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848 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO.

4, AUGUST 2015

Lateral-Mode Vibration of Microcantilever-Based


Sensors in Viscous Fluids Using
Timoshenko Beam Theory
Joshua A. Schultz, Stephen M. Heinrich, Fabien Josse, Senior Member, IEEE, Isabelle Dufour,
Nicholas J. Nigro, Luke A. Beardslee, and Oliver Brand, Senior Member, IEEE

Abstract To more accurately model microcantilever resonant I. I NTRODUCTION


behavior in liquids and to improve lateral-mode sensor perfor-
mance, a new model is developed to incorporate viscous fluid
effects and Timoshenko beam effects (shear deformation, rotatory
inertia). The model is motivated by studies showing that the most
promising geometries for lateral-mode sensing are those for which
C HEMICAL and biochemical sensing is an active
and rapidly developing field, resulting in an ever-
increasing presence of micro/nanoelectromechanical systems
Timoshenko effects are most pronounced. Analytical solutions (MEMS/NEMS) in a variety of diagnostic, monitoring, and
for beam response due to harmonic tip force and electrothermal security applications. However, many of these applications
loadings are expressed in terms of total and bending displace- necessitate liquid-phase sensing, which poses significant chal-
ments, which correspond to laser and piezoresistive readouts,
respectively. The influence of shear deformation, rotatory inertia, lenges for dynamic-mode sensors due to the drastic reduc-
fluid properties, and actuation/detection schemes on resonant tion in resonant frequency ( fres ) and quality factor (Q)
frequencies ( fres ) and quality factors ( Q) are examined, showing that occurs due to the liquid [1][4]. To overcome such
that Timoshenko beam effects may reduce fres and Q by up challenges, recent research has focused on the use of (a)
to 40% and 23%, respectively, but are negligible for width-to- alternative vibrational modes of microcantilevers in lieu of
length ratios of 1/10 and lower. Comparisons with measurements
(in water) indicate that the model predicts the qualitative data the fundamental transverse flexural mode or (b) efficient
trends, but underestimates the softening that occurs in stiffer modes in structures of non-cantilever geometry. The former
specimens, indicating that support deformation becomes a factor. category includes investigations of higher modes of transverse
For thinner specimens, the model estimates Q quite well, but flexure [2], [5][8], longitudinal modes [9][11], torsional
exceeds the observed values for thicker specimens, showing that modes [2], [6], [8], [12][15], and lateral (in-plane) flexural
the Stokes resistance model employed should be extended to
include pressure effects for these geometries. [2014-0157] modes [10], [13], [16][22]. Recent studies on novel, non-
cantilever designs that reduce fluid resistance via in-plane
Index Terms Microcantilevers, resonant frequency, quality oscillations include a bridge beam supporting two half-
factor, liquid-phase sensing, lateral mode, vibrations.
disks [23] and a microstructure comprising a rotating disk sup-
Manuscript received May 22, 2014; revised August 5, 2014; accepted ported and driven by two tangentially oriented legs [24][28].
August 22, 2014. Date of publication September 25, 2014; date of current All of these studies were primarily motivated by the desire
version July 29, 2015. This work was supported in part by the National
Science Foundation under Grant ECCS-0824017, Grant ECCS-1128992, and to reduce the detrimental effects of fluid damping and fluid
Grant ECCS-1128554; and in part by the Graduate School of Marquette inertia, thus providing higher resonant frequencies, fres , and
University. Subject Editor G. Piazza. quality factors, Q, the latter corresponding to sharper reso-
J. A. Schultz was with the Department of Civil, Construction, and Environ-
mental Engineering, Marquette University, Milwaukee, WI 53233 USA. He is nant peaks. Within the context of sensing applications, such
now with the Milwaukee School of Engineering, Milwaukee, WI 53201 USA improvements in the resonant characteristics correspond to
(e-mail: schultzj@msoe.edu). enhancements in sensor performance metrics such as mass
S. M. Heinrich is with the Department of Civil, Construction, and Envi-
ronmental Engineering, Marquette University, Milwaukee, WI 53233 USA or chemical sensitivity and limit of detection, especially for
(e-mail: stephen.heinrich@marquette.edu). liquid-phase detection (see [20], [29][31]).
F. Josse is with the Department of Electrical and Computer Engi- Several of the aforementioned studies on the use of the
neering, Marquette University, Milwaukee, WI 53233 USA (e-mail:
fabien.josse@marquette.edu). lateral flexural mode in microcantilevers in liquids demon-
I. Dufour is with the Laboratoire de lIntgration du Matriau au Systme, strated both theoretically [17], [18], [22] and experimen-
Centre National de la Recherche Scientifique, Universit de Bordeaux, Talence tally [19], [21] that the improvements in the in-liquid resonant
33405, France (e-mail: isabelle.dufour@ims-bordeaux.fr).
N. J. Nigro, deceased, was with the Department of Mechanical Engineering, characteristics will be most pronounced in microbeams that
Marquette University, Milwaukee, WI 53233 USA. are relatively short and wide. However, the conclusions in the
L. A. Beardslee was with the School of Electrical and Computer Engi- theoretical studies were based on Euler-Bernoulli beam theory
neering, Georgia Institute of Technology, Atlanta, GA 30332 USA. He is
now with the Albany Medical College, Albany, NY 12208 USA (e-mail: whose accuracy is known to deteriorate for short, wide beams
beardsl@mail.amc.edu). deforming in the lateral mode. This loss of accuracy in the
O. Brand is with the School of Electrical and Computer Engineer- Euler-Bernoulli theory and a likely reason for the depar-
ing, Georgia Institute of Technology, Atlanta, GA 30332 USA (e-mail:
oliver.brand@ece.gatech.edu). ture of Euler-Bernoulli theoretical results from the measured
Digital Object Identifier 10.1109/JMEMS.2014.2354596 fres and Q data in liquids are the effects of shear deformation
1057-7157 2014 IEEE. Personal use is permitted, but republication/redistribution requires IEEE permission.
See http://www.ieee.org/publications_standards/publications/rights/index.html for more information.
SCHULTZ et al.: LATERAL-MODE VIBRATION OF MICROCANTILEVER-BASED SENSORS 849

