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a complete range
of Optical Instruments
TABLE OF CONTENTS
Page
DESCRIPTION
APPLICATIONS
INSTRUMENTS
Collimators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14
Focusing Collimators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15
Telescopes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .16
Focusing Telescopes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .17
Autocollimators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .18
Autocollimators with Eyepiece Micrometers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .20
Focusing Autocollimators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .21
Focusing Autocollimators with Eyepiece Micrometers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .22
Large Field Autocollimators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .22
LED-Autocollimators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .23
Diopter Telescopes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .24
Dynameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .25
Square Body Telescopes and Collimators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .26
1
OPTITEST
collimators
OPTITEST
telescopes
A COMPREHENSIVE AND MODULAR OPTICAL autocollimators
TEST EQUIPMENT.
achromats
The optical testing usually requires a wide
range of configurations specific to the appli- mechanical hardware for
cation or the parameters to be measured.
The large variety of the set-ups is, however, a positionning of the basic
combination of basic optical instruments
known as: optical instruments
The OPTITEST is a
comprehensive line
of equipment inclu-
ding the largest
range of basic op -
tical instruments
and additional me-
chanical hardware.
To cover all con-
ceivable testing set-
ups required by fast
changing applica-
tions, the compo-
nents of OPTITEST
line are design as a
modular system.
2
COLLIMATORS
Focusing Collimator
Finite distance setting-Virtual image
3
COLLIMATORS AND TELESCOPES
CONSTRUCTION
A focusing telescope
(finite distance setting)
is similary built, howe-
ver, the reticle adap-
ter is mounted on a
draw out tube for fo-
cusing adjustment.
4
COLLIMATORS AND TELESCOPES
Collimator Telescope
5
COLLIMATORS AND TELESCOPES
Reticle with
spaced lines in collimator Reticle image
S S
Microscope
Collimator
Collimator
Mirror
Example: Telescope
Measurement of focal length with supplemantary
The collimator and the telescope is strictly using collimators and telescopes achromat lens
aligned. When the binoculars or the prism sys-
tem only are placed between the collimator microscope (or a telescope with a supple-
and telescope tilt and rotation of prisms can mentary achromat) the size of spaced lines is
be measured. determined and the EFL calculated:
6
AUTOCOLLIMATORS
AUTOCOLLIMATORS
Collimator Cross Reticle When moving the reticles out of the focal
plane of the objective lens, the autocollimator
can be focused at finite distances, and the
Mirror
beam becomes divergent (producing a virtual
image) or convergent (real image). This results
cle. in a focusing autocollimator. The shape of the
While rotating the holder with the lens, the cir- beam -convergent or divergent-depend on
cle described by the reticle image is mea- the direction in which the reticles are moved.
sured.
CONSTRUCTION
W TRIOPTICS OptiAngle
W TRIOPTICS Ultra-Precision Rotary Holders The main components of a stadard autocolli-
mator i.e. focused at infinity are:
Virtual Image of
collimator reticle
Example:
Measurement of distance setting Eyepiece Eyepiece Beamsplitter Objective Lens
of sighting instruments Reticle
7
AUTOCOLLIMATORS
The beamsplitter mount together with the eye- the eyepiece reticle -which are seen superim-
piece and the illumination device form a main posed-no displacement occures.
unit called: Autocollimator Head.
If the reflector is tilted by an angle , the re-
A focusing autocollimator (finite disatnce set- flected beam is deflected by twice that angle
ting) is similary built. The autocollimator head i.e. 2. The reflected image is now laterally dis-
containing the two reticles is now mounted on placed with respect to the eyepiece reticle.
