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Data Sheet
FEATURES
GENERAL DESCRIPTION
APPLICATIONS
Optical image stabilization
Platform stabilization
Wearable products
PDMY PDMX
DEMOD
PITCH
GND
ADC
FILTERS
DEMOD
ROLL
CONTROL LOGIC
ADC
MOSI
SERIAL
INPUT/OUTPUT
DIGITAL
MISO
SCLK
CS
ADXRS290
MECHANICAL
SENSOR
PITCH
ROLL
PLL
DRIVE
12636-001
VELOCITY
Figure 1.
Rev. A
Document Feedback
Comparable Parts
Reference Materials
Evaluation Kits
Technical Articles
Designing For Low Noise Feedback Control With Mems
Gyroscopes
Design Resources
Documentation
Data Sheet
ADXRS290: Ultralow Noise, Dual-Axis Gyroscope Data
Sheet
User Guides
UG-780: Evaluation Board for ADXRS290, Ultralow
Noise, Dual-Axis MEMS Gyroscope
UG-783: Using the EVAL-ADXRS290Z-M Inertial Sensor
Evaluation System for the ADXRS290
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number
* This page was dynamically generated by Analog Devices, Inc. and inserted into this data sheet. Note: Dynamic changes to
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frequently modified.
ADXRS290
Data Sheet
TABLE OF CONTENTS
Features .............................................................................................. 1
Applications ....................................................................................... 1
Specifications..................................................................................... 3
MEMS Identifier......................................................................... 17
REVISION HISTORY
12/14Rev.0 to Rev. A
Changes to Title ................................................................................ 1
Changes to Features Section and General Description Section....... 1
10/14Revision 0: Initial Version
Rev. A | Page 2 of 19
Data Sheet
ADXRS290
SPECIFICATIONS
Specified conditions at TA = 25C. VS = VDD I/O = 3 V, angular rate = 0/sec, bandwidth = dc to 480 Hz, CS = CREG = CI/O = CCP = 1 F, digital
mode, temperature sensor = off, unless otherwise noted. All minimum and maximum specifications are guaranteed. Typical specifications
are not tested or guaranteed.
Table 1.
Parameter
MEASUREMENT RANGE
Output Full-Scale Range
Resolution
Gyroscope Data Update Rate
LINEARITY
Nonlinearity
Cross Axis Sensitivity
SENSITIVITY
Sensitivity
Initial Sensitivity Tolerance1
Change Due to Temperature
OFFSET
Offset Error
NOISE PERFORMANCE
Rate Noise Density
FREQUENCY RESPONSE
3 dB Frequency2
Low-Pass Filter
High-Pass Filter
Delay
POWER SUPPLY
Operating Voltage Range (VS, VDD I/O)
Supply Current
Start-Up Time (Standby)
Start-Up Time (Measurement Mode)
TEMPERATURE SENSOR
Resolution
Sensitivity
OPERATING TEMPERATURE RANGE
Operating Temperature Range
1
2
Test Conditions/Comments
Each axis
TA = 25C
TA = 20C to +60C
Min
12
Typ
Max
Unit
100
16
4250
/s
Bits
Hz
0.5
2.0
% FS
%
200
3
1
+12
LSB//s
%
%
TA = 20C to +60C
/s
TA = 25C at 10 Hz
Programmable (see the Setting Bandwidth section)
0.004
/s/Hz
20
0.011
480
11.3
Hz
Hz
ms
5.0
7.8
80
<5
<100
V
mA
A
ms
ms
12
0.1
Bits
C/LSB
<0.5
2.7
Measurement mode
Standby mode
Power off to standby mode
Standby to measurement mode (to within 1/s of final value)
25
Initial sensitivity tolerance minimum and maximum specifications are guaranteed by characterization and are not tested in production.
Guaranteed by design and are not tested in production.
Rev. A | Page 3 of 19
+85
ADXRS290
Data Sheet
Table 2.
