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3D modeling
Particle simulation
TCAD simulation
Integrative framework
Process
Rule
Gds2mesh
Gseat/VisualParticle
Genius/VisualTCAD
RunSEU
Mask Layout
Gds2mesh
3D TCAD Model
Gseat/
VisualParticle
Particle Sample
TCAD
Simulation
TCAD
Simulation
...
Particle
Simulation
...
Particle
Simulation
Particle
Simulation
Genius/
VisualTCAD
TCAD
Simulation
RunSEU
Statistical
Analysis
Flipped
Not flipping
Solutions
Other
TCAD-based
Other
Spice-based
1 30
16
< 500
< 50
> 1,000
> 1,000
>1,000,000
Radiation source
Ion/Proton/Neutron/E
lectron/Photon
Ion
~ 30 mins
~ 30 mins
< 1 min
Suitable application
TID
> 10,000
< 100
> 10,000
100
10
NAND2
Inverter
SRAM
1000
nMOS
MUX2
Latch
10000
D-FF
100000
Traditional
Power (Traditional)
Fast
Power (Fast)
Other TCAD tools
0.1
10
100
1000
Substrate
Metal interconnects
Heavy-ion (left)
Proton/Neutron (right)
Electron
LET
(MeV/cm2/mg)
C6+
80
1.73
F8+
104
4.33
Si10+
126
9.6
Cl11+
138
13.6
Cu13+
161
33.4
12
19
28
35
63
10
HM62V8100 SRAM SEU cross-section
1
/bit (cm2)
Ion
0.1
Experiment
Simulation
0.01
0
10
15
20
25
LET (MeV/cm2/mg)
30
35
40
Subset 1:
Sensitive volumes
Critical charge
Example (left)
Less variance
Flipped
Not flipped, color indicates
affinity to flip
System Requirement
- Redhat Enterprise Linux RHEL 5.x/6.x, 64-bit
- Ubuntu Linux 12.04 LTS, 64-bit
- Microsoft Windows XP/7/2008, 64bit
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