Precision Engineering 33 (2009) 160166

Contents lists available at ScienceDirect

Precision Engineering
journal homepage: www.elsevier.com/locate/precision

A exure-based mechanism and control methodology for ultra-precision

turning operation
Y. Tian a,b, , B. Shirinzadeh a , D. Zhang b
a
b

Robotics and Mechatronics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash University, Clayton, VIC 3800, Australia
School of Mechanical Engineering, Tianjin University, Tianjin 300072, China

a r t i c l e

i n f o

Article history:
Received 8 January 2008
Received in revised form 22 April 2008
Accepted 9 May 2008
Available online 3 June 2008
Keywords:
Flexure-based mechanism
Piezoelectric actuator
Ultra-precision turning

a b s t r a c t
This paper presents the methodology for modeling and control of a high precision exure-based mechanism for ultra-precision turning operation. A high performance piezoelectric actuator is used to driven
the exure-based mechanism. A parallel exure hinge mechanism is utilized to guide the moving platform and to preload the piezoelectric actuator. A high resolution capacitive sensor is used to measure the
displacement of the exure-based mechanism for closed-loop control. With consideration of the driving
circuit, the dynamic model of the exure-based mechanism has been established. The effect of the driving
circuit on the dynamic response of the precision mechanism is investigated. Experimental tests have been
carried out to verify the established model and the performance of the exure-based mechanism.
2008 Elsevier Inc. All rights reserved.

1. Introduction
The mechanical machining techniques such as cutting, milling,
grinding, deburring, and fettling are categorized as material
removal processes [1]. These processes follow the relationship for
material removal as a function of cutting speed, cutting width,
cutting depth, and feed rate of cutter position [2]. Ultra-precision
turning operation is one of the efcient machining processes for
producing precision surfaces on at or cylindrical workpiece, where
the cutter tip position relative to the workpiece must be accurately controlled in order to achieve the desired surface prole
and nish [3,4]. Due to the characteristics of the infeed mechanism such as backlash, friction, and large inertia, it is difcult for
conventional lathe to implement nanometer level machining. In
order to overcome this problem, an auxiliary precision mechanism
is proposed and utilized on the turret of the conventional lathe
to implement nanometer level infeed. Combined with the infeed
mechanism of the conventional lathe, this dual type infeed system can guarantee the positioning precision of the cutter, and thus
the machining accuracy for the ultra-precision turning operation
can be achieved [57]. Parallel mechanisms are capable of much
high accuracy, rigidity, and stiffness [8], and in particular the piezoelectric driven exure-based parallel mechanisms have additional
advantages including no backlash, negligible friction, no lubrication, and free of thermal heat generation [9,10]. In addition, such a

Corresponding author. Tel.: +61 3 9905 3510; fax: +61 3 9905 1285.
E-mail address: yanling.tian@eng.monash.edu.au (Y. Tian).
0141-6359/$ see front matter 2008 Elsevier Inc. All rights reserved.
doi:10.1016/j.precisioneng.2008.05.001

exure-based positioning mechanism can be monolithically manufactured to reduce assembly errors and guarantee the machining
accuracy. According to the applied voltage, piezoelectric actuator
can generate continuous expansion or retraction motion with innite resolution, zero backlash, and wide dynamic response range
[11,12]. Thus, exure-based mechanisms driven by piezoelectric
actuators represent the best choice for the secondary infeed system
for ultra-precision turning operation.
Various exure-based mechanisms for ultra-precision turning
operation have been developed in the past. Patterson and Magrab
[13] developed a exure-based mechanism to improve the resolution and accuracy of a precision lathe. In this approach, a diaphragm
exure hinge and piezoelectric actuator was used to achieve high
static and dynamic repeatability. The exure-based mechanism
has a closed-loop bandwidth of 660 Hz, and a maximum displacement of 2.5 m. Okazaki [14] presented a exure-based mechanism
using a piezoelectric actuator. The exure-based mechanism was
designed by using a wire-cut parallel spring mechanism, a piezoelectric stack actuator, and a capacitive gauge. Kim and Kim [15]
developed a piezoelectric actuator to mount on a conventional lathe
in order to control the depth of cut precisely and compensate for
the waviness on the surface of the workpiece. Such waviness can
be detected using surface roughness parameter measurement [16].
Rasmussen et al. [17] developed a piezoelectric actuated cutting
tool with a maximum travel stroke of 50 m and a bandwidth of
200 Hz. Altintas and Woronko [18] designed a exure-based mechanism for precision turning of cylindrical shafts. In this system,
exure hinge acts as a parallel spring to the piezoelectric actuator
leading to a total stiffness of 473 N/m. The exure-based mech-