Parameter
Acceleration (Any Axis, Unpowered, 0.5 ms)
Acceleration (Any Axis, Powered, 0.5 ms)
VS, VDD I/O
All Other Pins
Output Short-Circuit Duration (Any Pin to
Common)
Operating Temperature Range
Storage Temperature Range
Rating
2000 g
2000 g
2.7 V to 5.25 V
2.7 V to 5.25 V
Indefinite
40C to +105C
40C to +105C
ESD CAUTION
12636-002
Rev. A | Page 4 of 19
Field Description
Part identifier for ADXRS290
Date code
Pin 1 and factory lot code identifiers
Data Sheet
ADXRS290
MOSI
SENS
AST
VDD I/O
VREG
ADXRS290
TOP VIEW
(TERMINAL SIDE DOWN)
Not to Scale
SCLK
10
11
12
13
14
18
VS
17
VREG
16
GND
15
GND
12636-003
MISO
VS
GND
CS
CP
SYNC/ASEL
PDMY
PDMX
Mnemonic
VREG
VDD I/O
AST
SENS
PDMX
PDMY
CS
MISO (SDO)
MOSI (SDI)
SCLK
SYNC/ASEL
12
CP
13, 15, 16
14
17
18
GND
VS
VREG
VS
Description
Digital Mode
Analog Evaluation Mode
Regulator Output. Connect a 1 F capacitor to this pin.
Regulator Output. Connect a 1 F capacitor to this pin.
Digital Interface Supply Voltage.
Digital Interface Supply Voltage.
This pin is internally pulled to ground.
Self Test.
This pin is internally pulled to ground.
Sensitivity Select.
This pin is internally pulled to ground.
Pulse-Density Modulation (PDM) XOUT.
This pin is internally pulled to ground.
PDM YOUT.
Chip Select. Active low.
Chip Select. Active low.
Serial Data Out.
Serial Data Out.
Serial Data In.
Serial Data In.
Serial Communications Clock.
Serial Communications Clock.
Analog Enable (ASEL).
Data Ready Out (SYNC). Connect this pin to ground if
it is not used.
Charge Pump Output. Connect a 1 F capacitor (rated Charge Pump Output. Connect a 1 F capacitor (rated
for 50 V) to this pin.
for 50 V) to this pin.
Ground. Connect to ground.
Ground. Connect to ground.
Analog Supply Voltage.
Analog Supply Voltage.
Regulator Output. Connect a 1 F capacitor to this pin.
Regulator Output. Connect a 1 F capacitor to this pin.
Analog Supply Voltage.
Analog Supply Voltage.
Rev. A | Page 5 of 19
ADXRS290
Data Sheet
40
60
35
50
40
30
20
10
30
25
20
15
10
5
100
200
300
400
500
12636-004
100
200
300
400
500
12636-007
N > 240 for all typical performance characteristics plots, unless otherwise noted.
400
1500
300
1000
500
OFFSET (LSB)
OFFSET (LSB)
200
100
0
100
500
200
1000
75
100
TEMPERATURE (C)
1500
50
20
20
18
Rev. A | Page 6 of 19
220
218
216
214
12636-009
212
210
206
208
220
12636-006
218
216
214
212
210
208
206
204
202
200
198
196
194
192
2
190
204
202
198
200
10
194
10
188
100
12
196
12
186
75
14
192
14
184
50
16
190
16
180
18
182
25
22
180
TEMPERATURE (C)
25
188
50
186
25
184
182
25
12636-005
400
50
12636-008
300
ADXRS290
220
220
215
215
210
210
205
200
195
205
200
195
190
190
185
185
50
75
100
180
50
TEMPERATURE (C)
250