a draw out tube for focusing adjustment. The amount of this displacement d is a func-
tion of the focal
OPERATING PRINCIPLE length of the autocollimator and the tilt angle
Collimator
2a reticle
Eyepiece reticle
Objective lens
8
AUTOCOLLIMATORS
A B C
C)-Wedge in tolerance
The deflection angle through the wedge is
given for small angles by:
d(n-1)
=
2nf
W TRIOPTICS Optiangle
W TRIOPTICS Autocollimators with
pinhole reticles
Wedge
Measurement of prisms angles
Wedge
The range of applications in this field is very
Mirror wide, only some fundamental set ups are pre-
sented:
Measurement of wedge and deviation
angle with Autocollimators
Internal angle of 90
prisms
The parallel beam emerging from autocollima- The reflected images from
tor is reflected from both surfaces of the the 90 sides (which are in-
wedge. The wedge angle is given by: sensitive against rotation
around the roof edge) are
diplaced by an amount
= d x, if a deviation from 90
2 nf angle is present. Collimator
where:
d-displacement of the reflected image A presence of a displace-
n-refractive index of glass ment in height by the
f-focal length of the autocollimator amount y proves a
pyramid error as well:
For fast measurement in optical manu-factur- X y
ing, the displacement d for a given angle = =
4 nf 4 nf
tolerance and focal length f can be calcu-
lated and transfered to the illuminated reticle n-refractive index of glass Testing the internal
angle of prisms
in form of a pinhole, so that the acertaine- f-focal length of the auto-
ment of the componenent can be made on a collimator
9
AUTOCOLLIMATORS
45 Angle of Prisms
a) Relative measure-
ment of 45-angle
Flat
10
AUTOCOLLIMATORS
CHECKING THE STRAIGHTNESS, SQUARENESS, The data can be entered into a computer to
PARALLELISM AND FLATNESS produce a topography of the surface under
test.
The measurement of geometrical parameters B
of mechanical parts is a typical application in E
ma chine con struction, machine tools and
aerospace industry. F
A
Straightness Measurement
H
A mirror is either moved along the surface or
mounted on a movable part of the machine
to be measured. The mirror is supported by
D G C
balls or pins placed at a distance b known Topography of a surface
as base length. Deviations from straightness measured with Autocollimators
will result in tilt of the mirror. Deviation from
straightness are given by: Squareness Measurement
Squareness Measurement
Rotary table
11
AUTOCOLLIMATORS
Measurement of parallelism
R concave R convex
Alignment of bearings
additional
Achromat
Mirror
Radius of curvature f2
R = d Long radii
Measurement
Aditional achromats are mounted on the one
end of the autocollimator tube. The illuminat-
ed image of the autocollimator will be project- where d=dispacement of
ed into the focal plane of the achromat. This the draw out tube read off
image is reflected back from the vertex of the on its scale
lens and the center of curvature of lens sur-
face. The linear displacement between these
f
two positions - where a sharp image is seen in
the eyepiece - gives the radius of curvature.
12
AUTOCOLLIMATORS
1 2 3
Illuminated
Bright cross
Achromat
Mirror
Testing Flange Ultra-precision
Adjustable rotary holder
Jig Focal Distance
13
COLLIMATORS
STANDARD COLLIMATORS
COLLIMATORS Infinity Setting
14
COLLIMATORS
FOCUSING COLLIMATORS
Finite Distance Setting
15
COLLIMATORS / TELESCOPES
The Collimators are delivered as complete - Power supply (Transformer) for illumination
ready to work-instruments: Holders
tube mounted objective lens Other illumination devices (cold light source
reticle adapter incl. reticle 150W, halogene illumination 20W)
illumination with green filter and 5W/6V bulb
Ordering Information
The reticle adapters which might be included
are: To order a collimator please specify:
Standard reticle adapter including 3-101-114 COL F 300 -38 25 RC/FC RET-XX
one reticle at choice
Code
Focusing type
RC-Reticle changer with 4 positions. Focal length
Four reticles at choice are included. Tube Diameter
Draw-out range
Reticle Changer
RC/FC-Reticle changer with 4 po- Filter changer
sitions. Four reticle at choice are Reticle(s) type
included. Filter changer with 4 po-
sitions. One green and one white difuser are
included. Further filters on request.
STANDARD TELESCOPES
TELESCOPES Infinity Setting
16
TELESCOPES
FOCUSING TELESCOPES
Finite Distance Setting
17
TELESCOPES / AUTOCOLLIMATORS
AUTOCOLLIMATORS
18
AUTOCOLLIMATORS
STANDARD AUTOCOLLIMATORS
Infinity Setting
19
AUTOCOLLIMATORS
AUTOCOLLIMATORS
WITH EYEPIECE MICROMETERS
Infinity Setting
20
AUTOCOLLIMATORS
FOCUSING AUTOCOLLIMATORS
Finite Distance Setting
21
AUTOCOLLIMATORS
FOCUSING AUTOCOLLIMATORS
WITH EYEPIECE MICROMETERS
FIinite Distance Setting
22
AUTOCOLLIMATORS
23
AUTOCOLLIMATORS
DIOPTER TELESCOPES
24
DIOPTER TELESCOPES
25
COLLIMATORS AND TELESCOPES
The collimators and telescopes with square the standard eyepiece EPC 00-15 (magnifica-
body have a cross reticle accurately aligned tion 16x). The collimator includes the standard
to the body flat surface i.e.mechanical axis of illumination ILL 5W-6V. Further eyepieces and
the instrument. The square body is used as a illumination devices of OPTITEST are available
reference surface in solving alignment pro- on request.
