicit dialog box, type connector2 in the New label text field.
4 Click OK.
5 In the Settings window for Explicit, locate the Input Entities section.
6 From the Geometric entity level list, choose Boundary.
7 Select Boundary 13 only.

Explicit 3
1 On the Definitions toolbar, click Explicit.
2 In the Model Builder window, right-click Explicit 3 and choose Rename.
3 In the Rename Explicit dialog box, type connectors in the New label text field.
4 Click OK.
5 In the Settings window for Explicit, locate the Input Entities section.
6 From the Geometric entity level list, choose Boundary.
7 Select Boundaries 1 and 13 only.

AD D MA T E R I A L
1 On the Home toolbar, click Add Material to open the Add Material window.
2 Go to the Add Material window.
3 In the tree, select MEMS>Metals>Cu - Copper.
4 Click Add to Component in the window toolbar.
5 On the Home toolbar, click Add Material to close the Add Material window.

MA TERIALS
Cu - Copper (mat1)
1 In the Model Builder window, under Component 1 (comp1)>Materials click Cu -
Copper (mat1).
2 In the Settings window for Material, locate the Material Contents section.
3 In the table, enter the following settings:

Property Name Valu Uni Prope

e t rty
Relative permittivity epsilo 1 1 Basic
group
nr
4 Click to expand the Material properties section. Locate the Material Properties
section. In the Material properties tree, select Electromagnetic Models>Linearized
Resistivity> Reference resistivity (rho0).
5 Click Add to Material.

6 Locate the Material Contents section. In the table, enter the following settings:

Property N Value U Property

Reference rh
a 1.72e-
ni Linearized
group
resistivity
Resistivity o0
m
al 8[ohm*m]
0.0039[1/K] m
t
1/ resistivity
Linearized
temperature e
ph K resistivity
Reference
coefficient Tr
a 293[K] K Linearized
temperature ef resistivity
ELECTRIC CURRENTS (EC)
Current Conser vation 1
1 In the Model Builder window, under Component 1 (comp1)>Electric Currents (ec) click
Current Conservation 1.
2 In the Settings window for Current Conservation, locate the Conduction Current
section.
3 From the list, choose Linearized resistivity.
Before solving the two-way coupled model with a temperature-dependent resistivity, use
a constant resistivity for later comparison:
4 From the list, choose User defined. Keep the default zero value for .

Ground 1
1 In the Model Builder window, right-click Electric Currents (ec) and choose Ground.
2 In the Settings window for Ground, locate the Boundary Selection section.
3 From the Selection list, choose connector2.

Electric Potential 1
1 Right-click Electric Currents (ec) and choose Electric Potential.
2 In the Settings window for Electric Potential, locate the Electric Potential section.
3 In the V0 text field, type V0.
4 Locate the Boundary Selection section. From the Selection list, choose connector1.

MUL T I P H Y SICS
1 In the Model Builder window, under Component 1 (comp1)>Multiphysics click
Thermal Expansion 1 (te1).
2 In the Settings window for Thermal Expansion, locate the Thermal Expansion
Properties
section.
3 In the Tref text field, type Text.

HEAT TRANSFER IN SOLIDS (HT)

On the Physics toolbar, click Electric Currents (ec) and choose Heat Transfer in Solids
(ht).

Initial Values 1
1 In the Model Builder window, under Component 1 (comp1)>Heat Transfer in Solids
(ht)
click Initial Values 1.
2 In the Settings window for Initial Values, type T0 in the T text field.

Heat Flux 1
1 In the Model Builder window, right-click Heat Transfer in Solids (ht) and choose
Heat Flux.
2 In the Settings window for Heat Flux, locate the Boundary Selection section.
3 From the Selection list, choose All boundaries.
Select all boundaries for simplicity; next you will add a node that overrides this boundary
condition for the connectors.
4 Locate the Heat Flux section. Click the Convective heat flux button.
5 In the h text field, type k.
6 In the Text text field, type Text.