Fig. 1. Definitions of reference axes and geometric and material parameters.

and rotatory inertia, neglected in Euler-Bernoulli theory, which


become increasingly important in shorter, wider microcan-
tilevers [21]. Because these are precisely the geometries that
show the most promise in lateral-mode liquid-phase sensing
applications, a strong motivation clearly exists to generalize
the previous Euler-Bernoulli modeling efforts to account for
transverse shear strain as well as the mass associated with the
rotation of beam cross sections, i.e., the so-called Timoshenko
beam effects. Hence, the aim of the present study is to
derive and evaluate a Timoshenko beam model for a laterally
vibrating microcantilever in the presence of a viscous fluid, as
Fig. 2. (a) Load Case I Imposed harmonic support rotation; (b) Load
the predicted resonant behavior of such a system is of direct Case II Imposed harmonic tip force.
relevance to the performance of lateral-mode sensing devices.
While there exist a few attempts to utilize Timoshenko such as silicon, the latter two properties correspond to the
beam models in MEMS/NEMS applications, their focus has longitudinal (x) and in-plane (x y) directions, respectively.)
tended to be on the transverse flexural mode and atomic The fluid is characterized by its mass density ( f ) and
force microscopy (AFM) applications [32][35] or on the dynamic viscosity ().
influence of surface effects [36], [37]. Moreover, with the Two particular forms of in-plane loading are considered
exception of one reference [34], none of these models incor- (Fig. 2): Load Case I involves a harmonically varying imposed
porates the effects of a surrounding fluid. The objective of rotation at the supported end, with amplitude 0 and (cir-
the investigation in [34] was to study the influence of fluid cular) frequency . In Load Case II the beam is excited
damping on the frequency response of (transverse-mode) AFM by a harmonically varying tip force of amplitude F0 and
cantilevers; however, the damping coefficients employed in frequency . These two load cases are considered because
that study were not related to the fundamental properties they represent two of the more common excitation types used
of the surrounding fluid, nor was the fluids contribution to in microcantilever-based sensing applications. For example,
the systems effective mass included. In short, none of the Load Case I simulates an electrothermal excitation scheme
existing Timoshenko beam models is relevant to lateral-mode, that has been successfully implemented recently for lateral-
liquid-phase, microcantilever-based sensing, the application of mode sensing applications (see [19]). That method, which
interest in the present study. involves imposing longitudinal thermal strains at the extreme
fibers near the support, may be represented kinematically as an
II. P ROBLEM S TATEMENT imposed harmonic rotation at the support [18], thus providing
Consider a microcantilever beam immersed in a vis- the motivation for Load Case I. The second loading case is
cous fluid which experiences a flexural vibration along the chosen because a tip force loading may be induced when
y-direction of Fig. 1. The effects of shear deformation and electromagnetic actuation methods are used in dynamic-mode
rotatory inertia in the beam (Timoshenko beam effects) are sensing applications. For each of the two load cases, we wish
to be included, as are the inertial and damping effects of to formulate and solve the boundary value problem (BVP) that
the surrounding fluid. The relevant geometric and material governs the in-plane vibration of the Timoshenko cantilever
parameters of the system are specified in Fig. 1, while the beam in fluid.
loading parameters for the two load cases of interest are Our focus shall be on determining two particular response
indicated in Fig. 2. The geometric parameters include the histories: (1) the total displacement at the beam tip, v(L, t),
length (L), width (b), and thickness (h) of the cantilever. and (2) the bending-deformation displacement, v BD (L, t), at
Because the microcantilever thickness is typically small rela- the beam tip, i.e., that portion of the total tip displacement
tive to the width, the flexural vibrations along the ydirection that is due to bending deformation only (not due to shear
are termed in-plane or lateral. Material properties for the deformation or, for Load Case I, rigid body rotation). The total
beam include its mass density (b ), Youngs modulus (E), and displacement at the tip is the relevant response quantity for
shear modulus (G). (When applied to an anisotropic material sensor applications that utilize optical (laser) monitoring of the
850 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 4, AUGUST 2015

tip position, while the tips bending-deformation displacement in which represents the rotation of the beam cross section
at or near resonance will be approximately proportional to the and is the transverse shear strain.
beams bending strain, i.e., it will correspond to the output The classical solution to Stokess second problem [38] for
signal of sensors that employ local piezoresistive elements for the harmonic, in-plane, translational oscillation of an infinite,
monitoring beam response (e.g., the piezoresistive Wheatstone rigid surface in contact with a viscous fluid results in a simple
bridge employed in [19]). form for the shear stress, f luid (t), exerted by the fluid on the
For each load case and each response history [v(L, t) and oscillating surface:
v BD (L, t)], the following resonant characteristics will be  
f f
determined: the resonant frequency fres , defined as the excit- f luid (t) Vsur f. (t) Vsur f. (t), (3)
2 2
ing frequency corresponding to maximum displacement ampli-
tude, and the quality factor Q associated with viscous losses where Vsur f. (t) and Vsur f. (t) are the (harmonic) velocity
in the surrounding fluid. The primary emphasis of the study and acceleration of the surface and is the frequency of
is on the fundamental (i.e., mode-1) in-plane flexural/shear oscillation. To apply Eq. (3) to the present problem, we assume
response, although the theoretical solutions obtained may be that each cross section translates and rotates rigidly and that
used to generate multi-modal in-plane response. Once the Eq. (3) may be applied pointwise on the slice dx of Fig. 1.
resonant characteristics are determined, they may be related to This leads to a relatively simple, yet mechanics-based, fluid
sensor performance metrics, i.e., mass and chemical sensitivity resistance model to provide a first attempt at understanding
(Sm , Sc ) and limit of detection (LOD) (see [20], [29][31]). how the fluid properties influence the dynamic response of
a micro-scale Timoshenko beam. More specifically, applying
III. D ERIVATION OF B OUNDARY VALUE P ROBLEM Eq. (3) locally at all points on the front and rear faces of
the differential element of Fig. 1, followed by an appropriate
A. Assumptions integration over the y-coordinate, results in the following fluid-
The physical system comprising the microcantilever and induced force and couple distributions (per unit length) along
surrounding fluid is idealized by employing the following the beam [31]:
assumptions: (1) The beam is homogeneous and made of a 2 v(x, t) v(x, t)
material that is linear elastic and isotropic. (2) The beam is q f luid (x, t) = m f c f , (4a)
t 2 t
of uniform, rectangular cross section. (3) The slope of the
m f b2 2 c f b2
deformed beam centerline is much smaller than unity. (4) The c f luid (x, t) = , (4b)
beam support is rigid (support deformation is neglected). 12 t 2 12 t
(5) The loading is harmonic and applied in-plane, resulting in where the coefficients in Eq. (4a),

