BATANGAS STATE UNIVERSITY

College of Engineering, Architecture, Fine Arts &

Computing Sciences
Gov. Pablo Borbon Campus II, Alangilan, Batangas City, Philippines 4200
www.batstate-u.edu.ph
Telefax: (043) 300-4404 locs. 106-118

CHEMICAL AND FOOD ENGINEERING DEPARTMENT

EXERCISES
ChE 418: Computer Applications in Chemical Engineering
Student Number: ________________ Date: ________________ Score: __________
Name: _______________________________________________
1. Plot and reproduce Figure 3.3 and 3.4 in the problem mentioned below. The
explanation will guide you how you will compute. Answer letter a and b only
based from your plot.

2. In a semiconductor manufacturing process flow, we have a step whereby we grow an

oxide film on the silicon wafer using a furnace. In this step, a cassette of wafers is placed
in a quartz "boat" and the boats are placed in the furnace. The furnace can hold four
boats. A gas flow is created in the furnace and it is brought up to temperature and held
there for a specified period of time (which corresponds to the desired oxide thickness).
This study was conducted to determine if the process was stable and to characterize
sources of variation so that a process control strategy could be developed.
Goal The goal of this study is to determine if this process is capable of consistently
growing oxide films with a thickness of 560 Angstroms +/- 100 Angstroms.
The following are the data that were collected for this study.
RUNZONEWAFERTHICKNESS
RUNZONEWAFERTHICKNESS

1
1
1
546
1
1
2
540
1
2
1
566
1
2
2
564
1
3
1
577
1
3
2
546
1
4
1
543
1
4
2
529
2
1
1
561
2
1
2
556
2
2
1
577
2
2
2
553
2
3
1
563
2
3
2
577
2
4
1
556
2
4
2
540
3
1
1
515
3
1
2
520
3
2
1
548
3
2
2
542
3
3
1
505
3
3
2
487
3
4
1
506
3
4
2
514
4
1
1
568
4
1
2
584
4
2
1
570
4
2
2
545
4
3
1
589
4
3
2
562
4
4
1
569
4
4
2
571
5
1
1
550
5
1
2
550
5
2
1
562
5
2
2
580
5
3
1
560
5
3
2
554
5
4
1
545
5
4
2
546
6
1
1
584
6
1
2
581
6
2
1
567
6
2
2
558
6
3
1
556
6
3
2
560
6
4
1
591
6
4
2
599
7
1
1
593
7
1
2
626
7
2
1
584
7
2
2
559
7
3
1
634
7
3
2
598
7
4
1
569
7
4
2
592
8
1
1
522
8
1
2
535
8
2
1
535
8
2
2
581
8
3
1
527
8
3
2
520
8
4
1
532
8
4
2
539
9
1
1
562
9
1
2
568
9
2
1
548
9
2
2
548
9
3
1
533
9
3
2
553
9
4
1
533
9
4
2
521
10 1
1
555
10 1
2
545
10 2
1
584
10 2
2
572
10 3
1
546
10 3
2
552
10 4
1
586
10 4
2
584
11 1
1
565
11 1
2
557
11 2
1
583
11 2
2
585
11 3
1
582
11 3
2
567
11 4
1
549
11 4
2
533

12 1
1
548
12 2
1
563
12 3
1
543
RUNZONEWAFERTHICKNESS

12 4
1
585
13 1
1
580
13 2
1
556
13 3
1
609
13 4
1
570
14 1
1
564
14 2
1
585
14 3
1
564
14 4
1
563
15 1
1
550
15 2
1
538
15 3
1
556
15 4
1
534
16 1
1
552
16 2
1
563
16
3
1
571
16 4
1
575
17 1
1
549
17 2
1
584
17 3
1
567
17 4
1
606
18 1
1
539
18 2
1
533
18 3
1
522
18 4
1
547
19 1
1
610
19 2
1
587
19 3
1
572
19 4
1
566
20 1
1
569
20 2
1
558
20 3
1
577
20 4
1
552
21 1
1
595
21 2
1
599
21 3
1
598
21 4
1
580

12 1
2
528
12 2
2
588
12 3
2
540
RUNZONEWAFERTHICKNESS

12 4
2
586
13 1
2
570
13 2
2
569
13 3
2
625
13 4
2
595
14 1
2
555
14 2
2
588
14 3
2
583
14 4
2
558
15 1
2
557
15 2
2
525
15 3
2
547
15
4
2
542
16 1
2
547
16 2
2
578
16 3
2
572
16 4
2
584
17 1
2
546
17 2
2
593
17
3
2
548
17 4
2
607
18 1
2
554
18
2
2
535
18 3
2
521
18 4
2
550
19 1
2
592
19 2
2
587
19
3
2
612
19 4
2
563
20 1
2
609
20
2
2
555
20 3
2
579
20 4
2
558
21 1
2
583
21 2
2
602
21 3
2
616
21
4
2
575

****************************************************
*CAPABILITYANALYSIS*
*NUMBEROFOBSERVATIONS=168*
****************************************************
*LOWERSPECIFICATIONLIMIT(LSL)=460.00000*
*UPPERSPECIFICATIONLIMIT(USL)=660.00000*
*TARGET(TARGET)Value=560.00000*
Compute for the upper confidence level (+3 std dev) and lower confidence level (-3 std
dev) by computing the standard deviation. Generate a plot showing the actual data with
the confidence levels and the USL and LSL and target value and identify the outlier
data. Based from the plot, does the equipment still functions well.
3. Solve one problem in the following. Show the given, diagram, solution, matrix
and the answers in an organized manner.

Problem 1

Problem 2

Problem 3

4. Solve the following problem. Show the given, diagram, solution, matrix and the
answers in an organized manner.

Prepared by:
_________________________
Engr. Mary Rose F. Persincula
Department Head, ChE/FE