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  • 레시피들

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    nopobisu
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    레시피들

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    레시피들

    Copyright:

    © All Rights Reserved
    Download as DOCX, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    6 views1 page

    레시피들

    Uploaded by

    nopobisu
    레시피들

    Copyright:

    © All Rights Reserved
    Download as DOCX, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    of 1

    TEM 100 by 100 mm PR (TEM / PR : AZ5214)

    :
    - Intensity ()
    set power
    power(watt) (+,-) intensity PR 30
    (Lamp test() , intensity ) (vacuum line)
    - : 18 / align gap : 30 m - recipe:
    edit parameter 1. CHG PRE ( )
    edit parameter RPM 1 500 / 10sec
    -> ready for loading RPM 2 1000 / 5sec
    - : RPM 3 3000 / 20sec
    change mask enter ( vacuum /)
    change mask +, -, <- , -> , enter
    - : msg?
    load align enter
    enter contact PR :
    (Align : x / y) Start( )
    align substrate exposure
    18 please wait unload : 120, 1 50
    enter

    :
    1. on
    2. 100 by 100 ->5kV
    24 -> 17kV
    (0.030mA )

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