Professional Documents
Culture Documents
Keith B. Flyzik
Micro-Clean, Inc.
Bethlehem, Pennsylvania, USA
Engsysco
Cleanroom Spaces
- To Mainly Dilute and Remove Particles
15
10%
6 25
540 600
Cleanrooms utilize much higher airflow rates than for generalpurpose buildings, energy saving potential from airflow rate
reduction is significant.
100,000
5 48
10,000
60 90
1,000
150 240
100
240 480
10
300 540
360 540
360 600
600
ISO Class
Air Change
Per Hour
Range
Classification
600
540
540
480
500
400
360
300
360
360
240
300
200
240
150
100
90
48
60
0
0
1
IEST Recommended Practices RP-12
C
C
FILTER
AHU Unit
H
C
OA+RA
OA
Makeup
Air
Efficiency Ea
Co
V
OA
SA
RA
EA
Q
Cs
=
=
=
=
=
=
=
Efficiency Eb
Supply
Air
HEPA
SA
Co =
Space Impurity
Cs
Concentration
RA
Space
Particle Generation
Q
Leakage
Air
Cs
G
Deposition
D
Return
Cs
Air
EA
Es =
G =
Exhaust
Air
Ce
T =
Ea =
Eb
[ = 1 - (1 - E2)(1 - E1)]
= Ceiling HEPA filter efficiency
C
C
H
C
OA+RA
Co
Efficiency Eb
SA
Supply
Air
Space Impurity
Cs
Concentration
RA
Space
Particle Generation
Q
Leakage
Air
Cs
G
Deposition
D
OA
Makeup
Air
Efficiency Ea
HEPA
FILTER
AHU Unit
Return
Cs
Air
EA
Exhaust
Air
Ce
GD
=b
Co ACR
b
C ST = Co =
a
(1 ) G
ACR
m + ( EU + E H EU E H ) (1 m )
(1 EU ) (1 E H ) m CO +
b
b
CST = CSO Co e a ACR t + C o
a
a
If t,
CST
GD
(
1
)
(
1
)
m
+
U
H
Co ACR
b
= Co =
Co
a
(
)
(
1
)
m
E
E
E
E
m
+
+
U
H
U
H
1,000,000.0
Internal Particle
Generation Rate:
G = Rate of
impurity
generation unit
floor area,
averaged
throughout the
space
Condition:
100,000.0
OA/SA=5%
6
CO=1x10
EU=95%
EH=99.97%
=5%
10,000.0
1,000.0
Unit:
Particals/FT3/Min.
100.0
G=1
10.0
G=10
G=100
G=1000
1.0
G=10000
0.1
0
100
200
300
400
500
600
Internal Particle
Generation Rate:
G = Rate of
impurity
generation unit
floor area,
averaged
throughout the
space
Condition:
OA/SA=5%
CO=1x106
EU=95%
G=10
=5%
100.0
Unit:
3
partIcals/FT /Min.
10.0
EH=99.97%
1.0
EH=99.997%
EH=99.9997%
0.1
1
10
100
1,000
1,000.0
Condition:
OA/SA=10%
EU=95%
G=10
= 5%
EH = 99.997%
100.0
Unit:
3
PartIcals/FT /Min.
10.0
Co=100,000
1.0
Co=1,000,000
Co=10,000,000
0.1
0
100
200
300
400
500
600
1,000.0
Condition:
5
Co=1x10
EU=95%
G=10
= 5%
EH = 99.997%
100.0
Unit:
3
PartIcals/FT /Min.
10.0
m=5%
m=10%
1.0
m=15%
m=20%
0.1
0
100
200
300
400
500
600
Internal Particle
Generation Rate:
G = Rate of
impurity
generation unit
floor area,
averaged
throughout the
space
Condition:
OA/SA=10%
CO=1x105
EU=95%
EH=99.997%
= 5%
10,000
1,000
Unit:
particals/FT3/Min.
100
G=100, Model
Based
G=1,000, Model
Based
10
G=5,000, Model
Based
ACH-Low, Rec.
Based
1
0
100
200
300
400
500
600
ACH-High, Rec.
Based
2'x4' Fan
Filter Unit
Prep. Room
Class 1,000-10,000
30"x24' Sidewall
Return Grille &
Shaft
48"x24' Sidewall
Return Grille &
Shaft
Gown Room
(Airlock)
Class 100,000
Process Room
Class 1-100
Mixing
Mixing
AHU
12
10
11
Prep Room
Class: 1,000-10,000
Flow: 1,641 cfm, 74 ACH
Size: 143"x167"x96"(H)
Gown Room
Class: 100,000
Flow: 601 cfm, 77 ACH
Size: 96"x88"x96"(H)
Process Room
Class: 1-100
Flow: 4,2874 cfm, 712 ACH
Size: 96"x72"x90"(H)
2'x4' Fan
Filter Unit
Testing Cleanroom
Class 1-1,000
48"x12' Sidewall
Return Grille &
Shaft
FFU
DCC
DCC
Particles
RA
Non-unidirectional Cleanroom
Class: 1 ~ 1,000
Air Velocity = 60~100 FPM
Temp.: 723F, R.H.: 455%
Pressure: +0 ~ 0.08 in.
Particles
RA
Return
HEPA Supply
(Pattern 1)
2'x2' HEPA
Supply
Return
(Pattern 2)
Research Cleanroom
Class 1,000-10,000
ACH: 5-50
2'x2' Return
(Ceiling)
Return
2'x2' Return
(Low Sidewall)
HEPA Supply
(Pattern 1)
Return
(Pattern 2)
1'x1' HEPA
Supply
1'x1' Return
(Ceiling)
PassThrough
Airlock
Class 10,000
ACH: 5-30
Prep. Room
Class 10,000
ACH: 5-30
Supply Air
Ceiling
HEPA Supply
Research Cleanroom
Class 1,000-10,000
ACH: 5-50
Return Air
Supply Air
Return Air
HEPA Supply
Airlock
Class 10,000
HEPA Supply
Prep. Room
Class 10,000
12
10
5
13
11
15
Research Cleanroom
Class 100-10,000
3
8
Ceiling
14
HEPA Supply
E
A
Prep. Room
Class 10,000
C
Floor
Particle
Generation
Point
Sensor Location
0.6
01-A
01-C
02-A
02-C
03-B
04-A
04-B
05-A
05-B
05-C
07-C
07-E
08-C
08-E
09-E
10-B
10-E
11-C
12-A
12-C
13-B
14-A
14-C
15-B
0.5
0.4
0.3
0.2
0.1
0.0
5
10
15
20
25
30
Sealed PassThrough
Room Space Particle Generation Rate: 9,300,000 counts/min., Duration: 4.75 hours=285 min.
Walls
Ceiling
Window Glass
Floor
Total
82.64
Exposed Surfaces
889.5
Surface Particle
Deposition Rate
(counts/m2)
6.07E+05
5.90E+05
9.60E+05
1.22E+06
Surface Particle
Deposition Rate
(counts/min.)
8.38E+04
4.17E+04
1.01E+04
8.63E+04
Surface Particle
Deposition
Percentage
Percentage of
Particles Removed
through Return Air
0.90%
0.45%
0.11%
0.93%
2.39%
97.61%
Q&A