Y. Tian et al. / Precision Engineering 33 (2009) 160166

anism was capable of generating a maximum displacement up to

36 m due to losses from the exure stiffness. Cuttino et al. [19]
described a exure-based mechanism of 100 m and 250 Hz bandwidth. A long stack piezoelectric actuator is used to achieve the
desired working range against the preload. Bellville springs were
included in series to minimize the effects of thermal expansion.
This paper presents the methodology for modeling and control
of a exure-based precision mechanism used for ultra-precision
manufacturing operations. The piezoelectric actuator is naturally adopted to improve the static and dynamic performance
of the exure-based mechanism. The parallel exure hinge is
optimized with consideration to improve the positioning accuracy of the mechanism. A precision capacitive sensor is used to
form a closed-loop control, and thus through the control method
eliminate the nonlinear characteristics such as hysteresis and
creep. Considering the driving circuit effect, the dynamic model
of the exure-based mechanism is developed. Experiments are
carried out to verify the developed models and establish the
performance capability of the developed exure-based mechanism.
2. Design of the exure-based mechanism
Fig. 1 shows a photo and schematic diagram of the exure-based
mechanism. A piezoelectric actuator is secured to the base and
located against the moving platform through a ball. A high precision capacitive sensor is used to measure the actual displacement

Fig. 1. Developed exure-based mechanism.

161

of the moving platform for closed-loop displacement feedback control [20]. This sensor is a parallel plate device held on bracket
between the platform and the base. The platform can traverse forward and backward on a parallel exure mechanism according to
digital command signal. Further, the platform is located such that
it also preloads the piezoelectric actuator [21,22]. A piezoelectric
amplier controlled by a digital computer is used to supply control
voltage for the expansion and retraction of the piezoelectric actuator. Such piezoelectric actuators suffer from hysteresis effect, and
this is overcome by using closed-loop control [23], which can also
allow compensation for parasitic error motion in the exure guide.
The online real time compensation method is used to adjust the
position of the moving platform, and thus improving the motion
and position accuracy and resolution.
The moving platform is connected to the base through two
sets of parallel circular notch exure hinges. The hinges provide both a lateral stiffness guidance mechanism for the moving
platform and a spring preload for the piezoelectric actuator. In
the manufacture process, the geometric and dimensional tolerances of the parallel exure hinges are exactly controlled. Placing
shims of suitable thickness behind the actuator sets the preload
on piezoelectric actuator. This method trades off extra assembly effort against the cost savings and stability improvement for
avoiding positioning adjuster mechanism. Due to the characteristics including brittleness of such stacked actuator, the piezoelectric
actuator can withstand against large compressive force, but it is
generally weak against shear force. Therefore, the actuator cannot provide lateral stiffness and is liable to damage from lateral
force. To overcome this characteristic for piezoelectric actuator,
a ball is added between the moving platform and the piezoelectric actuator, and thus the preload is necessary to maintain the
required contact condition. The magnitude of preload is adjusted
through the shim between the base and the piezoelectric actuator.
The piezoelectric actuator can generate a displacement of up to
15 m, has an axial stiffness of 98 N/m and can deliver a maximum driving force of 1000 N. The high precision capacitive sensor
has a resolution of 3.3 nm over a measuring range of 60 m with a
bandwidth of 07.5 kHz. The piezoelectric amplier module has a
nominal amplication factor 10 0.1 and can output and sink a peak
current of 2000 mA and an average current of 300 mA, respectively.
A digital computer is used to implement the numerical control, user
interface and supervisory control operations. Through a 16 bits D/A
converter and the driving amplier, the control voltage is supplied
to the piezoelectric actuator. A 16 bits A/D converter is also used to
collect the displacement signal of the moving platform measured
by the capacitive sensor.
The dimensions of the notch in exure hinges and their positions
greatly inuence the characteristics of the piezoelectric driven precision mechanism, especially its working range, the effectiveness of
the preload and the ease of assembly [24]. A high stiffness preload
mechanism reduces the actual working range of the exure-based
mechanism while increasing the driving force, and thus the deformation of the moving platform will be larger under the same output
displacement. On the other hand, if the stiffness is too low, it
can affect the contact conditions between the ball and the moving platform, to the detriment of accuracy and working range.
The exure hinge mechanism is kinematically over-constrained,
the actual stiffness of each exure hinge cannot be calculated by
the formulation given by Paros and Weisbord [25]. Hence, the
hinges were designed using nite element analysis to provide
suitable preload and minimal bending deformation of the moving platform. Fig. 2 illustrates the mechanical characteristics of
the exure hinge obtained from the ANSYS nite element analysis (FEA), theoretical calculations, and experimental tests. The