Temperature 1
1 Right-click Heat Transfer in Solids (ht) and choose Temperature.
2 In the Settings window for Temperature, locate the Temperature section.
3 In the T0 text field, type T0.
4 Locate the Boundary Selection section. From the Selection list, choose connectors.

SOLI D MECHANICS (SOLID )

Fixed Constraint 1
1 In the Model Builder window, under Component 1 (comp1) right-click
Solid Mechanics (solid) and choose Fixed Constraint.
2 In the Settings window for Fixed Constraint, locate the Boundary Selection section.
3 From the Selection list, choose connectors.
MESH 1
Size
1 In the Model Builder window, under Component 1 (comp1) right-click Mesh 1 and
choose
Free Tetrahedral.
2 In the Settings window for Size, locate the Element Size section.
3 From the Predefined list, choose Finer.
4 In the Model Builder window, click Mesh 1.
5 In the Settings window for Mesh, click Build All.

ST UD Y 1
You can use the default solver settings for this model.
1 On the Home toolbar, click Compute.

RESUL T S
Stress (solid)
The first default plot presents a surface plot of the von Mises stress. Modify it to show
the displacement magnitude.
1 In the Model Builder window, right-click Stress (solid) and choose Rename.
2 In the Rename 3D Plot Group dialog box, type Displacement - Study 1 in the
New label text field.

3 Click OK.
Surface 1
1 In the Model Builder window, expand the Results>Displacement - Study 1 node, then
click
Surface 1.

2 In the Settings window for Surface, click Replace Expression in the upper-right corner
of the Expression section. From the menu, choose Component 1>Solid Mechanics>
Displacement>solid.disp - Total displacement.
3 Locate the Expression section. From the Unit list, choose nm.
4 On the Displacement - Study 1 toolbar, click Plot.
As the color legend shows, the maximum displacement is roughly 88 nm with a constant
resistivityTemperature (ht)
The second default surface plot shows the temperature field. Note the maximum
temperature of roughly 1048 K.
Now restore the temperature-dependence of the resistivity that you temporarily
disabled and then add a new study and solve the model again.

ELECTRIC CURRENTS (EC)

On the Physics toolbar, click Solid Mechanics (solid) and choose Electric Currents (ec).

Current Conser vation 1

1 In the Model Builder window, under Component 1 (comp1)>Electric Currents (ec) click
Current Conservation 1.
2 In the Settings window for Current Conservation, locate the Conduction Current
section.
3 From the list, choose From material.

AD D S T U D Y
1 On the Home toolbar, click Add Study to open the Add Study window.
2 Go to the Add Study window.
3 Find the Studies subsection. In the Select Study tree, select Preset
Studies>Stationary.
4 Click Add Study in the window toolbar.
5 On the Home toolbar, click Add Study to close the Add Study windons.

ST UD Y 2

Step 1: Stationar y
On the Home toolbar, click Compute.

RESUL T S

Temperature (ht) 1: As you can see from the plot, using the more realistic material model
with a temperature- dependent resistivity has a significant effect on the solution. The
maximum temperature is now almost 340 K lower.
Stress (solid)
1 In the Model Builder window, under Results right-click Stress (solid) and choose
Rename.

2 In the Rename 3D Plot Group dialog box, type Displacement - Study 2 in the
New label text field.

3 Click OK.

Surface 1
1 In the Model Builder window, expand the Results>Displacement - Study 2 node, then
click
Surface 1.

2 In the Settings window for Surface, click Replace Expression in the upper-right corner
of the Expression section. From the menu, choose Component 1>Solid Mechanics>
Displacement>solid.disp - Total displacement.
3 Locate the Expression section. From the Unit list, choose nm.

4 On the Displacement - Study 2 toolbar, click Plot.

Similarly, the maximum displacement has been reduced from 88 nm to around 50 nm.