Professional Documents
Culture Documents
IEST
Working Group CC012 (Cleanroom Design), Chairman
Engsysco
Contents
Definition and classifications Standards Nonviable, viable particles (microbiological) and airborne molecular contamination (AMC) Particle sources Airflow quantity and pattern and floor arrangement Airlock and pressurization HVAC, plumbing, fire protection, and process systems Common devices and equipment Architectural construction materials, cleaning procedures, testing standards and construction cost CFD application
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Introduction
Applications
Semiconductor Microelectronic Pharmaceutical Biotechnology University Aerospace Automotive Hospital Miscellaneous
Cleanroom Definition
Definition - A specially constructed enclosed area, its environment has following controlled parameters:
Temperature Airflow Pattern
Pressurization Particle Count Microbial Contamination Electrostatic Discharge (ESD) Gaseous Contamination Process Specific
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Standards
U.S. Federal Standard 209E Airborne particulate cleanliness classes in cleanrooms and clean zones (former US standard, canceled in November 2001)
ISO Document ISO-14644-1 ISO-14644-2 ISO-14644-3 ISO-14644-4 ISO-14644-5 ISO-14644-6 ISO-14644-7 ISO-14644-8 ISO-14698-1 ISO-14698-2 ISO-14698-3
ISO-14644: Cleanrooms and Associated Controlled Environments Classification of Air Cleanliness Cleanroom Testing for Compliance Methods for Evaluating & Measuring Cleanrooms & Associated Controlled Environments Cleanroom Design & Construction Cleanroom Operations Terms, Definitions & Units Enhanced Clean Devices Molecular Contamination Biocontamination: Control General Principles Biocontamination: Evaluation & Interpretation of Data Biocontamination: Methodology for Measuring Efficiency of Cleaning Inert Surfaces
Classifications
Air Cleanliness Class Definition Comparison Between FS 209 and ISO 14644
ISO FS 209 14644 Class Class 1 2 3 4 5 6 7 8 9 0.1 m FS 209 ISO 14644 0.2 m FS 209 ISO 14644 0.3 m FS 209 ISO 14644 0.5 m FS 209 ISO 14644 FS 209 1 m ISO 14644 FS 209 5.0 m ISO 14644
Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 10 2 100 24 10 4 35 1,000 7.5 237 3 102 1 35 8 350 10,000 75 2,370 30 1,020 10 352 83 100,000 750 23,700 300 10,200 100 3,520 832 29 1,000,000 237,000 102,000 1,000 35,200 8,320 7 293 10,000 352,000 83,200 70 2,930 100,000 3,520,000 832,000 700 29,300 35,200,000 8,320,000 293,000
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Classifications
Old Air Cleanliness Class Definition - FS 209
100,000,000
10,000,000
FS-100,000
1,000,000
FS-10,000
100,000
FS-100 FS-1,000
10,000
FS-10
1,000
FS-1
100
10
1 0.01
0.1
10
PARTICLE SIZE, m
Classifications
Air Cleanliness Class Definition - ISO 14644
ISO-9
1,000,000
ISO-8
100,000
ISO-7
10,000
ISO-4
ISO-6
1,000
ISO-3
ISO-5
100
ISO-2
10
ISO-1
1 0.01
0.1
10
PARTICLE SIZE, m
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Classifications
Classification Comparison Between FS 209 and ISO 14644
100,000,000
Air Cleanliness Class Definition Comparison Between FS 209 and ISO 14644
10,000,000
FS-100,000
ISO-9
1,000,000
FS-1,000 FS-10,000
ISO-8
100,000
FS-100 ISO-5
ISO-7
10,000
FS-10 ISO-4
ISO-6
1,000
FS-1 ISO-3
100
ISO-2
10
ISO-1
1 0.01
0.1
10
PARTICLE SIZE, m
Airborne Particles
Airborne particulates can be: 1. 2. 3. Particles larger than 100 microns can be seen with naked eyes. Next step particles ranging from 0.001 to 100 microns are main interest of contamination for years. Atoms and molecules used to be considered too small as industrial contamination, but not any more after introduction of molecular contamination.
