You are on page 1of 4

Micro Electro Mechanical Systems Thesis: MEMS have a great importance in modern science because of their various types

of components, the high-technology advantages they bring to fabrication and their adaptation to a wide selection of application areas. I. Components of MEMS A. Microsensors 1. Functions and superiorities 2. Application fields B. Microactuators 1. Introduction of micro actuators in the marketplace 2. The working conditions of micro actuators with microsensors C. Microelectronics 1. The role of the microelectronics in a system 2. Advantages of using microelectronics in industry D. Microstructures 1. Considerations made at the design stage 2. Methods and mechanical properties II. MEMS Applications A. Bio MEMS 1. Micro flow Cytometers 2. Using in surgey B. MEMS in Communication 1. Micro electrical mechanical devices in publication devices 2. Micro electrical mechanical devices in satellite C. MEMS in Inertial sensing technology

1. Micro mechanical Gyros 2. Micro mechanical Accelerometers D. MEMS in medicine 1.Enjecting drugs 2.Pressure sensor III. Fabrication A. Bulk Micromachining 1. Wet Etching 2. Vapor-Phase Etching B. Surface Micromachining 1. Material 2. Actuators C. Laser Micromachining 1. Lasers 2. Applications D. Wafer Bonding 1. Hydrophobic High Temperature Bonding 2. Direct Bonding

References Barbour, N., & Schmidt, G. (2001, December). Inertial sensor technology trends. IEEE, 1(4), 332-339 Comtois, J. H., Michalicek, M. A., & Barron, C. C. (1997, June). Fabricating microinstruments in surface micromachined polycrystalline silicon. Paper presented at the meeting of Instrument Society of America, Florida, United States. Elwenspoek, M., & Wiegerink R. (2001). Mechanical microsensors. Berlin: Springer-Verlag. Fiedziuszko, S. J. (n.d.). Applications of MEMS in communications satellites. Retrieved July 9,2012, from http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=914058 Foothill College. (2012). Microelectronics/MEMS/NEMS. Retrieved July 13,2012, from http://fgamedia.org/faculty/rdcormia/NANO52/pdf/MEMS%20Handout.pdf Gilleo, K.(n.d.). MEMS in medicine. Retrieved July 9,2012, from http://www.allflexinc.com/PDF/Medical%20Electronics-MEMS.pdf Gower, M. (2000, July). Industrial applications of laser micromachining. Optics Express. 7(2), 57. Gower, M. (2001, October). Laser micromachining of manufacturing MEMS devices. MEMS components and applications for industry, automobiles, aerospace, and communication. 4559 (2001), 53. Hornbeck, L. J. (1997). Digital Light ProcessingTM for high-brightness. Retrieved July 9, 2012, from http://focus.ti.com/download/dlpdmd/141_hornbeck.pdf Hsu, T. R. (2008). MEMS & microsystems: Design, manufacture, nanoscale (2nd ed.). New Jersey : John Wiley & Sons. Jang, W. I., Choi, C. A., Lee, M. L., Jun, C. H., & Kim,Y. T. (2002, April). Fabrication of MEMS devices by using anhydrous HF gas-phase etching with alcoholic vapor. Journal of Micromechanics and Microengineering, 12(2002), 297.

Ko H.W., Liu C.C., & Mehregany M. (2004). Microsensors & Microactuators. In D. Cristiansen & C. Alexander (Eds.), Standard handbook of electronic engineering (pp. 8.48-8.78). New York: The McGraw-Hill Companies. Kovacs, G. T. A., Maluf, N. I., & Petersen, K. E. (1998, August). Bulk micromachining of silicon. Proceedings of the IEEE. 86(8), 1539-1543. Lee, S., Park, S., & Cho, D.D. (1999, December). The surface/bulk micromachining (SBM) Process: A new method for fabricating released MEMS in single crystal silicon. Journal of microelectromechanical systems. 8 (4), 409. Maluf, N. (2000). An Introduction to microelectromechanical systems engineering. Boston: Artech House. Osiander, R., & Darrin, M. A. G. (2006).Implications of mems and microsystems in aerospace. In R. Osiander, M. A. G. Darrin & J. L. Champion (Eds.), MEMS and microstructures in aerospace applications (pp. 2-4). Boca Raton: Taylor & Francis Group. Rebello, K. J. (2004, January). Applications of MEMS in surgery. IEEE, 92(1), 43-55. Suni T.(2006). Direct wafer bonding of MEMS and microelectronics. Espoo: VTT publication. Thielicke, E., & Obermeier, E. (2000, October). Microactuators and their technologies. Mechatronics, 10(2000), 451. Wang, A.,& Krulevitch, P. (2000). Microdevices in medicine. Annual review of biomedical engineering, 76(2) 551-576 Yu, C., & Shi, L. (2007). Bio-MEMS devices in cell manipulation: Microflow cytometry and applications. In W. Wang & S. A. Soper (eds.), Bio-MEMS technology and applications (pp. 237-262). New York: CRC Press.

You might also like