only in-plane flexural/shear deformation. (6) The cross section
2 f b 2 
is relatively thin, i.e., h  b, so that the fluid resistance m f , c f = 2 f b 2 , (5a,b)
associated with the pressure on the top and bottom faces in
Fig. 1 and the shear stress and pressure on the end face (at are, respectively, the effective translational fluid mass and
x = L) is negligible compared with that due to the fluids shear fluid damping coefficients per unit length of beam. Similarly,
resistance on the two largest faces. (7) The shear stress exerted the coefficients in Eq. (4b) may be interpreted as effective
by the fluid on the beam is modeled by local application rotational fluid mass and fluid damping coefficients. Using
of the solution of Stokess second problem for harmonic, the fluid-induced loads determined above, one may easily
in-plane oscillations of an infinite rigid surface in contact with generalize the derivation of the in-vacuum equations of motion
a viscous fluid [38] and [39]. (8) Viscous energy losses in the for a Timoshenko beam (see [42]) by incorporating these loads
fluid are the dominant loss mechanism. The combination of into the translation and rotational dynamic equilibrium state-
assumptions 6 and 7 are referred to here as the assumption ments for the differential element, thus yielding the following
of Stokes fluid resistance, which is a generalization to the equations of motion [31]:
case of Timoshenko beam theory of the assumption made in 2 v 2 v v
2 3
Heinrich et al. [17], [18] for Euler-Bernoulli beam theory. s ( + ) s 2 3 = 0, (6a)
2 2
2 v 2
B. Derivation of Equations of Motion s 2 2 + r 2s 2 3 (+ ) 2 r 2 s 2 3 = 0, (6b)

The basis of Timoshenko beam theory is the decomposi- where v v/L is the dimensionless total deflection,
tion of the total deflection into bending and shear contribu- x/L is a dimensionless spatial coordinate, and t
tions [40], [41], i.e., is dimensionless time. The Timoshenko beam parameters
v(x, t) = v B (x, t) + v S (x, t), (1) are defined as the rotational inertia parameter and the shear
deformation parameter, respectively, via
where v B is the deflection due to bending and v S is the  
I 1 b 2
deflection due to shear. A similar decomposition of the slope r2 = , (7a)
of the deformed beam axis therefore results from Eq. (1): AL 2 12 L
 2  
v v B v S 2 EI 1 b E
= + (x, t) + (x, t), (2) s = , (7b)
x x x k AG L 2 12 L kG
SCHULTZ et al.: LATERAL-MODE VIBRATION OF MICROCANTILEVER-BASED SENSORS 851

where A and I represent the cross-sectional area and the (Fig. 2a). Thus, the deflection due to bending deformation in
second moment of area of the rectangular cross section, the the two load cases may be written as
latter corresponding to in-plane bending (I = hb3 /12), and


k ( 5/6) is the shear coefficient for a rectangular cross (  , )d  0 ei , Load Case I;

section [43]. The dimensionless frequency and fluid resistance
0
parameters ( and , respectively) are defined by v BD (, ) =


 1/4   (  , )d  ,


12b L 4 2 L 48 2f 2 1/4 Load Case II.
, . (8a,b) 0
Eb2 hb1/2 Eb3 (13a,b)
The fluid effects appear in Eqs. (6a,b) through those terms The normalized shear displacement, if desired, may be
that involve . When this parameter is set equal to zero, obtained for either load case by substituting v(, ) and
the equations reduce to the well-known in-vacuum results Eq. (12) into Eq. (1):
(see [42], [44]).

v S (, )
v S (, ) = v(, ) (  , )d  . (14)
C. Boundary Conditions L
0
For each load case four boundary conditions (BCs)
must be specified as follows:
Load Case I (Harmonic Support Rotation, Fig. 2a): IV. M ETHOD OF S OLUTION
The steady-state solution of the BVP for either load case is
v(0, ) = 0, (0, ) = 0 ei , assumed to be of the form
(1, ) v(1, )
= (1, ) = 0; (9a-d) v(, ) = V ( )ei, (, ) = ( ) ei , (15a,b)

Load Case II (Harmonic Tip Force, Fig. 2b): where V ( ) and ( ) are the complex amplitudes to be
determined. It follows from Eqs. (6a,b) that V ( ) and ( )
(1, ) must satisfy
v(0, ) = (0, ) = = 0,

v(1, ) V  + k3 V  = 0, (16a)

(1, ) = s 2 F0 ei ; (10a-d)
s 2  + V  1 r 2 k3 = 0, (16b)

where a dimensionless tip force amplitude has been introduced which may also be expressed in the following uncoupled
in Eq. (10d): form [32], [44]:

F0 F0 L 2 /E I. (11) V  + k1 V  + k2 V = 0, (17a)


 
+ k1 + k2 = 0, (17b)
For each load case the BCs correspond, respectively, to
imposed values of deflection and rotation at the supported end where
and bending moment and shear force at the unsupported end. 
The BVPs to be solved consist of the governing equations, k1 3 r 2 + s 2 [ + (1 i ) ] , (18a)
Eqs. (6a,b), and the corresponding set of BCs: Eqs. (9a-d) for  
k2 3 [+(1i )] 1r 2 s 2 3 [+(1i) ] , (18b)
Load Case I or Eqs. (10a-d) for Load Case II.
k3 s 2 2 [ ( + ) i ] , (18c)