blems. The telescope is normally equiped with
26
TUBE MOUNTED OBJECTIVE LENSES
27
TUBE MOUNTED OBJECTIVE LENS
front end surface accurately square to opti- This position which correspondes to the Infi-
cal axis nity Setting is engraved on the scale of the
front end surface with female thread focusing device as 0.
M35x0.75 mm (for barrels D 38 mm) and
M53x0.75 (for barrels D 57 mm) to allow ad- Moving the reticle away from objective lens
dition of accessories (achromats in mount, will result in a convergent beam. The image of
beam deflecting mirrors atc.). Similarly with the reticle is real and projected at a finite di-
the instruments described before, the tube stance. This region of the scale is marked as
mounted objective lenses are available in + focusing range.
two different types:
The first type represents objective lenses mo Moving the reticle toward the objective lens
unted in barrels having fixed length. The bar will result in a divergent beam. If the beam
rel length is designed such, that when atta diverges, a virtual image is produced at the
ching the reticle adapter to the barrel, the aparent crossing point of the beam rays.This
reticle is in the focal plane of the objective point is also located at a finite distance. This
lens and the emerging beam is parallel. The region of the scale is marked as - focusing
reticle image is projected to infinity. This type range.
of adjustment is known as Infinity Setting.
This type of adjustment is known as
The second type of objective lenses is simi Finite Distance Setting.
larly built, however, a focusing device atta
ched to the tube (barrel) containing the ob
jective lens, allow for variation of the di
stance between the reticle and lens. The fo
cusing range is normally selected so that in
the mid position the reticle is placed in the
focal plane of the lens.
28
TUBE MOUNTED OBJECTIVE LENS
L
Type Code Focal length Length Free D 115 0,02
Diameter/Draw L (mm) aperture
Out (mm) (mm) M M 35 X 0,75
ACCESSORIES
for tube mounted objective lenses
9 8 6 3 4
7
5
5- Micro-objective
1- Tube mounted objective lens D 38mm 6- Dual Adapter
2- Front cover ring 7- Mounted deflecting mirror
3- Achromat in mount 8- Iris diaphragm in mount
4- Adapter for micro-objectives 9- Laser Alignment Attachment
29
OBJECTIVE TUBE ACCESSORIES
30
OBJECTIVE TUBE ACCESSORIES
DUAL ADAPTER
IRIS DIAPHRAGM
achromat mount of
the Dual Adapter
micro-objectives ad
apter
achromats in mount
of OPTITEST line
The Dual Adapter assembly incorporates: The Iris Diaphragm can be used to observe eit-
her the autocollimation image or the image
a Iris Diaphragm in mount with a connection on a surface at finite distance. It can be used
thread to the end of objective lens barrel as well to adjust the illumination intensity when
an achromat in a mount which has a circu measuring samples with different reflectivities.
lar (ring shape) aperture around the achro
mat. ADAPTER FOR MICRO-OBJECTIVES
When mounted on an autocollimator, the The Adapter for Micro-objectives enables the
Dual Adapter allows for simultaneous observa- fitting of different micro-objectives to the ob-
tion of the autocollimation image (through the jective lens barrel of the Autocollimator. In this
circular aperture around the achromat) and way it is possible to focuss the autocollimator
direct viewing of the surface structure beam on a surface placed at the working di-
(through the achromat) of the plate placed in stance of the microobjective.
the front of the autocollimator. For viewing on-
ly, the built in iris diaphragm is used. Closing
the diaphragm covers the autocollimation be-
am, so that observation of the surface through
the achromat is possible. Applications include
the alignment of wafers and lens systems.