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People Work surface shedding Process equipment Internal Raw and semifinished material Liquids, pressurized gases used in process Chemicals used for cleaning Room construction materials
Sterilization Disinfection
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Dilution
Diluting internally contaminated air with clean, filtered air
Isolation
Containing or isolating particle generations with barriers
HEPA
ULPA
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5 48 60 90 150 240 240 480 300 540 360 540 360 600
Airflow Patterns
Mixed Flow
Unidirectional Flow
Mini-Environment Flow
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Ballroom
Cleanrooms
Service Chase
Cleanrooms
R R R R R
Mini-Environment
Cleanrooms
C C C C
Service Area
Visitors Corridor
Waff le Slab
Silencer
Fan T ow er
Process Corridor
Ceili ng + Filter
Maint. Corridor
Raised Floor
Stair Case
Cleanroom
Return Air
Basement
Make-U p Air
Cooling Coil
Pump
P rocess E xhaust
Process Supply Systems
Submai ns
Gas Cabinets
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Cleanroom
Stair Case
4.8m
Basement
Make-Up Air
Gas Cabinets
Submains
Scrubber
AIRFLOW
CORRIDOR
AIRLOCK
AIRLOCK
++
AIRFLOW CLEANROOM
++
AIRFLOW CLEANROOM
+++
CASCADING AIRLOCK
BUBBLE AIRLOCK
Type
Cascading Bubble Sink Dual Compartment
AIRFLOW
CORRIDOR
AIRFLOW
CORRIDOR
AIRLOCK
AIRLOCK
AIRLOCK
-AIRFLOW CLEANROOM
++
--
CLEANROOM
AIRFLOW
SINK AIRLOCK
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Application
Positive or Negative Pressure? Has Fume or Bio Contamination? Containment Needed? Personal Protection Needed?
Prevent cleanroom being contaminated from dirty corridor air Prevent cleanroom being contaminated from surrounding spaces through cracks
Bubble
Prevent cleanroom being contaminated from dirty corridor air Prevent cleanroom fume or bio agent releas ing to corridor
++ +
Sink
Prevent cleanroom being contaminated from dirty corridor air Allow cleanroom fume or bio agent releas ing to airlock. No personal protective equipment is needed
- +
Negative pressure Has toxic fume or hazardous bio agent contamination, or has potent compound substan ces Containment needed Personal protecti needed Notes:
1.
Prevent cleanroom being contaminated from dirty corridor air Prevent cleanroom fume or bio agent releas ing to corridor Personal protective equipment (such as pressurized suit and respirat or) is required
- ++ -
on
2.
EXCESSIVE NEGATIVE P RESSURE IN CLEANROOM IS NOT RECOMMENDED, SINCE IF IT IS NOT S URROUNDED BY OTHER C LEAN SPACES S, UNTREATED DIRTY AIR CAN INFILT RATE THROUGH CRACKS INTO CLEANROO M. COMMONLY A CLEANROOM SERVICE CORRIDOR NEEDS TO BE DESIGNED SLIGHTLY POSITIVE OR NEUTRAL PRESSURE , DO NOT DESIGN IT I N NEGATIVE PRESSURE UNLESS A DU AL-COMPARTMENT LOCK IS UTILIZED.
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380 360 340 320 300 280 260 240 220 200 180 160 140 120 100 80 60 40 20
Entering (SA) airflow rate is higher than leaving (EA + RA) airflow rate in the room, room net (offset) flow is positive. Room depressurization Entering (SA) airflow rate is lower than leaving (EA + RA) airflow rate in the room, room net (offset) flow is negative.
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FS209 Class 1, 10
ISO Class 3, 4
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FILTER
SA
OA+RA
OA Makeup Air Co
Efficiency Ea
SA Supply Air
Space
Particle Generation
FILTER
SA1
SA
OA+RA
OA Makeup Air
Co
Space
Particle Generation
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SA=OA+RA
C C
H C
OA+RA1
OA Makeup Air
Efficiency Eb
Efficiency Ea
RA1
Co
SA Supply Air
Space
Particle Generation
SA
OA+RA
OA Makeup Air Co
Efficiency Eb
Efficiency Ea
SA Supply Air
Space
Particle Generation
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Efficiency Eb
FILTER
SA
OA+RA
OA+RA2
OA Makeup Air Co
Efficiency Ea
RA1
RA2
SA Supply Air
Space
Particle Generation
FILTER
SA
OA Makeup Air Co
Efficiency Eb
Efficiency Ea
Efficiency Ea
RA1
RA2
SA Supply Air
Space
Particle Generation
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Cleanroom Process
Gas detection Static control RO and DI waters Process chilled water Chemical gases and storages Solvent drain and collection Solvent gas exhaust Process vacuum Scrubbed exhaust House vacuum Acid drain and waste neutralization Clean dry air Instrumentation air & control
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Air Filtration
Fan-Filter Ceiling Module
Air Valve Precision Room Pressure Transducer Isolator (Glove Box) Small Mini-Environment
Product Passthrough
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Cleanrooms in Construction
Finished Cleanrooms
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AHU Unit for Office/ Administration Areas Steam-Hot Water Exchange Unit (Packaged)
Cleanrooms In Operation
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Wall System Wall Panel Paint Ceiling Grid Grid Support Floor Air Return
Honeycomb Aluminum Conductive Finish Epoxy 2 Aluminum Gel Seal Ceiling System All thread with Strut & Turn buckles Raised Floor with Perforated / Grated Access Floor
Purpose
Preventing unnecessary dust concentration in places that will be difficult to reach during later construction.