AVERAGE VALUE OF RATE OUTPUT (/s)
0.20
200
150
100
50
0
50
100
150
200
ADXRS290
REFERENCE
10
20
30
40
50
60
70
80
TIME (ms)
0.10
0.07
0.05
0.03
0.10
30
20
0.5
10
1.0
1.5
10
0.15
(AVERAGE)
(AVERAGE)
(RMS)
(RMS)
0.01
0
10
X-AXIS
Y-AXIS
0.5
0.10
X OUTPUT
Y OUTPUT
X OUTPUT
Y OUTPUT
0.15
0.02
0.1
40
0.05
0.04
0.05
1.0
0.05
FREQUENCY (kHz)
50
2.0
0.06
20
0.20
TIME (Seconds)
12636-012
0.08
60
X-AXIS
Y-AXIS
INPUT REFERENCE
0.09
0.15
0.10
0.20
12636-011
250
0
100
75
TEMPERATURE (C)
1.5
50
25
25
25
12636-014
0.01
0.001
0.0001
0.00001
0.1
10
100
1k
FREQUENCY (Hz)
Rev. A | Page 7 of 19
10k
12636-015
25
12636-010
180
50
12636-013
SENSITIVITY (LSB//s)
SENSITIVITY (LSB//s)
Data Sheet
ADXRS290
Data Sheet
0
200
X-AXIS
Y-AXIS
50
0
50
100
10
15
20
25
LPF = 80Hz
LPF = 160Hz
LPF = 320Hz
30
150
10
20
40
30
50
60
70
80
90
100
TIME (ms)
35
12636-017
200
50
1000
0.4
NONLINEARITY (% OF FULL-SCALE)
1200
800
600
400
200
0
200
400
0.3
0.2
0.1
0
0.1
0.2
0.3
25
25
50
75
100
0.5
125
75
25
25
75
12636-022
0.4
600
50
12636-023
40
125
3.0
50
LPF = 80Hz
LPF = 160Hz
LPF = 320Hz
45
2.5
2.0
1.5
1.0
0.5
40
35
30
25
20
15
10
5
0
0
10
20
30
40
50
12636-021
30
20
10
0
10
15
20
25
30
35
40
45
50
55
Rev. A | Page 8 of 19
60
12636-019
100
12636-020
150
Data Sheet
ADXRS290
50
40
35
30
25
20
15
10
5
0
6.5
6.6
6.7
6.8
6.9
7.0
7.1
7.2
7.3
7.4
7.5
12636-024
45
Rev. A | Page 9 of 19
ADXRS290
Data Sheet
THEORY OF OPERATION
The ADXRS290 is designed to sense x-axis and y-axis (roll and
pitch) angular rate. The ADXRS290 operates on the principle of
a vibratory rate gyroscope. Figure 23 presents a simplified
illustration of one of four, coupled polysilicon sensing structures.
Each sensing structure contains a resonating disk that is
electrostatically driven to resonance, which produces the
necessary rotating velocity element needed to generate a
Coriolis torque when experiencing angular rate.
X-AXIS
Y-AXIS
12636-025
X
Y
Rev. A | Page 10 of 19
Data Sheet
ADXRS290
APPLICATIONS INFORMATION
APPLICATION CIRCUIT
POWER SEQUENCING
The interface voltage level is set with the interface supply voltage
VDD I/O, which must be present to ensure that the ADXRS290
does not create a conflict on the communications bus. For singlesupply operation, VDD I/O can be the same as the main supply (VS).
Conversely, in a dual-supply application, VDD I/O can differ from
VS to accommodate the desired interface voltage. When VS is
applied, the device enters standby state, where power consumption
is minimized, and the device waits for VDD I/O to be applied and
for a command to enter measurement mode. Measurement mode
is activated by setting Bit B1 in Register 0x10 (POWER_CTL).
Clear this bit to return the device to a standby state.