31
OBJECTIVE TUBE ACCESSORIES
The Microobjectives have different magnifica- trically with the mechanical interface to ob-
tions and working distances to suit many appli- jective lens tube. The visible laser beam helps
cations : observation of structure of surfaces, to align quickly the mirror or the autocollima-
measuring of radii of curvature of spherical sur- tor. The device is supplied complete including
faces, measuring of BFL, etc. power supply.
Magnification 3,2 X
Microobjective Micro 3,2 3-300-073 Working Distance 31 mm
Magnification 6,3 X
Microobjective Micro 6,3 3-300-074 Working Distance 12 mm
Magnification 10 X
Microobjective Micro 10 3-300-075 Working Distance 7,5 mm
32
RETICLE ADAPTERS
RETICLE ADAPTERS
Eyepiece
Eyepiece
RETICLE ADAPTER FOR COLLIMATORS
AND TELESCOPES
Illumination device
The Reticle Adapters for collimators and teles- To
copes as well as the Beamsplitter Mounts for objective
autocollimators come standard with dust co- lens
barrel
vers when ordered separately.
Beamsplitter Mount
33
AUTOCOLLIMATION HEADS
34
EYEPIECES
250
M=
f eyepiece
Magnification of autocollimators and teles
copes
f lens
EPC 00-15 (standard) M=
EPC 00-20 f eyepiece
EPC 00-25
The eyeshield is removable. After removal, the
The range of eyepieces included in the OPTI- thread of the eypiece tube (M 28x0.75) can
TEST line provides capabilities for many appli- be used to attach a CCD-camera adapter.
cations requiring different parameters as :
CCD-CAMERA ADAPTER
large field of view
large magnification This device includes highly corrected imaging
facilities for attaching CCD-cameras, etc. optics which transfer the reticle image from
All the eyepiece are focusable and have a the eyepiece on CCD-array. The Camera Ad -
long eyepoint which is convenient for spec- apter has a mechanical interface to CCD-Ca-
tacle lens wearers. A diopter scale can be mera (C-mount) and a threaded mount
used for various measurements like astigmatis- (M28x0.75) to eyepiece. The imaging optics
mus, flatness errors etc. The eyepiece EPC 00- are interchangeable (factory assembly).
Eyepieces
35
ILLUMINATION
ILLUMINATION DEVICES
STANDARD ILLUMINATION.
condenser optics
a green filter with a ground side working as
difusser
illuminating lamp in socket
connection cable to power supply. Length
1 m.
Standard illumination
Standard
ILL 5W-6V 3-200-150 20 M 27 x 0,5 Instruments
Large Field
LF-ILL 5W-6V 3-200-151 20 M 41 x 0,75 Instruments
36
ILLUMINATION
FURTHER ILLUMINATIONS
37
RETICLES
A bright cross reticle is especially suitable for Eyepiece reticles: double cross line
applications where the light conditions are
not optimal e.g. small reflector for autocolli Collimator reticles: single cross line
mation, long distance between autocolli
mator and reflector, AR-coated surfaces, Prefered combinations:
etc. For any other applications a dark cross
reticle is prefered. RET-24/RET-02
RET-24/RET-12
For same application, the use of instruments RET-24/RET-13
with longer focal length (smaller numerical RET-02/RET-12
aperture) will worsen the light conditions. RET-22/RET-01(f <300 mm)
Therefore always use cross reticles with
thicker lines when focal length increases.
Important!
Read always our reccomandations
as follows :
38
RETICLES
Single Cross Line (Hair) Reticles 2. RETICLE WITH ANGLE GRADUATED SCALES
APPLICATIONS
Code Type Line with Dia (mm)
(mm) Tilt measurement in conjunction with a re
flector attached to the object under test
Angle measurement of optical components
RET-01 0,010 12 like prisms, windows, etc.