D. Secondary Fields and the primes in Eqs. (16) and (17) indicate differentiation
Since the Timoshenko beam response is completely with respect to . Next we determine the steady-state solution
described using the primary fields, v and , any additional for each particular load case.
secondary fields are derivable directly from v and once Load Case I (Harmonic Support Rotation): For Load Case I
they have been determined. In particular, the time-dependent we write the general solutions of Eqs. (17a,b) as
beam displacement due to bending is obtained by integrating V ( ) = 0 [C1 cosh(n 1 ) + C2 sinh(n 1 )
the rotation angle:
+ C3 cos(i n 2 ) + C4 sin(i n 2 )] , (19a)
 
 ( ) = 0 C1 sinh(n 1 ) + C2 cosh(n 1 )

v B (, ) = (  , )d  , (12) + C3 sin(i n 2 ) + C4 cos(i n 2 ) , (19b)
0
where n 1 and n 2 are the two roots of
where v B v B /L. For Load Case I a portion of v B is due
to rigid-body rotation associated with the end-rotation loading n 4 + k1 n 2 + k2 = 0 (20)
852 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 4, AUGUST 2015

that have positive real parts. By virtue of Eq. (16a) or (16b), These quantities may be interpreted as dynamic magnifica-
the constants Ci and Ci , i = 1, 2, 3, 4, are related by tion factors in the following senses: DT and D BD are,
  respectively, the magnitudes of the total tip displacement
 n 21 + k3  i n 22 + k3 amplitude (bending plus shear, including rigid-body rotation
C1,2 = C1,2 , C3,4 = C3,4 . (21a-d)
n1 n2 in Load Case I) and the bending-deformation tip displace-
Imposing the BCs (9a-d) yields the specific values of C1 ment, each scaled by the corresponding quasi-static Euler-
through C4 as detailed in the Appendix. The values of these Bernoulli results (i.e., L 0 for Load Case I and F0 L 3 /3E I for
four constants, in conjunction with Eqs. (15a,b), (19a,b), and Load Case II). The analogous result for D S , the normalized
(21a-d), determine the steady-state solution for the case of magnitude of the tip displacement amplitude due to shear
harmonic support rotation. deformation only (scaled in the same manner as DT and
Load Case II (Harmonic Tip Force): For Load Case II we D BD ), is
 

write the general solutions of Eqs. (17a,b) as  1 



 V (1) ( )d  

 
V ( ) = F0 [C1 cosh(n 1 ) + C2 sinh(n 1 )

0
0 , Load Case I;
+C3 cos(i n 2 ) + C4 sin(i n 2 )] , (22a) DS =  
 
 1  (25a,b)

  )d  
( ) = F0 C1 sinh(n 1 ) + C2 cosh(n 1 )

3  V (1) ( 
  0 
, Load Case II.
+ C3 sin(i n 2 ) + C4  cos(i n 2 ) , (22b) F0

where the constants, Ci , Ci , will take on different values than


Finally, we emphasize that the analytical solution presented
in the previous load case. However, the definitions of n 1 and n 2
in the previous section may be used to obtain other relevant
through Eq. (20) and the relationships between Ci and Ci
mechanical response quantities that correspond to other read-
(Eqs. (21a-d)) are still applicable for Load Case II. Imposing
out methods.
the BCs (10a-d) for Load Case II yields the specific values
of C1 through C4 as detailed in the Appendix. The values of
these four constants, in conjunction with Eqs. (15a,b), (22a,b), B. Theoretical Numerical Results
and (21a-d), determine the steady-state solution for the case 1) Frequency Response: The theoretical solutions obtained
of a harmonic tip force. may be used to generate frequency response functions for the
tip displacement amplitude for any output signal (DT , D BD ,
V. R ESULTS AND D ISCUSSION or D S ) and for either load case (harmonic support rotation or
tip force). While our main interest is to focus on resonant
A. Normalized Response Quantities
characteristics and not the entire frequency spectrum, for
Having obtained the solutions for the in-fluid Timoshenko illustrative purposes we show some examples of the relevant
beam response for the two load cases of interest, any sec- frequency response functions in Figs. 3a and 3b for Load
ondary field of interest (e.g., displacements due to bending Cases I and II, respectively. These figures correspond to fixed
deformation or shear deformation) may be determined in the values of r = 0.2 and = 0.2 while the value of the material
manner specified in Sect. III-D. In particular, as explained in parameter
Sect. II, since cantilever response is often detected using either 
optical techniques to track the beam tip position or piezore- E
e (26)
sistive elements to monitor bending strain, the magnitudes of kG
both the total tip displacement amplitude and the bending is allowed to vary. Note that an increase in e corresponds to a
deformation displacement amplitude at the tip are of practical reduction in shear modulus relative to the Youngs modulus,
interest. Therefore, the numerical results to be presented in so that e may be viewed as a shear deformation parameter in
subsequent sections will be based on the following normalized lieu of parameter s. The plots indicate that an increase in e
response metrics associated with these two types of output results in a decrease in the resonant frequency as measured by
signals (subscripts T and B-D denoting total and bending- any of the signals. This is to be expected since the reduction
deformation, respectively): in beam stiffness due to a lower shear stiffness will cause
  a corresponding reduction in resonant frequency since the
 
V (1) /0 , Load Case I; mass characteristics remain unchanged for a fixed r value.
DT = (23a,b) These figures also show that an increase in e in the case of



3 V (1) / F0 , Load Case II; harmonic support rotation (Fig. 3a) causes a decrease in the
 1  resonant amplitude of the total tip displacement (DT ), while

 (  )d  

  for the harmonic tip force case (Fig. 3b) the resonant amplitude
 0
1 , Load Case I;
0 increases with increasing e. However, if one considers the
D BD =   (24a,b) resonant amplitudes of the bending-deformation and shear