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Y. Tian et al. / Precision Engineering 33 (2009) 160166

Fig. 3. Dynamic model of the exure-based mechanism.

3. Dynamic modeling of the exure-based mechanism

From an electrical circuit point of view, the piezoelectric actuator can be considered as a capacitive component with a capacitance
C. Meanwhile, from the dynamic point of view, the actuator can be
equivalent as a damped mass-spring system with a damping coefcient cpzt . With consideration of the mass of the moving platform
and the exure hinges, the dynamic model of the exure-based
mechanism can be obtained, as shown in Fig. 3, where R is the
equivalent resistance of driving circuit, Fpzt is the driving force of the
piezoelectric actuator, kamp is the amplier constant for the piezoelectric actuator, ms is the equivalent mass of the moving parts,
cfh is the equivalent damping coefcient of the exure hinges, kpzt
is the equivalent stiffness of the piezoelectric actuator, kfh is the
equivalent stiffness of the exure hinges.
Based on Kirchhoffs voltage law, the governing equation of the
driving circuit can be written as follows:
RC v pzt (t) + vpzt (t) = kamp vd (t)

Fig. 2. Mechanical characteristic of the exure hinge.

(1)

where kamp is the amplier constant for the piezoelectric actuator,

vpzt (t) is the actual voltage applied to the piezoelectric actuator,
vd (t) is the control voltage to the driving amplier, RC is the time
constant of the driving circuit.
According to Eq. (1), if the control voltage vd (t) is a step signal
v0 , the actual voltage applied to the piezoelectric actuator is given
as follows:
vpzt (t) = kamp v0 (1 et/RC )

displacement of the exure hinge is proportional to the driving

force up to 280 N, and the maximum stress of 52 MPa is still less
than the yield limit of the material. The stiffness based on FEA is
lower than the analytical value and higher than the experimental result. With consideration of the preload, the actual driving
force is less than 230 N, thus the long-term linearity and repeatability of the exure-based mechanism will be guaranteed. For the
best compromise between contact stiffness and working range of
the exure-based mechanism, the stiffness of the overall preload
mechanism was chosen as approximate 13.1 N/m. The material
of the exure hinges is spring steel 65 Mn, and each notch has a
radius of 5 mm, a minimum thickness of 1.5 mm and a width of
40 mm. The distance between two exure hinges on the same link
of the parallelogram is 20 mm. The nominal preload is chosen as
100 N.
In order to achieve a high dynamic frequency for the exurebased mechanism, the mass of moving platform is reduced to a
minimum level. However, the reduction in the thickness (and mass)
must not signicantly affect the stiffness of the platform, and the
deformation induced by the driving and cutting forces must be
restricted to an acceptable level.