RET-12 0,020 12
70'
60'
50'
40'
RET-13 0,030 12 30'
70' 60' 50' 40' 30' 20' 10' 20'
10'
ce (mm) 35'
30'
25'
20'
15'
RET-22 0,020 12 50' 45' 40' 35' 30' 25' 20' 15' 10' 5' 10'
5'
5'
10' 5' 10' 15' 20' 25' 30' 35' 40' 45' 50'
RET-24 0,040 12 15'
20'
25'
30'
RET-26 0,060 12 35'
40'
45'
50'
RET 31
39
RETICLES
20'
10'
graduation division for 5' 10' 15' 20' 25' 30'
5'
instrument
5'
RET-30 75 min 60 sec 20 sec ACM 100 30' 25' 20' 15' 10' 5' 10'
15'
RET-31 50 min 30 sec 15 sec ACM 150 20'
25'
RET-32 30 min 30 sec 10 sec ACM 200 30'
25'
20'
Reticle with special angle graduations
15'
25' 20' 15' 10' 5' 10'
RET-40 20 1 0,5 ACM 100
5'
0,2
RET-42 12 0,5 ACM 200
5'
10' 5' 10' 15' 20' 25'
15'
20'
25'
RET 33
12,5'
10'
7,5'
5'
12,5' 10' 7,5' 5' 2,5'
2,5'
2,5'
2,5' 5' 7,5' 10' 12,5'
5'
7,5'
10'
12,5'
RET 35
40
RETICLES
APPLICATIONS
RECOMMANDATIONS
Prefered Combinations
RET-50/RET-59
RET-51/RET-53...RET-58
RET 53...59
RET-50 9 concentric circles graduated for TILT 1, 2, 3, 4, 5, 7,5, 10, ACM 200
measurement (positive type) 15, 30, min
RET-51 9 concentric circles graduated for WEDGE 1, 2, 3, 4, 5, 7,5, 10, ACM 200
measurement (positive type) 15, 30, min
RET-53 pinhole with cross for WEDGE measurement 30/60 ACM 300
(negative type)
41
RETICLES
4. RESOLUTION TESTS
Resolution Tests
APPLICATIONS
RECOMMANDATIONS
APPLICATIONS RET 63
42
RETICLES
Prefered combinations:
RET-71/RET-13(RET-02)
RET-91/RET-13 (RET-02, RET-86)
RET-02/RET-73
RET 77
4 3 2 1 1
1 1 2 3 4
4
RET 71 RET 73 RET 92
43
HOLDERS
ACCESSORIES.
POSITIONING EQUIPMENT.
The clamp fixtures are mounted on a base TWO AXIS ADJUSTABLE HOLDER
plate with 4 fixing screws and 4 pressure scr-
ews. The pressure screws prevent a loosening This unit provide two axis fine adjustments for
of the fixing screws and allow a certain level- azimuth and elevation. It also incorporates
ling within a small range. clamping screws to securely hold the autocol-
limator.
Code Diam. D H L W A B
mm
Adjustable Holder D 57 mm
44
STANDS
AUTOCOLLIMATOR STAND
Features
Applications
45
STANDS AND TABLES
D
Self-centering Rotary Holder
X
Type/Features Code Height Travel Distance LxW Approx.
H mm coarse/fine to optical mm Weight
range T mm axis D mm Kg
Stand C. Coarse and fine 3-200-034 600 380/380 112,5 277x178 13,5
travel. Sensivity: 1 m.
Transversal Stages: 10mm,
Resolution 0,005 m
TILT TABLE D 100 MM The tilt and rotation tables are modular and
can be mounted together with the tilt table
Three fine adjustments screws allow the tilt either on top or at bottom.
along two axes. Two threaded holes M4 are
provided for attaching further accessories. The
tilt table designed for measurements in trans-
mission have a central hole D 15 mm.
Tilt and Rotation Table D 100 3-300-016 2 360/2,5 5/10 sec 8 Kg 3,4 Kg
SELF-CENTERING HOLDERS
Code Type Diam. Centrati- Mounting
Trioptics Self-Centering Lens Mounts reliably range on
center and hold optics and cylindrical objects. mm mm
The centering accuracy is far above the com-
mercially available self-centering mounts. To 3-300-018 SCH 75 5-75 < 0,05 3xM4 CLR
ensure the precise axial position of lens cells on Dia.110
and mounts, the three support rods have an mm
accurately ground step. This secure not only a
repeatable radial centration but an exacte 3-300-019 SCH 35 3-35 < 0,03 M57.7x0,75
axial positioning as well.
47
TRIOPTICS GmbH . Optische Instrumente
Hafenstrasse 35-39 . 22880 Wedel / Germany
Phone: +49-4103 -18006 - 0
Fax: +49-4103 - 18006 - 20
E-mail: info@trioptics.com . http://www.trioptics.com