 1 

3 ( )d 
   portions of the tip displacement (D BD and D S ) as the value


0 
, Load Case II.
of e increases, one finds that the strength of the D BD
F0 signal at resonance decreases for both load cases, while the
SCHULTZ et al.: LATERAL-MODE VIBRATION OF MICROCANTILEVER-BASED SENSORS 853

quantities may easily be extracted from frequency response


curves of the type shown in Figs. 3a,b. In the present study our
interest is in micro-scale devices in liquids whose properties
are on the same order as that of water. As such, a practical
range of the fluid resistance parameter for these types of
applications is 0 0.2. (As a reference, a silicon device
of dimensions (L, b, h) = (500, 200, 10) m and operating
in water corresponds to = 0.043. If water is changed
to a hypothetical liquid of twice the density and 10 times
the viscosity, then = 0.19.) Over this range the values
of resonant frequency and quality factor are very insensitive
to both the load case and the output signal employed [45].
Therefore, unless stated otherwise, all results that follow will
be based on Load Case I (harmonic support rotation) and
the total tip displacement signal. The analogous results for
Load Case II and/or other output signals will be practically
identical over the range of considered. (For example, despite
the significant differences in the amplitude spectra of Fig. 3
for the different load cases and detection signals, the peak
locations, i.e., resonant frequencies, are very insensitive to the
load/detection type, even at the upper limit of this range of .
Although less apparent, this same insensitivity is exhibited
by the mode-1 quality factor for [0, 0.2]. Details may
be found in [31]. The same reference includes results and
discussion associated with higher values of the fluid resistance
parameter.) However, at higher values of , which may be
encountered for more viscous and/or denser liquids or for
nano-scale devices, the values of resonant frequency and
quality factor will show increased sensitivity to load type
and the response monitoring scheme; therefore, in such cases
one should employ the specific solution that applies to the
particular methods of actuation and detection in the physical
device [45].
2) Resonant Frequency: The resonant frequency parameter,
res , for the first lateral mode is plotted in Figs. 4a-d for
the case of harmonic support rotation. These figures show
the dependence of resonant frequency on the fluid resistance
Fig. 3. Theoretical frequency response functions for tip displacement parameter, , and the Timoshenko parameters, as characterized
amplitude: (a) Load Case I Imposed harmonic support rotation; (b) Load by parameters r and e. These resonant frequency values cor-
Case II Imposed harmonic tip force. respond to the first peaks of the frequency response functions
for the total tip displacement (curves of the type labeled DT
strength of the shear signal increases. Similar conclusions in Fig. 3a).
apply with respect to changes in the value of r , although the Figure 4 clearly illustrates several trends. As expected,
corresponding figures are not included here. there is a reduction in resonant frequency associated with
The different resonant amplitudes of the various output an increase in the fluid resistance parameter. Moreover,
signals could have important implications with regard to the for the range of considered the dependence of res on
appropriate design of detection schemes for these types of is essentially linear. This was also seen in the results
sensing devices. For example, a detection scheme based on of the previously published resonant frequencies of the
monitoring of bending strain (e.g., via piezoresistors at the Euler-Bernoulli model [18], which are a special case (r =
extreme fibers of the beam) might only see a small portion e = 0 or, equivalently, r = s = 0) of the results shown here.
of the deformation response if a significant amount of shear Also observed in Fig. 4 is how higher levels of r and e values,
deformation is present. In such a case, one may wish to corresponding to increased beam inertia and decreased shear
replace or supplement the bending-strain detection scheme stiffness, will result in a reduction in resonant frequency. Over
with shear strain measurements near the neutral axis of the the practical ranges of parameters considered in Fig. 4, the
beams cross section. maximum effect of r and e is to cause a reduction of 23% in
All of the numerical results that follow will focus on res which, according to Eq. (8a), is equivalent to a decrease
the resonant frequency and quality factor of lateral-mode in the resonant frequency, res , of 40%. These reductions
mirocantilevers in liquids. Theoretical values of these resonant correspond to the case of r = 0.2, e = 3. If we consider
854 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 4, AUGUST 2015

Fig. 4. Resonant frequency based on DT signal for Load Case I: (a) e = 0, (b) e = 1, (c) e = 2, (d) e = 3.

the case e = 2, which corresponds to textbook values of Finally, as a verification of the resonant frequency results, we
moduli for silicon for the case in which the cantilever is find that the values in Figs. 4a-d for the case r = = 0
aligned with the [110]-direction of a standard (100) Si wafer (i.e., the starting values of the four upper curves) are all
(E = 169 GPa, G = 50.9 GPa [46]) and shear coefficient given by res = 1.8751, which agrees with the well-known
k = 5/6, Fig. 4c shows that the largest influence of the eigenvalue for an Euler-Bernoulli beam in vacuum (see [47]).
Timoshenko effects on the resonant frequency is a 15% (28%) 3) Quality Factor: Applying the 3dB bandwidth method
decrease in res (res ), which occurs at r = 0.2. Clearly, (see [48]) to the response curves of the type shown in Fig. 3,
significant error may be introduced in the resonant frequency one may obtain the quality factor for a range of fluid resistance
estimate if the Timoshenko effects are ignored in such cases. and Timoshenko parameters. For example, the quality factor
Conversely, calculations based on the results of Fig. 4 show based on the total tip displacement for the harmonic support
that, over the practical ranges of and e considered, the rotation case is plotted in Fig. 5 over the range [0, 0.2]
influence of the Timoshenko effects on resonant frequency for the case of r = 0.13. Clearly, there is a very strong
(res ) is less than 2% provided that the ratio L/b is 10 impact of on Q with the quality factor following an inverse
or greater (or, equivalently, that r does not exceed 0.029). relationship with . Recalling the definition of [Eq. (8b)], the
SCHULTZ et al.: LATERAL-MODE VIBRATION OF MICROCANTILEVER-BASED SENSORS 855

