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Lecture 22
VG
+
metal
oxide
semiconductor
EE143 F2010
Lecture 22
1) Reading Assignment
Streetman: Section of Streetman Chap 8 on MOS
EE143 F2010
Lecture 22
SEMICONDUCTOR
Eo
Work function
= q
Ef
Vacuum
energy level
Ef
Eo
EC
EV
qM is determined
qS is determined
EE143 F2010
Lecture 22
Eo
Eo
Eo
qM
qM
q = 4.15eV
q = 4.15eV
EC
EC
Ef
0.56eV
0.56eV
qM
Ef
Examples:
Al = 4.1 eV
TiSi2 = 4.6 eV
Ei
Ei
0.56eV
EV
n+ poly-Si
(Ef = EC)
Professor N Cheung, U.C. Berkeley
0.56eV
Ef
EV
p+ poly-Si
(Ef = EV)
EE143 F2010
Lecture 22
Eo
kT N B
ln
q
ni
Eo
qs
Ef
Ei
q = 4.15eV
EC
0.56eV
|qF|
qs
Ei
Ef
0.56eV
q = 4.15eV
EC
0.56eV
|qF|
0.56eV
EV
n-type Si
EV
p-type Si
s (volts) = 4.15 +0.56 + |F|
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EE143 F2010
Lecture 22
xox
metal
oxide
VFB
+
_
+
_
semiconductor
ox
C ox
xox
EE143 F2010
Lecture 22
VFB M S
Gate work function M:
Al: 4.1 V; n+ poly-Si: 4.15 V; p+ poly-Si: 5.27 V
EE143 F2010
Lecture 22
Si (p-Si)
holes
Charge Distribution
EE143 F2010
Lecture 22
VSi = Vox = 0
M
S (p-Si)
Charge Distribution
EE143 F2010
Lecture 22
Depletion
Layer
xd
thickness
2Si VSi
qN B
S (p-Si)
xd
qNB
VG VFB
qN Bx d qN Bx d
Cox
2s
Vox
VSi
Depletion layer
EE143 F2010
Lecture 22
(x)
Q'
Oxide
Semiconductor
x=xo + x
d
x
M etal
(x)
Q'
Oxide
Semiconductor
x=0
E(x)
Metal
Oxide Semiconductor
Metal
E (x)
Oxide
x=xo
x=xo
x=0
Semiconductor
Metal
x
x=x + x
o d
x=xo + x
d
x=0
- Q'
x=xo
Semiconductor
x=xo + x
d x
Oxide
x=0
M etal
x=0
x=x
E(x)
Oxide
x=xo
Semiconductor
x
x=x + x
o d
x=0
x=x
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EE143 F2010
Lecture 22
This is a definition
for onset of
strong inversion
S (p-Si)
xdmax
qNB
Qn
VG VT VFB
Professor N Cheung, U.C. Berkeley
2 s ( 2 F )qN B
C ox
2 F
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EE143 F2010
Lecture 22
xd max
4 Si F
qN B
when VG> VT
S (p-Si)
xdmax
Vox
qN B xd max Qn
C ox
Qn C ox (VG VT )
Professor N Cheung, U.C. Berkeley
qNa
Qn
electrons
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EE143 F2010
Lecture 22
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EE143 F2010
Lecture 22
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EE143 F2010
Lecture 22
p-Si
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EE143 F2010
Lecture 22
Vox = Qa/Cox
VSi ~ 0
Vox =qNaxd/Cox
Depletion
VSi = qNaxd2/(2s)
Vox = [qNaxdmax+Qn]/Cox
Inversion
VSi = qNaxdmax2/(2s)
= 2|F|
* For simplicity, dielectric constants assumed to be same for oxide and Si in E-field sketches
Professor N Cheung, U.C. Berkeley
17
EE143 F2010
Lecture 22
Suggested Exercise
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EE143 F2010
Lecture 22
strong inversion
(electrons)
depletion
VFB
VT
VG
(more
positive)
Strong inversion
(holes)
VT
Accumulation
(electrons)
depletion
VFB
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EE143 F2010
Lecture 22
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EE143 F2010
Lecture 22
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EE143 F2010
Lecture 22
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EE143 F2010
Lecture 22
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EE143 F2010
Lecture 22
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EE143 F2010
Lecture 22
C-V Characteristic
C/Cox
C/Cox
e
b
p-type
substrate
a
b
VG
VT
n-type
substrate
VG
VT
a) accumulation: Cox
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EE143 F2010
Lecture 22
All frequencies
Accumulation
C = Cox
Depletion
All frequencies
Q
Q
Inversion
Low frequency
C = Cox
Professor N Cheung, U.C. Berkeley
High frequency
1/C = 1/Cox + xdmax/s
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EE143 F2010
Lecture 22
inversion
electrons
M
O
depletion
region
n+
n+
p-Si
VB
VG VB VFB
Vox VSi
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EE143 F2010
Lecture 22
Si
Ei
Efs
qp
q(VC-VB)
qp
Efn
1 qN a X
VSi
2
s
d max
VSi 2 p VC VB
2
qN a X d max 1 qN a X d max
VG VB VFB
C OX
2
s
Professor N Cheung, U.C. Berkeley
28
EE143 F2010
Lecture 22
At threshold: VG VB = VFB+Vox+VSi
But VSi = 2|p| + (VC - VB ) =>
xdmax is different from no-bias case
2 SiVSi
xd max
qN B
VT -VB = VFB +
2sqNB(2|F| + VC-VB)
+ 2|F| + VC - VB
Cox
Vox
Professor N Cheung, U.C. Berkeley
VSi
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EE143 F2010
Lecture 22
1 x ox ( x)
VFB M S
dx
Qf
ox (x)
Qf
O
x=0
x = xox
EE143 F2010
Lecture 22
Qi
VT
COX
Shallow implanted
Qi = q implant dose in Si
Nsub
interface (approximated as
a delta function)
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EE143 F2010
Lecture 22
SiO2
p-Si
xdmax
Na
p-Si
Qd
Qn
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EE143 F2010
Lecture 22
6 OX & Q f
n+
Qn
Na
xox
n+
VC
5
3
4 VB
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EE143 F2010
Lecture 22
M increases
|VCB| increases
B threshold implant
Xox increases
Xox increases
As or P threshold implant
+ Qf or Qox
Professor N Cheung, U.C. Berkeley
|VCB| increases
M decreases
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EE143 F2010
Lecture 22
2sqNB(2|F|)
Qi
+ 2|F| Cox
Cox
2sqNB(2|F| + |VC-VB|)
Qi
VT = VFB +
+ 2|F| + VC Cox
Cox
Note 1: At the onset of strong inversion, inversion charge is negligible
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EE143 F2010
Lecture 22
2sqNB(2|F|)
Qi
- 2|F| Cox
Cox
2sqNB(2|F| + |VC-VB|)
Qi
- 2|F| + VC Cox
Cox
* Yes, + sign for VC term but VC (<0) is a negative bias for PMOS because the
inversion holes have to be negatively biased with respect to the n-substrate
to create a reverse biased pn junction.
Professor N Cheung, U.C. Berkeley
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