(2)

Based on the Newtons second law of motion, the differential

equation of dynamic motion for the exure-based mechanism is
given as follows:

+ (kpzt + kfh )x(t) = nd33 kpzt vpzt (t)

ms x (t) + (cpzt + cfh )x(t)

(3)

where x(t) is the displacement of the moving platform of the

exure-based mechanism, ms is the equivalent mass of the moving
parts, cpzt is the equivalent damping coefcient of the piezoelectric
actuator, cfh is the equivalent damping coefcient of the exure
hinges, kpzt is the equivalent stiffness of the piezoelectric actuator,
kfh is the equivalent stiffness of the exure hinges, n is the number
of layer in the piezoelectric actuator, and d33 is the piezoelectric
constant.
Substituting Eq. (2) into Eq. (3), the following equation can be
obtained:

+ n2 x(t) = A(1 et/RC )

x (t) + 2n x(t)

(4)

where  is the damping ratio, n is the natural frequency, and

2n =

cpzt + cfh
,
ms

n2 =

kpzt + kfh
,
ms

A=

1
nd33 kamp kpzt
ms

Y. Tian et al. / Precision Engineering 33 (2009) 160166

In order to solve the above equation, the Laplace transform is

used to transform x(t) to X(s), where s = j, as the following:

L(x(t) + 2n x(t)

+ n2 x(t)) = L(A(1 et/RC ))

(5)

where L represents the Laplace transform.

Eq. (5) may be rearranged and simplied to obtain the following
relationship:
X(s) =

A
(s2 + 2n s + n2 )s

A
(s2 + 2n s + n2 )(s + 1/RC)

A
(s2 + 2n s + n2 )s

A(Ms + N)
(s2 + 2n s + n2 )

A
(s + 1/RC)

x(t) =

n2

en t

1 2

sin n

1 2 t

+


en t
+MA 
sin n 1  2 t 
1 2


NA en t
sin n 1  2 t

n
1 2

where

 = arctan
N=

1 2


G=

(7)

GAet/RC

RC
2n n2 RC 1/RC

2RCn 1
2n n2 RC 1/RC

(8)

M = G.

From Eq. (8), it is noted that the rst term represents the
dynamic response to a step command input as if applied directly to
the mass spring system of the exure-based mechanism. The last
three terms represent the effect of the time constant RC in addition to the parameters such as the damping ratio  and the natural
frequency n on the step response of the exure-based mechanism.
Similarly, the step response of the exure-based mechanism
during the retraction process, described as vd (t) = v0 for t = 0 and
vd (t) = 0 for t > 0 s, is given by the following relationship:


en t
x(t) = X0 
sin n 1  2 t + 
1 2



en t
+AM 
sin n 1  2 t 
1 2

AGet/RC

(9)

where X0 is the initial displacement under the control voltage of v0 .

In Eq. (9), the rst term represents a declining oscillation from
the initial displacement X0 . The remaining three terms again represent the effect of inherent parameters of the system on the transient
response of the exure-based mechanism.
4. Experiments and discussion

Based on Eq. (7), the inverse Laplace transform is used to obtain

the step response of the exure-based mechanism and given by:
A


N en t
sin n 1  2 t

n
1 2

(6)

Expanding Eq. (6) into partial fractions provides:

X(s) =

163

The experiments are carried out to verify the developed models and establish the performance measure for the exure-based
mechanism. The schematic diagram of the experimental setup
is shown in Fig. 4. Laser-based-interferometry sensing methodology [26] is chosen for dynamic position measurement. The
methodology and experimental setup provides low measurement
uncertainties and high accuracy and resolution, and are frequently
used for tracking of dynamic systems [27,28]. In this experiment,
a laser-based measurement system with resolution of 1 nm, and
dynamic range of 5 kHz is utilized. To reduce the external disturbance such as vibration, the experiments are carried out on
a vibration-isolated optical table. The environmental noise level
after the vibration isolation is approximately 5 nm. A pushpull
gauge (spring force gauge) is utilized to apply external force on the
moving platform of the exure-based mechanism to determine the
static stiffness of the mechanism. In order to examine the dynamic
characteristics of the exure-based mechanism, a dynamic analyzer is used to perform the modal analysis. Through dynamic
analysis method, the frequency response function of the exurebased mechanism can be developed, and the dynamic parameters
such as natural frequency, damping ratio, and modal shape can be
obtained.
Piezoelectric actuator may be driven using current or voltage.
However, due to the intrinsic friction among the crystals during the
expansion and retraction of the piezoelectric actuator, there exists
hysteresis when the voltage is used as control signal to drive the
exure-based mechanism. This was experimentally veried and the
hysteresis loop of the exure-based mechanism under open loop
control condition is shown in Fig. 5. The lower curve represents the
expansion process and the upper curve represents the retraction
process. When a 5 V control signal is applied to the piezoelectric
actuator, the maximum displacement of the exure-based mechanism is approximately 8.7 m. It is noted that the displacement
curve of the expansion process is different from that of retraction process, this is the hysteresis effect. The maximum difference
approximately reaches 1 m. Under the closed-loop control condi-

Fig. 4. Schematic diagram of the experimental setup.

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Y. Tian et al. / Precision Engineering 33 (2009) 160166

Fig. 6. Resolution of the exure-based mechanism.

Fig. 5. Hysteresis of the exure-based mechanism.

tion, this hysteresis phenomenon can be reduced, and the linearity

of the exure-based mechanism can be improved.
To realize nanometer level positioning, the resolution is one of
the main targets for the design of the exure-based mechanism.
In theory, the piezoelectric driven exure mechanism can reach
high resolutions. However, due to the effects such as environmental disturbance and the quantization error of the D/A converter,
the exure-based mechanism generally has reduced resolution. In
order to examine the resolution of the exure-based mechanism,
a stair control voltage with the height of 8 mV is applied to the
amplier of the piezoelectric actuator, and the displacement of
the exure-based mechanism is recorded by laser-interferometrybased technique. The resolution of the exure-based mechanism
is obtained, as shown in Fig. 6. It can be seen that the resolution
of the exure-based mechanism can reach up to 12 nm. In fact, a
high resolution can be obtained if the environmental noise can be
strictly controlled to a minimum level.
During the ultra-precision turning operation, the overshoot of
the exure-based mechanism for dynamic positioning is undesirable, and will damage the nish surface of the workpiece.
Therefore, the step response of the exure-based mechanism must
be examined carefully to guarantee the dynamic performance for
the precision positioning. The step response of the exure-based
mechanism is shown in Fig. 7. It is noted that the overshoot does not
occur during the motion process. The reason is that the time constant RC of the driving circuit can affect the dynamic performance
of the exure-based mechanism. This indicates that the dynamic
performance of the exure-based mechanism can be improved by