fluid effects associated with increases in . Over the practical


ranges of 0 < < 0.2 and Timoshenko parameters considered
in Fig. 6, the results of the present model show that the
maximum effect of r and e on Q is to cause a reduction of
approximately 23% regardless of the particular value of . On
the other hand, calculations based on the results such as those
of Fig. 6 show that, over the practical ranges of and e consid-
ered, the influence of the Timoshenko effects on Q is less than
1% provided that the ratio L/b is at least 10 (i.e., r does not
exceed 0.029).
Previous theoretical investigations of lateral-mode Euler-
Bernoulli beams with Stokes-type fluid resistance [17], [18]
have established an approximate analytical expression for Q.
That expression indicated that Q is of the form Q 1.8751/ ,
i.e., Q depends inversely on as was also surmised by a
visual examination of the results of the present Timoshenko
Fig. 5. Quality factor at first resonance for r = 0.13 (based on the DT signal
for Load Case I).
beam model in Fig. 5. Given that the dependence of Q on
the Timoshenko parameters appears to be relatively simple
as suggested by Figs. 5 and 6, we are motivated to pursue
an approximate analytical formula for Q that will maintain
the same dependence as the Euler-Bernoulli result while
incorporating the r - and e-dependence in a simple manner.
Here we propose such an expression for the following ranges
of parameters, which have been chosen based on micro-
scale devices and common fluid properties: = [0.01, 0.05],
r = [0, 0.2] and e E/kG = [0, 3]. The expression is
based on surface-fitting the results of the present model over
the stated rectangle of the (r, e)-plane and maintaining the
inverse relationship to , thus yielding
1.8751 3.427r 2.529 0.8267r 1.578e1.646
Q , (27a)

or, in terms of the fundamental system parameters (tak-
ing k = 5/6),
 1/4
hb1/2 Eb3
Q 0.7124
Fig. 6. Quality factor at first resonance for = 0.05 (based on the L 2f 2
DT signal for Load Case I).   2.529  1.578 0.823
b b E
10.0789 0.0721 .
viscosity and density of the fluid participate to an equal extent L L G
in determining Q when a Stokes-type fluid resistance model is (27b)
employed. Unlike the strong dependence of Q on , the effect
While the constants in Eqs. (27a,b) were based on fitting the
of increasing the Timoshenko parameter e from 0 to 3 results
models results for the case of = 0.03, the accuracy of
in a relatively modest 15% reduction of the quality factor, even
these equations relative to the models results over the practical
for the relatively large value of r considered. Similar trends
range = [0.01, 0.05] (and possibly beyond) is excellent
apply for a specified value of e and varying r from 0 to 0.2,
(within 3%).
except the effects of changing r over this range are of even
lesser magnitude than the effects of varying e.
Figure 6 contains the same type of information displayed C. Comparisons Between Theory and Experiment
in Fig. 5, but this information is plotted vs. the Timoshenko 1) Specification of Model Input Parameters: Experimental
parameter r so its effect on Q may be ascertained. The curves data were collected on a variety of silicon specimens excited
shown in Fig. 6 show negligible sensitivity of Q to changes laterally in water ( f = 1000 kg/m3 , = 0.001 Pa-s).
in r at small values of r , but this sensitivity increases with The specimen geometries corresponded to nominal silicon
increasing r values, especially for larger values of e. This thicknesses of h nom = (5, 8, 12, 20) m and length and
indicates that the effects of r on Q become increasingly width dimensions of L = (200, 400, 600, 800, 1000) m and
significant for larger values of both r and e. Figure 6 also b = (45, 60, 75, 90) m. Estimates of the total thick-
reinforces the earlier commentary that the Timoshenko effects, ness (h), which includes the thicknesses of silicon and several
as characterized by r and e, cause a reduction in Q, as do the passivation layers [21], were used as model input in lieu
856 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 4, AUGUST 2015

TABLE I
M ATERIAL PARAMETERS e AND e AND E FFECTIVE E LASTIC M ODULI FOR E ACH
S PECIMEN T HICKNESS S ET, O BTAINED BY (a) M ETHOD 1 AND (b) M ETHOD 2

In Method 1 the value of e was determined by performing


a single-parameter fit of the in-vacuum resonant frequencies
predicted by the model to in-air resonant frequency data,
resulting in a value of e = 2.254 km/s which, using the
density of silicon (2330 kg/m3), corresponds to an effective
E of 142 GPa. This fit was performed only on the data
corresponding to specimen lengths L = (800, 1000) m
in order to avoid inclusion of additional effects associated
with the shorter, stubbier specimens (i.e., Timoshenko beam
effects and support compliance effects) in determining what is
essentially a flexural stiffness parameter. Having determined e
in this manner, the accompanying e (and G) value was then
obtained by performing a second single-parameter fit of the in-
air frequency data (with fitting parameter e) for each thickness
set but for all specimen lengths; thus, any observed softening
due to shear deformation will be reflected in the value of the
material parameter e. This methodology resulted in the values
of e and e (and E and G) listed under Method 1 in Table I.
Using these as input, comparisons could then be made between
in-water data and the predictions of the present model for both
resonant frequency and quality factor. Sample comparisons
for the thinnest specimen set (h nom = 5 m) are shown in
Fig. 7. While these results, based on Method 1 for prescribing
input values, capture the fres and Q trends quite well both
qualitatively and quantitatively, examination of the G values
that were used as input (column (a) of Table I) shows that
they are much lower (only 7-10% of E) than what would be
expected for a multi-layer structure that is primarily silicon,
for which G/E = 0.30 for our case of cantilevers aligned with
Fig. 7. Comparison of present model (with Method 1-based input values the [110]-direction of a (100) wafer [46]. A possible reason for
of E = 142 GPa, G = 10.0 GPa) to experimental data in water [49] and this discrepancy could be that the G values based on Method 1
Euler-Bernoulli theory [17], [18] for hnom = 5 m: (a) resonant frequencies
and (b) quality factors for first lateral flexural mode. are artificially low to account indirectly for support compli-
ance effects [50] that are not included in the present model.
of h nom and are listed in Table I. To generate theoretical Therefore, to avoid such overfitting to account for non-
results it is also necessary to specify values of the material Timoshenko beam effects, a second approach (Method 2)
parameters e E/12b and e E/kG, which may be was deemed to be a more rational method for specifying
interpreted as parameters associated with bending and shear material input parameters to the model and was employed to
deformation, respectively. However, the aforementioned multi- generate all of the remaining numerical results in what follows.
layer structure of the cantilevers makes it difficult to specify a Method 2 utilized the same methodology as Method 1
priori the values of the effective moduli, E and G, and, thus, e for determining the effective value of E = 142 GPa, but
and e. Therefore, two methods of specifying these parameters prescribed the value of e (and thus G) to be consistent
were explored. with the previously mentioned ratio of G/E = 0.3 for
SCHULTZ et al.: LATERAL-MODE VIBRATION OF MICROCANTILEVER-BASED SENSORS 857