2.7V TO
5.25V
VREG
VDD I/O
CI/O
1F
CREG
1F
CS
1F
15
GND
GND
16
17
18
VS
VREG
2.7V TO
5.25V
14
VS
GND
ADXRS290
13
AST
TOP VIEW
(TERMINAL SIDE DOWN)
Not to Scale
12
SENS
11
PDMX
10
CP
CCP
1F
50V
SYNC/ASEL
SETTING BANDWIDTH
9
SPI BUS
12636-026
MOSI
MISO
CS
PDMY
SCLK
Bit 1 Filter
0
0
1
1
0
0
1
1
Bit 0 Filter
0
1
0
1
0
1
0
1
Frequency (Hz)
480 (Default)
320
160
80
56.6
40
28.3
20
Bit 6
Filter
0
Bit 5
Filter
0
Bit 4
Filter
0
0
0
0
0
0
0
0
1
1
1
0
0
0
1
1
1
1
0
0
0
0
1
1
0
0
1
1
0
0
1
1
0
1
0
1
0
1
0
1
0
Rev. A | Page 11 of 19
Frequency
(Hz)
All pass
(default)
0.011
0.022
0.044
0.087
0.175
0.350
0.700
1.400
2.800
11.30
ADXRS290
Data Sheet
ANALOG EVALUATION MODE
1.2
0.8
0.6
0.011Hz
0.022Hz
0.044Hz
0.087Hz
0.175Hz
0.35Hz
0.7Hz
1.4Hz
2.8Hz
11.3Hz
0.4
0.2
0
0.0001
0.001
0.01
0.1
10
100
1k
FREQUENCY (Hz)
12636-027
NORMALIZED MAGNITUDE
1.0
0.8
VREG
2.7V TO
5.25V
0.6
VDD I/O
CI/O
1F
0.4
CREG
1F
SENS
GND
15
GND
CS
1F
14
VS
GND
ADXRS290
13
TOP VIEW
(TERMINAL SIDE DOWN)
Not to Scale
12
AST
0.2
16
18
NORMALIZED MAGNITUDE
1.0
VS
20Hz
28.3Hz
40Hz
56.6Hz
80Hz
160Hz
320Hz
480Hz
17
1.2
VREG
CP
11
10
CCP
1F
50V
SYNC/ASEL
LOW-PASS FILTER
47k
0.1F
PDMX
OR
PDMY
24k
0.01F
30.1k
0.01F
ANALOG
BASEBAND
SIGNAL
30.1k
5100pF
0.1F
5V
12636-030
12636-029
SCLK
MOSI
FREQUENCY (Hz)
10k
MISO
1k
100
CS
10
PDMY
12636-028
PDMX
Figure 28. Recommended Low-Pass Filter for Demodulating the PDM Output
in Analog Mode Operation
Rev. A | Page 12 of 19
Data Sheet
ADXRS290
Rev. A | Page 13 of 19
BAD PLACEMENT
GOOD
PLACEMENT
MOUNTING POINTS
12636-031
ADXRS290
Data Sheet
SERIAL COMMUNICATIONS
data can be sampled. Unless the ADXRS290 is in standby
mode, multiple bytes can be written to or read from in a single
transmission. In standby mode, only single register transactions
are supported. Deasserting the CS pin is necessary between
commands for transmissions with multiple commands. For SPI
operation greater than 1 MHz, it is necessary to deassert the CS
pin to ensure a total delay of 10 s between the register addressing
portion of the transmission. The delay is required to allow
settling of the internal voltage controlled oscillator. For SPI
operation of 1 MHz or lower, the communication rate is low
enough to ensure a sufficient delay between register writes.
SS
SDI
MOSI
SDO
MISO
SCLK
SCLK
12636-032
PROCESSOR
CS
tDELAY
tS
tM
tQUIET
CS
SDI
R/W
SDO
A6
A5
tSETUP
tHOLD
A4
A3
A2
A1
A0
D7
D6
D5
D4
D3
D2
D4
D0
D7
D6
D5
D4
D3
D2
D1
D0
tSDO
Limit
5
200
200
200
0.4 tSCLK
0.4 tSCLK
20
10
10
Unit
MHz max
ns min
ns min
ns min
ns min
ns min
ns max
ns min
ns min
Description
SPI clock frequency
1/(SPI clock frequency), mark/space ratio for the SCLK input is 40/60 to 60/40
CS falling edge to SCLK falling edge
SCLK rising edge to CS rising edge
SCLK low pulse width (space)
SCLK high pulse width (mark)
SCLK falling edge to SDO transition
SDI valid before SCLK rising edge
SDI valid after SCLK rising edge
Rev. A | Page 14 of 19
12636-033
SCLK
Data Sheet
ADXRS290
T
CS
CS
MOSI
MOSI
2
MISO
MISO
SCLK
SCLK
4
CH1 5.00V
CH3 5.00V
CH2 5.00V
CH4 5.00V
M4.00s
T
7.400s
A CH1
1.8V
12636-034
Figure 32. SPI Write Example: Writing to Register 0x10 (Write 0x02 to Enter
Measurement Mode)
CH1 5.00V
CH3 5.00V
CH2 5.00V
CH4 5.00V
M4.00s
T
7.400s
A CH1
1.8V
12636-035
Figure 33. SPI Read Example: Reading Register 0x01 (Output = 0x1D)
Rev. A | Page 15 of 19
ADXRS290
Data Sheet
REGISTER MAP
Table 8.
