Design Rules

Alpana Agarwal
alpana@thapar.edu, alpana.tiet@gmail.com

Electronics & Communication Engineering Department

Thapar University, Patiala

Design Rules
Set of Geometrical Rules Represent a best compromise between performance and yield. Conservative Rules
Better probability of working

Aggressive Rules
Better Performance Less yield

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Alpana Agarwal

Design Rules
Interface between designer and process engineer Guidelines for constructing process masks Gives us
Min width /feature size Min spacing rules Min overlap rules

Unit dimension: Minimum line width

scalable design rules: lambda parameter absolute dimensions (micron rules)
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Scalable Design Rules

Scalable design rules - lambda () parameter:
define all rules as a function of a single parameter scaling of the minimum dimension: change the value of - linear scaling! linear scaling is only possible over a limited range of dimensions (1-3m) are conservative: they have to represent the worst case rules for the whole set for small projects are a flexible and versatile design methodology
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Micron Design Rules

Micron rules - absolute dimensions:
can exploit the features of a given process to a maximum degree scaling and porting designs between technologies is more demanding: manually or using advanced CAD tools!

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CMOS Process Layers

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Intra-Layer Design Rules

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Transistor Layout

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Vias and Contacts

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Select Layers

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CMOS Inverter Layout

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MOSIS Design Rules

Layer Rule Description
Well 1.1 1.2 1.3 Active 2.1 2.2 2.3 2.4 2.5 Width Spacing to well at different potential Spacing to well at same potential Width Spacing to active Source/drain surround by well Substrate / well contact surround by well Spacing to active of opposite type

rule
10 9 6 3 3 5 3 4

to rule = 0.5
5 4.5 3 1.5 1.5 2.5 1.5 2 2 2 2 1 1 1 1 4

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MOSIS Design Rules (contd )

Layer Rule Description
Poly 3.1 3.2 3.3 3.4 3.5 Select 4.1 4.2 4.3 Width Poly-Poly Spacing Gate Extension beyond active Active Extension beyond Poly Spacing of Poly to active Min overlap of active Overlap of Substrate / well contact Spacing to select

rule
2 2 2 3 1 2 1 2

to rule = 0.5
1 1 1 1.5 0.5 1 0.5 1 1 1 1 1 0.5 1 1 1

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MOSIS Design Rules (contd )

Layer Rule Description
Contact (to poly or active) 5.1 5.2 5.3 5.4 5.5 5.6 Metal 1 6.1 6.2 6.3 Width (exact) Overlap by Poly or active Spacing to contact Spacing to gate Spacing of Poly contact to other poly Min overlap of metal 1 Width Min Spacing Min spacing for wider lines > 10

rule
2

to rule = 0.5
11 0.5 1 1 1 0.5 1.5 1.5 2 11 0.5 1 1 1 0.5 1 1 1.5

2
1 2 2 2 1 3 3 4

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MOSIS Design Rules (contd )

Layer Rule Description
Via 7.1 7.2 7.3 7.4 Metal 2 8.1 8.2 Width (exact) Via spacing Min Metal 1 overlap Min Metal 2 overlap Min Width Min Spacing

rule
2

to rule = 0.5
11 1.5 0.5 0.5 1.5 1.5 / 2 0.75 0.75 1.5 0.5 0.5 1 1

2
3 1 1 3

3/4

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Thank You