Fig. 8. Comparison of present model (with Method 2-based input values of E = 142 GPa, G = 42.6 GPa) to experimental data [49] and Euler-Bernoulli
theory [17] for in-water resonant frequencies of first lateral mode and for nominal thicknesses of (a) 5 m (b) 8 m (c) 12 m and (d) 20 m.

single-crystal silicon. Thus, all theoretical results that fol- the specimen thickness. From a quantitative perspective, the
low
will be based on the Method-2 input value of e = current model overestimates the experimental frequency by
(E/G)/k = (1/0.3)/(5/6) = 2, i.e., an effective shear 20-30% for the stubbiest specimens. This discrepancy is most
modulus of G = E/(ke2 ) = 142/[(5/6)(2)2] = 42.6 GPa. likely due to support compliance effects and, in the case of the
(See column (b) of Table I.) thicker specimens, the breakdown of the Stokes fluid resistance
2) Comparisons for Lateral-Mode Resonant Frequency and assumption (i.e., the neglected fluid pressure acting on the
Quality Factor in Water: Model Predictions vs. Experimental leading and trailing faces of the beam becomes significant for
Data: One of the primary motivations for the present study the thicker beams).
was the softening behavior exhibited by experimental data for The theoretical in-water Q values predicted by the present
lateral-mode resonant frequency and Q as microcantilevers model (applying the 3dB bandwidth method to the theo-
become less slender. (E.g., see the departure from linearity of retical frequency response curves) are compared to experi-
the data of Fig. 7 for the higher-Q specimens.) In what follows mental results and Euler-Bernoulli theory in Fig. 9, leading
we therefore compare the results of the new model, using the to the following observations: (1) while the current theoret-
Method-2 input parameters of Table I, with experimental data ical Q values consistently overestimate the experimental Q
to ascertain the degree to which Timoshenko beam effects may data, they provide a tighter upper bound than the previous
account for the observed softening trends. Euler-Bernoulli model (i.e., than the approximate analytical
Theoretical in-water resonant frequency predictions using formula of [17], [18]) for the less slender (higher b/L)
the present model are compared with experimental data in specimens; (2) the theoretical Q based on the present model
Fig. 8. The model yields frequency results that show the same provides an excellent quantitative estimate for the thinner
qualitative softening trend as the data for larger b/L 2 values. experimental specimen sets (i.e., nominal thicknesses of 5 m
However, of particular note is that the use of a more realistic and 8 m), while for the thicker specimens the accuracy
G value in the model shows that the magnitude of the decrease deteriorates due to the limitations (ignored pressure effects)
in frequency for the stubbier beams cannot be explained of the Stokes-type fluid resistance assumption and poten-
solely by Timoshenko beam effects (shear deformation and tial support compliance effects; and (3) the theoretical Q
rotatory inertia). A visual comparison of Figs. 8a-d indicates predictions of the present model capture qualitatively the
that the Timoshenko effects only account for roughly one- experimentally observed departure from linearity in Q (with
third of the frequency decrease relative to the Euler-Bernoulli respect to b1/2 /L) at higher values of b1/2/L. Also of note is
model. Moreover, this observation seems to be independent of that the departure from linearity (i.e., from the Euler-Bernoulli
858 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 4, AUGUST 2015

Fig. 9. Comparison of present model (E = 142 GPa, G = 42.6 GPa) to experimental data [49] and Euler-Bernoulli theory [17] for in-water quality factor
of first lateral mode and for nominal thicknesses of (a) 5 m (b) 8 m (c) 12 m and (d) 20 m.

results) is less pronounced for Q than for fres . (Compare factors (approaching 100) in liquids. Over the practical ranges
Figs. 8 and 9.) This may be explained by reference to of system parameters considered, the mode-1 results indicate
fundamental vibration theory from which it is well known that that the Timoshenko effects can account for a reduction in fres
for a single-degree-of-freedom system with effective stiffness and Q of up to 40% and 23%, respectively, but are negligible
K and effective mass M, the resonant frequency
and quality (no more than a 2% reduction in fres and a 1% reduction in Q)
factor are proportional to K /M and K M, respectively. for length-to-width ratios of 10 and higher. Comparisons
Thus, since the Timoshenko effects tend to decrease K and with experimental data in water indicate that the new model
increase M, their effect on fres will be more significant than predicts qualitative trends in the data at higher b/L ratios
on Q. This is predicted by the present model and reflected in and gives good quantitative estimates for Q for the thinner
the experimental data. specimens considered. However, in other cases the model is
seen to underestimate the softening trends in fres and Q.
VI. S UMMARY AND C ONCLUSIONS This discrepancy is likely attributable to support deformation,
thus providing motivation for future modeling efforts that
A new analytical model has been developed for predicting
account for support compliance in addition to the Timoshenko
the resonant characteristics of a Timoshenko cantilever beam
beam effects. Also, a generalization of the Stokes fluid resis-
in the presence of a viscous fluid. Since lateral-mode liquid-
tance model to account for fluid pressure effects in future work
phase sensing applications provided the motivation for this
is expected to improve the Q predictions for the case of thicker
study, an approximate, mechanics-based model for the fluid-
beams.
resistance, based on Stokess classical solution for in-plane
oscillations, was introduced as a first attempt to rationally
relate the inertial and damping effects of the fluid acting on the A PPENDIX
Timoshenko beam to the fluids density and viscosity. The new
model, which may be applied to multiple types of actuation D ETERMINATION OF C ONSTANTS Ci , i = 1, 2, 3, 4
and detection schemes, shows that the Timoshenko effects of The coefficients C1 , C2 , C3 , C4 are obtained by solving the
shear deformation and rotatory inertia become quite important following system of linear algebraic equations:
for lateral-mode cantilevers of small slenderness ratios, i.e., for
those types of devices that have demonstrated higher quality [B] {C} = {F} , (A-1)
SCHULTZ et al.: LATERAL-MODE VIBRATION OF MICROCANTILEVER-BASED SENSORS 859