Responsible party
Method
Standard
Visual-clean.
Contractor. If the construction Vacuum clean upon completion. contractor has no relevant experience in cleanroom cleaning, it is advisable to hire a professional cleaning contractor specializing in cleanroom cleaning. Installation engineer. Vacuum clean; wipe-down piping and fixtures with moistened wipers upon completion. The use of vacuum cleaning and/or other cleaning materials is necessary.
Visual-clean.
Cleaning all visible contamination from Cleaning contractor. ceilings, walls, floors, (filter mountings), etc. after completion of construction and installation activities.
Stage 4 Prepare for Cleaning any dust from ductwork Installation engineer and cleaning air conditioning ductwork sections before installing using a contractor. installation. vacuum cleaner and wipers. Meanwhile, a positive pressure should be introduced to the cleanroom. Stage 5 Clean before mounting all air filters into the system. Stage 6 Mount the (HEPA/ULPA) filters into the air systems Removing deposited or settled dust, or both, from ceilings, walls, and floors. Removing possible contamination caused by the mounting operation. Cleaning contractor. Cleanroom HVAC filter engineer/ technician. Cleanroom HVAC filter engineer/ technician. A professional cleanroom cleaning by personnel specially instructed on regulations, routing and behaviour. Installation engineer and certification engineer.
Vacuum clean; wipe-down piping Visual-clean. and fixtures with moistened wipers. Application of protective floor sealants is generally a particle generating activity. If this is necessary, it should be applied at this time. Vacuum clean; wipe down with Wiper-clean. moistened wipers.
Wipe down with moistened wipers. Clean all surface edges on all sides. Air conditioning air flushing operation. Wipe down with moistened wipers.
Wiper-clean. Wiper-clean.
Stage 7 Adjust the air Removing suspended dust from the conditioning equipment. airflow and creating overpressure installation, including the filters. Stage 8 Upgrade the room into prescribed classification. Stage 9 Approve installation. Removing all deposited and clinging dust from every surface (in order: ceilings, walls, equipment, floors). Verifying the cleanroom to the prescribed design specifications.
Wiper-clean.
Wiper-clean.
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Stage 1 Clean during demolition or preliminary construction such as framing for wall installation. Stage 2 Clean during utility installation.
Preventing unnecessary dust concentration in places that will be difficult to reach during later construction.
Contractor. If the construction Vacuum clean upon completion. contractor has no relevant experience in cleanroom cleaning, it is advisable to hire a professional cleaning contractor specializing in cleanroom cleaning. Installation engineer. Vacuum clean; wipe-down piping and fixtures with moistened wipers upon completion. The use of vacuum cleaning and/or other cleaning materials is necessary.
Visual-clean.
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Visual-clean.
Cleaning all visible contamination from Cleaning contractor. ceilings, walls, floors, (filter mountings), etc. after completion of construction and installation activities.
Vacuum clean; wipe-down piping Visual-clean. and fixtures with moistened wipers. Application of protective floor sealants is generally a particle generating activity. If this is necessary, it should be applied at this time. Vacuum clean; wipe down with Wiper-clean. moistened wipers.
Method
Vacuum clean upon completion. Wipe down with moistened wipers.
Standard
Visual-clean. Wiper-clean.
Wiper-clean.
Visual-clean. Wiper-clean.
Stage 8 Upgrade the room into prescribed Stage 3 Clean during classification. early construction. Stage 9 Approve installation. Stage 10 Clean daily Stage 4 Prepare for and periodically air conditioning ductwork installation.
