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4 authors, including:
Lz Tong
Keisoku Engineering System Co., Ltd.
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Introduction
Computer modelling of electroplating processes has
proved valuable as an experimental tool for the purpose
of understanding the way in which the plating bath
conditions control the characteristics of deposits produced. Since the current density at the cathode surface
controls the distribution of coating thickness, the
calculation of current density has been widely used for
designing electroplating cells.15 It is known that at
currents much below the limiting current, the solution of
the current density can be regarded as the potential theory
problem, i.e. the current distribution is determined by the
ohmic potential drop in the solution and the electrode
overpotential, termed as secondary current distribution,
in which the current distribution determined only by the
ohmic potential drop in the solution is termed as primary
current distribution. However, in the cases close to the
limiting current, diffusion and convective transport
become essential,3 which was termed as the tertiary
current problem by Averill and Mahmood.4,5 Thus, the
solution for the tertiary current distribution is required to
calculate the electric field and the mass transfer of
electroactive species over the cathode surface together.
Since fluid flows under real situations are quite complex,
e.g. involving turbulent flows, the solution of the tertiary
current distribution becomes difficult. Averill and
Mahmood4,5 have indicated that the concentration overpotential at a macroscale could replace the solution of
mass transfer of electroactive species over microscales.
Also, the concentration overpotential is known to vary
with the prevailing hydrodynamic conditions. It is thus
essential to recognise the hydrodynamic properties in
electroplating cells.
Agitation has been recognised as a necessary parameter for electroplating. Agitation is by far the most
Central Research Laboratory, C. Uyemura & Co., Ltd, 1 5 1 Deguchi,
Hirakata, Osaka 573 0065, Japan
*Corresponding author, email lizhu-tong@uyemura.co.jp
Experimental
The experimental configuration of a velocity measurement cell is shown in Fig. 1. An eductor is set at the
bottom of the measurement cell. A velocity sensor is
arranged at the horizontal plane of L510 mm and
50 mm apart from the outlet of the eductor and moved
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1 Experimental
cell
conguration
of
velocity
measurement
3 Computational mesh of velocity measurement cell
Simulation method
In this work, a three-dimensional (3D) CFD modelling
for incompressible stationary fluid flow is made, in
which a realisable k2e turbulent model11 validated for a
wide range of flows is used. The governing equations of
fluid flows are described as11,12
The conservation equation of mass
L
rui ~0
Lxi
where
{rui uj ~mt
Lui Luj
2
{ rkdij ,
z
3
Lxj Lxi
ut Le
z
mz
se Lxj
rC1 Se{rC2
e2
kzve1=2
(4)
(1)
(2)
4 Conguration
Ucon-Jr
2 Image of eductor
186
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of
tank
of
an
electroplating
system:
Tong et al.
g
k
other parameters are C1 ~ max 0:43,
, g~S ,
gz5
e
C251?9, sk51?0, and se51?2.
In this work, equations (1)(4) of fluid flow modelling
are solved using the finite volume method and the
pressure implicit with splitting of operators/semi-implicit
method for pressure linked equations corrected Patankar
algorithm.11 The calculation is realised at a 3D space
dimension and the modelling is described as follows.
The calculation is first carried out in the velocity
measurement cell shown in Fig. 1 to verify the computational scheme, e.g. the chosen turbulent model and the
assigned boundary conditions. In order to save the
computational time, a quarter of the measurement cell is
considered as the solved region. In the measurement cell,
the liquid surface is a free interface because air which
contacts liquid can move so that the problem becomes
biphasic, and then more difficult. In the present work
only the liquid phase flow is calculated by supposing
that at the interface the wall shear stress is null.13 The
complicated biphasic flow calculation is not involved.
Figure 3 shows the computational mesh. The numbers
of mesh cells and nodes are 236 623 and 52 042. In order
to improve the computational accuracy around the inlet
and outlet of the eductor, a dense division of mesh is
made in the region. The computational time is 2?5 h.
The calculation is performed at a high performance
computing workstation 5000-XW216T with two CPUs
of Xeon 2?33 GHz and 4 MB L2Cache.
A vertically and continuously transporting type
copper electroplating system, Ucon-Jr,9 is used for
studying the behaviour of fluid flows agitated by
eductors in electroplating processes. The tank of the
system is shown in Fig. 4, in which the PCB is vertically
set as a cathode in the middle of the tank. The eductors
and anodes are symmetrically arranged on the both sides
of the PCB. The shields for cathode and anodes are
arranged at the upper and lower locations of the tank.
The corresponding calculating model is shown in Fig. 5,
in which half of the tank, divided by the PCB, is
considered as the solved region and seven eductors set
Table 1 Conditions of experimental and calculation
Experimental
Calculation
10 mm/50 mm
10 mm/50 mm
50
4.125
9.726
50
4
9.431
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(a)
(b)
21
21
(a)
(b)
a distribution between lower cathode shield and middle of the lower two central eductors; b distribution between upper
central eductor and liquid surface
8 Distribution of uid ow in y direction corresponding to Fig. 7b, where solid line is at PCB centre and dot line is at
eductors neighbouring to PCB centre
A
C
B
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(a)
(b)
(c)
(d)
a low flow velocity at a590u; b low flow velocity at a565u; c flow velocity at location of 2 mm apart from PCB at
a590u; d flow velocity at location of 2 mm apart from PCB at a565u
11 Distribution of uid ows in electroplating tank at different angle a (unit of ow velocity: m s21)
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Conclusions
References
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