in which {C} = {C1 C2 C3 C4 }T , [18] S. Heinrich, R. Maharjan, I. Dufour, F. Josse, L. Beardslee, and
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USA: Wiley, 2001. in 1956, and the M.S. degree in civil engineering
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phase chemical sensors with ppb range limits of detection, in Proc. 1959. Following a three-year period as an Instruc-
Hilton Head Workshop Solid-State Sens., Actuators Microsyst. Work- tor at Southern Illinois University, Carbondale, IL,
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[50] R. Maharjan, Effect of support compliance on the resonant behavior and applied mechanics from the University of Iowa
of microcantilever-based sensors in viscous fluids, Ph.D. dissertation, in 1965. He immediately began a distinguished
Dept. Civil, Construction, Environ. Eng., Faculty Graduate School, 48-year career at Marquette University, Milwaukee,
Marquette Univ., Milwaukee, WI, USA, 2013. WI, USA, during which time he directed the research of over 80 masters
and Ph.D. students, and was honored with six teaching awards, including
the Marquette University Teaching Excellence Award in 1982. For the past
Joshua A. Schultz received the B.S. degree in six years, he served as a highly valued researcher as Professor Emeritus
architectural engineering and the M.S. degree in of Mechanical Engineering, interacting with students and faculty across the
structural engineering from the Milwaukee School entire MU College of Engineering. His research portfolio spanned a diverse
of Engineering (MSOE), Milwaukee, WI, USA, in group of disciplines, including wave propagation, fluid-solid interaction,
2009, and the Ph.D. degree in civil engineering dynamics of high-altitude balloon systems, joining technology in electronic
from Marquette University, Milwaukee, in 2013. packaging, mechanics of liquid menisci, and, most recently, the modeling of
He became an Applied Research Engineer at Skid- microelectromechanical systems resonators. Since his unexpected passing in
more Owings and Merrill, Chicago, IL, USA. He 2013, he has been sadly missed by a large community of family, friends,
is currently an Adjunct Professor and the Director colleagues, and students whose lives he enriched.
of Science, Technology, Engineering, and Mathe-
matics with MSOE. His research interests include
multiscale structural dynamics (ranging from microelectromechanical sys- Luke A. Beardslee received the B.S. and M.E.
tems to supertall buildings), mechanics of composites, and structural degrees from Cornell University, Ithaca, NY, USA,
optimization. in 2007, and the Ph.D. degree from the Georgia
Institute of Technology, Atlanta, GA, USA, in 2011,
all in electrical engineering. He is currently pursu-
Stephen M. Heinrich received the B.S. degree ing the M.D. degree with Albany Medical College,
(summa cum laude) from Pennsylvania State Univer- Albany, NY, USA. His research interests include the
sity, State College, PA, USA, in 1980, and the M.S. application of micro/nanotechnology to biomedical
and Ph.D. degrees from the University of Illinois at and environmental problems, in particular, biochemi-
Urbana-Champaign, Champaign, IL, USA, in 1982 cal sensors, implantable devices, and micromachined
and 1985, respectively, all in civil engineering. He tissue engineering scaffolds.
joined the faculty of Marquette University, Milwau-
kee, WI, USA, as an Assistant Professor, where
he was promoted to Professor of Civil Engineer-
ing in 1998. He was a recipient of the Reverend Oliver Brand (M97SM03) is currently a Pro-
John P. Raynor Faculty Award for Teaching Excel- fessor with the School of Electrical and Computer
lence in 2000, Marquettes highest teaching honor. His research has focused Engineering and the Executive Director of the Insti-
on structural mechanics applications in microelectronics packaging and new tute for Electronics and Nanotechnology with the
analytical models for predicting and optimizing the performance of cantilever- Georgia Institute of Technology, Atlanta, GA, USA.
based chemical/biosensors and, more recently, vibration energy harvesting He received the Diploma degree in physics from
devices. The investigations performed by him and his colleagues have resulted the Technical University of Karlsruhe, Karlsruhe,
in over 100 refereed publications and three best paper awards from IEEE and Germany, in 1990, and the Ph.D. degree from ETH
the American Society of Mechanical Engineers. Zurich, Zurich, Switzerland, in 1994. From 1995
to 1997, he was a Post-Doctoral Fellow with the
Fabien Josse (SM78) received the License degree Georgia Institute of Technology. From 1997 to 2002,
in mathematics and physics in 1976, and the M.S. he was a Lecturer with ETH Zurich and the Deputy Director of the Physical
and Ph.D. degrees in electrical engineering from the Electronics Laboratory.
University of Maine, Orono, ME, USA, in 1979 Dr. Brand has co-authored over 190 publications in scientific journals
and 1982, respectively. He has been with Mar- and conference proceedings. He is a Co-Editor of the Wiley-VCH book
quette University, Milwaukee, WI, USA, since 1982, series Advanced Micro and Nanosystems, and an Editorial Board Member of
and is currently a Professor with the Department Sensors and Materials. He served as the General Co-Chair of the 2008 IEEE
of Electrical and Computer Engineering, and the International Conference on Micro Electro Mechanical Systems (MEMS),
Department of Biomedical Engineering. His research and has been a Technical Program Committee Member of the IEEE MEMS
interests include solid-state sensors, acoustic-wave Conference, the IEEE Sensors Conference, and the Transducers Conference.
sensors and microelectromechanical systems devices He was a co-recipient the 2005 IEEE Donald G. Fink Prize Paper Award. His
for liquid-phase biochemical sensor applications, investigation of novel sensor research interests are in the areas of integrated microsystems, microsensors,
platforms, and smart sensor systems. MEMS fabrication technologies, and microsystem packaging.

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