Validation for Polysilicon Deposition Reactors

Validation of Barracuda Model with

Experimental Data from JPL
In the 1980s, a significant amount of
research into silane deposition was
conducted at the Jet Propulsion
Laboratory. Experimental data from the
operation of a 6 diameter fluidized bed
reactor was reported by Hsu et al. (1984,
1986, 1987), Lutwack (1986), and Rohatgi
(1986). The reactor consisted of an
externally heated reaction zone (6
diameter, 48 tall), a disengagement zone
(24 diameter, 24 tall), and a cooled inlet
zone. This is illustrated below. For the
reported experimental results, a mesh
distributor was used. In this work, the seed
particle feed and product withdrawal
systems were not considered.

At initial condition for simulation

At quasi-steady state conditions (time-averaged)

Silane Deposition Reactor

www.cpfd-software.com

Solutions for Fluidization Process Design & Optimization

Validation for Polysilicon Deposition Reactors

The Barracuda model was validated by comparing with the experimental results.
For all experimental runs, the reactor was operated under the follow conditions:
Pressure at the top of the reactor - 5 psig
Reactor bed temperature - 650 C
Inlet gas flow rate - 3 mol/min ( u / umf 5)
Hydrogen makeup gas
For each experimental case, the Barracuda model was simulated from an unfluidized state containing only hydrogen gas until
the time when a steady-state output of silicon fines from the top of the reactor was reached.

#
1
2
3
4

SiH4
Feed
(vol%)
20%
50%
57%
80%

Avg. Particle
Diameter (um)
Initial
Final
227
235.5
268
297.6
236
251.9
212
241.5

Deposition Reactor
Rate
Fines
(kg/hr)
(%)
1.0
3.9%
2.4
3.0
9.4%
3.5
11.1%

Experimental results from 6" reactor (Hsu et al. 1984; 1986; 1987; Rohatgi, 1986).

www.cpfd-software.com

Solutions for Fluidization Process Design & Optimization

Validation for Polysilicon Deposition Reactors

Comparison of Deposition Rates and Fines Production
For each simulation run, the flow rate and composition of gas entering and leaving the reactors were tracked. From this
information, a deposition rate of silicon within the bed and the amount of silicon leaving the reactor as fines are calculated.
The Barracuda model matches very closely with the experimental data reported from the research conducted at JPL.

Deposition rate of silicon inside reactor

www.cpfd-software.com

Fines production within reactor

Solutions for Fluidization Process Design & Optimization

Some Potential Applications in Polysilicon FBRs

1. Optimized temperature distribution for increased selectivity
in hydrochlorinators
2. Ensuring proper mixing / avoid stagnant zones
3. Elimination of hot spots
4. Suppression of deposition on walls & nozzles
5. Reduce potential for plugging at injection & withdrawl
6. Design for controlled segregation
7. More effective fines recycling (self-seeding)
www.cpfd-software.com

Solutions for Fluidization Process Design & Optimization