Removing all deposited and clinging dust from every surface (in order: Cleaning all visible contamination from ceilings, walls, equipment, floors). ceilings, walls, floors, (filter mountings), etc. after completion of construction and installation activities. Verifying the cleanroom to the prescribed design specifications. Customer acceptance.
A professional cleanroom cleaning by personnel specially instructed Cleaning contractor. on regulations, routing and behaviour. Installation engineer and certification engineer.
Wiper-clean.
Visual-clean.
A tailor-made cleaning Wiper-clean. programme for the cleanroom, accounting for the specific demands of the production process Stage 5 Clean before Removing deposited or settled dust, or Cleaning contractor. Wipe down with moistened wipers. Wiper-clean. and the customer. mounting all air filters both, from ceilings, walls, and floors. Routine testing of into the system. critical operation parameters. Stage 6 Mount the Removing possible contamination Cleanroom HVAC filter engineer/ Clean all surface edges on all Wiper-clean. (HEPA/ULPA) filters into caused by the mounting operation. technician. sides. NOTE 1 During Stages 4 to 10, all high-efficiency and ultra-high-purity components, such as filters, ducts, etc., should arrive on site protected by plastic or foil covers on the air systems both ends. Covers should only be removed when ready for use. NOTE 2 During Stages 6 to 10, all activities should be done wearing prescribed cleanroom clothing. Stage 7 Adjust the air Removing suspended dust from the Cleanroom HVAC filter engineer/ Air conditioning air flushing Wiper-clean. conditioning equipment. airflow and creating overpressure technician. operation. installation, including the filters.
Stage 8 Upgrade the room into prescribed classification. Stage 9 Approve installation. Stage 10 Clean daily and periodically Removing all deposited and clinging dust from every surface (in order: ceilings, walls, equipment, floors). Verifying the cleanroom to the prescribed design specifications. Customer acceptance. Maintaining the cleanroom in long-term compliance with designed classification. Microbiological cleaning and testing begins in biocleanrooms. A professional cleanroom cleaning by personnel specially instructed on regulations, routing and behaviour. Installation engineer and certification engineer. Cleanroom manager/cleaning contractor. Wipe down with moistened wipers. Wiper-clean.
Maintaining the cleanroom in long-term Cleanroom manager/cleaning Cleaning any dust from ductwork Installation engineer and cleaning compliance with designed classification. contractor. sections before installing using a contractor. Microbiological and Meanwhile, testing vacuum cleanercleaning and wipers. begins in biocleanrooms. a positive pressure should be introduced to the cleanroom.
Monitor airborne and surface particles, air velocities, temperature and humidity. Listed in F.1 to F.8.
A tailor-made cleaning programme for the cleanroom, accounting for the specific demands of the production process and the customer. Routine testing of critical operation Required Testing (ISO 14644-2) parameters. NOTE 1 During Stages 4 to 10, all high-efficiency and ultra-high-purity components, such as filters, ducts, etc., should arrive on site protected by plastic or foil covers on both ends. Covers should only be removed when ready for use. NOTE 2 During Stages 6 to 10, all activities should be done wearing prescribed cleanroom clothing.
Cleanroom Testing
Maximum Time Interval 6 Months 12 Months 12 Months 12 Months
Test Procedure ISO 14644-1 Annex A ISO 14644-1 Annex B5 ISO 14644-1 Annex B4
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CFD Applications
Cleanroom with 35% FA Floor Panels Narrower Cleanroom with 35% FA Floor Panels
SUBFAB
CHASE
Slab
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Technology Trend Determination of Airflow Rate Based on Particle Generation Rate During Design Phase
Room Particle Concentration versus Air Change Rate (Steady State) - Effect of Internal Particle Generation Rate
1,000,000.0
100,000.0
10,000.0
Internal Particle Generation Rate: G = Rate of impurity generation unit floor area, averaged throughout the space Unit: Particals/FT3/Min.
1,000.0
100.0 G=1 10.0 G=10 G=100 1.0 G=1000 G=10000 0.1 0 100 200 300 400 500 600
Technology Trend Provide Airflow Rate Based on Particle Generation Rate During Operating Phase
Staged Ventilation ACH Rate
VFD Ventilation
The goal is to stage the ventilation rate to maintain the same room cleanliness level through particle sensing during all modes (occupied and unoccupied)
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