Register No. (Hex)
0x00
0x01
0x02
0x03
0x04
0x05
0x06
0x07
0x08
0x09
0x0A
0x0B
0x0C
0x0D
0x0E
0x0F
0x10
0x11
0x012
Name
ADI_ID
MEMS_ID
DEV_ID
REV_ID
SN0
SN1
SN2
SN3
DATAX0
DATAX1
DATAY0
DATAY1
TEMP0
TEMP1
Reserved
Reserved
POWER_CTL
Filter
DATA_READY
Bit 7
Bit 6
Bit 5
Bit 4
0
HPF[3:0]
0
0
0
0
Bit 3
Bit 2 Bit 1
Bit 0
ADI_ID[7:0]
MEMS_ID[7:0]
DEV_ID[7:0]
REV_ID[7:0]
SN[7:0]
SN[15:8]
SN[23:16]
SN[31:24]
X0[7:0]
X1[15:8]
Y0[7:0]
Y1[15:8]
TEMP[7:0]
TEMP[11:8]
Reserved[7:0]
Reserved[7:0]
0
0
Measurement TSM
0
LPF[2:0]
0
0
Sync[1:0]
Rev. A | Page 16 of 19
Reset
10101101
00011101
10010010
00001001
SN[7:0]
SN[15:8]
SN[23:16]
SN[31:24]
00000000
00000000
00000000
00000000
00000000
00000000
00000000
00000011
00000000
00000000
00000000
R/W
R
R
R
R
R
R
R
R
R
R
R
R
R
R
R
R
R/W
R/W
R/W
Data Sheet
ADXRS290
REGISTER DESCRIPTIONS
This section describes the functions of the ADXRS290 registers.
The ADXRS290 powers up with default register values as shown
in the reset column of Table 8.
TEMPERATURE DATA
Bit 6
0
Bit 5
1
Bit 4
0
Bit 3
1
Bit 2
1
Bit 1
0
Bit 0
1
Bit 1
0
Bit 0
1
MEMS IDENTIFIER
Table 10. Register 0x01, MEMS_ID (Read Only)
Bit 7
0
Bit 6
0
Bit 5
0
Bit 4
1
Bit 3
1
Bit 2
1
DEVICE IDENTIFIER
Bit 5
0
Bit 5
0
Bit 4
0
Bit 3
0
Bit 2
0
Bit 1
Measurement
Bit 0
TSM
TSM Bit
POWER CONTROL
Bit 7
0
Bit 7
1
Bit 4
1
Bit 3
0
Bit 2
0
Bit 1
1
Bit 0
0
The TSM bit controls the temperature sensor. The default value
of this bit is 0 (temperature sensor off) and setting this bit to 1
enables the temperature sensor.
Measurement Bit
Bit 6
0
Bit 5
0
Bit 4
0
Bit 3
1
Bit 2
0
Bit 1
0
Bit 0
1
BAND-PASS FILTER
Table 14. Register 0x11, Filter (Read/Write)
Bit 7
Bit 6 Bit 5
HPF[3:0]
Bit 4
Bit 3
0
Bit 2
Bit 1 Bit 0
LPF[2:0]
LPF Bits
The three LPF bits define the low-pass filter pole (see Table 5).