choosing suitable time constant RC of the driving circuit. In other

words, the high order vibration modes can be avoided when the
suitable time constant RC is adopted, and thus the performance of
the exure-based mechanism can be improved. The inuence of the
time constant RC on the dynamic performance of the exure-based
mechanism will be investigated in the following section.
In order to examine the static stiffness of the exure-based
mechanism, a pushpull gauge is used to apply external force with
magnitude of 50 N along the infeed direction and the displacement
of the exure-based mechanism is recorded by laser-based measurement system. Based on the Hooks law, the static stiffness of the
exure-based mechanism can be obtained. The static stiffness of
the exure-based mechanism under open loop condition is approximately 32 N/m. Under closed-loop condition, the static stiffness
is better than 250 N/m.
In order to examine the dynamic performance of the exurebased mechanism, the impact modal testing is carried out. During
the modal analysis, the impact force along infeed direction is
applied to the moving platform of the exure-based mechanism.
The value of the force is measured by a force sensor, and the acceleration of the moving platform due to the impact excitation in the
same direction is obtained by an accelerometer attached to the
moving platform. Using dynamic analysis technique, the frequency
response function of the exure-based mechanism is obtained, as
shown in Fig. 8. From the experimental data, it is noted that the
primary natural frequency can reach up to 1122 Hz.
To demonstrate the performance of the exure-based mechanism to resist external disturbance, the response of the
exure-based mechanism under closed-loop control condition to

Fig. 7. Step response of the exure-based mechanism.

Y. Tian et al. / Precision Engineering 33 (2009) 160166

165

Fig. 8. Frequency response function of the exure-based mechanism.

the constant force is investigated and shown in Fig. 9. The constant

force with magnitude of 3.5 N is applied, and the displacement of
the moving platform is measured using laser-based measurement
system. It is noted that the output displacement of the exurebased mechanism rapidly converges back to the steady-state value
after such external disturbance acting on the moving platform
along infeed direction.
On the mechanical design side, the mass of the moving parts
for the exure-based mechanism is ms = 0.64 kg, and the stiffness
of the exure hinges used for preload and guide is kfh = 13.1 N/m.
Based on the dynamic analysis, the natural frequency of the exurebased mechanism fn = 1122 Hz, and the damping ratio is estimated
as  = 0.05. According to the data supplied with the piezoelectric
actuator, the piezoelectric constant d33 = 650 1012 m/V. Using
the above experimental parameters and substituting into Eq. (8),
the step response of the exure-based mechanism can be obtained.
Thus, the change of the settling time and the overshoot of the
exure-based mechanism with the time constant RC can also be
obtained, as shown in Fig. 10. It is noted that when the value of
the time constant RC is located in the region I, the overshoot occurs
during the step response, and the settling time of the exure-based
mechanism will reduce with the increment of the time constant
RC. In the region II, the overshoot will also occur, but the settling
time of the exure-based mechanism will increase with the increment of the time constant RC. In the region III, there is no overshoot
occurring, and the settling time of the exure-based mechanism
increases with the increment of the time constant RC.

Fig. 10. The inuence of RC on dynamic performance.

5. Conclusions
Utilizing a piezoelectric actuator and exure hinge guide mechanism, a exure-based mechanism for ultra-precision turning
operation was developed. The resolution of the exure-based
mechanism can reach 12 nm and the natural frequency reaches
1122 Hz.
The dynamic model of the exure-based mechanism was established. The inuence of the time constant RC on the dynamic
performance of the exure-based mechanism was investigated.
From the analysis, it was noted that the time constant RC can change
the dynamic characteristics of the exure-based mechanism, i.e,
the overshoot and the settling time of the exure-based mechanism
will change with various time constant RC values.
Using feedback control method, the dynamic performance of
the exure-based mechanism is improved. Therefore, the hysteresis
phenomenon is reduced, and the linearity of output is increased.
In addition, the static stiffness of the exure-based mechanism can
provide up to 250 N/m.
Acknowledgements

Fig. 9. Response of the exure-based mechanism to constant force disturbance.

This research is supported by the Australian Research Council

(ARC) Discovery (Grant No. DP 0450944, DP 0668052), ARC Linkage
Infrastructure, Equipment and Facilities (Grant No. LE 0347024, LE
0668508), and National Natural Science Foundation of China (Grant
No. 50705064).

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Y. Tian et al. / Precision Engineering 33 (2009) 160166

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