AGC AG ELECTRONIC MATERIALS. ASU Cea UME e) Synthetic Quartz AQ Wafers Synthetic Quartz wafers exhibit superior properties to both glass and fused quartz wafers. Asahi Glass has reached the pinnicle of synthetic quartz wafers with the development of their AQ wafer. The wafer’s low hydroxy content, along with its ultra Low impurity levels, provide the p-Si TET display device, silicon-on- insulator (SOT), optical devise and biochip manufacturers a stable and cost effective substrate for production, Asahi Glass AQ wafers offer high strength, maximum temperature range and excellent optical transmission properties. This combination allows manufacturers to create new device structures or improve current manufacturing yields to unprecedented levels Asahi Glass also manufacturers SW boro- silicate glass wafers to mateh silicon ‘thermal expansion, along with Aluminum Nitride substrates and Glass Pastes for packaging Available Dimensions ‘100mm square to 200mm square Wafers: 100mm, 150mm, 200mm and 300mm diameter 0.5mm to 3.0mm ee AQ Synthetic Quartz Properties Chemical Siog wt (1) 100 Composition Metalic Impurities pp > Thermal Properties CTE [10*](50-200'¢) 0.8 Softening Point (°C) 1,600 Transformation Point (°C) Strain Point i) 1,000 Optical Properties Refractive Index nD 1.46 Chemical Properties Water Resistance ‘JIS R-3502, Acid Resistance (mg/em*) 0.000 cali Resistance (mg/em*) 0.032 Mechanical Properties Density (g/cm?) 2.20 Young's Modulus (kg/cm?) 7,340 Knoop Microhardness (kg/em®) 650 Electrical Properties Bulk Resistivity _—og(«2-em) at 200°C 12.5 Dielectric Constant at 1MH,RLT. 40 Ac Econ Maat {Bre ns soe libre, oR 97324 AGC soxeec see tone = 503 860720 Flats and notches are avaialable per SEMI standards ius wna 6 ess fo aN TC A see iinnccnatauenencer