HPF Bits
These four bytes (Register 0x08 to Register 0x0B) hold the rate
output data for each axis. Register 0x08 and Register 0x09 hold
the output data for the x-axis, and Register 0x0A and Register 0x0B
hold the output data for the y-axis. The output data is written in
twos complement. In each two byte set, DATAx0 is the least
significant byte, and DATAx1 is the most significant byte, where
x represents the x-axis or the y-axis. To prevent a change in data
between reads of the sequential registers, perform a multiple
byte read of all rate output data registers.
DATA READY
The four HPF bits define the high-pass filter pole (see Table 6).
Bit 6
0
Bit 5
0
Bit 4
0
Bit 3
0
Bit 2
0
Bit 1
Bit 0
Sync[1:0]
Sync Bits
Set the sync bits to 01 to generate a data ready interrupt at the
SYNC/ASEL pin when new data becomes available.
Table 16. SYNC Pin Functions
Bit 1
X
0
Rev. A | Page 17 of 19
Bit 0
0
1
Description
Read for analog enable
Data ready out, high until read
ADXRS290
Data Sheet
tP
TP
tL
TSMAX
TSMIN
tS
RAMP-DOWN
PREHEAT
12636-036
TEMPERATURE
RAMP-UP
TL
t25C TO PEAK
TIME
Sn63/Pb37
3C/sec maximum
Condition
Pb-Free
3C/sec maximum
100C
150C
60 seconds to 120 seconds
3C/second maximum
183C
60 seconds to 150 seconds
240 + 0/5C
10 seconds to 30 seconds
6C/sec maximum
6 minutes maximum
150C
200C
60 seconds to 180 seconds
3C/second maximum
217C
60 seconds to 150 seconds
260 + 0/5C
20 seconds to 40 seconds
6C/sec maximum
8 minutes maximum
0.25mm
TYP
4.00mm
5.66mm
0.40mm
TYP
4.35mm
12636-037
0.60mm TYP
Rev. A | Page 18 of 19
Data Sheet
ADXRS290
OUTLINE DIMENSIONS
5.90
5.80
5.70
R 0.15
REF
5.36 REF
0.35 REF
PIN 1 LAND
CORNER
4.60
4.50
4.40
4.06
REF
PIN 1 LAND
INDICATOR
1.03
BSC
0.45 0.30
(PINS 6-9, 15-18)
VENT HOLE
0.095 REF
1
18
0.35
REF
0.65
BSC
15
14
BOTTOM VIEW
TOP VIEW
0.30 0.45
(PINS 1-5, 10-14)
1.30
1.20
1.10
SIDE VIEW
10
1.28
REF
1.60 REF
0.65 BSC
04-26-2012-A
R 0.68
REF
0.70
BSC
0.24 REF
Figure 36. 18-Terminal Chip Array Small Outline No Lead Cavity [LGA_CAV]
5.80 mm 4.50 mm Body
(CE-18-2)
Dimensions shown in millimeters
ORDERING GUIDE
Model1
ADXRS290BCEZ
ADXRS290BCEZ-RL
ADXRS290BCEZ-RL7
EVAL-ADXRS290Z
EVAL-ADXRS290Z-M
EVAL-ADXRS290Z-S
EVAL-ADXRS290Z-M2
EVAL-ADXRS290Z-S2
1
Temperature Range
25C to +85C
25C to +85C
25C to +85C
Package Description
18-Terminal Chip Array Small Outline No Lead Cavity [LGA_CAV]
18-Terminal Chip Array Small Outline No Lead Cavity [LGA_CAV]
18-Terminal Chip Array Small Outline No Lead Cavity [LGA_CAV]
Breakout Evaluation Board
Analog Devices Inertial Sensor Evaluation System, which includes a
socket version of the satellite (ADXRS290-S) board
ADXRS290 Satellite, Standalone Socket Version
Analog Devices Inertial Sensor Evaluation System, which includes a
soldered version of the satellite (ADXRS290-S2) board
ADXRS290 Satellite, Standalone Soldered Version
Rev. A | Page 19 of 19
Package Option
CE-18-2
CE-18-2
CE-18-2