AS ISO 18115—2006

ISO 18115:2001
ISO 18115:2001/Amd.1:2006
AS ISO 18115—2006

Australian Standard®
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Surface chemical analysis—Vocabulary

 This Australian Standard® was prepared by Committee CH-016, Spectroscopy. It was
approved on behalf of the Council of Standards Australia on 20 September 2006.
This Standard was published on 20 October 2006.

The following are represented on Committee CH-016:

• Australian Chamber of Commerce

• Australian Institute of Physics
• CSIRO Energy Technology
• Department of Defence (Australia)
• Department of Natural Resources and Mines Qld
• National Association of Testing Authorities Australia
• Queensland Health Scientific Services
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Additional Interests:

• Curtin University of Technology

• La Trobe University
• University of Newcastle
• The University of New South Wales
• The University of Queensland
• University of South Australia

This Standard was issued in draft form for comment as DR 06401.

Standards Australia wishes to acknowledge the participation of the expert individuals that
contributed to the development of this Standard through their representation on the
Committee and through public comment period.

Keeping Standards up-

up-to-
to- date
Australian Standards® are living documents that reflect progress in science, technology and
systems. To maintain their currency, all Standards are periodically reviewed, and new editions
are published. Between editions, amendments may be issued.

Standards may also be withdrawn. It is important that readers assure themselves they are
using a current Standard, which should include any amendments that may have been
published since the Standard was published.

Detailed information about Australian Standards, drafts, amendments and new projects can
be found by visiting www.standards.org.au

Standards Australia welcomes suggestions for improvements, and encourages readers to

notify us immediately of any apparent inaccuracies or ambiguities. Contact us via email at
mail@standards.org.au
mail@standards.org.au,
standards.org.au or write to Standards Australia, GPO Box 476, Sydney, NSW 2001.
 AS ISO 18115—2006

Australian Standard®
This is a free 7 page sample. Access the full version at http://infostore.saiglobal.com.

Surface chemical analysis—Vocabulary

First published as AS ISO 18115—2006.

COPYRIGHT
© Standards Australia
All rights are reserved. No part of this work may be reproduced or copied in any form or by
any means, electronic or mechanical, including photocopying, without the written
permission of the publisher.
Published by Standards Australia, GPO Box 476, Sydney, NSW 2001, Australia
ISBN 0 7337 7790 2
 ii

PREFACE

This Standard was prepared by the Standards Australia Committee CH-016, Spectroscopy.This
Standard is identical with, and has been reproduced from ISO 18115:2001, Surface chemical
analysis—Vocabulary and its Amendment 1(2006) which has been added to the end of the
document.
The objective of this Standard is to ensure that the terms and definitions used in surface
analytical techniques describe clearly the same concepts and facilitate the exchange of
information by establishing the use of the correct terms and their definitions.
As this Standard is reproduced from an international standard, the following applies:
(a) Its number appears on the cover and title page while the International Standard number
appears only on the cover.
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(b) In the source text ‘this International Standard’ should read ‘this Australian Standard’.
(c) A full point substitutes for a comma when referring to a decimal marker.
 iii

CONTENTS

Page

INTRODUCTION ................................................................................................................iv

1 Scope...............................................................................................................................1

2 Abbreviations ..................................................................................................................1

3 Format .............................................................................................................................2

4 Definitions of the surface analysis methods .....................................................................2

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5 Definitions of terms for surface analysis ..........................................................................4

Annex A (Informative) Extract from IEC 60050-111, International Electrotechnical

Vocabulary—Chapter 111: Physics and Chemistry ..........................................................50

Bibliography ........................................................................................................................52

Alphabetical index of terms in ISO 18115:2001 ...................................................................53

Amendment 1:

6 Definitions of supplementary terms for surface analysis ..................................................58

Alphabetical index of supplementary terms in this Amendment ............................................71

 iv

INTRODUCTION

Surface chemical analysis is an important area which involves interactions between people with
different backgrounds from different fields. Those conducting surface chemical analysis may be
materials scientists, chemists or physicists and may have a background that is primarily
experimental or primarily theoretical. Those making use of the surface chemical data extend
beyond this group into other disciplines.
With the present techniques of surface chemical analysis, compositional information is obtained
for regions close to a surface (generally within 20 nm) and composition-versus-depth
information is obtained with surface analytical techniques as surface layers are removed. The
surface analytical techniques covered in this International Vocabulary extend from electron
spectroscopy and mass spectrometry to optical spectrometry and X-ray analysis. Concepts for
these techniques derive from disciplines are widely ranging as nuclear physics and radiation
science to physical chemistry and optics.
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The wide range of disciplines and the individualities of national usages have led to different
meaning being attributed to particular terms and, again, different terms being used to describe
the same concept. To avoid the consequent misunderstandings and to facilitate the exchange of
information, it is essential to clarify the concepts, to establish the correct terms for use and to
establish their definitions.
The work for ISO 18115 started with a consideration, inter alia, of ASTM E 673-95a, Standard
terminology relating to surface analysis, and a number of terms retain this reference. Such
definitions have remained essentially unchanged. Some editorial changes have had to be made
in all the cases where this reference appears since the ASTM definition structure differs from
that adopted by ISO. Some other terms from the ASTM standard also appear, but with a revised
text or significantly revised meaning. These terms are not referenced to the ASTM standard.
The terms are given in alphabetical order, classified under three headings:
Clause 4: Definitions of the surface analysis methods.
Clause 5: Definitions of terms for surface analysis.
Clause 6: Amendment 1—Definitions of supplementary terms for surface analysis.
Additional terms, important for surface analysis, are given in an extract from IEC 60050-111 in
Annex A.
A single alphabetical index is given after the Bibliography. To assist retrieval, compound terms
may be found in the index in both natural and reverse word order.
As standards are formulated by Technical Committee ISO/TC 201, Surface chemical analysis,
new terms are defined. It is intended that these terms will be grouped conveniently into a
supplement or supplements to be used with this Standard, until such time as this Standard needs
to be revised when they will be incorporated.
 INTERNATIONAL STANDARD 1 ISO 18115:2001(E)

AUSTRALIAN STANDARD

Surface chemical analysis — Vocabulary

1 Scope
This International Standard defines terms for surface chemical analysis.

2 Abbreviations
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AES Auger electron spectroscopy

CDP compositional depth profile

CMA cylindrical mirror analyser

eV electron volt

EELS electron energy loss spectroscopy

EIA energetic-ion analysis

EPMA electron probe microanalysis

ESCA electron spectroscopy for chemical analysis

FABMS fast atom bombardment mass spectrometry

FWHM full width at half maximum

GDS glow discharge spectrometry

GDOES glow discharge optical emission spectrometry

GDMS glow discharge mass spectrometry

HEISS high-energy ion-scattering spectrometry

HSA hemispherical sector analyser

IBA ion beam analysis

LEISS low-energy ion-scattering spectrometry

MEISS medium-energy ion-scattering spectrometry

ptp peak-to-peak

RBS Rutherford backscattering spectrometry

RFA retarding field analyser

© ISO 2001 – All rights reserved

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© Standards Australia
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AS ISO 18115-2006, Surface chemical analysis -

Vocabulary
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