Characteristics of atmospheric plasma jet

produced by resonant inverter power supply

M. Nisoa1, D. Srinoum1, P. Kerdthongmee1, C. Umongno2 and

D. Boonyawan2

1Plasma agricultural application research unit, School of

Science, Walailak University, Thailand
2PBPF, Department of Physics, Faculty of Science,

Chiang Mai University, Thailand

 Outline

• Introduction: Atmospheric glow discharges

- Why atmospheric plasmas?
- Principles of atmospheric plasmas
- Current researches

• Atmospheric plasma jet

- Experimental setup
- Discharge characteristics

• Future work
 Atmospheric glow discharge
Why atmospheric?

Walailak University Surfx® Technologies LLC (USA)

• High-density of reactive species at low temperature

• Ion an electron confined to the source, avoiding substrate damage
• Fast uniform treatment of large area
• Operates with wide range of gas chemistries
• No need for vacuum system, easily integrated into other process equipment
 Atmospheric glow discharge
Why atmospheric?

Plasma surface modifications

(C. Tendero and et.al.,
Plasma sterilization Spectrochimica Acta Part B 61, 2006)
of microorganisms
(J. F. Kolb and et.al.,
Applied physics letters 92, 2008)
 Atmospheric glow discharge
Why atmospheric?

Ozoniser
(M. Nisoa and D. Srinoum,
to be published in Walailak journal of
Science and technology )
Atomic emission spectroscopy
(Y. S. Bae, et.al., Journal of the Korean
Physical Society, 48, 2006)
 Atmospheric glow discharge
Principles of atmospheric plasmas?
Breakdown voltage (kV)
Breakdown voltage (kV)

Pressure x electrode distance

Frequency (Hz)

(L. Bardos and H. Barankova, Vacuum, 83, 2009)

 Atmospheric glow discharge
Principles of atmospheric plasmas?

Pulse and RF discharges Microwave discharge

(E Tatarova and et.al.,
(L. Bardos and H. Barankova, Plasma Sources Sci. Technol. 17, 2008.
Vacuum, 83, 2009)
 Atmospheric glow discharge
Researches in atmospheric plasmas?

Why are there no papers from SEA, middle East and Africa countries?
 Atmospheric glow discharge
Principles of atmospheric plasmas?

Pulse and RF discharges Microwave discharge

(E Tatarova and et.al.,
(L. Bardos and H. Barankova, Plasma Sources Sci. Technol. 17, 2008.
Vacuum, 83, 2009)
 Development of power sources at Walailak University
(2002-2009)

Resonant inverter RF power supply

Prf = 0 - 700 W
f = 50 kHz – 800 kHz
Vpeak = 0 - 8 kV
 Development of power sources at Walailak University
(2002-2009)
118 MHz, 300 W RF amplifier module

13/12/51
P In VS P Out
300W Amplifier F=118MHz; IDQ=200mA; VDS=50V
400 100
Power

300 75
POut [W]

PAE [%]
Efficiency
200 50

100 25

0 0
16 18 20 22 24 26 28 30 32
PIn [dBm]
 Development of power sources at Walailak University
(2002-2009)
Microwave 2.45 GHz, 800 W
 Atmospheric plasma jet
Experimental setup
Plastic
 Atmospheric plasma jet
Voltage resonant of the torch

(no plasma)

(no plasma)
(with plasma)
 Atmospheric plasma jet
Dependence of plasma length on gas flowrate

3 kV

5 kV
 Atmospheric plasma jet
Dependence of glass’s temperature on gas flowrate
 Atmospheric plasma jet
Power consumption
 Atmospheric plasma jet
Future researches

• Basic plasma physics

-Diagnostics (Spectroscopy, Charged particles)

- Modeling (Particle dynamics, Particles and energy balance)

• Applications
- Sterilization of fruits and dried fishes
 Acknowledgements

This work has been supported by

Thailand’s excellent center of physics
Solid state power electronics for ASGBD
 Capacitive load RLC resonant circuit

L
R
V(t) Vi 1 VC(t)
0  C 4Vi  sin 3t 
LC V (t )  sin  t   ...
  3 

When  = 0
4Vi
V (t )  sin t

and
4Vi
V0  IX C 
 R0C
 << 0  = 0  >> 0
High-voltage high-frequency load resonant inverter
Power supply for ozoniser
High-voltage high-frequency load resonant inverter
Power supply for ozoniser